Abstract: A display device includes an upper substrate and a lower substrate. Black matrixes are formed upon the upper substrate and color filters are formed between the black matrixes. Microshutter electrodes are formed upon the lower substrate and are configured to open and close. The display device also includes fixed electrodes formed in a vertical direction between the upper substrate and the lower substrate.

Abstract: An apparatus and system having an optoelectronic module, as well as a method of positioning the lens of the optoelectronic module in order to adjust the steering of a light beam are described herein.

Abstract: Liquid crystal displays and devices including the same are provided that include a micro-electromechanical reflective array; and a plurality of plates associated with the micro-electromechanical reflective array. The plates are movable between first and second positions. The plates are configured to operate in a first mode of operation when the plurality of plates are in the first position and to operate in a second mode of operation when the plurality of plates are in the second position.

Abstract: A light quantity adjusting device for adjusting light quantity of a projector apparatus. The adjusting device includes a substrate having an optical path opening and a blade guide surface having level differences in a direction perpendicular to the optical path; a plurality of blade members arranged at a circumferential edge of the optical path opening for rotating along the blade guide surface in an inclined state with respect to the optical path; and a plurality of pins disposed on the substrate for supporting base end portions of the blade members to rotate around the base end portions for opening and closing the optical path opening. A transmission member is mounted on the substrate for engaging the blade members, and a drive device drives the transmission member to rotate the blade members to open and close the optical path opening.

Abstract: Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner, and a method of producing the same.

Abstract: It is an object of this invention to independently control the F-number and the number of light attenuation steps of a multi-density ND filter by using a light amount control apparatus using an iris stop and the ND filter. The iris stop mechanism made up of a plurality of aperture blades and the ND filter having a multi-density pattern are stacked in a single unit. This simultaneously realizes continuous control of the F-number, multi-step control of the light attenuation ratio of the ND filter, a substantially circular stop aperture, and a uniform transmittance distribution in the stop aperture. In the first embodiment, the driving region of an actuator is divided into an ND control region and aperture control region. This makes it possible to independently control the F-number and the number of ND steps by the single actuator.

Abstract: A zone plate modulator modulates an incident wave by changing the relative distance between a pair of complementary reflective zone plates. The modulator acts to reflect the incident wave as a plane mirror in a first configuration, and to diffract the incident wave into a series of focal points along the axis of the modulator as a phase zone plate in a second configuration. A force applied to the zone plates changes the zone plate modulator between the first and second configurations, therefore modulating the incident wave. The force can be an electrostatic force generated by a voltage source. An array of zone plate modulator elements is a compact spot array generator performing both the modulating and focusing functions. An achromatic zone plate modulator provides a both wavelength and polarization independent modulation of the incident wave. A variable optical attenuator comprises achromatic zone plate modulators.

Abstract: A light regulator includes a substrate having an optical aperture, an even number of blade members (six or more) arranged substantially uniformly around the optical aperture, and spindles provided on the substrate for freely rotatably supporting base end portions of the blade members. The blade members are overlapped with each other at edges thereof, and tip portions thereof face the optical aperture. The blade members on the substrate are divided into a first blade set and a second blade set. The first blade set includes at least two first blade members overlapping with each other. The first blade members are rotatably supported at the base end portions thereof on the spindles, and tip portions of the first blades are placed inside an edge of the optical aperture when the first blades are fully closed.

Abstract: A simplified MEMS optical display device driven by electrostatic forces and associated arrays are provided for. The optical display device includes an optically transparent substrate, an optically transparent fixed electrode disposed on the substrate and a pigmented translucent film disposed on the substrate. A moveable optical shutter is affixed to the substrate and is generally aligned with the fixed electrode and the pigmented translucent film. The moveable optical shutter comprises an electrode element and a biasing element. In addition, a fixed portion attached to the substrate and a distal portion adjacent to the fixed portion defines the optical shutter. When an electrostatic voltage differential is established between the fixed electrode and the optical shutter electrode element the distal portion of the optical shutter will move to controllably regulate the pigmentation of an optical signal.

Abstract: A system and method 100 of using residual feedback in a control loop in a manner that substantially eliminates the steady state error in the predicted states that results from the mismatch in gain between the plant and the model. The control effort used by the estimator to predict the next position is modified to compensate for this difference in gain. By integrating the residual, and modifying the apparent control effort accordingly, the residual is driven to have a mean value of zero. When the residual goes to zero, by definition, the steady state error in the position state goes to zero; and to the extent that the model matches the plant, the velocity state also approaches zero such that the steady state error in the predicted states are substantially eliminated, allowing for improved control.

Abstract: The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk.

Abstract: A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with a frame, a moving portion having a mirror portion, and a torsion bar connecting the frame to the moving portion. The wiring substrate is provided with a wiring pattern. The electroconductive spacer separates the micro-mirror substrate from the wiring substrate and also electrically connects the frame to the wiring pattern. The wiring substrate has a surface that faces the micro-mirror substrate. A detector is provided on this surface for detecting the pivot angle of the mirror portion.

Abstract: A vacuum packaged electromechanical micromirror array comprises a 1st packaging substrate, a 2nd packaging substrate, a device substrate with a 1st surface and a 2nd surface, control circuitry on said 1st surface, and micromirrors on said 2nd surface. The device substrate resides on the 1st packaging substrate with electrical connections between them. The electromechanical micromirror array is sealed in a vacuum package formed by the packaging substrates. The vacuum packaged micromirror array may be used as a spatial light modulator (SLM). Methods of fabricating the vacuum packaged array are disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, fabricating micromirrors on the 2nd surface, providing a 1st packaging substrate, mounting the device substrate on the 1st packaging substrate by flip-chip assembly, providing a 2nd packaging substrate, and sealing the packaging substrates by glass frit sealing.

Abstract: Disclosed is an MEMS variable optical attenuator comprising a substrate having a planar surface, optical fibers having an optical signal transmitting end and an optical signal receiving end, respectively, coaxially arranged on the substrate, a micro-electric actuator arranged on the substrate for providing a driving stroke along a direction perpendicular to an optical axis of the optical beam, at least one lever structure arranged on the substrate for receiving the driving stroke of the micro-electric actuator at a first end thereof and transferring an amplified displacement distance to an optical shutter through a second end thereof, an optical shutter arranged on the substrate and connected to the second end of the lever structure so as to be moved by the amplified displacement distance, thereby being displaced to an attenuation position of the optical beam.

Abstract: Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.

Abstract: Described herein is a spectrophotometer having an inlet slit associated to which is at least one electrostatic-film shutter.

Abstract: A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. The ribbon is transversely slit to divide each ribbon into at least two individual wing portions. The wing portions extend laterally from the support and are capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of incident light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.

Abstract: A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. A reflective wing portion extends laterally from the support and is capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.

Abstract: A MEMS optical display system includes an illumination source for providing illumination light, a collimating lens for receiving the illumination light and forming from it collimated illumination light, and a converging microlens array having an array of lenslets that converge the collimated illumination light. The converging microlens array directs the illumination light to a microelectrical mechanical system (MEMS) optical modulator. The MEMS optical modulator includes, for example, a planar substrate through which multiple pixel apertures extend and multiple MEMS actuators that support and selectively position MEMS shutters over the apertures. A MEMS actuator and MEMS shutter, together with a corresponding aperture, correspond to pixel. The light from the converging microlens array is focused through the apertures and is selectively modulated according to the positioning of the MEMS shutters by the MEMS actuators, thereby to impart image information on the illumination light.

Abstract: A method of finding drive values for an actuation mechanism having three degrees of freedom is provided, that will optimize a predetermined parameter of a system that utilizes the actuation mechanism. In one embodiment, a method of finding drive values for a tunable Fabry-Perot cavity is provided, for driving three independently adjustable actuators such that the cavity mirrors of the tunable Fabry-Perot cavity are maintained in a substantially parallel relationship.

Abstract: Disclosed is a MEMS (Micro Electro Mechanical System) variable optical attenuator. The MEMS variable optical attenuator comprises a substrate having a flat upper surface; an electrostatic attenuator disposed on the upper surface of the substrate; transmitting and receiving terminals disposed on the substrate so that optical axes of the terminals coincide with each other; and a beam shutter moved to a designated position between the transmitting and receiving terminals by the actuator, wherein the beam shutter is provided with a first coating layer made of a material with a reflectivity of more than 90% and formed on a surface of the beam shutter, and a second coating layer made of a material with a reflectivity of less than 80% so that a part of light is transmitted by the second coating layer and with a photodisintegration rate of the transmitted light determined by a thickness of the second coating layer.

Abstract: A color-separating apparatus for a liquid crystal projector of single panel type that is capable of improving light efficiency and color revival property. In the apparatus, a color filter has red, green and blue colors formed in a spiral shape. A reflective plate is opposed to the color filter to reflect an incident light reflected and emitted from the color filter into the color filter again. Accordingly, a color light is transmitted with no light loss.

Abstract: An optical system includes a shutter assembly with a stationary support, a shutter pivotably mounted upon and movable with respect to the support; and a shutter drive mechanism. The shutter drive mechanism includes a permanent first magnet affixed to the shutter, and a first electromagnet structure affixed to the support facing a first side of the shutter and including a first-structure first electromagnet. The permanent first magnet and the first-structure first electromagnet are positioned such that activation of the first-structure first electromagnet causes the permanent first magnet to move relative to the first-structure first electromagnet. The shutter drive mechanism further includes a second electromagnet structure affixed to the support facing a second side of the shutter and including a second-structure first electromagnet.

Abstract: A laser countermeasure system uses a fluence trigger along an optical path between an entrance and a detector at an output. The fluence trigger detects laser radiation and blocks the passage thereof beyond the trigger. A shutter at the front end can be operated in response to detection by the trigger. A threat analyzer also receives radiation and automatically breaks the radiation into spectral components for correlation to appropriate filters to remove the harmful coherent radiation. A tunable filter and/or a filter wheel is interposed along the optical path and is controlled by an adjustment system, illustratively servo controls. The adjustment system responds to the threat analyzer to select and interpose automatically the proper filter(s) to attenuate or block the coherent radiation. Thereafter, the fluence trigger and/or shutter operate to restore full operation along the optical path. The system and method provide look-through capability and mission continuity in the face of unknown laser threats.

Abstract: We describe an optical spectral filtering device and associated method for selectively directing a portion of a wavelength multiplexed input signal, entering through an optical fiber, into one or more output signals provided to one or more optical fibers and/or electronic outputs. The optical filtering is accomplished using free-space diffractive wavelength demultiplexing optics combined with a fixed (permanent) patterned structure located in the spectrally dispersed image plane. The structure can block or direct a selected spectral portion of the optical signal to one or more separate outputs, such as an optical fiber or power detector. A single active element in the optical path is used to spatially shift, or steer, the entire input spectrum at the dispersed spectral image plane, to control the portion of the input spectrum illuminating specific features on the permanent patterned structure.

Abstract: Relates to writing an array of optical elements which are each switched between two states according to input data sets. In a first method, data is written in two steps in which different selected elements are respectively driven to one binary state and the other binary state. The selected elements of the two sets may be complementary, but are preferably only those which are required to change from their existing state. The latter criterion may be used in an alternative method using a single addressing of the array to turn elements in either direction as required. In a further method, as shown, selected elements only of a blank array are written in a first WRITE step so as to correspond with a set of data, and in a subsequent second ERASE step the selected elements are selectively erased to restore a blank array prior to writing and erasing another set of data. The methods have particular utility for maintaining a dc balance at pixels of a liquid crystal array.

Abstract: A quasi-optical system is provided. More specifically, a quasi-optical system is provided comprising various embodiments of quasi-optical grids (such as arrays or layers and the like) with reconfigurable quasi-optical unit cells. The quasi-optical system, grids and unit cells are configured to control an incident beam in a variety of ways.

Abstract: An electro-mechanical grating device including: a base having a surface; a bottom conductive layer provided above said base; a spacer layer is provided and a longitudinal channel is formed in said spacer layer, wherein said spacer layer defines an upper surface and the channel having a first and a second opposing side wall and a bottom; a plurality of spaced apart ribbon elements disposed parallel to each other and spanning the channel, said ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel and each of the ribbon elements is provided with a conductive layer; a mechanical stop provided between the bottom conductive layer and the bottom of the channel wherein the mechanical stop forms a rigid barrier that is separated from a lower ribbon surface of the ribbon elements by a distance h0.

Abstract: There is provided a small-sized and slim driving device which is easy to manufacture and capable of producing high output. A magnet has a cylindrical shape, and at least the outer peripheral surface of the magnet is circumferentially divided into n sections magnetized so as to have alternately different poles. The magnet can rotate about a rotational axis of the cylindrical shape. A coil is arranged axially of the magnet and parallel thereto. An outer magnetic pole portion is disposed to be magnetized by the coil, and has a plurality of hair comb tooth-shaped portions opposed to the magnet and arranged around the magnet such that an angle corresponding to the circumferential width of each of the hair comb tooth-shaped portions opposed to the magnet about the rotational axis of the hollow cylindrical shape of the magnet is equal to a predetermined angle A.

Abstract: There is provided a small-sized and slim driving device which is easy to manufacture and capable of producing high output. A magnet has a cylindrical shape, and at least the outer peripheral surface of the magnet is circumferentially divided into n sections magnetized so as to have alternately different poles. The magnet can rotate about a rotational axis of the cylindrical shape. A coil is arranged axially of the magnet and parallel thereto. An outer magnetic pole portion is disposed to be magnetized by the coil, and has a plurality of hair comb tooth-shaped portions opposed to the magnet and arranged around the magnet such that an angle corresponding to the circumferential width of each of the hair comb tooth-shaped portions opposed to the magnet about the rotational axis of the hollow cylindrical shape of the magnet is equal to a predetermined angle A.

Abstract: A micromirror (110) includes a frame portion (112), a gimbal portion (114) and a mirror portion (116) formed from a single piece of material. A plurality of truss members (140/142) are disposed beneath the gimbal portion (114) and mirror portion (116), allowing the gimbal and mirror portions (114/116) to be made of a thinner material, reducing the mass and increasing the resonant frequency of the micromirror device (110).

Abstract: A variable bandwidth tunable optical filters comprised of two transparent optical substrates, upon each of which is deposited a linearly variable multilayer interference filter coating which varies in total thickness from end to end in a wedged fashion. This wedge imparts a corresponding variation of the center wavelength of the filter bandpass with respect to the linear position of the coated filter substrates. The variable bandpass tunable filter can be adjusted to a specific center wavelength by moving the filter pair together linearly through the incident beam. The bandwidth of the filter pair is maximized when the two filters are spectrally aligned, and is determined by the bandwidth of the individual filters. The variable bandwidth of the tunable filter can be adjusted by introducing a relative linear offset between the linearly variable filter pair.

Abstract: In accordance with the present invention, an array of individually addressable micromachined light reflecting ribbons provide a high speed light valve action by employing a method in accordance with which the ribbons flex about their longer axis under the action of an applied electrostatic field. The ribbons are mounted on pedestals such that the resulting micromechanical structures are substantially symmetrical with respect to a plane along their long axis through the centers of the pedestals and normal to the substrate. This micromechanical arrangement ensures a structure with a high natural frequency, thereby allowing high light valve switching speeds. The particular mode of deformation also ensures a robust structure. The method may be applied in either “bright field” or “dark field” (Schlieren) mode. The particular combination of materials employed allows the method to be used in higher incident power applications such as those encountered in the printing industry.

Abstract: A variable spacing diffraction grating is fabricated using micro-electromechanical (MEMS) technology. An array of interconnected beam elements is fabricated into a diffraction grating and mounted in such a manner that one or both ends of the array of beam elements may be actuated using a mechanical actuator. The beam elements may be linear, spiral shaped or arranged in a staircase structure. Applying a force to one or both ends of the array of beam elements changes the spacing of the grating, and presents a different ruling spacing distribution to incoming radiation, thus altering the diffracted angle among individual diffraction orders of the wavelength. Controlling the diffracted signal in this way allows for specific diffraction pass bands to be fixed on a particular detector or a particular area of a detector or optical relay lens or lenses.

Abstract: An adaptive optics system is disclosed whereby at least one mirror in the system is manipulated using electrostatic force to selectively attract or repel a portion of the mirror to or from a particular electrode, respectively. This attraction or repulsion is accomplished by mechanically coupling a bound charge layer of dielectric material to at least one surface of the mirror and then placing a voltage across an electrode in an array of electrodes positioned near that mirror. The charge in the dielectric material combined with a suitable electric field makes it possible to attract portions of the mirror in one instant and then, by changing the sign on the voltage placed across the electrode, to repel those same portions in the next instant.

Abstract: A novel optical-electrical MEMS device overlaid or covered with an optically transmissive substrate held spaced in inverted preferably flip-chip bonded fashion to the device, with transparent electrodes provided in the substrate for generating an upper mirror-actuating field to supplemental the customary lower mirror-well field, enabling complementary operation.

Abstract: A protective cover (10) for an optical device, such as a spatial light modulator or an infrared detector or receiver. The cover (10) has an optically transmissive window (11), which has a coating (12) on one or both of its surfaces. The coating (12) is made from a halogenated material, which is deposited to form a chemical bond with the surface of the window (11).

Abstract: A device for use in a micro-electro-mechanical system (MEMS) optical system. The device includes a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover, and the second side is an irregular surface.

Abstract: A microstructure is provided which facilitates alignment by allowing movement of the microstructure between one of a plurality of positions. The microstructure is included in an electromechanical machine which comprises a base layer, an actuator and two or more structural plates. One of the structural plates can be deflected to select a movement limit for the other structural plate. Methods for configuring the structural plates relative to each other to facilitate alignment are also provided.

Abstract: A light shutter for controlling a light signal between occluded and uninterrupted states. The shutter has a frame which mounts a beam under compression so that it assumes either of two bi-stable buckled positions. An occluder is mounted on the beam, A shape memory alloy actuator is provided which applies a force transverse on the beam as the actuator is heated to its shape change transition temperature. The transverse force bends the beam, causing it to buckle to the opposite bi-stable position. This moves the occluder into or out of the path of the light signal.

Abstract: A tilt mirror Fabry-Perot tunable filter comprises a frame and a first mirror structure. A tether system connects the first mirror structure to this frame. The tether system is designed to enable the tilting of the first mirror structure relative to an optical axis, in addition to translation of the first mirror structure along the optical axis. A second mirror structure is further provided to define an optical cavity in combination with the first mirror structure. At least two drive electrodes are provided for electrostatically tilting and translating the first mirror structure. The resulting MEMS Fabry-Perot tunable filter is capable for hitless tuning. It can be tuned to between bands directly, i.e., without dropping intervening bands.

Abstract: An electromechanical conformal grating device having a period &Lgr;, that includes: an elongated ribbon element including a light reflective surface; a pair of end supports for supporting the elongated ribbon element at both ends over a substrate; an intermediate support; and means for applying a force to the elongated ribbon element to cause the element to deform between first and second operating states, where in the second operating state the elongated ribbon element mechanically conforms to the intermediate support forming a conformal grating having alternating raised and lowered portions, and wherein the length of the raised and lowered portions are substantially equal.

Abstract: Novel light switches and attenuators are disclosed. In one form of the invention, a novel 2×2 crossbar switch is formed by positioning a movable reflector intermediate four fiberoptic lines. In another form of the invention, a 1×N switch is formed by providing a plurality of cantilevers each having a reflective surface thereon. In still another form of the invention, a novel light attenuator is formed by positioning a movable arm intermediate two fiberoptic elements.

Abstract: A self-calibrating nulling radiometer for non-contact temperature measurement of an object, such as a body of water, employs a black body source as a temperature reference, an optomechanical mechanism, e.g., a chopper, to switch back and forth between measuring the temperature of the black body source and that of a test source, and an infrared detection technique. The radiometer functions by measuring radiance of both the test and the reference black body sources; adjusting the temperature of the reference black body so that its radiance is equivalent to the test source; and, measuring the temperature of the reference black body at this point using a precision contact-type temperature sensor, to determine the radiative temperature of the test source.

Abstract: The present invention is directed to a system for modulating thermal infrared radiation for a pyroelectric imaging sensor or similar sensor by providing two discs rotating at the same speed, both discs provided adjacent to one another and between a source of radiation and a radiation sensor. Each of the discs is provided with a solid portion and an open portion. Changing the orientation of the solid portions of each the discs with respect to one another would change the sensitivity of the modulation device.

Abstract: There is provided a flat panel display using a micro-electromechanical device, comprising a back glass substrate having a transparent electrode of a transparent electric conductor; a front glass substrate having a color filter layer; an micro-electromechanical device formed at the transparent electrode to switch light; and a support beam for supporting the back glass substrate and the front glass substrate. The micro-electromechanical device used in the flat panel display is fabricated by a micro-machining technology, thereby increasing a light utilizing efficiency and remarkably reducing a fabricating cost.

Abstract: An electro-mechanical grating device including: a base having a surface; a bottom conductive layer provided above said base; a spacer layer is provided and a longitudinal channel is formed in said spacer layer, wherein said spacer layer defines an upper surface and the channel having a first and a second opposing side wall and a bottom; a plurality of spaced apart ribbon elements disposed parallel to each other and spanning the channel, said ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel and each of the ribbon elements is provided with a conductive layer; a mechanical stop provided between the bottom conductive layer and the bottom of the channel wherein the mechanical stop forms a rigid barrier that is separated from a lower ribbon surface of the ribbon elements by a distance h0.

Abstract: A torsional micro-mechanical mirror system includes a mirror assembly rotatably supported by a torsional mirror support assembly for rotational movement over and within a cavity in a base. The cavity is sized sufficiently to allow unimpeded rotation of the mirror assembly. The mirror assembly includes a support structure for supporting a reflective layer. The support structure is coplanar with and formed from the same wafer as the base. The torsional mirror support assembly includes at least one torsion spring formed of an electroplated metal. An actuator assembly is operative to apply a driving force to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly. In another embodiment, a magnetic actuator assembly is provided to drive the mirror assembly.

Abstract: A microelectromechanical (MEMS) device has a substrate, and a generally planar moving element, such as a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.

Abstract: A Finite Impulse Response (FIR) filter for suppressing ringing in tunable, or adjustable, members of MEMS devices is described. In embodiments of the invention, the FIR filter includes staggered proportional plus delay filters, or posicast filters. The FIR filter of the present invention is applicable to an adjustable mechanical member in a MEMS device which can be modeled as single mode second order system characterized by a resonance frequency &ohgr;0 and damping constant &zgr;<<1, i.e., a highly underdamped, single mode, second order system.