Abstract: A tilt mirror Fabry-Perot tunable filter comprises a frame and a first mirror structure. A tether system connects the first mirror structure to this frame. The tether system is designed to enable the tilting of the first mirror structure relative to an optical axis, in addition to translation of the first mirror structure along the optical axis. A second mirror structure is further provided to define an optical cavity in combination with the first mirror structure. At least two drive electrodes are provided for electrostatically tilting and translating the first mirror structure. The resulting MEMS Fabry-Perot tunable filter is capable for hitless tuning. It can be tuned to between bands directly, i.e., without dropping intervening bands.

Abstract: An electromechanical conformal grating device having a period &Lgr;, that includes: an elongated ribbon element including a light reflective surface; a pair of end supports for supporting the elongated ribbon element at both ends over a substrate; an intermediate support; and means for applying a force to the elongated ribbon element to cause the element to deform between first and second operating states, where in the second operating state the elongated ribbon element mechanically conforms to the intermediate support forming a conformal grating having alternating raised and lowered portions, and wherein the length of the raised and lowered portions are substantially equal.

Abstract: An electrode for use in actuating MEMS elements. The electrode declines in height along its length from a first end thereof to second end thereof. In use, the first end of the electrode is disposed proximal to an axis of rotation or axis of bending of an overlying MEMS element. In one embodiment, the decline in height of the electrode along its length is linear such that the electrode has a wedge-shaped profile. In another embodiment, the height of the electrode declines in discrete steps such that the electrode has a stepped profile.

Abstract: A Finite Impulse Response (FIR) filter for suppressing ringing in tunable, or adjustable, members of MEMS devices is described. In embodiments of the invention, the FIR filter includes staggered proportional plus delay filters, or posicast filters. The FIR filter of the present invention is applicable to an adjustable mechanical member in a MEMS device which can be modeled as single mode second order system characterized by a resonance frequency &ohgr;0 and damping constant &zgr;<<1, i.e., a highly underdamped, single mode, second order system.

Abstract: The space required in the vicinity of a shutter aperture can be reduced to achieve an overall reduction in size of a device by providing a diaphragm mechanism for covering the shutter aperture formed of a plurality of members cooperating with each other to cover the shutter aperture. By cooperation of a small-diaphragm plate having a diaphragm aperture formed therethrough smaller in diameter than the shutter aperture and an auxiliary plate, for example, a space reduction is facilitated. The small-diaphragm plate is pivotably mounted adjacent one side of the shutter aperture. The auxiliary plate has a shape that cooperates with the convex-arcuate portion to cover the shutter aperture. When the small-diaphragm plate and the auxiliary plate are driven by the diaphragm actuating member and moved to a first position covering the shutter aperture, the two plate cooperate to fully cover the shutter aperture.

Abstract: An optical shutter comprising a frame with an aperture and shutter blade for modulating a light beam or a particle stream passing through the aperture. The top end of the shutter blade comprises a first sector and a second sector, each sector having different optical characteristics. The bottom end of the shutter blade is coupled to a motor means for pivotally rotating the shutter blade over a limited angular range in a clockwise and counter-clockwise direction such that the first sector is aligned with the aperture when the shutter blade is rotated in one direction and the second sector is aligned with the aperture when the shutter blade is rotated in the other direction.

Abstract: An optical shutter comprising a frame with an aperture and shutter blade for modulating a light beam or a particle stream passing through the aperture. The top end of the shutter blade comprises a first sector and a second sector, each sector having different optical characteristics. The bottom end of the shutter blade is coupled to a motor means for pivotally rotating the shutter blade over a limited angular range in a clockwise and counter-clockwise direction such that the first sector is aligned with the aperture when the shutter blade is rotated in one direction and the second sector is aligned with the aperture when the shutter blade is rotated in the other direction.

Abstract: A device for changing the passage of light through a window, especially through a transparent cover of a motor vehicle roof toward the motor vehicle interior, by at least two strip-shaped grid structures which are arranged to be able to move on top of one another. In order to achieve adjustable light effects, especially in a motor vehicle interior, at least one grid structure is formed from alternately transparent and opaque strips and another grid structure is formed from at least two colored strips of different color in a repeating sequence and the mutual positioning of the grid structures can be set by an actuating means.

Abstract: Manufacture a spatial light modulator by fabricating a first set of micro-mirrors, then subsequently fabricating a second set of micro-mirrors interspersed with the first set, to reduce space between adjacent micro-mirrors versus what could be done by simultaneously fabricating all the micro-mirrors as one set.

Abstract: Microelectromechanical structures (MEMS) are provided that are adapted to controllably move mirrors in response to selective thermal actuation. In one embodiment, the MEMS moveable mirror structure includes a thermally actuated microactuator adapted to controllably move along a predetermined path substantially parallel to the first major surface of an underlying microelectronic substrate. A mirror is adapted to move accordingly with the microactuator between a non-actuated and an actuated position. In all positions, the mirror has a mirrored surface disposed out of plane relative to the first major surface of the microelectronic substrate. The microactuator provided herein can include various thermal arched beam actuators, thermally actuated composite beam actuators, arrayed actuators, and combinations thereof. The MEMS moveable mirror structure can also include a mechanical latch and/or an electrostatic latch for controllably clamping the mirror in position.

Abstract: A disposable picture display device having a suitable substrate which carries a plurality of color cells. Each color cell is configured such as to exhibit a change in its external color and/or to emit electromagnetic energy at least in the form of visible light in correlation with the application of electrical current and/or voltage to the cell. Suitable electrical connections to each color cell are provided. The electrical connections being electrically connectable to a suitable electrical power supply and adapted to provide the color cell with a suitable current and/or voltage.

Abstract: A light shutter for controlling a light signal between occluded and uninterrupted states. The shutter has a frame which mounts a beam under compression so that it assumes either of two bi-stable buckled positions. An occluder is mounted on the beam, A shape memory alloy actuator is provided which applies a force transverse on the beam as the actuator is heated to its shape change transition temperature. The transverse force bends the beam, causing it to buckle to the opposite bi-stable position. This moves the occluder into or out of the path of the light signal.

Abstract: Novel light switches and attenuators are disclosed. In one form of the invention, a novel 2×2 crossbar switch is formed by positioning a movable reflector intermediate four fiberoptic lines. In another form of the invention, a 1×N switch is formed by providing a plurality of cantilevers each having a reflective surface thereon. In still another form of the invention, a novel light attenuator is formed by positioning a movable arm intermediate two fiberoptic elements.

Abstract: A micro-mirror device and associated method, the device including a substrate, address electrodes provided on the substrate, and a micro-mirror facing the substrate and spaced a predetermined distance from the substrate. The micro-mirror device is adapted so that the slope of the micro-mirror can be adjusted by electrostatic attraction forces between the address electrodes and the micro-mirror. The micro-mirror device further includes auxiliary electrodes formed on and projected from the substrate. The upper portions of the auxiliary electrodes are disposed in the vicinity of the micro-mirror, so that distances between the micro-mirror and the auxiliary electrodes can remain small, even when the micro-mirror is inclined by electrostatic attraction forces in one direction. Accordingly, restoration of the micro-mirror is enhanced by electrostatic attraction forces of the auxiliary electrodes.

Abstract: A display mechanism is described having the capability of showing two or more colors using one or more flexible membranes that electrostatically switch positions between stationary electrodes of different geometry and color. Each flexible colored membrane is multi-layered and comprised of at least one conductive layer and one dielectric layer. Each membrane or stack of membranes with the adjacent electrodes serves as a single chromatophore, the color of which is altered electrically. A first colored electrode is substantially flat and parallel to a base substrate containing control circuitry. Each of a plurality of second electrodes is of a substantially rounded geometry, around which membranes wrap as determined by electronic signal. Display color is produced as electric forces separate surfaces of common color. The display is non-luminous, consumes very little power and is easily visible under normal to very bright ambient illumination. Integrated electronics provide power, signal and connectivity.

Abstract: An electromagnetic radiation shutter device driven by electrostatic forces comprises a stationary membrane capable of allowing electromagnetic radiation transmission therethrough, and a first and second flexible membrane comprising an electrode element and at least one biasing element. The first flexible membrane has a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane. The second flexible membrane has a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane. In operation, a voltage differential is established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane thereby moving the first and second flexible membranes relative to the stationary membrane. In a closed state (i.e.

Abstract: A system for modulating a beam of light in accordance with an input data stream having a data rate greater than 2 MHz, includes a source of light for directing light along a predetermined path; a self-damped diffractive light modulator disposed in the predetermined path and having a plurality of spaced apart self-damped deformable elements being disposed relative to each other and secured at opposite ends and suspended above and movable into a channel containing a gas, and each spaced apart self-damped deformable element having at least one reflective surface. The spaced apart self-damped deformable elements respond to an input data stream and are sufficiently damped to minimize the introduction of data errors into the modulator light beam.

Abstract: Variable optical attenuator and system are offered that permit fine adjustment of the amount of shielding, eliminate variations in the amount of shielding, and facilitate positioning. The variable optical attenuator is mounted in a region of a collimated beam formed between a pair of opposite optical systems. The attenuator continuously attenuates the collimated beam. The attenuator comprises a shielding plate and a pushing means for pushing against one face of the shielding plate, placing it in position, and producing flexural deformation. The shielding plate has a fixed base-end portion and a front-end portion that is so held as to be a free end. At least the base-end portion consists of a leaf spring. The amount by which the collimated beam is shielded by the front end is varied according to the amount of flexural deformation of the shielding plate.

Abstract: In an array-type light modulation element drive method comprising the steps of arranging electromechanical light modulation elements for executing light modulation by displacement operation of a flexible section by an electrostatic force and elastic restoration operation of the flexible section like a two-dimensional matrix, selecting each pixel according to a scan electrode signal Vg, and giving a data signal Vb to a pixel electrode for driving the pixel, a basic frame is divided into an odd frame and an even frame and the polarity of an applied signal Vgs is inverted in the odd frame and the even frame for executing AC drive of the light modulation element.

Abstract: Disclosed is a low-cost, programmable electronically actuated, continuous use traffic sign including a pixellated display matrix, the display matrix being electronically actuatable to display a desired traffic information image display suitable for roadside and other vehicular use where it may be clearly viewed by direct sunlight during the day and by illumination at night. A preferred display is electrostatically actuated for low power requirements and comprises pixels which have spiral rollout shutters. The display can be remotely programmed and controlled, via a modem, and may be solar or battery powered, powered by a local power network or from a combination of the foregoing. Low-cost film technology manufacturing methods are also described.

Abstract: A spatial light modulation device is formed by creating forming an electromagnetic field within a substrate with at least one movable element, fixedly attached to the substrate at a first end, from a soft magnetic material with an anisotropic stress created within the movable element such that the element exists in a first position as a result of the anistropic stress and an actuating device comprising a magnetic layer placed within close correspondence with the soft magnetic material for placing the soft magnetic material into a second position.

Abstract: There is provided a flat panel display using a micro-electromechanical device, comprising a back glass substrate having a transparent electrode of a transparent electric conductor; a front glass substrate having a color filter layer; an micro-electromechanical device formed at the transparent electrode to switch light; and a support beam for supporting the back glass substrate and the front glass substrate. The micro-electromechanical device used in the flat panel display is fabricated by a micro-machining technology, thereby increasing a light utilizing efficiency and remarkably reducing a fabricating cost.

Abstract: The distribution of ultraviolet light irradiated from an illumination source to optical elements of a projection exposure device is varied by an illumination aperture. The illumination aperture is formed with a plurality of openings which may be opened or closed independently to the passage of irradiating light. The size and shape of the opening formed by the plurality of openings of the illumination aperture is determined according to the particular image to be projected.

Abstract: A subassembly for generating an optically active slit with a changeable slit width s, preferably for slit lamps, with two slit jaws which are displaceable relative to one another at a straight-line guide and between which the slit is formed, wherein one of two guide paths is allocated to each slit jaw. In a subassembly for generating an optically active slit, the guide paths are formed at portions of a guide rail which project out freely in the displacement directions of the slit jaws from a clamping position which is fixed with respect to the frame. The guide rail can accordingly expand without hindrance in the displacement direction under the influence of temperature without the parallelism of the slit being affected thereby.

Abstract: Disclosed is a display device comprising a light-shielding plate including a metal thin film formed on a first principal surface of an optical waveguide plate for introducing the light thereinto and including light-transmitting sections formed at portions corresponding to picture elements to make penetration through the optical waveguide plate, and shutter sections provided opposingly to a second principal surface of the light-shielding plate, for selectively intercepting the light transmitted through the light-transmitting sections in accordance with an input signal. The shutter sections include actuator elements provided corresponding to the large number of light-transmitting sections so that the light to be transmitted through the light-transmitting sections is intercepted substantially in synchronization with the operation of the actuator elements. Accordingly, it is possible to improve the contrast and improve the image quality of a displayed image.

Abstract: A MEMS (Micro Electro Mechanical System) electrostatic device operated with lower and more predictable operating voltages is provided. An electrostatic actuator, an electrostatic attenuator of electromagnetic radiation, and a method for attenuating electromagnetic radiation are provided. Improved operating voltage characteristics are achieved by defining a non increasing air gap between the substrate electrode and flexible composite electrode within the electrostatic device. A medial portion of a multilayer flexible composite overlying the electromechanical substrate is held in position regardless of the application of electrostatic force, thereby sustaining the defined air gap. The air gap is relatively constant in separation from the underlying microelectronic surface when the medial portion is cantilevered in one embodiment. A further embodiment provides an air gap that decreases to zero when the medial portion approaches and contacts the underlying microelectronic surface.

Abstract: A method for transferring an image to a medium includes: generating a substantially uniform line of radiation; producing diffractive light from the uniform line of radiation; passing zero order diffractive light to the medium in a telecentric fashion while blocking non-zero order diffractive light; adjusting image magnification on the medium independent of image focus in response to the zero order diffractive light; and adjusting image focus on the medium independent of image magnification in response to the zero order magnification-adjusted diffractive light.

Abstract: An optical shutter comprising a frame with an aperture and shutter blade for modulating a light beam or a particle stream passing through the aperture. The top end of the shutter blade comprises a first sector and a second sector, each sector having different optical characteristics. The bottom end of the shutter blade is coupled to a motor means for pivotally rotating the shutter blade over a limited angular range in a clockwise and counter-clockwise direction such that the first sector is aligned with the aperture when the shutter blade is rotated in one direction and the second sector is aligned with the aperture when the shutter blade is rotated in the other direction.

Abstract: An electro-optic device which includes a mirror array attached to a base substrate is disclosed. The mirror array comprises a substrate having a plurality of spaced-apart mirrors with underlying cavities (each having a diameter at least about the same size as that of the overlying mirror) formed therein. The base substrate includes a plurality of electrodes as well as a plurality of electrical interconnections. The mirror array is attached to the base substrate so that each mirror of the array as well as a cavity are supported above a set of electrodes. Each mirror of the mirror array rotates relative to the major plane of the substrate in response to an electrical signal. The application of an electrical potential to each mirror relative to at least one electrode of the set of electrodes causes the desired rotation (depending on the magnitude of the electrical potential) up to an angle of about 20 degrees.

Abstract: A micro-electromechanical bistable shutter display device is provided capable of being implemented for both small screen, high resolution devices and for large billboard-type displays. The micro-electromechanical shutter assembly has bi-stability characteristics which allow the use of only a holding voltage to maintain an image. The micro-electromechanical shutter assembly includes a shutter having petal-like shutter segments covering reflective or transmittive films. To expose the film in a particular shutter assembly, its shutter segments are moved from the horizontal to a vertical position using electrostatic attraction forces to “collapse” the torsionally-hinged shutter segments. The shutter assembly can have a number of segments, as long as the resulting shutter assembly shape can be stacked to form a dense 2D array.

Abstract: An array-type exposing device, for exposing an image forming body incorporated in an image forming apparatus, includes a flat light source for emitting a UV rays and a light modulator unit disposed above the flat light source so as to be associated with at least one unit area derived by dividing each of pixels on the image, the light modulator unit modulating the UV ray by electromechanical operation to expose the image forming body.

Abstract: An electronically variable optical attenuator includes focusing optics that enable the use of a micro-mechanical actuation device with minute movement properties. The actuation device controls the position of a light blocking member relative to the path of a focused light beam to thereby control the attenuation of the light beam.

Abstract: A surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock. Each of two CMG has a first portion of its perimeter devoted to continuous driving teeth that mesh with respective pinion gears. Each EMG also has a second portion of its perimeter devoted to regularly spaced discrimination gear teeth that extend outwardly on at least one of three levels of the CMG. The discrimination gear teeth are designed so as to pass each other without interference only if the correct sequence of partial rotations of the CMG occurs in response to a coded series of rotations from the pinion gears. A 24 bit code is normally input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect.

Abstract: A deformable mirror light valve comprised of an array of silicon nitride ribbons, metalized to reflect light. Each ribbon is electrostatically deformed to form a cylindrical mirror. Each deformable ribbon modulates the light of one pixel by focusing the reflected light through a slit. An alternative embodiment focuses the light onto a stop. The ribbon structure has a fast response time combined with high contrast.

Abstract: A radiation valve includes a transparent substrate and at least one opaque flexible planar member, rigidly attached to the substrate, that alternately assumes a closed orientation relative to the substrate to block the radiation and an open orientation relative to the substrate to pass the radiation. Preferably, the valve includes two parallel electrically conducting planar members that are perpendicular to the substrate when the valve is open. The valve is closed by imposing a voltage difference on the two planar members to snap their tops together. An array of such valves can be controlled to modulate the radiation temporally and spatially, for applications such as flat panel displays.

Abstract: A membrane-actuated charge controlled mirror (CCM) that exhibits increased deflection range, reduced beam current and improved electrostatic stability is fabricated using a combination of flat panel manufacturing along with traditional MEMS techniques. More specifically, a unique combination of five masking layers is used to fabricate a number of CCMs on a large glass panel. At the completion of the MEMS processing, the glass panel is diced into individual CCMs. Thereafter, the polymer mirror and membrane release layers are simultaneously released through vent holes in the membrane to leave the free-standing CCM.

Abstract: A flat panel color display device is comprised of a two-dimensional array of stacks of colored membranes. Each membrane is comprised of a conductive film sandwiched between colored insulating films and integrated within a pellicle assembly which wends between pairs of adjacent colored fiber electrodes between which membrane stacks are juxtapositioned and around which membranes optionally wrap. Each colored membrane stack together with portions of the adjacent fiber electrodes defines one color pixel produced by the exposed surface colors of the membranes and the fiber electrodes. Any pixel or group of pixels of the display can display any color of the palette. Thin film transistor electronics are provided within a silicon coating on one fiber of each pair. Conductive traces on the pellicle assembly provide power, signal and interconnectivity between fiber electrodes and the pellicle assembly.

Abstract: A light modulator for modulating a beam of light of wavelength .lambda. including a substrate, a fixed electrode formed over the substrate and arranged to reflect light; an insulative transparent layer defining a modulating region formed over the fixed electrode wherein the height of the insulative transparent layer is substantially an odd multiple of .lambda.

Abstract: Disclosed are cross-talk resistant drive circuitry for electrostatic video displays and flexible, foldable and shaped embodiments of such displays including books, fanfolds and scrolls employing flexible polymer film construction. Transitorless drive circuitry uses row and column dumping capacitors to charge electrostatic pixels in a traveling group to avoid simultaneously charging row-adjacent pixels. Also, individual pixels can be shielded each with their own Faraday cage to control charge leakage from the pixel. The pixels' have spiral rollout shutters whose time parameters can be controlled by the use of suitable bleed resistors. Low-cost film technology manufacturing methods are also described.

Abstract: An optical shutter comprising a frame with an aperture and shutter blade for modulating a light beam or a particle stream passing through the aperture. The top end of the shutter blade comprises a first sector and a second sector, each sector having different optical characteristics. The bottom end of the shutter blade is coupled to a motor for pivotally rotating the shutter blade over a limited angular range in a clockwise and counter-clockwise direction such that the first sector is aligned with the aperture when the shutter blade is rotated in one direction and the second sector is aligned with the aperture when the shutter blade is rotated in the other direction.

Abstract: A display includes a plurality of light-emitting devices arranged as a matrix of pixels and an addressing circuit coupled to each respective light-emitting device. The addressing circuit includes a plurality of micromachined electromechanical (MEM) switches operable to control the plurality of light-emitting devices. Each MEM switch includes a cantilever beam and a control electrode spaced therefrom to deflect the cantilever beam electrostatically in order to close or open the switch.

Abstract: A thin low power, paper white, direct-view display includes an array of bistable micromirrors that are deflected between two stable states, a dark state in which the mirror covers a portion of the background and a white state in which the mirror uncovers the background. The drive electronics are similar to those used in multiplexed LCDs but are modified in order to drive the micromirrors to one of their two stable states. The micromirrors in the enabled row are attracted up or down with sufficient force to exceed the micromirrors' bistable threshold and deflect the micromirrors to their dark and white states, respectively. The attractive forces on the micromirrors in the remaining non-enabled rows are insufficient to exceed the micromirrors' bistable threshold so that the micromirrors remain in their current stable state.

Abstract: A flat-panel direct view display positions an array of electrostatically-actuated cantilevered micromirrors in front of a contrasting background and opposite a flat-panel electron beam source. Depending upon the display configuration, the electron beam source addresses either the array of micromirrors or a reference surface a row at a time while the other is held at a reference potential. The electron beams modulate the potential difference between each micromirror and the reference surface thereby adjusting the magnitude of the attractive electrostatic force between the two. This in turn modulates the deflection of the micromirrors between their quiescent and fully actuated states to selectively cover and uncover the background thereby producing a grey scale direct-view image.

Abstract: A machine vision apparatus (24) and method are provided which allows imaging by or with the aid of artificial observation devices, such as video cameras, binoculars, telescopes, and other optical observation devices (10) which have an objective lens (12) passing light from an object or scene being viewed to a focal plane (18) at which is located a surface (22) which is at least partially reflective. Conventionally, such optical observation devices provide a retro-reflective light return into the scene being observed. Such a light return from an observation device can be detrimental, for example, to certain experimental results, or to the accuracy of machine vision (i.e., imaging) employed in robotic manufacturing tools.

Abstract: A high intensity light projector for stage, architectural and similar applications includes a controllable image quality projection gate providing advanced visual effects. The projection gate, capable of selectively scattering or transmitting incident light, may be constructed of an array of scattering liquid crystal material in combination with infrared and ultraviolet reduction means which provide in the high intensity beam, a stable thermal environment by minimizing the absorption of light by the projection gate. Additional thermal efficiency is provided by supplemental cooling means. Color control is also provided in the form of dichroic filter wheels forming cooperating adjustable low, high and band width filters including saturation control. A color measuring feedback sensor is also provided. An intensity measuring feedback sensor controls a spatially-modulated, variable-density, reflectively-coated dimming wheel. A programmable gobo system has provisions for gobo selection, orientation, and rotation.

Abstract: A beam scanner is disclosed for confocal microscopes. The beam scanner is provided with a disc-shaped, rotary-driven base unit which largely prevents disruptive optical scattering. The beam scanner is so designed that at least one main surface of the base unit is provided with a reflecting grid; light is reflected only by those regions of the main surface which correspond to the meshes of the reflecting grid, or only by those regions which correspond to the lattice of the reflecting grid.

Abstract: The present invention relates to a window tinting apparatus (10) which comprises an outer window (16A) and an inner window (16B) having a window cavity (16C) there between. The window tinting apparatus (10) further comprises a first primary polarized panel (12A) securely affixed to the window (16A, 16B). The first primary polarized panel (12A) comprises a plurality of first primary polarized panel longitudinal polarization lines (12AA) therein. The window tinting apparatus (10) further comprises a secondary polarized panel (14) slidably mounted within the window cavity (16C). The secondary polarized panel (14) comprises a plurality of secondary polarized panel longitudinal polarization lines (14B). The secondary polarized panel (14) further comprises a secondary polarized panel ledge (14A) attached at a distal edge. The secondary polarized panel longitudinal polarization lines (14B) and the first primary polarized panel longitudinal polarization lines (12AA) are parallel to one another.

Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

Abstract: A method of resetting the cells of a spatial light modulator (FIG. 11). A saturation voltage pulse is applied, causing the cells to achieve a fully saturated state in a given amount of time. A reset pulse of opposite polarization than the saturation voltage pulse is then applied, driving the cells toward the opposite fully saturated state. The reset pulse is removed after the same amount of time, causing the cells to assume their relaxed state in the same amount of time it took them to achieve their fully saturated state.

Abstract: A light reflective device including an insulative substrate; a silicon wafer positioned over the insulative substrate and defining an opening and having a flexible beam portion having top and bottom surfaces which extend into the opening; a layer of ferromagnetic material formed over the top surface of the flexible beam portion; a reflector formed over the ferromagnetic layer on the top surface of the flexible beam portion; and a micro-electromagnet mounted on the insulative substrate relative to the opening of the silicon wafer and adapted to produce a magnetic field in response to an applied current which acts on the ferromagnetic layer to cause the bending of the flexible beam portion, ferromagnetic layer and reflector.