Abstract: A light transmittance adjusting apparatus for adjusting a windowpane of an automobile or a building has a fixed member and a movable member arranged in parallel with each other and having a plurality of light interception sections and light transmission sections formed thereon alternately. The vertical position of the movable member are changed electrostatically relative to the fixed member to adjust the light transmittance of the windowpane. Each light interception section has a semi-interception region, the light transmittance of which decreases gradually from a center region thereof toward the adjacent light transmission section. The semi-interception region of the light interception section of a light interception plate of the fixed member overlap the semi-interception region of the light interception section of a light interception plate of the movable member, thus accomplishing an optical interception completely.

Abstract: A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched).

Abstract: A headlamp system for an automotive vehicle is provided having a light source generating light, a reflector, a generally transparent light shield, an electrostatic shutter and a lens. The light shield has a surface and laterally displaced edges. The reflector has a predetermined relationship with the light shield and the light source and directs a portion of light from the light source to the surface of the light shield. The electrostatic shutter means is adjacent the surface of the light shield to selectively blocking a portion of the light from the light source. A lens between the light shield and the image surface directs light passing the light shield.

Abstract: This invention relates to a scanning micro-element for an optical system, characterized in that it comprises:a substrate (12),a membrane (14, 16) made of a dielectric material deposited on a substrate surface, the membrane defining two planes making a non-zero angle .alpha. between them, part (14) of the membrane including a reflecting area (20) capable of being deflected along at least a first direction above a cavity formed in the substrate,means (22, 24, 26, 28) to deflect this part of the membrane along at least one direction.

Abstract: A switching device comprises a swinging element (1) that is able to move between two end positions (A, B). Holding electrodes (4, 5) are placed in end positions (4, 5). A control circuit (8) controls the switching by generating signals of suitable voltage. Swinging element (1) is attached in an elastic manner (for example, by a flexible rod 2) in such a way that the elastic return force which tends toward a zero position (0) has, in an essential amplitude range, a higher value than the electrostatic force of attraction created by the control circuit and holding electrodes (4, 5) and acts in the opposite direction, in such a way that the switching time of the swinging element is determined primarily by its natural frequency and not by the magnitude of the electrostatic force of attraction.

Abstract: A micromolded integrated ceramic light reflector which can be totally integrated with drive and control electronics embedded on the same substrate for use with image projection systems. Each light reflector can be molded to a size on the order of less than one (1) mm.sup.3 using the method of the present invention. Each light reflector includes a ceramic base element with a cavity and one surface thereof. A beam extends from one end of the cavity and cantilevers out therefrom above the cavity. The beam is made from the same ceramic as the base element and is coated with an electrically conductive ceramic coating which is also a good reflector of the visible radiation spectrum. The base of the cavity is coated with the same electrically conductive ceramic, or with a metallic coating. In either case, the coating is electrically grounded. When the beam is in its normal, undeflected position, light incident on the top surface of the beam reflects at a first angle.

Abstract: A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.

Abstract: A mechanical beam isolator uses rod-shaped elements having a Gaussian configuration to interrupt the path of a beam of photons or particles when the time-scale of the needed interruption is of the order of a microsecond or less. One or more of these rods is mounted transversely to, and penetrates through, a rotating shaft supported by bearings. Owing to the Gaussian geometry of the rods, they are able to withstand much higher rotation speeds, without tensile failure, than rods having any other geometrical shape.

Abstract: An architecture for a compact, 1.times.N optical switch. The switch package receives light from an input optical fiber (12b), which is directed over a well or gap at the bottom of which lies a micromechanical structure (10). If the structure is in an unaddressed state, the light travels into an in line output optical fiber (12a). If the structure (10) is in an addressed state, it intercepts the light and reflects it out of the plane of the input optical fiber to an offset mirror (24). The offset mirror (24) then reflects the light to one output fiber (16a, 16b). The offset mirror may have steps such that more than one optical fiber could become the output fiber, depending upon the structure's position.

Abstract: A collimator for radiation therapy, particularly for medical use, including a first pair and a second pair of blocks for deflecting the radiation-therapy beam that is guided between the blocks of each pair, the pairs of blocks being superimposed with respect to each other and slidable on mutually perpendicular guides, a motor being provided to move the first and second pairs of blocks along the guides.

Abstract: A microceramic optical shutter includes a unitary ceramic body which has been formed with first and second internal cavities, a coil structure formed in the first internal cavity and a ferromagnetic stator formed in the second internal cavity and disposed in operative relationship with the coil structure.

Abstract: A galvanomirror includes a rocking member provided with a reflector. The rocking member is constituted of a semiconductor such as silicon, and connected to a hollow portion of a first plate through two elastic members. Second and third plates are insulatively bonded onto both sides of the first plate. Four electrodes are symmetrically provided on those portions of the second and third plates that correspond to the rocking member. In this constitution, if the rocking member is charged positively (negatively), the electrodes are charged negatively (positively), and the electrodes are charged positively (negatively), the rocking member is rotated (rocked) while the elastic members are twistedly deformed.

Abstract: A converter for converting a reflection type scanner to a transparence type scanner comprising a casing equipped with a window through which light beams for transparence type scanning may pass. Inside the casing at the area of the window is a light distribution plate to transmit and to distribute incidence light beams to all areas of the light distribution plate. At both sides of the window are two light incidence windows through which incidence light beams may pass. Inside the casing at the area of the incidence windows are two reflecting mirrors to reflect the incidence light beams to at least an edge surface of the light distribution plate whereby the incidence light beams enter the light distribution plate and are distributed to the whole area of the light distribution plate. A control device and a noise minimizing device positioned in a reflection type scanner is also disclosed in this invention.

Abstract: A device for controlling an amount of light allowed to reach a photosensitive surface includes a movable light regulating member, an electrically conductive coil mounted to move with the member, a first permanent magnet having a north pole located adjacent a first side of the coil, and a second permanent magnet having a south pole located adjacent the first side of the coil. The invention is characterized by third and fourth permanent magnets located adjacent a second side of the coil. A north pole of the third magnet is located opposite the south pole of the second magnet and a south pole of the fourth magnet is located opposite the north pole of the first magnet. When electrical current is passed through the coil in one direction, the member is moved in a first direction, and when electrical current is passed through the coil in another direction, the member is moved in a second direction.

Abstract: A method of providing control signals for resetting mirror elements (10,20) of a digital micro-mirror device (DMD) having reset groups (FIG. 4), or for resetting moveable elements of other micro-mechanical devices that operate with similar principles. A bias voltage is applied to the mirrors and their landing sites, and an address voltage is applied under the mirrors. (FIG. 3). The address voltage is held at an intermediate level except during a reset period. During this reset period, the address voltage is increased. Also, during reset, the bias applied to mirrors to be reset is pulsed and offset, and the bias applied to mirrors not to be reset is increased. (FIGS. 5 and 6).

Abstract: A light-quantity control device includes a drive source, a light-quantity control member which is arranged to vary the amount of opening of an aperture by shifting its position, and a speed control part which is arranged to control the driving speed of the drive source in proportion to a rate of change per unit time of the area of the aperture of the light-quantity control member.

Abstract: A light-quantity control device includes a drive source, a light-quantity control member which is arranged to vary the amount of opening of an aperture by shifting its position, and a speed control part which is arranged to control the driving speed of the drive source in proportion to a rate of change per unit time of the area of the aperture of the light-quantity control member.

Abstract: The present invention provides a variable attenuator for an optical transmission system having a disc-like masking plate with apertures (or image zones) formed in an arcuate control area at the periphery of the plate. Within each aperture, at least one opaque masking member is provided extending outward from the origin to the perimeter of the aperture and having a masking surface with an incremental masking area which continuously increases in magnitude with increasing radial length of the aperture. The perpendicular cross-section of each masking member with respect to the optical axis preferably forms a geometric shape having straight-line edges extending radially outward from the origin of the aperture. In the preferred embodiment, a plurality of masking members are utilized (as a pair or sets of pairs).

Abstract: An electrostatically actuated color video display is disclosed which can be illuminated by backlighting transmitted through the display and by reflected ambient light to have good visibility in both bright daylight and in subdued or dim light. To display full-color dynamically changing images from an electronic video signal the functions of creating the image and of generating color light rays for use in the image are separated. A preferred embodiment employs a pixellated color screen having rectangular cells of alternate red, green, blue and a somewhat opaque white color and a shuttering mask comprising an array of selectively actuatable light-modulating capacitors with black movable electrodes that when retracted are in registration with and present an open light path to individual color screen cells and when extended present a continuous black screen appearance.

Abstract: A projection apparatus is disclosed that can be used for projection TV and related applications. The apparatus comprises a light source, a projection optical system, a DMD with multiple micromirrors, and a controller for individually controlling the tilt of the micromirrors. The projection optical system comprises, in order from the DMD side, a first lens group, an aperture stop, and a second lens group. An illumination stop is situated between the first and second lens groups. Light from the light source passes through the illumination stop and the first lens group to impinge on the DMD. The controller coordinatedly controls the tilt of the micromirrors in the DMD so that the impinging light is selectively reflected to one or the other of the aperture stop and the illumination stop, thereby eliminating ghost-forming reflections of light not projected onto a screen.

Abstract: A method of preventing adhesion of contacting surfaces of micro-mechanical devices (10). Two materials are selected that are incompatible in the sense that they have at least low solid solubility and preferably, an inability to alloy. One of these materials is used as the first contacting surface (11), and the other as the second contacting surface (17).

Abstract: It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed on a surface of a micromechanical device. When the surface comes in contact with another surface, the oriented monolayer decreases the Van der Waals forces to reduce the attraction between the surfaces.

Abstract: An optical test instrument, for testing response of an optical medium to optical energy, comprises a light source for emitting optical energy in response to electrical energy, a detector for providing an electrical output signal in response to incident optical energy, and a propagation path for delivering optical energy from the light source to the medium under test and for delivering optical energy from the medium under test to the detector. A positioning mechanism displaces an optical attenuator element between a first position, in which it is out of the propagation path, and a second position, in which it is interposed in a segment of the path in which the optical energy is propagated as a beam.

Abstract: A micro-mechanical shutter array using micro-mechanical technology and silicon-on-transparent-substrate technology. The micro-mechanical shutter array is operated by using electro-static forces. Two basic types of shutter movements are described, viz. an electric force/electric counter-force and an electric force/mechanical (spring) counter-force.

Abstract: An adjustable optical component, for example an optical slit having adjustable slit width, comprises a movable member for providing an optical function, for example a slit and/or a shutter, and resilient suspension elements for connecting the movable member to a frame. The essential parts of the movable member, of the resilient suspension elements and of the frame consist of microstructures which are made of a common base material. Preferably, these parts are manufactured from a silicon chip by a micromechanical technique comprising, for example, anisotropic etching. In the case of an optical slit, the movable member comprises a plurality of openings of different widths which constitute a step slit. In order to adjust different slit widths, the member is moved along a line parallel to the center line of the step slit, with the force for moving the member being applied at an opening. When the member is moved by an external force, the resilient silicon beams are bending and the bars are moving.

Abstract: A small-sized, simple, high-resolution slit system adapted for use in a mass spectrometer. The slit system forms a slit whose width can be electrically controlled. The slit system comprises two displacement-enlarging mechanisms disposed in rotation symmetry. Each displacement-enlarging mechanism comprises two levers disposed in series. Each displacement-enlarging mechanism is formed by one flange provided with a groove extending therethrough. A piezoelectric device which expands and contracts along one axis is mounted to the input end of each displacement-enlarging mechanism. A blade is mounted to the output end of each displacement-enlarging mechanism. Both blades together form the slit which can be opened and closed.

Abstract: A method of fabricating a digital micromirror device (DMD) (10) spatial light modulator (SLM) with a hardened superstructure hinge (16). The invention comprises strengthening a hinge layer material (36) by ion implantation before etching the hinge layer material (36) to form the hinge (16), but could be implanted after etching the hinge (16). The ion implantation is applied with a predetermined energy to concentrate the implanted material (62) at the center of the hinge layer material (36). The entire process is performed using conventional robust semiconductor processes, at low temperatures. Through ion implantation, the DMD hinge (16) is strengthened to minimize or eliminate the possibility of creep. A combination of ions could be implanted if desired. The ion chosen is based on the solubility of the hinge material.

Abstract: A laser ablation apparatus and method removes undesired portions of a workpiece. An industrial laser generates a beam of optical energy and directs the beam at the workpiece. A mechanism in the path of the beam for shapes the cross-section of the beam and includes first and second linear actuators on opposite sides of the beam path. Each of the actuators includes a plurality of linear members, with each linear member being adjacent to and in contact with another linear member, and means for individually inserting and retracting each of said members into and out of said beam path a desired distance to thereby shape the beam so as to ablate only undesired portions of the workpiece.

Abstract: A micro-optical shutter array (92, 102) having a number of tiny shutters (10), which revolve so as to intermittently block light from a via (12), and which may be operated in either a stepping or continuous motion. The array (92, 102) may be batch manufactured using integrated circuit fabrication techniques. For each shutter, a via (12) is etched through a substrate (11). A rotor (13, 43, 53, 63) with at least one opening is fabricated over the via (12), such that as the rotor (13, 43, 53, 63) turns, radiation transmitted through the via (12) is selectively blocked or not blocked.

Abstract: An optical sight laser device having:a laser source (4) capable of emitting a laser beam (6);an optical sight system (1), through which a sight beam (9) passes, intended to allow an operator to direct the laser beam toward a target;a control device (11) capable of triggering the laser source (4) with a view to firing, initiated by an actuating member (5), at the disposal of the operator; anda movable element (12) capable of occulting the sight beam (9) during laser firing, wherein the movable element (12) is capable of also occulting the laser beam (6) and it occults alternately the laser beam (6) and the sight beam (9) at a frequency such that the operator's retinal persistence is maintained.

Abstract: A lamp shade moving mechanism for transparency scanning includes a guiding rack, a sliding block, a driving motor and a belt. Grooves are formed on inside wall of two lateral sides of guiding rack to hold and lead sliding block. Driving motor and belt move sliding block to make a linear to-and-fro movement along guiding rack. A lamp shade is disposed on the sliding block, characterized by having simple components and capable of performing high speed scanning.

Abstract: A method for controlling a digital micromirror device 40 resulting in decreased mechanical stress, longer device lifetimes, decreased incidence of spontaneous bit reset, and increased pulse-width modulation accuracy. To reduce the device stress, the bias voltage 142 applied to the mirror 50 may be reduced after the mirror 50 has been latched. To prevent premature mirror changes, the address electrode bias voltage 140 may be reduced after the mirror is driven to the desired position. To ensure that the mirror 50 returns to the neutral position during reset, the mirror bias voltage 142 may be raised from ground potential to approximately halfway between the two addressing voltages during the reset period 152. To reduce the effects of hinge memory and to ensure that the mirror 50 rotates toward the proper address electrode, the mirror bias voltage 142 may be gradually increased to allow the mirror 50 time to rotate towards the proper address electrode.

Abstract: A method of preventing sticking of moving parts of a micro-mechanical device. A set of microwave frequencies, which will cause water molecules to resonate, is determined. From this set of frequencies, an applied frequency that will provide an efficient energy coupling from the source to the device is selected. The device is continuously irradiated with radiation of this frequency.

Abstract: An integrated galvanometer scanning device controllably deflects a beam of light. The device has a planar silicon wafer substrate with front and rear surfaces, first and second longitudinal slots extending from the front surface to the rear surface, and top and bottom grooves extending between the first and second longitudinal slots. The slots and grooves define a central portion of the wafer. A magnet is attached to the rear surface on the central portion of the wafer and a magnetic circuit is attached to the rear surface. A reflective surface is formed on the front surface on the central portion of the wafer. A strain gage on the wafer detects deflection of the reflective surface, and thus beam deflection. The components are integrated into the wafer or formed or mounted on the wafer forming an integrated unitary structure.

Abstract: A two-source illumination system includes a reflective array of elements deflectable to first and second positions in response to a drive voltage, and two sources pointed at the array from different angles, so that upon cycling the elements rapidly back and forth between the two positions, and alternately cycling the sources between on and off conditions synchronously with the cycling of the reflective array, light from both sources is (alternately) reflected back along an axis normal to the array. This arrangement allows driving the sources at a higher power level, resulting in a higher total light output from the system than would be possible with a single source driven constantly at a lower power level.

Abstract: This invention relates generally to slits used in optics that must be precisely aligned and adjusted. The optical slits of the present invention are useful in x-ray optics, x-ray beam lines, optical systems in which the entrance slit is critical for high wavelength resolution. The invention is particularly useful in ultra high vacuum systems where lubricants are difficult to use and designs which avoid the movement of metal parts against one another are important, such as monochrometers for high wavelength resolution with ultra high vacuum systems. The invention further relates to optical systems in which temperature characteristics of the slit materials is important. The present invention yet additionally relates to precision slits wherein the opposing edges of the slit must be precisely moved relative to a center line between the edges with each edge retaining its parallel orientation with respect to the other edge and/or the center line.

Abstract: A microdevice in the form of an electrical switch. A microdevice for providing switching at a high repetition rate, including a cell divided into two chambers by a bistable movable membrane. A charge of gas in the cell and a source for directly heating the gas to increase the gas pressure and move the membrane, the source for heating including a pulsed source for generating transient gas pressure increases, with the cell including an arrangement for cooling the gas for reducing the gas pressure after an increase.

Abstract: It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed upon the landing electrode (10) of a spatial light modulator element. When the element is activated and deflects to come in contact with the landing electrode, the oriented monolayer decreases the Van der Waals forces and prevents the element from sticking to the electrode.

Abstract: A light source control device for an endoscope having a light source for emitting light to be incident on a light guide, a stop mechanism for varying the quantity of light to be incident on the light guide by interrupting an optical path of light, and a control device for controlling an opening of the stop mechanism. The stop mechanism includes a sensing device for sensing the opening of the stop mechanism and outputting a sensing signal to the control device. Further, the stop mechanism includes a shaft and a stop blade rotatably supported on the shaft and being disposed in the optical path such that the quantity of light passing thereby is varied by rotating the blade. The sensing device includes an arc-shaped plate fixed to the shaft and having a radius which varies in proportion to the change in arc angle, and a sensor having an opening for receiving the circumferential edge of the arc-shaped plate to sense the amount of light which passes through the opening.

Abstract: An electrical circuit including an optic sensor generating an output sensing signal proportional to a value of a luminosity intercepted in the sensor's field of reception at a specific angle, a measuring/comparing circuit for comparing the output sensing signal with a preset threshold value so as to transmit an actuating signal to a power supply unit of an electro-sensitive screen which responds to the transmission by entering a state of becoming partially darkened or colored. The electro-sensitive screen enters into a state of total transparency when there is no actuating signal transmitted or when the actuating signal ceases its transmission.

Abstract: A bistable electrostatic light valve display in which a movable electrode is disposed opposite a fixed electrode and is biased to move in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the movable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness. In another embodiment, the moveable electrode is restrained at both ends and is biased upwardly by anisotropic stress or stiffening.

Abstract: A method for periodically steering a beam of light is disclosed comprising the steps of reflecting a beam of light off of a mirror suspended by at least two supporting elements. At least one of the supporting elements is displaced from an edge of the mirror. A periodic voltage is applied to an electrode displaced from the mirror to cause the mirror to rotate about an axis.

Abstract: Spectrophotometric apparatus and methodology suitable for continuous and long-term use. The apparatus includes a monochromator providing pre-dispersed monochromatic light to the optical inputs of a pair of fiber optic cables and a translator for alternatively positioning the fiber optic cables at the same location with respect to the monochromator output. One of the cables conducts light to a sample under study while the other cable provides a reference for light intensity measurements. The methodology includes the steps of performing two scans through the monochromator output for each measurement on the sample. The fiber optic cables are moved between scans so that the cable employed in the latter scan occupies the former position of the cable employed in prior scan.

Abstract: An electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a spacer made of photoresist which in turn is on a semiconductor substrate. The substrate contains addressing circuitry in a preferred embodiment.

Abstract: A magnetically operated shutter mechanism is provided that will function in cryogenic or cryogenic zero gravity environments to selectively block radiation such as light from passing through a window to a target object such as a mirror or detector located inside a cryogenic container such as a dewar. The mechanism includes a shutter paddle blade that is moved by an electromagnetically actuated torquing device between an open position where the target object is exposed to ambient radiation or light and a closed position where the shutter paddle blade shields the ambient radiation or light from the target object. The purpose of the shuttering device is to prevent the mirror or other target object from being directly exposed to radiation passing through the window located on the side wall of the dewar, thereby decreasing or eliminating any temperature gradient that would occur within the target object due to exposure to the radiation.

Abstract: There is disclosed a light energy management system for use in conjunction with, in one embodiment, the exposure unit of a xerographic reproduction system. The light management system serves to funnel the unmodulated light for proper impact on a modulating device and to maintain the dark effect of the device when in the unmodulated mode. Light baffles are used for this purpose, some of which are formed as a series of angular steps designed to eliminate unwanted light along the longitudinal axis of the modulated light path. The angular step, in one embodiment, takes the shape of a semi-circular bee thorax. The modulated light path includes a light focus lens and a pair of mirrors for sending the modulated light pulses to the reproduction process surface.

Abstract: A method of resetting deflectable pixels of a spatial light modulator is disclosed. A pulse train of voltage is applied to the device to cause it to mobe from its deflected position.

Abstract: A light modulation device with matrix addressing including a matrix of cells. Each cell has two flaps fixed to a substrate by flexible attachments, a control electrode, a row electrode and a maintenance electrode. The flaps can adopt two stable positions through the application of suitable voltages to the row and maintenance electrodes. The flaps are activated by the application of a control voltage to the electrode at the same time as the voltage on the row electrode is returned to zero. The arrangement of the electrodes together with the existence of a maintenance electrode, which is common to all the flaps on the matrix, allows matrix addressing to be achieved.

Abstract: The electrostatically actuatable light modulator utilizes an opaque substrate plate patterned with an array of aperture cells, the cells comprised of physically positionable dielectric shutters and electrostatic actuators. With incorporation of a light source and a viewing screen, a projection display system is effected. Inclusion of a color filter array aligned with the aperture cells accomplishes a color display. The system is realized in terms of a silicon based manufacturing technology allowing fabrication of a high resolution capability in a physically small device which with the utilization of included magnification optics allows both large and small projection displays.

Abstract: A bimorph using ultraviolet setting glue to laminate a piezoelectric film structure, having etched-back metalization patterns on the surfaces of the piezoelectric film. The bimorph is used in a bimorph light modulator including a substrate on which fiber optic input and output light guides are mounted. A gap between the light guides serve as an optical coupling. A bimorph is affixed to the substrate with a shutter attached to one end thereof and positioned within the gap for blocking the light coupling when the bimorph is in the unenergized state. When the bimorph is energized, it pulls the shutter out of the gap, thereby allowing light coupling. Top and bottom stops are used to limit the bimorph movement to damp resonant vibrations and improve on and off times. Viscous air damping is used to eliminate or minimize bounce of the top and bottom stops and to help damp resonant vibration.