Abstract: A tunable optical resonator for use as a tunable laser or optical filter comprising a cavity in which the cavity is delimited by a reflection grating and a reflector in which the reflection grating is fixed to a flexible support, the resonator also comprising means for flexing the flexible support for causing the grating to mimic rotation about a selected point. A micro-mechanical tunable resonator as above providing mode-hop free tuning.

Abstract: A communications transmitter is disclosed that utilizes a grating light valve (GLV) to impose information on an optical signal. The communications transmitter further includes at least one laser light source, a frequency dispersing device, an electrostatic modulator that serves as a GLV, and at least one data input source. The laser light source is configured to produce a light beam having a specific optical bandwidth and the frequency dispersing device is optically coupled to the light source and configured to disperse the light beam to produce a frequency dispersed light. The electrostatic modulator includes an electrostatically responsive reflective ribbon oriented to receive a portion of the frequency dispersed light having a specified bandwidth.

Abstract: In a scale for a reflective photoelectric encoder in which a reflective film is not formed on the side faces of phase gratings, an edge angle ? of the phase grating is set larger than 80 degrees and less than 90 degrees. Accordingly, stable diffraction efficiency is obtained, even if there are variations in the shape and size of the gratings.

Abstract: A wavelength selective switching device and method for selectively transmitting optical signals based on wavelength utilizes diffraction to spatially separate the optical signals of different wavelengths such that the optical signal of a selected wavelength can be selectively transmitted. The wavelength selective switching device selectively rotates the polarization components of the optical signals such that the polarization states of the polarization components are the same in both incoming and outgoing directions at the diffraction grating. Thus, a diffraction grating with a high grating line frequency (e.g. greater than 900 grating lines per mm for signals in the 1550 nm wavelength range) can be used for diffracting the polarization components of the optical signals in both the incoming and outgoing directions.

Abstract: A diffractive security element (2) is divided into surface portions, having an optically effective structure (9) at interfaces embedded between two layers of a layer composite (1) of plastic material. At least the base layer (4), which is to be illuminated, of the layer composite (1) is transparent. The optically effective structure (9) as a base structure has a zero order diffraction grating with a period length of at most 500 nm. In at least one of the surface portions an integrated optical waveguide (5) with a layer thickness (s) of a transparent dielectric is embedded between the base layer (4) and an adhesive layer (7) of the layer composite (1) and/or a protective layer (6) of the layer composite (1), wherein the profile depth of the optically effective structure (9) is in a predetermined relationship with the layer thickness (s).

Abstract: A zone plate modulator modulates an incident wave by changing the relative distance between a pair of complementary reflective zone plates. The modulator acts to reflect the incident wave as a plane mirror in a first configuration, and to diffract the incident wave into a series of focal points along the axis of the modulator as a phase zone plate in a second configuration. A force applied to the zone plates changes the zone plate modulator between the first and second configurations, therefore modulating the incident wave. The force can be an electrostatic force generated by a voltage source. An array of zone plate modulator elements is a compact spot array generator performing both the modulating and focusing functions. An achromatic zone plate modulator provides a both wavelength and polarization independent modulation of the incident wave. A variable optical attenuator comprises achromatic zone plate modulators.

Abstract: An improvement in a wavelength division multiplexer and/or a dense wavelength division multiplexer (WDM/DWDM) is achieved by incorporating an electronically reconfigurable diffraction grating (108). The introduction of the electronically reconfigurable diffraction grating (108), which is typically fabricated using MEMS (microelectromechanical systems) technology, improves the compact design, durability, and dynamic functionality of the WDM/DWDM system.

Abstract: A system and/or method for spatial beam shaping of an incident laser beam. The system and/or method includes a laser beam source for providing the incident laser beam and a Bragg grating (BG) coupled to receive the incident laser beam from the laser beam source. The BG has a thickness that is not less than a cross sectional size of the incident laser beam in the plane of beam diffraction. The BG produces a diffracted beam from the incident laser beam and the various depths within the BG include a distribution of diffraction efficiency density for spatially shaping the incident laser beam into the diffracted beam.

Abstract: A reflective grating for precision location measurement. In one embodiment, the reflective grating has a non-reflective substrate and a non-reflective adhesion layer disposed on the substrate layer. A reflective surface layer is disposed on the adhesion layer. In another embodiment, the reflective grating is manufactured on the reflective (polished) surface of a monolithic substrate. A series of grating lines are formed in the reflective surface layer by vaporizing portions of the reflective surface layer with a laser in order to expose the non-reflective adhesion layer. Accordingly, alternating reflective and non-reflective grating lines are formed that are used for making precision measurements.

Abstract: A system and method is used to pattern a substrate. A projection beam received from a radiation system is patterned using an array of individually controllable elements. A portion of the projection beam is directed directly onto one of the individually controllable elements and collecting radiation reflected therefrom using each one of a first array of focusing elements. An image of the first array of focusing elements is projected onto a second array of focusing elements using a projection system, such that radiation reflected from one of the individually controllable elements is projected via one of the focusing elements in the first array of focusing elements and the projection system to one of the focusing elements in the second array which focuses the radiation onto a spot on the substrate.

Abstract: An information recording/reproducing apparatus of the invention is equipped with an objective lens, a light source and a variable optical element having a grating which demonstrates a piezo-electric effect by means of an electric field. The light source emits and irradiates a laser beam onto the grating to generate a 0th order diffraction beam and +/? 1st order diffraction beams in accordance with first order diffraction efficiency, and the objective lens converges the 0th diffraction beam and +/? 1st order diffraction beams which are irradiated onto an information recording medium for the purpose of information recording or information reproducing. By controlling an electric field applied to the grating, the first order diffraction efficiency of the grating is adjusted, whereby light beams are generated which have power levels appropriate for various kinds of information recording media.

Abstract: A wavelength selective switching device and method for selectively transmitting optical signals based on wavelength utilizes diffraction to spatially separate the optical signals of different wavelengths such that the optical signal of a selected wavelength can be selectively transmitted. The wavelength selective switching device selectively rotates the polarization components of the optical signals such that the polarization states of the polarization components are the same in both incoming and outgoing directions at the diffraction grating. Thus, a diffraction grating with a high grating line frequency (e.g. greater than 900 grating lines per mm for signals in the 1550 nm wavelength range) can be used for diffracting the polarization components of the optical signals in both the incoming and outgoing directions.

Abstract: An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Abstract: A durable silver film thin film coated non-planar optical element has been developed to replace Gold as a material for fabricating such devices. Such a coating and resultant optical element has an increased efficiency and is resistant to tarnishing, can be easily stripped and re-deposited without modifying underlying grating structure, improves the throughput and power loading of short pulse compressor designs for ultra-fast laser systems, and can be utilized in variety of optical and spectrophotometric systems, particularly high-end spectrometers that require maximized efficiency.

Abstract: An asymmetric-cut multilayer diffracts EUV light. A multilayer cut at an angle has the same properties as a blazed grating, and has been demonstrated to have near-perfect performance. Instead of having to nano-fabricate a grating structure with imperfections no greater than several tens of nanometers, a thick multilayer is grown on a substrate and then cut at an inclined angle using coarse and inexpensive methods. Effective grating periods can be produced this way that are 10 to 100 times smaller than those produced today, and the diffraction efficiency of these asymmetric multilayers is higher than conventional gratings. Besides their ease of manufacture, the use of an asymmetric multilayer as a spectral purity filter does not require that the design of an EUV optical system be modified in any way, unlike the proposed use of blazed gratings for such systems.

Abstract: A device comprising an array of free metal ribbons that are coupled to a substrate through ceramic support structures is disclosed. The device is preferably an optical MEM device, wherein a first set of free metal ribbons are configured to move relative to a second set of alternating free metal ribbons for modulating an incident light source. An optical MEM system in accordance with the invention includes a light source and suitable optics for transmitting light to and from the array of free metal ribbons. The optical MEM device exhibits reduced surface charging and has applications in optical communications.

Abstract: A modulator for and a method of modulating an incident beam of light including means for supporting a plurality of active elements and a plurality of bias elements, each active and bias element including a light reflective planar surface with the light reflective planar surfaces of the plurality of active elements lying in a first parallel plane and the plurality of bias elements lying in a second parallel plane wherein the plurality of active and bias elements are parallel to each other and further wherein the plurality of bias elements are mechanically or electrically deflected with respect to the plurality of active elements. Each of the plurality of bias elements is deflected an odd multiple of the wavelength of an incident light wave divided by four and the plurality of light reflective planar surfaces of the plurality of active elements move between the first parallel plane to the second parallel plane.

Abstract: A polarization conversion optical system converts light having a nonuniform plane of polarization into light having a uniform plane of polarization. The system includes a multilayer dielectric film at the side upon which the target light is incident. The film exhibits the property that it reflects one polarized component of the light and transmits a second polarized component of the light at a first angle of incidence, but transmits the first component at a second angle of incidence. Incident target light that is transmitted through the film at the first angle of incidence passes through a quarter-wavelength plate and is reflected at the second angle, whereupon it is retransmitted through the quarter-wavelength plate to be converted from one plane of polarization to the other. It is then emitted from the dielectric film in the same plane of polarization as light reflected by the film.

Abstract: In one embodiment, a high-density spatial light modulator includes a substrate having a reflective surface and a reflective ribbon over the reflective surface. The ribbon may have one or more openings, such as rectangular slots. The openings allow light to pass through the ribbon and impinge on the reflective surface. Deflecting the ribbon towards the substrate thus allows for dynamically-controllable diffraction of incident light. The spatial light modulator pixel requires less space than a conventional light modulator, thus allowing for relatively large pixel count within a manufacturable device size. Other embodiments are also disclosed.

Abstract: An dynamic optical filter 10 is provided to selectively attenuate or filter a wavelength band(s) of light (i.e., optical channel(s)) or a group(s) of wavelength bands of an optical WDM input signal 12. The optical filter is controllable or programmable to selectively provide a desired filter function. The optical filter 10 includes a spatial light modulator 36, which comprises an array of micromirrors 52 that effectively forms a two-dimensional diffraction grating mounted in a retro-reflecting configuration. Each optical channel 14 is dispersed separately or overlappingly onto the array of micro-mirrors 52 along a spectral axis or direction 55 such that each optical channel or group of optical channels are spread over a plurality of micromirrors to effectively pixelate each of the optical channels or input signal.

Abstract: An electromagnetic radiation diffuser, operative at extreme ultraviolet (EUV) wavelengths, is fabricated on a substrate. The diffuser comprises a randomized structure having a peak and valley profile over which a highly reflective coating is evaporated. The reflective coating substantially takes the form of the peak and valley profile beneath it. An absorptive grating is then fabricated over the reflective coating. The grating spaces will diffusely reflect electromagnetic radiation because of the profile of the randomized structure beneath. The absorptive grating will absorb the electromagnetic radiation. The grating thus becomes a specialized Ronchi ruling that may be used for wavefront evaluation and other optical diagnostics in extremely short wavelength reflective lithography systems, such as EUV lithography systems.

Abstract: A diffraction grating that achieves high diffraction efficiency at all polarizations for optical signals at telecommunications wavelengths is provided. The diffraction grating has a substrate and a plurality of reflective faces oriented at respective blaze angles ?b spaced along the substrate surface, with the blaze angles substantially differ from the Lit trow condition. Each reflective surface is supported by a support wall connected substantially with the substrate surface.

Abstract: A system and method is used to pattern a substrate. A projection beam received from a radiation system is patterned using an array of individually controllable elements. A portion of the projection beam is directed directly onto one of the individually controllable elements and collecting radiation reflected therefrom using each one of a first array of focusing elements. An image of the first array of focusing elements is projected onto a second array of focusing elements using a projection system, such that radiation reflected from one of the individually controllable elements is projected via one of the focusing elements in the first array of focusing elements and the projection system to one of the focusing elements in the second array which focuses the radiation onto a spot on the substrate.

Abstract: An apparatus providing full spectrum electronic images includes a full-spectrum light source, a programmable diffraction grating to separate light from the source into its spectral components, a reflection system controllable on a pixel by pixel basis to modulate light output from the diffraction grating, and a scanning mirror to form an image from light modulated by the reflection system. A related method for displaying a full spectrum image includes providing full spectrum light, using a diffraction grating to separate the light into its spectral components, and for each pixel of the image, modulating the intensity of the spectral components to produce a light output characteristic of such pixel, and additionally using a scanning mirror arrangement to form the image.

Abstract: A layer composite of plastic material forms a retroreflector and includes at least one transparent structure layer, a protective layer and a reflection layer enclosed at the common interface between the structure layer and the protection layer. A relief structure formed by substantially identically shaped three-dimensional structure elements is formed in the reflection layer. At their base surfaces the structure elements are of lateral dimensions in the range of between 1 ?m and 100 ?m. The structure elements have side faces which are covered by the reflection layer and which include an angle of inclination of 45°, with a free surface of the layer composite. The relief structure is additively superimposed with a microstructure in at least one surface element. The microstructure has a preferred direction and influences the quality of the reflection action of the layer composite. The retroreflector is suitable for the production of machine-readable optical markings.

Abstract: A reflection-type graduation having a silicon substrate. The silicon substrate has first subsections formed thereon. Each of the first subsections has etched oblique surfaces. The surfaces are positioned so that light beams directed incident to the surfaces cause no retroreflection. The substrate also includes second subsections having relatively higher reflecting properties as compared to the first subsections. The first subsections and second subsections are alternatively disposed on the substrate in a first direction.

Abstract: A grating structure with a dielectric coating is disclosed that operates efficiently away from the blaze angle in low order with a high diffraction efficiency and high wavelength dispersion. Such grating structure can be employed in Littrow configuration to provide, for example, cavity feedback in excimer lasers.

Abstract: Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also provides optical devices useful as narrow band filters.

Abstract: A first diffractive optical element pattern with a pattern pitch that is no greater than a wavelength of incident light is formed on a first main surface of substrate such as a glass plate. Second diffractive optical element patterns are formed at positions that are respectively incident to positive first-order diffracted light and negative first-order diffracted light produced by the first diffractive optical element pattern. Negative first-order diffracted light produced by each second diffractive optical element pattern is incident upon a boundary face of the substrate at an angle that is smaller than the critical angle, and so exits the substrate.

Abstract: A tunable optical structure and devices based thereon for the compensation of chromatic dispersion in a multi-channel light signal are provided. The optical structure includes a waveguide and a Bragg grating provided therein. The Bragg grating has a plurality of grating components, each associated with one or a few of the channels to be compensated. The period of each grating component is selected to allow compensation of chromatic dispersion experienced by this particular channel or these particular channels, thereby taking into account the wavelength-dependent dispersion slope of the light signal. Tuning means are also provided in order to adjust the dispersion of the grating components to the required values.

Abstract: A diffraction optical element including an element body having a large number of grooves formed on its surface to form a grating, and a grating shape adjusting layer deposited on a grating surface of the element body by oblique incidence or material particles onto the grating surface, wherein the grating shape adjusting layer per se is made of a reflecting film material. By the grating shape adjusting layer, the contour shape of the resulting grating surface in a section perpendicular to a lengthwise direction of the grooves is made not similar to the sectional shape of the element body. A reflecting film may be formed on a grating shape adjusting layer made of another material. A reflecting film may be provided on the element body before a grating shape adjusting layer made of a transparent dielectric material is provided on the reflecting film.

Abstract: The present invention relates to the tailoring the reflectivity spectrum of a SGDBR by applying digital sampling theory to choose the way each reflector is sampled. The resulting mirror covers a larger wavelength span and has peaks with a larger, more uniform, coupling constant (?) than the mirrors produced using conventional approaches. The improved mirror also retains the benefits of the sample grating approach. Additionally, most of the embodiments are relatively simple to manufacture.

Abstract: A light modulator includes elongated elements arranged parallel to each other. Each elongated element includes a light reflective planar surface with the light reflective planar surfaces configured in a first grating plane. A support structure is coupled to the elongated elements to maintain a position of the elongated elements relative to each other and to enable movement of each elongated element in a direction normal to the first grating plane. The support structure enables movement between a first modulator configuration and a second modulator configuration. In the first modulator configuration, the elongated elements act to reflect an incident light as a plane mirror. In the second modulator configuration, the elongated elements form a stepped blaze configuration along a second grating plane lying at a grating angle to the first grating plane and act to diffract the incident light into at least two diffraction orders.

Abstract: A one-dimensional image is formed by reflecting the light from a one-dimensional display device having a plurality of light emitting sections or light emitting sections disposed in one direction by a projection optical system three times or more. Then, a two-dimensional image is obtained by optically scanning the one-dimensional image by a light deflection means in a surface including a direction perpendicular to the disposing direction of the light emitting sections or the light emitting sections in the one-dimensional display device. A magnification projecting system is provided to project the two-dimensional image by magnifying it as it is as an intermediate image. A requirement for high resolution can be coped with by employing the one-dimensional display device as well as a small and less expensive light scanning apparatus and two-dimensional image forming apparatus can be realized thereby.

Abstract: A security element (2) comprising a plastic laminate (1) has a surface pattern which is composed mosaic-like at least from surface elements, wherein in the surface elements a reflecting interface (8) between a shaping layer (5) and a protective layer (6) of the plastic laminate (1) forms optically effective structures (9). Light (11) which is incident on the plastic laminate (1) and which passes through a cover layer (4) of the plastic laminate (1) and through the shaping layer (5) is deflected in a predetermined manner by means of the optically effective structures (9). Shaped in the surface of at least one of the surface elements is a diffraction structure which is produced by a superimposition of a linear asymmetrical diffraction grating (24) with a matt structure. The linear asymmetrical diffraction grating (24) has a spatial frequency from the range of values of between 50 lines/mm and 2,000 lines/mm.

Abstract: A light coupling element is proposed with a surface (3) of a material which is transparent to light of a given wavelength (?). In order for the light coupling element to act independently of the direction of the vectorial parameters of the light, such as in particular of the polarization, on the surface of the light coupling element line-form indentations or elevations (51, 52) are provided which are equidistantly parallel and which intersect at given angles (?).

Abstract: One embodiment disclosed relates to an apparatus for controlled diffraction of light. The apparatus includes a plurality of vertically movable reflective members and an arrangement of the reflective members along a grating plane. The grating plane is configured to be controllably tiltable. Another embodiment disclosed relates to a method for controlled diffraction of light. The method includes illuminating incident light upon an element, and controllably deflecting reflective members within the element to control a fraction of the incident light reflected by the element. The reflective members may be controllably deflected so as to be positioned along a tiltable grating plane.

Abstract: A modulator for modulating an incident beam of light. The modulator includes a plurality of elements, each element including a first end, a second end, a first non-linear side, a second non-linear side, and a light reflective planar surface. The light reflective planar surfaces of the plurality of elements lie in one or more parallel planes. The elements are preferably arranged parallel to each other. The modulator also includes a support structure to maintain a position of each element relative to each other and to enable movement of selective ones of the plurality of elements in a direction normal to the one or more parallel planes of the plurality of elements. The plurality of elements are preferably moved between a first modulator configuration wherein the plurality of elements act to reflect the incident beam of light as a plane mirror, and a second modulator configuration wherein the plurality of elements act to diffract the incident beam of light.

Abstract: A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ light modulator, a ribbon is suspended over a substrate, and the ribbon tension is kept constant over a temperature range by adjusting the aggregate thermal coefficient of expansion of the ribbon to match the aggregate thermal coefficient of expansion of the substrate. Various opposition materials have an opposite thermal coefficient of expansion as the aluminum layer of a grating light valve™ light modulator ribbon, using the thermal coefficient of expansion of the substrate as a zero coefficient reference.

Abstract: A light-diffractive binary grating structure has a microscopic mesa structure (2) whose plateaux (5) are separated by valleys (4) of substantially rectangular cross-section, wherein the arrangement of the valleys (4) is periodically repeated. Within a period (T) of the mesa structure (2) at least N valleys (4) separate the plateaux (5), N being an integer and greater than 2. The mesa structure (2) is an additive superimposition of N phase-shifted rectangular structures which have the same period (T) of the mesa structure (2). Each of the rectangular structures has a phase shift such that the plateaux (5) of the one rectangular structure fall into the valleys (4) of the N?1 other rectangular structures. In addition the resulting mesa structure (2) has only a single valley between two plateaux (5), which is of a width greater than a seventh of the period (T).

Abstract: The invention refers to electrically reconfigurable optical devices based on the use of a layer of dielectric and transparent viscoelastic material (G) opposing at least a first electrode structure (ES1). According to the invention the arrangement of the individual electrode zones in the first electrode structure (ES1) in order to deform the viscoelastic layer (G) complies with one of the following alternatives. According to the first alternative, the electrode zones of the first electrode structure (ES1) are grouped into groups composed of two or more adjacent electrode zones and within each of said groups individual electrode zones are supplied each with a substantially different voltage. According to the second alternative, the electrode zones of the first electrode structure (ES1) are substantially annular, elliptical, rectangular or polygonal closed-loop electrodes. The invention allows, for example, for creating electrically reconfigurable blazed gratings (30) or Fresnel zone lenses (40).

Abstract: Imaging system for a microscope based on extreme ultraviolet (EUV) radiation. The present invention is directed to a reflective imaging system for an x-ray microscope for examining and object in an object plane, wherein the object is illuminated by rays of a wavelength of less than 100 nm, particularly less than 30 nm, and is imaged in a magnified manner in an image plane. In the imaging system, according to the invention, for a microscope based on extreme ultraviolet (EUV) radiation with wavelengths in the range of less than 100 nm, with a magnification of 0.1× to 1000× and a structural length of less than 5 m, at least one of the imaging optical elements 2 and 3 in the beam path has a diffractive-reflective structure which is arranged on a spherical or plane area and has a non-rotationally symmetric, asymmetric shape. The arrangement according to the invention provides an imaging system which avoids the disadvantages of the prior art and ensures a high imaging quality.

Abstract: A diffraction grating device operable as a reflection or transmission grating, and a method of manufacturing and using any number of such grating devices so that each device is individually electrically addressable to diffract radiation of different wavelengths. The grating device comprises first and second sets of interdigitated elements so that each element of the first set defines an element pair with an immediately adjacent element of the second set, a first gap is defined between the elements of each element pair, and a second gap is defined between each adjacent pair of element pairs. The elements of an element pair are selectively movable toward and away from each other. As such, the widths of the gaps can be selectively sized to diffract radiation of a desired wavelength.

Abstract: A true-time delay feeder for multiple aperture beam steering devices. The feeder comprises a plurality of tunable time delay modules. The tunable time delay modules provide different delays to different beamlets without changing the spectrum of each beamlet. The tunable true-time delay modules provide for temporal synchronization and spatial coherence of the beam front.

Abstract: An optical spectral filtering device and associated method for selectively directing a portion of a wavelength multiplexed input signal, entering through an optical fiber, into one or more output signals provided to one or more optical fibers and/or electronic outputs. The optical filtering is accomplished using free-space diffractive wavelength demultiplexing optics combined with a fixed (permanent) patterned structure located in the spectrally dispersed image plane. The structure can block or direct a selected spectral portion of the optical signal to one or more separate outputs, such as an optical fiber or power detector. A single active element in the optical path is used to spatially shift, or steer, the entire input spectrum at the dispersed spectral image plane, to control the portion of the input spectrum illuminating specific features on the permanent patterned structure.

Abstract: There is disclosed an optical device in which a first light source for outputting a first wavelength light is apart from a second light source for outputting a second wavelength light by a predetermined distance. An information recording medium is irradiated with the first and second wavelength lights transmitted through a holographic optical element having first and second diffraction areas. The first and second diffraction areas are provided with grating arrangements in which grating axis directions are parallel to each other and grating pitches are different from each other. The first and second wavelength lights reflected by the information recording medium are transmitted through the holographic optical element and diffracted by the first and second diffraction areas.

Abstract: An optical structure and devices based thereon for the compensation of chromatic dispersion in a multi-channel light signal are provided. The optical structure includes a waveguide and a Bragg grating provided therein. The Bragg grating has a plurality of grating components, each associated with one or a few of the channels to be compensated. The period of each grating component is selected to allow compensation of chromatic dispersion experienced by this particular channel or these particluar channels, thereby taking into account the wavelength-dependent dispersion slope of the light signal.

Abstract: Techniques for fabricating well-controlled, random relief, engineered surfaces that serve as substrates for EUV optical devices are accomplished with grayscale exposure. The method of fabricating a multilevel EUV optical element includes: (a) providing a substrate; (b) depositing a layer of curable material on a surface of the substrate; (c) creating a relief profile in a layer of cured material from the layer of curable material wherein the relief profile comprises multiple levels of cured material that has a defined contour; and (d) depositing a multilayer reflection film over the relief profile wherein the film has an outer contour that substantially matches that of the relief profile. The curable material can comprise photoresist or a low dielectric constant material.

Abstract: A wavelength monitoring device is provided having an optical reflecting element for reflecting an incoming optical signal to a detector, wherein the device features a narrowband optical reflecting element for reflecting only a narrowband portion of the incoming optical signal to the optical reflecting element. The narrowband optical reflecting element has a reflection function having a bandwidth and shape that determines the narrowband portion of the incoming optical signal. The narrowband optical reflecting element may be a Bragg grating for spectrally processing the incoming optical signal, while the optical reflecting element may be a blazed Bragg grating for reflecting the spectrally processing incoming optical signal to the detector. The detector determines an amount of optical power reflected by the Bragg grating and discriminates between reflections of individual gratings, and is a spatial filter for providing a direct correlation between individual detector elements and a specific wavelength range.

Abstract: In one aspect of the invention, an apparatus operable to provide optical signal processing includes an inner conductive layer including an at least substantially conductive material and a plurality of at least partially reflective mirror strips disposed outwardly from the inner conductive layer and operable to receive an input optical signal, wherein none of the plurality of strips has a width greater than 40 microns. At least some of the strips are operable to undergo a partial rotation in response to a control signal, the partial rotation resulting in a diffraction of the input optical signal wherein a majority of the diffracted input signal is communicated in one direction.