Abstract: A PZT element of the present invention includes a laminated structure which is laminated with electrode layer and PZT layer alternatively to define a thickness direction; wherein each PZT layer is sandwiched between two adjacent electrode layers; and at least one support element provided on a side portion of the laminated structure and substantially extending along a longitudinal direction thereof; wherein the PZT element is bent at least towards a latitudinal direction thereof when being applied an electrical voltage thereon through the electrode layers. The invention also discloses a method of manufacturing the PZT element, a HGA and disk drive unit with the same.

Abstract: A disk drive includes a drive circuitry, a storage disk and a slider. The storage disk has a data surface, and the slider magnetically interacts with the storage disk to transmit a signal between the storage disk and the drive circuitry. The slider includes a leading surface, an opposed trailing surface, a data transducer positioned near the trailing surface, and a piezoelectric element. The piezoelectric element receives a driving voltage from the drive circuitry to adjust a distance between the data transducer and the data surface. The piezoelectric element can form a portion of the trailing surface. The slider includes a slider body that forms a portion of the trailing surface, and a portion of the piezoelectric element can be coplanar with the portion of the trailing surface formed by the slider body. Further, at least a portion of the piezoelectric element can be constrained by the slider body.

Abstract: A slide mechanism (100) used in portable electronic device (300) is described including a main plate (10), a slide plate (20), two sliders (40), and two guiders (30). The slide plate is installed on the main plate and slidable relative to the main plate. The sliders are securely attached to the slide plate, and the guiders are securely attached to the main plate deformably guiding the sliders to move along it. When the slide plate slides along the main plate, the sliders and the guiders compress with each other, thereby generating deformations therebetween and driving the sliding of the slide plate along the main plate.

Abstract: An electrode structure of a piezoelectric element is provided. The piezoelectric element 23a (23b) constitutes a piezoelectric actuator 19 attached to an attaching part 30 of an object, to minutely move a movable part 15 of the object relative to a base part 13 of the object according to deformation occurring on the piezoelectric element in response to a power applied state of the piezoelectric element. The electrode structure includes an electrode 41a formed on one of a pair of electrode forming faces 31a and 31b of the piezoelectric element on an inner side of a peripheral zone 31a1, the peripheral zone being defined along the periphery of the electrode forming face 31a on which the electrode is formed. The electrode structure also includes a non-electrode part 51 formed in the peripheral zone. Even if the peripheral zone 31a1 of the electrode forming face 31a having a short-circuit causing possibility touches the attaching part 30, no short circuit occurs.

Abstract: A head gimbal assembly includes a micro-actuator, a slider, and a suspension that supports the micro-actuator and the slider. The micro-actuator includes a metal frame including a top support to support the slider, a bottom support to connect to the suspension, and a pair of side arms that interconnect the top support and the bottom support. The top support includes a rotatable plate and connection arms that couple the rotatable plate to respective side arms. A PZT element is mounted to each of the side arms. Each PZT element is excitable to cause selective movement of the side arms. The suspension includes a load beam having a dimple that engages and supports the rotatable plate in use.

Abstract: A microactuator comprises a mounting block, a head suspension, a compliant joint for connecting the mounting block to the head suspension, and a piezoelectric element for deforming the compliant joint in order to rotate the head suspension with respect to the mounting block. An encapsulant covers an exposed surface of the microactuator. The encapsulant comprises a self-assembled monolayer formed of an organosilicone or organosilane, where the self-assembled monolayer has a self-limiting thickness of one layer of a molecule.

Abstract: An electrical connecting structure for a piezoelectric element enables wiring to the piezoelectric element to be carried out without deteriorating the productivity and reliability of the piezoelectric element. The electrical connecting structure is formed by facing a common electrode of the piezoelectric element to a terminal that supplies power to the common electrode and by injecting a conductive adhesive into a through hole, which is formed substantially at the center of the piezoelectric element, from an opening of the through hole that is on the opposite side of the common electrode, thereby securing electrical connection between the terminal and the common electrode of the piezoelectric element.

Abstract: A slider is used in an actuation system and carries a transducing head for transducing data to and from a rotatable recording disc. The slider includes a slider body having a leading edge and a trailing edge and a transducing head positioned proximate the trailing edge of the slider body. An encapsulant comprised of a self assembled monolayer covers exposed surfaces the slider body.

Abstract: According to one embodiment, a head suspension assembly includes: a head slider; a fixed piece supported on a surface of a platy gimbal; a first arm configured to extend from the fixed piece, be connected to the head slider, and include a platy first flexible portion that extends, between the fixed piece and the head slider, along a first virtual plane perpendicular to the surface of the gimbal; a second arm configured to extend from the fixed piece, be connected to the head slider, and include a platy second flexible portion configured to extend along a second virtual plane that is perpendicular to the surface of the gimbal and that intersects with the first virtual plane at an intersection angle less than 180 degrees; a first piezoelectric element joined to the first flexible portion; and a second piezoelectric element joined to the second flexible portion.

Abstract: A micro-actuator for a head gimbal assembly includes a metal frame including a bottom support integrated with a suspension flexure of the head gimbal assembly, a top support adapted to support a slider of the head gimbal assembly, and a pair of side arms that interconnect the top support and the bottom support. The top support includes a rotatable plate, connection arms that couple the rotatable plate to respective side arms, and an electrical pad support plate that supports bonding pads. A PZT element is mounted to each of the side arms. Each PZT element is excitable to cause selective movement of the side arms.

Abstract: A microactuator includes: a base to be joined to a flexure; a pair of arms joined to the base; and PZT devices, mounted on the arms, to be deformed in an expanding or contracting manner based on driving signals applied, and the microactuator holds the side faces of the magnetic head slider between the arms. The length of each arm is set to a length same as or shorter than that of the magnetic head slider in a longitudinal direction.

Abstract: An improved microactuator suspension is provided for use with high density storage media. The number of microactuator elements is reduced to one and placed perpendicularly to the longitudinal axis of the suspension arm to maximize the windage and resonance performance and minimize the microactuator's contribution to bending stiffness and the off track bending component. An improved electrical connection eliminates the requirement for a jumper. These improvements reduce cost by reducing part count and assembly complexity.

Abstract: A suspension assembly with reduced total vertical thickness is provided for a data transducing system that includes a dual-stage actuation system for positioning a data transducer. A first structural element of the suspension assembly includes a plate portion and a boss tower that is connectable to a main actuator of the dual-stage actuation system. A second structural element of the suspension assembly includes a recess that receives the plate portion of the first structural element, an opening through which the boss tower extends for connection to the main actuator of the dual-stage actuation system, and a flexible region to which a microactuator element of the dual-stage actuation system is connected.

Abstract: According to one embodiment, a head suspension assembly includes: a head slider; a fixed piece configured to be fixed to the head slider; a flexible long piece configured to extend from the fixed piece and to be connected to a head suspension; an arm piece configured to be connected to the head suspension at one end and slidably contact a surface of the head slider at other end; and a piezo element configured to be attached to the arm piece.

Abstract: A head suspension 31 has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 having an opening 43 into which the piezoelectric element 13 is fitted, and a load beam 35 that is fixed to the base plate 33 so that a front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension 31 includes an electric insulating layer 51 formed at the opening 43 by vapor-depositing and polymerizing electrically insulative high polymer materials at the opening 43. The piezoelectric element 13 is fitted into the opening 43 through at least the electric insulating layer 51. The head suspension 31 satisfies a miniaturization requirement.

Abstract: A head suspension has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 provided with an opening 43 to which the piezoelectric element is attached, and a load beam 35 that is fixed to the base plate 33 so that a front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension includes an adhesive 51 applied to a gap 50 between the piezoelectric element 13 and the opening 43, to attach the piezoelectric element 13 to the opening 43. The adhesive 51 has a thixotropic characteristic and is sol when applied to the gap 50. A displacement of the piezoelectric element is correctly transmitted to the load beam. The head suspension properly keeps a rigidity balance and vibration characteristic.

Abstract: Devices for reading or writing electromagnetic information include a wafer substrate piece disposed between an electromagnetic transducer and an electrostrictive or piezoelectric actuator. The substrate piece is shaped as a rigid body adjoining the transducer and as a flexible element connecting the body and the actuator. To fabricate, at least one electrostrictive layer and many transducers are formed on opposite sides of a wafer that is then cut into rows containing plural transducers. The rows are processed from directions generally normal to the wafer surface upon which the transducers were formed, by removing material to form a head, flexures and a media-facing surface on the head. Conductive leads are formed on a back surface of flexures connecting the transducer with drive electronics. The flexures are aligned with forces arising from interaction with the media surface and from seeking various tracks, reducing torque and dynamic instabilities and increasing actuator access time.

Abstract: A HGA of the present invention includes a slider; a micro-actuator comprising two thin film PZT pieces to define a notch; a suspension to load the slider and the micro-actuator. The suspension comprises: a flexure having an actuator loading portion with a slot corresponding to the notch of the micro-actuator, and a slider-loading portion to partially hold the slider; and a load beam having a first dimple to support the flexure at a position thereof corresponding to a central area of the slider, and a second dimple extending through both the slot of the flexure and the notch defined by the micro-actuator and toward an leading edge end portion of the slider to form a gap between the slider and the second dimple. The invention also discloses a disk drive unit having the improved HGA.

Abstract: A piezoelectric sensor-actuator, including a piezoelectric sensor bonded through non-conductive adhesive to a piezoelectric actuator to determine the pressure and/or temperature near the coupled slider. The piezoelectric actuator contributes to slider positioning. The piezoelectric sensor determines the experienced stress-strain. The hard disk drive uses the piezoelectric sensor-actuator creates a stress-strain measurement, a sensor spectrum, deriving the temperature estimate and/or the pressure estimate from said sensor spectrum, and operating at least one positioning control group member based upon the temperature estimate and/or pressure estimate. The micro-actuator containing at least one of the piezoelectric sensor-actuators, flexure finger, head gimbal assembly, head stack assembly, an actuator assembly, an embedded circuit, and the hard disk drive.

Abstract: A method of testing a performance of a HGA including a magnetic head and a micro-actuator for precisely positioning the magnetic head with respect to a magnetic medium is disclosed. The key of the method is to obtain three track center values under conditions of no driving the micro-actuator, driving the micro-actuator in a positive direction using an operating DC voltage, and driving the micro-actuator in a negative direction using the operating DC voltage respectively, and finally do calculation of the three track center values, thus successfully obtains the displacement performance of the micro-actuator in a simple way. The method is capable of testing the HGA's performance under lower operating voltage by moving the slider by a predetermined distance toward an off-track direction, which accordingly assists to identify three track center values and thereby ensures the method an accurate measurement.

Abstract: A head gimbal assembly includes a suspension including a suspension flexure. The suspension flexure includes a step plate mechanically formed in the suspension flexure. A micro-actuator is mounted to the step plate of the suspension flexure. The step plate is constructed and arranged to support the micro-actuator such that a substantially constant gap is maintained between a top support of the micro-actuator and the suspension flexure in use.

Abstract: A rotational micro-actuator (20) used in hard disk driver is disclosed. It comprises a frame (21) approximately in the shape of letter “S” and PZT pieces (28, 29) attached to said frame (21), wherein said frame (21) is formed with a central coupling portion (213) by which the micro-actuator (20) is coupled to a suspension tongue (177), and two pieces of said PZT (28, 29) are arranged in central symmetry manner about said central coupling portion (213) such that said micro-actuator (20) can rotate about said central coupling portion (213) in response to the driving signals applied to said PZT pieces (28, 29), thus cause the displacement of the head element secured to the micro-actuator (20) so as to achieve the fine positioning of the head element. With above configuration, the micro-actuator of this invention will not cause the resonance of the suspension base plate during operation. Thereby the servo bandwidth of the hard disk driver is expanded.

Abstract: A flexure is provided with a main body on which a wire for energizing a head slider is disposed. Head slider is mounted at the front end of the flexure. Two piezoelectric layer units, each including layered piezoelectric elements, are disposed so that two of the units sandwich a line that extends from head slider to a base portion of an arm member. A voltage can be applied individually to each of the piezoelectric elements. The shape of the piezoelectric layer units are changed by adjusting the voltage applied to each of the piezoelectric elements, thereby moving head slider freely.

Abstract: A piezoelectric element comprises a first laminated structure body and a second laminated structure body. Side surfaces of the first and the second laminated structure bodies that are parallel to a laminating direction both have at least a portion etched to form a recess so that a step distance is formed between sides of the two adjacent electrode layers that are parallel to the laminating direction. The design of the step distance of the present invention increases insulation resistance between the two adjacent electrode layers on the opposite surfaces of the piezoelectric layer, lowers reject rate, and reduce manufacture cost. The first and the second laminated structure bodies are symmetrically laminated and bonded together, thus optimizing force balancing performance. The recess of the first and second laminated structure body may be filled with insulation resin, which also increases insulation resistance between the two adjacent electrode layers of the piezoelectric layer.

Abstract: A micro-actuator for a HGA includes a frame having a pair of side arms and a connection plate that interconnects the two side arms at one end thereof; a PZT element attached to at least one of the side arms; and an electrical connection shifting device to connect with the PZT element and the connection plate physically. The electrical connection shifting device is electrically connected with the PZT element for shifting an electrical connection position of the micro-actuator with a suspension of the HGA from the PZT element to the connection plate. The invention also discloses a HGA and a disk drive unit with the micro-actuator.

Abstract: A HGA includes a suspension, a seed layer formed on a PZT holding region of a flexure of the suspension and a piezoelectric element deposited on the seed layer. The piezoelectric element is electrically connected with the suspension to form a PZT micro-actuator. The present invention simultaneously conducts the manufacture, mechanical assembly and electrical connection of the piezoelectric element and suspension, thus the present invention has simple operation process and short process time, high manufacture yield, sound mechanical, dynamic and static performance. In addition, the present invention firstly forms the seed layer on the flexure and secondly forms the piezoelectric element on the seed layer, wherein the seed layer is metallic material, metal oxide, non-metallic material, or inorganic salt, the seed layer enables to easily control the operation and assists to improve the performance of the HGA.

Abstract: A magnetic head support includes a slider on which a magnetic head is mounted; a suspension that supports the slider; and a pair of piezoelectric actuators that are arranged on sides of the slider other than a side on which the magnetic head is mounted so as to be opposed to each other. The piezoelectric actuators are fixed to the suspension and the slider, and cause the slider to undergo a rotational displacement.

Abstract: Methods for making devices comprise forming a plurality of transducers on a major surface of a wafer, including forming a plurality of solid layers each having a thickness that is less than one micron; dividing the wafer and the attached transducers into a plurality of units such that each of the units includes a portion of the layers and a substantially planar surface that is substantially perpendicular to the portion of the layers; and removing at least part of the substantially planar surface, including creating, for each transducer, at least one flexible element that is attached the transducer. Conventional problems of connecting a head to the flexure and/or gimbal are eliminated. The heads can be made thinner than is conventional and gimbals and flexures can be more closely aligned with forces arising from interaction with the media surface and from seeking various tracks, reducing torque and dynamic instabilities.

Abstract: A framing assembly with lower stiffness design and a method of manufacturing that framing assembly are disclosed. In one embodiment, a framing assembly pattern is cut from a piece of a thin planar material, such as metal. The pattern is then bent to form a framing assembly with a base piece, two arms, and supports for a connection plate. In an alternate embodiment, the base piece includes a rear support and a support base. In a further embodiment, excess material surrounding the pattern is cut away so as to allow the most efficient use of the material.

Abstract: A region of flexure layer, including slider mounting face coupled to offset mounting face for at least one piezoelectric device. The offset mounting face for piezoelectric device provides asymmetry between first contact region and second contact region. This is cost effective, reliable support for piezoelectric devices used for micro-actuation in hard disk drives. The slider moves based upon asymmetry of the offset mounting face coupled to the piezoelectric device twisting the slider mounting face. The invention includes flexure containing the region of the flexure layer. The invention includes head gimbal assembly including flexure, actuator arm including head gimbal assembly, and actuator assembly including actuator arm, and hard disk drive including actuator assembly. The invention includes manufacturing the region, the flexure, the head gimbal assembly, the actuator arm, the actuator assembly and the hard disk drive, as well as these products of the manufacturing processes.

Abstract: A disk drive slider positioner (180) includes a frame (184) having a pair of arms (216a, 216b) that cantilever from a base (188). A slider (140) is positioned within frame (184). A pair of slots (224a, 224b) extend down through the frame (184) and also extend along part of the corresponding arm (216a, 216b). Each slot (224a, 224b) includes a corresponding first slot section (228a, 228b) and a wider corresponding second slot section (232a, 232b). A material (240) that is more pliable than the frame (184) preferably occupies the entire length of each first slot section (228a, 228b). Excess first material (240) may overflow into the corresponding wider second slot section (232a, 232b), thereby reducing the potential for excess first material (240) occupying any portion of the space between a leading edge (144) of the slider (140) and the frame (188).

Abstract: A piezo in-tongue microactuator includes a suspension assembly with a flexure tongue. The tongue has two slots that accept piezo actuators. The tongue also has multiple hinge flexible elements that translate the extension and/or contraction of the piezo actuators into rotary motion of the recording head. This rotary motion is then used to precisely position the recording element over the desired track on the hard disk drive and permits higher track density to be achieved.

Abstract: A head slider includes a slider substrate, an actuator provided in an end portion of the slider substrate and equipped with a piezoelectric element, and a magnetic head disposed on a side opposite to the slider substrate with interposition of the actuator. The piezoelectric element has piezoelectric bodies polarized along a first direction connecting the slider substrate and the magnetic head. The piezoelectric element has electrodes which apply an electric field to the piezoelectric bodies along a second direction intersecting the first direction.

Abstract: A system and method using a framing assembly to provide support for a micro-actuator and allow the micro-actuator to be connected to a suspension assembly is disclosed. In one embodiment, the framing assembly consists of a base with two arms attached. In a further embodiment a crosspiece connects the two arms. In a further embodiment, the framing assembly is metal and have strips of piezoelectric material attached to the arms.

Abstract: A PZT micro-actuator for a head gimbal assembly includes a pair of separate PZT elements and each PZT element has a body and a plurality of electrical pads. The body has at least two electrode-piezoelectric combination layers laminated together. The at least two electrode-piezoelectric combination layers are physically connected with but electrically isolated from each other. Each electrode-piezoelectric combination layer has at least two of the electrical pads thereon. The electrical pads extend out from the body of the corresponding PZT element. All the electrical pads of each PZT element are offset a predetermined distance therebetween to be electrically isolated. The present invention also discloses a head gimbal assembly (HGA) with the PZT micro-actuator, an assembling method for the head gimbal assembly and a disk drive unit having such HGA.

Abstract: A slider cradle for lateral positioning slider near rotating disk surface in hard disk drive, consisting essentially of piezoelectric micro-actuator coupling to slider cradle blank, further including piezoelectric micro-actuator coupling to first slider mount arm near slider mount and near slider mount base. A head gimbal assembly including slider cradle coupling to slider, flexure finger, and flexure finger electrically coupling to piezoelectric contacts. An actuator arm coupling to at least one head gimbal assembly. An actuator assembly, comprising voice coil coupling to at least one actuator arm. A hard disk drive containing actuator assembly. The invention includes a method of making slider cradle blank and slider cradle. The products of this process. Making head gimbal assembly, actuator assembly and hard disk drive using the invention's components. The head gimbal assembly, the actuator assembly, and the hard disk drive are products of these processes.

Abstract: A HGA of the invention includes a micro-actuator, a slider and a suspension to support the micro-actuator and the slider. The suspension comprises a flexure for mounting the micro-actuator thereon, a suspension tongue connected to the flexure and an independent spacer sandwiched between the suspension tongue and the flexure to form a parallel gap between the suspension tongue and the micro-actuator. Also disclosed is a disk drive unit having the HGA.

Abstract: A HGA of the invention includes a slider; a micro-actuator to adjust the position of the slider; and a suspension to load the slider and the micro-actuator. The micro-actuator includes two side arms; a load plate for supporting the slider, which is connected with at least one of the side arms; a piezoelectric element connected with the side arms; and a base shaft to couple with the suspension, which is connected with the side arms and positioned between the load plate and the piezoelectric element. The invention also discloses a disk drive unit using such a HGA.

Abstract: A HGA comprises a slider, a suspension to load the slider, a flying height controller for controlling flying height of the slider; and a flexible cable to be electrically connected with the slider and the flying height controller. In the present invention, the flying height controller comprises at least one piezoelectric piece disposed between the slider and the suspension. The HGA further comprises ACF to connect the flying height controller with the suspension and the flexible cable. The invention also discloses a disk drive unit with the HGA, a method for flying height control with the HGA, and a system for controlling flying height.

Abstract: A Head Gimbal Assembly (HGA) of the invention includes a slider; a micro-actuator to adjust the position of the slider; and a suspension to support the slider and the micro-actuator. The micro-actuator includes two side arms; a load plate for supporting the slider, which is connected with at least one of the side arms; a pair of piezoelectric (PZT) elements connected with the side arms; and a support shaft coupled with the suspension, the support shaft being connected with the side arms and positioned between the PZT elements. The invention also discloses a disk drive unit using such a HGA.

Abstract: An integrated flexure tongue micro-actuator is disclosed. One embodiment provides a first arm on a first side of the flexure tongue, the first arm approximately perpendicular with the flexure tongue. In addition, a second arm is provided on a second side of the flexure tongue, the second arm approximately parallel with the first arm. At least one piezoelectric device is coupled with either the first arm or the second arm and a slider is disposed between and coupled with the first am and the second arm.

Abstract: A suspension includes a flexure, a load beam, and a deformation-resistant plate positioned between the flexure and the load beam. The deformation-resistant plate has a holding plate portion for holding a slider through the flexure and a pair of beam portions. The beam portions each have a bent portion bent in a direction approximately perpendicular to the holding plate portion such that the deformation-resistant plate is configured into a three-dimensional structure. The three-dimensional structure of the deformation-resistant plate advantageously resists structural deformation, thus further enables the suspension to possess stable pitch and roll stiffness as well as small yaw stiffness. This not only assists the suspension to have good static performance and improved shock performance, but also assists the slider to rotate easily and to have desirable displacement when the micro-actuator is excited. The present invention also discloses a HGA with the suspension and a drive unit with such HGA.

Abstract: A magnetic head positioning mechanism is provided which is excellent in shock-resistance and can achieve high positioning accuracy. By constructing the magnetic head positioning mechanism so that a fine actuator section is composed of an actuator spring made from a thin steel plate, a base plate made from a thick steel plate to be junctioned to the actuator spring, stiffness of the fine actuator section in a vertical direction can be improved with flexibility of a driving spring section mounted on the actuator spring being still kept, that is, with sufficient positioning accuracy and satisfactory stroke being maintained. Moreover, by designing a strength of the fine actuator section so that the actuator spring and a holder arm do not overlap when the base plate is connected to the holder arm, the fine actuator section can be made thin and implementing of the fine actuator section among narrow plates in a positioning device is made easy.

Abstract: A method for loading single head in a hard disk drive includes the following steps: mounting a head assembly (30) in a baseplate (10) of a hard disk drive, the head assembly comprising an actuator arm (32), a suspension (34) and a HGA, the baseplate engaging a motor (110) and the HGA is positioned close to the motor; biasing the suspension by a mounting tool (50) from the original position, the mounting tool comprising a cantilever arm (52), a pressing head (54) and a supporting rod (56), wherein, the mounting tool rotates to the suspension and gets down to press the suspension; mounting a disk (90) on the motor in the baseplate; and releasing the pressing head from the suspension, loading the HGA of the head assembly to a parking zone of the disk.

Abstract: A micro-actuator for a head gimbal assembly includes a metal frame, PZT elements, and a rigid beam. The metal frame includes a top support adapted to support a slider of the head gimbal assembly, and a pair of side arms extending vertically from respective sides of the top support. The top support includes a rotatable plate and connection arms that couple the rotatable plate to respective side arms. A PZT element is mounted to each of the side arms. Each PZT element is excitable to cause selective movement of the side arms. The rigid beam is mounted between the side arms at an end opposite the top support.

Abstract: A micro-actuator for a head gimbal assembly includes a frame, a first set of bonding pads provided to one end of the frame, a second set of bonding pads provided to an opposing end of the frame, and a trace integrated to the frame. The trace interconnects the first set of bonding pads and the second set of bonding pads.

Abstract: A micro-actuator of the invention includes a support base having two actuator side arms and a rotatable bottom plate positioned between the actuator side arms; wherein at least one of the actuator side arms having a back-turned extension in a first end thereof; a pair of connection elements that connects the rotatable bottom plate to the actuator side arms in a second end thereof, respectively; at least one PZT elements bonded to the actuator side arms in its length and the back-turned extension. The rotatable plate rotates in a first direction when the at least one PZT elements expand, and a second direction when the at least one PZT elements contract. The invention also discloses a HGA and disk drive unit with such a micro-actuator.

Abstract: A thin film piezoelectric (PZT) micro-actuator is disclosed. Two thin film pieces of PZT are couple to a slider support frame. The slider support frame has a slider support connected by a leading beam to a base. The two thin film pieces of PZT connect the slider support to the base. Applied voltage causes the thin film pieces of PZT to contract or expand, moving the slider support in relation to the base. The thin film pieces of PZT can be single or multiple layers. The thin film PZT micro-actuator can be coupled to the suspension by anisotropic conductive film, with the thin film pieces of PZT between the slider support frame and the suspension. Alternately, the thin film PZT micro-actuator can be coupled to the suspension with the thin film pieces of PZT exterior to the slider support frame and the suspension.

Abstract: A micro-actuator includes a metal frame having two side arms, a top support arm and a bottom support arm respectively connected with the top ends of the two side arms. The two side arms are in parallel with and spaced from each other a distance adapted to hold a slider therebetween that is mounted on the top support arm. An isolation layer is coupled with each side arm of the metal frame; and a piezoelectric element is bonded with the isolation layer. When operating the micro-actuator, an electric sparking problem will not occur for existence of the isolation layer. The invention also disclose a method of manufacturing the micro-actuator, a HGA and disk drive unit with the micro-actuator.

Abstract: A pure rotary microactuator comprising a spring assembly etched within a silicon substrate is disclosed. A first piezoelectric device is coupled with a first portion of the spring assembly and a second piezoelectric device coupled with a second portion of the spring assembly. The first piezoelectric device changes shape in response to an electrical input signal, and this change in shape provides a first push force to the first portion of the spring assembly in a first direction. The second piezoelectric device also changes shape in response to the electrical input signal, and this change in shape provides a second push force to the second portion in a second direction, which is different from the first direction. The combination of the first and the second push forces rotates the spring assembly with respect to the silicon substrate.