Abstract: An actuator is disclosed that has a contacting part smaller than a processing limit of a lithography technique, and is able to reduce a contacting area or a contacting length of the contacting part during operation, reduce a sticking force induced by contact, and decrease a driving voltage of the actuator. The actuator includes an operating part and a contacting part in contact with the operating part. The contacting part is formed by overlapping a first pattern on an end of a second pattern. The first pattern has a solid structure and the size of an upper portion of the solid structure of the first pattern on the second pattern is less than a processing resolving power or resolution.

Abstract: An oscillator device includes a first oscillator, a second oscillator configured to support the first oscillator for torsional rotation about a first rotational axis, through a first torsion spring, a supporting member configured to support the second oscillator for torsional rotation about a second rotational axis, through a second torsion spring, the second rotational axis having a predetermined angle with respect to the first rotational axis of the first oscillator, a coil disposed in relation to the second oscillator, an electrical current applying member configured to apply an electrical current to the coil, and a magnetic field generating member configured to apply a magnetic field to the coil. The coil is localized in at least one of zones of the second oscillator being quartered by extension lines of the first and second rotational axes.

Abstract: An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.

Abstract: An actuator includes: a first vibration system including a driving member having a frame shape, and a pair of first axial members each one end of which supports the driving member so as to allow the driving member to rotate about an X-axis; a second vibration system including a movable plate provided inside the driving member, and a pair of second axial members each one end of which supports the movable plate so as to allow the movable plate to rotate about a Y-axis perpendicular to the X-axis; a driving unit including a ferromagnetic member, a coil generating a magnetic field on the ferromagnetic; and a positioning portion that places the ferromagnetic member or the coil symmetrical with respect to an intersection point of the X and Y-axes.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: A disclosed optical scanning device includes: a light source unit having plural luminous sources; a light source driving unit modulating each luminous source in accordance with pixel information; an oscillating mirror supported on a twist beam as a rotation shaft, the oscillating mirror collectively deflecting light beams from the luminous sources and performing reciprocating scanning on a surface to be scanned; an imaging optical system imaging the light beams from the luminous sources on the surface to be scanned; an oscillating mirror driving unit setting a scanning frequency f in accordance with a resonance frequency of the oscillating mirror; and a pitch adjustment unit adjusting beam spot intervals p in a sub-scanning direction in accordance with the scanning frequency f of the oscillating mirror that has been set.

Abstract: A transmissive backlit display is disclosed. In one aspect, the backlit display comprises a backlight and an array of transmissive interferometric modulators. Each interferometric modulator comprises a fixed and moving dielectric mirror stack. The interferometric modulators cause light within the desired wavelength range to be transmitted while reflecting at least a portion of the remaining light.

Abstract: The present invention provides a mirror device, comprising: a mirror; an elastic hinge for supporting the mirror and the elastic hinge has a specific electric resistance. The mirror device further includes an electrode for controlling the mirror, wherein a voltage is applied to the elastic hinge for a predetermined period in synchronous with a change of an electric voltage applied to the electrode.

Abstract: An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.

Abstract: An oscillator device includes a supporting base plate, a torsion spring, and a movable member, wherein the movable member is supported by the torsion spring, for torsional oscillation relative to the supporting base plate about a torsional axis, wherein the torsion spring has an X-shaped section being perpendicular to the torsional axis and a top surface and a bottom surface each being defined by a (100)-equivalent surface of monocrystal silicon, and wherein a distance L1connecting bottoms of concavities formed at the top surface and bottom surface, respectively, and a distance L2 connecting bottoms of concavities defined at side surfaces of the X-shaped torsion spring as well as a rate of change ?i of inertia moment of the movable member around the torsion axis, with a change of a thickness t of the supporting base plate, satisfy the following relation: L1/L2=C1?Exp{C2?(?i+C3)}+C4??i+C5 where C1=5.0*10?=?1, C2=?4.4, C3=4.6*10??2, C4=?6.0*10??1 and 1.5<C5<1.7.

Abstract: The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.

Abstract: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.

Abstract: An optical scanning device includes a plurality of light source sections for supplying beams, and a scanning section for directing beams emitted from the light source sections to scan in a first direction and a second direction substantially perpendicular to the first direction on a beam-receiving region. The scanning section is operated such that a frequency at which beams scan in the first direction is higher than a frequency at which beams scan in the second direction. The light source sections are disposed such that an array of spots produced from supplied beams can be positioned on the beam-receiving region in the first and second directions. Gradations are represented using beams for producing spots positioned in parallel on the beam-receiving region in the first direction.

Abstract: An image display system includes an improved hinge for a micro-mirror device composed of a conductive-doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor. The image display system further includes signal transmission metal traces formed on areas between the doped semiconductor hinges. The signal transmission metal traces are formed either before or after a high temperature crystallization process is applied to the hinges.

Abstract: The present invention aims at providing a mirror device, comprising a plurality of mirror elements, wherein each of the mirror elements comprises a deflectable mirror, and an elastic member for deflectably supporting the mirror, wherein the mirror allows to be controlled under a first deflection control state in which incident light is reflected toward a first direction, a second deflection control state in which the incident light is reflected toward a second direction, and a third deflection control state in which the mirror oscillates between the first deflection control state and second deflection control state, wherein the mirror device reproduces gradations by combining the first through third deflection control states, and the natural oscillation cycle T of the oscillation system constituted by the mirror and elastic member satisfies: 110 [?sec]>T=2?*?(I/K)>2 [?sec], where “I” is the moment of rotation of the oscillation system and “K” is the spring constant of the elastic member.

Abstract: A method of fabricating a micro-mirror assembly. The method comprises the steps of: (a) forming a pair of electrodes spaced apart on a surface of a substrate; (b) depositing a layer of sacrificial material over the electrodes and the substrate; (c) defining a stem opening in the sacrificial material so as to form a scaffold; (d) depositing a layer of resiliently flexible material over the scaffold; (e) depositing a metal layer over the flexible layer; (f) etching through the metal layer and the flexible layer to define an individual micro-mirror; and (g) removing the sacrificial material to provide the micro-mirror assembly. The method produces a micro-mirror assembly with minimal number of MEMS fabrication steps.

Abstract: In an electrophotographic (EP) device, methods and apparatus include determining a delay of one or more sensors (hsync) to accurately know when to start the process of scanning latent images. In one aspect, the sensor includes a leading and trailing edge defined along a direction of laser beam scan travel. Determining the delay includes learning a position of a laser beam on the sensor at a time when a controller connected to the sensor receives a signal from the sensor indicating the sensor is being sufficiently impinged upon by the laser beam. It also includes learning a latest possible position of the laser beam along the direction of laser scan travel where the laser beam can be turned on and still have the sensor assert a signal indicating it has been sufficiently impinged upon by the laser beam. Bi-directionally scanning EP devices are also disclosed, including controllers, photoconductors, sensors, etc.

Abstract: This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.

Abstract: An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

Abstract: An optoelectric device including a deformable membrane with an outer reflecting surface and an inner surface whereon a plurality of permanent magnets are fixed, and having a bottom surface entirely coated with a continuous layer of a flexible material; and a support including a plurality of electromagnets placed opposite the permanent magnets to exert an electromagnetic force thereon, locally displacing a zone corresponding to the deformable membrane.

Abstract: A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.

Abstract: A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

Abstract: MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.

Abstract: An interferometric modulator includes a post structure comprising an optical element. In a preferred embodiment, the optical element in the post structure is a reflective element, e.g., a mirror. In another embodiment, the optical element in the post structure is an etalon, e.g., a dark etalon. The optical element in the post structure may decrease the amount of light that would otherwise be retroreflected from the post structure. In various embodiments, the optical element in the post structure increases the brightness of the interferometric modulator by redirecting light into the interferometric cavity. For example, in certain embodiments, the optical element in the post structure increases the backlighting of the interferometric modulator.

Abstract: Provided are a system and method for reducing failures due to hinge memory. The method, in one embodiment, includes providing a torsional element having an amount of hinge memory, wherein the hinge memory is at least partially created using an average operational temperature. The method, in this embodiment, further includes subjecting the torsional element having the hinge memory to a temperature equal to or greater than the average operational temperature while the torsional element is in a parked state for an amount of time to reduce the amount of the hinge memory.

Abstract: A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

Abstract: Novel applications of nanocoil technology and novel methods of fabricating nanocoils for use in such applications and others. Such applications include inductors or traveling wave tubes fabricated from spiral nanocoils. Such applications includes inductors or traveling wave tubes fabricated from a method for fabricating nanocoils with a desired pitch. Such a method includes determining a desired pitch for fabricated nanocoil, selecting coiling arm orientation in which coiling arm orientation is arm angle between coiling arm an crystalline orientation of underlying substrate, whereby coiling arm orientation affects pitch of fabricated nanocoil, patterning coiling arm structure with selected coiling arm orientation, and, releasing coiling arm, whereby fabricated nanocoil is formed.

Abstract: At least one exemplary embodiment is directed to an optical element driving apparatus which includes a first actuator configured to drive an optical element in accordance with a deformation target value, a sensor arranged to measure a position and an orientation of the optical element, a second actuator configured to drive the optical element in accordance with position and orientation target values and an output of the sensor, and a correcting unit configured to correct a measurement error of the sensor caused by deformation of the optical element.

Abstract: A microactuator including a base frame; and a moving plate having both ends supported by a plurality of elastic support portions inside the base frame, the moving plate having a first side on which a reflective mirror for changing a light path is disposed. At least one first rib is disposed along an edge of a second side of the moving plate, which is the reverse side of the first side of the moving plate, and a second rib is disposed in the center of the second side of the moving plate and correspondingly encloses a permanent magnet. Also, a portion of the second side of the moving plate, except for the first and second ribs, is removed to a predetermined depth to reduce the weight of the entire moving plate and to define the first and second ribs.

Abstract: A micro movable device includes: a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part; a supporting substrate; and a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.

Abstract: An oscillator device includes an oscillation system, a driving member and a control device, wherein the oscillation system includes a first oscillation movable element, a second oscillation movable element and a support member, the first oscillation movable element being supported by a first elastic supporting element, for torsional oscillation relative to the second oscillation movable element and around an oscillation axis, the second oscillation movable element being supported by a second elastic supporting element, for torsional oscillation relative to the support member and around the oscillation axis, wherein the oscillation system has a first natural oscillation mode of a resonance frequency f1 and a second natural oscillation mode of a resonance frequency of f2 which is approximately N-fold of f1 where N is a natural number, and wherein the control device determines set driving frequencies Df1 and Df2 in accordance with a predetermined equation while satisfying a relation Df2=N×Df1 and drives the o

Abstract: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.

Abstract: An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion.

Abstract: It is an object of the present invention to provide a low cost moveable mirror with 2 axes of movement that is suitable for use in an optical application where a relatively large tip of tilt of a mirror is needed in a known series of positions repeatably and rapidly. This object is achieved by providing a planar structure with 4 bending actuators that can be produced through MEMs based manufacturing. The moveable mirror is flexibly connected to the bending actuators so it can be moved on 2 axes. The bending actuators are designed to have substantial length to increase the angular movement of the mirror. Hard stops are provided to provide repeatable and accurate positioning of the mirror for selected positions.

Abstract: A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

Abstract: An oscillator device includes a supporting base plate, a supporting member, a movable plate supported by the supporting member for oscillating motion relative to the supporting base plate, a first functional device having a first function, a second functional device having a second function, a first wiring connected to the first functional device and formed on a first surface of the supporting member, and a second wiring connected to the second functional device and formed on a second surface of the supporting member different from the first surface thereof where the first wiring is formed, such that the width of the wirings on the supporting member can be made wide.

Abstract: An optical-element holding device includes an elastic member that presses an optical element with an elastic force in a direction orthogonal to an optical axis of the optical element and orthogonal to a longitudinal direction of the optical element, and a support member that forms a pair with the elastic member and supports the optical element against a pressing force of the elastic member. At least three pairs of the elastic member and the support member are provided.

Abstract: Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and microlaminates, fibrous hollow and/or solid braids, can be used in structures where motion and restoring forces result from deflections involving torsion, plate bending and tensioned string or membrane motion. In one embodiment, fibrous elements are formed using high strength, micron and smaller scale fibers, such as carbon/graphite fibers, carbon nanotubes, fibrous single or multi-ply graphene sheets, or other materials having similar structural configurations. Cantilever beams and torsional elements are formed from the micro-composite materials in some embodiments.

Abstract: In a fabrication method of fabricating a structure, a basic etching mask corresponding a target shape with a convex corner, and a correction etching mask with a first portion, a second portion and an opening portion are formed on a single-crystal silicon substrate with a (100) principal face, and the silicon substrate with the basic etching mask and the correction etching mask formed thereon is subjected to an anisotropic etching to form the silicon substrate having the target shape. The first portion extends in a <110> direction, respective ends of the first portion are connected to the basic etching mask, and at least one end of the first portion is connected to the convex corner of the basic etching mask. The second portion is connected to a side of the first portion extending in the <110> direction, the second portion includes at least one convex corner, and the opening portion extends straddling a boundary between the first portion and the second portion.

Abstract: An optical module includes a mirror which reflects input light and which outputs output light; and a mirror control section which is opposite to the mirror and which controls, at the time of the input light being reflected from a reflecting surface of the mirror, the reflecting surface by distorting the reflecting surface according to voltage applied to the mirror so as to output the output light an optical coupling characteristic of which changes. By using this optical module, the optical coupling characteristic of the output light changes.

Abstract: An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.

Abstract: A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.

Abstract: An optical scanning device of the invention includes: a substrate; a torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, the drive source is provided on a portion of the substrate at a distance from a connected portion where the substrate is connected to the torsion bar portion, and a substrate shape control device which controls the shape of the substrate itself is provided on the substrate.

Abstract: A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.

Abstract: An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.

Abstract: The object of the present invention is to provide an optical scanning apparatus which is not limited in the disposition of a scanning device, can reduce the adherence of dust to each member of the scanning device, and is enhanced in the reliability of the scanning device, and an image displaying apparatus having the same. The optical scanning apparatus includes a housing for containing and holding therein a scanning device provided with a movable mirror, an elastic supporting portion for supporting the movable mirror swingably about a swinging center, and a supporting base for supporting the elastic supporting portion, an optical member OE constituting a first optical system for directing a beam to the scanning device in the housing, and an optical member OX constituting a second optical system for emerging the beam passed through the scanning device.

Abstract: Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.

Abstract: A movable body apparatus includes an oscillatory system, a driving portion for driving the oscillatory system with a driving signal, a detecting portion for detecting an oscillating condition of the movable body, a storing portion, and an obtaining portion. The oscillatory system includes at least a movable body, and an elastic support portion for supporting the movable body in a swingingly rotatable manner. The storing portion stores data of frequency characteristics of maximum angular displacement based on maximum angular displacements of the movable body corresponding to plural driving frequencies, detected by the detecting portion. The obtaining portion obtains a resonance frequency of the oscillatory system by fitting to the data of frequency characteristics of maximum angular displacement stored in the storing portion, using a least squares method.

Abstract: A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined

Abstract: The present invention provides a resonance type micro-oscillating member capable of retraining a fluctuation of angular velocity, and specifically provides a micro-oscillating member, which is a nested micro-oscillating member, wherein there exist a reference oscillation mode which is the characteristic oscillation mode of a reference frequency, and an even numbered oscillation mode which is the characteristic oscillation mode of a frequency being approximate even number times the reference frequency.