Abstract: A rotational operation device includes a rotary shaft, a cam unit that is formed around the rotary shaft and shifts in a rotary shaft direction parallel to the rotary shaft, a rotational operation member rotatable around the rotary shaft, a cam follower in contact with the cam unit, a drive member movable in the rotary shaft direction in accordance with a rotation of the rotational operation member, and a detector configured to measure a distance to the drive member and detect a rotation position of the rotational operation member based on the distance.

Abstract: One U-phase coil portion and the next U-phase coil portion in a circumferential direction, one V-phase coil portion and the next V-phase coil portion in the circumferential direction, and one W-phase coil portion and the next W-phase coil portion in the circumferential direction are electrically connected by conductive junctions, respectively.

Abstract: An apparatus for and a method of bonding a first substrate and a second substrate are provided. In an embodiment a first wafer chuck has a first curved surface and a second wafer chuck has a second curved surface. A first wafer is placed on the first wafer chuck and a second wafer is placed on a second wafer chuck, such that both the first wafer and the second wafer are pre-warped prior to bonding. Once the first wafer and the second wafer have been pre-warped, the first wafer and the second wafer are bonded together.

Abstract: A printer (100) includes a casing (200), an operation section (6), a light emitting section (61), a cover (60), and a pressing member (62). The operation section (6) includes a reference surface (201B), an LCD panel (204) disposed along the reference surface (201B) and displaying predetermined information, and operation keys (202) disposed to protrude though the reference surface (201B). The light emitting section (61) is disposed adjacent to the operation section (6) and emits light based on predetermined notification information. The cover (60) covers the LCD panel (204) and the operation keys (202). The pressing member (62) presses the cover (60) and supports the light emitting section (61).

Abstract: A previewing device that includes a covering member coupled to an imaging surface and a sensing unit operatively coupled to the covering member. The sensing unit is adapted to automatically capture an image corresponding to the imaging surface upon detecting the covering member is in a closed configuration. A preview unit is operatively coupled to the sensing unit is configured to display a preview of image data corresponding to an image on the imaging surface.

Abstract: A measuring apparatus which measures a substrate on which a mark formed with a resist is formed via lithography. An acquisition unit acquires information of an edge interval in an image of the mark under two different measurement conditions, and a calculation unit calculates a defocus value in the lithography based on a difference between the edge intervals of which information is acquired under the two different measurement conditions.

Abstract: A method to measure the height-direction position of a mask M in an exposure device having a function to irradiate the mask M with light emitted from a light source and transfer a pattern formed on the mask M onto a photosensitive substrate such as a wafer by a projection optical system, a mask surface height-direction position measurement method characterized by moving, before measuring the height-direction position of the mask M, an exposure area defining member 1 which is installed between the mask M and the projection optical system and defines an exposure area at the time of exposure.

Abstract: A calibration method for the position calibration of secondary alignment heads with a primary alignment head in a multi-head alignment system, such as that used for the measurement of markers on the surface of a wafer, as carried out during a lithographic process in the formation of circuits in or on the wafer includes making a plurality of offset measurements for at least one of the secondary alignment heads, so that the offset of the secondary alignment heads with respect to the primary alignment head can be measured, and used as correction data in subsequent wafer measurement calculations.

Abstract: A liquid crystal projector device of the present invention includes a lamp unit and a lamp cooling fan, the lamp unit having disposed therein a columnar lamp bulb having a luminous body enclosed therein, the lamp unit having a side wall opposed to the lamp cooling fan and provided with a first and second air introduction openings at opposite sides of a plane including a central axis of the lamp bulb and perpendicular to the side wall, for introducing the air drawn from the lamp cooling fan toward the lamp bulb.

Abstract: A method, for producing a substrate, includes: forming an alignment mark on a first surface of the substrate; detecting a position of the alignment mark; forming a mark by scanning and focusing a laser beam on a position, on a second surface of the substrate, corresponding to the position of the alignment mark, the laser beam having a wavelength so as to pass through the substrate.

Abstract: In an exposure aligning method, a first shift amount indicating a shift amount of a lower layer pattern of an exposure target substrate from an origin point position is determined and a second shift amount indicating a shift amount of the lower layer pattern in at lease one past lot which has been processed before said exposure target substrate is processed, from the origin point position is determined. A third shift amount indicating a difference between the first shift amount and the second shift amount is calculated and a first correction value is determined based on the third shift amount. An exposure position of an exposure target pattern is adjusted based on the first correction value.

Abstract: The focus monitor mark of the present invention includes two dot groups formed with a plurality of dots comprising a resist that is formed in a protruding manner with respect to a wafer surface, and a measurement region. The mark includes a dot pattern mark in which dot groups are arranged so that the dimensions of each dot increase in accordance with an increase in the distance of the dot from the measurement region, two hole groups comprising a plurality of holes formed in the resist on the wafer surface, and measurement region 3. The mark has a hole pattern mark in which each hole is arranged so that the dimensions of each hole increase in accordance with an increase in a distance of the hole from the measurement region.

Abstract: The present invention provides a lithographic apparatus comprising an illumination system for providing a projection beam of radiation. The illumination system comprises at least one movable optical element (7), such that a projection beam of radiation (4) can be shifted around a central position. This ensures that inhomogeneities in the intensity distribution in the projection beam (4) will be smeared out, which in turn provides an improved homogeneity of the exposure of a surface to be illuminated by the system, such as a wafer or other substrate. The optical element (7) may comprise a motor movable mirror, prism, filter, lens, axicon, diffuser, diffractive optical array, optical integrator, etc. The invention further provides a device manufacturing method, using a lithographic apparatus according to the invention, wherein the optical element is moved, in order to provide an optimum homogeneity for the projection beam of radiation.

Abstract: A system and method are used to calibrate a focus portion of an exposure section of a lithography tool. A wafer is exposed so that a resulted or formed patterned image is tilted with respect to the wafer. The tilting can be imposed based on controlling a wafer stage to tilt the wafer or a reticle stage to tilt the reticle. The wafer is developed. Characteristics of the tilted patterned image are measured with a portion of the lithography tool to determine focus parameters of an exposure system. The portion can be an alignment system. The measuring step can measure band width and/or band location of the tilted patterned image. Sometimes, more than one patterned image is formed on the wafer, then the measuring step can measure distance between bands and shifting of the bands with respect to a central axis of the wafer. The focus parameters can be focus tilt errors and/or focus offset. The focus parameters are used to perform calibration.

Abstract: A focus monitor on an alternating phase shift mask may include sub-wavelength features which have a depth corresponding to an etch depth of primary features on the mask (e.g., a 180° etch depth), but which produce an effective phase shift of about 60° to 120°.

Abstract: A system and method are used to calibrate a focus portion of an exposure section of a lithography tool. A wafer is exposed so that a resulted or formed patterned image is tilted with respect to the wafer. The tilting can be imposed based on controlling a wafer stage to tilt the wafer or a reticle stage to tilt the reticle. The wafer is developed. Characteristics of the tilted patterned image are measured with a portion of the lithography tool to determine focus parameters of an exposure system. The portion can be an alignment system. The measuring step can measure band width and/or band location of the tilted patterned image. Sometimes, more than one patterned image is formed on the wafer, then the measuring step can measure distance between bands and shifting of the bands with respect to a central axis of the wafer. The focus parameters can be focus tilt errors and/or focus offset. The focus parameters are used to perform calibration.

Abstract: A photographic lens and test chart provide for a method of inspecting and adjusting the focus of the lens. The test chart is obliquely inclined relative to a plane perpendicular to the viewing axis of the photographic lens. Test photographs are taken of the test chart under low magnification and high magnifications the test photographs enabling the photographic lens to be adjusted for proper focus.

Abstract: Overlay measurements are obtained by forming a first grating test pattern using a first layer mask. A second grating test pattern is formed using a second layer mask. The first and second grating test patterns have the same periodicity. The first and second grating test patterns are measured using an optical metrology equipment. The alignment of the second layer mask to the first layer mask is measured based on the measurement of the first and second grating test patterns.

Abstract: Detecting decay of equipment lens anti-reflective coating (ARC) by detecting undesired residue is disclosed. The undesired residue detected correlates with the decay of the ARC, where a greater amount of undesired residue detected indicates a greater level of the decay. The undesired residue is detected due to stray light reflected by the ARC because of its decay. In the context of semiconductor fabrication equipment, photoresist residue results from negative photoresist on a semiconductor wafer, and may be viewed on one or more scribe lines of a mask within a field of view of the lens of the semiconductor fabrication equipment.

Abstract: Photolithographic processes require alignment of substrate to mask prior to exposure. Alignment accuracy becomes critical as feature size diminishes. For alignment tolerances above 1&mgr;m, off-axis camera-based techniques are acceptable, but require frequent calibration. Through the lens (TTL) on-axis alignment is much preferred, not requiring frequent calibrations and having superior alignment accuracies, even though usually more complicated and expensive. This invention provides a simple, easy to incorporate TTL, on-axis alignment technique for alignment accuracies of 1&mgr;m, such as scan-and-repeat patterning systems that employ a unitary mask-substrate stage and a folded projection imaging system. There is a master alignment mark adjacent to the mask, which is imaged onto a phosphor screen with the same radiation as is to be used for patterning.

Abstract: Provided are a photomask, a method for manufacturing the photomask and a method for measuring optical characteristics of a wafer exposure system, the measuring method using the photomask during manufacture. The photomask includes a substrate and a measuring pattern including a light opaque region pattern formed on the substrate and a plurality of light transmitting region patterns that are formed in regions divided by the light opaque region pattern and provoke phase shifts to provide phase differences to light transmitted through light transmitting regions. Precise measurements of the degree of a focus and lens aberrations of an exposure system using the photomask are obtained.

Abstract: A document scanning system includes a preview sensor that is dedicated to document previewing and distinct from any other sensor that is involved in the document scanning process. The preview sensor is preferably a two-dimensional sensor array that captures the outline of an entire document in parallel. The captured document outline is previewed on a display device relative to an actual image area that is defined by the scanning system. In an enhanced embodiment of the scanning system, the preview sensor captures an image that is printed on the document in addition to the outline of the document, so that the image of the document is also previewed relative to the image area. Providing a dedicated preview sensor that captures document position and image data in parallel enables real-time display of a document relative to the image area.

Abstract: A method and apparatus for document imaging is disclosed. The apparatus uses a flatbed scanner with a selectively opaque/transparent liquid crystal platen. The platen is divided into controllable segments defined by an electrode pattern formed within the platen itself. These segments can each be selectively made transmissive or opaque by applying appropriate voltages to the segment electrodes. An advantage of the invention is that it can operate without a platen cover, since the area of the platen not covered by the original can be made opaque. The opaque part of the platen directs imaging light back into the system, shielding a user's eyes and helping to create a white background if the platen is imaged.

Abstract: A document copy system includes a preview sensor that is dedicated to document previewing and distinct from any other sensor that is involved in the document copying process. The preview sensor is preferably a two-dimensional sensor array that captures the outline of an entire document in parallel. The captured document outline is previewed on a display device relative to an actual print area that is defined by the copy system. In an enhanced embodiment of the copy system, the preview sensor captures an image that is printed on the document in addition to the outline of the document, so that the image of the document is also previewed relative to the print area. Providing a dedicated preview sensor that captures document position and image data in parallel enables real-time display of a document relative to the print area.

Abstract: An object of this invention is to provide an original carrier and an image reader capable of performing a focusing operation every original carrier.To achieve this object, a slit hole 32 extending in a direction perpendicular to a film conveying direction is formed in a width enlarging portion of a film conveying path 34. Focusing charts 58 are formed on faces of a glass plate 38 fitted into the slit hole 32 on sides of the film conveying path 34 in both end portions of the glass plate 38 in its longitudinal direction. When light from a light source is transmitted through the focusing charts 58 of the glass plate 38 and is incident to a line CCD, focusing control is performed by a microprocessor so as to maximize the contrast of an image of each of the focusing charts 58. The focusing control can be also performed so as to maximize the contrast of an image of a photographic film 22.

Abstract: An exposure apparatus for transferring a pattern on a mask onto a photosensitized substrate by exposure, having an illumination optical system, a mask stage for moving the mask and a substrate stage for moving the substrate. An attenuator is disposed between the light source and the photosensitized substrate for attenuating the illumination beam with a variable attenuator rate. A controller controls the output power of the light source and attenuator of the illumination beam such that the exposure energy approaches a predetermined desired value. A stage controller controls the velocities at which the mask stage and the substrate stage are moved for scanning according to the difference between the exposure energy measured by the sensing system and the predetermined desired value.

Abstract: A focus evaluation technique for photolithography equipment is disclosed. This technique includes providing a substrate having a photoresist coating for treatment by the equipment. The equipment is activated to focus a first part of a image on a region of the surface and defocus a second part of the image relative to the region. The region is tilted relative to an image plane defined by the equipment. This activation is repeated for each of a number of spaced-apart regions along the surface. The substrate is processed to provide a pattern for each of the regions corresponding to the first and second parts. The equipment is characterized from the pattern for each of the regions. This characterization may result from inspection of the pattern relative to reference marks provided for each region. Focus information for the equipment which accounts for lens heating may be determined from this inspection.

Abstract: An image sensing apparatus reliably indicates an image sensing area regardless of the size of an object. In the apparatus, illumination units 14 irradiate spot lights 36 on a base 7 to indicate an image sensing area 37 for sensing an original 6 by a camera head 9. The image sensing area indicated by the spot lights 36, irradiated from laser devices 33 of the illumination units 14, attached to the camera head 9, is corresponding to the length/width ratio of the image screen of a monitor 3. A luminance signal level, stored in a memory of a system controller 15, on image sensing the base, is compared with the level of a luminance signal from an image sensing device 25, and when the signal levels do not coincide, it is determined that an original exists on the base. Further, the system controller 15 independently changes first to fourth spot lights 110 to 113 irradiated from the first to fourth illumination units.

Abstract: A method and apparatus for repetitively imaging a mask pattern (C) on a substrate (W) are described. Various parameters of the apparatus and the projection lens system (PL) can be measured accurately and reliably and measuring devices of the apparatus can be calibrated by measuring a latent image of a mark by means of a scanning microscope (LID) forming a diffraction-limited radiation spot (Sp) on the photoresist layer on the substrate (W), in which layer the latent image is formed by means of a projection beam (PB).

Abstract: Disclosed is a template and a method for using the template for focus control of pattern definition image in lithographic process, particularly for IC production. The template has at least a serrated vernier and at least a rhombus printed thereon. In use, the template is mounted on a mask used for pattern definition during a lithographic process. Upon development of a wafer image of the mask, in the normal course of lithography, there is also visible on the wafer an image of the template. This image, particularly the rhombus pattern, can be easily visually inspected by quality control personnel. The rhombus pattern shows a defocus condition because its normally straight and parallel sides and corners show a roundness even with the slightest defocus. Wafers that have not been properly imaged during lithography can be discarded without wasting further process steps in IC production to enhance yield.

Abstract: A lens position control mechanism and method in an image scanner converts a reading line density by changing over lenses. A base rotatable in a plane parallel to an original table is provided, and the lenses are supported on the base so that their optical axes are in a plane parallel to the base surface and intersect each other at a pivot. A proper kind of lens can be arranged at a proper position by controlling the rotation of the base in such a manner that a reference pattern is provided at a position at which it is readable by an image receiving element through the lens and a lens existing in an optical path is judged on the basis of a received image of the reference pattern to confirm the position of the lens. Thereby, an image scanner capable of changing over lenses at a high precision can be obtained without increasing the height of the image scanner.

Abstract: A telephone remote control system for direct control of the dialing sequence of a telephone from a personal computer. The remote control system includes an RF transmitter unit mounted on a personal computer and an RF receiver unit within a phone. The transmitter receives dialing commands from a personal computer and transmits those commands to a receiver unit via an RF signal. The receiver unit receives the dialing commands from the transmitter unit and directly controls the dialing sequence of the telephone.

Abstract: A copying area display device for a copier and allowing the operator to easily position a document on a glass platen. The device displays an effective image reading area which is easy to see. When a cover plate is opened, a carriage included in a scanner is moved to one of four sides of the effective image reading area. Scales, lamps or movable marks are arranged around the glass platen and on the carriage. Alternatively, a liquid crystal display may be built in or superposed on the glass platen to display the contour of an effective image reading area. When the cover plate is closed, the scanner is returned to a home position thereof.

Abstract: An encoder device of the present invention comprises:a motor for driving a photographing lens,a pulse generator operated by a drive force transmitted from the motor to the photographing lens, and generating a coarse pulse signal and a fine pulse signal corresponding to rotation of the motor,counters for counting the coarse pulse signal and the fine pulse signal, respectively,a reset device for resetting the number of the coarse pulse signals counted by the counters when the photographing lens reaches a predetermined position,a motor drive/controller for controlling start and stop of drive of the motor, anda detector for determing a value related to the driven position of the photographing lens upon halting of the driving of the motor based on the number of the coarse pulse signals counted from the predetermined position for resetting and the number of the fine pulse signals counted after a final one of the coarse pulse signals has been output.

Abstract: A reproduction magnification of an image to be reproduced is inputted through a inputting device. A projection optical system is adjusted according to the reproduction magnification, and then projects image light reflected from an original in the form of a slit onto a photosensitive material sheet. As projecting the slit image light, the original and the photosensitive material sheet are synchronously fed each other.

Abstract: An improved linear motor device is disclosed having a vibration reduction unit. The linear motor device can be applied to a copying machine. As a magnetic field forming device receives reaction force and is moved, in the opposite direction to the movement of movable members, vibration is not transmitted to a base frame. The magnetic field forming device is carried to a most suitable position for absorbing the vibration by a driving device employing a pulse motor. A velocity reduction ratio in a velocity reduction mechanism of the driving device is set to be different from a velocity reduction ratio under an ideal condition in which frictional force is neglected. As a result, the magnet field forming device can be driven by a smaller pulse motor.

Abstract: When an input reproduction scale m is equal to a value mla which lies in a reproduction scale section ml, rated moving speeds Ula and U2a corresponding to the reproduction scale m and a resonance point avoidance coefficient kl (=1) are read in, and practical moving speeds Vla (=kl.times.Ula=Ula) and V2a (=k1.times.U2a=U2a) of a holder 2 and a cylindrical drum 10 are determined with the above data. On the other hand, when the input reproduction scale m is equal to a value m2b which lies in another reproduction scale section m2, rated moving speeds Ulb and U2b corresponding to the reproduction scale m and a resonance point avoidance coefficient k2 (.noteq.1) are read in, and practical moving speeds Vlb (=k2.times.Ulb.noteq.U1b) and V2b (=k2.times.U2b.noteq.U2b) are determined with the above data.

Abstract: An image forming apparatus including a copy image forming section for forming a copy image on the basis of an original image under each of a plurality of image forming conditions including a plurality of magnification ratios, a first key for inputing the change of magnification ratio from first magnification ratio to second magnification ratio, a second key for inputing one of the image forming conditions and a microprocessor for setting the second magnification ratio to the magnification ratio in accordance with first changing ratio when only the first key is operated and for setting the second magnification ratio to the magnification ratio in accordance with second changing ratio different from the first changing ratio when both the first key and the second key are operated.

Abstract: A copying machine has an optical unit for forming a latent image on a photosensitive drum which corresponds to an original document supported for copying on a glass table of the copying machine. The copying machine is operable in two copying modes, in which the document is positioned at either a left reference mark on the glass table or at a right reference mark. The optical unit includes four (4) mirrors for scanning the original document and a lens, which are supported for movement on a plurality of carriages. In the left reference mode, a document to be copied is positioned at the left side of the glass table. The first carriage, which supports a first mirror, is moved to scan the document to be copied. A second carriage, which supports a second and third mirror, is also moved during the scanning operation but at one-half the speed of the first carriage. In the right reference mode, a document to be copied is set at the right side of the glass table.

Abstract: A system and method for generating and codifying cropping and enlargement information for a rectangular photograph utilizes at least one transparent overlay and a grid board for underlying the overlay. The overlay includes markings providing a plurality of rectangular windows arranged about a common center and identification indicia for identifying each window and the enlargement multiple necessary to enlarge the window to a predetermined photo size. The grid board has a flat surface bearing a pair of intersecting lines which divide the surface into four quadrants about the center of the board surface, and one quadrant of the board bears a pattern of markings which provides the one quadrant with a two-coordinate grid and indicia for identifying coordinate locations on the grid.

Abstract: A moving apparatus for an optical system is a duplicating machine is arranged as to effect a scanning operation of document images through the movement of two units of mirror platforms respectively. One of the platform moves at a scanning speed while the other platform moves at one half scanning speed. A stator for a polyphase brushless motor is provided along the moving direction of the apparatus on both the side portions of the moving region of each mirror platform. Two sets of rotors of core-less coils operatively react with the stator to form polyphase brushless linear motors. The mirror platforms are driven by the motors at their center of gravity.

Abstract: A copying apparatus capable of divisional copy mode for sheets in which two sheet documents are respectively positioned along two reference edges on a document platen and copy operations for each of documents are conducted on the basis of each of reference edges in response to one copy start instruction.

Abstract: A copier for providing photographic copies of different sized originals, having an optical system variable for altering the magnification of an original, a scale member movable to locate the end of each respective size of original on the copier, and a link mechanism intercoupling the optical system and the scale to automatically vary the system magnification in accordance with the location of the scale.

Abstract: The present invention relates to a copying apparatus capable of executing a plurality of different copy modes, especially a binding margin forming copy mode for making a binding margin on a copy to be formed and an anamorphic magnification copy mode for magnifying or reducing an image to be formed in one direction, i.e., in the lengthwise direction or in the widthwise direction.In a copying apparatus of the present invention, when the binding margin forming copy mode or anamorphic magnification copy mode is selected, an increment-decrement key input means used for a copy mode other than said selected copy mode is enabled to become input means for setting numerical values to set condition for the selected copy mode.

Abstract: An analog copying apparatus for optically exposing an original and copying it onto an arbitrary copy area on a copy paper has an area designating function and comprises: an image area designating apparatus to designate an arbitrary area on the original; a copy area designating apparatus to designate an arbitrary area on the copy paper; and copying means for copying the image in the image area into the copy area. This copying apparatus further has: an original moving apparatus to move the original on an original plate; a lens moving apparatus to move a lens provided in the optical path in an arbitrary direction; a cassette moving apparatus to move a cassette in which the copy papers are enclosed; and a resist control apparatus to control the resist timing, wherein the image in the image area is copied onto the copy area by means of at least one of or a combination of a plurality of these apparatuses.

Abstract: An image forming apparatus is provided with a pair of pointers for indicating a range for image formation on an original table. The pointers, which are driven by a pulse motor, can move in a direction perpendicular to the moving direction of an optical system for optically scanning the original. A stopper is attached to at least one end portion of a minimum range for image formation indicated by the pointers. The stopper serves to stop the pointer at position indicating the minimum range. In setting the initial positions of the pointers, pulse output means supplies the pulse motor with a necessary number of pulses for the movement of the indicating means from the minimum-range position to the maximum-range position, thereby causing the pointers to move to a position abutting the stopper.

Abstract: An image forming apparatus is provided with a pair of pointers for indicating a range for image formation on an original table. The pointers, which are driven by a pulse motor, can move in a direction perpendicular to the moving direction of an optical system for optically scanning the original. A stopper is attached to at least one end portion of a minimum range for image formation indicated by the pointers. The stopper serves to stop the pointer at position indicating the minimum range. In setting the initial positions of the pointers, pulse output means supplies the pulse motor with a necessary number of pulses for the movement of the indicating means from the minimum-range position to the maximum-range position, thereby causing the pointers to move to a position abutting the stopper.

Abstract: Method and apparatus for determining the trimmed image of originals for reproduction with opto-electrical original scanning wherein a mask is produced before the actual original scanning and the mask includes clearance for receiving the original therein. The mask and original are adjusted with respect to the desired trimmed image and the angular position by placing it in a projection head of an apparatus for scale identification wherein the holder of the original can be removed from the projection head of the apparatus and hinged downwardly for performing these functions.

Abstract: The preferred embodiments provide a copying machine having a variable magnification copying function which includes a circuit for detecting or entering the length of each side of an irregular-sized document and a calculating circuit for operating the magnification ratio using the length of each side of the irregular-sized document and the length of each side of the set copy paper; a copying machine having a picture position setting function which includes a second operating circuit which calculates the product of the length of the lateral side of a document and the above-mentioned magnification ratio and further determines the difference between this operation result and the length of the lateral side of the copy paper; a display circuit for displaying this operation result as an allowable blank range, a circuit for distributing the blank spaces to the left and right sides, the allowable blank range displayed by this display circuit and a circuit for controlling the timing of copy paper feeding in response to

Abstract: The present invention provides a magnification control device for use to a copying machine in which the area magnification as well as the linear magnification can be set by the operator. The linear magnification can be converted to the area magnification and also, the area magnification can be converted to the linear magnification. The area magnification is determined based on the area of the copying paper and that of the original.