Having Metal Layer Patents (Class 359/360)
-
Publication number: 20120314281Abstract: In order to produce stress-reduced reflective optical elements (1) for an operating wave length in the soft X-ray and extreme ultraviolet wavelength range, in particular for use in EUV lithography, it is proposed to apply, between substrate (2) and a multilayer system (4) optimized for high reflectivity at the operating wavelength, a stress-reducing multilayer system (6) with the aid of particle-forming particles having an energy of 40 eV or more, preferably 90 eV or more. Resulting reflective optical elements are distinguished by low surface roughness, a low number of periods in the stress-reducing multilayer system and also high values of the stress-reducing multilayer system.Type: ApplicationFiled: August 20, 2012Publication date: December 13, 2012Applicant: CARL ZEISS SMT GMBHInventor: Gisela Von Blanckenhagen
-
Publication number: 20120300291Abstract: In one example, a metal reflector includes a silver layer and an underlying metal layer in galvanic communication with the silver layer.Type: ApplicationFiled: May 24, 2011Publication date: November 29, 2012Inventor: James Abbott
-
Publication number: 20120293862Abstract: A coated article includes a low-E coating supported by a substrate (e.g., glass substrate), the low-E coating including first and second IR reflecting layers comprising silver and/or gold, and at least one UV blocking layer that blocks significant amounts of UV light having a wavelength of from 380-400 nm so that no more than about 20% of light having a wavelength of from 380-400 passes through the low-E coating. The UV blocking layer may be positioned so as to not directly contact the first and second IR reflecting layers.Type: ApplicationFiled: May 17, 2012Publication date: November 22, 2012Applicant: Guardian Industries Corp.,Inventor: Vijayen S. VEERASAMY
-
Patent number: 8314986Abstract: A transparent electromagnetic wave-shielding filter, containing a support, a conductive layer provided on the support, and a hard coat layer provided on the conductive layer, wherein the conductive layer is formed by subjecting an emulsion layer which contains a silver halide and a binder and is coated on the support, to exposure and developing process, wherein the hard coat layer is formed by coating a coating liquid for forming the hard coat layer with a solvent on the conductive layer, and wherein the emulsion layer contains a compound soluble in the solvent of the coating liquid for forming the hard coat layer.Type: GrantFiled: March 24, 2010Date of Patent: November 20, 2012Assignee: Fujifilm CorporationInventors: Hiroshi Sakuyama, Akira Ichiki, Hideaki Nomura
-
Patent number: 8309165Abstract: The present invention discloses a color filter by copper and silver film, comprising: a lower copper layer; a lower silver layer formed on the lower copper layer; a medium formed on the lower silver layer; an upper copper layer formed on the medium; and an upper silver layer formed on the upper copper layer.Type: GrantFiled: December 15, 2011Date of Patent: November 13, 2012Assignee: Pixart Imaging Inc.Inventors: Sen-Huang Huang, Chin-Poh Pang, Hsin-Hui Hsu
-
Publication number: 20120281276Abstract: The invention relates mainly to an infrared reflector consisting of a metallic substrate coated with a layer of zirconium and chromium nitride of general formula (ZrxCr1-x)1-yNy with x between 0.15 and 0.7 and y between 0.01 and 0.265. The invention also relates to a method of manufacturing this infrared reflector.Type: ApplicationFiled: December 17, 2009Publication date: November 8, 2012Applicant: ARCELORMITTAL INVESTIAGACION Y DESARROLLO SLInventors: Claire Poirier, Christophe Le Pen
-
Patent number: 8304972Abstract: A coating layer for blocking EMI is disclosed, which comprises a base substrate, and a deposition member formed at one surface of the base substrate, comprising a plurality of repetitive unit films which include metal layers and high refraction layers, wherein any one of the outmost metal layers of the deposition member has a minimum thickness among the metal layers. Also, an optical filter which includes the coating layer and a display apparatus are disclosed.Type: GrantFiled: June 11, 2007Date of Patent: November 6, 2012Assignee: Samsung Corning Precision Materials Co., Ltd.Inventors: Jang Hoon Lee, Je Choon Ryoo, Jeong Hong Oh, Eui Soo Kim, Jong Han Oh
-
Publication number: 20120275018Abstract: A glass transparency for an automotive roof window includes a solar control coating on a surface of a glass substrate to provide the coated glass with a solar factor in the range of equal to or less 30%, and an Lta in the range of greater than 0% to less than 50%. The solar factor is determined in accordance with ISO 13837 (2008). In another embodiment of the invention, the transparency is a laminated transparency having the solar control coating between two glass sheets.Type: ApplicationFiled: April 29, 2011Publication date: November 1, 2012Applicant: PPG INDUSTRIES OHIO, INC.Inventors: Songwei Lu, Larry J. Shelestak, James P. Thiel
-
Publication number: 20120268695Abstract: A device, in particular for display units, includes a first transparent panel element and a second transparent panel element and a coating introduced between the first transparent panel element and the second transparent panel element. The coating is an IR-reflective coating which is applied onto the first and/or second element. The at least first transparent panel element and the at least second transparent panel element and the coating form a lamination. The space between the panels is filled with a filler material.Type: ApplicationFiled: April 25, 2012Publication date: October 25, 2012Inventors: Marten Walther, Stephan Reimann
-
Publication number: 20120268811Abstract: A film mirror prevents a drop in the specular reflectance rate caused by the deterioration of a silver layer functioning as a reflective layer. The film mirror is either provided at least with an ultraviolet absorption layer, resin base layers which neighbor each other, a silver reflective layer, and a lower adjacent layer as the constituent layers, in this order, from the side in which light enters, or provided at least with an ultraviolet absorption layer, resin base layers which neighbor each other, an adhesive layer, a silver reflective layer, and a lower adjacent layer as the constituent layers, in said order, from the side in which light enters. Either the resin base layer or the adhesive layer contains a stabilizer.Type: ApplicationFiled: December 21, 2010Publication date: October 25, 2012Applicant: Konica Minolta Advanced Layers, Inc.Inventor: Takeshi Kojima
-
Publication number: 20120250144Abstract: In order to reduce the adverse influence of contamination composed of silicon dioxide, hydrocarbons and/or metals within an EUV lithography apparatus on the reflectivity, a reflective optical element (50) for the extreme ultraviolet wavelength range having a reflective surface (59) is proposed, wherein the multilayer coating of the reflective surface (59) has a topmost layer (56) composed of a fluoride. The contaminations mentioned, which deposit on the reflective optical element (50) during the operation of the EUV lithography apparatus, are converted into volatile compounds by the addition of at least one of the substances mentioned hereinafter: atomic hydrogen, molecular hydrogen, perfluorinated alkanes such as e.g. tetrafluoromethane, oxygen, nitrogen and/or helium.Type: ApplicationFiled: March 30, 2012Publication date: October 4, 2012Applicant: CARL ZEISS SMT GMBHInventors: Dirk Heinrich EHM, Axel DOCHNAHL, Gisela VON BLANCKENHAGEN
-
Patent number: 8253840Abstract: An electromagnetic shielding coating covers a lens coated with an optical coating. A light shielding coating covers the optical coating. The electromagnetic shielding coating covers the light shielding coating. The electromagnetic shielding coating includes a first stainless steel layer and a second copper layer. The first stainless steel layer contains stainless steel, and is formed on the light shielding coating directly. The second copper layer is formed on the first metal layer.Type: GrantFiled: April 23, 2010Date of Patent: August 28, 2012Assignee: Hon Hai Precision Industry Co., Ltd.Inventor: Hsin-Chin Hung
-
Publication number: 20120212810Abstract: EUV-mirror having a substrate (S) and a layer arrangement that includes plural layer subsystems (P?, P??) each consisting of a periodic sequence of at least two periods (P2, P3) of individual layers. The periods (P2, P3) include two individual layers composed of different materials for a high refractive index layer (H?, H??) and a low refractive index layer (L?, L??) and have within each layer subsystem (P?, P??) a constant thickness (d2, d3) that deviates from that of the periods of an adjacent layer subsystem.Type: ApplicationFiled: January 10, 2012Publication date: August 23, 2012Applicant: CARL ZEISS SMT GMBHInventors: Hans-Jochen Paul, Gerhard Braun, Sascha Migura, Aurelian Dodoc, Christoph Zaczek
-
Publication number: 20120182607Abstract: The present invention relates to a concentrator for concentrating solar radiation and to the production thereof from polymeric materials. The concentrator according to the invention can be used in photovoltaically or in particular in solar thermally usable systems. The concentrator according to the invention allows for the efficient concentration of solar radiation onto objects such as solar cells, independent of the geometry thereof. This relates, for example, to the surface of a solar cell as it is used in concentrating photovoltaics, and also an absorber tube as it is used in concentrating solar heating, for example in the scope of the parabolic trough technology.Type: ApplicationFiled: September 7, 2010Publication date: July 19, 2012Applicant: Evonik Degussa GmbHInventors: Uwe Numrich, Thomas Arndt, Werner Arnold, Michael Olbrich
-
Patent number: 8221888Abstract: The present invention discloses a color filter by copper and silver film, comprising: a lower copper layer; a lower silver layer formed on the lower copper layer; a medium formed on the lower silver layer; an upper copper layer formed on the medium; and an upper silver layer formed on the upper copper layer.Type: GrantFiled: May 22, 2009Date of Patent: July 17, 2012Assignee: PixArt Imaging Inc.Inventors: Sen-Huang Huang, Chin-Poh Pang, Hsin-Hui Hsu
-
Publication number: 20120140316Abstract: An optical body includes a first optical layer having a concave-convex surface, a wavelength-selective reflecting layer formed on the concave-convex surface, and a second optical layer formed on the wavelength-selective reflecting layer to embed the concave-convex surface, the wavelength-selective reflecting layer having a multilayer structure formed by successively stacking at least a first high refractive index layer, a metal layer, and a second high refractive index layer, wherein, given that optical film thicknesses of the first high refractive index layer and the second high refractive index layer are x and y, respectively, and a geometrical film thickness of the metal layer is z, x, y and z satisfy the following formula (1): z ? 12.1 ? exp ? { - 1 2 ? ( x - 120 145.17 ) 2 - 1 2 ? ( y - 120 123.Type: ApplicationFiled: June 8, 2011Publication date: June 7, 2012Applicant: SONY CORPORATIONInventors: Masaki Suzuki, Tsutomu Nagahama, Hiroya Takenaka, Masashi Enomoto
-
Publication number: 20120099188Abstract: An optically transmissive structure for laser protection is provided including a plurality of metallic layers of material interspersed with a plurality of dielectric layers of material. The metallic layers are interposed with the dielectric layers; the metallic layers include individual layers each having a thickness smaller than a skin depth of the metal at a selected wavelength; and the dielectric layers separating two metallic layers have a thickness equal to or smaller than the selected wavelength in the dielectric layer of material. A method for fabricating the above structure is also provided. An optically transmissive structure for laser protection including a plurality of metal layers interposed with dielectric material layers is also provided. A transmittance of the structure is greater than fifty percent (50%) for an incident light having a wavelength of 550 nm; and an optical density of the structure is greater than two (2) for an incident light having a wavelength between 1000 nm and 1400 nm.Type: ApplicationFiled: July 29, 2011Publication date: April 26, 2012Applicant: AEgis Technologies Group, Inc.Inventors: Neset Akozbek, Milan Buncick, Carlos Kengla
-
Publication number: 20120091495Abstract: A light reflecting substrate comprises at least: an insulating layer and a metal layer disposed in contact with the insulating layer. The total reflectivity of light in the wavelength range of more than 320 nm and not more than 700 nm is not less than 50% and the total reflectivity of light in the wavelength range of 300 nm to 320 nm is not less than 60%. The light reflecting substrate further improves the emission power of the light-emitting device when used as the substrate therefor.Type: ApplicationFiled: June 23, 2010Publication date: April 19, 2012Applicant: FUJIFILM CORPORATIONInventors: Yusuke Hatanaka, Yoshinori Hotta, Akio Uesugi
-
Publication number: 20120087005Abstract: A process for producing a substrate coated on a face with a low-E thin film multilayer, the process including: depositing a thin-film multilayer containing a thin silver film between at least two thin dielectric films and an absorbent film on a face a substrate; and heat treating the coated face with laser radiation between 500 and 2000 nm to reduce at least one selected from the group of the emissivity and the sheet resistance of the multilayer by at least 5%, wherein the absorbent film at least partially absorbs the laser radiation so that the absorption of the multilayer the wavelength of the laser radiation is such that the absorption of a clear glass substrate 4 mm in thickness coated with the multilayer at the wavelength of the laser radiation is greater than or equal to 10%.Type: ApplicationFiled: June 11, 2010Publication date: April 12, 2012Applicant: SAINT-GOBAIN GLASS FRANCEInventors: Vincent Reymond, Andriy Kharchenko, Nicolas Nadaud
-
Patent number: 8144830Abstract: A reflective optical element exhibits an increase in the maximum reflectivity at operating wavelengths in the extreme ultraviolet or soft x-ray wavelength range. A first additional intermediate layer (23a, 23b) and a second additional intermediate layer (24a, 24b) are provided between the absorber layer (22) and the spacer layer (21), wherein the first additional intermediate layer increases the reflectivity and the second additional intermediate layer (24a,b) prevents chemical interaction between the first additional intermediate layer (23a,b) and the adjoining spacer layer (21) and/or the absorber layer (22).Type: GrantFiled: August 5, 2009Date of Patent: March 27, 2012Assignee: Carl Zeiss GmbHInventors: Andrey E. Yakshin, Robbert W. E. Van De Kruijs, Fred Bijkerk, Eric Louis, Ileana Nedelcu
-
Publication number: 20120069429Abstract: The present invention pertains to anti-surveillance security windows comprising one or more conductive glass substrates and one or more layers comprising an organic radical cation compound, wherein the layers reflect in the infrared region. Preferably, the organic radical cation compound is a salt of an aminium radical cation. The security windows may further comprise one or more layers of a multilayer interference stack of a metal/metal or metal/metal oxide design.Type: ApplicationFiled: March 21, 2011Publication date: March 22, 2012Applicant: MADICO, INC.Inventors: Peter K. Barrett, David W. Avison, Steven Carlson
-
Patent number: 8115991Abstract: A switchable infrared filter, consisting of a diamond carrier material (1), whereon a filter material (6), which is made of a thermochromic material, is disposed on one side and which can be connected to a heating device (2, 3).Type: GrantFiled: January 27, 2006Date of Patent: February 14, 2012Assignee: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Christoph Wild, Eckhard Wörner, Harald Obloh
-
Publication number: 20120019797Abstract: A stress-reduced reflective optical element for a working wavelength in the soft X-ray and extreme ultraviolet wavelength range includes a first multilayer system (4) of at least two alternating materials (41, 42) having different real parts of the refractive index at the working wavelength on a substrate (2), which exerts a layer stress on the substrate (2), and comprising a second multilayer system (6) of at least two alternating materials (61, 62) on a substrate (2), which exerts an opposed layer stress on the substrate (2) and is arranged between the first multilayer system (4) and the substrate (2), wherein a first (61) of the at least two materials of the second multilayer system (6) is interrupted by layers (62) having a thickness of up to 1 nm of the at least one further material of the second multilayer system (6) at such distances that the first material is present in an amorphous state.Type: ApplicationFiled: July 22, 2011Publication date: January 26, 2012Applicant: CARL ZEISS SMT GMBHInventor: Joern WEBER
-
Publication number: 20120013976Abstract: A stress-reduced reflective optical element for a working wavelength in the soft X-ray and extreme ultraviolet wavelength range includes a first multilayer system (4) of at least two alternating materials (41, 42) having different real parts of the refractive index at the working wavelength on a substrate (2), which exerts a layer stress on the substrate (2), and comprising a second multilayer system (6) of at least two alternating materials (61, 62) on a substrate (2), which exerts an opposed layer stress on the substrate (2) and is arranged between the first multilayer system (4) and the substrate (2), wherein one of the materials (61) of the second multilayer system (6) is nickel-vanadium-silicon, and wherein the ratio (G) of the overall thickness of nickel-vanadium-silicon layers (61) within one period (60) of the second multilayer system (6) to the overall thickness of the period (60) of the second multilayer system (6) is at least 0.25.Type: ApplicationFiled: July 22, 2011Publication date: January 19, 2012Applicant: CARL ZEISS SMT GMBHInventor: Joern WEBER
-
Publication number: 20120011850Abstract: Broadband reflectors include a UV-reflective multilayer optical film and a VIS/IR-reflective layer. In various embodiments, the VIS/IR reflective layer may be a reflective metal layer or a multilayer optical film.Type: ApplicationFiled: December 21, 2009Publication date: January 19, 2012Inventors: Timothy J. Hebrink, Susannah C. Clear, Laurence R. Gilbert, Michael F. Weber, Ta-Hua Yu, Audrey A. Sherman
-
Publication number: 20110310473Abstract: An optical body includes a substrate having a concave-convex surface, a reflecting layer formed on the concave-convex surface, and an optical layer formed on the reflecting layer to embed the concave-convex surface, wherein the reflecting layer directionally reflects light, the concave-convex surface is made up of a plurality of triangular pillars arrayed in a one-dimensional pattern, and the triangular pillar has an apex angle a and a slope angle ?, the apex angle ? and the slope angle ? satisfying a formula (1) or (2) given below: 30???4.5??285 (70???80)??(1) 30????1.Type: ApplicationFiled: June 8, 2011Publication date: December 22, 2011Applicant: SONY CORPORATIONInventors: HIRONORI YOSHIDA, TSUTOMU NAGAHAMA, MASASHI ENOMOTO
-
Publication number: 20110297852Abstract: A mirror is provided which may include: a substrate; a thermal diffusion layer provided on a principal surface of the substrate, the thermal diffusion layer having a higher thermal conductivity than the substrate; and a reflective layer provided on the thermal diffusion layer, the reflective layer having a lower thermal conductivity than the thermal diffusion layer.Type: ApplicationFiled: March 22, 2011Publication date: December 8, 2011Inventors: Hidenobu Kameda, Osamu Wakabayashi, Masato Moriya
-
Patent number: 8049188Abstract: The present invention relates to a method of cleaning a surface at least partly covered with contaminant or undesired material by applying atomic hydrogen. The invention also proposes an irradiation unit adapted to perform the cleaning method. In the present method the atomic hydrogen is generated by dissociation of molecular hydrogen directed to a surface containing catalytic material, which causes the dissociation of at least a part of the molecular hydrogen to atomic hydrogen. The surface with the catalytic material is arranged close to the surface to be cleaned and is dimensioned such that its total surface area is at least twice the surface area of the to be cleaned surface region. The method allows for the cleaning of the surface region in a constructive simple and efficient manner.Type: GrantFiled: August 27, 2007Date of Patent: November 1, 2011Assignee: Koninklijke Philips Electronics N.V.Inventors: Christof Metzmacher, Achim Weber
-
Publication number: 20110261442Abstract: A coated article is provided, having a coating supported by a glass substrate where the coating includes at least one color and/or reflectivity-adjusting absorber layer. The absorber layer(s) allows color tuning, and reduces the glass side reflection of the coated article and/or allows sheet resistance of the coating to be reduced without degrading glass side reflection. In certain example embodiments the absorber layer is provided between first and second dielectric layers which may be of substantially the same material and/or composition. In certain example embodiments, the coated article is capable of achieving desirable transmission, together with desired color, low reflectivity, and low selectivity, when having only one infrared (IR) reflecting layer of silver and/or gold. Coated articles according to certain example embodiments of this invention may be used in the context of insulating glass (IG) window units, monolithic windows, or the like.Type: ApplicationFiled: April 22, 2010Publication date: October 27, 2011Inventors: Hartmut Knoll, Jochen Butz, Uwe Kriltz, Bernd Disteldorf, Jose Ferreira, Pierrot Pallotta
-
Publication number: 20110261443Abstract: Disclosed is a heat ray reflective film having a single layer structure, which has high heat ray reflectivity, can relatively control visible light absorption and visible light reflection and has excellent heat stability. Also disclosed is a heat ray reflective laminate which has high environmental durability and is suitable as a window material for buildings or automobiles. A heat ray reflective laminate which is a laminate comprising a transparent substrate and a heat ray reflective layer and which has a solar reflectance of at least 15% as measured from the side containing the heat ray reflective layer, wherein the heat ray reflective layer comprises a binder resin containing a hydrophilic group other than an N-pyrrolidonyl group, and a metal, and the heat ray reflective layer has a layer thickness of at most 100 nm.Type: ApplicationFiled: October 23, 2009Publication date: October 27, 2011Applicant: MITSUBISHI CHEMICAL CORPORATIONInventors: Tatsushi Isojima, Tomoko Yamakawa, Naoto Maru, Hiroyuki Aikyou, Hisao Takeuchi, Katsuya Funayama, Hisashi Kusaka
-
Publication number: 20110255068Abstract: An EUV mirror module is disclosed that comprises a substrate with a curved upper surface and a curved electroformed mirror. A self-adjusting bonding material is disposed between the substrate and the electroformed mirror. The bonding material is flowable at a melting temperature and self-adjusts to conformally fill the region between substrate to the electroformed mirror and bond the substrate and the electroformed mirror. The substrate may have at least one cooling channel for cooling the mirror module.Type: ApplicationFiled: April 16, 2010Publication date: October 20, 2011Inventor: Jacques Kools
-
Publication number: 20110249326Abstract: Selective solar absorbent coating and manufacturing method, with solar absorption and low emissivity properties. The coating comprises a substrate (1) of metal, dielectric or ceramic material, at least one highly reflective metal layer (2) in mid-far infrared applied to the substrate itself which provides low emissivity properties, a multi-layer structure of alternating dielectric and metallic layers (3) of subnanometric thickness applied to the reflective metal layer and at least one dielectric layer (4) that acts as an anti-reflective layer for the solar spectrum. The coating is applicable as a selective absorbent coating in absorbent tubes for parabolic-trough solar collectors, in solar panels for hot water, heating or domestic cooling, both in the form of absorbent tubes and absorbent sheets, in capture systems in tower solar thermoelectric power plants, and in capture systems in Stirling disk systems.Type: ApplicationFiled: October 8, 2009Publication date: October 13, 2011Applicant: ABENGOA SOLAR NEW TECHNOLOGIES, S.A.Inventors: Francisco Villuendas Yuste, Carlos Alcañiz Garcia, Rafael Alonso Esteban, Javier Pelayo Zueco, Jesús Mario Subías Domingo, Carlos Heras Vila, Noelia Martínez Sanz
-
Publication number: 20110234945Abstract: A display filter includes a transparent substrate and a first polarizer film. The first polarizer film allows only a component of ambient light that has passed through the transparent substrate to pass through, the component being parallel to a first polarizer axis.Type: ApplicationFiled: March 24, 2011Publication date: September 29, 2011Applicant: SAMSUNG CORNING PRECISION MATERIALS CO., LTD.Inventors: Dong Hyun Park, Jong Taek Kim, Cheol Hee Park, Dae Chul Park
-
Patent number: 8025957Abstract: A transparency includes a first ply having a first visible light transmission and a second ply having a second visible light transmission, with the first visible light transmission being greater than the second visible light transmission. A solar control coating is located between the first ply and the second ply. The solar control coating has a first infrared reflective metallic layer, a second infrared reflective metallic layer and a third infrared reflective metallic layer. The first infrared reflective metallic layer is thicker than the second infrared reflective metallic layer and the second infrared reflective metallic layer is thicker than the third infrared reflective metallic layer.Type: GrantFiled: August 20, 2008Date of Patent: September 27, 2011Assignee: PPG Industries Ohio, Inc.Inventor: James P. Thiel
-
Publication number: 20110228385Abstract: The present invention pertains to windows films comprising one or more layers comprising an organic free radical compound, wherein the layers reflect in the infrared region, and one or more layers of a multilayer interference stack of a metal/metal or metal/metal oxide design. Preferably, the organic free radical compound is a salt of an aminium radical cation. One or more layers of the multilayer interference stack may comprise an aminium radical cation compound. Also provided are security windows that utilize such window films.Type: ApplicationFiled: March 21, 2011Publication date: September 22, 2011Applicant: MADICO, INC.Inventors: David W. Avison, Steven Carlson, Peter K. Barrett
-
Patent number: 8021560Abstract: In a process for the fabrication of a radiation-absorbing optical element that contains a substrate (1) of plastic, a layer with a graduated refractive index (4) is fabricated on at least one surface (2) of the substrate (1) using a plasma etching process, after which a metal layer (7) is applied on top of the layer with a graduated refractive index (4).Type: GrantFiled: September 8, 2005Date of Patent: September 20, 2011Assignee: Fraunhofer-Gesellshaft zur Foerderung der Angewandten Forschung E. V.Inventors: Norbert Kaiser, Antje Kaless, Peter Munzert, Michael Scheler, Ulrike Schulz
-
Publication number: 20110194087Abstract: A reflective optical element e.g. for use in EUV lithography, configured for an operating wavelength in the soft X-ray or extreme ultraviolet wavelength range, includes a multilayer system (20) with respective layers of at least two alternating materials (21, 22) having differing real parts of the refractive index at the operating wavelength. Preferably, at least at an interface from the material (21) having the higher real part of the refractive index to the material (22) having the lower real part of the refractive index, a further layer (23) of a nitride or a carbide of the material (22) having the lower real part is arranged. Particularly preferably the material (22) having the lower real part of the refractive index is lanthanum or thorium. Preferably, the layers (21, 22, 23) of at least one material are applied in a plasma-based process for manufacturing a reflective optical element as described.Type: ApplicationFiled: January 7, 2011Publication date: August 11, 2011Applicant: CARL ZEISS SMT GmbHInventors: Tim TSARFATI, Erwin Zoethout, Eric Louis, Frederik Bijkerk
-
Publication number: 20110170176Abstract: A coated substrate is disclosed. The coated substrate includes a substrate and a coating composition over the substrate comprising at least one metal based layer selected from tungsten, chromium, tantalum, molybdenum, aluminum, niobium, and mixtures and alloys thereof; and mixtures and alloys of cobalt and chromium; and at least one dielectric layer including SixNy, where x/y ranges from 0.75 to 1.5, over the metal based layer. The ?Ecmc (1.5:1) (T), ?Ecmc (1.5:1) (R1) and ?Ecmc (1.5:1) (R2) of a non-heat treated, coated substrate as compared to a heat treated, coated substrate according to the present invention are no greater than 8 units.Type: ApplicationFiled: March 22, 2011Publication date: July 14, 2011Applicant: PPG INDUSTRIES OHIO, INC.Inventors: Dennis J. O'Shaughnessy, James J. Finley
-
Publication number: 20110164237Abstract: A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation. The spectral purity filter includes a filter part having a plurality of apertures configured to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. Each aperture has been manufactured by an anisotropic etching process.Type: ApplicationFiled: August 26, 2009Publication date: July 7, 2011Applicants: ASML NETHERLANDS B.V., KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Wouter Anthon Soer, Andrei Mikhailovich Yakunin, Martin Jacobus Johan Jak, Denny Mathew, Hendrik Jan Kettelarij, Fredericus Christiaan Van Den Heuvel, Elizabeth Maria Kuijpers
-
Patent number: 7968255Abstract: A photomask which improves the imaging performance that the photomask has and forming a good micro image on a wafer in photolithography with a half pitch of 60 nm or less. Provided is a photomask used for photolithography using an ArF excimer laser as an exposing source for immersion exposure by quadrupole-polarized illumination with a high-NA lens. The photomask includes a mask pattern of a light shielding film or semi-transparent film on a transparent substrate, and further, given that a thickness of the light shielding film or semi-transparent film is “t” nm, a refractive index is “n”, an extinction factor is “k”, and a bias of a space part of the mask pattern is “d” nm, when “t”, “d”, “n” and “k” are adjusted and the photomask is used for the photolithography, optical image contrast takes a value exceeding 0.580.Type: GrantFiled: July 19, 2007Date of Patent: June 28, 2011Assignee: Dai Nippon Printing Co., Ltd.Inventors: Yasuhisa Kitahata, Yasutaka Morikawa, Takashi Adachi, Nobuhito Toyama, Yuichi Inazuki, Takanori Sutou
-
Patent number: 7961383Abstract: The invention is directed to elements having fluoride coated surfaces having multiple layers of fluoride material coatings for use in laser systems, and in particular in laser systems operating at wavelength <200 nm. In a particular embodiment the invention is directed to highly reflective mirrors for use in wavelengths <200 nm laser systems. The invention describes the mirrors and a method of making them that utilizes a plurality of periods of fluoride coatings, each period comprising one layer a high refractive index fluoride material and one layer low refractive index fluoride material, and additionally at least one layer of an amorphous silica material. The silica material can be inserted between each period, inserted between a stack consisting of a plurality of periods, and, optionally, can also be applied as the final layer of the finished element to protect the element.Type: GrantFiled: February 26, 2008Date of Patent: June 14, 2011Assignee: Corning IncorporatedInventors: Jue Wang, Horst Schreiber
-
Publication number: 20110128617Abstract: The invention provides low-emissivity coatings that are highly reflective of infrared radiation. The coating includes three infrared-reflection film regions, which may each comprise silver.Type: ApplicationFiled: February 9, 2011Publication date: June 2, 2011Applicant: CARDINAL CG COMPANYInventor: Klaus Hartig
-
Patent number: 7952805Abstract: A transparent solar control film may have a single or multiple layer core that includes at least one layer of an orientated thermoplastic polymer material. Infrared radiation absorbing nanoparticles that preferentially absorb at least about 100 times more infrared radiation than visible radiation may be dispersed within the at least one layer of an oriented thermoplastic polymer layer. The transparent solar control film may have a haze value of less than about 5 percent.Type: GrantFiled: August 22, 2006Date of Patent: May 31, 2011Assignee: 3m Innovative Properties CompanyInventors: Daniel J. McGurran, Edward J. Kivel, Jeffrey A. Boettcher, Laurence R. Gilbert, Mitsuhiro M. Kominami, Raghunath Padiyath, Stephen J. Strauss
-
Publication number: 20110096391Abstract: To provide a broadband reflecting mirror having high reflectance within a wavelength band of 400 nm to 2500 nm and having excellent thermal resistance and damage resistance.Type: ApplicationFiled: June 30, 2009Publication date: April 28, 2011Applicant: NIPPON ELECTRIC GLASS CO., LTD.Inventors: Toshimasa Kanai, Takeshi Sakurai
-
Patent number: 7933064Abstract: The invention relates to a reflector for an infrared radiating element. The reflector comprises a metal foil coated with—a first oxide layer deposited on the metal foil; —an infrared reflecting metal layer deposited on said first oxide layer; and—a second oxide layer deposited on said infrared reflecting layer. The first oxide layer is functioning as a diffusion barrier layer and is preventing the diffusion of the metal of the infrared reflecting layer in the substrate. The second oxide layer is functioning as a protective layer for the infrared reflecting layer giving the infrared reflecting layer the required thermal stability.Type: GrantFiled: May 8, 2006Date of Patent: April 26, 2011Assignee: NV Bekaert SAInventors: Roland Groenen, Hugo Lievens
-
Publication number: 20110080637Abstract: A waveband selective retroreflective article, comprising a body layer having a plurality of concave retroreflective elements, each said concave retroreflective element forming a cavity having open-face surfaces and an additional layer that includes particles of a wave-band selective material.Type: ApplicationFiled: June 1, 2009Publication date: April 7, 2011Applicant: REFLEXITE CORPORATIONInventor: Patrick W. Mullen
-
Patent number: 7919004Abstract: A method for removing at least one reflective layer (4a, 4b) from an optical element (1) for EUV lithography, wherein the optical element (1) has a substrate (2) and an interlayer (6) between the substrate (2) and the at least one reflective layer (4a, 4b). The method includes etching away the at least one reflective layer (4a, 4b) as far as the interlayer (6) with an etching gas (7), wherein the material of the interlayer (6) does not react with the etching gas (7), and wherein, after the etching away, the interlayer (6) has a surface roughness of less than 0.5 nm rms, preferably of less than 0.2 nm rms, and more preferably of less than 0.1 nm rms. Also, an optical element (1) for reflecting radiation in the EUV wavelength range includes a substrate (2), at least one reflective layer (4a, 4b), and an interlayer (6) arranged between the substrate (2) and the at least one reflective layer (4a, 4b).Type: GrantFiled: August 3, 2009Date of Patent: April 5, 2011Assignee: Carl Zeiss SMT GmbHInventors: Martin Weiser, Olaf Bork, Ulrich Andiel
-
Patent number: 7910796Abstract: Disclosed is an absorbent sanitary article for absorbing body fluids which comprises a matrix containing metallic silver, wherein the silver is present bound to a fiber 24 exclusively on the surface thereof.Type: GrantFiled: March 12, 2007Date of Patent: March 22, 2011Assignee: Bio-Gate AGInventors: Thorsten Bechert, Peter Steinrucke
-
Publication number: 20110013273Abstract: A building structure having a high efficiency solar control system is provided. The building structure may have a window defined by a sheet of glass and a film mounted to its exterior side. There may be a gap between the film and the glass wherein the film, film and gap, or gap provides thermal insulation. The film may reflect solar radiation in the near and mid infrared ranges yet allow high transmission of light in the visible range such that the occupants of the building structure may view his/her surroundings through the window. The film may have a layer of silver which reflects the solar radiation in the near and mid infrared ranges. Since the silver is susceptible to oxidation and turns the silver into a black body which absorbs the near and mid infrared radiation, a protective layer on the exterior of the infrared reflecting layer may be designed to slow the rate of oxidation of the silver layer to an acceptable level.Type: ApplicationFiled: April 19, 2010Publication date: January 20, 2011Inventors: Stephen S. Wilson, Bart Wilson, Seth Wilson
-
Publication number: 20110007388Abstract: An automobile or vehicle having a high efficiency solar control system is provided. The automobile may have a window defined by a sheet of glass and a film mounted to its exterior side. The film may reflect solar radiation in the near and mid infrared ranges yet allow high transmission of light in the visible range such that the occupants of the automobile may view his/her surroundings through the window. The film may have a layer of silver which reflects the solar radiation in the near and mid infrared ranges. Since the silver is susceptible to oxidation and turns the silver into a black body which absorbs the near and mid infrared radiation, the film may be designed to slow the rate of oxidation of the silver layer to an acceptable level. The silver layer may be sandwiched between the glass which does not allow oxygen to diffuse there through and reach the layer of silver and a stack of sacrificial layers having a certain thickness which slows down the rate of oxygen diffusion to an acceptable level.Type: ApplicationFiled: July 10, 2009Publication date: January 13, 2011Inventors: Stephen S. Wilson, Bart Wilson, Seth Wilson