Abstract: A reflector structure suitable for extreme ultraviolet lithography (EUVL) is provided. The structure comprises a substrate having a multi-layer reflector. A capping layer is formed over the multi-layer reflector to prevent oxidation. In an embodiment, the capping layer is formed of an inert oxide, such as Al2O3, HfO2, ZrO2, Ta2O5, Y2O3-stabilized ZrO2, or the like. The capping layer may be formed by reactive sputtering in an oxygen environment, by non-reactive sputtering wherein the materials are sputtered directly from the respective oxide targets, by non-reactive sputtering of the metallic layer followed by full or partial oxidation (e.g., by natural oxidation, by oxidation in oxygen-containing plasmas, by oxidation in ozone (O3), or the like), by atomic level deposition (e.g., ALCVD), or the like.

Abstract: Improved solar collectors (40) comprising glass tubing (42) attached to bellows (44) by airtight seals (56) enclose solar absorber tubes (50) inside an annular evacuated space (54. The exterior surfaces of the solar absorber tubes (50) are coated with improved solar selective coatings (48) which provide higher absorbance, lower emittance and resistance to atmospheric oxidation at elevated temperatures. The coatings are multilayered structures comprising solar absorbent layers (26) applied to the meta surface of the absorber tubes (50), typically stainless steel, topped with antireflective Savers (28) comprising at least two layers 30, 32) of refractory metal or metalloid oxides (such as titania and silica) with substantially differing indices of refraction in adjacent layers. Optionally, at least one layer of a noble metal such as platinum can be included between some of the layers.

Abstract: A zone-optimized mirror (MZ) for reflecting extreme ultraviolet (EUV) or X-ray radiation (18) includes a reflective surface (S) having two or more substantially discrete zones (Z1, Z2, . . . Zn) that include respective coatings (C1, C2, . . . Cn). Each coating is configured to optimally reflect a select range of incident angles of the radiation incident thereon.

Abstract: A filter for extreme ultraviolet is disclosed. The filter may be formed by a multilayer structure comprising several layers of Yb and Al deposited on a substrate using thermal evaporation. The layers of Yb and Al may be separated by SiO layers, which may act as barriers avoiding interaction between the layers. The multilayer structure may be covered by a SiO protective layer.

Abstract: A solar mirror comprising a transparent substrate (51) (e.g. clear float glass or low-iron glass), a reflective layer (53) (e.g. of silver) provided on a surface of the substrate, and a coating layer (54, 55) (e.g. a paint layer or other protective layer) provided over the reflective layer, wherein the reflective layer is provided in a thickness of at least 1600 ?.

Abstract: Disclosed is a film mirror used for reflection of sunlight, which includes, in the following order from the side where sunlight is entered, an ultraviolet ray reflection film which reflects ultraviolet ray and transmits visible and infrared light, a plastic film layer, a metal reflection-layer which reflects visible and infrared light, and a protective layer.

Abstract: To provide a light transmitting electromagnetic wave shielding film which achieves both of excellent electromagnetic wave shielding properties and an excellent near infrared ray cutting function. A light transmitting electromagnetic wave shielding film has a metallic silver part and a light transmitting part, which are formed by exposing an emulsion layer containing a silver salt emulsion formed on a support and then developing, wherein the light transmitting electromagnetic wave shielding film has infrared ray shielding properties.

Abstract: This invention relates to the field of thermophotovoltaic (TPV) direct energy conversion. In particular, TPV systems use filters to minimize parasitic absorption of below bandgap energy. This invention constitutes a novel combination of front surface filters to increase TPV conversion efficiency by reflecting useless below bandgap energy while transmitting a very high percentage of the useful above bandgap energy. In particular, a frequency selective surface is used in combination with an interference filter. The frequency selective surface provides high transmission of above bandgap energy and high reflection of long wavelength below bandgap energy. The interference filter maintains high transmission of above bandgap energy and provides high reflection of short wavelength below bandgap energy and a sharp transition from high transmission to high reflection.

Abstract: The invention relates to a cover polymeric with protective properties against solar radiation, suitable for controlling both ultraviolet radiation and infrared radiation or both at the same time. The cover comprises a substrate of polymeric material with a specific density greater than 1, provided with at least one UV radiation-absorbing compound: and at least one selective solar filter, transparent to visible light and reflecting infrared radiation, applied on said substrate and which is configured by at least one first dielectric material layer; at least one first metal layer; an intermediate layer as a barrier; and at least one second dielectric material layer. The cover is applicable as a coating of rigid laminar materials and also as material for greenhouses or buildings with transparent walls.

Abstract: A reflector for photovoltaic power generation is characterized by the use of a color coating on the surface of the reflector material which is stable to ultraviolet light. The reflector includes a substrate and a layer of high purity aluminum on the substrate. The aluminum layer is anodized and coated with a gold dye so that the reflector has a reflectivity which is high for long wave, near infrared, and red to green light, moderate for blue light, and low for ultraviolet light. When such a reflector is arranged adjacent to a photovoltaic panel, it reflects additional sunlight onto the panel to increase the electrical output of the panel without damaging the solar collector material of the panel.

Abstract: An optical filter and a method for its design are provided that will transmit visible light and quickly cutoff to low transmission or high optical density in the near infrared wavelength region. This high optical density is achieved by either reflection or absorption of the incident light. Certain specified spectral wavelengths may be selected for absorption or reflection. These properties are achieved through the use of absorbing layers along with dielectric layers in the multilayer coating.

Abstract: An areal security element for security papers, documents of value and the like, with at least two different areal security features (20, 22) disposed one above the other, which each are recognizable upon viewing the security element from opposite sides, wherein the first security feature (20) has a thin-layer element (42) provided with an areal diffraction structure (46) with color shift effect, which contains a first reflection layer (40) with a first color effect, the second security feature (22) has a second reflection layer (44) provided with an areal diffraction structure (46) for producing a diffractive image, which shows a second color effect different from the first color effect, and wherein the thin-layer element (42) of the first security feature (20) and the reflection layer (44) of the second security feature (22) are provided with the same areal diffraction structure (46).

Abstract: Low emissivity glazing which is an assembly of thin layers including at least one metal layer reflecting infrared rays between one or more dielectric layers located between the metal layer and the glass sheet and on the metal layer, the light transmission of one clear float glass sheet 4 mm thick coated with said layers being not less than 83%, the metal layer being selected such that the emissivity is not higher than 0.042.

Abstract: Certain embodiments of this invention relates to a coated article including a substrate (e.g., glass substrate) which supports a coating thereon, wherein the coating includes at least one layer of or including SbOxNy. This layer is desirable for blocking (reflection and/or absorption) of at least some ultraviolet (UV) radiation. In certain example embodiments of this invention, the layer of SbOxNy may be used as a dielectric layer in a low-E (low-emissivity) coating, and may improve UV-blocking capability of such a low-E coating. Coated articles in certain example embodiments of this invention may be used in the context of windows.

Abstract: A reflective optical element exhibits an increase in the maximum reflectivity at operating wavelengths in the extreme ultraviolet or soft x-ray wavelength range. A first additional intermediate layer (23a, 23b) and a second additional intermediate layer (24a, 24b) are provided between the absorber layer (22) and the spacer layer (21), wherein the first additional intermediate layer increases the reflectivity and the second additional intermediate layer (24a,b) prevents chemical interaction between the first additional intermediate layer (23a,b) and the adjoining spacer layer (21) and/or the absorber layer (22).

Abstract: To provide a laminated glass for a vehicle window which can prevent the temperature increase in a vehicle. A laminated glass for a vehicle window which comprises a glass plate 12 to be disposed on the car exterior side when the laminated glass 1 is assembled in a vehicle, and an infrared reflection film 21 provided on the side of an infrared shielding interlayer 30 having infrared shielding fine particles dispersed therein, of the glass plate 12, wherein the reflectance to light at all wavelengths of from 900 to 1,100 nm is from 30 to 50%, the absorptivity to light at all wavelengths of from 1,100 to 1,300 nm is from 35 to 60%, and the transmittance to light at all wavelengths of from 900 to 1,500 nm is at most 30%.

Abstract: A multi-layered spectral purity filter improves the spectral purity of extreme ultra-violet (EUV) radiation and also collects debris emitted from a radiation source.

Abstract: An infrared motion detector including at least one infra-red radiation sensor, at least one radiation reflecting surface, operative to direct radiation impinging thereon towards the at least one infra-red radiation sensor and at least one coating layer, coating the at least one radiation reflective surface, which is substantially reflective to far infra-red radiation and which strongly absorbs at least one of visible light and near infra-red radiation, wherein the at least one coating layer includes black nickel.

Abstract: To provide a laminated glass for a vehicle window which can prevent the temperature increase in a vehicle. An infrared reflection glass plate which is a glass plate with an infrared reflection film, wherein the infrared reflection film has a stacked coating film (X) having a coating film (1) made of a high refractive index inorganic material having a refractive index of at least 1.90 and a coating film (2) made of a low refractive index inorganic material having a refractive index of at most 1.56 alternately stacked in this order from the glass plate side; the total number of the coating film (1) and the coating film (2) is at least 3; and the geometrical thickness of the coating film (1) is from 70 to 150 nm and the geometrical thickness of the coating film (2) is from 100 to 200 nm.

Abstract: A silver mirror construction that maintains a high percentage of hemispherical reflectance throughout the UV and visible spectrum when used in solar reflectors, comprising: a) a pressure sensitive adhesive layer positioned beneath a silver overlay; b) a polymer film disposed on the silver overlay; c) an adhesive layer positioned on the polymer film; and d) a UV screening acrylic film disposed on the adhesive layer.

Abstract: A reflective material which has a high UV light reflectance and maintains such a high reflectance even after heat treatment, and a reflector for LEDs are provided. A reflective material including a polymer obtained from a composition as a raw material which contains the following (a) and (b): (a) 95 to 30 mass % of a thermally polymerizable or photopolymerizable compound; and (b) 5 to 70 mass % of hollow particles which are formed of a material having an ultraviolet light transmittance of 50% or more at a wavelength of 350 nm.

Abstract: A scanning image displaying apparatus capable of preferably adjusting a diopter is disclosed. The scanning image displaying apparatus includes a light source, a movable diffusing face, an imaging optical system for forming an image of the light source on the diffusing face, scanning means for two-dimensionally scanning the image of the light source formed by the imaging optical system on the diffusing face, an eyepiece optical system for guiding light from the diffusing face to an observer, and a mechanism for moving the light source and/or at least a portion of the imaging optical system in interlocking relationship with the movement of the diffusing face.

Abstract: The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.

Abstract: The invention relates to an infrared radiation reflecting layer system for panes of glass and similar, the properties of said layer system being maintained even after heat treatment, for example, for bending or hardening the panes of glass. Silver is used as the infrared radiation reflecting layer. A combination of NiCrOx and Zn(Al)Ox is used as a lower-layer blocker for the silver. Also, a stoichiometric layer is also used as a pre-blocker layer. A specific work point is selected for a first dielectric layer of TiOxNy. Harmonisation of the thickness of the layers and the degrees of oxidation of NiCrOx and ZnAlOx as double lower-layer blockers and the work point of the TiOxNy-base layer are important for the temperability of the coating.

Abstract: Passivation coatings and gettering agents may be used in an Extreme Ultraviolet (EUV) source which uses tin (Sn) vapor as a plasma “fuel” to prevent contamination and corresponding loss of reflectivity due to tin contamination. The passivation coating may be a material to which tin does not adhere, and may be placed on reflective surfaces in the source chamber. The gettering agent may be a material that reacts strongly with tin, and may be placed outside of the collector mirrors and/or on non-reflective surfaces. A passivation coating may also be provided on the insulator between the anode and cathode of the source electrodes to prevent shorting due to tin coating the insulator surface.

Abstract: The invention is directed to elements used in high power laser lithographic systems operating at below 250 nm, and in particular to elements that have a coating of selected materials to extend lifetime of the elements; and to a method of preparing the extended lifetime elements. The invention is particularly directed to gratings and mirrors that are coated with silicon dioxide, aluminum oxide or fluorinated silicon dioxide. The coatings of the invention attain their extended life as a result of being deposited while being simultaneously bombarded with an energetic ion plasma.

Abstract: A filter 100 for a display device includes a transparent substrate 110; a near infrared ray blocking layer 120; and electromagnetic shielding layer 130; an external light blocking layer 140; and a color compensation layer 150. The near infrared ray blocking layer 120 is formed on the transparent substrate 110 and includes a metal thin film and a metal oxide thin film which are alternately layered, each of the metal thin film and the metal oxide thin film being layered one or more times. The electromagnetic shielding layer 130 is formed on the near infrared ray blocking layer 120 and includes a metal mesh pattern. The external light blocking layer 140 includes an external light blocking pattern 144, the external light blocking pattern including a plurality of external light blocking parts with a wedge shape which are filled with a light absorbing material and a conductive material.

Abstract: Disclosed is a near-infrared absorbing compound which does not contain antimony or arsenic, and has excellent stability, especially excellent heat resistance, light resistance and moist heat resistance. Also disclosed are a near-infrared absorbing filter, which is produced by using the near-infrared absorbing compound, and has excellent resistance such as light resistance and heat resistance, an optical filter and an optical recording medium. Specifically disclosed are a diimmonium compound represented by the formula (1) below and a near-infrared absorbing filter obtained by using such a diimmonium compound. Further specifically disclosed are a near-infrared absorbing filter wherein an adhesive layer containing the diimmonium compound is arranged on a transparent supporting body, and an optical filter using such a near-infrared absorbing filter.

Abstract: A combination of filters for filtering selected wavelengths of electromagnetic radiation is provided on a transparent substrate such as a plastic film or glazing of a window. The combination of filters prevents or attenuates the passage of wavelengths through the substrate into a building, where the passage of the wavelengths into the building could adversely affect people or machinery within the building. The combination of filters is useful improve wireless networks performance by blocking or attenuating undesired electromagnetic interference, and radio frequency interference.

Abstract: A reflective plate 72 is arranged so as to reflect infrared rays, radiated from a heating wire 71, outside of a heater 70 and may be made of steel. A number of cavities 73 are arranged on the surface of the reflective plate 72. Since the cavities 73 have an aspect ratio of 0.17 to 0.7, the infrared reflectance can be increased compared to a reflector with no cavities.

Abstract: A transparent substrate, especially made of glass, provided with a thin-film multilayer (20) that includes three silver layers (Ag1, Ag2, Ag3) and comprises, alternately on the substrate, a titanium dioxide layer (21), a metal oxide layer (22), one of the silver layers (Ag1, Ag2, Ag3) and a covering layer (23), characterized in that: the metal oxide is zinc oxide; the covering layer (23) is a sacrificial metal; and an antireflection layer (24) comprising at least one metal oxide is deposited on the covering layer (23) for the silver layer (Ag3) furthest away from the substrate.

Abstract: An optical apparatus comprises a plurality of multilayer-film reflective mirrors that are capable of reflecting a electromagnetic wave in an extreme ultraviolet region. The multilayer-film reflective mirrors are arranged along an optical axis of the electromagnetic wave, and at least two of the multilayer-film reflective mirrors have reflecting, wavelength characteristics being different from each other, in a wavelength region other than the extreme ultraviolet region.

Abstract: Multilayer-film reflective mirrors are disclosed. An exemplary such mirror has a base and a multilayer film formed on the base. The multilayer film includes multiple layer pairs. Each layer pair includes a respective first layer and a respective second layer, wherein the first and second layers are laminated together in an alternating manner. The multilayer film has first and second regions that reflect extreme ultraviolet light. A first group of layers is disposed in the first and second regions and has a first periodic length. A second group disposed in the first region has a second periodic length different from the first periodic length, and a third group disposed in the second region has a substantially same periodic length as the first periodic length.

Abstract: In certain example embodiments, low-E coated articles may be designed so as to realize a combination of good visible transmission (Tvis) and an excellent solar heat gain coefficient (SHGC), thereby realizing an improved (i.e., higher) Tvis/SHGC ratio. In certain example embodiments of this invention, if heat treated (HT), the low-E coated articles may have approximately the same color characteristics as viewed by the naked eye both before and after heat treatment (i.e., a low ?E* value) in certain example instances. Such coated articles may be used in insulating glass (IG) units, windows, and/or other suitable applications.

Abstract: The invention relates to a reflector for an infrared radiating element. The reflector comprises a metal foil coated with—a first oxide layer deposited on the metal foil; —an infrared reflecting metal layer deposited on said first oxide layer; and—a second oxide layer deposited on said infrared reflecting layer. The first oxide layer is functioning as a diffusion barrier layer and is preventing the diffusion of the metal of the infrared reflecting layer in the substrate. The second oxide layer is functioning as a protective layer for the infrared reflecting layer giving the infrared reflecting layer the required thermal stability.

Abstract: A lithographic projection apparatus includes a radiation system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning device configured to pattern the beam according to the desired pattern; a substrate table configured to hold a substrate; and a projection system configured to project the patterned beam onto a target portion of the substrate. A component of the lithographic projection apparatus is at least partially provided with a cap layer that includes aluminum nitride.

Abstract: Using a realistic plasmonic model, an optically thick electrically conductive film with subwavelength hole or holes therein is shown to always support propagating modes near the surface plasmon frequency, where cross-sectional dimensions of the hole or holes are less than about ?/2nh, ? being the wavelength of the light and nh the refractive index of the dielectric material in the hole or holes. This is the case even when material losses are taken into account. Based on the dispersion analysis, in both a single hole or hole array designs, propagating modes play a dominant role in the transport properties of incident light. These structures exhibit a new region of operation, while featuring a high packing density and diffraction-less behavior.

Abstract: A UV-bandpass filter for transmitting therethrough light having a wavelength included in a UV-region. The bandpass filter is an optical filter including a thin silver film; wherein the thin silver film includes an entrance face and an exit face opposing the entrance face, for emitting light having a wavelength included in a specific UV-region whose wavelength ranges from 250 nm to 400 nm in the light having reached the entrance face, and has such a thickness as to yield a transmittance of 10% or less with respect to light having a wavelength excluding the specific UV-region.

Abstract: The electronic imaging apparatus comprises a first optical element A having a flat surface and a surface with refracting power, chemical substance which enables to change light transmittance by chemical change according to electric quantity, a second optical element having a transparent surface and a flat surface, and an optical system having an optical component arranged so as to sandwich the chemical substance by a surface of the first optical element and a surface of the second optical element. Here the spectrum transmittance at whole range of ?min??520??max satisfies the following conditions when the whole transmittance of the first optical element, the chemical substance and the second optical element at the wavelength of 520 nm is ?520, 0.70<?440/?520<1.20 0.80<?600/?520<1.30 where ?x (x is a number) is the transmittance at the wavelength of x nm.

Abstract: An electrically conductive film contains electrically connected first and second visible light-transmissive metal or metal alloy layers separated by a visible light-transmissive crosslinked polymeric layer. The film can be joined or laminated into glazing (especially non-planar vehicular safety glazing) with reduced likelihood that the metal or metal alloy layers will be damaged or distorted. The film also can transparently shield a device that can cause or is sensitive to electromagnetic interference with reduced likelihood that the metal or metal alloy layers will fracture.

Abstract: A infrared (IR) light absorbing reflector is formed with a substrate that supports a first IR absorptive multilayer part having multiple layers of partial IR absorbing thin films. The first IR absorptive multi-layer part supports a second visible light reflecting multilayer part.

Abstract: There is disclosed an optical element, comprising, a supporting substrate, a multilayer film being supported on the substrate and reflecting extreme ultraviolet light, and an alloy layer provided between the multilayer film and the substrate.

Abstract: The invention provides a process for producing a high-precision reflector and its coating. A reflector is produced from a solid material using a material-removing process and is coated with a cold-light mirror layer.

Abstract: A multi-layered spectral purity filter improves the spectral purity of extreme ultra-violet (EUV) radiation and also collects debris emitted from a radiation source.

Abstract: Methods for filtering particles from a fluid are disclosed, wherein an array of microstructures defining respective microchannels having respective minimum widths are used to separate the fluid from particles to be filtered. The fluid flows through the minimum widths into the microchannels defined between adjacent microstructures. The particles to be filtered are prevented from passing through the respective minimum widths, resulting in filtration of those particles from the fluid. The microchannels can be provided with gradient characteristics to separate particles in the fluid according to size.

Abstract: A solar control member for determining solar control for a window includes an optically massive layer between a gray metal layer and a titanium nitride layer. The optically massive layer has sufficient thickness to retard or prevent constructive and destructive interference of reflected light. The optically massive layer may be an adhesive, but also may be one or more polymeric substrates. The gray metal layer is preferably nickel chromium, but other gray metal materials provide superior results as compared to the prior art. Also in the preferred embodiment, the titanium nitride layer is closer to the window (e.g., glass) than the gray metal layer.

Abstract: A reflector for use in a projection system comprises an anodized metal substrate having a metal oxide layer. The metal oxide layer has a plurality of pores. A light absorbing pigment is deposited into each of the pores such that the light absorbing pigment and the metal oxide layer form a light absorbing layer on the metal substrate.

Abstract: A multilayer film reflector for X-rays has alternately stacked layers formed on a substrate and comprising a layer (high refractive index layer) comprising a material having a large difference between a refractive index to soft X-ray and a refractive index in vacuum, and a layer (low refractive index layer) comprising a material having a small difference between a refractive index to soft X-ray and a refractive index in vacuum, wherein at least one intermediate layer having a crystalline structure is provided between the low refractive index layer and the high refractive index layer. Thereby, the crystallization of the low refractive index layer is promoted, the refractive index of the low refractive index layer is lowered, so that the reflectance of the multilayer film reflector is improved.

Abstract: Multiple cavity low-emissivity coatings. The coating includes three infrared-reflection film regions, which may each include silver.

Abstract: In accordance with the invention, a filter is fabricated by a modified form of the process disclosed in U.S. Pat. No. 7,068,430. In particular, the method is modified to take into account the effect of absorption by filter material. The method is exemplified by the fabricating of an ultraviolet light transmission filter for transmitting a band within the range 230-320 nanometers. The resulting filter comprises plurality of hard-coating, thin-film layers of alternating high and low index of refraction. The improved filter provides high transmission, sharp edge slopes, and deep and extended out-of-band blocking. As compared with currently available filters, the filter provides transmission up to three or more times greater, edge slopes up to four times sharper, and deep extended out-of-band blocking extending further, even through the visible range.