Abstract: A system includes a light emitting unit, a front mirror, a rear mirror, an imaging unit and a processor. The light emitting unit is configured to emit a collimated light beam. The front mirror is configured to reflect part of the collimated light beam to produce and project a front focused ring of structured light to an object to obtain a front reflected ring of light, and configured to allow part of the collimated light beam to pass by. The rear mirror is positioned downstream of a light transmitting path of the front mirror. The rear mirror is configured to reflect at least part of the collimated light beam passing by the front mirror to produce and project a rear focused ring of the structured light to the object to obtain a rear reflected ring of light.

Abstract: When a size of a block on a wafer is equal to or smaller than an optical resolution of imaging optics, room for improvement in a signal-to-noise ratio has not been sufficiently considered in a conventional technique. One feature of the defect determination of the present invention is to include a filter processing for setting a predetermined partial area serving as a predetermined matrix for a first difference image, scanning the first difference image in the partial area, and outputting a second difference image, and a first threshold processing using a first threshold value for the second difference image. As a result, highly sensitive defect detection can be achieved.

Abstract: The invention is directed to a method for measuring an internal thread of a workpiece with a coordinate measuring apparatus and a CCD or CMOS sensor. The sensor records at least two images of a section of the internal thread and the recording conditions for the two images are modified. The data from these two recorded images are used to establish the position, orientation, core diameter and/or the pitch of the internal thread. The invention is also directed to an arrangement for measuring an internal thread of a workpiece and includes a coordinate measuring apparatus and the CCD or CMOS sensor in accordance with the above method.

Abstract: A security device for verifying an authenticity of a security doc-ument comprises an at least partially transparent multilayer substrate with a first surface and a second surface. A first pattern is arranged on the first surface. This first pattern is derivable using a first seed pattern. A second pattern is arranged on the second surface. This second pattern is derivable using a second seed pattern. The security device furthermore comprises a third pattern arranged between a first and a second substrate layer. The third pattern is derivable using an inversion of the first pattern, an inversion of the second pattern, and a non-inverted third seed pattern. Transmit lances and reflectivities of the patterns are selected such that in a reflection viewing mode, only the first or second seed pattern is visible, respectively. In a transmission viewing mode, only the third seed pattern is visible.

Abstract: A light-emitting structure includes two outer shells configured to be joined together to cooperatively define a receiving space therein, a connecting assembly configured to join the two outer shells together, and two light-emitting assemblies coupled to the connecting assembly and configured to emit light inside the receiving space. The two outer shells define a number of viewing holes therein for viewing inside the receiving space. The light-emitting assemblies shine light from a number of different angles inside the receiving space.

Abstract: A method for classification includes receiving an image of an area of a semiconductor wafer on which a pattern has been formed, the area containing a location of interest. At least one value for one or more attributes of the location of interest are computed based upon topographical features of the location of interest in a three-dimensional (3D) map of the area.

Abstract: A method is provided for the non-contact measurement of variations in thickness of composite materials and structures prepared from composite parts. Metrologic methods are employed to provide a 3D image of the structure or part. Variations that are greater than an acceptable amount can be corrected by adding a compensation layer to the surface of the structure or part.

Abstract: A key assembly is disclosed. The key assembly may have a blade with a head portion, a shank, and a transition region connecting the head portion to the shank. The key assembly may also have a head configured to receive the blade. The head may have a shoulder located at the transition region to limit engagement of the head with the blade, and at least one tang located at an end of the head opposite the shoulder. The at least one tang may be configured to engage a recess located within a side of the head portion and inhibit removal of the head from the blade.

Abstract: An apparatus and a method for measuring quality of a holographic image are disclosed. The apparatus for measuring the quality of the holographic image may include an obtaining unit to obtain a hologram, a reconstruction unit to reconstruct a three-dimensional (3D) holographic image by irradiating the hologram with a light source, a measuring unit to measure depth of the reconstructed holographic image, and an analysis unit to analyze depth representation quality of the holographic image base on the measured depth of the holographic image.

Abstract: A thermal imaging device includes an optical module gathering infrared radiation of a circuit board and correspondingly providing infrared light, a photo sensor converting the infrared light into a first electrical signal, a processor, and a thermal imaging control system having one or more programs stored in a storage and executed by the processor. The system includes an image processing unit converting the first electrical signal into a thermal image signal, a comparing unit comparing the thermal image signal with circuit diagram of the circuit board to determine at least one abnormal temperature element, and a display control unit controlling a screen to display a thermal image of the circuit board together with a label comprising at least one name of the at least one abnormal temperature element on the screen.

Abstract: Systems and methods for measuring a surface of an object. The system, in one embodiment, includes a laser projector device mounted at a fixed location relative to an object being formed by a fabrication process, and a videogrammetry device mounted at another fixed location relative to the object. The laser projector device includes a laser element mounted on a two-axis gimbal assembly, and the gimbal assembly directs laser beams from the laser element onto target points on a surface of the object. The laser projector device measures angles of the laser beams to the target points, while the videogrammetry device simultaneously performs measurements of the target points by capturing video images of the laser beams reflecting off of the target points. A controller processes the measurements from the laser projector device and the videogrammetry device to calculate x, y, z coordinates of the target points in a 3D coordinate system.

Abstract: In one embodiment, a processor can receive data representing a view reflected by a mirror of a plurality of mirrors. The plurality of mirrors may be configured in a space to reflect a plurality of views of structures in the space. The mirror of the plurality of mirrors may include a uniquely identifiable feature distinguishable from other objects in the space. The processor can identify the mirror of the plurality of mirrors according to the uniquely identifiable feature. The processor can also determine an attribute of the structures according to the identified mirror and the data representing the view reflected by the mirror.

Abstract: A system for analyzing at least one characteristic of the skin (1) and by extension hair, via optics (7, 4) and image processing (4, 5) elements notably include a consumer electronics device (4). The method for analyzing at least one characteristic of the skin notably includes a step wherein at least one digital image is acquired via a consumer electronics device. According to a first aspect, the method notably aims at applications in the field of cosmetics or that of skin cancer screening, and according to a second aspect in the field of assisting with diagnosis of allergies.

Abstract: An energy dispersive X-ray analyzer is attached to a scanning electron microscope and includes: a SEM controller; a detector; an EDS controller; and a data processor. The data processor generates first and second X-ray mapping image respectively when the SEM controller controls the scanning electron microscope to irradiate the sample with an electron beam under first and second acceleration voltage conditions. The data processor corrects the first X-ray mapping image and the second X-ray mapping image into images that are independent of acceleration voltage condition based on a measurement intensity variation ratio of the X-ray when changed from the first acceleration voltage condition to the second acceleration voltage condition, and controls the display unit to display a difference image between the corrected first X-ray mapping image and the corrected second X-ray mapping image.

Abstract: A method and apparatus for comparing aircraft parts. A first model is identified for a first aircraft for assembly. A second model is identified for a second aircraft that has been assembled. First parts for the aircraft in the first model are compared with second parts for the second aircraft in the second model. Graphical representations of the first parts and the second parts are displayed illustrating a difference between the first parts and the second parts from a comparison of the first parts and the second parts.

Abstract: A time of flight, TOF, camera unit for an optical surveillance system and an optical surveillance system comprising such a TOF camera is disclosed. The TOF camera unit comprises a radiation emitting unit for illuminating a surveillance area defined by a first plane, a radiation detecting unit for receiving radiation reflected from said surveillance area and for generating a three-dimensional image from said detected radiation, and at least one mirror for at least partly deflecting said emitted radiation into at least one second plane extending across to said first plane and for deflecting the radiation reflected from said second plane to the radiation detecting unit. The TOF camera and the at least one mirror may be arranged on a common carrier element.

Abstract: An imager may include an array of pixels. The pixel array may be arranged in rows and columns. Each pixel of the pixel array may include a photodiode that is coupled to a floating diffusion region by a transfer gate. A source-follower transistor may be coupled between the floating diffusion region and a pixel output node. The imager may include ramp circuitry that provides a ramp signal to the floating diffusion region. A capacitor interposed between the ramp circuitry and the floating diffusion region may be used in conveying the ramp signal to the floating diffusion region. The pixel may be coupled to a comparator that is implemented using separate circuitry or may include portions of the pixel.

Abstract: Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to simultaneously form multiple illumination areas on the wafer with substantially no illumination flux between each of the areas. The system also includes a scanning subsystem configured to scan the multiple illumination areas across the wafer. In addition, the system includes a collection subsystem configured to simultaneously and separately image light scattered from each of the areas onto two or more sensors. Characteristics of the two or more sensors are selected such that the scattered light is not imaged into gaps between the two or more sensors. The two or more sensors generate output responsive to the scattered light. The system further includes a computer subsystem configured to detect defects on the wafer using the output of the two or more sensors.

Abstract: A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.

Abstract: In order to inspect a three dimensional shape, a predetermined inspection target component formed on a board is selected as the measurement target, a shape of the inspection target component is acquired, a reference point of the inspection target component is detected, relative location information of a polarity mark formed on the inspection target component with respect to the reference point is acquired, and it is judged whether the inspection target component is good or bad by checking whether the polarity mark exists or not by using the relative location information with respect to the reference point. Thus, the location of the polarity mark may be accurately known, and polarity inspection may be more easily and accurately performed.

Abstract: A measuring apparatus includes a projection control unit configured to cause a projection unit to project, onto an object, a first light pattern with light and dark portions, a second light pattern, which is smaller in distance between the light and dark portions than that of the first light pattern and has a boundary position between the light and dark portions common to the first light pattern, and a third light pattern in which the light and dark portions of the second light pattern are reversed to each other, an acquisition unit configured to acquire a first captured image of the object onto which the first light pattern is projected, a second captured image of the object onto which the second light pattern is projected, and a third captured image of the object onto which the third light pattern is projected, and a calculation unit configured to calculate the boundary position between the light and dark portions of the first captured image based on the second and the third captured image to measure the po

Abstract: A reference image to serve as a reference for a non-defective determination is previously stored in association with identification information for identifying an inspection object. An image of the inspection object is displayed side by side with the reference image of corresponding identification information. A drawn position of the reference image and a drawn position of the acquired image are aligned, adjustment is made so as to make brightness of the reference image coincide with brightness of the acquired image, and adjustment is made so as to make a focus on the reference image coincide with a focus on the acquired image. Adjustment is made so as to make a focus of the reference image coincide with a focus of the acquired image.

Abstract: A light collecting member includes a lens to make incident light be collected on a light receiving member, a lens barrel to house the lens, an end portion into which a light enters of the lens barrel being arranged near the light receiving member and a fence member to cover the end portion into which a light enters of the lens barrel and the light receiving member, the fence member having an exhaust port formed in a manner extending in a vertical direction.

Abstract: The field of view of an objective lens is divided into two areas, and a transmission image of a photomask and a composite image obtained by optically synthesizing a transmission image and a reflection image of the photomask are picked up in parallel. A drop image generated at an edge portion of a pattern portion in the composite image is deleted by limiter processing or masking processing, or is deleted by using primary-differentiated signals of a composite image signal and a transmission image signal.

Abstract: A system and a method for detecting availability of a parking space in a parking facility are provided. A first method has the steps of providing a lighting system having at least one visible-light source for illumination of at least part of the parking space. Providing an available space time-of-flight trace. Providing an availability threshold value. Illuminating the at least part of the parking space using the at least one visible-light source. Emitting a status visible-light signal from the visible-light source in the predetermined direction toward the predetermined target in the parking space. Capturing a status reflection trace at the visible-light source. Determining a time-of-flight difference value by comparing the status reflection trace to the available space time-of-flight trace. Comparing the time-of-flight difference value with the availability threshold value and determining a status of the parking space to be one of available and not available.

Abstract: A method of controlling a robot system includes the steps of providing a tool supported by a moveable mechanism of the robot system, providing a workpiece supported by a holder, generating an image of the workpiece, extracting a data from the image, the data relating to a feature of the workpiece, generating a continuous three-dimensional path along the workpiece using data extracted from the image, and moving the tool along the path.

Abstract: The present invention discloses a system for testing illuminating elements and a method for testing illuminating elements, wherein the method includes the following steps. Firstly, an illuminating element and an unilluminated area on a circuit board are covered respectively. A reference voltage is obtained according to a brightness of the unilluminated area and a testing voltage is obtained according to a brightness of the illuminating element being driven. Afterwards, whether the illuminating element passes a testing process or not is judged from the reference voltage and the testing voltage.

Abstract: When size of a defect on an increasingly miniaturized pattern is obtained by defect inspection apparatus in the related art, a value is inconveniently given, which is different from a measured value of the same defect by SEM. Thus, a dimension value of a defect detected by defect inspection apparatus needs to be accurately calculated to be approximated to a value measured by SEM. To this end, size of the defect detected by the defect inspection apparatus is corrected depending on feature quantity or type of the defect, thereby defect size can be accurately calculated.

Abstract: The present invention provides an electron beam measurement technique for measuring the shapes or sizes of portions of patterns on a sample, or detecting a defect or the like. An electron beam measurement apparatus has a unit for irradiating the patterns delineated on a substrate by a multi-exposure method, and classifying the patterns in an acquired image into multiple groups according to an exposure history record. The exposure history record is obtained based on brightness of the patterns and a difference between white bands of the patterns.

Abstract: In one embodiment, a pattern inspection method is disclosed. The method can include predicting an edge shape at a given future time with respect to the same inspection target pattern, setting a threshold corresponding to a required specification of the inspection target pattern, and predicting the time when the inspection target pattern fails to meet the required specification from the predicted edge shape and the threshold. The method can further include taking a plurality of images concerning the inspection target pattern at different times by use of an imaging apparatus, detecting edges of the obtained images, respectively, matching the detected edges of different imaging times, and obtaining a difference between corresponding edges to generate a difference vector after the matching. The edge shape of the future time can be predicted based on the generated difference vector and an interval between the imaging times.

Abstract: In accordance with one embodiment of the present disclosure, a difference is detected between a first image and a second image. The second image can include at least a portion of the first image reflected from a display panel and light from an object passing through the display panel.

Abstract: A video calibration device comprising an elongated image tube having a length, a first opening at one end of the image tube and a second opening at the opposite end of the image tube. The device includes an elongated sensor tube having a length, a first opening at one end of the sensor tube and a second opening at the opposite end of the sensor tube. The first opening of the sensor tube is adapted to support a video calibration sensor. A video calibration sensor is disposed in the first opening of the sensor tube. The sensor tube is sealingly secured to the image tube at an angle whereby the second opening of the sensor tube and the second opening of the image tube are substantially juxtaposed.

Abstract: A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.

Abstract: In one embodiment of the present invention a system is provided for allowing a consumer to easily match a suitable pair of primary eyeglasses with a suitable pair of auxiliary eyeglasses. In one example (which example is intended to be illustrative and not restrictive), the suitable pair of primary eyeglasses may be matched with the suitable pair of auxiliary eyeglasses without damaging or opening the package which contains the pair of auxiliary eyeglasses. In another example (which example is intended to be illustrative and not restrictive), the system may comprise a package and/or a displayer.

Abstract: When size of a defect on an increasingly miniaturized pattern is obtained by defect inspection apparatus in the related art, a value is inconveniently given, which is different from a measured value of the same defect by SEM. Thus, a dimension value of a defect detected by defect inspection apparatus needs to be accurately calculated to be approximated to a value measured by SEM. To this end, size of the defect detected by the defect inspection apparatus is corrected depending on feature quantity or type of the defect, thereby defect size can be accurately calculated.

Abstract: Scanning beam device calibration using a calibration pattern is disclosed. In one aspect, a method may include acquiring an image of a calibration pattern using a scanning beam device. The acquired image may be compared with a representation of the calibration pattern. The scanning beam device may be calibrated based on the comparison. Software and apparatus to perform these and other calibration methods are also disclosed.

Abstract: A method of measuring a length of sections of extrados or intrados curves of an elongated workpiece travelling in a bending machine along a forwarding direction, the elongated workpiece having cross-sections each of which is separated by a neutral axis in both an extended portion and a compressed portion when the elongated workpiece is subjected to bending, and at least a neutral cross-section, i.e. not subjected to bending, neutral cross-section beyond which the bending of the elongated workpiece begins along the forwarding direction thereof, provides a measuring instrument positioned so that it engages either an extrados or an intrados point of the elongated workpiece near the neutral cross-section, but displaced therefrom in the forwarding direction of the elongated workpiece. Further, a measuring instrument on a bending machine that embodies the method is described.

Abstract: An apparatus for evaluating a part may include a camera, a camera-holding member for holding the camera in place relative to the part being evaluated, and an indexing surface disposed in a fixed position relative to the camera-holding member. The camera may be positioned to take a simultaneous picture of both the indexing surface and the part in order to evaluate the part using the picture by comparing an indexing surface image with a part image.

Abstract: A gear inspection system and method for a gearbox, wherein an image acquisition unit is oriented proximate the gearbox with a field of view of a section of the gears. The image acquisition unit obtains images of a gear tooth and corresponding contact pattern. In one embodiment a processing unit transforms the images to a gear tooth model so that the gear tooth image and contact pattern image matches the model gear tooth. Metrics are computed for the contact pattern, and based on threshold values, a determination is made as to whether the gearbox is acceptable.

Abstract: If an inspection method for inspecting a patterned medium is intended for the nanoimprint process control, it is necessary to measure a correct shape of each pattern element. On the other hand, if the inspection method is intended for the quality control of products, it is necessary to inspect the products on a I00 percent basis. However, the conventional method which uses SEM or AFM could not satisfy these requirements. According to the present invention, IO0-percent inspection of products becomes possible by a method including the steps of: irradiating a surface of a hard disk medium, on which a magnetic material pattern is formed, with a light beam including a plurality of wavelengths; detecting the intensity of a reflected light beam from the hard disk medium on a wavelength basis; calculating a spectral reflectance from the detected intensity of the reflected light beam; and detecting a shape of each pattern element formed on the hard disk medium on the basis of the calculated spectral reflectance.

Abstract: A box inspector for detecting at an inspection station an unacceptable skew in, an item missing from, and/or an unacceptable gap in a box. The box inspector has pairs of aligned emitters and receivers generating a signal when an unacceptable skew is detected, at least two item present sensors corresponding to the number of items adapted to be located in a single row within the box and generating an item absent signal when an item is missing from the box, a gap detect sensor generating an unacceptable gap signal when the gap is larger than a predetermined gap size, and a box present sensor generating a box present signal when a box arrives at the inspection station. A controller receives signals from these components and generates indications when the box is unacceptably skewed, an item is missing from the box, and/or an unacceptable gap exists in the box.

Abstract: An inspection method for a circuit substrate is disclosed, which inspects electrical properties of a circuit substrate having a multilayered structure, by controlling inspection environments so that dew forms on a surface of the circuit substrate and detecting change of states of the dew to thereby determining variation of a thermal capacity of a conductor with respect to defective contacts or vias, micro vias and a circuit pattern of an inner layer. According to this, the inspection can be performed with respect to a wide area simultaneously and therefore the inspection productivity can be improved. In addition, since the temperature of the conductive wire can be measured directly through change of the dew, the cost for the temperature measurement can be saved. Moreover, the cost for an area sensor to sense the temperature of a wide area may be reduced while improving the inspection speed.

Abstract: A method is for calculating a height of a chuck top. A height of the top surface of the chuck top which corresponds to an arbitrary position specified on the XY coordinate plane by a computer is calculated in each of the four quadrants based on a coordinate transformation formulas. The method includes setting, by using the computer, a conical model in which two adjacent points other than the center point of the chuck top which correspond to the specified coordinates in a predetermined quadrant of the XY coordinate plane are obtained on a circumference having the center point of the chuck top as the origin and specifying an arbitrary point in the predetermined quadrant by using the computer and calculating a height of the arbitrary point of the chuck top based on the conical model, the coordinate transformation formulas and the specified coordinates.

Abstract: A system for improving substrate critical dimension uniformity is described. The system includes an exposing means for exposing a plurality of mask patterns on a first plurality of substrates at predetermined locations with common splits of focus ({Fj}) and exposure dose ({Ek}) for each of the first plurality of substrates to form a plurality of perturbed wafers. A measuring means is provided for measuring a critical dimension of the plurality of mask patterns at each of the predetermined locations for each of the plurality of perturbed wafers. An averaging means is provided for averaging the critical dimension measured at each of the predetermined locations over the plurality of perturbed wafers to form a perturbed critical dimension map. A second measuring means is provided for measuring a sidewall angle of the plurality of mask patterns at each of the predetermined locations for each of the plurality of perturbed wafers.

Abstract: A device for detecting the faulty position of and separating fasteners, more particularly blind rivets in a continuously operating conveyor apparatus, by means of which the fasteners are supplied to an automated joining machine, wherein each fastener is followed in the normal case by a spacer. According to the disclosed embodiments the device has at least three detectors, more particularly contactless inductively acting ring initiators with which on the one hand fasteners can be differentiated from spacers and on the other hand fasteners in the correct position can be differentiated from fasteners in the faulty position in the conveyor apparatus, more particularly in a supply tube. As a result of the at least three ring detectors a minimum-wear low-maintenance operation is ensured so that outage times of the rivet setter and automated riveting machine are reduced as a result of the device connected in on the input side. Furthermore a complex breakdown recognition is possible with corresponding evaluation.

Abstract: A system and method utilizes an image analysis approach for controlling the collection instrument-to-surface distance in a sampling system for use, for example, with mass spectrometric detection. Such an approach involves the capturing of an image of the collection instrument or the shadow thereof cast across the surface and the utilization of line average brightness (LAB) techniques to determine the actual distance between the collection instrument and the surface. The actual distance is subsequently compared to a target distance for re-optimization, as necessary, of the collection instrument-to-surface during an automated surface sampling operation.

Abstract: The condition of a glazing panel is investigated using a viewing device to view an illuminating electromagnetic radiation profile at a target zone. Data relating to the viewed radiation profile is compared to datum data, to produce an output related to the condition of the glazing panel at the target zone.

Abstract: A bonding agent sticking inspection apparatus includes a photographing section, a movement section, and a control section. The photographing section photographs an image of a substrate. The image includes a sticking expected range indicating a range in which a bonding agent should be positioned. The control section controls the photographing section and the movement section, sets an inspection region having a width equal to the pitch between electrodes in an entire edge part in a direction in which the electrodes are arranged in a peripheral edge part of the sticking expected range in the image, detects a ratio of a nicked part of the bonding agent to the inspection region, and judges whether or not an abnormality is present in the bonding agent on the basis of a comparison between the ratio of the nicked part and a threshold set in advance.

Abstract: When size of a defect on an increasingly miniaturized pattern is obtained by defect inspection apparatus in the related art, a value is inconveniently given, which is different from a measured value of the same defect by SEM. Thus, a dimension value of a defect detected by defect inspection apparatus needs to be accurately calculated to be approximated to a value measured by SEM. To this end, size of the defect detected by the defect inspection apparatus is corrected depending on feature quantity or type of the defect, thereby defect size can be accurately calculated.

Abstract: A detecting apparatus used in a bonding apparatus including a capillary and a detection camera disposed with a certain amount of offset from the capillary and capable of detecting a press-bonded ball at a bonding portion after bonding. For a pad in which two edges of a press-bonded ball corresponding to two adjacent sides of the pad are definite, the detecting apparatus detects the respective distances between the two sides of the pad and the corresponding two edges of the press-bonded ball, and compares the detected values to determine if these values fall within previously set allowable ranges; and if the detected values are outside the allowable ranges, the amount of offset is corrected so that the press-bonded ball comes within the allowable ranges.