Abstract: A head suspension with a piezoelectric element involves simple wiring and realizes high reliability, the head suspension has a base plate, a load beam connected to the base plate, a flexure attached to the load beam, and a piezoelectric actuator having a piezoelectric element arranged between the base plate and the load beam, the piezoelectric element is configured to deform according to a state of applied voltage and move a front end of the load beam in a sway direction according to the deformation, and the piezoelectric element has first and second piezoelectric parts that are oppositely polarized and deform according to a state of applied voltage, a common electrode formed over first surfaces of the first and second piezoelectric parts, a first electrode formed on a second surface of the first piezoelectric part, and a second electrode formed on a second surface of the second piezoelectric part.

Abstract: Embodiments of the present invention help to suppress reduction of the operation quantity of a microactuator. According to one embodiment, a microactuator comprises a silicon substrate and a piezoelectric element. The silicon substrate has some rigidity and provides elastic counter force to the piezoelectric element. In the piezoelectric element a secondary piezoelectric layer is laminated on a primary piezoelectric layer opposite from the silicon substrate. The contraction force of the secondary piezoelectric layer acts on the primary piezoelectric layer so that it bends toward the secondary piezoelectric layer opposite from the silicon substrate. When the primary piezoelectric layer expands, the contraction force of the secondary piezoelectric layer acts on the primary piezoelectric layer so that it warps against the primary piezoelectric layer.

Abstract: A head support mechanism includes a head to read/write information, and an actuator for moving the head. Flanges are provided on opposite sides of a load beam of the head support mechanism, and at least one recessed portion is provided on the load beam. A thickness of the load beam at the at least one recessed portion is smaller than a thickness at other portions of the load beam at least one of oscillation damping material and an IC circuit is arranged in the at least one recessed portion.

Abstract: A head gimbal assembly (HGA) for a disk drive unit that includes a micro-actuator, a slider and a suspension to load the slider and the micro-actuator. The micro-actuator is provided with a vibration canceller that counteracts forces generated by activation of the micro-actuator when making fine head position adjustments. The vibration canceller incorporates PZT elements that generate counteracting forces in the bottom plate of the micro-actuator to cancel the vibration generated by the micro-actuator, thereby providing improved resonance performance for a disk drive unit.

Abstract: Recessed grooves having planar adhesion surfaces and inclined surfaces over the entire thickness of a slider, the inclined having a surface width equal to an adhered portion width at an arm of a microactuator, and form an angle with respect to the horizontal plane. The slider and the actuator are joined with an adhesive disposed between the slider and the adhered portion of the microactuator arm.

Abstract: A robotic tool for assembling a portion of a disk drive includes a movable end effector that includes a first portion and a second portion that is movable relative to the first portion. The first portion may be configured to engage the actuator assembly and the second portion may be configured to engage the flex circuit connector. A controller may be provided to control the movable end effector, causing the end effector to pick up the head stack assembly in a first configuration, move the second portion of the end effector relative to the first portion thereof so as to articulate the head stack assembly into a second configuration that is different than the first configuration, and place the head stack assembly into the base.

Abstract: A hard disk drive using a micro-actuator assembly to position a slider over a track on a rotating disk surface. The micro-actuator assembly includes a first piezoelectric device and a second piezoelectric device, both mechanically coupled to the slider. The first piezoelectric device includes a first terminal electrically coupled to a first voltage line and a second terminal electrically coupled to a ground line. The second piezoelectric device includes a third terminal electrically coupled to a ground line and a fourth terminal electrically coupled to a voltage line. A voltage applied to the first voltage line stimulates only the first piezoelectric device to alter a lateral position of the slider over the rotating disk surface, and a second voltage applied to the second voltage line stimulates only the second piezoelectric device to alter the lateral position of the slider over the rotating disk surface.

Abstract: A method of testing a performance of a HGA including a magnetic head and a micro-actuator for precisely positioning the magnetic head with respect to a magnetic medium is disclosed. The key of the method is to obtain three track center values under conditions of no driving the micro-actuator, driving the micro-actuator in a positive direction using an operating DC voltage, and driving the micro-actuator in a negative direction using the operating DC voltage respectively, and finally do calculation of the three track center values, thus successfully obtains the displacement performance of the micro-actuator in a simple way. The method is capable of testing the HGA's performance under lower operating voltage by moving the slider by a predetermined distance toward an off-track direction, which accordingly assists to identify three track center values and thereby ensures the method an accurate measurement.

Abstract: An actuator assembly for use in a disk drive includes a first read head and a coarse actuator. The coarse actuator includes a coarse actuator body and a first actuator arm extending away from the coarse actuator body. The first actuator arm has a proximal end attached to the coarse actuator body and a distal end. The actuator assembly further includes a first microactuator attached to the distal end of the first actuator arm. The first microactuator supports the first read head. The actuator assembly further includes a first force-balancing microactuator attached to the distal end of the first actuator arm without any read head attached to the first force-balancing microactuator.

Abstract: A micro-actuator for a head gimbal assembly includes a support frame including a bottom support adapted to be connected to a suspension of the head gimbal assembly, a top support adapted to support a slider of the head gimbal assembly, and a leading beam that couples the bottom support and the top support. The leading beam includes weak points or notches that allow the top support to rotate about a rotational axis in use. A first PZT element is mounted between first sides of the top and bottom supports, and a second PZT element is mounted between second sides of the top and bottom supports. The first and second PZT elements are excitable to cause selective rotational movement of the top support about the rotational axis in use.

Abstract: A method for adjusting a performance parameter of a head suspension for positioning a read/write head in a disk drive. The suspension includes a beam and flexible element for carrying a read/write head extending from the beam. The flexible element has one or more adjustment portions. The beam has one or more openings adjacent to the adjustment portions of the flexible element to provide access to the adjustment portions through the beam. The method comprises acting upon one or more adjustment portions of the flexible element through one or more of the openings in the beam to change a performance parameter of the head suspension. A laser beam is used to irradiate the adjustment portions of the flexible element in one embodiment of the invention.

Abstract: A micro-actuator for a head gimbal assembly includes a U-shaped frame and a metal support frame. The U-shaped frame includes a bottom support, a pair of side arms extending from the bottom support, and a PZT element mounted to each of the side arms. Each PZT element is excitable to cause selective movement of the side arms. The metal support frame includes a top support adapted to support a slider, a bottom support adapted to be connected to a suspension, and a pair of side arms that interconnect the bottom support and the top support. The metal support frame is mounted to the U-shaped frame such that the side arms of the metal support frame are mounted to respective side arms of the U-shaped frame and the bottom support of the metal support frame is mounted to the bottom support of the U-shaped frame.

Abstract: A micro-actuator for a head gimbal assembly includes a support frame integrated with a suspension flexure of the head gimbal assembly, a block, and a pair of PZT elements. The support frame includes a bottom support, a top support adapted to support a slider of the head gimbal assembly, and a pair of side arms that interconnect the bottom support and the top support. The side arms extend vertically from respective sides of the bottom support and the top support. The block is mounted to the bottom support to provide resonance balance. Each PZT element is mounted to a respective side arm of the support frame and a respective side of the block. The PZT elements are excitable to cause selective movement of the side arms.

Abstract: A suspension comprises a load beam having a leading portion and a trailing portion, a gimbal sheet mounted to the leading portion and forming a first pad, a second pad, and a displacement lever assembly including at least a first lever arm having a first end adjacent and connected to the first pad and a second end opposite the first end and connected to the second pad. The displacement lever assembly is configured to translate a linear displacement of the first pad to a differing displacement of the second pad. The suspension comprises a piezoelectric element attached to the first pad and extending across the second pad.

Abstract: When a piezoelectric element is deformed in the direction of decreasing a flying height, a pressure at a trailing pad increases, and the flying height of a magnetic head is not efficiently decreased and may be increased conversely in some occasions. A position of contact between a suspension and a dimple is set toward a leading edge with respect to a piezoelectric element, and a pad for generating a positive pressure is disposed between the dimple and the piezoelectric element in addition to a trailing pad. Fluctuations of a positive pressure generated toward the leading edge with respect to the dimple are thus suppressed when the piezoelectric element is deformed.

Abstract: A suspension for a HGA includes a flexure having a tongue region and an out trigger. The out trigger has a pair of rigid beams and a pair of spring beams. The pair of spring beams enables the flexure to possess favorable flexibility and assists a slider to have enough displacement. The pair of rigid beams provides the flexure enough stiffness which not only successfully prevents the HGA with the out trigger from suspension deformation and dimple separation, but also assists to improve shock performance of the HGA. Furthermore, such configuration of the suspension provides the slider a good static performance and thus improves dynamic performance of the HGA. The present invention also discloses a HGA with the suspension, a manufacturing method of the HGA, and a drive unit with such HGA.

Abstract: A microactuated disk drive suspension for supporting a slider at a disk includes a load beam extending in a plane and having on a common axis a base section adapted for mounting to an actuator, a spring section and a beam section carrying a flexure and the slider thereon. The suspension has relatively movable proximate and distal portions on the common axis that are joined by a bending system cantilevered from the proximate portion and including a cantilevered bending motor opposed to the common axis and having a laterally bendable unsupported region. A cantilevered laterally bendable load assist structure defined by the suspension edges is provided arranged to block undue loading of the bending motor unsupported region.

Abstract: The invention relates to a microactuator comprising a movable structure having a symmetric axis about which the movable structure are divided into two parts which can produce the same movement but in opposite directions; two active arms built with piezoelectric material; two stationary structures to connect the two active arms at their two ends, respectively. The invention also relates to a disk drive suspension which is incorporated with the microactuator.

Abstract: Apparatus and method for selectively applying a voltage to one major surface of a pair of piezoelectric motors (PZTs) on a disk drive head suspension with a primary plane of a load beam of the head suspension parallel to the major surfaces of the PZT elements electrically insulated from the load beam. Electrical connections to the PZTs are made via wires, solder, conductive epoxy or electro-mechanical attachment of a plated surface of the PZT with a bond pad on an electrically isolated substrate. Lead extensions or separate pieces may be used to connect to the PZTs. The PZTs may be located on a major surface of the load beam, or may be assembled in a pre-fabricated motor assembly before being installed in the head suspension. Apertures in the load beam and other layers permit physical installation of the PZT motors and enable electrical connection to the PZTs.

Abstract: A HGA of the invention includes a slider, a micro-actuator for adjusting the position of the slider; a suspension to load the slider and the micro-actuator; and a vibration canceller interposed between the micro-actuator and the suspension. The micro-actuator includes a first base-part plate, a pair of actuator side arms extending from the first base-part plate in a first direction, and at least one of side arms has a piezoelectric element thereon. The vibration canceller includes a second base-part plate to connect with the micro-actuator and the suspension; and at least one canceling arm extending from the second base-part plate in the first direction or in a second direction, wherein at least one of canceling arms has a piezoelectric element thereon. The invention also discloses a disk drive with the vibration canceller.

Abstract: The supersonic cleaning of a magnetic head apparatus is executed while the control conductive pattern and the conductive leaf spring are electrically connected by means of soldering, and the conductive leaf spring is grounded. This makes it possible to prevent the accumulation of electrostatic charges in the piezoelectric elements on the magnetic head apparatus, thereby preventing the development of surge current or reducing the intensity thereof, and reducing the damage to the reproducing elements and the recording element mounted on the slider of the magnetic head apparatus.

Abstract: A head slider having a thin film magnetic head is mounted on a suspension assembly. The suspension assembly is comprised of a metal plate-like member, and a piezoelectric actuator for displacing the head slider relative to the suspension assembly. The piezoelectric actuator has a piezoelectric film, and a pair of electrode films placed so as to sandwich the piezoelectric film in between. The piezoelectric film and the pair of electrode films are formed in an order of one electrode film, the piezoelectric film, and the other electrode film on the plate-like member.

Abstract: A micro-actuator for a head gimbal assembly includes a metal frame including a bottom support adapted to be connected to a suspension, a top support adapted to support a slider, and a pair of side arms that interconnect the bottom and top supports. The side arms extend vertically from respective sides of the bottom and top supports. A PZT element is mounted to each of the side arms. Each PZT element includes two PZT portions supported by a PI substrate base. The PI substrate base includes one or more bridges that physically and electrically couple the two PZT portions. The bridges are bendable so that the two PZT portions sandwich the respective side arm when mounted thereto.

Abstract: A disk drive suspension has a load beam having a base, a flexure for carrying a slider, and a mount plate. The suspension mount plate has a first portion attachable to an actuator and movable by the actuator as the primary shifting force on the load beam, suitable for larger positioning movements. A second portion of the mount plate is attached to the load beam base and is movable relative to the mount plate first portion. A microactuator moves the second mount plate portion relative to the first mount plate portion as a secondary shifting force on the load beam, suitable for very small positioning movements.

Abstract: A disk drive flexure is provided. The disk drive flexure includes a first surface for coupling with a microactuator, the microactuator comprising a moving portion and a stationary portion wherein the moving portion and the stationary portion are integrated within a substrate and wherein the stationary portion is coupled to the first surface by an adhesive. The disk drive flexure further includes a spacer portion for maintaining a distance between the microactuator and the flexure such that the moving portion does not contact the flexure and wherein the spacer portion prevents the adhesive from contacting the moving portion of the microactuator.

Abstract: A micro-actuator for a head gimbal assembly includes a fixed portion connectable to a suspension of the head gimbal assembly and a movable portion connectable to a slider of the head gimbal assembly. A pair of frame ribs interconnect the fixed portion and the movable portion. A PZT element is mounted to each of the frame ribs. Each PZT element is excitable to cause selective movement of the frame ribs which causes movement of the movable portion to cause movement of the slider. A tongue is fixed to and extends from the fixed portion. The tongue is engagable with a pivot provided on the suspension of the head gimbal assembly. The tongue forms a gap between the movable portion and itself.

Abstract: A micro-actuator of the invention includes a support frame having a base, a moving plate, a leading beam to connect the base with the moving plate; and two slider holding arms extending from both sides of the moving plate; at least one piezoelectric element bonding to the support frame to connect a free end of the base with the moving plate; wherein the moving plate sways in a first direction or in a second direction when the at least one piezoelectric element is actuated. The invention also discloses a head gimbal assembly and a disk drive unit using the micro-actuator.

Abstract: A micro-actuator for use with an HGA and/or disk drive device (e.g., a small platform disk drive device) with the micro-actuator having a reduced mass suitable for improving shock performance, and/or methods of making the same are provided. In certain example embodiments, the micro-actuator may comprise a substantially U-shaped frame including a cavity capable of receiving a slider, with the frame including two side arms and a bottom support arm at least partially defining the cavity. The bottom support arm may have a reduced mass capable of providing improved shock performance and capable of conveying a high resonance frequency response at a low gain. The bottom support arm may be, for example, substantially rectangle shaped, substantially I-shaped, toothed, etc. Also, the bottom support arm may be less thick than the side arms.

Abstract: Systems and methods for reducing flexure distortion and/or gimbal separation for thin-film piezoelectric transducer (PZT) micro-actuators for head gimbal assemblies (HGA) of disk drive devices are provided. In certain example embodiments, a head gimbal assembly may comprise a suspension including a suspension flexure. The suspension flexure may include a micro-actuator mounting region. A micro-actuator may be mounted to the micro-actuator mounting region of the suspension flexure. At least one support may be formed on the micro-actuator mounting region, such that the support increases the stiffness of the suspension flexure. The supports may be a single bar-shape, two separated bar-shapes, circle-shaped, rectangle-shaped, cross-shaped, etc. The supports may be made of metal, and they may be formed by chemical etching.

Abstract: The invention is a moving-slider rotary piezoelectric microactuator as the secondary actuator for a dual-stage actuator disk drive. The microactuator has a substrate attached to the disk drive suspension and a rotatable frame that supports the slider, so the head-suspension assembly includes the suspension, the microactuator and the slider with attached read/write head. The rotatable frame is attached to a fixed post on the substrate by relatively stiff torsional springs. A piezoelectric driver having a fixed end attached to the substrate provides bidirectional linear displacement of its movable end. The microactuator has a displacement amplification mechanism that includes a connecting rod and a linkage that translates the linear displacement of the driver to amplified orthogonal linear displacement of the rod. The connecting rod is attached to the rotatable frame at a radial distance to cause rotary movement of the frame, and thereby cross-track displacement of the read/write head on the slider.

Abstract: A head gimbal assembly (HGA) for a disk drive unit that includes a micro-actuator, a slider and a suspension to load the slider and the micro-actuator. The micro-actuator includes a pair of actuator side arms, a PZT element extending between and connecting the actuator side arms; a rotatable plate positioned between the actuator side arms, wherein the slider is mounted on the rotatable plate; and a pair of connection elements that connect the rotatable plate to the actuator side arms, respectively. The rotatable plate rotates in a first direction when the PZT element contracts and a second direction when the PZT element expands.

Abstract: A method (and apparatus) for operating a disk drive apparatus. The method includes moving a movable member about a fixed position to move a read/write head coupled to a slider to a selected track on a disk. The selected track is at least one of a plurality of tracks. The method includes adjusting a position of the read/write head using an actuating device integrated on the gimbal. The actuating step moves the read/write head relative in a manner normal to the track on the magnetic disk to align the read/write head on the track using a finer and faster alignment of the read/write head than the moveable support member.

Abstract: A hard disk drive is disclosed comprising at least one disk rotatable about an axis, an actuator assembly moveable relative to the disk, a transducer positioned on the actuator assembly, an actuator signal line, a piezoelectric actuator element disposed on the actuator assembly and electrically interconnected to the actuator signal line, a processor, a sensor signal line and a piezoelectric sensor element for sensing a vibration. The piezoelectric sensor element is collocated with the piezoelectric actuator element and electrically interconnected to the processor by the sensor signal line. The piezoelectric actuator element is operable to move the at least one transducer relative to a surface of the disk. The piezoelectric sensor element is electrically isolated from the piezoelectric actuator element. A method for detecting a vibration in a hard disk drive actuator assembly is also disclosed.

Abstract: A micro-actuator for a HGA includes a frame having a pair of side arms and a connection plate that interconnects the two side arms at one end thereof; a PZT element attached to at least one of the side arms; and an electrical connection shifting device to connect with the PZT element and the connection plate physically. The electrical connection shifting device is electrically connected with the PZT element for shifting an electrical connection position of the micro-actuator with a suspension of the HGA from the PZT element to the connection plate. The invention also discloses a HGA and a disk drive unit with the micro-actuator.

Abstract: Systems and methods for identifying problems with PZT elements of micro-actuators are provided. In certain example embodiments, a voltage (e.g., a sine voltage) may be applied to a reference unit causing it as well as a test unit to vibrate. Characteristics of the respective resonances (e.g., frequency, amplitude, phase, etc.) may be compared (e.g., by a processor) to determine whether there are problems with the test unit. The reference unit may include an HGA or an HSA of a hard disk drive device. The test unit may include corresponding parts for inspection. Such techniques make it possible to detect problems with PZT elements when there is only one PZT element per micro-actuator.

Abstract: A piezoelectric actuated suspension with passive damping is disclosed for precision positioning of hard disk drive while reducing undesired shock vibrations. Along the longitudinal axis of an etched suspension, two piezoelectric actuators dispose near the base plate to provide a push-pull motion. The actuators have two main portions. The first portion is piezoelectric elements to provide active positioning. The second portion is viscoelastic damping layers underneath the piezoelectric elements for passive damping. The complementary parts such as stiff edge elements and optional soft boundary covers are used to enhance the actuating abilities of the actuators and prevent any contaminants of the viscoelastic layers from going into the clean sealed chamber of the hard disk drive, respectively.

Abstract: A system and method for connecting an actuator to a suspension element is disclosed. The actuator is electrically coupled using a silver paste. The silver paste is further covered by a coating application to provide structural support. A step, attached to either the actuator base or the suspension tongue, provides further structural support and maintains a gap between the actuator and the suspension element.

Abstract: A suspension for disc drive has a base portion including a base plate, a load beam, a pair of hinge members, a wired flexure, etc. The wired flexure has a metal base and a wiring portion on the metal base. The hinge members are fixed overlapping the rear end portion of the load beam and the front end portion of the base plate. The wired flexure extends through a gap between the hinge members and ranges over the load beam and the base plate.

Abstract: The present invention has an object to provide a small, light-weight, impact-resistant, high-accuracy, and low-cost piezoelectric actuator which can achieve a large displacement at a low drive voltage as well as an information storage device which incorporates the piezoelectric actuator and has high recording density. The piezoelectric actuator according to the present invention is equipped with a hinge plate 220 which has a central portion 221, two lateral portions 222 extending point-symmetrically from both ends of the central portion 221, and two limbs 223 extending point-symmetrically and non-linear symmetrically from both ends of the central portion 221 as well as with a piezoelectric element 210 which brings the two limbs 223 toward and away from each other.

Abstract: A first wiring connects a first actuator to a controlling circuit on a head slider. The second wiring connects the second actuator to the first wiring in parallel with the first actuator. A first rectifying element is inserted in the first wiring. A second rectifying element is inserted in the second wiring. When electric voltage is applied to the first and second wiring in a first direction, the electric voltage acts on the first wiring. Only the first actuator is allowed to receive the electric voltage. When electric voltage is applied to the first and second wiring in a second direction opposite to the first direction, the electric voltage acts on the second wiring. Only the second actuator is allowed to receive the electric voltage in the second direction.

Abstract: A disk drive with a dual-stage actuator has a moving-slider rotary piezoelectric microactuator as the secondary actuator. The microactuator has a substrate attached to the disk drive suspension. A rotatable frame that supports the slider is attached to a fixed post on the substrate by relatively stiff torsional springs. A piezoelectric driver having a fixed end attached to the substrate provides bidirectional linear displacement of its movable end. The microactuator includes a displacement amplification mechanism. In one embodiment an arm or connecting rod is located between the driver's movable end and the frame. A linkage between the movable end of the driver and a first end of the connecting rod translates the linear displacement of the driver to amplified orthogonal linear displacement of the rod. The second end of the rod is attached to the rotatable frame at a radial distance to cause rotary movement of the frame, and thereby cross-track displacement of the read/write head on the slider.

Abstract: A rotational micro-actuator (20) used in hard disk driver is disclosed. It comprises a frame (21) approximately in the shape of letter “S” and PZT pieces (28, 29) attached to said frame (21), wherein said frame (21) is formed with a central coupling portion (213) by which the micro-actuator (20) is coupled to a suspension tongue (177), and two pieces of said PZT (28, 29) are arranged in central symmetry manner about said central coupling portion (213) such that said micro-actuator (20) can rotate about said central coupling portion (213) in response to the driving signals applied to said PZT pieces (28, 29), thus cause the displacement of the head element secured to the micro-actuator (20) so as to achieve the fine positioning of the head element. With above configuration, the micro-actuator of this invention will not cause the resonance of the suspension base plate during operation. Thereby the servo bandwidth of the hard disk driver is expanded.

Abstract: A head gimbal assembly includes a suspension including a suspension flexure. The suspension flexure includes a step plate mechanically formed in the suspension flexure. A micro-actuator is mounted to the step plate of the suspension flexure. The step plate is constructed and arranged to support the micro-actuator such that a substantially constant gap is maintained between a top support of the micro-actuator and the suspension flexure in use.

Abstract: Micro-actuator assembly including micro-actuator mount coupled to micro-actuator bridge to provide merged footprint with slider and micro-actuator bridge gap. Flexure finger including micro-actuator assembly for coupling to slider. Head gimbal assembly including flexure finger coupled to the slider. A head stack assembly including at least one of the head gimbal assemblies coupled to a head stack. Hard disk drive including head stack assembly. The invention includes manufacturing the micro-actuator assembly, the flexure finger, the head gimbal assembly, the head stack assembly, and the hard disk drive, as well as these items as products of the invention's manufacturing processes.

Abstract: A micro-actuator for a head gimbal assembly includes a metal frame including a top support having a top surface adapted to support a slider, a bottom support having a bottom surface adapted to be mounted to a suspension, and a pair of side arms that interconnect the top support and the bottom support. Each of the side arms includes an outwardly facing surface adapted to be mounted to a PZT element. The top surface, the bottom surface, and/or the outwardly facing surface includes a partially etched notch.

Abstract: A head gimbal assembly includes a slider, a rotatable micro-actuator and a suspension to load the slider and the rotatable micro-actuator. The rotatable micro-actuator horizontally rotates the slider with a central portion of the slider as an axis, which includes a bottom plate to be connected with the suspension, two arm plates symmetrically disposed on the bottom plate with a central portion of the bottom plate as symmetry point and at least one piezoelectric pieces to be connected with the arm plates. Selectively, the amount of the arm plates can be four and four piezoelectric pieces to be connected with the four arm plates, respectively.

Abstract: A piezoelectric actuator with a reinforced bending mode to suppress bending resonance caused by extension/contraction movements of the piezoelectric actuator and a disk drive using the piezoelectric actuator are provided. A flexible substrate is separated by a slit. A first piezoelectric element unit and a second piezoelectric element unit, both showing extension/contraction displacement, are disposed on one of the slit-separated flexible substrates, respectively. A coupling portion is provided to couple the separated flexible substrates across the slit. The coupling portion is provided at a position corresponding to an antinode of a primary bending mode of the first and second piezoelectric element units being respectively fixed in both ends.

Abstract: A slider cradle for lateral positioning slider near rotating disk surface in hard disk drive, consisting essentially of piezoelectric micro-actuator coupling to slider cradle blank, further including piezoelectric micro-actuator coupling to first slider mount arm near slider mount and near slider mount base. A head gimbal assembly including slider cradle coupling to slider, flexure finger, and flexure finger electrically coupling to piezoelectric contacts. An actuator arm coupling to at least one head gimbal assembly. An actuator assembly, comprising voice coil coupling to at least one actuator arm. A hard disk drive containing actuator assembly. The invention includes a method of making slider cradle blank and slider cradle. The products of this process. Making head gimbal assembly, actuator assembly and hard disk drive using the invention's components. The head gimbal assembly, the actuator assembly, and the hard disk drive are products of these processes.

Abstract: Slider used to access data on rotating disk in hard disk drive, including vertical micro-actuator using shape memory alloy film perpendicular to air bearing surface and coupled to deformation region including read-write head. Slider further includes vertical control signal stimulating heating element coupled to film and/or second vertical control signal stimulating second heating element to alter vertical position. Flexure finger including micro-actuator assembly for coupling to slider, and possibly providing vertical control signal(s) to heating element(s). Head gimbal assembly including flexure finger coupled to the slider. A head stack assembly including at least one of the head gimbal assemblies coupled to a head stack. Hard disk drive including head stack assembly. The invention includes manufacturing the slider, the head gimbal assembly, the head stack assembly, and the hard disk drive, as well as these items as products of the invention's manufacturing processes.

Abstract: A PZT element of the present invention includes a laminated structure which is laminated with electrode layer and PZT layer alternatively to define a thickness direction; wherein each PZT layer is sandwiched between two adjacent electrode layers; and at least one support element provided on a side portion of the laminated structure and substantially extending along a longitudinal direction thereof; wherein the PZT element is bent at least towards a latitudinal direction thereof when being applied an electrical voltage thereon through the electrode layers. The invention also discloses a method of manufacturing the PZT element, a HGA and disk drive unit with the same.