With Three Or More Successive Reflections Patents (Class 359/861)
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Patent number: 6531680Abstract: A cube corner laser beam retroreflector apparatus for a beam path external to a laser reduces the effect of small deviations in flatness of optical carriage mounting elements and/or linear ways that pitch, yaw and roll the carried retroreflector apparatus. Small changes in pitch, yaw and roll are converted to a small translation in position of the beam reflected from the apparatus. Since the reflected beam remains parallel to the incoming beam, the length of the beam path does not magnify such small deviations in position and system pointing stability is greatly improved. The cube corner retroreflector comprises a welded frame and three mirror holders, the welded frame consisting of plasma, laser or abrasive water jet cut tabbed and slotted flat plates welded together. Each mirror holder is adjustably attached to the welded frame and houses a removable mirror.Type: GrantFiled: April 6, 2001Date of Patent: March 11, 2003Assignee: W. A. Whitney Co.Inventors: Michael A. Tomlinson, Steven A. Tower
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Patent number: 6493882Abstract: A mirror arrangement (10) for a rear view mirror system comprises three mirrors (14, 16, 18). The first mirror (14) is a concave off-axis parabolic mirror arranged adjacent the eyes of the user with a principal axis and effective focal length f1. The second mirror (16) is substantially flat and is arranged between the first and third mirrors (14, 18). The third mirror (18) is a convex off axis parabolic mirror having a principal axis under an effective focal f3. The first and third mirrors (14, 18) have a common focus and the parabolas of the first and third mirrors (14, 18) are related such that 1.5 f1≦f3 ≦3f1. In another aspect of the invention a mounting arrangement (24) for a rear view mirror system comprises an article of headgear (12) with a channel (20) formed therein and a mirror assembly mounted on the article of headgear so as to bridge the channel. The mirror assembly has series of lugs (26) protruding from the longitudinal edges thereof.Type: GrantFiled: June 4, 2001Date of Patent: December 17, 2002Assignee: Reevu LimitedInventors: Graham Steele, Andrew W. Campbell
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Patent number: 6495839Abstract: The invention is concerned with a microlithography projection objective device for short wavelength microlithography, preferably <100 nm, with a first mirror (S1), a second mirror (S2), a third mirror (S3), a fourth mirror (S4) and a fifth mirror (S5). The invention is characterized by the fact that the image-side numerical aperture (NA) is greater than or equal to 0.10 and that the mirror closest to the object to be illuminated, preferably the wafer, is arranged in such a way that the image-side optical free working distance corresponds at least to the used diameter (D) of the mirror closest to the wafer; the image-side optical free working distance is at least the sum of one-third of the used diameter (D) of the mirror closest to the wafer and a length which lies between 20 mm and 30 mm; and/or the image-side optical free working distance is at least 50 mm, preferably 60 mm.Type: GrantFiled: March 10, 2000Date of Patent: December 17, 2002Assignee: Carl-Zeiss StiftungInventor: Udo Dinger
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Patent number: 6406156Abstract: The present invention provides a reflective projection lens set for a digital light processing projector having a digital mirror device transmitting rays of intended and unintended light. The lens set comprises a first and a second mirror. The first mirror has a reflective surface positioned to receive and therefore reflect the rays of intended light. The second mirror has a reflective surface positioned to receive and therefore reflect the rays of intended light reflected from the first mirror, and an opaque surface on the backside positioned to prevent the rays of unintended light from intruding into the path of the rays of intended light.Type: GrantFiled: March 10, 2000Date of Patent: June 18, 2002Assignee: Acer Peripherals, Inc.Inventor: Rung-De Lin
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Patent number: 6361176Abstract: A reflection reduction projection optical system having large numerical aperture for use in X-ray lithography. The reflection reduction projection optical system includes at least five aspheric surface reflecting mirrors and a reflecting mirror having a predetermined configuration, causing reduction imaging on an imaging surface I by imaging a light beam from an object O only one time. The reflection reduction projection optical system includes, in light path sequence from the object, a first convex mirror, a first concave mirror, the mirror having a predetermined configuration, a second concave mirror, a second convex mirror, and a third concave mirror. The reflection reduction projection optical system also includes an aperture stop located on the second convex mirror.Type: GrantFiled: July 7, 2000Date of Patent: March 26, 2002Assignee: Nikon CorporationInventor: Kiyoto Mashima
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Publication number: 20020018310Abstract: An optical path folding apparatus of the present invention receives an incident light and reflects a reflection light on a lens set. The optical path folding apparatus comprises a first portion receiving the incident light and reflecting a first light beam, a second portion receiving the first light beam and reflecting a second light beam, a third portion receiving the second light beam and reflecting a third light beam, a fourth portion receiving the third light beam and reflecting a fourth light beam, a fifth portion receiving the fourth light beam and reflecting a fifth light beam, and a sixth portion receiving the fifth light beam and reflecting a reflection light on the lens set. In a preferred embodiment, the first portion and the fifth portion are coplanar on a first mirror, while the second portion, the fourth portion and the sixth portion are coplanar on a second mirror.Type: ApplicationFiled: June 29, 2001Publication date: February 14, 2002Applicant: Acer Communications and Multimedia Inc.Inventor: Tsan-Yao Hung
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Patent number: 6341870Abstract: The device serves the change of the length of the running path of an electromagnetic wave, and specifically of a light beam between the emitter and receiver. It comprises two oppositely lying reflection means between which the beam is reflected, as well as a means for changing the distance of these reflection means. The reflection means are arranged at an angle &bgr; to one another which lies between 0° and 45° so that the incident beam is thrown to and fro several times between the reflection means, until it is finally congruently thrown back.Type: GrantFiled: May 26, 2000Date of Patent: January 29, 2002Assignee: Medizinisches Laserzentrum Luebeck GmbHInventors: Peter Koch, Christian Scholz, Ralf Engelhardt, Stefan Kubasiak
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Patent number: 6304382Abstract: A virtually imaged phased array (VIPA) operating as a wavelength splitter to separate individual carriers from a wavelength division multiplexed (WDM) light. The VIPA has first and second surfaces. The second surface has a reflectivity which causes a portion of light incident thereon to be transmitted therethrough. The VIPA receives an input light at a respective wavelength within a continuous range of wavelengths. The first and second surfaces are positioned so that the input light is reflected a plurality of times between the first and second surfaces to cause a plurality of lights to be transmitted through the second surface. The plurality of transmitted lights interfere with each other to produce an output light which is spatially distinguishable from an output light produced for an input light having any other wavelength within the continuous range of wavelengths.Type: GrantFiled: November 1, 1999Date of Patent: October 16, 2001Inventors: Masataka Shirasaki, Simon Cao
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Patent number: 6302548Abstract: A catoptric reduction projection optical system (5) is provided with a first catoptric optical system (10) that images an object (R) in first (object) plane (OP) into a second plane (12) and forming an intermediate image (II) therein, and a second catoptric optical system (20) that images the intermediate image in the second plane onto a third (image) plane (IP), thereby forming a reduced image of the object in the first (object) plane onto the third (image) plane. The first catoptric optical system comprises a first mirror pair comprising two reflective mirrors (M1, M2). The second catoptric optical system comprises a second mirror pair comprising a convex mirror (M3) and a concave mirror (M4). The system also preferably satisfied a number of design conditions.Type: GrantFiled: January 17, 2001Date of Patent: October 16, 2001Assignee: Nikon CorporationInventors: Tomowaki Takahashi, Yutaka Suenaga
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Patent number: 6299318Abstract: A mirror projection system for use in a step-and-scan lithographic projection apparatus in which a mask pattern is repetitively scan-imaged on a number of areas of a substrate by means of a beam of EUV radiation having a circular segment-shaped cross-section. The projection system, which is easier to manufacture at lower cost than a projection system with six or more imaging mirrors, has only five imaging mirrors with a good numerical aperture and an acceptable image-ringfield width. An EUV lithographic projection apparatus provided with the new projection system has a wafer throughput which is approximately 50% higher than that of an apparatus provided with a six-mirror projection system. Moreover, such a lithographic projection has a compact construction.Type: GrantFiled: November 13, 2000Date of Patent: October 9, 2001Assignee: U.S. Philips CorporationInventor: Josephus J. M. Braat
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Publication number: 20010008470Abstract: An integrating rod (200) for use with a multiple segment dynamic filter, such as a spiral dichroic color wheel having three or more narrow filters adjacent to the exit face (206) to enable the integrating rod to recapture light rejected by a given segment of the dynamic filter. The rejected light travels back through the integrating rod where a majority of the light strikes the mirrored entrance face (202). Light reflected by the mirrored entrance face, or light exiting through the entrance aperture (204) and returning to the integrating rod after being reflected by the lamp reflector, once again travels to the exit face (206) of the integrating rod (200). After exiting through the exit face (206) of the integrating rod (200) a second time, the recycled light has a good chance of striking a different filter segment of the dynamic filter and being used by the display system.Type: ApplicationFiled: December 28, 2000Publication date: July 19, 2001Inventor: Duane Scott Dewald
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Patent number: 6244717Abstract: A reduction objective, a projection exposure apparatus with a reduction objective, and a method of use thereof are disclosed. The reduction objective comprises four (primary, secondary, tertiary, and quaternary) mirrors in centered arrangement with respect to an optical axis. The primary mirror is a convex mirror and the second mirror has a positive angular magnification. The reduction objective has an obscuration-free light path and is suitable for annular field scanning operation, such as is used in soft X-ray, i.e. and EUV and UV, lithography.Type: GrantFiled: May 28, 1999Date of Patent: June 12, 2001Assignee: Carl-Zeiss StiftungInventor: Udo Dinger
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Patent number: 6231199Abstract: An electromagnetic radiation collecting and condensing optical system includes a plurality of cascaded concave paraboloid reflectors and a plurality of electromagnetic radiation or light sources which radiate light energy onto the concave reflectors in such manner that the energy from each source is combined by the reflectors into an output target, such as the end of a single core optical fiber.Type: GrantFiled: March 29, 2000Date of Patent: May 15, 2001Assignee: Cogent Light Technologies, Inc.Inventor: Kenneth K. Li
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Patent number: 6213610Abstract: A catoptric reduction projection optical system (5) is provided with a first catoptric optical system (10) that images an object (R) in first (object) plane (OP) into a second plane (12) and forming an intermediate image (II) therein, and a second catoptric optical system (20) that images the intermediate image in the second plane onto a third (image) plane (IP), thereby forming a reduced image of the object in the first (object) plane onto the third (image) plane. The first catoptric optical system comprises a first mirror pair comprising two reflective mirrors (M1, M2). The second catoptric optical system comprises a second mirror pair comprising a convex mirror (M3) and a concave mirror (M4). The system also preferably satisfied a number of design conditions.Type: GrantFiled: September 17, 1999Date of Patent: April 10, 2001Assignee: Nikon CorporationInventors: Tomowaki Takahashi, Yutaka Suenaga
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Patent number: 6211988Abstract: The invention relates to an optical device for scanning a beam in two axes that are substantially perpendicular to each other, for use in particular in confocal laser scan microscopes, and aims to avoid serious image defects. The invention is characterized in that it has three mirrors (1, 2; 3) of which two mirrors (1, 2) are fixedly positioned at an angle to each other so that they rotate together around the y-axis and in so doing rotate the beam (4) around a pivot point located on the axis of rotation (x-axis) of the third mirror (3) which rotates by itself.Type: GrantFiled: August 25, 1999Date of Patent: April 3, 2001Assignee: Leica Microsystems Heidelberg GmbHInventors: Johann Engelhardt, Heinrich Ulrich
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Patent number: 6199991Abstract: A mask pattern is repetitively scan-imaged on a number of areas of a substrate by means of a beam of EUV radiation having a circular segment-shaped cross-section. This system, which is easier to manufacture at lower cost than a projection system with six or more imaging mirrors, has only five imaging mirrors with a good numerical aperture and an acceptable image-ringfield width. An EUV lithographic projection apparatus provided with the new projection system has a wafer throughput which is approximately 50% higher than that of an apparatus provided with a six-mirror projection system. Moreover, it has a compact construction.Type: GrantFiled: August 18, 1998Date of Patent: March 13, 2001Assignee: U.S. Philips CorporationInventor: Josephus J. M. Braat
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Patent number: 6195201Abstract: An illumination source or condenser used to project the image of a reticle onto a photosensitive substrate used in photolithography having a first reflective fly's eye, faceted mirror, or mirror array with predeterminedly positioned facets or elements and a second reflective fly's eye, faceted mirror, or mirror array having predeterminedly positioned facets or elements for creating a desired radiant intensity, pupil fill, or angular distribution. A source of extreme ultraviolet electromagnetic radiation is provided to a first fly's eye or mirror array with arcuate shaped facets or elements. The arcuate shaped facets or elements are positioned to create an image of the source at corresponding facet in a second reflective fly's eye or mirror array. A desired shape and irradiance together with a desired radiant intensity, pupil fill, or angular distribution is obtained. An arcuate illumination field or image is formed with high efficiency in a compact package.Type: GrantFiled: January 27, 1999Date of Patent: February 27, 2001Assignee: SVG Lithography Systems, Inc.Inventors: Donald G. Koch, James P. McGuire, Joseph M. Kunick
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Patent number: 6183095Abstract: An all-reflective optical system for a projection photolithography camera has a source of EUV radiation, a wafer and a mask to be imaged on the wafer. The optical system includes a first concave mirror, a second mirror, a third convex mirror, a fourth concave mirror, a fifth convex mirror and a sixth concave mirror. The system is configured such that five of the six mirrors receives a chief ray at an incidence angle of less than substantially 12°, and each of the six mirrors receives a chief ray at an incidence angle of less than substantially 15°. Four of the six reflecting surfaces have an aspheric departure of less than substantially 7 &mgr;m. Five of the six reflecting surfaces have an aspheric departure of less than substantially 14 &mgr;m. Each of the six reflecting surfaces has an aspheric departure of less than 16.0 &mgr;m.Type: GrantFiled: December 2, 1999Date of Patent: February 6, 2001Inventor: Russell Hudyma
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Patent number: 6147799Abstract: A variable optical delay element that is physically compact introduces time delays to an applied optical signal. The variable optical delay element includes a pair of substantially parallel members, each having a linear reflective surface facing the reflective surface of the other member. An input lens secured to a first end of the first linear member collimates an optical beam launched by an input fiber while an output lens secured to a second member focuses the collimated optical beam onto an optical output fiber. A first actuator adjusts the offset relationship between the members in a direction parallel to the pair of members to designate the number of reflections of the collimated optical beam by the reflective surfaces before being received by the output lens. A second actuator adjusts the distance separating the linear reflectors. The optical signal is delayed by a predefined time interval by adjusting the offset positions of the members and the distance separating the members.Type: GrantFiled: October 8, 1999Date of Patent: November 14, 2000Assignee: Agilent Technologies Inc.Inventor: Willard MacDonald
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Patent number: 6144475Abstract: The reflection mirrors in the optical system of a scanner is arranged to have reflections in a vertical direction instead of a horizontal direction as is commonly done. Then, the horizontal dimension of the scanner can be reduced.Type: GrantFiled: November 9, 1998Date of Patent: November 7, 2000Assignee: Avision, Inc.Inventor: Thomas Sheng
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Patent number: 6139160Abstract: A structure capable of generating a virtual polyhedral space includes a plurality of walls, each having a first side edge, a second side edge, and a reflective surface. The walls are disposed adjacent one another, with the first side edge of each wall adjacent the second side edge of an adjacent wall, each wall lying in an associated one of a plurality of planes intersecting at a common apex, thus forming a pyramid shaped structure. So disposed, the walls define an interior space of the structure, with the reflective surfaces of the walls facing the interior space. Each wall further includes a base edge. Together, the base edges of the reflective walls define a base opening of the structure, which provides access to the interior space. The images of optional base coverings form coherent images of a virtual polyhedron in the reflective surfaces of the walls. Three-sided, four-sided, and five-sided embodiments are described.Type: GrantFiled: January 21, 1999Date of Patent: October 31, 2000Inventor: Sara L. Frucht
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Patent number: 6135601Abstract: An architectural structure capable of generating a virtual polyhedral space includes a plurality of walls, each having a first side edge, a second side edge, and a reflective surface. The walls are disposed adjacent one another, with the first side edge of each wall adjacent the second side edge of an adjacent wall, each wall lying in an associated one of a plurality of planes intersecting at a common apex, thus forming a pyramid shaped structure. So disposed, the walls define an interior space of the architectural structure, with the reflective surfaces of the walls facing the interior space. Each wall further includes a base edge. Together, the base edges of the reflective walls form a support base for supporting the architectural structure on a floor surface. The images of the floor surface in the reflective surfaces of the walls forms a coherent image of a virtual polyhedron. Three-sided, four-sided, and five-sided embodiments are described.Type: GrantFiled: January 23, 1998Date of Patent: October 24, 2000Inventor: Sara Frucht
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Patent number: 6120156Abstract: An optical element has a plurality of reflecting regions for reflecting light in succession, each of the plurality of reflecting regions comprises a curved surface, at least two of the reflecting regions has a common reflecting surface, and the optical paths of the light defined by the plurality of reflecting regions intersect with one another.Type: GrantFiled: October 14, 1998Date of Patent: September 19, 2000Assignee: Canon Kabushiki KaishaInventor: Takeshi Akiyama
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Patent number: 6109756Abstract: A catoptric reduction projection optical system (8), exposure apparatus (EX) including same, and a method using same for forming in a second plane (WP) a reduced image of an object (R) in a first plane (RP). The projection optical system includes, in order along a folded optical path on in optical axis (AX), from the first plane to the second plane, a first mirror (M1) having a concavely shaped reflecting surface and a first vertex, a second mirror (M2) having a second vertex, a third mirror (M3) having a convexly shaped reflecting surface and a third vertex, a single aperture stop (AS), and a fourth mirror (M4) having a concavely shaped reflecting surface and a fourth vertex. The projection optical system also preferable satisfies a number of design conditions.Type: GrantFiled: September 21, 1999Date of Patent: August 29, 2000Assignee: Nikon CorporationInventor: Tomowaki Takahashi
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Patent number: 6033079Abstract: An all-refelctive optical system for a projection photolithography camera has a source of EUV radiation, a wafer and a mask to be imaged on the wafer. The optical system includes a first concave mirror, a second mirror, a third convex mirror, a fourth concave mirror, a fifth convex mirror and a sixth concave mirror. The system is configured such that five of the six mirrors receives a chief ray at an incidence angle less than substantially 12.degree., and each of the six mirrors receives a chief ray at an incidence angle of less than substantially 15.degree.. Four of the six reflecting surfaces have an aspheric departure of less than substantially 7 .mu.m. Five of the six reflecting surfaces have an aspheric departure of less than substantially 14 .mu.m. Each of the six refelecting surfaces has an aspheric departure of less than 16.0 .mu.m.Type: GrantFiled: March 15, 1999Date of Patent: March 7, 2000Inventor: Russell Hudyma
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Patent number: 6022115Abstract: The present invention is directed to an optical system for measurement of a three dimensional device. The optical system is designed and configured to meet telecentric and f-.theta. requirements. The system employs primary and secondary mirrors operating in conjunction with a tertiary deflector mounted on a pivot. Light from a light source produces a beam which is deflected off the deflector and the secondary and primary reflectors respectively. The beam is then transmitted to the surface of the object to be measured. Deflection of the tertiary deflector on the pivot results in scanning of the light beam across the surface of the object to be measured.Type: GrantFiled: June 15, 1998Date of Patent: February 8, 2000Assignee: Universite LavalInventors: Ermanno Borra, Simon Thibault, Stan Szapiel
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Patent number: 6016220Abstract: A corrector mirror folds the optical path between the objective and relay portions of a three-mirror anastigmat. The corrector mirror is a non-powered mirror having a nominally flat but higher order aspheric surface. By placing the corrector mirror between the objective portion and an intermediate image formed by the objective portion, the field offset of the anastigmat can be significantly increased. A large field offset makes the off-axis anastigmat ideal for use with an on-axis dewar for infrared imaging applications.Type: GrantFiled: April 9, 1996Date of Patent: January 18, 2000Assignee: Raytheon CompanyInventor: Lacy G. Cook
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Patent number: 6003997Abstract: A method and system are provided for the constant path-length translation of a laser beam. At least one pair of mirrors disposed at an angle (e.g., 90.degree.) to one another and fixed in relation to one another are disposed in the path of the (incoming) laser beam. The mirrors are positioned such that the incoming laser beam impinges on the first mirror, is reflected to the second mirror, and iii) is reflected from the second mirror as an (outgoing) laser beam parallel to the incoming laser beam. A positioner is coupled to the mirrors for simultaneously moving them in a direction that is parallel to the target plane and in a plane defined by the incoming and outgoing laser beams.Type: GrantFiled: March 14, 1997Date of Patent: December 21, 1999Assignee: Autonomous Technologies CorporationInventor: George Richard Downes, Jr.
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Patent number: 5993016Abstract: The optical reproduction system comprises an even number (e.g., four) of reflecting surfaces for producing an image rotated 90.degree. relative to an object to be produced, on an image plane that is parallel to the plane of the object. The incoming optical axis and the outgoing optical axis rest on the same straight line.Type: GrantFiled: September 9, 1997Date of Patent: November 30, 1999Assignee: Gretag Imaging AGInventor: Fred Mast
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Patent number: 5986822Abstract: A rearview mirror for motor vehicle comprises an optical system and a reflect mirror which are properly intalled in the vehicle. The scene behind the vehicle can be imaged by the optical system and projected to the reflect mirror so that driver can see the back scene and the relative position between the vehicle and other objects behind. The optical system comprises convex lenses, or concave lenses and prisms.Type: GrantFiled: July 22, 1997Date of Patent: November 16, 1999Inventor: Pengshou Lu
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Patent number: 5980049Abstract: Radiant energy sensor is protected from severe environments with a radiant energy sensor assembly that off-sets the sensor from the environment. The sensor assembly includes a radiant energy sensor, a pair of reflective walls facing one another, one of the walls having a transmissive aperture for receiving radiant energy over a wide angle of incidence, an entry, the other wall having a transmissive aperture for passing energy from behind the wall to the sensor, an exit, with the walls having the reflection characteristics such that the radiant energy entering the entry aperture at any angle is always reflected to the exit aperture. The reflective walls may be paraboloids or Fresnel surfaces in geometry.Type: GrantFiled: October 12, 1998Date of Patent: November 9, 1999Assignee: McDonnell Douglas CorporationInventor: James Bertram Blackmon, Jr.
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Patent number: 5975710Abstract: An optical image field splitting system which is adapted to allow a single camera to be used to view two or more images or object scenes of a single object or one or more images from a plurality of objects is disclosed. The optical image field splitting system includes a camera, a mirror pair, a lens, and a third mirror spaced apart from the mirror pair. The mirror pair includes a first mirror defining a first reflective planar surface and a second mirror defining a second reflective planar surface. The first reflective planar surface is oriented at a first predetermined angle relative to the second reflective planar surface. The lens is coupled to the camera and disposed in an optical path defined between the camera and the mirror pair. The third mirror defines a third reflective planar surface oriented at a second predetermined angle relative to the second reflective surface of the second mirror. An optical path length is defined between the third mirror and the second mirror.Type: GrantFiled: August 14, 1998Date of Patent: November 2, 1999Inventor: Spencer D. Luster
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Patent number: 5923474Abstract: An optical device including a reflecting device, a focusing device and a processing device for realizing image data of a target object is disclosed. The focusing device is located within an enclosed area surrounded by a reflective light track so that the two light paths respectively from the target object to the focusing device through the reflecting device, and from the focusing device to the processing device are overlapped. By this way, the size of the optical device contributed by the distance between the reflective device and the processing device is reduced.Type: GrantFiled: July 28, 1998Date of Patent: July 13, 1999Assignee: DBTEL IncorporatedInventor: Michael Mou
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Patent number: 5907442Abstract: A reflective optical system includes, in traveling order of light, a correction plate having an aspherical surface and a reflecting mirror for concentrating the light. An image is formed out of an optical path between the correction plate and the reflecting mirror.Type: GrantFiled: January 17, 1997Date of Patent: May 25, 1999Assignee: Canon Kabushiki KaishaInventor: Toru Matsuda
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Patent number: 5896237Abstract: Radiant energy sensor is protected from severe environments with a radiant energy sensor assembly that off-sets the sensor from the environment. The sensor assembly includes a radiant energy sensor, a pair of reflective walls facing one another, one of the walls having a transmissive aperture for receiving radiant energy over a wide angle of incidence, an entry, the other wall having a transmissive aperture for passing energy from behind the wall to the sensor, an exit, with the walls having the reflection characteristics such that the radiant energy entering the entry aperture at any angle is always reflected to the exit aperture. The reflective walls may be paraboloids or Fresnel surfaces in geometry.Type: GrantFiled: July 22, 1994Date of Patent: April 20, 1999Assignee: McDonnell Douglas CorporationInventor: James Bertram Blackmon, Jr.
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Patent number: 5867329Abstract: An optical filter that uses multiple reflections to provide spectral bandpass filtering of ultraviolet, visible and infrared radiation with a very high transmission of wavelengths within a selected passband coupled with exceptional off-band rejection. The reflection filter uses dielectric-coated spherical reflectors or mirrors manufactured with absorbing glass substrates. The multiple-pass feature of the reflection filter is achieved using a traditional long-path absorption cell such as a White Cell or Wilkes Cell. The light transmitted through the reflection filter is only that light which has undergone multiple reflections as the wavelengths of high mirror reflectivity reflect off the dielectric-coated substrates. All remaining light at wavelengths corresponding to high mirror transmission is attenuated by absorption in the mirror substrate.Type: GrantFiled: May 31, 1996Date of Patent: February 2, 1999Assignee: The United States of America as represented by the Secretary of the NavyInventors: Brian L. Justus, Alan L. Huston
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Patent number: 5847879Abstract: A wide angle large reflective unobscured system includes a primary reflective element for receiving a broad range of energy, a secondary reflective element for reflecting the energy from the primary reflective element to reimage a virtual entrance pupil at a real aperture stop. A beamsplitter element is provided for reflecting a first portion of the energy, such as visible energy, to a first tertiary reflective mirror, while transmitting a second portion of the energy, such as IR light, to a second tertiary reflector. Each tertiary reflector is capable of focusing the received energies to dual focal planes wherein a compact detector array assembly can convert the images to electronic signals.Type: GrantFiled: February 26, 1997Date of Patent: December 8, 1998Assignee: Raytheon CompanyInventor: Lacy G. Cook
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Patent number: 5847866Abstract: A microscope apparatus having an objective optical system for condensing a beam emitted from a sample to form an intermediate image; a lens-barrel optical system for focusing a beam from the intermediate image to form an observation image; and an eyepiece optical system for enlarging and projecting a beam from the observation image; wherein the lens-barrel optical system includes a relay lens system for focusing a beam from the intermediate image formed by the objective optical system to form the observation image and guiding a beam from the observation image to the eyepiece optical system; and a beam rotating unit having a plurality of reflecting members three-dimensionally arranged in an optical path between the objective optical system and the observation image, wherein the plurality of reflecting members successively reflect the beam from the objective optical system to invert the beam about an optical axis of the relay lens system, thereby forming the observation image in the form of an inverted image.Type: GrantFiled: August 8, 1996Date of Patent: December 8, 1998Assignee: Nikon CorporationInventor: Tatsuro Otaki
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Patent number: 5828505Abstract: An internally-mirrored tube of constant cross-section, for use as a beam-shaper-uniformizer in an optical lithography tool, requires precision assembly, closely approaching total internal reflection, to be able to accept at the entry end a beam of laser light of specified numerical aperture, having an arbitrary cross-section and a non-uniform intensity profile, and deliver at the exit a beam having the same numerical aperture, the desired cross-sectional shape, and a substantially uniform intensity profile across the illuminated area. Imperfections at the edges of the component slabs would interfere with operation. The difficulty of machining internal surfaces to mirror smoothness, and the difficulty of applying mirror finishes to internal surfaces, suggests that the uniformizer be assembled from mirrored slabs cemented together. Achieving precision without breakage or scuffing of mirrors is difficult.Type: GrantFiled: May 10, 1996Date of Patent: October 27, 1998Assignee: Anvik CorporationInventor: Nestor O. Farmiga
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Patent number: 5815329Abstract: A tri-mirror multi-reflection optical path folding apparatus for optical scanner includes a light source, a reflection means, a lens set, a charged coupled device (CCD), and a base. The three reflection mirrors of the reflection means are positioned with each other at selected angles such that total reflection time of the optical path is four or five times. The optical path folding apparatus, consequently the scanner, can be made compact size, light weight and low cost.Type: GrantFiled: September 13, 1996Date of Patent: September 29, 1998Assignee: Umax Data Systems, Inc.Inventor: Wen-Tso Tseng
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Patent number: 5802335Abstract: A FLIR staring array detector system for imaging an object scene using catadioptric optics has a cold shield efficiency approaching unity. The system provides a full format image of the object scene. The catadioptric optics include reflective objective optics for providing an intermediate image of the object scene and refractive relay optics for providing the full format image. The system further includes a staring detector for receiving the full format image.Type: GrantFiled: March 21, 1996Date of Patent: September 1, 1998Assignee: State of Israel-Ministry of Defence, Rafael-Armament Development AuthorityInventors: Doron Sturlesi, Shimon Peled
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Patent number: 5798879Abstract: Three adjustable supports, positioned at the vertices of a triangle, are used to support one structure from another structure. In one form of the support, a post threaded at its lower end extends from the first structure to a slot in the second structure. A spring is captured between a shoulder on the post and a facing shoulder on the second shoulder at the bottom of the slot. A threaded end of the post extends through an oversize bore in the second structure. A spherical washer has a flat side resting against the outer surface of the second support, and a spherical washer is engaged to the threaded end of the post such that the spherical surface of the washer contacts the spherical surface of the nut to provide freedom of movement.Type: GrantFiled: June 7, 1995Date of Patent: August 25, 1998Inventor: Paul R. Salvio
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Patent number: 5771497Abstract: An article of headwear (10) includes a solid transparent fully carbonate block (18). The block lies on top of the wearer's head and defines a non-straight light path to the wearer's eyes. The block does not obscure the majority of the normal field of vision for the wearer but can be seen when the wearer looks upwards. The upper surfaces 24 of the block allow internal reflection of light through the block and the rear end of the block is open and faces backwards so that by looking upwardly into the block a wearer can obtain a view of what is behind him. The article of headwear may be a motorcycle helmet for example. In another embodiment of the invention a display screen is located at the rear of the block so that it can be seen through the block when the wearer looks upwardly into the block.Type: GrantFiled: January 18, 1996Date of Patent: June 30, 1998Assignee: Hoodco 446 LimitedInventor: Mark Steele
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Patent number: 5737137Abstract: A critical illumination condenser system, particularly adapted for use in extreme ultraviolet (EUV) projection lithography based on a ring field imaging system and a laser produced plasma source. The system uses three spherical mirrors and is capable of illuminating the extent of the mask plane by scanning either the primary mirror or the laser plasma source. The angles of radiation incident upon each mirror of the critical illumination condenser vary by less than eight (8) degrees. For example, the imaging system in which the critical illumination condenser is utilized has a 200 .mu.m source and requires a magnification of 26.times.. The three spherical mirror system constitutes a two mirror inverse Cassegrain, or Schwarzschild configuration, with a 25% area obstruction (50% linear obstruction). The third mirror provides the final pupil and image relay. The mirrors include a multilayer reflective coating which is reflective over a narrow bandwidth.Type: GrantFiled: April 1, 1996Date of Patent: April 7, 1998Assignee: The Regents of the University of CaliforniaInventors: Simon J. Cohen, Lynn G. Seppala
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Patent number: 5734515Abstract: An optical apparatus for selectively directing a line of sight between a residence location and locations within a substantially hemispherical field of regard. The apparatus includes a stator which supports a first stage for rotation about a first axis of rotation. A second stage is supported by the first stage for at least partial rotation about a second axis of rotation. The first stage and the second stage include respective mirrors which direct the line of sight between the residence location and the locations in the field of regard. The first stage and the second stage are each operatively rotated by one or more foundation-based drive motors or the like. A drive train arrangement is preferably utilized to transfer motive power from the stationary drive motor to the second stage.Type: GrantFiled: August 8, 1994Date of Patent: March 31, 1998Assignee: Reliance Electric Industrial CompanyInventor: James E. Shaffer
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Patent number: 5726752Abstract: A sample cell of the multiple reflection type is used for analyzing a sample in the same cell. In the sample cell, incident light is reflected a plurality of times. The sample cell includes a mirror plate including a light incident window for introducing the incident light into the sample cell, a first concave mirror, and a light exit window for outputting the incident light form the sample cell. A side plate including a second concave mirror reflects the incident light to the first concave mirror and a third concave mirror for reflecting the incident light reflected by the first and second concave mirrors to the light exit window. The cell also includes a frame for fixing the mirror plate and the side plate so that the distances between the first concave mirror and the second and third concave mirrors are fixed at a distance equal to the radius of curvature of the three concave mirrors.Type: GrantFiled: July 31, 1996Date of Patent: March 10, 1998Assignee: Fuji Electric Co., Ltd.Inventors: Masahiro Uno, Mutsumi Nagumo, Hideyuki Tanaka
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Patent number: 5717520Abstract: An intermediate lens barrel for a microscope, in which an image is formed only once, the direction of the image does not change when returning to the original optical path, and no pupil aberration occurs. In this intermediate lens barrel, assuming that its round optical path is formed by n pieces of reflecting surfaces R (n being an even number not smaller than 4), an intermediate image is formed once in the round optical path, the angle formed by the normal N.sub.1 of the first reflecting surface R.sub.1 and the normal N.sub.2 of the second reflecting surface R.sub.2 with respect to each other when projected onto a plane orthogonal to the optical axis X.sub.1 reflected by the first reflecting surface R.sub.1 is .alpha..sub.1, the angle formed by the normal N.sub.N of the reflecting surface R.sub.N and the normal N.sub.1 of the reflecting surface R.sub.1 with respect to each other when projected onto a plane orthogonal to the optical axis X.sub.N reflected by the reflecting surface R.sub.N is .alpha..sub.Type: GrantFiled: July 10, 1996Date of Patent: February 10, 1998Assignee: Nikon CorporationInventors: Tatsuro Otaki, Yumiko Ochi
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Patent number: 5696637Abstract: An optical apparatus for selectively directing a line of sight between a residence location and locations within a substantially hemispherical field of regard. The apparatus includes a stator which supports a first stage for rotation about a first axis of rotation. A second stage is supported by the first stage for at least partial rotation about a second axis of rotation. The first stage and the second stage include respective mirrors which direct the line of sight between the residence location and the locations in the field of regard. The first stage and the second stage are each operatively rotated by one or more foundation-based drive motors or the like. A drive train arrangement is preferably utilized to transfer motive power from the stationary drive motor to the second stage.Type: GrantFiled: January 19, 1995Date of Patent: December 9, 1997Assignee: Reliance Electric Industrial CompanyInventor: James E. Shaffer
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Patent number: 5694250Abstract: An optical guide (10, 40, 50, 60) for horizontally aligning two vertically stacked images generated by one or two SLMs. The optical guide has a channel separator (10a) that directs both images along two different paths. A pair of aligning reflectors (10b and 10c) on each path vertically shift the images with respect to each other so that at least part of the images on the first path are aligned side-by-side with at least part of the images on the second path. The channel separator (10a) then redirects the images to the image plane 15. Along both paths, at least two of the reflecting surfaces of channel separator (10a) or aligning reflectors (10b and 10c) are optically powered so as to change the width or height of the images.Type: GrantFiled: July 3, 1996Date of Patent: December 2, 1997Assignee: Texas Instruments IncorporatedInventor: Charles H. Anderson
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Patent number: 5694260Abstract: A visual effects generator for use with the image output of a video screen provides multiple secondary images and reflections dispersed through a wide visual field, so that the impact of the color and motion of the original image is enhanced. The generator includes a closed housing having a rear panel with an opening secured about the video screen. The housing includes a pair of lobes diverging laterally from the rear panel, with a viewing port disposed in the distal portion of each lobe. Each viewing port may be provided with a detachable hood to shield ambient light, and a closure panel may be secured to occlude either viewing port. A first pair of generally rectangular, planar mirrors are disposed within the housing, the mirrors abutting at confronting edges which are spaced apart from the center of the television screen, and the mirrors diverge obliquely forwardly from the screen.Type: GrantFiled: December 11, 1995Date of Patent: December 2, 1997Inventor: Christopher M. Houston