Abstract: A diaphragm device for projector includes a first gear unit, a second gear unit and two diaphragm plates. The first gear unit includes a partial circular arc portion and a gear portion with partial no tooth. The second gear unit includes a circular arc portion corresponding to the partial circular arc portion, and a pinion and a gear corresponding to the gear portion with partial no tooth. When the partial circular arc portion abuts on the circular arc portion, the gear does not rotate. When the partial circular arc portion does not abut on the circular arc portion, the gear portion with partial no tooth meshes the gear to transmit rotation of the first gear unit to the gear. The two diaphragm plates each on which a rack meshing the pinion is formed, moves in directions opposed to each other according to rotation of the pinion.

Abstract: An eyeguard for use on the eye-end of an optical instrument is provided having an instrument-end member adapted for connection to the optical instrument, an eye-end member adapted to interface with the periocular portion of the user's face, a hinge member disposed between the instrument-end and eye-end members having two flexible annular hinges, and a diaphragm comprising a plurality of segments attached to the interior of the hinge member between the annular hinges. The force of the user's eye pressing the eye-end member toward the instrument-end member deforms the annular hinges such that the normally closed diaphragm segments move to an open position, allowing light to pass through the eyeguard.

Abstract: Generally speaking, the output brightness of an illuminator is varied by chopping an output light beam such that the beam is alternately interrupted and unhindered. An interrupter can be rapidly moved into and out of the transmission path of a light beam. The brightness of the light beam received at a site will be attenuated based on the amount of time per cycle the light beam remains obstructed versus unhindered.

Abstract: A variable space shutter includes: a first frame having vertically spaced slats forming vertical openings; a second frame having a horizontal indented channel, the second frame being affixed to the first frame around a periphery of the first frame; and a shutter part having vertically spaced slats forming vertical openings, the shutter part being sandwiched between the first and second frames such that a portion of the shutter part rests within the horizontal indented channel to permit selective sliding movement of the shutter within the channel between a first position, wherein the vertical openings of the first frame line up with the vertical openings of the shutter part, to permit light to pass through the variable space shutter, and a second position, wherein the vertical openings of the first frame line up with the vertical slats of the shutter part, to block light from passing through the variable space shutter.

Abstract: A dimmer wheel which is formed to absorb large amounts of light and to disperse the light that is absorbed. The dimmer wheel has a bottom surface that is irregular, and a reflective material in that bottom surface to scatter the light. A light absorbing material also receives some of the light.

Abstract: The thermally switched reflective optical shutter is a self-regulating “switchable mirror” device that reflects up to 100% of incident radiant energy above a threshold temperature, and reflects up to 50% of incident radiant energy below a threshold temperature. Control over the flow of radiant energy occurs independently of the thermal conductivity or insulating value of the device, and may or may not preserve the image and color properties of incoming visible light. The device can be used as a construction material to efficiently regulate the internal temperature and illumination of buildings, vehicles, and other structures without the need for an external power supply or operator signals. The device has unique aesthetic optical properties that are not found in traditional windows, skylights, stained glass, light fixtures, glass blocks, bricks, or walls.

Abstract: The invention provides micro-optical and fiber based solutions to the problem of reflective telescopes with secondary or tertiary obscurations, and further, it ameliorates secondary or tertiary obscurations in compact reflective fiber-coupled telescopes configured as optical transmitters. One solution uses a custom hollow optical fiber and lens system to generate an annular beam that would not be obscured by the telescope secondary obscuration. Another solution uses a fiber coupled micro-axicon lens assembly to achieve the same result.

Abstract: A display including a light source for generating light, an optical waveguide for receiving and evenly distributing light in a light propagation direction by total internal reflections and a matrix of electromechanical picture elements for modulating light to produce an image.

Abstract: According to one embodiment, an optical device includes a variable aperture mechanism configured on a structure having a radiation detector that receives radiation through an aperture of the variable aperture mechanism. The aperture is selectively movable from a first position to a second position in which the aperture has a different size relative to the aperture in the first position. The structure is configured with one or more magnets that function with one or more magnetically permeable members configured on the variable aperture mechanism to hold the variable aperture mechanism in at least one position using a magnetic force between the magnets and magnetically permeable members.

Abstract: Generally speaking, the output brightness of an illuminator is varied by chopping an output light beam such that the beam is alternately interrupted and unhindered. An interrupter can be rapidly moved into and out of the transmission path of a light beam. The brightness of the light beam received at a site will be attenuated based on the amount of time per cycle the light beam remains obstructed versus unhindered.

Abstract: A system and method is provided for a source for a heralded single photon comprising a correlated photon-pair generator that provides bursts of multiple photon pairs that may be odd or even in number of pairs, one of each pair having a first but not a second characteristic and the other of each pair having the second but not the first characteristic; a first optical path for photons of pairs having the first characteristic; a second optical path for photons of pairs having the second characteristic; a two-photon absorber in the first optical path that, for each burst of photons, reduces the number of first characteristic photons in the first path to zero or one, depending on whether the number of photon pairs in the burst is even or odd; a photon detector in the second path having a heralding signal output to indicate when the number of photons in the burst is odd; and an optical switch coupled to the output of the second optical path and connected to operate in response to the heralding signal.

Abstract: An electro-optical display device comprises: an active matrix unit including a substrate having one surface and the other surface and a plurality of switching elements provided on the one surface of the substrate; a shutter unit provided on the active matrix unit, and a first microlens array provided on the other surface of the substrate of the active matrix unit, the first microlens array having a plurality of microlenses formed on the other surface of the substrate in a corresponding relationship with the plurality of window portions.

Abstract: This optical mask is an optical mask which applies spatial intensity modulation to input light in a beam cross-section and outputs a light after being subjected to the modulation, and when regions A0 to Ap defined by circumferences with p radiuses r1 to rp (p is an even number, rp>rp?1> . . . >r2>r1, and rp?rp?1>rp?1?rp?2> . . . >r3?r2>r2?r1>r1) around a predetermined position are set in order from an inner side, a region Am (m is an even number not less than 0 and not more than p) is a light transmission region, and a region An (n is an odd number not less than 0 and not more than p) is a light shielding region.

Abstract: A heat resistant black coating film which is capable of making the surface of optical members to be low reflection property and black property, a black light shading plate having a resin film using the same as a base substrate, and a diaphragm, a diaphragm device for light intensity adjustment and a shutter using the same, and heat resistant light shading tape. They are provided by a black coating film (A), where a titanium oxide film containing titanium and oxygen as main components, and having an oxygen content of from 0.7 to 1.

Abstract: A method for avoiding an obstacle or an image-quality-degrading optical phenomenon in an image recognition unit is provided. The method includes the steps of providing at least an optical shutter array in the image recognition unit, detecting the obstacle or the optical phenomenon, and closing the optical shutter that corresponds to the portion affected by the obstacle or the optical phenomenon. The method can be readily implemented even when the space for implementing the method is small, for example, in a small space in a camera currently in use, and driving power consumed in the method is small.

Abstract: An illumination device having a filtering device is configured such that the filtering device comprises an optically addressable spatial light modulator with a filtering aperture which is generated by addressing. The position of the filtering aperture within the Fourier plane and/or the size of the filtering aperture is controlled by the control unit. The light modulator is addressed such that the position of the filtering aperture in the Fourier plane corresponds with the position of the intermediate image of the activated light source. At the same time the position of the imaged intermediate image corresponds with the detected position in the observer plane, and the size of the filtering aperture is determined by maximal one diffraction order of the light which is diffracted by the electrically addressable spatial light modulator. The field of application of this invention includes holographic projection displays.

Abstract: The instant invention senses shutter blade position indirectly by sensing the position of rotor(s) driving the shutter blade in an electromagnetically driven actuator system. It generally comprehends systems where a plurality of rotors each drive respective blades of a shutter such that the position of each of the rotors is indicative of the position of their respective shutter blades, and combines such systems with non-optical sensors responsive to the rotors which signal the position of the shutter blades based on the position of the rotors. The non-optical sensors used are preferably responsive to the magnetic fields produced by the rotors, and can be advantageously positioned adjacent stator poles associated with the rotors, which stator poles are associated with the open or closed positions of the shutter blades. The sensors are preferably Hall Effect (Hall IC) sensors producing voltages proportionate to and greatest when the pole of a magnet is proximate the Hall Effect sensor.

Abstract: A blade speed adjustable mechanism includes: a board having an opening; a shutter blade opening or closing the opening; a drive lever supported by the board and bringing the shutter blade into an overlapped operation or an expanded operation; a biasing member engaging the drive lever and biasing the shutter blade in an overlapped direction or in an expanded direction; a ratchet member engaging the biasing member and having ratchet teeth; an engagement member holding the ratchet member at a desired stop position and adjusting an biasing force of the biasing member by changing the stop position. The engagement member has a plurality of pawl portions different from each other in length. The pawl portion engages the ratchet tooth to hold the ratchet member at the stop position. A difference in length between the pawl portions is shorter than a distance corresponding to a pitch of the ratchet teeth.

Abstract: Provided are an illuminating optical system which illuminates a sample, an illumination-side pupil modulating device which is arranged on a side of the illuminating optical system, an illumination-side turret which holds the illumination-side pupil modulating device, an illumination-side-turret revolving mechanism which revolves the illumination-side turret to move the illumination-side pupil modulating device along an orbital circumference on a plane perpendicular to an optical axis, a relaying optical system which relays a pupil of an objective lens, an imaging-side pupil modulating device which is arranged on a side of the relaying optical system, an imaging-side turret which holds the imaging-side pupil modulating device, and an imaging-side-turret revolving mechanism which revolves the imaging-side turret to move the imaging-side pupil modulating device along the orbital circumference on a plane perpendicular to the optical axis.

Abstract: A plasma shutter forming apparatus for forming a plasma shutter used in a system configured to generate and accelerate radiations by irradiating a target with a laser pulse and generating a high-density plasma for blocking the laser pulse which is returned as a feedback light to upstream of the system without being absorbed by the high-density plasma, including a plasma shutter generating target, and a plasma shutter triggering laser irradiator, wherein the laser pulse from the plasma shutter triggering laser irradiator is directed to the plasma shutter generating target to generate the high-density plasma and form the plasma shutter, thereby blocking the laser pulse which is returned as the feedback light. Optics are prevented from becoming damaged by feedback light reflecting when generating the high-density plasma in a laser-driven radiation generating system and returning back to the upstream of the laser system.

Abstract: A component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus is disclosed. The component includes a plurality of diaphragms which are arranged alongside one another with respect to a direction perpendicular to the scan movement and which differ in their form and the position of which can be altered approximately in the scan direction so that a portion of the illumination energy can be vignetted by at least one diaphragm. The form of the individual diaphragm is specifically adapted to the form of the illumination in a diaphragm plane in which the component is arranged. This has the effect that at least parts of the delimiting edges of two diaphragms always differ in the case of an arbitrary displacement of the diaphragms.

Abstract: A multi-sheet through-vision panel includes a first outer sheet, a second outer sheet, and a middle sheet located between the first and second outer sheets. The first and second outer sheets are superposed with one another. At least one light impairing zone is disposed on at least one of the first and second sheets, as well as the middle sheet. A sliding mechanism slides the middle sheet with respect to the first and second outer sheets so that the light impairing zones are moved between a first and second position. The light impairing zones are superposed with one another when the middle sheet is in the first position, but are in a staggered arrangement when the middle sheet is in the second position.

Abstract: A light-amount adjusting apparatus includes a plurality of light-amount adjusting blades that causes a size of a light-passing aperture to change by rotation thereof. Each of the light-amount adjusting blades includes a base portion on which a rotation center portion and a driven portion are formed, and a blade portion that overlaps another light-amount adjusting blade in a light-passing direction so as to form the light-passing aperture. A thickness of the blade portion is thinner than that of the base portion. When the plurality of light-amount adjusting blades is rotated to set the light-passing aperture to be smaller than a full-opened aperture, a thickness of a portion that overlaps an adjacent stop blade is thinner than that of a portion that does not overlap the adjacent stop blade in each of the light-amount adjusting blades. The blades have high dimension accuracy, and deterioration of the optical performance of the apparatus is reduced.

Abstract: A light amount adjustment apparatus having a plurality of light-shielding blade members that can be so manufactured by simple machining as to reduce undesired reflection on end faces of the light-shielding blade members which are parallel with the optical axis and prevent degradation in image quality such as flare and ghosts. A driving force of a stepping motor is transmitted to the light-shielding blade members so that an aperture diameter can be changed. The light-shielding blade members are formed by injection molding of a light-shielding resin material. By performing blasting on an end face of each light-shielding blade member in a part that forms the aperture diameter, an aperture end face whose surface is roughened while substantially maintaining outside dimensions of the light-shielding blade member is formed, and an oblique portion tilted relative to the aperture end face is formed.

Abstract: For displaying a color image by recombination of several single color images, parasitic noise like speckles due to scattering within the system, in particular when laser light is involved, with the invention a significant improvement with a low number of parts can be realized by use of a color wheel that comprises in radially divided zones refractive elements for redirecting light beams incoming at different impinging angles and redistributing elements, e.g. a hologram, that provide for a defined output beam in an optical axis. The sequence of the individual light processing zones on the color wheel are synchronized with respective laser sources. The invention combines the functionality of plural elements, reduces speckles and avoids losses.

Abstract: The invention concerns a device for the controlled conveying of different visual impressions of a room while retaining identical room illumination, consisting of at least two sources of light and at least one set of shutter glasses, where at least one of the light sources (La, Lb, Lc) is chronologically pulse controlled and the shutter glasses (S1, S2) are synchronised with a least one of the pulsed sources of light (La, Lb, Lc).

Abstract: In a method of calibrating a light delivery device (10) having a solid state light source (12), for example comprising LEDs of an LED array, and an intensity control unit (16) comprising LED array driver and a dimmer module for generating a control signal for controlling at least the intensity of the light source, the light source is temporarily connected by a light guide (24; 24, 26) to a radiometer (38) for detecting irradiance of the delivered light. The light delivery device has a memory (30) for storing control signal parameters and associated radiance levels. The light delivery device is calibrated by adjusting the control signal parameters, e.g.

Abstract: Generally speaking, the output brightness of an illuminator is varied by chopping an output light beam such that the beam is alternately interrupted and unhindered. An interrupter can be rapidly moved into and out of the transmission path of a light beam. The brightness of the light beam received at a site will be attenuated based on the amount of time per cycle the light beam remains obstructed versus unhindered.

Abstract: A shutter includes micro-optics having first and second concentrator arrays. A transducer laterally displaces one of the first and second concentrator arrays between transmissive and shuttered modes. In the transmissive mode, the arrays of concentrators are optically aligned to permit electromagnetic energy passing through the first array of concentrators to pass through the second array of concentrators. In the shuttered mode, the electromagnetic radiation is blocked from passing through the second array of concentrators. The concentrators may be compound parabolic concentrators, or lenslets positioned on opposing plates with pinholes printed therethrough. The shutter may increase f-number of radiation passing therethrough, and may be used in a limited f-cone radiation source with shuttering abilities, for example reducing f-cone of radiation output from the radiation source.

Abstract: A lens unit includes a lens array, a first light blocking member, and a second light blocking member. The lens array includes a plurality of lens pairs arranged in a substantially linear arrangement. Each of the lens pairs includes a first lens for forming an inverted reduced-size image of an object and a second lens for forming an inverted enlarged-size image of the inverted reduced-size image. The first light blocking member is disposed between the first lenses and the second lenses, and includes first apertures. The second light blocking member includes second apertures arranged in a substantially linear arrangement corresponding to an arrangement interval of the lens pairs, and having different opening portion shapes depending on a position of the lens pairs in an optical axis direction of the lens pairs. The second light blocking member is disposed at least between the first lenses and an object plane or the second lenses and an image plane.

Abstract: A method of forming a matrix of electrowetting pixels includes forming a patterned layer of electrodes (512) on a substrate (510) and forming a patterned insulating layer (514) on the electrodes (512) and the substrate (510) to define a plurality of wells (516), each of the wells (516) aligned over one of the electrodes (512). A hydrophobic material (518) is formed on the bottom surfaces of the wells (516) and a hydrophilic material (526) is formed on sidewalls (519) of the wells (516), for example by one of selective reaction, selective deposition and selective etching, by the application of a beam (524) at an angle to impact the sidewalls (519) while substantially avoiding impacting the bottom surface (515). First and second liquids (532, 534) are disposed within the wells (516), the first liquid being not soluble in the second liquid.

Abstract: A system for providing extreme ultraviolet (EUV) radiation comprises a laser source arranged to produce a laser beam having a focus; and a carrier movable relative to the laser source for carrying a surface material, the surface material when carried by the carrier providing a renewable target edge. The focussed beam is arranged to impinge on the target edge to produce an EUV radiation emitting plasma. The system is cooperable with a mirror for harnessing the EUV radiation by reflecting EUV radiation impinging thereon. The mirror comprises a substantially aspheric surface and means for supplying a reflecting liquid to at least partially coat the aspheric surface, the mirror being rotatable to centrifugally confine the liquid to the aspheric surface.

Abstract: Generally speaking, the output brightness of an illuminator is varied by chopping an output light beam such that the beam is alternately interrupted and unhindered. An interrupter can be rapidly moved into and out of the transmission path of a light beam. The brightness of the light beam received at a site will be attenuated based on the amount of time per cycle the light beam remains obstructed versus unhindered.

Abstract: The thermally switched reflective optical shutter is a self-regulating “switchable mirror” device that reflects up to 100% of incident radiant energy above a threshold temperature, and reflects up to 50% of incident radiant energy below a threshold temperature. Control over the flow of radiant energy occurs independently of the thermal conductivity or insulating value of the device, and may or may not preserve the image and color properties of incoming visible light. The device can be used as a construction material to efficiently regulate the internal temperature and illumination of buildings, vehicles, and other structures without the need for an external power supply or operator signals. The device has unique aesthetic optical properties that are not found in traditional windows, skylights, stained glass, light fixtures, glass blocks, bricks, or walls.

Abstract: Embodiments of systems and methods for providing a hybrid illumination aperture in optical lithography are generally described herein. Other embodiments may be described and claimed.

Abstract: An electric window dimming device for reducing the light transmission of a window for an aircraft. The electric window dimming device comprises a capacitance. The electric window dimming device is adapted for being connected to the capacitance and to a primary energy source that provides energy. If the primary energy source fails, the capacitance supplies energy for electric window dimming device.

Abstract: A plurality of optical members (lenses) for use in ultraviolet region are mutually stuck. A fluorine-based organic compound (for example, fluorine-based oil) is provided between them. The periphery of the optical members is sealed with a sealant. As the sealant, an adhesive fluorine resin, for example, a soluble fluorine resin is used.

Abstract: An optical element (11) in the form of an at least partially transparent face comprises transparent areas and essentially non-transparent areas. The transparent areas are arranged sufficiently close for the intermediate and essentially non-transparent areas to be essentially invisible to the naked eye, at least when the element is viewed from a given distance. The essentially non-transparent areas are arranged sufficiently close and have a sufficient extent at right angles to the face for the intermediate, transparent areas to have such depth/width ratio that the optical element will, at a given point on the face, allow passage of light with given angles of incidence, while light having other angles of incidence are unable to pass the element at the point in question. Hereby an optical element is obtained that is able to better reduce the heating of the interior of a building that is caused by incoming solar radiation without the direct radiation and hence the view being blocked considerably.

Abstract: A display includes a light switch overlying a backlight and having at least two light shutters which do not, by themselves, convey information by the shape thereof. The lit area of the backlight is equal to or greater than the sum of the areas of the shutters within the area. The display can also include a graphics layer overlying the light switch. The information content of the display is changed by changing the graphics layer.

Abstract: An aperture diaphragm plate is provided to define a light flux on a pupil plane of an optical system or a plane or surface disposed in the vicinity of the pupil plane. An aperture, which is formed in the aperture diaphragm plate, has a three-dimensional shape corresponding to an optimum pupil shape of the optical system. It is possible to improve the imaging characteristic brought about by the optical system by providing the optimum pupil shape of the optical system.

Abstract: The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.

Abstract: Variable aperture and actuator assemblies are provided for a radiation detector housing in an imaging system. The variable aperture assembly includes a ring mounted over the housing's window, a plate having a first aperture disposed over the window, an aperture blade operatively coupled to the ring so the blade moves laterally relative to the first aperture, and an aperture drive mechanism having a body and an actuator coupling member extending at an angle from the body. The drive mechanism is adapted to drive the blade laterally away from the first aperture when the member is moved in a first lateral direction, and over the first aperture to define a second aperture disposed over the window when the member is moved in a second lateral direction. The actuator assembly has an actuator and an actuator arm adapted to engage the actuator coupling member to control the lateral movement of the member.

Abstract: The image sensor 15 of the information processing apparatus 1 can capture the retroreflective sheet 17 subjected to infrared light emitted from the infrared emitting diodes 11 since the retroreflective sheet 17 is exposed when the open-close portion 19 is opened. Therefore, it is possible to detect the input device 3. On the other hand, when the open-close portion 19 is closed, the image sensor 15 can not capture the retroreflective sheet 17 since the reflective sheet 17 is not exposed. Therefore, the input device is not detected.

Abstract: The inventions relates to a lithography system in which an electronic image pattern is delivered to a exposure tool for projecting an image to a target surface, said exposure tool comprising a control unit for controlling exposure projections, said control unit at least partly being included in the projection space of the said exposure tool, and being provided with control data by means of light signals, said light signals being coupled in to said control unit by using a free space optical interconnect comprising modulated light beams that are emitted to a light sensitive part of said control unit, wherein the modulated light beams are coupled in to said light sensitive part using a holed mirror for on axis incidence of said light beams on said light sensitive part, the hole or, alternatively, holes of said mirror being provided for passage of said exposure projections.

Abstract: A beam delivery system for treating target tissue that includes an input for receiving a light beam, a variable attenuator for providing variable attenuation of the light beam, a power and wavelength detection assembly, a spot size adjustment assembly, and a controller. The power and wavelength detection assembly measures the power level of the beam, and detects when unwanted wavelengths are present in the light beam. The spot size adjustment assembly selectively feeds the beam through different optical fibers to achieve different spot sizes of the beam. The controller controls the variable attenuator, the power and wavelength detection assembly, and the spot size adjustment assembly to achieve the desired power and wavelength, and beam spot size.

Abstract: The present invention is to provide an optical filter for enabling a neutral filter for suppressing the quantity of passage light in an optical path to be mass-produced in an accurate position of an optical path opening with correct density characteristics without fluctuations, and the neutral filter is comprised of a filter 14 for suppressing a quantity of transmitted light, a base plate (aperture wheel) 11 attached with the filter to cause the filter to face the optical path, and alignment reference faces respectively formed in the base plate 11 and the filter 14 to define mutual bonding positions, where the filter 14 is formed into a predetermined outside shape by press forming from a transparent or translucent sheet with an light-reducing film formed on its surface, and is coated with the light-reducing film in which are formed two or more density regions having at least one density boundary line, while the outside shape of the filter 14 and the alignment reference faces are concurrently formed in beforeh

Abstract: A light amount adjusting device includes: a cover plate having a light-passing hole; a first separator being sheet-shaped and having a hole; a second separator being elastically deformable and sheet-shaped, positioned on a side opposite to the cover plate with the first separator therebetween, and having a hole; a first light amount adjusting blade movable between the cover plate and the first separator; a second light amount adjusting blade being movable between the first separator and the second separator; a base body to which the cover plate, the first separator, and the second separator are mounted, having a throughhole and mounting grooves, the throughhole being formed to have a diameter larger than a diameter of the hole of the second separator, the mounting grooves allowing the second separator to be mounted therein and being opened toward the throughhole.

Abstract: A light beam generating apparatus and method of controlling the same is provided. The light beam generating apparatus may include a light source, a beam expander collimating a light beam emitted from the light source, an optical shutter selectively transmitting a light beam transmitted through the beam expander, and a focusing lens focusing a light beam transmitted the optical shutter. The optical shutter in the light generating apparatus can selectively transmit a light beam based on on/off control of the optical shutter on a pixel-by-pixel basis. This may permit one-dimensional, two-dimensional and three-dimensional nano patterns having various periods and directions to be manufactured.

Abstract: An object lens includes a first optical system that obtains a magnified image of an object, a second optical system that guides dark field illumination light to the object, a barrel that contains the first optical system and the second optical system and has an optical path around the first optical system for the dark field illumination light, and a shield mechanism that is disposed on the optical path and that varies the incident area of the dark field illumination light to shield the dark field illumination light.

Abstract: A method is provided for detecting, measuring or controlling particles and/or electromagnetic radiation, comprising providing a deformable material containing a deformable aperture defining a path for particles or radiation, adjusting the deformable aperture to a prescribed geometry and/or size by deforming the deformable material to change at least one of the parameters of the path defined by the deformable aperture, and causing the particle or radiation to be detected, measured or controlled to enter the deformable aperture. The method includes the step of monitoring the geometry and/or size of the deformable aperture and controlling the adjustment of the size of the deformable aperture in response to such monitoring. The required apparatus is easily fabricated from inexpensive materials.