Abstract: A photonic integrated circuit device can comprise one or more layers having different refraction indices that cause optical coupling issues and losses from layer variations. A film of material can be applied to a layer of the photonic integrated circuit to avoid the issues to increase the optical bandwidth of the photonic integrated circuit device and decrease sensitivity to manufacturing and design processes.

Abstract: A device may determine a calibration value for a spectrometer using light from a first light source; deactivate the first light source after determining the calibration value; perform measurement with regard to a sample based on the calibration value, wherein the measurement of the sample is performed using light from a second light source; determine that the calibration value is to be updated; and update the calibration value using the light from the first light source.

Abstract: A metrology target includes: a first structure arranged to be created by a first patterning process; and a second structure arranged to be created by a second patterning process, wherein the first structure and/or second structure is not used to create a functional aspect of a device pattern, and wherein the first and second structures together form one or more instances of a unit cell, the unit cell having geometric symmetry at a nominal physical configuration and wherein the unit cell has a feature that causes, at a different physical configuration than the nominal physical configuration due to a relative shift in pattern placement in the first patterning process, the second patterning process and/or another patterning process, an asymmetry in the unit cell.

Abstract: This invention provides an easy-to-manufacture, easy-to-analyze calibration object which combines measurable and repeatable, but not necessarily accurate, 3D features—such as a two-sided calibration object/target in (e.g.) the form of a frustum, with a pair of accurate and measurable features, more particularly parallel faces separated by a precise specified thickness, so as to provide for simple field calibration of opposite-facing DS sensors. Illustratively, a composite calibration object can be constructed, which includes the two-sided frustum that has been sandblasted and anodized (to provide measurable, repeatable features), with a flange whose above/below parallel surfaces have been ground to a precise specified thickness. The 3D corner positions of the two-sided frustum are used to calibrate the two sensors in X and Y, but cannot establish absolute Z without accurate information about the thickness of the two-sided frustum; the flange provides the absolute Z information.

Abstract: A reference substrate for calibrating high-energy inspection systems includes permanently affixed particle-emulating and/or integral void-type environmentally inert surface features that emulate particles/defects having sizes below about 18 nm. Particle-emulating surface features are fabricated directly onto the substrate's surface (or an intervening barrier film layer) using e-beam lithography or over-etch processing. Void-type defect features having sizes below 18 nm are etched into the substrate's surface using, for example, focused ion beam, reactive particle or pin-hole etching processes. Once formed, the actual size of each surface feature is measured (e.g., using SEM) and then recorded. During a subsequent inspection tool calibration session, the reference substrate is scanned and waveform data corresponding to light reflected/scattered from each surface feature is correlated with the scanned feature's actual size data.

Abstract: The present invention discloses a nitride based sensor including a nitride based semiconductor, wherein a plurality of metal nanoparticles are attached to a surface of the nitride based semiconductor, and the surface of the nitride based semiconductor is passivated with at least one thiol compound. The present invention also provides a method of fabricating a nitride-based sensor. The present invention also discloses a porous gallium nitride (GaN) based H2 gas sensor, comprising a GaN based semiconductor with a plurality of Pt nanoparticles attached to a surface, wherein the GaN based semiconductor is passivated with a thiol compound, and wherein the sensor exhibits responsiveness of at least 60% for detection of H2 at a concentration of 30 ppm at room temperature.

Abstract: This invention provides a system and method for concurrently (i.e. non-serially) calibrating a plurality of 3D sensors to provide therefrom a single FOV in a vision system that allows for straightforward setup using a series of relatively straightforward steps that are supported by an intuitive graphical user interface (GUI). The system and method requires minimal data input about the scene or calibration object used to calibrate the sensors. 3D features of a stable object, typically employing one or more subobjects, are first measured by one of the image sensors, and then the feature measurements are used in a calibration in which each of the 3D sensors images a discrete one of the subobjects, resolves features thereon and computes a common coordinate space between the plurality of 3D sensors. Sensor(s) can be mounted on the arm of an encoderless robot or other conveyance and motion speed can be measured in setup.

Abstract: This invention provides a system and method for concurrently (i.e. non-serially) calibrating a plurality of 3D sensors to provide therefrom a single FOV in a vision system that allows for straightforward setup using a series of relatively straightforward steps that are supported by an intuitive graphical user interface (GUI). The system and method requires minimal input significant data about the imaged scene or calibration object used to calibrate the sensors, thereby effecting a substantially “automatic” calibration procedure. 3D features of a stable object, typically employing a plurality of 3D subobjects are first measured by one of the plurality of image sensors, and then the feature measurements are used in a calibration in which each of the 3D sensors images a discrete one of the subobjects, resolves features thereon and computes a common coordinate space between the plurality of 3D sensors. Laser displacement sensors and a conveyor/motion stage can be employed.

Abstract: Techniques for measuring defectivity using model-less scatterometry with cognitive machine learning are provided. In one aspect, a method for defectivity detection includes: capturing SEM images of defects from a plurality of training wafers; classifying type and density of the defects from the SEM images; making training scatterometry scans of a same location on the training wafers as the SEM images; training a machine learning model to correlate the training scatterometry scans with the type and density of the defects from the same location in the SEM images; making scatterometry scans of production wafers; and detecting defectivity in the production wafers by measuring the type and density of the defects in the production wafers using the machine learning model, as trained, and the scatterometry scans of the production wafers. A system for defectivity detection is also provided.

Abstract: This invention provides a system and method for generating camera calibrations for a vision system camera along three discrete planes in a 3D volume space that uses at least two (e.g. parallel) object planes at different known heights. For any third (e.g. parallel) plane of a specified height, the system and method then automatically generates calibration data for the camera by interpolating/extrapolating from the first two calibrations. This alleviates the need to set the calibration object at more than two heights, speeding the calibration process and simplifying the user's calibration setup, and also allowing interpolation/extrapolation to heights that are space-constrained, and not readily accessible by a calibration object. The calibration plate can be calibrated at each height using a full 2D hand-eye calibration, or using a hand-eye calibration at the first height and then at a second height with translation to a known position along the height (e.g. Z) direction.

Abstract: The present invention provides measuring apparatus and method for three-dimensional profilometry of an object, wherein a random-speckle beam and a structured fringe beam are projected onto the object and reflected therefrom for forming deformed random-speckle beam and structured fringe beams that are separately acquired by an image acquiring device thereby obtaining a random-speckle image utilized to determine an absolute phase information of each position on the surface of the object, and a structured fringe image utilized to determine a relative phase information for each position of the surface of the object. Each absolute phase information and each relative phase information corresponding to each position are converted into an absolute depth and a relative depth, respectively. Finally, the depth information of each position on the surface of the object is calculated by combining the corresponding absolute depth and the relative depth whereby the surface profile of the object can be established.

Abstract: A method for producing a multilayer tissue phantom involves successively forming at least two layers, each layer formed by depositing a viscous flowable material over a supporting element or over a previously formed layer of the phantom supported by the supporting element, selectively redistributing the material while material is solidifying to control a thickness distribution of the layer, and allowing the material to solidify sufficiently to apply a next layer. The supporting element supports the material in 2 or 3 directions and effectively molds a lumen of the tissue. The neighbouring layers are of different composition and of chosen thickness to provide desired optical properties and mechanical properties of the phantom. The phantom may have selected attenuation and backscattering properties to mimic tissues for optical coherence tomography imaging.

Abstract: This optical inspection device has: a line sensor on which channels are arranged; a moving means for moving a wafer mounted on a stage relative to the line sensor; a stage position detection means for detecting the on-stage positions of pseudo-defects in images formed on the channels as pseudo-defect stage coordinates, said coordinate management wafer being a wafer on which one pseudo-defect die is formed per row and column of a matrix of dies and each pseudo-defect die has a plurality of pseudo-defects formed in a line in the columnar direction; a coordinate transformation means for transforming the pseudo-defect stage coordinates into pseudo-defect die coordinates; a difference computation means for computing the differences of the pseudo-defect die coordinates from design coordinates; and a characteristic pattern acquisition means for obtaining a coordinate error characteristic pattern in which the differences from the pseudo-defect stage coordinates increase or decrease along a straight line.

Abstract: A method according to an embodiment includes obtaining calibration measurement data, with an optical detection apparatus, from a plurality of marker structure sets provided on a calibration substrate. Each marker structure set includes at least one calibration marker structure created using different known values of the process parameter. The method includes obtaining measurement data, with the optical detection apparatus, from at least one marker structure provided on a substrate and exposed using an unknown value of the process parameter; and determining the unknown value of the process parameter from the obtained measurement data by employing regression coefficients in a model based on the known values of the process parameter and the calibration measurement data.

Abstract: A method of obtaining high dynamic range, spectrally, spatially and angularly resolved radiance of a sample surface of a sample by an electromagnetic irradiator irradiating electromagnetic radiation of controlled spectral distribution onto the sample surface and, using an electromagnetic sensitive sensor to register the reflected spectral distribution. The spectral distribution of the intensity of the electromagnetic field is modeled to have been reflected by a plurality of spatially well defined part-surfaces of the sample surface.

Abstract: A data processing and controlling portion calculates the amounts of coordinate deviations between artificial defects on a standard sample and detected defects, checks the sensitivity (instrumental sensitivity (luminance, brightness, or the like)), and proceeds to execution of hardware corrections. If the coordinate deviation is less than a certain value, software corrections are carried out. In the case of the software corrections, coordinate corrections are made for the whole standard sample. The amounts of coordinate deviations are computed and checked. If the amounts of coordinate deviations are outside a tolerance, coordinate corrections are made for each region obtained by dividing the standard sample.

Abstract: A method and a microelectronic sensor device for making optical examinations in an investigation region at the contact surface of a carrier, wherein an input light beam is sent from a light source towards the investigation region, and wherein an output light beam coming from the investigation region is detected by a light detector. An evaluation unit that is coupled to the light detector is adapted to determine the wetting grade of the investigation region based on a characteristic parameter of the output light beam. The evaluation unit may be adapted to determine a change in the light intensity caused by a liquid contacting the contact surface. The wetting grade may be detected in a test region that is located adjacent to the investigation region and that has a higher roughness than the investigation region.

Abstract: The present invention includes providing a plurality of standard particles; providing a substantially crystalline material having one or more characteristic spatial parameters, disposing the plurality of standard particles proximate to a portion of the substantially crystalline material, acquiring imagery data of the plurality of standard particles and the portion of the substantially crystalline material, establishing a spatial relationship between the plurality of standard particles and the portion of the substantially crystalline material utilizing the acquired imagery data, and determining one or more spatial parameters of the plurality of standard particles utilizing the one or more characteristic spatial parameters of the substantially crystalline material and the established spatial relationship between the plurality of standard particles and the portion of the substantially crystalline material.

Abstract: Disclosed is a standard specimen, used with an electron microscope to correct the magnification with high precision. A standard member used for correction corrects a scanning electron microscope that measures a pattern within an observation region based on information about the secondary electrons generated by scanning incident electron lines on the observation region on a measurement specimen, or information about the reflected electron intensity. The standard member has a first pattern region that corrects the magnification and that comprises a concavo-convex pattern (line/space pattern) in the cross section of a multilayer film that has been laminated, and a second pattern region near the first pattern at almost the same height that does not contain a pattern with the same periodicity as the pattern pitch size of the first region and that is used for beam adjustment.

Abstract: Systems and methods for calibrating a solid-imaging system (10) are disclosed. A calibration plate (110) having a non-scattering surface (140) with a plurality (150) of light-scattering fiducial marks (156) in a periodic array is disposed in the solid-imaging system. The actinic laser beam (26) is scanned over the fiducial marks, and the scattered light (26S) is detected by a detector (130) residing above the calibration plate. A computer control system (30) is configured to control the steering of the light beam and to process the detector signals (SD) so as to measure actual center positions (xA, yA) of the fiducial marks and perform an interpolation that establishes a calibrated relationship between the angular positions of the mirrors and (x,y) locations at the build plane (23). The calibrated relationship is then used to steer the laser beam in forming a three-dimensional object (50).

Abstract: The invention relates to a substrate for surface enhanced Raman scattering studies comprising a semiconductor surface with whiskers, coated with metal selected from the group consisting of silver, gold, platinum, copper and/or alloys thereof, where the semiconductor mentioned is a gallium-containing nitride and essentially each whisker contains a linear defect inside.

Abstract: A method for using a calibration standard. The method includes providing a calibration standard. In a specific embodiment, the calibration standard has a substrate, a thickness of material having an edge region; and a conformal material of uniform thickness disposed on the edge region. The standard also has an upper surface pattern having the uniform thickness provided on the edge region. The method also includes using the upper surface pattern for a calibration process on a scanning electron microscope process.

Abstract: There is provided a film measuring device capable of accurately and easily measuring the thickness of a microporous film formed on a battery electrode plate over the entire area of the film. A color CCD sensor 8 shoots the microporous film. A video board 11 converts a color tone of a color image signal obtained by the image pickup into gradation data of respective color components of RGB. After the data conversion, an image processing board 12 extracts line images of the respective color components. A calculator 14 obtains the thickness of the microporous film by referring to pre-measured film thickness reference values corresponding to the gradation data of the green or blue color component, which are stored in a table storage 13 as reference thickness table data, using the gradation data of the line image of the green color component or the blue color component as lookup data.

Abstract: An optical positioning apparatus and method are adapted for determining a position of an object in a three-dimensional coordinate system which has a first axis, a second axis and a third axis perpendicular to one another. The optical positioning apparatus includes a host device which has a first optical sensor and a second optical sensor located along the first axis with a first distance therebetween, and a processor connected with the optical sensors, and a calibrating device placed in the sensitivity range of the optical sensors with a second distance between an origin of the second axis and a coordinate of the calibrating device projected in the second axis. The optical sensors sense the calibrating device to make the processor execute a calibrating procedure, and then sense the object to make the processor execute a positioning procedure for determining the position of the object in the three-dimensional coordinate system.

Abstract: Embodiments of the invention include a target having a lattice of many periodically spaced and uniformly configured metrology features arranged in an array pattern over a target region. The lattice includes at least one defect region in the lattice, the defect region includes at least one intentionally introduced defect metrology feature. The defect feature configured to enable increased sensitivity of the target to a selected parameter of interest. The invention further encompassing associated methods of implementing the target and evaluating the parameter of interest.

Abstract: A method of obtaining high dynamic range, spectrally, spatially and angularly resolved radiance of a sample surface of a sample, such as a paper sheet, accomplished by an electromagnetic irradiator irradiating electromagnetic radiation of controlled spectral distribution onto a sample surface of a sample and, using an electromagnetic sensitive sensor to register the reflected spectral distribution. The spectral distribution of the intensity of the electromagnetic field is modeled to have been reflected by a plurality of spatially well defined part-surfaces of the sample surface of the sample.

Abstract: A field deployable optical assembly for use in testing a light-responsive sample is disclosed. The assembly includes a microfluidic device, a first optical package, and a second optical package. The first optical package includes a light emitting diode (LED), a first optical device, and a first light-path control, the first optical package configured to guide and focus light from the LED onto the sample. The microfluidic device includes a tethered control substance. In response to a substance within the sample being associated with, and attaching to, the tethered control, the sample emits light. The second optical package includes a photo sensor, a second optical device, and a second light-path control, the second optical package configured to guide and focus the light emitted from the sample onto the photo sensor.

Abstract: A reference substrate for defect detection sensitivity calibration has: patterns and programmed defective portions which are cone defects with different sizes and are formed at random on a silicon substrate. By using the reference substrate for defect detection sensitivity calibration, it is possible to obtain an index, usable in manufacturing management, for determining sensitivity adjustment after a lamp is replaced in an illumination part of a defect inspection apparatus.

Abstract: Method for the fabrication of Haze noise standards having, respectively, an insulating thin layer and a plurality of nano-structures of hemi-spherical form on the insulating thin layer, with the respective standards being fabricated by: the formation on at least one insulating layer of seeds made of a first semi-conductor material by chemical deposition from a first precursor gas for the first semi-conductor material, formation on the insulating layer of nano-structures based on a second semi-conductor material and in the form of hemi-spheres, from stable seeds of the first semi-conductor material, by chemical deposition from a second precursor gas of the second semi-conductor material. The invention also relates to a calibration method using standards obtained by means of such a method.

Abstract: There is provided a film measuring device capable of accurately and easily measuring the thickness of a microporous film formed on a battery electrode plate over the entire area of the film. A color CCD sensor 8 shoots the microporous film. A video board 11 converts a color tone of a color image signal obtained by the image pickup into gradation data of respective color components of RGB. After the data conversion, an image processing board 12 extracts line images of the respective color components. A calculator 14 obtains the thickness of the microporous film by referring to pre-measured film thickness reference values corresponding to the gradation data of the green or blue color component, which are stored in a table storage 13 as reference thickness table data, using the gradation data of the line image of the green color component or the blue color component as lookup data.

Abstract: The present invention provides a reference standard used to calibrate measurement data of a measuring device for measuring the shape of a measurement surface utilizing interference between light from the measurement surface and light from the reference surface. A measurement surface of the reference standard has at least one protruding mark and one recessed mark, and an integrated value of the dimension of the protruding mark in the direction normal to the measurement surface of the reference standard, on the circumference of an assumed circle on the measurement surface centered at a point on an optical axis of the reference standard, is equal to an integrated value of the dimension of the recessed mark in the direction normal to the measurement surface of the reference standard on the circumference of the assumed circle.

Abstract: An apparatus including: an optical sensor comprising an optical transmitter and an optical receiver; and a calibration system configured to change calibration of the sensor when a measurement taken at the optical receiver, while the optical transmitter is on and the apparatus is in use, passes a test.

Abstract: A method for determining a test strip calibration code for use in a meter includes inserting a test strip into the meter. The inserted test strip having a substrate with a working surface for receiving the body fluid sample and a reverse surface that is in opposition to the working surface. The test strip also includes a permutative grey scale calibration pattern disposed on either of the working and reverse surfaces, with the permutative grey scale calibration pattern including more than one grey scale region. Moreover, the scale regions of the test strip define a grey scale permutation that uniquely corresponds to a calibration code of the test strip. The method also includes detecting the permutative grey scale calibration pattern with a grey scale photodetector module of the meter and determining a calibration code that uniquely corresponds to a grey scale permutation defined by the permutative grey scale calibration pattern based on permutation matrix stored in the meter.

Abstract: A system for measuring an analyte in a body fluid sample includes a meter, with a grey scale photodetector module, and a memory module. The system also includes a test strip. The test strip has a substrate with a working surface for receiving the body fluid sample and a reverse surface that is in opposition to the working surface. The test strip also includes a permutative grey scale calibration pattern disposed on either of the working and reverse surfaces, with the permutative grey scale calibration pattern including more than one grey scale region. Moreover, the scale regions of the test strip define a grey scale permutation that uniquely corresponds to a calibration code of the test strip. The grey scale photodetector module is configured to detect the permutative grey scale calibration pattern of the test strip when the test strip is inserted into the meter.

Abstract: A calibration strip for use with a package of test strips includes a substrate with and a permutative grey scale calibration pattern disposed on a surface of the substrate with the permutative grey scale calibration pattern including more than one grey scale region. Moreover, the grey scale regions of the calibration strip define a grey scale permutation that uniquely corresponds to a calibration code of test strips in a package associated with the calibration strip.

Abstract: A calibration method for an edge inspection apparatus having: a light emitting portion which irradiates light onto an edge of a substrate being inspected; and a detection portion which detects optical characteristics of the light reflected by the edge to detect the defect occurring in the edge based on the optical characteristics, wherein the calibration method including: a pseudo-defect formation step of forming a plurality of pseudo-defects on an edge of a substrate for calibration along a circumferential direction thereof, in which at least one of a position in the thickness direction of the substrate, the shape and the size is set so as to be different between the pseudo-defects; a detection step of irradiating the inspection light onto the respective pseudo-defects, and detecting the optical characteristics of the reflection light by the detection portion; and an adjustment step of calibrating the edge inspection apparatus based on the optical characteristics.

Abstract: The invention relates to a device for use in analysing the performance of a spectrometric system of the type which comprises a spectrometer to which a probe for propagating electromagnetic radiation is connected. The device comprises a holder for holding both a reflectance standard and the probe so that the tip of the probe is fixated at a predetermined position relative to the reflectance standard and so that at least part of the electromagnetic radiation emitted from the probe is diffusely reflected from the reflectance standard back to the probe. The invention also relates to a method, a kit and an assembly.

Abstract: A structure for calibrating an image sensor or other photosensor includes a baffle for passage of a sheet therethrough. A photosensor is disposed to receive light reflected from a sheet passing through the baffle. A selectably-positionable target member has a target surface associated therewith, and is positionable in one position establishing a width of the baffle suitable for passage of a sheet through the baffle, and another position wherein the first target surface is disposed adjacent to the photosensor.

Abstract: The invention relates to a method (100) for producing color elements of a shade guide. To this end, color values of known color elements (15) of shade guides (10) with similar lightness values, hues and chromata are initially ascertained. In another method step, the color values of each new color element are determined while increasing a color distance (16) between the lightness values, hues and chromata of the previously ascertained color values.

Abstract: An optical reference is disclosed for wet foodstuffs including an optical reference material including a binder and a cereal formed into a matrix to fixedly hold an amount of water. The reference material is constituted with the binder, the cereal and the water present in amounts to provide the reference standard with desired spectral, mechanical and temporal characteristics.

Abstract: Computer-implemented methods, carrier media, and systems for detecting defects on a wafer based on multi-core architecture are provided. One computer-implemented method for detecting defects on a wafer includes acquiring output for the wafer generated by an inspection system. Dies are formed on the wafer, and multiple cores are formed in the dies. The method also includes detecting defects on the wafer by comparing the output for a first of the multiple cores to the output for a second of the multiple cores. The first and second of the multiple cores are formed in the same die, different dies, or the same die and different dies.

Abstract: A test strip for the determination of an analyte, such as glucose, in a body fluid sample (for example, a whole blood sample) includes a substrate with a working surface for receiving the body fluid sample and a reverse surface that is in opposition to the working surface. The test strip also includes a permutative grey scale calibration pattern disposed on either of the working and reverse surfaces with the permutative grey scale calibration pattern including more than one grey scale region. Moreover, the scale regions of the test strip define a grey scale permutation that uniquely corresponds to a calibration code of the test strip.

Abstract: A method for determining a test strip calibration code for use in a meter includes inserting a calibration strip into the meter, with the calibration strip having a substrate and a permutative grey scale calibration pattern disposed on the substrate. In addition, the permutative grey scale calibration pattern includes more than one grey scale region that define a grey scale permutation uniquely corresponding to a calibration code of test strips in a package associated with the calibration strip. The method also includes: (i) detecting the permutative grey scale calibration pattern with a grey scale photodetector module of the meter, and (ii) determining a calibration code that uniquely corresponds to a grey scale permutation defined by the permutative grey scale calibration pattern based on a permutation matrix stored in the meter.

Abstract: An inspection apparatus for inspecting a surface of an object for a particle. The apparatus includes an irradiator configured to irradiate the surface with inspection light, a first detector configured to detect light scattered at the surface, a shield configured to limit an irradiation region of the inspection light emitted by said irradiator within a limited region of the surface, and a field stop arranged between the detector and the surface and having an aperture which allows the light scattered at an edge portion of an end face of the object to pass through, in which the light passing through the aperture is detected.

Abstract: A standard plane sample which supplies an optical characteristic measuring device with reference data. The standard plane sample including a sample portion that is measured by the optical characteristic measuring device to supply measurement data, and a recording medium that stores identification data for identifying a kind of the sample portion as well as reference data corresponding to the optical characteristic of the sample portion.

Abstract: The present invention relates to a method for inspecting a crack in a metal surface or the like, and, particularly, to an inspection method and apparatus for nondestructive inspection such as liquid penetrant inspection and magnetic particle testing. The present invention provides a flaw inspection method that essentially comprises the steps of illuminating a surface of a sample to be inspected, obtaining an image of the surface, characterizing a potential flaw on the inspected surface by processing the obtained image, displaying an image of the potential flaw, verifying that the potential flaw is a true flaw, and storing an image of the verified flaw in memory.

Abstract: A device and method for verifying correct performance of an optical clinical assay system is provided.

Abstract: Using an image signal acquired by picking up a sample to be inspected by a color video camera, penetrant inspection and magnetic-particle inspection, which are non-destructive inspections, are carried out so that deficiency candidates, including a pseudo deficiency, are automatically detected and displayed on a screen. A real deficiency can be detected from the displayed deficiency candidates. As image data is stored in memory means, information of a deficiency can be repeatedly reproduced on the screen. In the penetrant inspection, the chromaticity at each position on an image is acquired, a deficiency candidate is extracted based on the chrominance, and the deficiency is distinguished from a pseudo deficiency based on the differential value of the chrominance. A polarization filter eliminates regular reflection originating from illumination in the penetrant inspection, and an ultraviolet-rays cutting filter prevents noise in the magnetic-particle inspection.

Abstract: A surface inspection system, comprising a calibration wafer where particles of known specifications are spread, a wafer transport unit having a transport robot, a surface inspection unit, and a calibration wafer accommodation unit for accommodating the calibration wafer.

Abstract: Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so that information related to relative azimuthal positions of the collected scattered radiation about the line is preserved. The collected radiation is converted into respective signals representative of radiation scattered at different azimuthal angles about the line. The presence and/or characteristics of anomalies are determined from the signals. Alternatively, the radiation collected by the collector may be filtered by means of a spatial filter having an annular gap of an angle related to the angular separation of expected pattern scattering. Signals obtained from the narrow and wide collection channels may be compared to distinguish between micro-scratches and particles.