Abstract: An all-reflective optical system includes a primary mirror of ellipsoidal configuration, a secondary mirror of hyperboloidal configuration facing the primary mirror, and an eye-piece that includes: a positive-powered tertiary mirror having a majority of positive power that is expected in the eye-piece and configured to substantially collimate light rays incident thereon; and a negative-powered near-flat quaternary mirror having lesser power than the tertiary mirror and configured to receive the substantially collimated light rays from the tertiary mirror, further collimate the received light rays and reflect the further collimated light rays to an exit pupil. The primary mirror, the secondary mirror and the eye-piece thereby form an afocal optical system.

Abstract: A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to a slow can mirror. The fold mirror may be formed on an output optic or may be formed on a common substrate with the slow scan mirror.

Abstract: An imaging optical system has a plurality of mirrors, which via a beam path for imaging light, image an object field in an object plane into an image field in an image plane. The imaging optical system has an exit pupil obscuration. At least one of the mirrors has no opening for passage of the imaging light. The fourth to last mirror in the beam path is concave, resulting in an imaging optical system having improved imaging properties without compromise in throughput.

Abstract: An optical beam homogenizer having an adjustable homogenizer chamber for selectively producing different sized homogenized output beams and related methods in accordance with one or more embodiments is described herein.

Abstract: Optical system for a telescope having independent optical arms adapted to collect light rays over a first cross sectional area and compress it into a second cross sectional area less than the first cross sectional area. Orthogonal mirror pairs of parabolic trough mirrors compress light in first one dimension and then the other dimension and feed the light into a focusing smaller telescope structure. The gathered light is kept parallel and its wavefront is kept in phase, allowing the telescope to have the diffraction limit of the collective aperture. The optical arms are independently adjustable to point the system toward different objects of interest and track them.

Abstract: The disclosure discloses a fabry-Perot (F-P) cavity, which is a folded confocal cavity integrally formed by a monolithic optical element, the folded confocal cavity having three reflection surfaces, wherein a first reflection surface is a plane and at the same time serves as an input/output coupling surface, a second reflection surface is a plane, and a third surface is a spherical surface, curvature radius of which is equal to half of a round trip geometric length of light in the folded confocal cavity. The invention further discloses a laser based on the F-P cavity. The solution of the disclosure solves the problems in existing folded F-P cavity, such as unsatisfactory stability, sensitive to outside inferences, bulky and complicated construction.

Abstract: Imaging systems in which an undedicated optical component—i.e., a component that would be present in the system even in the absence of image stabilization—is configured to undergo corrective motion and/or other correction of image data, and thus to function as a stabilization component. The stabilization component may be a mirror and/or a lens, and a positioner may be provided to tilt, rotate, and/or otherwise precisely adjust the position and orientation of the stabilization component to improve image resolution, compensate for platform motions such as platform vibration, and/or improve image tracking. Because an undedicated optical component functions as the stabilization component, the stabilization occurs upstream, rather than downstream, from separation (if any) of the incoming image data into two or more beams.

Abstract: Reflectors having concave reflecting surfaces (e.g., parabolic reflectors) and electronically controlled beam steering elements are used for rapid, low-diversion, wide angle, and precision steering of optical beams, including laser beams.

Abstract: A probe comprises an external casing, an optical illumination circuit, and an optical reception circuit, at least one of which has a first concave primary mirror, a first convex secondary mirror configured for receiving a spectrum from and sending the spectrum to said first concave primary mirror, and an active optical mirror element set in series with said first concave primary mirror and said first convex secondary mirror and having a curvature such as to differentiate the optical arms of the conjugate points, a first conjugate point being inside the external casing and a second conjugate point being outside the external casing.

Abstract: An optical transfer device comprises at least three mirrors, two of which co-operating with one another for modifying the wave front of an electromagnetic radiation, wherein at least two of said mirrors are made monolithically on a single support.

Abstract: The image displaying apparatus includes an image production apparatus, a first light conduction section and a second light conduction section. The first light conduction section includes a first light conduction plate which propagates part of incident light thereto by total reflection in the inside thereof and emits the propagated light, and a reflection type volume hologram diffraction grating disposed on the first light conduction plate. The second light conduction section includes a second light conduction plate, a first deflection section and a second deflection section.

Abstract: Imaging systems in which an undedicated optical component—i.e., a component that would be present in the system even in the absence of image stabilization—is configured to undergo corrective motion and/or other correction of image data, and thus to function as a stabilization component. The stabilization component may be a mirror and/or a lens, and a positioner may be provided to tilt, rotate, and/or otherwise precisely adjust the position and orientation of the stabilization component to improve image resolution, compensate for platform motions, and/or improve image tracking. Because an undedicated optical component functions as the stabilization component, the stabilization occurs upstream, rather than downstream, from separation (if any) of the incoming image data into two or more beams.

Abstract: An image display apparatus 100 that displays an image using a light modulated according to an image signal includes a projection optical system 90 that includes a projection lens 20, a first mirror 30 that reflects a light from the projection lens 20, and a second mirror 40 that widens an angle of a light from the first mirror 30 by reflecting the light, and projects the light modulated according to the image signal from an optical engine unit 10; a third mirror 50 that reflects a light from the projection optical system 90; and a screen 50 that transmits a light from the third mirror 50. The projection lens 20 and the second mirror 40 are arranged in such a manner that an optical axis of the projection lens 20 substantially matches an optical axis of the second mirror 40, and shift the light from the optical engine unit 10 to a specific side from the optical axis of the projection lens 20.

Abstract: An imaging optical system includes three reflecting mirrors having first to third reflection surfaces and is configured, such that in an XYZ orthogonal coordinate system using an optical axis at the center of the field of view as Z-axis, the optical axis at the center of the field of view and an optical axis of an image plane are in parallel to each other by changing orientation of the optical axis in a YZ section while maintaining the orientation of the optical axis in an XZ section. At least one of the three reflection surfaces is rotationally asymmetric. Assuming that along the path of the beam traveling along the optical axis at the center of the field of view a distance between the second reflection surface and the third reflection surface is L2, a distance between the third reflection surface and the image plane is L3 and fy1 and an equivalent F-number of the imaging optical system is represented as Fno, the relational expression 0.5<Fno(L2/L3)<1.3 is satisfied.

Abstract: An imaging optical system has a plurality of mirrors. These image an object field in an object plane into an image field in an image plane. In the imaging optical system, the ratio of a maximum angle of incidence of imaging light) on reflection surfaces of the mirrors and an image-side numerical aperture of the imaging optical system is less than 33.8°. This can result in an imaging optical system which offers good conditions for a reflective coating of the mirror, with which a low reflection loss can be achieved for imaging light when passing through the imaging optical system, in particular even at wavelengths in the EUV range of less than 10 nm.

Abstract: An image reading apparatus includes an integral scanning optical unit in which a light source device for illuminating an original placed on an original table, a plurality of mirrors for reflecting a light beam from the original and an imaging optical system for imaging the light beam reflected by the mirrors, upon a reading device, are integrally accommodated, wherein at least one mirror is so configured that the light beam is incident thereon twice or more, wherein, in a sub-scan section, reflection surfaces of the mirrors are disposed in a space at an original-reading-position side of a light entrance surface of the imaging optical system, and wherein the reflection surface of a mirror disposed at a position optically closest to the light entrance surface of the imaging optical system is placed at a position furthermost from the original table with respect to a direction of a normal thereto, as compared with the reflection surfaces of the remaining mirrors.

Abstract: Provided is a compact and bright imaging optical system having a high resolution. The imaging optical system includes three reflectors composed of a first reflector (1), a second reflector (2), and a third reflector (3) that are arranged in this order on an optical path of incident ray so as not to block the incident light. In the imaging optical system, in which light beams reflected by the three reflectors form an image plane (4), a convex mirror is used for any one of the first reflector (1) and the third reflector (3) and a concave mirror is used for the other thereof, and vertexes of a triangular dipyramid (6) are defined in terms of a central chief ray (5) by an appropriate point on the central chief ray (5) that is incident to the first reflection surface, a reflection point of each central chief ray on the first to third reflection surfaces, and an image forming point of the central chief ray.

Abstract: An all-reflecting, non-relayed optical system having an aperture stop and an optical axis and configured to provide images of objects. The system includes a positive power primary mirror configured to receive radiation from the objects, a negative power secondary mirror configured to receive the radiation reflected from the primary mirror and a positive power tertiary mirror configured to receive the radiation reflected from the secondary mirror. The system further includes a focal plane configured to receive the radiation reflected from the tertiary mirror and to form an image of the objects. The aperture stop of the optical system is located between the tertiary mirror and the image plane. Accordingly, the image plane may be cold shielded to prevent or reduce radiation reflected from the optical elements that interferes with the desired image.

Abstract: An exemplary directional light homogenizer includes a one-piece, hollow hexagonal cross-section tube. The tube has an internal highly light reflective surface. The tube defines a first end configured to receive a non-homogenous light from a light source and a second end configured to output homogenized light. At least one curved section is disposed between the first end and the second end, and the curved section has a curvature greater than zero degrees and less than one hundred eighty degrees. An output section of the tube is straight, has a finite length, and terminates at the second end.

Abstract: In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

Abstract: A multiple field of view reflective telescope is described herein which has a laser and associated components inserted therein. In addition, a method is described herein for using the multiple field of view reflective telescope to range an object (e.g., target) or to designate-highlight an object (e.g., target).

Abstract: A beam-steering apparatus comprises a set of planar tiltable mirrors positioned to define a light beam path therebetween. The set of planar tiltable mirrors comprises from three to five planar tiltable mirrors. Each of the planar tiltable mirrors has a center of rotation lying in a plane of the mirror and each of the planar tiltable mirrors is tiltable about one axis of rotation or two orthogonal axes of rotation that lie in the plane of the mirror. The total number of axes of rotation about which the planar tiltable mirrors of the set of planar tiltable mirrors can tilt is at least five. A mirror drive system tilts each respective planar mirror about its respective axis of rotation or axes of rotation. With this apparatus, an input or output light beam path is steerable over two angular, one rotational, and two lateral-position degrees of freedom.

Abstract: An optical beam homogenizer having an adjustable homogenizer chamber for selectively producing different sized homogenized output beams and related methods in accordance with one or more embodiments is described herein.

Abstract: There is provided a multi-mirror-system for an illumination system, especially for lithography with wavelengths ?193 nm. The system includes light rays traveling along a light oath from an object plane to an image plane, and an arc-shaped field in the image plane, whereby a radial direction in the middle of the arc-shaped field defines a scanning direction. The first mirror and the second mirror are arranged in the light path in such a position and having such a shape, that the edge sharpness of the arc-shaped field in the image plane is smaller than 5 mm in the scanning direction. Furthermore, the light rays are impinging on the first mirror and the second mirror with incidence angles ?30° or ?60° relative to a surface normal of the first and second mirror.

Abstract: This invention provides a system and a method of the optical delay line, wherein the system comprises a source and an array of mirrors, wherein the array of mirrors comprises a first reflective mirror, a second reflective mirror, a third reflective mirror, and a fourth reflective mirror. Beams from the source could be delayed because the beams are multi-reflected by the reflective mirrors.

Abstract: A projection system includes a modulator and an Offner relay. The modulator is to modulate light in accordance with sub-frames of a frame of image data. The Offner relay is to differently aim, in accordance with each sub-frame, the light as modulated.

Abstract: A beam-steering apparatus comprises a set of planar tiltable mirrors positioned to define a light beam path therebetween. The set of planar tiltable mirrors comprises from three to five planar tiltable mirrors. Each of the planar tiltable mirrors has a center of rotation lying in a plane of the mirror and each of the planar tiltable mirrors is tiltable about one axis of rotation or two orthogonal axes of rotation that lie in the plane of the mirror. The total number of axes of rotation about which the planar tiltable mirrors of the set of planar tiltable mirrors can tilt is at least five. A mirror drive system tilts each respective planar mirror about its respective axis of rotation or axes of rotation. With this apparatus, an input or output light beam path is steerable over two angular, one rotational, and two lateral-position degrees of freedom.

Abstract: The present invention provides a reflector having a light-diffusing property which suppresses inter-object reflection over a wide angle, and giving particularly high reflectance in an intended range of viewing angle; and to provide a reflection type liquid crystal display device using the same. The reflector includes a plurality of light-reflective concave portions. Each of the concave portions is formed so that an inclination angle (an angle between a plane tangential to a point on a concave surface and the surface of the base material) is maximum on a side portion of the curved surface, and so that the direction of the side portion having the maximum inclination angle is on a far side from a view point of an observer.

Abstract: A non-contact connector (10), having a rotation-side light-emitting element (13) and a rotation-side light-receiving element (14), positioned on a rotating body (1) which rotates about a rotation axis (4), a fixed-side light-emitting element (23) and a fixed-side light-receiving element (24), positioned on a fixed body (2), and a first partial ellipsoidal reflecting mirror (8) installed on the fixed body (2) and a second partial ellipsoidal reflecting mirror (6) installed on rotating body (1), [each] with one focal point positioned on the rotation axis (4).

Abstract: A dispersion compensator which is compact, low loss, low cost, and highly stable, and yet capable of varying the dispersion compensation amount without changing the output position of an output beam. The dispersion compensator includes: a first and a second planar mirrors disposed parallel to each other, wherein at least either one of the mirrors has group velocity dispersion whose value varies according to the incident angle of light incident on the mirror; a mirror holding means rotatably holding the first and second mirrors in a direction in which the incident angle of light incident on the first mirror is changed while maintaining the parallel state of the mirrors; and a third mirror disposed so as not to be rotated with the first and second mirrors and reflects light reflected sequentially by the first mirror and the second mirror.

Abstract: Optical relays having three or more reflector portions to allow efficient grazing angle reflections with a relatively high acceptance of light are described. Light collected by the relay can be delivered to a selected location for various applications, including semiconductor lithography. In some embodiments, the grazing angles are selected to utilize the high reflectivity of extreme ultraviolet light at low grazing angles. The three or more reflectors can be arranged with respect to a light source to provide such grazing angle reflections and high acceptance. Some collectors can have more than one shell to increase the acceptance. In some embodiments, some of the reflectors can be configured to shape the delivered light.

Abstract: This invention provides a system and a method of the optical delay line, wherein the system comprises a source and an array of mirrors, wherein the array of mirrors comprises a first reflective mirror, a second reflective mirror, a third reflective mirror, and a fourth reflective mirror. Beams from the source could be delayed because the beams are multi-reflected by the reflective mirrors.

Abstract: A mirror system for a vehicle having driver's side viewing device located in a mirror housing mounted on the vehicle wherein a first section of the mirror housing contains a viewing surface in the interior of the vehicle and a second portion of the mirror housing is optically open to the outside of the vehicle; said first section of the mirror housing adapted to contain one or more substantially right angle triangular prisms having two sides of substantially equal length and two vertices of substantially equal angles; said prism mounted in the first section of the mirror housing so that one of the two sides of equal length of said prism is positioned in an opening facing the interior of the vehicle to provide a viewing surface; the second one of the sides of equal length is facing to the exterior of the vehicle; said second section of the mirror housing sized and shaped to contain operative optical elements comprising one or more reflective means mounted in the second section of the mirror housing at an angle

Abstract: An optical system has a plurality of elements arranged to image radiation at a wavelength ? from an object surface to an image surface, the elements include mirror elements having a reflective surface positioned at a path of radiation. At least one of the mirror elements is a pupil mirror having a pupil mirror surface arranged at or near to a pupil surface of the optical system. At least one of the remaining mirror elements is a highly loaded mirror having a mirror surface arranged at a position where at least one of a largest value of a range of angles of incidence and a largest value of an average angle incidence of all remaining mirrors occurs, where the remaining mirrors include all mirrors except for the pupil mirror.

Abstract: Obtained are an imaging optical system having a simple structure in which imaging position deviation due to deformation caused by a weight of an off-axial optical element is reduced and an image reading apparatus using the same. According to an imaging optical system for image reading, image information on an original surface is imaged on a sensor, and is read by the sensor. The imaging optical system includes reflection-type off-axial optical elements, each of which has an outer shape whose lengths in directions orthogonal to each other are different from each other and whose thickness is smaller than a length of the outer shape in a short-direction thereof and is made of a resin material. The plurality of off-axial optical elements are disposed such that mirror surfaces thereof are opposed to each other and constructed to satisfy a conditional expression.

Abstract: In general, in one aspect, the invention features a catadioptric projection objective having a plurality of optical elements arranged along an optical axis to image a pattern arranged in an object surface of the projection objective onto an image surface of the projection objective. The optical elements include a concave mirror; a first deflecting mirror tilted relative to the optical axis by a first tilt angle t1 about a first tilt axis to deflect light from the object surface towards the concave mirror or to deflect light from the concave mirror towards the image surface; and a second deflecting mirror tilted relative to the optical axis by a second tilt angle t2 about a second tilt axis. The first deflecting mirror has a first reflective coating with reflectivity Rs1(?1) for s-polarized light and a reflectivity Rp1(?1) for p-polarized light incident on the first deflecting mirror at first angles of incidence ?1 from a first range of angles of incidence according to (t1???1)??1?(t1+??1).

Abstract: A device for reshaping a laser beam may include a first optical element to receive the laser beam. The device may also include a second optical element to invert and reshape the laser beam to substantially correspond to a aperture of a beam director.

Abstract: A scanning module includes a body, a reflecting unit, and an image capture unit. The body includes a reflecting chamber disposed in a surrounding wall. The surrounding wall is formed with an incident hole allowing an incident light field to be transmitted into the reflecting chamber therethrough along an incident axis. The reflecting unit is disposed within the reflecting chamber, and includes a first reflector for reflecting the incident light field, as well as second and third reflectors for reflecting light transmitted from the first reflector to the image capture unit. An angle formed between the incident axis and a normal line of the first reflector is not smaller than 30 degrees. The image capture unit is disposed nearer to the incident hole than the first reflector along a direction of the incident axis, and includes a lens, and a sensing member.

Abstract: A projection display apparatus includes an image forming element, and an imaging optical system made up of a plurality of reflectors for projecting an image formed by the image forming element to provide an enlarged version of the image, wherein at least one of the reflectors which make up the imaging optical system is movable for adjusting the focus, and the movable reflector is movable along a straight line non-parallel with the normal line of the image forming element.

Abstract: A projection optical system is provided for projecting a pattern on an object plane onto an image plane in a reduced size. The projection optical system has six reflective surfaces that include, in order of reflecting light from the object plane, a first reflective surface, a second convex reflective surface, a third convex reflective surface, a fourth reflective surface, a fifth reflective surface and a sixth reflective surface. An aperture stop is provided along an optical path between the first and second reflective surfaces. The following condition is met by the system, where L1 is an interval between the object plane and the surface apex that is the closest to the object plane, and L2 is an interval between the surface apex of the first reflective surface and the surface apex that is the closest to the object plane: 0.75 < L ? ? 1 L ? ? 2 < 1.25 .

Abstract: A method for beam guiding of a light beam generated by a light source to a target location along a path distance LS, comprises splitting the light beam on the path distance LS at least once into a first partial beam and a second partial beam, guiding the first partial beam additionally at least once along a delay line, the first partial beam thereby covering an additional path distance LD, guiding the second partial beam only along the path distance LS, combining the first and second partial beams after the first partial beam having passed through the delay line and guiding the combined beam to the target location, wherein the light beam is guided along the path distance LS and LD in such a way that the light beam generated by the light source has a predetermined beam width B at the target location, expanding the light beam between the light source and the target location at least once to a beam width B?>B and comprising the light beam again at least once in such a way that the light beam has the predeterm

Abstract: A digital control for light beams. A position of an output light beam is changed based on a digital input control formed of a plurality of bits. The device may use movable mirrors to change the position of the output light beams.

Abstract: Obtained are an imaging optical system having a simple structure in which imaging position deviation due to deformation caused by a weight of an off-axial optical element is reduced and an image reading apparatus using the same. According to an imaging optical system for image reading, image information on an original surface is imaged on a sensor, and is read by the sensor. The imaging optical system includes reflection-type off-axial optical elements, each of which has an outer shape whose lengths in directions orthogonal to each other are different from each other and whose thickness is smaller than a length of the outer shape in a short-direction thereof and is made of a resin material. The plurality of off-axial optical elements are disposed such that mirror surfaces thereof are opposed to each other and constructed to satisfy a conditional expression.

Abstract: A photolithographic reduction projection catadioptric objective includes a first optical group G1 including an even number of at least four mirrors M1–M6; and a second at least substantially dioptric optical group G2 imageward than the first optical group G1 including a number of lenses E4–E13. The first optical group G1 provides compensative axial aberrative correction for the second optical group G2 which forms an image with a numerical aperture of at least substantially 0.65, and preferably at least 0.70 or 0.75. Six mirror examples are shown.

Abstract: A catoptric reduction projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such that said mirrors basically form a coaxial system, wherein a third mirror in said six mirrors is located at a pupil position of said optical system.

Abstract: According to one aspect of the present invention, an apparatus for optically combining light beams is disclosed. The apparatus includes a set of prism shaped doorways configured to receive output beams from at least one optical device. Each of the plurality of doorways has a common refractive index. The apparatus also includes a set of spherical mirrors disposed substantially parallel to the plurality of doorways. Each mirror is associated with one of the plurality of doorways. The apparatus further includes a boundary layer disposed between the set of doorways and the set of mirrors. The boundary layer has a refractive index greater than the common refractive index of the plurality of doorways. The common refractive index of the set of doorways and the refractive index of the boundary layer are configured to change the angle of each of the received output beams to combine the set of received output beams into a single output beam.

Abstract: A compact light-beam homogenizer is realized by multiple reflections within internally-reflecting optical channels which are arranged in a folded configuration. The optical channels may be hollow with mirrored walls, or made of a solid transparent optical material. Light enters through an apertured mirror whose internally reflective surface sends back-reflected rays forward for recycling. Multiple entry ports may be provided for combining several beams or for reducing the intensity in the channels. The homogenizer may be used in reverse as a beam divider. Different shapes of the optical channels are provided for obtaining an effective emission surface of different shapes. Due to reflections from surfaces that are parallel to the optical axis, the numerical aperture of the input beams is preserved.

Abstract: A concave mirror optical system for a scanner and a method for compensating image distortion. In this invention, the more expensive lens assembly in a conventional optical system is replaced by a concave mirror made from simple low-cost material so that production cost and chromatic dispersion are reduced. Moreover, different magnifications can be obtained due to a difference in focusing power of the concave mirror along XY axis direction.

Abstract: A modularized light-guiding apparatus and manufacturing method, which may make the light of a light source proceed at least twice light reflections of predetermined directions. The light-guiding apparatus includes a plurality of modularized reflection elements, which may be differentiated to several different types of reflection element. Each type of each reflection element all has substantially same adjoining device and edge size for providing to be adjoined and piled-up with another reflection element. But, the reflection element of different type individually has different number of reflection plane for providing the light to proceed different times of light reflection. It may determined the light reflection times and light-path length for the light-guiding apparatus, by choosing several different types of reflection element among plural reflection elements to proceed the piling-up for the light-guiding apparatus.

Abstract: A modularized light-guiding apparatus and manufacturing method, which may make the light of a light source proceed at least twice light reflections of predetermined directions. The light-guiding apparatus includes a plurality of modularized reflection elements, which may be differentiated to several different types of reflection element. Each type of each reflection element all has substantially same adjoining device and edge size for providing to be adjoined and piled-up with another reflection element. But, the reflection element of different type individually has different number of reflection plane for providing the light to proceed different times of light reflection. It may determined the light reflection times and light-path length for the light-guiding apparatus, by choosing several different types of reflection element among plural reflection elements to proceed the piling-up for the light-guiding apparatus.