Abstract: A display device includes a pair of insulating substrates facing each other, electrochromic elements, and an electrolyte layer. A plurality of electrodes constituting the electrochromic elements are disposed on an inner surface of one of the insulating substrates so as to be spaced from each other. One of the insulating substrates is formed of a flexible member whose outer surface is an input operation surface. A pair of counter electrodes of an input element are disposed between the pair of insulating substrates, the counter electrodes being spaced from the electrodes of the electrochromic elements when viewed in plan. An input operation is performed by bringing the counter electrodes close to each other or bringing the counter electrodes into contact with each other through pressing of the input operation surface.

Abstract: Methods and devices are provided for selectively allowing light to pass through a substantially transparent substrate or blocking the light, at least to some degree. Some embodiments provide a plurality of reflective vanes that can be positioned in at least two positions. According to some such implementations, when the vanes are in an open position, incident light is allowed to pass through the window. The light may reflect from two or more vanes before passing through the window. When a sufficient voltage is applied between vane electrodes and other electrodes, the vanes are pulled down, reflecting back at least some of the incident light. The voltage may be controlled according to detected temperature, ambient light intensity, etc.

Abstract: An electrochromic device includes a first substrate, a second substrate facing the first substrate, a first electrode disposed on the first substrate, a carbon nano-structured electrode layer disposed on the first electrode, a second electrode disposed on the second substrate, an electrochromic layer disposed on the second electrode, and an electrolyte layer interposed between the first substrate and the second substrate.

Abstract: An electrochromic device includes a first electrochromic region interconnected with a second electrochromic region by a plurality of conductive links disposed between sides of a substrate on which the material layers of the electrochromic device are formed. The plurality of conductive links interconnects a first isolated conductive region of the first electrochromic region with a first isolated conductive region of the second electrochromic region. A sequence of a counter electrode layer, an ion conductor layer and an electrochromic layer is sandwiched between the first conductive regions of the first and second electrochromic regions and respective second isolated conductive regions of the first and second electrochromic regions. The second conductive regions of the first and second electrochromic regions are connected to respective first and second bus bars which are for connection to a low voltage electrical source.

Abstract: A method is disclosed for controlling switching of an electrochromic device comprising at least the following components: a first and a second electrode layer, a first and a second layer in which ions can be reversibly intercalated, and a transparent ion-conducting layer. At least one of the layers in which ions may be reversibly inserted is electrochromic. The optical properties of the device are modified when a potential is applied between the electrode layers. The potential applied is limited such that the maximum generated potential difference never exceeds the safe redox limits, and that the current does not exceed some predetermined limit. Switching of electrochromic devices in this manner allows for maximum device lifetime, while simultaneously optimising switching speed and transmission homogeneity. The method is characterised in that the potential applied to the electrode layers is varied in the form of a stepped ramp, during which time the current is measured constantly.

Abstract: Described is a method for designing individual stages of a multiple cascaded etalon TDC device to allow continuous thermo-optic tuning over a desired range without inducing incremental signal distortion due to uncontrolled and unpredictable dispersion of the TDC during tuning. This allows the signal to transmit without encountering periods of incremental distortion or dark spots. The method includes prior knowledge of each etalon stage, after full assembly, for spectral group delay profile as a function of temperature through modeling and/or characterization. Characterization can account for performance variations that are due to allowed manufacturing tolerances.

Abstract: An electrode that includes a transparent substrate having a first and second surface; a conductive layer disposed on the second surface of the substrate; and an electrode layer disposed on the conductive layer, wherein the electrode layer includes doped tin oxide nanoparticles and an organic binder, and wherein the electrode layer is transparent. Also disclosed is a method of making such an electrode and electrochromic articles including such an electrode.

Abstract: The present invention relates to improved electro-optic rearview mirror elements and assemblies incorporating the same. Area of the effective field of view of the electro-optic mirror element substantially equals to that defined by the outermost perimeter of the element.

Abstract: A display device includes a pair of insulating substrates facing each other, electrochromic elements, and an electrolyte layer. A plurality of electrodes constituting the electrochromic elements are disposed on an inner surface of one of the insulating substrates so as to be spaced from each other. One of the insulating substrates is formed of a flexible member whose outer surface is an input operation surface. A pair of counter electrodes of an input element are disposed between the pair of insulating substrates, the counter electrodes being spaced from the electrodes of the electrochromic elements when viewed in plan. An input operation is performed by bringing the counter electrodes close to each other or bringing the counter electrodes into contact with each other through pressing of the input operation surface.

Abstract: The present invention provides for a display device and a method to manufacture the display device. The display device includes: a transparent layer; a coloring electrode; a separator; a second electrode; an electrolyte permeating throughout the display device; and a back layer positioned on the back side of the display. The transparent layer, which has a top surface and a bottom surface, is positioned at the viewer side of the display. The coloring electrode is positioned on the transparent layer bottom surface and includes: a connected conductor system formed from one or more heterogeneous conductive layers and a coloring layer, with the proviso that the heterogeneous conductive layers are not positioned between the transparent layer bottom surface and the coloring layer. The conductor heterogeneity includes variations in one or more of: conductor material composition; conductor layer dimension; conductor layer pattern; conductor layer grid design, and combinations thereof.

Abstract: An electrochromic display device includes a display substrate, a counter substrate facing the display substrate, counter electrodes formed on the counter substrate, at least first and second display electrodes arranged between the display substrate and the counter electrodes, the first display electrode and the second display electrode having a predetermined distance from each other, a first electrochromic layer arranged on the first display electrode and a second electrochromic layer arranged on the second display electrode, an electrolyte layer arranged between the respective first and the second display electrodes and the counter electrodes, and a protective layer made of an insulator material formed on a counter electrode facing side surface of one of the first and the second display electrodes such that the protective layer is sandwiched between the selected one of the first and the second display electrodes and a corresponding one of the first and the second electrochromic layers.

Abstract: The present invention provides an electrochromic display device which can realize a reduction in color drift in storing images and has excellent memory properties. The electrochromic display device is an active matrix drive-type electrochromic display device containing opposed electrodes, at least one type of a porous layer containing titanium oxide with an electrochromic dye adsorbed thereon, and at least one type of a porous layer containing tin oxide. The active matrix drive-type electrochromic display device is characterized in that the tin oxide-containing porous layer is connected to a pixel circuit used in active matrix drive through one of the opposed electrodes.

Abstract: An active matrix electrochromic device array and a method of manufacturing the active matrix electrochromic device array may include a first substrate including a pixel electrode corresponding to each of the pixels, and an electrochromic layer; a second substrate including a counter electrode and a reflective layer arranged on the counter electrode, wherein the first substrate and the second substrate are coupled to each other having a distance therebetween by a partition wall supporting the first substrate and the second substrate; and the partition wall isolates a space between the first substrate and the second substrate with respect to each of the pixels, thereby preventing or reducing an electrolyte filled in the space from being diffused toward a neighboring space.

Abstract: Disclosed is a method of preparing an electrode, which can lead to uniform electrochromism of a lithium nickel oxide layer by applying a voltage in all directions of the electrode during a formatting process, an electrode prepared by the same, and an electrochromic device including the electrode.

Abstract: Disclosed is an electrochromic display device comprising: a first substrate; a first electrode; a second substrate; a second electrode; and an electrochromic composition layer, wherein the device is of a passive matrix drive where the device performs a display by an energization between the electrodes, and performs a erasion of the display, wherein the first electrode comprises electrodes, the second electrode comprises a plurality of transparent display electrodes, a pixel is formed where the electrodes are in a grade separated crossing, at least a surface of the electrodes is respectively oxidized, the electrochromic composition layer comprising (i) insulative partition walls and (ii) an electrochromic composition including a supporting electrolyte, a polar solvent, and a leuco dye, and wherein the device displays a selected pixel by applying a voltage of a first potential difference, and applies the voltage of a second potential difference so as not to cause any energization.

Abstract: An optical system for a digital light projection system is provided. The optical system comprises a plurality of LED arrays, wherein each LED array comprises a plurality of LEDs. The optical system also comprises an optical concentrator element positioned substantially adjacent to each of the LED arrays, wherein each concentrator element totally internally reflects light emitted from the plurality of LEDs within the corresponding LED array so as to provide substantially uniform light at an output surface of each concentrator element, and wherein the concentrator element has a complex conic shape.

Abstract: A reflection type display apparatus includes a first light modulating layer for controlling electrically and externally a light absorbing state and a light transmitting state, a second light modulating layer for controlling electrically and externally a light reflecting state and the light transmitting state, and a reflector for reflecting light of a particular wavelength band. The first and second light modulating layers and the reflector are arranged in order from a light incidence side.

Abstract: The application arises from studies that have shown that electrochemical cells containing SPEs including: (i) a non-volatile organic ionic salt; and (ii) an inorganic electrolyte salt have an improved conductivity across a range of temperatures, and are more stable to water compared to electrochemical cells containing SPEs including either an IL or an inorganic electrolyte salt.

Abstract: There is provided an electrodeposition method light modulating device including: (1) a transparent electrode, to which a polymer having a metallocene at a side chain thereof is fixed by a chemical bond; (2) a transparent electrode that is disposed to face the transparent electrode (1), and forms metal through a reducing reaction of metal ions thereon; and (3) an electrolytic solution containing the metal ions, which can be reduced by applying current thereto, and disposed between the transparent electrode (1) and the transparent electrode (2). In an electrodeposition method reflective display device, the electrolytic solution is held by a gelatinous polymer, and the white pigment is dispersed in the gelatinous polymer.

Abstract: The emittance value is a measure of an amount of energy expelled from a given surface area relative to a black-body reference. Depending on the specific coating a change in the emittance value is actively or passively effected. There are known active variable emittance thermal control coatings. However, such coatings are actually panels housing a mixture of both high and low emissivity materials that are electrically manipulated to control the emittance value of the panel. These “coatings” are classified as either electrochromic or electrophorectic. Both electrochromic and electrophorectic coatings require an applied voltage to cause a change in the emittance value of the coating. By contrast, aspects of the present invention do not include active variable emittance thermal control coatings. Aspects of the present invention do include passive variable emittance thermal control coatings and materials.

Abstract: The invention concerns an electrochromic cell with emission controlled by electrodeposition under the action of a control voltage. The cell comprises the following flexible elements, superimposed and respectively in intimate contact: a first electrode (11) intended to be connected to a first potential of the control voltage, a first porous layer (12), formed of a mixture of PVDF-HFP, PEO and an activated carbon powder, a porous separator (13), formed of a mixture of PVDF-HFP and PEO, a second electrode (14) formed of a grid and connected to a second potential of the control voltage, a second porous layer (15), formed of a mixture of PVDF-HFP, PEO and carbon powder, an aqueous electrolytic solution containing a copper salt being contained in the first flexible layer (12), in the separator (13) and in the second flexible layer (15).

Abstract: The invention concerns an electrochromic cell in thin films and aqueous electrolyte, with an emissivity that varies as a function of an applied control voltage.

Abstract: A reflective light modulator is provided. The reflective light modulator includes: a transparent electrode passing through light from a light source; a driving substrate configured to reflect the light from the transparent electrode; a light-modulating material sandwiched between the transparent electrode and the driving substrate; and a transparent glass substrate. The transparent glass substrate is arranged in contact with the surface of the transparent electrode substrate on the light source side. Furthermore, the transparent glass substrate has a thermal conductivity of 0.003 cal/(cm·sec·K) or more at 20° C.

Abstract: An electrochromic switching device comprises a counter electrode, an active electrode and an electrolyte layer disposed between the counter electrode and the active electrode. The active electrode comprises at least one of an oxide, a nitride, an oxynitrides, a partial oxide, a partial nitride and a partial oxynitride of at least one of Sb, Bi, Si, Ge, Sn, Te, N, P, As, Ga, In, Al, C, Pb and I. Upon application of a current to the electrochromic switching device, a compound comprising at least one of the alkali and the alkaline earth metal ion and an element of the active electrode is formed as part of the active electrode.

Abstract: Described is a method for designing individual stages of a multiple cascaded etalon TDC device to allow continuous thermo-optic tuning over a desired range without inducing incremental signal distortion due to uncontrolled and unpredictable dispersion of the TDC during tuning. This allows the signal to transmit without encountering periods of incremental distortion or dark spots. The method includes prior knowledge of each etalon stage, after full assembly, for spectral group delay profile as a function of temperature through modeling and/or characterization. Characterization can account for performance variations that are due to allowed manufacturing tolerances.

Abstract: Set forth is an electrophoretic display device including a display region between substrates, at least one of which is transparent, the display region including a multiplicity of pixels, wherein one or more of the pixels have three or more subpixels, the three or more subpixels being made up of individual reservoirs that each contain a display medium of one or more set of colored particles in a dielectric fluid. The display mediums include two different colors therein so that the subpixel is capable of exhibiting each of the two different colors, and each of the three or more subpixels include a display medium having a combination of two colors that is different from the combinations of two colors of the display mediums of the other of the three or more subpixels. A method of displaying a full color image with the display device is also provided.

Abstract: A transparent glazing, and a control method thereof, with a field of view that can be darkened over a portion of its surface by electrically controlling at least one functional element incorporated into a multilayer composite, the light transmission of which glazing can be varied reversibly. The functional element, for example a solid-state electrochromic multilayer system, includes at least one electrochromic functional layer enclosed between two surface electrodes. The surface electrodes and their leads are matched to one another and spaced spatially with respect to one another such that darkening starts at one edge of the functional element and, with a remaining voltage applied between the surface electrodes, propagates continuously over the surface of the functional element until it is completely and uniformly colored. The glazing can be used as an electrically controllable sunshield for windshields of vehicles or the like.

Abstract: An electrochromic switching device comprises a counter electrode, an active electrode and an electrolyte layer disposed between the counter electrode and the active electrode. The active electrode comprises at least one of an oxide, a nitride, an oxynitrides, a partial oxide, a partial nitride and a partial oxynitride of at least one of Sb, Bi, Si, Ge, Sn, Te, N, P, As, Ga, In, Al, C, Pb and I. Upon application of a current to the electrochromic switching device, a compound comprising at least one of the alkali and the alkaline earth metal ion and an element of the active electrode is formed as part of the active electrode.

Abstract: An electrochromic display element includes a pair of counter electrodes having therebetween an electrochromic compound represented by Formula (1), wherein the electrochromic compound becomes colored when being oxidized and becomes colorless when being reduced by a driving operation of the electrodes: wherein R1 represents a substituted or unsubstituted aryl group; and R2 and R3 each represent a hydrogen atom or a substituent; X represents >N—R4, an oxygen atom or a sulfur atom; and R4 represents a hydrogen atom or a substituent.

Abstract: There is provided an electrodeposition method light modulating device including: (1) a transparent electrode, to which a polymer having a metallocene at a side chain thereof is fixed by a chemical bond; (2) a transparent electrode that is disposed to face the transparent electrode (1), and forms metal through a reducing reaction of metal ions thereon; and (3) an electrolytic solution containing the metal ions, which can be reduced by applying current thereto, and disposed between the transparent electrode (1) and the transparent electrode (2). In an electrodeposition method reflective display device, the electrolytic solution is held by a gelatinous polymer, and the white pigment is dispersed in the gelatinous polymer.

Abstract: Syntheses of a new blue EC monomer (ProDOT-MePro), and a new red EC monomer (ProDOP-Et2) are described. Two additional new types of EC monomers based on 3,4-alkylenedioxythiophene include fluorinated EC monomers and an EC monomer including silicon. EC polymer devices having more than one different color EC polymer to enable additional colors to be provided using subtractive color mixing are also described, as well as EC polymer devices incorporating a logo, image, or text, are generally obscured when the device is colored, but become visible when the device is not colored. Also described are EC polymer devices that include a cathodic EC polymer layer, a gel electrolyte, a counter electrode, and a reference electrode. Working prototypes of such devices exhibit significant increases in the speed of transition of the EC device from a colored state to a transparent state.

Abstract: A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

Abstract: Disclosed is an electrochromic device including at least one display region and at least one non-display region, which are separated from each other, the electrochromic device including a first substrate, a first electrode, an electrochromic layer, an electrolyte layer, optionally an ion storage layer, a second electrode, and a second substrate, which are sequentially formed, wherein the ion storage layer and/or the second electrode are patterned so as to prevent the ion storage layer and/or the second electrode from existing in part or all of said at least one display region; and a display device including the electrochromic device. In the electrochromic device, only the second substrate and electrolyte layer are located between the observer and the electrochromic layer, so that it is possible to prevent a contrast ratio from being degraded due to the ion storage layer and/or second electrode.

Abstract: An electrochromic device is disclosed, including two electrochromic elements, which are switched in a time separated manner. Each electrochromic element is arranged of electrochemically active material, and connected to a counter layer by a solidified electrolyte. In at least one embodiment, the electrochromic device further includes at least one resistive device which restricts the electrochemical reaction of one of the electrochromic element, such that a color of this electrochromic element is not substantially altered until the other electrochromic element is reacted to a predetermined extent.

Abstract: Disclosed is a method for manufacturing an electrode of an electrochromic display. The method includes, prior to forming a porous nanoelectrode, forming a barrier rib for separating an electrolyte using a photosensitive paste as a material for the barrier rib, in which the photosensitive paste enables formation of patterns through a photolithographic process and maintains its shape at 450° C. to 500° C. The use of the electrode enables fabrication of an electrochromic display that is capable of preventing cross-talk between pixels and has advantages of fast response speed, prolonged lifespan upon repeated use and improved electrochromism, when compared to the case of metal oxide electrodes.

Abstract: Disclosed are an electrochromic device and a method for fabricating the same. The electrochromic device comprises a transparent electrode, on which an electrochromic layer is formed, a counter electrode on which a reflective layer is formed, and an electrolyte layer interposed between the transparent electrode and the counter electrode. Since the electrolyte layer is formed in only an active region of unit pixels, neither crosstalk nor image diffusion occurs and only the selected region of unit pixels is operated. Thus, the electrochromic device can realize passive matrix displays capable of representing a desired color. Furthermore, the electrochromic device can be utilized in a variety of applications including flexible displays and electrical papers.

Abstract: The invention concerns an electrochromic device comprising a single supporting substrate (1) on which are disposed a working electrode (6) which is electrochromic per se and/or bears an electrochromic material on at least a portion thereof; a counter electrode (3); and a layer of an electrically insulating material (4) separating the electrodes; wherein said electrochromic material has a major surface at least a portion of which forms at least a portion of an external surface of the device. The new device allows deposition of electrochromic coatings on a variety of substrates which need not be transparent.

Abstract: Electrochromic matrix and method of controlling the grey state of pixels in an electrochromic matrix display comprising a first set of electrodes being formed of electrically isolated conduction lines, a second set of electrodes being formed of electrically isolated conduction lines, an electrochromic material and an electrolyte being arranged between or on said first and second sets of electrodes and drive means arranged to supply drive voltages selectively to individual electrodes in said first and second sets of electrodes, said first and second sets of electrodes being arranged in a pattern such that each electrode in said first set intersect each electrode in said second set at a single location and such that electrode in said second set intersect each electrode in said first set at a single location, said intersections between the first and second sets of electrodes forming a set of pixels.

Abstract: An electrochromic device is disclosed, including two electrochromic elements, which are switched in a time separated manner. Each electrochromic element is arranged of electrochemically active material, and connected to a counter layer by a solidified electrolyte. In at least one embodiment, the electrochromic device further includes at least one resistive device which restricts the electrochemical reaction of one of the electrochromic element, such that a color of this electrochromic element is not substantially altered until the other electrochromic element is reacted to a predetermined extent.

Abstract: An electrochromic display is disclosed which comprises an array side substrate (10) on which a pixel electrode (15) and an electrochromic layer (30) are formed, a color filter side substrate (50) on which a counter electrode (53) and an electrochromic layer (54) are formed, and an electrolytic layer (80) injected between the array side substrate (10) and the color filter side substrate (50). By forming the pixel electrode (15) of a reflective electrode material, it becomes unnecessary to add a coloring agent in the electrolytic layer (80) for enhancing contrast and therefore the electrolytic layer (80) can be made thin.

Abstract: A method for contacting patterned electrode devices includes the steps of providing a porous substrate, depositing electrically conductive material to form at least one electrode on a front-side of the porous substrate and depositing at least one electrically conductive back-side contact trace on the back-side of the substrate. A portion of the electrically conductive material penetrates into the substrate. A device is formed including the electrode on the front side of the substrate, wherein the electrode is electrically coupled by a conducting channel including the electrically conductive material through the substrate to the back-side contact trace.

Abstract: Switching uniformity of an optical modulation device for controlling the propagation of electromagnetic radiation is improved by use of an electrode comprising an electrically resistive layer that is transparent to the radiation. The resistive layer is preferably an innerlayer of a wide-bandgap oxide sandwiched between layers of indium tin oxide or another transparent conductor, and may be of uniform thickness, or may be graded so as to provide further improvement in the switching uniformity. The electrode may be used with electrochromic and reversible electrochemical mirror (REM) smart window devices, as well as display devices based on various technologies.

Abstract: An electrochromic device is usable for tuning and modulating infrared radiation in a spectral region comprising wavelengths between approximately 1 and 30 microns. This device comprises a plurality of thin films successively deposited on a substrate. The first of these films is a substrate electrode deposited on a suitably prepared substrate. A plurality of active layers comprising at least an electrochromic layer, an electrolyte layer and an ion storage layer and a substantially transparent metal layer are then preferably deposited on the substrate electrode. The preferred active layers are characterized by a transmittance that is selectively controllable by applying a voltage across the plurality of active layers.

Abstract: An electrochemical device includes at least one carrier substrate, and a stack of functional layers including at least one electrically conducting layer that includes metal oxide(s), and a multicomponent electrode including at least one electrochemically active layer, at least one higher-conductivity material and at least one network of one of conducting wires and conducting strips. The higher-conductivity material has a surface resistance that is lower than a surface resistance of the electrically conducting layer. The stack of functional layers is arranged between two substrates, and each may be rigid, of glass type or rigid polymer or semi-rigid or flexible of PET type.

Abstract: Optical devices, are provided, having a first conductive layer, an optical layer, arranged over the first conductive layer, and a second conductive layer, arranged over a portion of the optical layer, in accordance with a predetermined pattern. The optical layer is transparent to at least a wavelength of interest and has an index of refraction, which is a function of a variable, substantially reversible, dopant concentration or dopant concentration gradient in it. By applying an electric potential between the first and second conductive layers, a change in the index of refraction is formed within the optical layer, between the portion abut with the predetermined pattern and the remainder of the optical layer.

Abstract: The invention is a display device comprising a solid top transparent, charge conducting material, positioned below the transparent solid material is an active layer comprising an electrochromic material and an electrolyte, and positioned below the active layer is a working electrode and a counter-electrode arranged to be isolated from one another, wherein the distance between the working and the counter electrode is greater than two times the thickness of the active layer between the electrode and the conductive material.

Abstract: A locally distributed electrode is made by placing a conducting metallic oxide layer and a counter electrode in contact with a noble metal electroplating solution and applying a negative potential to the metallic oxide layer relative to the counter electrode, such that the noble metal is electrodeposited from the solution preferentially at defect sites on a surface of the metallic oxide layer. The noble metal nuclei are selectively electrodeposited at the defect sites to form a locally distributed electrode made up of a dot matrix of metallic islands. For reversible electrochemical mirror (REM) devices, the presence of the noble metal renders mirror metal electrodeposition at the defect sites reversible so that the defects become part of the dot matrix electrode and extraneous deposition of the mirror metal on the conducting metallic oxide is avoided.

Abstract: An electrochemical device includes at least one carrier substrate, and a stack of functional layers including at least one electrically conducting layer that includes metal oxide(s), and a multicomponent electrode including at least one electrochemically active layer, at least one higher-conductivity material and at least one network of one of conducting wires and conducting strips. The higher-conductivity material has a surface resistance that is lower than a surface resistance of the electrically conducting layer. The stack of functional layers is arranged between two substrates, and each may be rigid, of glass type or rigid polymer or semi-rigid or flexible of PET type.

Abstract: The invention includes many applications for electrochromic devices that require neutral colors and patterned electrodes. It uses novel materials, ways of making the materials, device configurations and applications. In one aspect, the device also includes electrical leads (115,116), transparent conductor layers (135,136), patterned EC layers (143,144), an etch line (99) and a substrate (125).

Abstract: Disclosed is an MEMS variable optical attenuator comprising a substrate having a planar surface, optical fibers having an optical signal transmitting end and an optical signal receiving end, respectively, coaxially arranged on the substrate, a micro-electric actuator arranged on the substrate for providing a driving stroke along a direction perpendicular to an optical axis of the optical beam, at least one lever structure arranged on the substrate for receiving the driving stroke of the micro-electric actuator at a first end thereof and transferring an amplified displacement distance to an optical shutter through a second end thereof, an optical shutter arranged on the substrate and connected to the second end of the lever structure so as to be moved by the amplified displacement distance, thereby being displaced to an attenuation position of the optical beam.