Detailed Holder For Original Patents (Class 355/75)
  • Patent number: 11333984
    Abstract: Methods and systems are described for reducing particles in the vicinity of an electrostatic chuck (300) in which a cleaning reticle or substrate (320) is secured to the chuck, the cleaning reticle or substrate having surfaces partially devoid of conductive material so that an electric field from the chuck can pass through to a volume adjacent the substrate to draw particles (360) in the volume to the surface of the substrate. Voltage supplied to the chuck may have an alternating polarity to enhance the attraction of particles to the surface.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: May 17, 2022
    Assignees: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Richard Joseph Bruls, Ronald Peter Albright, Peter Conrad Kochersperger, Victor Antonio Perez-Falcon
  • Patent number: 11320751
    Abstract: An apparatus, which may form part of a lithographic apparatus, comprises a substrate table, a projection system, a gas lock and a gas flow guide. The substrate table is suitable for supporting a substrate. The projection system has a body which defines an interior and an opening. The projection system is configured and arranged to project a radiation beam through the opening onto a substrate supported by the substrate table. The gas lock is suitable for providing a gas flow from the opening away from the interior. The gas flow guide is configured to guide at least a portion of the gas flow away from the substrate supported by the substrate table.
    Type: Grant
    Filed: January 18, 2019
    Date of Patent: May 3, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Güneş Nakibo{hacek over (g)}lu, Dries Vaast Paul Hemschoote, Remco Yuri Van de Moesdijk
  • Patent number: 11314176
    Abstract: An apparatus for containing a substrate and a method of manufacturing the apparatus are provided. The apparatus for containing a substrate includes: a base having a periphery and an upward-facing top horizontal planar surface with a plurality of contact elements, the contact elements being used for engaging the substrate to hold the substrate upon the upward-facing top horizontal planar surface, an upward-facing frame-like support surface extending from the upward-facing top horizontal planar surface and surrounding the contact elements at a position proximate to the periphery of the base; and a cover having a downward-facing frame-like support surface being in large-area contact with the upward-facing frame-like support surface to define a cavity for containing the substrate between the base and the cover. The downward-facing and upward-facing frame-like support surfaces in contact with each other are not at the same level as the upward-facing top horizontal planar surface.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: April 26, 2022
    Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
    Inventors: Chia-Ho Chuang, Hsin-Min Hsueh, Ming-Chien Chiu
  • Patent number: 11242214
    Abstract: A converting machine is used to convert sheet material into packaging templates for assembly into boxes or other packaging. The converting machine includes a converting assembly that performs transverse conversion functions and longitudinal conversion functions on the sheet material to create the packaging templates. A fanfold crease sensing mechanism detects the presence and location of fanfold creases in the sheet material. Based on the location of the fanfold creases, the fanfold creases are either cut out of the sheet material, or the sheet material is cut to adjust the position of the fanfold crease in a packaging template.
    Type: Grant
    Filed: January 16, 2018
    Date of Patent: February 8, 2022
    Assignee: PACKSIZE LLC
    Inventor: Ryan Osterhout
  • Patent number: 11169093
    Abstract: The present invention provides a chemiluminescence detector, which comprises an image capture device sensitive to chemiluminescence located within a container. The container has an array of apertures located in a field of view of the image capture device, and each aperture is defined by a through-bore in a wall of the container. The exterior of the container is engagable with a plurality of sample holders, each sample holder being in alignment with a respective aperture when engaged with the exterior of the container. The passage of light into the container through each aperture is restrictable by a closure device, passage of light into the container through the apertures is thereby controllable.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: November 9, 2021
    Assignee: Randox Laboratories Ltd.
    Inventors: Stuart Jackson, Ivan McConnell, Peter Fitzgerald
  • Patent number: 11172080
    Abstract: A peripheral includes a body, an image processing device and a processor. The body includes a sub-housing and a second button. The sub-housing includes a control component. The control component includes a first button disposed on an upper surface of the sub-housing. The second button and the first button are disposed on different adjacent surfaces. The image processing device is disposed above or in the body. The image processing device is disposed above the body. The processor controls a first signal generated by the first button to be the same as a first signal generated by the second button. The sub-housing is disposed on an upper lateral side of the body.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: November 9, 2021
    Assignee: AVISION INC.
    Inventors: Shao-Lan Sheng, Chia-Ching Lin, Xiang Chi Lee
  • Patent number: 11146702
    Abstract: A recording apparatus includes: an apparatus main body having a recording unit that performs recording onto a recording medium; and a document reading mechanism unit having a reading unit that reads a document and a document transport unit that transports a document to the reading unit, the document reading mechanism unit being provided in an upper part of the apparatus main body, wherein the apparatus main body includes: a feed roller that feeds the recording medium toward the front of the apparatus; and a frame having a frame surface intersecting the horizontal direction, the frame being located between the feed roller and the recording unit in an apparatus depth direction, and a part of the document reading mechanism unit overlaps the feed roller in the apparatus depth direction, and overlaps the frame in the vertical direction.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: October 12, 2021
    Assignee: Seiko Epson Corporation
    Inventors: Shintaro Miyamoto, Keisuke Sasaki, Koichi Kikuchi
  • Patent number: 11036173
    Abstract: An image reading device includes a reading main unit including a document platen capable of being loaded with a document, a document cover configured to press the document against the document platen, and a hinge mechanism configured to move between a first position and a second position with respect to the reading main unit, wherein the reading main unit includes a first abutment portion capable of abutting the document cover, and wherein an open angle of the document cover with respect to the document platen is regulated to a first angle by abutment between the document cover and the first abutment portion when the hinge mechanism is in the first position, and the open angle is regulated to a second angle larger than the first angle by a regulation portion provided in the hinge mechanism when the hinge mechanism is in the second position.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: June 15, 2021
    Assignee: Canon Kabushiki Kaisha
    Inventors: Masahiro Kawanishi, Kazuyuki Morinaga
  • Patent number: 11018037
    Abstract: An apparatus configured to load or unload a mask pod includes a first load port supporter and a second load port supporter spaced apart from the first load port supporter. Each of the first load port supporter and the second load port supporter includes at least portions of an L-shaped rectangular prism. The first load port supporter and the second load port supporter are disposed diagonally around a rectangular area, where first inner sidewalls of the first load port supporter and second inner sidewalls of the second load port supporter delimit boundaries of the rectangular area, and where a first width of the rectangular area is equal to a second width of the mask pod, and a first length of the rectangular area is equal to a second length of the mask pod.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: May 25, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Ching Lee, Yu-Piao Fang
  • Patent number: 10775694
    Abstract: The present disclosure provides an apparatus for mounting a pellicle to a photomask, including a cover having a first side and a second side opposite to the first side, wherein the second side is configured to face the photomask, and an air pad disposed between the first side and the second side, wherein the air pad comprises a compartment filled with air.
    Type: Grant
    Filed: April 30, 2019
    Date of Patent: September 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tzu Han Liu, Chih-Wei Wen, Chung-Hung Lin
  • Patent number: 10714371
    Abstract: A reticle holding tool is provided. The reticle holding tool includes a housing including a top housing member and a lateral housing member. The lateral housing member extends from the top housing member and terminates at a lower edge. The reticle holding tool further includes a reticle chuck. The reticle chuck is positioned in the housing and configured to secure a reticle. The reticle holding tool also includes a gas delivery assembly. The gas delivery assembly is positioned within the housing and configured to supply gas into the housing.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: July 14, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin Chou, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng, Che-Chang Hsu
  • Patent number: 10681238
    Abstract: An image forming apparatus includes: a light source that irradiates a document with light; a hardware processor that controls lighting of the light source; a cover that is opened and closed with respect to a document platen on which a document is placed; and a detector that detects a person. When the detector detects a person and when an open angle of the cover is a predetermined angle or less, the hardware processor turns on the light source.
    Type: Grant
    Filed: May 29, 2019
    Date of Patent: June 9, 2020
    Assignee: Konica Minolta, Inc.
    Inventor: Takehisa Nakao
  • Patent number: 10498913
    Abstract: There is provided an image forming apparatus including a scanner unit configured to be openable on an apparatus front side with respect to a printer unit due to a first hinge portion on an apparatus rear side, a cover to cover a feed port configured to be openable due to a second hinge portion on the apparatus front side of the feed port, wherein a rotation axis of the first hinge portion is positioned on the apparatus rear side of a rotation axis of the second hinge portion in an apparatus depth direction. Interlocking with an operation to open the scanner unit, the cover moves while a portion thereof is in contact with a surface of the paper feed tray or the sheet placed thereon to open the cover in an interlocking manner.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: December 3, 2019
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yasushi Ishida, Haruo Uchida, Mitsuyuki Fujibayashi, Izumi Fujiwara
  • Patent number: 10491771
    Abstract: An image reading apparatus, having a body, a feeder tray, a conveyer, a first reader, and a shifting device, is provided. The body includes a first inlet, a second inlet, and a conveyance guide. The feeder tray being at a closed position covers the first inlet and the feeder tray being at an open position exposes the first inlet. The conveyer conveys a readable medium guided by the conveyer guide. The first reader reads an image on a first side of the readable medium conveyed by the conveyer. The shifting device shifts the first reader to a first position in a case where the feeder tray moves from the closed position to the open position and to a second position in a case where the feeder tray moves from the open position to the closed position.
    Type: Grant
    Filed: December 20, 2018
    Date of Patent: November 26, 2019
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Katsuro Miura, Tianjin Xie, Satoshi Miyase
  • Patent number: 10486924
    Abstract: An image reading apparatus includes a document platen on which a document is to be stacked, a pressing sheet having flexibility, a conveyance unit provided in a base member, an open portion provided in the base member and rotatable in a first direction with respect to the base member to open at least a part of the conveyance path, and a rotation member rotatable in the first direction with respect to the base member. The pressing sheet presses the document against the document platen. The conveyance unit forms a conveyance path within which the document is to be conveyed. The reading unit reads the document conveyed by the conveyance unit. The open portion retains one end of the pressing sheet in a longitudinal direction. The rotation member retains the other end of the pressing sheet in the longitudinal direction.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: November 26, 2019
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tsuyoshi Yoshida
  • Patent number: 10481540
    Abstract: A scanner cover including a first plate and a second plate is provided. The first plate has a first surface; multiple compressible and deformable elastic structures are arranged protruding on the first surface. The second plate is stacked on the first plate and the second plate has a second surface facing to the first surface, the elastic structures are contacted with the second surface, and deformation of each elastic structure is contained in the second plate while the elastic structures are compressed. While the first plate and the second plate are pressed to move close to each other, the elastic structures are compressed and a restoring force is thereby provided between the first plate and the second plate.
    Type: Grant
    Filed: June 21, 2017
    Date of Patent: November 19, 2019
    Assignee: KINPO ELECTRONICS, INC.
    Inventors: Tzu-Cheng Chang, Shih-His Chiang, Hung-Huan Sung
  • Patent number: 10475038
    Abstract: A system including: a document holder configured to receive a document; one or more optical sensors directed toward the document holder; one or more processors; and at least one memory having stored thereon computer program code that, when executed by the processor, instructs the processor to: control the one or more optical sensors to capture a plurality of images of the document within the document holder; identify a feature of the document within each of the plurality of images, the feature having visual characteristics that differ based on an angle at which the feature is viewed; and output, in response comparing the respective visual characteristics of the feature of the document in each of the plurality of images to corresponding expected visual characteristics of the feature for the document, an indication of a verification of the document.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: November 12, 2019
    Assignee: CAPITAL ONE SERVICES, LLC
    Inventors: Kevin Osborn, Daniel Marsch
  • Patent number: 10437142
    Abstract: A support frame for a pellicle includes a frame body made of an aluminum alloy. The frame body has: a top surface onto which a pellicle film is bonded; and an underside surface onto which a transparent substrate is bonded. A material of which the frame body is made has a Young's modulus larger than that of which the transparent substrate is made. The structure described above makes it possible to reduce deformation of the transparent substrate.
    Type: Grant
    Filed: March 2, 2016
    Date of Patent: October 8, 2019
    Assignee: NIPPON LIGHT METAL COMPANY, LTD.
    Inventors: Akira Iizuka, Koichi Nakano, Hayato Kiyomi, Kazuhiro Oda, Tomohiro Isobe
  • Patent number: 10404883
    Abstract: An image reading apparatus includes: a reader; a first conveyance roller pair; a second conveyance roller pair; and a hardware processor that lowers a conveying force exerted from the second conveyance roller pair on a sheet when acceleration control for accelerating a conveying speed of the sheet whose image has been read by the reader is performed, compared with a case in which the acceleration control is not performed.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: September 3, 2019
    Assignee: KONICA MINOLTA, INC.
    Inventor: Tsutomu Anezaki
  • Patent number: 10397412
    Abstract: An apparatus includes an obtaining unit configured to obtain first image data obtained by reading, performed by a reading unit, a chart on which an image has not been formed by an image forming unit and second image data obtained by reading, performed by the reading unit, a chart formed by the image forming unit, and an estimation unit configured to change the second image data using the first image data and estimate a cause of an abnormality that has occurred in the image forming unit from a feature amount obtained by analyzing the changed image data.
    Type: Grant
    Filed: May 24, 2017
    Date of Patent: August 27, 2019
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Daiki Ikari
  • Patent number: 10389899
    Abstract: A document pressing unit is openable with respect to an apparatus body including a placement portion on which a document is placed, and is configured to press the document from above. The document pressing unit includes a body frame, a pair of hinge units, a pair of metal fixing members, and fastening screws. The body frame is able to press the document. The hinge units respectively include hinge legs mounted on the apparatus body, and are mounted with a certain distance in a left-right direction on a rear end of the body frame to openably support the body frame with respect to the apparatus body. The fixing members fix the hinge units to the body frame, respectively. The fastening screws fasten the fixing member and the hinge unit through the body frame so that the fixing member and the hinge unit sandwich the body frame in an up-down direction.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: August 20, 2019
    Assignee: KYOCERA Document Solutions Inc.
    Inventor: Katsuhiko Hanamoto
  • Patent number: 10356268
    Abstract: An image reading device includes an image reading unit, a conductive member, a switching portion, and a switching control portion. The image reading unit includes a light emitting portion and a light receiving portion. The light emitting portion irradiates light on a document sheet that is conveyed while in contact with an upper surface of a plate-like contact member. The light receiving portion outputs image data corresponding to light reflected from the document sheet. The conductive member is provided on a lower surface of the contact member. The switching portion is switched between an on-state and an off-state so as to select between a state where the conductive member is grounded or a state where the conductive member is not grounded. The switching control portion controls switching of the switching portion.
    Type: Grant
    Filed: September 20, 2017
    Date of Patent: July 16, 2019
    Assignee: KYOCERA Document Solutions Inc.
    Inventor: Masatoshi Masuda
  • Patent number: 10340131
    Abstract: A method of cleaning an ion source. The method includes: at a first reflective surface of a mirror, reflecting light that has a wavelength in a first wavelength band onto a surface of the ion source so that contaminant material is desorbed from the surface of the ion source; at a second reflective surface of the mirror, reflecting light that has a wavelength in a second wavelength band and that comes from the surface of the ion source towards an imaging apparatus for producing an image of the surface of the ion source, wherein the light that has a wavelength in the second wavelength band passes through the first reflective surface of the mirror before being reflected at the second reflective surface of the mirror.
    Type: Grant
    Filed: September 21, 2015
    Date of Patent: July 2, 2019
    Assignee: KRATOS ANALYTICAL LIMITED
    Inventor: John Mark Allison
  • Patent number: 10241388
    Abstract: An image reading apparatus comprises a housing having a document table glass, a scanner section, a cover member, an adsorption board, a driving section and a controller. The cover member is connected to the housing to be rotatable around a first rotation center line with respect to the housing between a closed position where the document table glass is covered and an open position. The adsorption board, arranged in a part at a housing side at the time the cover member is positioned at the closed position, has an adsorption surface adsorbing the original document, and is connected to the cover member to be rotatable around a second rotation center line parallel to the first rotation center line. The driving section adsorbs the original document on the adsorption surface of the adsorption board.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: March 26, 2019
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA TEC KABUSHIKI KAISHA
    Inventor: Sho Koike
  • Patent number: 10236203
    Abstract: A lithographic apparatus substrate table comprises a plurality of first projections, whereby the first projections define a first substrate supporting plane and a plurality of second projections, whereby the second projections define a second substrate supporting plane. The substrate table further comprises a clamping device configured to exert a clamping force onto the substrate. The second substrate supporting plane is parallel to the first substrate supporting plane. The second substrate supporting plane is offset in respect of the first substrate supporting plane in a direction perpendicular to the first and second substrate supporting planes. The lithographic apparatus substrate table is configured to support the substrate on the second projections at the second substrate supporting plane before application of the clamping force by the clamping device.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: March 19, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Mahdiar Valefi, Raymond Wilhelmus Louis Lafarre
  • Patent number: 10126700
    Abstract: An image forming apparatus has an apparatus main body, a cover member, and a coupling member. The cover member is openable and closable relative to a side face of the apparatus main body. The coupling member couples the apparatus main body and the cover member together and is arranged inside the cover member when the cover member is closed. The coupling member is rotatable about a first rotation pivot relative to the apparatus main body. The cover member is rotatable about a second rotation pivot relative to the coupling member. When the cover member is opened relative to the apparatus main body, the rotation center of the cover member switches between the first and second rotation pivots during the opening operation of the cover member.
    Type: Grant
    Filed: January 26, 2017
    Date of Patent: November 13, 2018
    Assignee: KYOCERA Document Solutions Inc.
    Inventor: Tsuyoshi Koyanagi
  • Patent number: 10114284
    Abstract: According to an embodiment, a method for designing a mask set is provided. In the method for designing the mask set, an imprint-alignment mark is arranged in a region other than a chip region in an imprint shot formed in a template. The imprint-alignment mark is used for alignment during an imprint. Subsequently, the shape of the imprint shot is set based on an arrangement position of the imprint-alignment mark. Subsequently, another pattern is arranged in a region where the region is other than the chip region in the imprint shot and the imprint-alignment mark is not arranged. The other pattern is used in a process other than the imprint.
    Type: Grant
    Filed: December 24, 2013
    Date of Patent: October 30, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Shinichiro Nakagawa, Masafumi Asano
  • Patent number: 10116809
    Abstract: An image processing apparatus obtains image data by photographing a document which is put on a document plate. The apparatus includes an obtaining unit and a correction unit. The obtaining unit photographs the document plate and obtains calibration image data. The correction unit uses the calibration image data obtained by the obtaining unit, so as to correct the image data obtained by photographing the document which is put on the document plate.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: October 30, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventor: Takeshi Matsumura
  • Patent number: 10108084
    Abstract: A pellicle membrane includes a film consisting of an organic material and an inorganic material, wherein a region containing an organic material and a region consisting of an inorganic material are present in the same plane of the film, and wherein at least a central portion of the film is a region consisting of an inorganic material, and at least a peripheral edge portion of the film is a region containing an organic material.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: October 23, 2018
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Yosuke Ono, Kazuo Kohmura
  • Patent number: 10101651
    Abstract: A photo mask assembly including a photo mask, a first adhesive layer adhered with the photo mask, a pellicle frame and a pellicle is provided. The pellicle frame includes a plurality of recesses for accommodating the first adhesive layer. The pellicle frame is adhered with the photo mask through the first adhesive layer accommodated in the plurality of recesses. The pellicle is disposed on the pellicle frame. The pellicle frame is between the pellicle and the first adhesive layer. An optical apparatus including the above-mentioned photo mask assembly is also provided.
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: October 16, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: SHao-Chi Wei, Cheng-Ming Lin, Sheng-Chang Hsu, Yu-Hsin Hsu, Hao-Ming Chang
  • Patent number: 10031412
    Abstract: A pellicle assembly is provided. The pellicle assembly includes a frame and a membrane connected to the frame. The pellicle assembly also includes housing connected to the frame. The pellicle assembly further includes capping member passing through an upper opening of the housing and movable along a longitudinal axis of the housing. In addition, the pellicle assembly includes fastening member connected to the capping member and movable along a direction that is perpendicular to the longitudinal axis. When the capping member is in a released position, the fastening member is located within the housing, and when the capping member is in a fastening position, a portion of the fastening member is moved to the outside of the housing for fixing a mask.
    Type: Grant
    Filed: April 19, 2017
    Date of Patent: July 24, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Ching Lee, Yu-Piao Fang
  • Patent number: 10012945
    Abstract: A base portion includes a cam surface formed around a support pin. A turning portion includes: a slide member provided movably in directions toward and away from the support pin; and a coil spring urging the slide member. The slide member is designed to slide on the cam surface while turning, together with an openable body, about the support pin. The cam surface includes a first sliding surface, a second sliding surface, and a third sliding surface. The first sliding surface presses the slide member back in a direction of closing of the openable body. The second sliding surface presses the slide member back in a direction of opening of the openable body. The third sliding surface presses the slide member back in the direction of closing of the openable body.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: July 3, 2018
    Assignee: KYOCERA Document Solutions Inc.
    Inventor: Katsuhiko Hanamoto
  • Patent number: 10009510
    Abstract: A scanner is disclosed. The scanner has a background pattern that is captured as part of the scanned image. The scanner may be a flatbed scanner, a sheet-feed scanner, or a flatbed scanner using an automatic document feeder (ADF).
    Type: Grant
    Filed: April 29, 2014
    Date of Patent: June 26, 2018
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Di-Yuan Tzeng, Dennis J Schissler, Craig T Johnson, Patrick J Chase
  • Patent number: 9964862
    Abstract: An apparatus for bearing a lithography mask with a reticle stage includes a resting support holder for the lithography mask. The resting support holder has bearing points which bear the lithography mask. Optionally, the resting support holder optionally has exactly four bearing points. An associated method adjusts the height of the fourth bearing point until all bearing points bear the same supporting force.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: May 8, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Albrecht Hof
  • Patent number: 9829803
    Abstract: A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of a thin film stack forming an electronic component. The planarization layer is of substantially uniform thickness and/or its outer surface has a peak to valley distance of less than 10 ?m. The planarization layer may be formed by applying two solutions of different concentration. A surface treatment may be applied to the burls to repel a solution of the planarization layer material.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: November 28, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft
  • Patent number: 9832331
    Abstract: An image reading apparatus includes first and second image reading units, and first and second transparent guides disposed along a conveyance path and guiding a document passing through a conveyance path. The first and second transparent guides are disposed to oppose to each other across the conveyance path. The image reading apparatus also includes a grounding portion provided on one of the first and second transparent guides and a conductive portion electrically connecting the first and second transparent guides with each other.
    Type: Grant
    Filed: May 16, 2016
    Date of Patent: November 28, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Akio Ogasawara
  • Patent number: 9817306
    Abstract: The present invention relates to an EUV pod having marks, which comprises a mask pod and one or more mark disposed on the mask pod. One or more sensor of a processing machine is used for detecting the one or more mark. By including the one or more mark, the surface roughness of one or more region of the mask pod detectable by the one or more sensor can be altered. The one or more sensor emits light to the mask pod, which reflects the light to the one or more sensor. The one or more sensor receives the reflection light from the mask pod and judges if the voltage generated by the reflection light falls within the reflection ranges of the mark. Thereby, whether the one or more sensor corresponds to the one or more make can be confirmed.
    Type: Grant
    Filed: September 23, 2015
    Date of Patent: November 14, 2017
    Assignee: Gudeng Precision Industrial Co., Ltd.
    Inventors: Wei-Yen Chen, Cheng-Ju Lee, Long-Ming Lu, Cheng-Hsin Chen, Tien-Jui Lin
  • Patent number: 9760024
    Abstract: Embodiments of the present disclosure provide a mask device, an exposure apparatus and an exposure method, which enable a reduction in the possibility that the mask is scratched during exposure so as to protect the mask, and in turn a reduction in production cost of the semiconductor devices. The mask device comprises a mask carrier, a mask disposed on a lower surface of the mask carrier, and at least one protection unit provided on the mask carrier, wherein a lower end of the at least one protection unit is arranged to be lower than the lower surface of the mask during exposure. The mask device is applicable in exposure of a substrate to be exposed.
    Type: Grant
    Filed: July 22, 2015
    Date of Patent: September 12, 2017
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Bin Wu, Zhongxing Yu
  • Patent number: 9699326
    Abstract: An apparatus includes an obtaining unit configured to obtain first image data obtained by reading, performed by a reading unit, a chart on which an image has not been formed by an image forming unit and second image data obtained by reading, performed by the reading unit, a chart formed by the image forming unit, and an estimation unit configured to change the second image data using the first image data and estimate a cause of an abnormality that has occurred in the image forming unit from a feature amount obtained by analyzing the changed image data.
    Type: Grant
    Filed: November 19, 2014
    Date of Patent: July 4, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Daiki Ikari
  • Patent number: 9645487
    Abstract: Here is proposed a method for bonding a pellicle to a stencil such as mask plate, which is characteristic in that the stencil-bonding agglutinant layer of the pellicle is warmed under load while the pellicle is being bonded to the stencil, preferably at a temperature in a range of 35 through 80 degrees C., and the load is increased stepwise and with intermittent removal of the load.
    Type: Grant
    Filed: November 7, 2014
    Date of Patent: May 9, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Yuichi Hamada
  • Patent number: 9612529
    Abstract: A pellicle is proposed in which the frame is formed with an external horizontal slit for the purpose of receiving a pressing means, which can urge the pellicle to be adhered to a photomask, in which the slit forms a vertically protruding part of a thickness of 5-30% of the width of a pellicle frame main body and a horizontally protruding part of a thickness of 0.3-1 mm; also the method of adhering the pellicle to the photomask is proposed.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: April 4, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Kazutoshi Sekihara
  • Patent number: 9522799
    Abstract: Provided is a transport device including plural rollers that are provided on a transporting path on which a sheet is transported in a transport direction and is subjected to a process at a process position, and transport the sheet which comes into contact with surfaces of the rollers in the transport direction by rotation of the rollers, among the plural rollers, first rollers that are provided closest to the process position, among the plural rollers, second rollers that are provided closest to the first rollers on an opposite side with respect to the process position, and a driving unit that drives the first rollers and the second rollers to rotate so that a speed of a surface of the first roller is faster than a speed of a surface of the second roller at least while the sheet passes through the process position.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: December 20, 2016
    Assignee: FUJI XEROX CO., LTD.
    Inventors: Masaki Hachisuga, Takao Furuya, Seigo Makida, Kazuya Fukunaga, Takashi Hiramatsu, Kiyofumi Aikawa, Hideki Moriya, Michio Kikuchi
  • Patent number: 9519167
    Abstract: A method of forming a pattern may include: disposing a first material layer; disposing a first photoresist film including first shot regions; exposing the first shot regions to light, wherein an overlapping region between first shot regions may be overlappingly exposed to light exposures onto the first shot regions; forming a first photoresist pattern by developing the first photoresist film; forming a first pattern by etching the first material layer using the first photoresist pattern as an etching mask; disposing a second material layer on the first pattern; disposing a second photoresist film including second shot regions; exposing the second shot regions, wherein a boundary region between second shot regions may be disposed spaced apart from the overlapping region; forming a second photoresist pattern by developing the second photoresist film; and forming a second pattern by etching the second material layer using the second photoresist pattern as an etching mask.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: December 13, 2016
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jung-Mi Choi, Dae-Hyun Noh
  • Patent number: 9470984
    Abstract: An exposure apparatus that can prevent disadvantages due to a leaked liquid is provided. The exposure apparatus includes a substrate holder that includes a peripheral wall portion and supporting portions located on an inside of the peripheral wall portion and that supports a substrate with the supporting portions by negatively pressurizing a space surrounded by the peripheral wall portion, and a recovery mechanism that includes a collection inlets provided on the inside of the peripheral wall portion and a vacuum system connected to the collection inlets, in which a liquid penetrated from an outer periphery of the substrate is sucked and recovered, in the state with an upper surface of the peripheral wall portion and a back surface of the substrate being spaced at a first distance.
    Type: Grant
    Filed: February 4, 2013
    Date of Patent: October 18, 2016
    Assignee: NIKON CORPORATION
    Inventor: Makoto Shibuta
  • Patent number: 9457947
    Abstract: An apparatus and a method to hold a patterning device configured to impart a beam of radiation with a pattern in its cross-section. The apparatus includes a base configured to support the patterning device and an inner cover couplable to the base. The inner cover includes a restraining mechanism that, upon an application of a force external to the inner cover, is configured to provide an in-plane force to the patterning device to restrain movement of the patterning device, the in-plane force being substantially parallel to a patterning surface of the patterning device.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: October 4, 2016
    Assignee: ASML HOLDING N.V.
    Inventors: Robert Gabriël Maria Lansbergen, Peter C. Kochersperger, David Ramirez, Xugang Xiong, George Hilary Harrold, Arindam Sinharoy
  • Patent number: 9455170
    Abstract: A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: September 27, 2016
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Sang-Youn Kim, Myung-Ki Lee, Sang-Yong Jeong
  • Patent number: 9388002
    Abstract: The present invention provides a medium conveyance device whose reliability is enhanced. Namely, a roller conveyance section uses support parts to couple together an upper side shaft, which receives a first reaction force produced in accordance with a first contact-pressure force that urges first driven rollers toward first drive rollers, and a lower side shaft, which receives a second reaction force produced in accordance with a second contact-pressure force that urges second driven rollers toward second drive rollers. Because of this, the medium conveyance device of the present invention may cancel out the two reaction forces that cause an upper side guide and a lower side guide to bend in two bank note conveyance paths adjacent to one another.
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: July 12, 2016
    Assignee: OKI ELECTRIC INDUSTRY CO., LTD.
    Inventors: Ryousuke Kojima, Yoshiyuki Tosaka
  • Patent number: 9345299
    Abstract: A portable electronic device equipped with a protective cover is provided. The portable electronic device includes a protective cover that is equipped with a reflector having a light reflection characteristic, a proximity sensor that is equipped with a light emitting unit and a light receiving unit, and that is configured to generate a sensing signal based on an amount of light that the light receiving unit receives in response to light emitted from the light emitting unit, and a controller that is provided with the sensing signal generated from the proximity sensor and that is configured to determine whether the protective cover is open or closed.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: May 24, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jun-Hui Lee, Chul-Woo Jin, Gwang-Hui Lee, In-Kyu Choi
  • Patent number: 9340044
    Abstract: A holding member includes a base, a transparent sheet, first, second and third signs. The base has an adhesive part on which a sheet-shaped object is removably placed. The sheet holds the object between the base and itself. The first sign indicates a type of the holding member. The second sign indicates that the sheet is located at a closed position. The second sign on the sheet and the first and third signs on the base are located at a front part of the base with respect to an insertion direction of the holding member when the sheet is located at a closed position. The first to third signs are located between a front end of the adhesive part and a front end of the base with respect to the insertion direction when the sheet is located at the closed position.
    Type: Grant
    Filed: February 11, 2015
    Date of Patent: May 17, 2016
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Hironori Matsushita, Masashi Tokura
  • Patent number: 9341943
    Abstract: There is provided a pellicle having a frame 12, a film 11 and an adhesive 13 for bonding the film 11 to the frame 12, and this adhesive 13 is a silicone compound having a low outgassing tendency and high heat resistance; in a better mode case, it can maintain its adhesive strength at temperatures 100-200 degrees C. and it exhibits results of TML being 1.0% or lower and CVCM being 0.1% or lower when tested in accordance with ASTM E595-93; thus this pellicle is useful for EUV light exposure lithography.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: May 17, 2016
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Jun Horikoshi