Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.

Abstract: An apparatus for use in optical scanning is disclosed which vibrates at least a part of a vibrating body having a light-reflective surface, to thereby allow light, upon entry, to be reflected from the light-reflective surface in varying directions. The vibrating body includes: (a) a reflective mirror having the light-reflective surface; and (b) an integral spring extending from the reflective mirror and being excited to generate at least a torsional vibration. The vibrating body has vibrational characteristics in which whether or not a resonant frequency of the torsional vibration and a resonant frequency of a disturbing vibration are equal to each other depends upon a shape-defining parameter for defining a shape of the integral spring extending lengthwise. The shape-defining parameter is pre-set to fall within a range allowing the resonant frequency of the torsional vibration and the resonant frequency of the disturbing vibration to be different from each other.

Abstract: An approach for obtaining a transducer mirror structure made from silicon. The structure may have a center portion and a perimeter portion that have an attachment between them which is made flexible after certain etching between the two portions. The attachment may be a web of links or legs. A force applied to the center portion at one end of the structure may cause the center portion to move relative to the perimeter portion. A piezo electric transducer or actuator may be attached to apply the force. An oxide layer, a thin layer of silicon and a mirror may be formed on the other end of the structure. The web of links or legs between the center and the perimeter portions may be established with an RIE etch of gaps through the structure to the oxide layer and an undercutting of the gaps with a KOH etch.

Abstract: A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion, and which may generate a stress in one direction; a second cantilever, which may be formed on either end of the reflection portion beside the first cantilever, and which may generate a stress in the other direction; and a connector portion, which may connect the reflection portion with one end of the first cantilever and with one end of the second cantilever such that the stress generated in the one direction and the stress generated in the other direction are transferred to the reflection portion. The tilt mirror provides a simple composition that can be utilized to alter the path for rays of light.

Abstract: A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring flexures connecting the actuator body to the substrate with strain relief provided via connecting torsional elements. In another embodiment, the suspension system includes a first set of one or more spring flexures each with one end anchored to a largely rigid intermediate frame and the other end attached to the body. A second set of one or more flexures is attached between the intermediate frame and the substrate. A third actuator embodiment maximizes force electrode area to minimize voltage required for electrostatic actuation. A fourth embodiment provides electrical interconnect to an actuator or an actuator array using polysilicon with silicon nitride isolation.

Abstract: A micro electro mechanical device includes an inner frame provided with a movable part and an outer frame provided in a circumference of the inner frame. The outer frame has a fixing part fixed by a joining material. A first torsion bar is provided between the outer frame and the inner frame so as to swingablly support the inner frame on the outer frame. A first opening is formed in the outer frame in a vicinity of the first torsion bar. The first opening is positioned between the fixing part of the outer frame and the first torsion bar.

Abstract: Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS based scanning platform is arranged to have increased efficiency by driving a first frame of the scanning platform directly by applying a drive voltage to a set of comb fingers disposed on the first frame to cause the first frame to oscillate via torsional rotation of a first flexure and by driving a second frame of the scanning platform indirectly via mechanical coupling of the second frame with the first frame via a second flexure, wherein damping losses and work capacity are such that the operation of the scanning mirror is more efficient than if the set of comb fingers were disposed on the second frame and directly driven by the drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or a multiple-dimensional scanner.

Abstract: A two-element f-? lens used for a micro-electro mechanical system (MEMS) laser scanning unit includes a first lens and a second lens, the first lens is a biconvex lens and the second lens is a biconcave lens. At least one optical surface is aspherical surface in both main scanning direction and sub scanning direction, and satisfies special optical conditions. The two-element f-? lens corrects the nonlinear relationship between scanned angle and the time into the linear relationship between the image spot distances and the time. Meanwhile, the two-element f-? lens focuses the scan light to the target in the main scanning and sun scanning directions, such that the purpose of the scanning linearity effect and the high resolution scanning can be achieved.

Abstract: An optical deflector and a light beam scanning apparatus characterized by stable amplitude and speed wherein the fluctuation of the resonant frequency resulting from various factors such as a temperature change is corrected to a predetermined level, and the amplitude of the resonant scanner is kept to a predetermined level. An electromechanical transducer is used as a control element to control the potential difference resulting from the electric charge occurring in the control element caused by rotational vibration of the optical deflector, whereby the fluctuation of the resonant frequency resulting from various factors such as a temperature change is corrected to a predetermined level and the amplitude of the resonant scanner is kept at a predetermined level. This arrangement provides an optical deflector and a light beam scanning apparatus characterized by stable amplitude and speed.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.

Abstract: Briefly, in accordance with one or more embodiments, a coil for a MEMS device, and/or a structure on which the coil is disposed, may have one or more linear segments and one or more non-linear segments. One or more of the non-linear segments may be curved to increase a responsiveness of the coil to the magnetic field in which the coil is operating to provide an increased torque on the rotation of the mirror of the MEMS device in response to a drive signal applied to the coil in the presence of the magnetic field. The non-linear coil may have other shapes and may be any arbitrary shape.

Abstract: MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be controlled by adjusting the linkage between multiple fibers with weak coupling (e.g. base, tip, in-between). Driving mechanisms include base-forcing (magnetics, piezo, electrostatics) or tip forcing (magnetics). Mirrors may be formed on free ends of cantilevers to form optical scanners.

Abstract: A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.

Abstract: System and method for synchronizing the low speed mirror movement of a mirror display system with incoming frame or video signals, and synchronizing buffered lines of video data to the independently oscillating scanning mirror. According to one embodiment of the invention, the peak portions of the low speed cyclic drive signal are synchronized with the incoming frames of video by compressing or expanding the peak portion or turn around portion so that each video frame begins at the same location on the display screen. The actual position of the high frequency mirror is determined by sensors and a “trigger” signal is generated to distribute the signals for each scan line such that the scan lines are properly positioned on the display.

Abstract: A disclosed optical scanning device includes an oscillating mirror supported by a torsion beam for deflecting light beams from a light source unit to scan an object surface backward and forward. A window member transmits light beams incident on and reflected from an oscillating mirror. A sealing member holds the window member and seals a space in which the oscillating mirror is mounted.

Abstract: A combination pivoting mirror and support bracket has a bracket for supporting a pivoting mirror assembly and for attaching the combination to a using device. The bracket has first and second edges. A first portion of the bracket defines a mounting area for fixedly securing the first portion to the using device, and a second portion of the bracket is for mounting the pivoting mirror. An isolation slot is formed in the bracket and located between the first portion of the bracket and the second portion of the bracket. A plurality of piezoelectric devices are mounted to the second portion of the bracket and extend substantially orthogonal to a surface of the bracket. A pivoting mirror has a pair of torsional hinges for pivotally supporting a reflective surface. Each hinge of the pair extends away from the reflecting surface and along a selected axis to an anchor portion.

Abstract: The imaging or exposure device comprises a radiation source (1), a reticle (3) mounted between the radiation source and an optical projection system (4) for shaping the radiation downstream from the reticle (3), the optical projection system (4) comprising a series of mirrors (7, 8, 10, 11) including at least two mirrors (10, 11) that are deformable, having deformer members (12, 13) connected to a control unit (14) associated with an image analyzer (15) to deform the two deformable mirrors in separate manner, firstly as a function of differences relative to an image quality setpoint, and second as a function of differences relative to an image distortion setpoint.

Abstract: A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.

Abstract: A deformable mirror system includes a deformable mirror, which comprises a deformation part with a reflection surface formed thereon, a fixing part configured to fix the deformation part, and a pair of electrodes disposed facing the deformation part and the fixing part, respectively, and a deformable mirror drive device. The deformable mirror drive device includes a drive unit configured to generate drive force so as to deform the deformation part, a capacitance detection unit configured to detect capacitance between the pair of electrodes, a conversion unit configured to convert a target deformation quantity signal into a target capacitance signal on the basis of a relationship between the capacitance and deformation quantity of the deformation part, and a control unit configured to decide drive force generated from the drive unit so as to coincide an output from the conversion unit with an output from the capacitance detection unit.

Abstract: An amplified bimorph scanning mirror for use in various optical systems, an optical coherence tomography scanner incorporating the amplified bimorph scanning mirror, and a method for manufacturing the foregoing are described. A method for optically scanning a target site using the amplified bimorph scanning mirror is further provided. The scan range which can be obtained by exemplary implementations of the present invention can be larger than the scan range made available by conventional scanners.

Abstract: The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.

Abstract: An actuator which is actuated by an external input and also can remove noise caused by a high frequency by providing a low pass filter capable of preventing a particular high frequency through its mechanical structure. The actuator includes an external gimbal, an internal gimbal, and a connection axis which is disposed in an identical direction to an axis extended from the external gimbal. In this intake, the connection axis is provided between the external gimbal and internal gimbal whereby a not desired high frequency vibration may not be transmitted to a vibrated body provided in the internal gimbal. The actuator constructed as above does not need an electrical control and an additional part, and can be actuated by an external input, and also is highly productive and does not require an additional cost by providing a low pass filter with only comparatively simple change of a mechanical design.

Abstract: Provided is an optical scanner for observing an image that is formed by performing two-dimensional scanning with the aid of a swinging movable mirror, using light beams modulated on the basis of image information and emitted from a light source unit. An optical scanner of the present invention includes a scanning device and a fixing member having an attachment portion for attachment of the scanning device, the scanning device including a movable mirror, an elastic support portion supporting the movable mirror such that the movable mirror can swing around a swinging center, a support base supporting the elastic support portion, and a swinging unit for swinging the movable mirror. A first surface of the attachment portion is formed on a plane of a surface of the movable mirror. A second surface of the attachment portion is formed on a plane which is perpendicular to the surface of the movable mirror and includes the swinging center.

Abstract: A micro mirror device and an array thereof are disclosed wherein an outer frame is formed at a position distanced from a mirror plate, thereby reducing a dynamic deformation of the mirror plate, preventing degradation of beam reflected from the mirror plate, and enabling to maintain a balance of the mirror plate. A frame structure supporting a diaphragm of a mirror plate is made to be thinner as it is distanced from a central axis of the mirror plate, thereby reducing a dynamic deformation of the mirror plate to a great extent and embodying the lightness of the device.

Abstract: A scanning beam assembly comprising: a beam generator to generate a beam of radiation, and two or more oscillating reflectors configured to deflect the beam in sequence, each reflector being driven to contribute an incremental deflection of the beam so as to achieve a desired scanning beam waveform, at least one oscillating reflector aligned to receive the beam from the beam generator and deflect the beam to a second oscillating reflector, each oscillating reflector operating in a sinusoidal mode having a frequency and amplitude, and a controller for controlling the phase and/or frequency and/or amplitude of the oscillation of the reflectors so as to provide a desired scanning beam waveform.

Abstract: An optical deflecting device including a supporting member, an oscillating member, and a driving member for driving the oscillating member, wherein the oscillating member includes a first movable element and a second movable element torsionally oscillating about a common torsion axis, a first torsion spring for coupling the first movable element and the supporting member with each other, and a second torsion spring for coupling the first and second movable elements with each other and having a torsion axis the same as the first torsion spring, and wherein the first movable element is formed with a void configured to avoid blocking of incident light being incident on the second movable element from a direction intersecting with the torsion axis.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: A microactuator has a fixed portion and a movable portion that is provided in such a way as to be movable relative to the fixed portion between a first position at which it is in contact with a predetermined portion of the fixed portion and a second position away from the first position. The fixed portion has a first electrode portion, the movable portion has a second electrode portion that can produce an electrostatic force between it and the first electrode portion by a voltage between it and the first electrode portion, and the first and second electrode portions are arranged in such a way that a first force that biases the movable portion in a direction toward the first position according to the electrostatic force created when the voltage is constant reaches a peak when the movable portion is at a third position between the first position and the second position.

Abstract: A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.

Abstract: An optoelectric device including a deformable membrane with an outer reflecting surface and an inner surface whereon a plurality of permanent magnets are fixed, and having a bottom surface entirely coated with a continuous layer of a flexible material; and a support including a plurality of electromagnets placed opposite the permanent magnets to exert an electromagnetic force thereon, locally displacing a zone corresponding to the deformable membrane.