Abstract: The invention relates to an imaging system for optical automatic analysers, especially fluorescence readers. On the sample side, the imaging system contains a cylindrical lens array and a prism array, which is arranged upstream of the cylindrical lens array. The prismatic effect of the prisms of the prism array lies in the direction of the cylinder axes of the cylindrical lenses. Together with a telescopic imaging system, the inventive imaging system creates a number of parallel cylindrical focussing volumes between the cylindrical lens array and a detector array, these focussing volumes being slanted towards the optical axis of the telescopic system in relation to the vertical. The arrangement enables the detection of fluorescence with a large aperture in one direction, and at the same time enables depth selective analysis of the fluorescence signal, especially the discrimination of the fluorescent radiation originating from the solution above.

Abstract: The present invention provides a micro-lens substrate wherein a higher contrast ratio can be obtained when used in a liquid crystal panel and the like. A micro-lens substrate includes a first substrate with concaves for microlenses having a plurality of first concaves and first alignment marks formed on a first glass substrate, a second substrate with concaves for microlenses having a plurality of second concaves and second alignment marks formed on a second glass substrate, a resin layer, microlenses comprised of double convex lenses formed of a resin filled in between the first and second concaves, and spacers.

Abstract: Energy of a laser beam with which a non-single crystalline semiconductor film is irradiated to be annealed is uniformly distributed. The laser beam is obtained from a solid-state laser such as a YAG laser which can easily cause interference in an optical system based on the conventional method of simply dividing and combining laser beams, but which can be maintained easily at a low cost in comparison with excimer lasers. A solid-state laser can oscillate to form a laser beam by aligning planes of polarization. Two laser beams having polarization directions independent of each other are formed by using a &lgr;/2 plate, and a plurality of laser beams are further formed by a stepped quartz block to travel over different optical path lengths. These laser beams are combined into one on or in the vicinity or an irradiation plane by an optical system, thereby forming a uniform laser beam in which interference is effectively limited and the uniformity of energy distribution is high.

Abstract: A laser illuminating apparatus for irradiating a linear spatial light modulator comprises a bar laser having a plurality of linearly arranged emitters; a lens array having a plurality of lens units less in number than the emitters and arranged parallel to the direction of arrangement of the emitters, for causing a collimated laser beam incident on the lens units to converge at the final surface of the lens units at least on a plane including the direction of arrangement of the emitters and the optical axis; and optics for creating a superimposed far field pattern, in the direction of arrangement of the emitters, of the laser beams emitted from the bar laser onto the lens array, projecting the far field patterns divided by the lens array onto the illumination area in superimposition, and projecting near field patterns, in the direction perpendicular to the direction of arrangement of the emitters, of the laser beams emitted from the bar laser on the illumination area.

Abstract: A laser system for laser crystallization of semiconductor films. It comprises a laser source (8) for producing a laser beam having a first intensity profile (10) in one transverse direction, and a lens system (12) for modifying the first intensity profile, the lens system comprising a plurality of lens elements (20a, 20b, 40a, 40b, 64a, 64b, 66a, 66b) adapted to divide the beam into a plurality of beamlets across the first intensity profile, at least one of the beamlets outputted by the lens system being inverted relative to the others, such that a desired intensity profile (50) is generated at the output of the laser system.

Abstract: An appearance inspection apparatus for inspecting a surface of a printed circuit board requires high inspection accuracy and inspection time reduction. To this end, the apparatus has a scan head that scans an object under inspection and generates image data of the surface of the object. The scan head includes a vertical light source which projects light on the surface from right above the object and a side light source which projects light sidelong on the surface. A lenticular sheet is provided between the vertical light source and the object in order to adjust the vertical light and improve the inspection accuracy in a vertical light test. In a side light test, light sources other than the central part in the vertical light source is turned on and an auxiliary light is projected along with the side light, so that the dynamic range for the inspection can increase.

Abstract: A lens system which has a first optical boundary with a radius of curvature R, a second optical boundary located substantially a distance R from the first boundary, and a third optical boundary nearer to the second optical boundary than R. Secondly, a lens system providing optical field limitation using total internal reflection. Also, an array of lenses for reproduction, capture and display of three dimensional images discussed.

Abstract: An object of the present invention is to provide a display device which can realize a magnified image. A display device comprises a display panel having a predetermined effective display region PS, a display screen, and a magnifying optical system including a first inverting optical system constituted by a first lens array in which a plurality of first lenses corresponding to the display panel are arrayed and a second inverting optical system constituted by a second lens array in which a plurality of second lenses corresponding to the first lenses are arrayed. The magnifying optical system constitutes a plurality of channels for forming on the display screen a magnified erect image for a display image on the display panel through the corresponding first and second lenses. The magnifying optical system is constructed so as to form on the display screen an image of an image point on the display panel through at least three of the channels.

Abstract: A method of manufacturing a micro lens array comprising a step of forming a color pattern layer including a plurality of pixels in a predetermined arrangement on a light transmitting substrate, and a step of curving surfaces of the pixels in the color pattern layer corresponding to lens surfaces, wherein in the step of curving the surfaces of the pixels, the pixels are melted by heating to cause the surfaces of the pixels to be convexly curved by surface tension.

Abstract: A lens system which has a first optical boundary with a radius of curvature R, a second optical boundary located substantially a distance R from the first boundary, and a third optical boundary nearer to the second optical boundary than R. Secondly, a lens system providing optical field limitation using total internal reflection. Also, an array of lenses for reproduction, capture and display of three dimensional images discussed.

Abstract: An optical system for imaging an array of light sources includes an array of microlenses disposed to intercept light from respective light sources in the array of light sources to reduce the divergence angles of light emanating from the light sources, a first array of lenses (sometimes referred to as minilenses), a second array of lenses (minilenses), and an additional array of microlenses disposed to intercept and focus light from the second array of lenses. Each lens in the first array is sized to intercept light from a respective sub-plurality of the microlenses, and each lens in the second array intercepts and focuses light from a respective lens in the first array. The first and second arrays of minilenses are preferably configured to define a doubly-telecentric imaging system.

Abstract: A polarization converter, and a projection-type display device using the same, is disclosed having two or more comb polarization-separation prism arrays that are arranged, with regard to the alignment of alternating polarizing beam splitter films and reflection films on adjacent prism surfaces, in rows that are non-parallel to one another. Each comb polarization-separation prism array is formed by adjacent prisms arranged in a row such that each adjacent prism has, on one surface thereof, either a polarizing beam-splitter film or a reflection film, with these films being arranged alternately in said row. Preferable, the angle between the rows of the two or more comb polarization-separation prism arrays is substantially 90 degrees.

Abstract: There is disclosed a partially transparent, directional viewing sheet formed of plastic material with convex and concave lenses, preferably lenticular lenses, formed respectively on the front and back surfaces of the sheet, there being intervening spaces with flat or convex arcuate surfaces between the concave lenses which spaces are not transparent to images and may be imprinted with an image that is viewable through the sheet from some directions. Preferably the concave lens focal length is typically about one-half of the focal length of the convex lens. Elliptical cross-section of the lenses may minimize spherical aberration and sharpen the focus. The thickness of the sheet causes focal points of the lenses to substantially coincide.

Abstract: A beam homogenizer at least includes a first optical lens for dividing a light beam into N(n′−1) beams in a vertical direction, a second optical lens for dividing the light beam into (2n+1) beams in a horizontal direction, a third optical lens for recombining the beams that are divided in the vertical and horizontal directions into (n′−1) beams while superimposing the (n′−1) beams so that they are deviated from each other in the horizontal direction, and a fourth optical lens for recombining the beams that are divided in the vertical direction.

Abstract: The invention enables a sufficiently bright color image to be displayed without increasing a heating value with a simple and compact structure which is easily assembled and adjusted. A first microlens for condensing light and a second microlens for changing the travel direction of light are provided, every three pixel electrode parts in a liquid crystal panel. The travel directions of B and G rays condensed by the first microlens are changed by the second microlens, thereby allowing the principal rays to perpendicularly enter the pixel electrode part. The color ray passing through the second microlens focuses on the corresponding pixel electrode part. The first and second microlenses construct a relay optical system having the magnification of 1. Light reflected by the pixel electrode part is transformed by the same first microlens into a parallel ray bundle, and the ray bundle goes out from the liquid crystal panel.

Abstract: This invention relates to an optical system for reshaping and spatially homogenizing light beams with variable cross-section output, comprising six optical components, with three components associated to each of two orthogonal transverse directions, wherein the first component operates as a Divider component (D; DO, DV) and is formed by a number n of cylindrical lenses (D1, . . . ,Dn), where n is greater than 1, whose total dimension is not greater than the respective dimension of the light beam and whose center point lies upon the optical axis of the light beam, the second component operates as a Condenser component (C; CO, CV) and is formed by a cylindrical lens and the third component operates as a Zoom component (Z; ZO; ZV) and is formed by a cylindrical lens, and wherein, in the case the cylindrical lenses (D1, . . . Dn) have different size si(i=1, 2,. . . n), the ratio size/focal length si/fi must be constant for every i=1, 2, . . . n.

Abstract: There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform.

Abstract: A lenticular image product comprising: a lenticular material having an array of lenticules with cylindrical lenses; and a lenticular image associated with the lenticular material, the lenticular image having an original image having a wide angle view and at least one final image having a narrow angle view created from the original image, such that tilting of the lenticular image product produces a zoom effect between the original and final images.

Abstract: An illumination optical system includes a luminous body, and an illumination lens element through which light rays from said luminous body is diffused and emitted. The illumination lens element has peaks and troughs alternately provided on an incident surface or an exit surface thereof. A cross-sectional shape of the peaks and troughs is a curved surface defined by a periodic function which can be differentiated, or the peaks and troughs are formed by a plurality of straight lines approximating the curved surface.

Abstract: In a lens array, a multiplicity of condenser lenses, each in a convex lens form, are arrayed in vertical and horizontal directions so as to correspond to pixel regions, respectively, and each condenser lens, when viewed from a direction perpendicular to a condenser lens-arrayed plane, takes a planar shape formed with a four straight sides along four sides of the pixel region and four circular arcs extending between the respective straight sides. A center of the four circular arcs substantially coincides with a center of the corresponding pixel region. This ensures an increase in area covered with the condenser lens in the pixel region, thereby causing more light rays to enter the condenser lens. In addition, a radius of curvature necessary for collecting can be obtained more easily. Consequently, light rays can be efficiently collected and guided to light receiving sections or the like provided in the pixel regions.

Abstract: An optical device includes a plurality of lens plates spaced at specific intervals. At least one of the lens plates is provided with a lens array on at least one of its front and rear faces. The lens array is composed of a plurality of closely arranged lenses of a specific configuration. The lens array has at least one groove having a V-shaped cross-sectional configuration at a joint of adjacent lenses in at least one part of the lens array.

Abstract: A rod lens array has a construction in which a number of rod-shaped lens elements are arrayed in at least one row between two side plates, and the clearances are filled with resin to form a single integral unit. Two side plates are formed of glass plates, the surfaces of these two glass plates facing the lens elements are flat and smooth, the outer surfaces on the opposite sides are formed with reflection-preventing portions, the side surfaces of both of the glass plates on the beam-exit side are formed with beam-shielding zones from the outer edges inwardly along almost the whole length.

Abstract: A lens array unit includes first and second lens arrays cooperative with each other. The first lens array is provided with a plurality of first convex lenses and a first transparent holder formed integral with the first lenses. Each of the first lenses has first and second lens surfaces. The second lens array is provided with a plurality of second convex lenses and a second transparent holder formed integral with the second lenses Each of the second lenses has third and fourth lens surfaces. The second lens array is attached to the first lens array so that the third lens surfaces face the second lens surfaces. The lens array unit further includes a light shield mounted on the first lens array. The light shield is formed with a plurality of through-holes each facing the relevant one of the first lens surfaces.

Abstract: A lens array is provided with a plurality of lenses and a holder formed integral with the lenses. Each of the lenses includes a non-flat first lens surface and a flat second lens surface. The holder includes a first surface adjacent to the first lens surface and a second surface adjacent to the second lens surface. The second surface is formed with a plurality of recesses in each of which a light shielding layer is provided.

Abstract: An erect image magnifying lens device having a higher magnification is provided. The erect image magnifying lens device comprises a display element for displaying an image; a fresnel lens provided on the display element for refracting a light emitted by the display element to a direction to magnify the image; an erect image magnifying lens consisted of stacked two micro-lens arrays and positioned in opposition to the fresnel lens; and an image plane positioned in opposition to the errect image magnifying lens, on which the image from the display element is formed.

Abstract: The present invention relates to an optical writing device and an image forming apparatus and method in which the optical writing device is provided. In the optical writing device of the invention, a light source array has an array of light sources emitting a plurality of light beams. A focusing lens array has a row of focusing lens elements focusing the light beams from the light source array onto a surface of a photosensitive medium, the focusing lens elements being arrayed in an array direction, each focusing lens element having a visual field radius X in the array direction and a diameter D in the array direction. The focusing lens array is configured to satisfy the condition: m>2.0 where m is an overlap ratio of each of the focusing lens elements defined by the equation m=X/D.

Abstract: An apparatus, method and system are provided for scanning documents, and creating holographic and panoramic images. The apparatus provides two sets of prisms, one set of which is made of electro-optical material. The prisms are arranged in alternating rows to form a sheet. The prism sheet can be laid fiat or rolled into a cylinder. A sequencer is used to activate individual electro-optical prisms so that the image is reflected into the sheet. A second prism is used to reflect the image into an image receptor such as a camera. By sequentially activating the electro-optical prisms, successive image portions of an object or objects can be presented to the image receptor. If the image receptor accepts digital input, the sequential images can be post-processed in a microprocessor to create a holographic or panoramic image. Similarly, images of documents can also be scanned and the images received can be digitized for processing, storage and/or transmission.

Abstract: A high performance optical imaging system can be provided by minimizing the overlapping degree m, increasing the quantity of light of the rod lens array and improving the resolving power while taking into account the irregularity of the quantity of light when a dislocation between a sensor and an optical axis of an entire rod lens array occurs. In the optical imaging system, a plurality of rod lenses with a refractive index distribution in the radial direction are arranged in two rows in a rod lens array with their optical axes in parallel to each other. This optical imaging system focuses light from a manuscript plane onto an image plane, the planes being arranged on the two sides of the rod lens array. The overlapping degree m defined as the following equation (Eq. 10) is in a range of 0.91≦m≦1.

Abstract: There is provided an improvement on homogeneity of annealing performed utilizing radiation of a laser beam on a silicon film having a large area. In a configuration wherein a linear laser beam is applied to a surface to be irradiated, optimization is carried out on the width and number of cylindrical lenses forming homogenizers 103 and 104 for controlling the distribution of radiation energy density in the longitudinal direction of the linear beam. For example, the width of the cylindrical lenses forming the homogenizers 103 and 104 is set in the range from 0.1 mm to 5 mm, and the number of the lenses is chosen such that one lens is provided for every 5 mm-15 mm along the length of the linear laser beam in the longitudinal direction thereof. This makes it possible to improve homogeneity of the radiation energy density of the linear laser in the longitudinal direction thereof.

Abstract: The present invention discloses the structure of the array lens that at least any one of the diagonal size, vertical size and lateral size of lens cell is set to almost 1/(4.5 or more) for each corresponding size of the display elements, the structure that the diagonal size of lens cell is set to almost 0.18 inch or less, the structure that the total number of lens cells is set to almost 240 or more and the structure that the lens focal distance of lens cell is set to almost 30 mm or less.

Abstract: In a method for forming a planar microlens according to the present invention, a wet etching is conducted to a glass substrate for a stamper while it is covered with a mask. After the etching is conducted and the mask is removed a wet etching is conducted again to the glass substrate to form densely arranged concave portions thereon, and thereby a stamper is obtained. An uncured resin is applied on the forming surface of the stamper, a glass substrate for a planar microlens array (MLA) is pressed thereto, and thereby the uncured resin is formed. The uncured resin is cured by applying an ultraviolet irradiation thereto and the stamper is released therefrom. The resin layer is removed by a reactive ion etching and whereupon the substrate is etched in a form corresponding to the form of the resin layer, and whereby an all-glass microlens of high precision is obtained.

Abstract: A cylindrical lenticular image is made possible by the interlacing of multiple views of an object. The interlaced views are then printed on a substrate and the substrate formed into a cylinder. A lenticular lens is then properly aligned with the substrate. The result is a three dimensional image that can be rotated to reveal a full three-hundred and sixty degree perspective of the imaged object.

Abstract: In a light irradiating apparatus, a first fly-eye lens and a second fly-eye lens are disposed in succession from a light source side. A first lens having negative refractive power is disposed more adjacent to the light source side than the first fly-eye lens. A second lens having positive refractive power is disposed more adjacent to the light source side than the second fly-eye lens. The specification also discloses an image projecting apparatus for illuminating an image display element by the light emerging from the light irradiating apparatus, and projecting an image displayed on the image display element.

Abstract: An illuminating system for the vacuum ultraviolet (VUV) microlithography (at 157 nm) is disclosed and has a VUV light source (1), refractive optical elements of fluoride, at least one microlens array (3, 5) functioning as an element for increasing the light conductance value, and at least one honeycomb condenser (7a, 7b). The honeycomb condenser is preferably configured of crossed cylinder lens arrays.

Abstract: The present invention discloses the structure of the array lens that at least any one of the diagonal size, vertical size and lateral size of lens cell is set to almost 1/(4.5 or more) for each corresponding size of the display elements, the structure that the diagonal size of lens cell is set to almost 0.18 inch or less, the structure that the total number of lens cells is set to almost 240 or more and the structure that the lens focal distance of lens cell is set to almost 30 mm or less.

Abstract: An optical beam shaping system has optical elements arranged in a radiation bundle in part designed as lens arrays each having each several lenses for sensing partial radial bundles, their lens surface (3) being shaped into an optically active interface (2, 2′) of a monolithic optical element (1). In order to provide a beam shaping system which can more effectively influence the beam parameters than the known prior art beam shaping systems and which has a more simple design, the interface (2, 2′) has a curved basic shape.

Abstract: There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform. In a multi-cylindrical lens (a glass substrate having a multiplicity of cylindrical lenses formed thereon) used in a homogenizer, convex cylindrical lenses and concave cylindrical lenses are arranged alternately, and the boundaries between the cylindrical lenses have a smooth structure. This makes it possible to reduce scattering of beams that has occurred at the boundaries between the cylindrical lenses.

Abstract: An upper portion and lower portion of a first lens array may be relatively offset from each other in an x direction. A second lens array is also offset correspondingly to the first lens array. Since an angle at which a partial light beam transmitted through the upper portions of the first and second lens arrays illuminates an area of illumination is different from an angle at which a partial light beam transmitted through the lower portions of the first and second lens arrays illuminates the area of illumination, dark lines generated by these partial light beams appear in different positions on a screen. With this arrangement, the dark lines resulting from the center line of a cross-dichroic prism are made less visible.

Abstract: The present invention discloses the structure of the array lens that at least any one of the diagonal size, vertical size and lateral size of lens cell is set to almost 1/(4.5 or more) for each corresponding size of the display elements. The diagonal size of lens cell is set to almost 0.18 inch or less. The total number of lens cells is set to almost 240 or more. Finally, the lens focal distance of lens cell is set to almost 30 mm or less.

Abstract: A plurality of first cylindrical lenses aligned in an array, having a collecting function with respect to an alignment direction parallel to the array, to collect luminous flux from a body to be imaged. A first reflective collector-surface having a reflective collecting function with respect to a perpendicular direction perpendicular to the alignment direction collects the luminous flux from the plurality of first cylindrical lenses, and provides a collected parallel luminous flux to a plurality of roof-mirror type reflective plane-pairs or to a plurality of right-angle prisms. The plurality of roof-mirror type reflective plane-pairs or right-angle prisms reflects the luminous flux toward a second reflective collector-surface disposed for convergence of the luminous flux with respect to the perpendicular direction.

Abstract: Modular display system having LED pixels and lenses aligned to the LED's to increase intensity, increase view angle and increase overall viewability. Louvers align along the LED's and lenses to shade the LED's and lenses from ambient light to increase viewability. Modular display panels which contain the LED's, lenses, louvers and other associated components are accessible from the front and back for changeover or repair.

Abstract: There is provided an improvement on homogeneity of annealing performed utilizing radiation of a laser beam on a silicon film having a large area. In a configuration wherein a linear laser beam is applied to a surface to be irradiated, optimization is carried out on the width and number of cylindrical lenses forming homogenizers 103 and 104 for controlling the distribution of radiation energy density in the longitudinal direction of the linear beam. For example, the width of the cylindrical lenses forming the homogenizers 103 and 104 is set in the range from 0.1 mm to 5 mm, and the number of the lenses is chosen such that one lens is provided for every 5 mm-15 mm along the length of the linear laser beam in the longitudinal direction thereof. This makes it possible to improve homogeneity of the radiation energy density of the linear laser in the longitudinal direction thereof.

Abstract: To correct on-axis chromatic aberration of a projection lens easily and at low cost by using a transparent plate between an optical modulator for a primary color component and a beam combining optical system. When a standard projection lens 11 having a medium focal length is used, parallel-plane glass plates 27, 28, and 29 of the same thickness (1 mm for example) may be inserted in each component beam. However, when the projection lens is changed to one having a different focal length, at least one of the parallel-plane glass plates is replaced in order to suppress the occurrence of on-axis chromatic aberration for that color component caused by the change in focal length.

Abstract: An image relay arrangement (20) for use with a curved CRT faceplate (11) to relay a picture to a position in front of the faceplate comprises a first, imaging, microlens array (22), a second, field, microlens array (23) and a third, re-imaging, microlens array (24) which are spaced from one another and have corresponding microlens elements (25, 26, 27). At least one of the first and third arrays is curved with its spacing from the adjacent array varying over its area related to the faceplate curvature. Through this arrangement, the picture at the curved faceplate can be imaged onto a plane where, for example, a lenticular screen is located enabling autostereoscopic displays to be produced.

Abstract: A stacked array magnifier (SAM) forms a magnified, demagnified or unit image of an object. The SAM includes one or more non-refractive lenslet arrays and one or more refractive lenslet arrays to form a plurality of lenslet channels. Each lenslet channel has at least one refractive lenslet and at least one non-refractive lenslet. SAMs are combined and tiled to form a scaleable display of flat panel displays. Multiple SAMs are used to increase magnification selectively. Hybrid lenslet arrays of the invention are also useable for optical processing and non-imaging applications.

Abstract: A micro-optical beam deflection system, operable to be moved between discrete states with a pair of micro-optical lens grids arranged behind each other in the path of rays, and which can be mutually displaced transverse to the direction of beams, in which the lens grids are arranged substantially in the image plane of an intermediate image.

Abstract: An apparatus, method and system are provided for scanning documents, and creating holographic and panoramic images. The apparatus provides two sets of prisms, one set of which is made of electro-optical material. The prisms are arranged in alternating rows to form a sheet. The prism sheet can be laid flat or rolled into a cylinder. A sequencer is used to activate individual electro-optical prisms so that the image is reflected into the sheet. A second prism is used to reflect the image into an image receptor such as a camera. By sequentially activating the electro-optical prisms, successive image portions of an object or objects can be presented to the image receptor. If the image receptor accepts digital input, the sequential images can be post-processed in a microprocessor to create a holographic or panoramic image. Similarly, images of documents can also be scanned and the images received can be digitized for processing, storage and/or transmission.

Abstract: A lenticular polarization converter for polarizing a beam of unpolarized light is described. The polarization converter includes an input lenslet array, a polarizing stack, and an output lenslet array, all arranged sequentially and optically aligned. The input lenslet array has two major surfaces, the first of which has an array of curved surfaces to focus light and the second of which has alternating transmissive and reflective regions. The beam of light is focused by the input lenslets through the transmissive regions onto the polarizing stack. The polarizing stack transmits a first polarization component and reflects a second polarization component towards the reflective regions. The second polarization component is circularly polarized by the polarizing stack and is reflected by the reflective surfaces. The circularly polarized component passes again through the polarizing stack and is linearly polarized, allowing the component to pass through the polarizer.

Abstract: An upper portion and lower portion of a first lens array may be relatively offset from each other in an x direction. A second lens array is also offset correspondingly to the first lens array. Since an angle at which a partial light beam transmitted through the upper portions of the first and second lens arrays illuminates an area of illumination is different from an angle at which a partial light beam transmitted through the lower portions of the first and second lens arrays illuminates the area of illumination, dark lines generated by these partial light beams appear in different positions on a screen. With this arrangement, the dark lines resulting from the center line of a cross-dichroic prism are made less visible.

Abstract: A projection exposure apparatus including an irradiation optical system including a light source and irradiating a mask with irradiation light beams, a projection optical system for projecting an image of a pattern of the mask on a substrate, a plurality of first fly-eye type optical integrators each having an emission side focal plane disposed on a Fourier transformed surface with respect to the pattern of the mask in the irradiation optical system or on a plane adjacent to the same and having a center located at a plurality of positions which are eccentric from the optical axis of the irradiation optical system, a plurality of second fly-eye type optical integrators each having an emission side focal plane disposed on a Fourier transformed plane with respect to the incidental end of each of a plurality of the first fly-eye type optical integrators or on a plane adjacent to the same and being disposed to correspond to a plurality of the first fly-eye type optical integrators, and a light divider for dividing