Abstract: A linear motor system comprises a plurality of stator elements that have one or more magnetic coils for generating a magnetic flux in the respective stator element and at least one mover that has at least one magnetic element that interacts with the magnetic coils of the stator elements. The mover is moved by means of activation of at least one stator element in a direction of movement relative to the stator elements. At least one selected stator element is configured to change with respect to the magnetic flux from a first state into a second state or to have the second state permanently while at least some of the other stator elements remain in the first state so that the selected stator element exerts a braking and/or holding force on the mover in the second state.

Abstract: An apparatus for reticle sub-field thermal control in a lithography system is disclosed. The apparatus includes a clamp configured to fix an object. The clamp includes a plurality of gas distribution features that are spatially arranged in a pattern. The apparatus further includes a gas pressure controller configured to individually control a gas flow rate through each of the plurality of gas distribution features to spatially modulate a gas pressure distribution in a space between the clamp and the object. The gas distribution features include a plurality of trenches or holes arranged in an array form.

Abstract: An image reading apparatus is provided, including a platen glass having opposed upper and lower surfaces, a support frame supporting a peripheral portion of the platen glass, a reading device reciprocable in a first direction and disposed on an inner side of the support frame so as to be nearer to the lower surface than to the upper surface, a guide formed on an inner bottom surface on the inner side of the support frame and extending in the first direction so as to guide reciprocation of the reading device, a controller that controls operations of the reading device, a harness connecting the reading device and the controller to each other, and a harness accommodating portion accommodating the harness and constituted by a groove having a recessed shape, extending in the first direction, and formed at the inner bottom surface at a position located in front of the guide.

Abstract: Methods and systems are described for reducing particles in the vicinity of an electrostatic chuck (300) in which a cleaning reticle or substrate (320) is secured to the chuck, the cleaning reticle or substrate having surfaces partially devoid of conductive material so that an electric field from the chuck can pass through to a volume adjacent the substrate to draw particles (360) in the volume to the surface of the substrate. Voltage supplied to the chuck may have an alternating polarity to enhance the attraction of particles to the surface.

Abstract: An apparatus, which may form part of a lithographic apparatus, comprises a substrate table, a projection system, a gas lock and a gas flow guide. The substrate table is suitable for supporting a substrate. The projection system has a body which defines an interior and an opening. The projection system is configured and arranged to project a radiation beam through the opening onto a substrate supported by the substrate table. The gas lock is suitable for providing a gas flow from the opening away from the interior. The gas flow guide is configured to guide at least a portion of the gas flow away from the substrate supported by the substrate table.

Abstract: An apparatus for containing a substrate and a method of manufacturing the apparatus are provided. The apparatus for containing a substrate includes: a base having a periphery and an upward-facing top horizontal planar surface with a plurality of contact elements, the contact elements being used for engaging the substrate to hold the substrate upon the upward-facing top horizontal planar surface, an upward-facing frame-like support surface extending from the upward-facing top horizontal planar surface and surrounding the contact elements at a position proximate to the periphery of the base; and a cover having a downward-facing frame-like support surface being in large-area contact with the upward-facing frame-like support surface to define a cavity for containing the substrate between the base and the cover. The downward-facing and upward-facing frame-like support surfaces in contact with each other are not at the same level as the upward-facing top horizontal planar surface.

Abstract: A converting machine is used to convert sheet material into packaging templates for assembly into boxes or other packaging. The converting machine includes a converting assembly that performs transverse conversion functions and longitudinal conversion functions on the sheet material to create the packaging templates. A fanfold crease sensing mechanism detects the presence and location of fanfold creases in the sheet material. Based on the location of the fanfold creases, the fanfold creases are either cut out of the sheet material, or the sheet material is cut to adjust the position of the fanfold crease in a packaging template.

Abstract: The present invention provides a chemiluminescence detector, which comprises an image capture device sensitive to chemiluminescence located within a container. The container has an array of apertures located in a field of view of the image capture device, and each aperture is defined by a through-bore in a wall of the container. The exterior of the container is engagable with a plurality of sample holders, each sample holder being in alignment with a respective aperture when engaged with the exterior of the container. The passage of light into the container through each aperture is restrictable by a closure device, passage of light into the container through the apertures is thereby controllable.

Abstract: A peripheral includes a body, an image processing device and a processor. The body includes a sub-housing and a second button. The sub-housing includes a control component. The control component includes a first button disposed on an upper surface of the sub-housing. The second button and the first button are disposed on different adjacent surfaces. The image processing device is disposed above or in the body. The image processing device is disposed above the body. The processor controls a first signal generated by the first button to be the same as a first signal generated by the second button. The sub-housing is disposed on an upper lateral side of the body.

Abstract: A recording apparatus includes: an apparatus main body having a recording unit that performs recording onto a recording medium; and a document reading mechanism unit having a reading unit that reads a document and a document transport unit that transports a document to the reading unit, the document reading mechanism unit being provided in an upper part of the apparatus main body, wherein the apparatus main body includes: a feed roller that feeds the recording medium toward the front of the apparatus; and a frame having a frame surface intersecting the horizontal direction, the frame being located between the feed roller and the recording unit in an apparatus depth direction, and a part of the document reading mechanism unit overlaps the feed roller in the apparatus depth direction, and overlaps the frame in the vertical direction.

Abstract: An image reading device includes a reading main unit including a document platen capable of being loaded with a document, a document cover configured to press the document against the document platen, and a hinge mechanism configured to move between a first position and a second position with respect to the reading main unit, wherein the reading main unit includes a first abutment portion capable of abutting the document cover, and wherein an open angle of the document cover with respect to the document platen is regulated to a first angle by abutment between the document cover and the first abutment portion when the hinge mechanism is in the first position, and the open angle is regulated to a second angle larger than the first angle by a regulation portion provided in the hinge mechanism when the hinge mechanism is in the second position.

Abstract: An apparatus configured to load or unload a mask pod includes a first load port supporter and a second load port supporter spaced apart from the first load port supporter. Each of the first load port supporter and the second load port supporter includes at least portions of an L-shaped rectangular prism. The first load port supporter and the second load port supporter are disposed diagonally around a rectangular area, where first inner sidewalls of the first load port supporter and second inner sidewalls of the second load port supporter delimit boundaries of the rectangular area, and where a first width of the rectangular area is equal to a second width of the mask pod, and a first length of the rectangular area is equal to a second length of the mask pod.

Abstract: The present disclosure provides an apparatus for mounting a pellicle to a photomask, including a cover having a first side and a second side opposite to the first side, wherein the second side is configured to face the photomask, and an air pad disposed between the first side and the second side, wherein the air pad comprises a compartment filled with air.

Abstract: A reticle holding tool is provided. The reticle holding tool includes a housing including a top housing member and a lateral housing member. The lateral housing member extends from the top housing member and terminates at a lower edge. The reticle holding tool further includes a reticle chuck. The reticle chuck is positioned in the housing and configured to secure a reticle. The reticle holding tool also includes a gas delivery assembly. The gas delivery assembly is positioned within the housing and configured to supply gas into the housing.

Abstract: An image forming apparatus includes: a light source that irradiates a document with light; a hardware processor that controls lighting of the light source; a cover that is opened and closed with respect to a document platen on which a document is placed; and a detector that detects a person. When the detector detects a person and when an open angle of the cover is a predetermined angle or less, the hardware processor turns on the light source.

Abstract: There is provided an image forming apparatus including a scanner unit configured to be openable on an apparatus front side with respect to a printer unit due to a first hinge portion on an apparatus rear side, a cover to cover a feed port configured to be openable due to a second hinge portion on the apparatus front side of the feed port, wherein a rotation axis of the first hinge portion is positioned on the apparatus rear side of a rotation axis of the second hinge portion in an apparatus depth direction. Interlocking with an operation to open the scanner unit, the cover moves while a portion thereof is in contact with a surface of the paper feed tray or the sheet placed thereon to open the cover in an interlocking manner.

Abstract: An image reading apparatus, having a body, a feeder tray, a conveyer, a first reader, and a shifting device, is provided. The body includes a first inlet, a second inlet, and a conveyance guide. The feeder tray being at a closed position covers the first inlet and the feeder tray being at an open position exposes the first inlet. The conveyer conveys a readable medium guided by the conveyer guide. The first reader reads an image on a first side of the readable medium conveyed by the conveyer. The shifting device shifts the first reader to a first position in a case where the feeder tray moves from the closed position to the open position and to a second position in a case where the feeder tray moves from the open position to the closed position.

Abstract: An image reading apparatus includes a document platen on which a document is to be stacked, a pressing sheet having flexibility, a conveyance unit provided in a base member, an open portion provided in the base member and rotatable in a first direction with respect to the base member to open at least a part of the conveyance path, and a rotation member rotatable in the first direction with respect to the base member. The pressing sheet presses the document against the document platen. The conveyance unit forms a conveyance path within which the document is to be conveyed. The reading unit reads the document conveyed by the conveyance unit. The open portion retains one end of the pressing sheet in a longitudinal direction. The rotation member retains the other end of the pressing sheet in the longitudinal direction.

Abstract: A scanner cover including a first plate and a second plate is provided. The first plate has a first surface; multiple compressible and deformable elastic structures are arranged protruding on the first surface. The second plate is stacked on the first plate and the second plate has a second surface facing to the first surface, the elastic structures are contacted with the second surface, and deformation of each elastic structure is contained in the second plate while the elastic structures are compressed. While the first plate and the second plate are pressed to move close to each other, the elastic structures are compressed and a restoring force is thereby provided between the first plate and the second plate.

Abstract: A system including: a document holder configured to receive a document; one or more optical sensors directed toward the document holder; one or more processors; and at least one memory having stored thereon computer program code that, when executed by the processor, instructs the processor to: control the one or more optical sensors to capture a plurality of images of the document within the document holder; identify a feature of the document within each of the plurality of images, the feature having visual characteristics that differ based on an angle at which the feature is viewed; and output, in response comparing the respective visual characteristics of the feature of the document in each of the plurality of images to corresponding expected visual characteristics of the feature for the document, an indication of a verification of the document.

Abstract: A support frame for a pellicle includes a frame body made of an aluminum alloy. The frame body has: a top surface onto which a pellicle film is bonded; and an underside surface onto which a transparent substrate is bonded. A material of which the frame body is made has a Young's modulus larger than that of which the transparent substrate is made. The structure described above makes it possible to reduce deformation of the transparent substrate.

Abstract: An image reading apparatus includes: a reader; a first conveyance roller pair; a second conveyance roller pair; and a hardware processor that lowers a conveying force exerted from the second conveyance roller pair on a sheet when acceleration control for accelerating a conveying speed of the sheet whose image has been read by the reader is performed, compared with a case in which the acceleration control is not performed.

Abstract: An apparatus includes an obtaining unit configured to obtain first image data obtained by reading, performed by a reading unit, a chart on which an image has not been formed by an image forming unit and second image data obtained by reading, performed by the reading unit, a chart formed by the image forming unit, and an estimation unit configured to change the second image data using the first image data and estimate a cause of an abnormality that has occurred in the image forming unit from a feature amount obtained by analyzing the changed image data.

Abstract: A document pressing unit is openable with respect to an apparatus body including a placement portion on which a document is placed, and is configured to press the document from above. The document pressing unit includes a body frame, a pair of hinge units, a pair of metal fixing members, and fastening screws. The body frame is able to press the document. The hinge units respectively include hinge legs mounted on the apparatus body, and are mounted with a certain distance in a left-right direction on a rear end of the body frame to openably support the body frame with respect to the apparatus body. The fixing members fix the hinge units to the body frame, respectively. The fastening screws fasten the fixing member and the hinge unit through the body frame so that the fixing member and the hinge unit sandwich the body frame in an up-down direction.

Abstract: An image reading device includes an image reading unit, a conductive member, a switching portion, and a switching control portion. The image reading unit includes a light emitting portion and a light receiving portion. The light emitting portion irradiates light on a document sheet that is conveyed while in contact with an upper surface of a plate-like contact member. The light receiving portion outputs image data corresponding to light reflected from the document sheet. The conductive member is provided on a lower surface of the contact member. The switching portion is switched between an on-state and an off-state so as to select between a state where the conductive member is grounded or a state where the conductive member is not grounded. The switching control portion controls switching of the switching portion.

Abstract: A method of cleaning an ion source. The method includes: at a first reflective surface of a mirror, reflecting light that has a wavelength in a first wavelength band onto a surface of the ion source so that contaminant material is desorbed from the surface of the ion source; at a second reflective surface of the mirror, reflecting light that has a wavelength in a second wavelength band and that comes from the surface of the ion source towards an imaging apparatus for producing an image of the surface of the ion source, wherein the light that has a wavelength in the second wavelength band passes through the first reflective surface of the mirror before being reflected at the second reflective surface of the mirror.

Abstract: An image reading apparatus comprises a housing having a document table glass, a scanner section, a cover member, an adsorption board, a driving section and a controller. The cover member is connected to the housing to be rotatable around a first rotation center line with respect to the housing between a closed position where the document table glass is covered and an open position. The adsorption board, arranged in a part at a housing side at the time the cover member is positioned at the closed position, has an adsorption surface adsorbing the original document, and is connected to the cover member to be rotatable around a second rotation center line parallel to the first rotation center line. The driving section adsorbs the original document on the adsorption surface of the adsorption board.

Abstract: A lithographic apparatus substrate table comprises a plurality of first projections, whereby the first projections define a first substrate supporting plane and a plurality of second projections, whereby the second projections define a second substrate supporting plane. The substrate table further comprises a clamping device configured to exert a clamping force onto the substrate. The second substrate supporting plane is parallel to the first substrate supporting plane. The second substrate supporting plane is offset in respect of the first substrate supporting plane in a direction perpendicular to the first and second substrate supporting planes. The lithographic apparatus substrate table is configured to support the substrate on the second projections at the second substrate supporting plane before application of the clamping force by the clamping device.

Abstract: An image forming apparatus has an apparatus main body, a cover member, and a coupling member. The cover member is openable and closable relative to a side face of the apparatus main body. The coupling member couples the apparatus main body and the cover member together and is arranged inside the cover member when the cover member is closed. The coupling member is rotatable about a first rotation pivot relative to the apparatus main body. The cover member is rotatable about a second rotation pivot relative to the coupling member. When the cover member is opened relative to the apparatus main body, the rotation center of the cover member switches between the first and second rotation pivots during the opening operation of the cover member.

Abstract: An image processing apparatus obtains image data by photographing a document which is put on a document plate. The apparatus includes an obtaining unit and a correction unit. The obtaining unit photographs the document plate and obtains calibration image data. The correction unit uses the calibration image data obtained by the obtaining unit, so as to correct the image data obtained by photographing the document which is put on the document plate.

Abstract: According to an embodiment, a method for designing a mask set is provided. In the method for designing the mask set, an imprint-alignment mark is arranged in a region other than a chip region in an imprint shot formed in a template. The imprint-alignment mark is used for alignment during an imprint. Subsequently, the shape of the imprint shot is set based on an arrangement position of the imprint-alignment mark. Subsequently, another pattern is arranged in a region where the region is other than the chip region in the imprint shot and the imprint-alignment mark is not arranged. The other pattern is used in a process other than the imprint.

Abstract: A pellicle membrane includes a film consisting of an organic material and an inorganic material, wherein a region containing an organic material and a region consisting of an inorganic material are present in the same plane of the film, and wherein at least a central portion of the film is a region consisting of an inorganic material, and at least a peripheral edge portion of the film is a region containing an organic material.

Abstract: A photo mask assembly including a photo mask, a first adhesive layer adhered with the photo mask, a pellicle frame and a pellicle is provided. The pellicle frame includes a plurality of recesses for accommodating the first adhesive layer. The pellicle frame is adhered with the photo mask through the first adhesive layer accommodated in the plurality of recesses. The pellicle is disposed on the pellicle frame. The pellicle frame is between the pellicle and the first adhesive layer. An optical apparatus including the above-mentioned photo mask assembly is also provided.

Abstract: A pellicle assembly is provided. The pellicle assembly includes a frame and a membrane connected to the frame. The pellicle assembly also includes housing connected to the frame. The pellicle assembly further includes capping member passing through an upper opening of the housing and movable along a longitudinal axis of the housing. In addition, the pellicle assembly includes fastening member connected to the capping member and movable along a direction that is perpendicular to the longitudinal axis. When the capping member is in a released position, the fastening member is located within the housing, and when the capping member is in a fastening position, a portion of the fastening member is moved to the outside of the housing for fixing a mask.

Abstract: A base portion includes a cam surface formed around a support pin. A turning portion includes: a slide member provided movably in directions toward and away from the support pin; and a coil spring urging the slide member. The slide member is designed to slide on the cam surface while turning, together with an openable body, about the support pin. The cam surface includes a first sliding surface, a second sliding surface, and a third sliding surface. The first sliding surface presses the slide member back in a direction of closing of the openable body. The second sliding surface presses the slide member back in a direction of opening of the openable body. The third sliding surface presses the slide member back in the direction of closing of the openable body.

Abstract: A scanner is disclosed. The scanner has a background pattern that is captured as part of the scanned image. The scanner may be a flatbed scanner, a sheet-feed scanner, or a flatbed scanner using an automatic document feeder (ADF).

Abstract: An apparatus for bearing a lithography mask with a reticle stage includes a resting support holder for the lithography mask. The resting support holder has bearing points which bear the lithography mask. Optionally, the resting support holder optionally has exactly four bearing points. An associated method adjusts the height of the fourth bearing point until all bearing points bear the same supporting force.

Abstract: A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of a thin film stack forming an electronic component. The planarization layer is of substantially uniform thickness and/or its outer surface has a peak to valley distance of less than 10 ?m. The planarization layer may be formed by applying two solutions of different concentration. A surface treatment may be applied to the burls to repel a solution of the planarization layer material.

Abstract: An image reading apparatus includes first and second image reading units, and first and second transparent guides disposed along a conveyance path and guiding a document passing through a conveyance path. The first and second transparent guides are disposed to oppose to each other across the conveyance path. The image reading apparatus also includes a grounding portion provided on one of the first and second transparent guides and a conductive portion electrically connecting the first and second transparent guides with each other.

Abstract: The present invention relates to an EUV pod having marks, which comprises a mask pod and one or more mark disposed on the mask pod. One or more sensor of a processing machine is used for detecting the one or more mark. By including the one or more mark, the surface roughness of one or more region of the mask pod detectable by the one or more sensor can be altered. The one or more sensor emits light to the mask pod, which reflects the light to the one or more sensor. The one or more sensor receives the reflection light from the mask pod and judges if the voltage generated by the reflection light falls within the reflection ranges of the mark. Thereby, whether the one or more sensor corresponds to the one or more make can be confirmed.

Abstract: Embodiments of the present disclosure provide a mask device, an exposure apparatus and an exposure method, which enable a reduction in the possibility that the mask is scratched during exposure so as to protect the mask, and in turn a reduction in production cost of the semiconductor devices. The mask device comprises a mask carrier, a mask disposed on a lower surface of the mask carrier, and at least one protection unit provided on the mask carrier, wherein a lower end of the at least one protection unit is arranged to be lower than the lower surface of the mask during exposure. The mask device is applicable in exposure of a substrate to be exposed.

Abstract: An apparatus includes an obtaining unit configured to obtain first image data obtained by reading, performed by a reading unit, a chart on which an image has not been formed by an image forming unit and second image data obtained by reading, performed by the reading unit, a chart formed by the image forming unit, and an estimation unit configured to change the second image data using the first image data and estimate a cause of an abnormality that has occurred in the image forming unit from a feature amount obtained by analyzing the changed image data.

Abstract: Here is proposed a method for bonding a pellicle to a stencil such as mask plate, which is characteristic in that the stencil-bonding agglutinant layer of the pellicle is warmed under load while the pellicle is being bonded to the stencil, preferably at a temperature in a range of 35 through 80 degrees C., and the load is increased stepwise and with intermittent removal of the load.

Abstract: A pellicle is proposed in which the frame is formed with an external horizontal slit for the purpose of receiving a pressing means, which can urge the pellicle to be adhered to a photomask, in which the slit forms a vertically protruding part of a thickness of 5-30% of the width of a pellicle frame main body and a horizontally protruding part of a thickness of 0.3-1 mm; also the method of adhering the pellicle to the photomask is proposed.

Abstract: Provided is a transport device including plural rollers that are provided on a transporting path on which a sheet is transported in a transport direction and is subjected to a process at a process position, and transport the sheet which comes into contact with surfaces of the rollers in the transport direction by rotation of the rollers, among the plural rollers, first rollers that are provided closest to the process position, among the plural rollers, second rollers that are provided closest to the first rollers on an opposite side with respect to the process position, and a driving unit that drives the first rollers and the second rollers to rotate so that a speed of a surface of the first roller is faster than a speed of a surface of the second roller at least while the sheet passes through the process position.

Abstract: A method of forming a pattern may include: disposing a first material layer; disposing a first photoresist film including first shot regions; exposing the first shot regions to light, wherein an overlapping region between first shot regions may be overlappingly exposed to light exposures onto the first shot regions; forming a first photoresist pattern by developing the first photoresist film; forming a first pattern by etching the first material layer using the first photoresist pattern as an etching mask; disposing a second material layer on the first pattern; disposing a second photoresist film including second shot regions; exposing the second shot regions, wherein a boundary region between second shot regions may be disposed spaced apart from the overlapping region; forming a second photoresist pattern by developing the second photoresist film; and forming a second pattern by etching the second material layer using the second photoresist pattern as an etching mask.

Abstract: An exposure apparatus that can prevent disadvantages due to a leaked liquid is provided. The exposure apparatus includes a substrate holder that includes a peripheral wall portion and supporting portions located on an inside of the peripheral wall portion and that supports a substrate with the supporting portions by negatively pressurizing a space surrounded by the peripheral wall portion, and a recovery mechanism that includes a collection inlets provided on the inside of the peripheral wall portion and a vacuum system connected to the collection inlets, in which a liquid penetrated from an outer periphery of the substrate is sucked and recovered, in the state with an upper surface of the peripheral wall portion and a back surface of the substrate being spaced at a first distance.

Abstract: An apparatus and a method to hold a patterning device configured to impart a beam of radiation with a pattern in its cross-section. The apparatus includes a base configured to support the patterning device and an inner cover couplable to the base. The inner cover includes a restraining mechanism that, upon an application of a force external to the inner cover, is configured to provide an in-plane force to the patterning device to restrain movement of the patterning device, the in-plane force being substantially parallel to a patterning surface of the patterning device.

Abstract: A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.

Abstract: The present invention provides a medium conveyance device whose reliability is enhanced. Namely, a roller conveyance section uses support parts to couple together an upper side shaft, which receives a first reaction force produced in accordance with a first contact-pressure force that urges first driven rollers toward first drive rollers, and a lower side shaft, which receives a second reaction force produced in accordance with a second contact-pressure force that urges second driven rollers toward second drive rollers. Because of this, the medium conveyance device of the present invention may cancel out the two reaction forces that cause an upper side guide and a lower side guide to bend in two bank note conveyance paths adjacent to one another.