Abstract: A piercing inspection apparatus allows inspection of piercing of through-holes of a honeycomb structure having a number of parallel through-holes which extend therethrough from a first open end to a second open end of the honeycomb structure. The apparatus includes a lighting device which emits light onto the first open end of the honeycomb structure, so that the light passes through the through-holes, a telecentric optical system which converges the light emitted from the through-holes at the second open end to form inspection images corresponding to the through-holes, a camera which picks up the inspection images, and a monitor in which the picked up inspection images are indicated.

Abstract: A workpiece inspecting device suitable for inspection of tiny workpieces is provided which move workpieces such as screws, nails, screws and rivets while hanging them in the air and to carry out overall length inspection and projecting inspection of the workpieces while they are moving. A hanging portion is provided on the outer periphery of the turntable to lower the position of the bottom surface of the turntable at the outer peripheral portion where the workpieces are supported, so that the heads of workpieces supported in a hanged state from the turntable are within an inspection area through windows provided in the hanging portion.

Abstract: Disclosed is a method that utilizes optics to measure a hole depth in a workpiece. The method involves placing a light recording apparatus and a light source apparatus proximate a hole. Light is then emitted from the light source apparatus and is directed into the hole. This illumination of the hole allows an image of the side surface of the hole that is at the greatest distance from the light recording apparatus to be recorded. Then, the apparent diameter of the image is calculated. The apparent diameter of the image, in turn, is compared to the known diameter of the hole in order to calculate the distance between a reference datum in the light recording apparatus and the far side surface of the hole. Once this distance is determined, the hole depth is calculated by accounting for the distance between the reference datum and the workpiece surface.

Abstract: A microarrayer for spotting solution onto slides in an automated microarray dispensing device. Elements of the present invention include: at least one dispense head for spotting the slides, at least one light source capable of illuminating the slides, at least one camera operating in conjunction with the at least one light source. The at least one camera is capable of acquiring and transmitting slide image data to a computer. The computer is programmed to receive the slide image data and analyze it. The computer will then generate post analysis data based on the analysis of the slide image data. The post analysis data is available for improving the spotting of the solution onto the slides. In a preferred embodiment, the slide image data includes information relating to slide alignment, information relating to spot quality, and slide identification information.

Abstract: To provide an illuminating apparatus for testing which is cost effective and small in size

Abstract: The present invention is a method of inspecting a surface-emitting semiconductor laser in which a resonator is formed in a vertical direction on a semiconductor substrate. The surface-emitting semiconductor laser to be inspected includes a pillar portion in at least part of the resonator, and this pillar portion includes an oxidized current blocking layer. The oxidized current blocking layer includes an oxide aperture, and an oxidized portion formed around the oxide aperture. The surface-emitting semiconductor laser is irradiated with laser light in a direction perpendicular to a surface of the semiconductor substrate from the side on which the pillar portion is disposed, and the shape of the oxide aperture is measured based on the amount of reflected light at the oxidized current blocking layer.

Abstract: An apparatus and method is disclosed for facilitating a dark field inspection. The workpiece inspection apparatus comprises three sides and a light-blocking top and defines a dark field inspection area. Light incident on the top is substantially blocked while a clean room environment is maintained by allowing air to permeate through the top.

Abstract: It is an object to provide a method for managing an apparatus for examination of foreign matters in through holes, which can readily judge the presence or absence of a change in the examination conditions in the apparatus for examining foreign matters in through holes, and efficiently conduct a management of the apparatus.

Abstract: A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

Abstract: A surface displacement detecting apparatus for detecting a concave, a hole on a surface of a detection object, comprises a light shielding device provided in a direction crossing the surface of the detection object, a light irradiating device provided at one side of the light shielding device and to irradiate the detection object with light; a light receiving device provided at the other side of the light shielding device and to receive at least one of regular reflection light and diffuse reflection light from the surface of the detection object; and a conveyor to convey at least one of the detection object and the light irradiating device.

Abstract: A biopsy collection system for use during colonoscopies, esophagogastroduodenoscopy, prostate and liver procedures. The system provides a device and method which enable safe and secure handling of transparent specimen containers during a biopsy collection procedure and which permit the ready visualization of minuscule tissue samples within a minimum of time during such a procedure. The device includes structure for safely securing transparent specimen containers in a hands-free condition on the device and structure for selectively illuminating one or more of the specimen containers by a light source directing light upwardly through the specimen container so that a person looking from a position above the specimen container can readily visualize the presence and quality of a minuscule tissue sample.

Abstract: The present invention proposes an apparatus and a method for detecting the accuracy of drilled holes on a PCB, which can detect the positions, sizes, counts, and wall roughness of drilled holes on a PCB. The apparatus comprises an optical scanning tool and a platform situated below the optical scanning tool. The optical scanning tool can be positioned and moved. Two projecting light sources of parallel light beam are installed thereon to project light to the PCB. A signal receiver is installed between the two projecting light sources. A magnification lens is installed below the signal receiver. The signal receiver receives the light signal of the two projecting light sources reflected from the PCB via the magnification lens. The platform is used to place the PCB. The platform can move with respect to the optical scanning tool to control the distance between the optical scanning tool and the platform.

Abstract: In order to detect pin-holes or tears in a foil (16), during deformation of the foil (16), the transmission of light through the foil is measured continuously by means of at least one light source (22) situated on one side of the foil (16) and at least one of the light sensors (24) on the other side of the foil (16). The light source (22) is integrated in a shaping-punch (14) and the light sensors (24) are situated in a die (12) which is employed along with the punch (14). The pin-hole detector (10) enables pin-holes or tears formed during the deformation of the foil to be detected on-line in a single shaping step closely resembling actual working practice.

Abstract: A device and method for inspecting a test piece with a laser beam in which the laser beam is divided into plural beams, and each of the plural beams has an identification marker, such as a particular polarity or intensity. Each of the marked beams, scans a different portion of the test piece to reduce the time needed to inspect the test piece.

Abstract: A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

Abstract: A device and associated method useful for determining whether a disk has a chipped edge. The preferred device includes a laser that radiates a laser beam to the disk in the vicinity of its edge. The preferred device also includes a radiation detector for detecting electromagnetic radiation from the laser after the radiation has been transmitted, reflected, retracted or scattered by the disk. A chip in the vicinity of the edge of the disk will direct the electromagnetic radiation differently than an intact disk edge. Therefore, the radiation detector can utilize changes in the detected electromagnetic radiation in order to determine whether the edge of the disk is intact or whether it has a defect, such as an edge chip.

Abstract: A surface inspection apparatus is provided which uses at least two sets of surface inspection systems each comprising with a paired surface illumination device (A1, B1) and detection device (A2, B2), with each set of illumination devices and detection devices creating their own irradiation regions (51A, 51B) and detection regions (23A,23B), in which the irradiation and detection regions of one pair of illumination and detection devices does not over lap the illumination and detection regions of the adjacent pair of illumination and detection devices. The surface illumination devices preferably project light at an angle of 80° or more with respect to a normal to the surface being inspected (21). The detection devices detect light scattered by dust or defects on the surface to be inspected. The surface to be inspected can be moved in a direction perpendicular to the direction of the illumination and detection regions on the surface being inspected. Thus, the entire surface can be inspected.