Abstract: An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface.

Abstract: In various aspects of the disclosure, a semiconductor substrate processing system may include an electrostatic chuck for holding a semiconductor substrate attached to an electrically insulating carrier; and an AC power supply electrically coupled to the electrostatic chuck.

Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 1011 ohms per square.

Abstract: In an ionizer, two output resistors are connected to a needle electrode through a switch unit. DC high voltage generating circuits, respectively, generate DC high voltages continuously during operation of the ionizer. A first switch and a second switch, which constitute the switch unit, are turned ON in mutually different time bands, respectively.

Abstract: Described is a corona ignition device comprising an insulator, a housing that is closed at its front end by the insulator, a center electrode that protrudes out of a front end of the insulator and has at least one ignition tip, wherein the insulator protrudes out of the housing and widens outside of the housing. The insulator curves in a dome-shaped manner over the front end of the housing.

Abstract: This disclosure describes embodiments of an air treatment apparatus that stimulates formation of large moisture droplets from small moisture droplets found in air flowing in power generating systems to a turbo-machine. In one example, the embodiments generate a field that promotes contact between the smaller moisture droplets. This contact can increase the size of moisture droplets to facilitate condensation of moisture out of the air.

Abstract: An electrical collecting cover for covering an electrostatic gun is disclosed. The electrical collecting cover includes a connecting portion for connecting with a main body of the electrostatic gun, a shielding portion connected to the connecting portion for shielding the main body of the electrostatic gun, a sleeve portion connected to the shielding portion for sheathing with a discharging head of the electrostatic gun, and an electrostatic discharge portion connected to the sleeve portion and located on a side of the discharging head for guiding static electricity from the discharging head of the electrostatic gun as the sleeve portion sheathes with the discharging head of the electrostatic gun.

Abstract: The invention concerns environmentally compatible methods and apparatuses for local modification of atmosphere, and in particular, for causing precipitation, dissipating fogs and/or clouds, removing air-pollutants in a target area. SUBSTANCE: the method involves applying air ionizers (1a, 1b, 1c) to generate ion flows into atmosphere to form convective flows and/or spatial charges. To control characteristics of the ion flow, it is proposed to use one or multiple air ionizers (1a, 1b, 1c) provided with variable-inclination electrode working cells. EFFECT: wide application of an air ionizer (1) with variable layout (inclination angle) of the electrodes in weather condition modification over a target area.

Abstract: An electrostatic device or system includes electrode(s) adapted to produce an electrostatic attraction force and a base surface adapted to facilitate the application of the electrostatic attraction force and also a physical attraction force separate therefrom. The electrostatic and physical attraction forces can maintain a position of the electrostatic device relative to a foreign object via electroadhesion and/or via an additional manner that is separate from the electroadhesion. The physical attraction force can be a vacuum, van der Waals, and/or adhesive force, can be applied at less than all locations across the base surface, and may involve a one-time permanent attachment. The base surface can include a deformable surface portion that moves closer to the foreign object when the electrostatic or physical attraction force is applied. The physical attraction force can be sufficient to adhere the device to the object when the electrostatic attraction force is removed.

Abstract: An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck. A plasma resistant dielectric layer covers the metal layer.

Abstract: An indoor located air distribution device for providing distribution of purified supply air to a service area. The air distribution device with air purifier can reduce the amount of bacteria, viruses, and bad spores inside the service area, can minimize the spreading of bacteria, viruses and spores, and can create overall healthier conditions in the service area. With low energy usage and maintenance cost, an air supply unit with built-in bi-polar air purifier can improve the quality of room breathable air, minimize the amount of outside air in total supply air, and decrease the usage of energy (heating/cooling) and electricity.

Abstract: A computer implemented method, apparatus, and computer usable program code for brokering a charging process of an electric vehicle. In one embodiment, a process extracts event data associated with the charging process from a charge notification in response to receiving the charge notification indicating that the charging process of the electric vehicle is complete. The event data may include, but is not limited to, duration of the charging process, quantity of electricity transferred, or rate at which electricity was transferred during the charging process. The process then identifies, from an energy transaction plan, a set of payees participating in the charging process. Thereafter, the process disburses a payment owed to the set of payees. An amount of the payment is calculated using payment terms in profiles of the set of payees. The payment includes funds from at least one of a payer fund and an incentive fund.

Abstract: A Virtual Photon Energy Amplification circuit for harnessing force or electrical energy from virtual photons existing in a quantum state by means of a discrete electric field circuit and a discrete magnetic field circuit having a capacitor transformer circuitry arrangement therein.

Abstract: In an ion generator, a flexible discharge electrode 44 composed of one wire is provided to a base 43, and a turning motion of a free end 44b of the discharge electrode 44 about a fixed end 44a of the discharge electrode 44 is performed by repulsive force of a corona discharge generated by supplying a high voltage to the fixed end 44a. Therefore, in comparison with a discharge electrode composed of a bundle of thin wires, it is possible to significantly reduce dust emission from the free end 44b of the discharge electrode 44, and to further improve the ion generator 30 in maintenance interval. Since the discharge electrode 44 is compose of one wire, it is possible to reduce the discharge electrode 44 in size, easily observe the state of the discharge electrode 44, and simplify its maintenance. Since the discharge electrode 44 performs a turning motion, it is possible to transport the generated air ions EI to a wide area of a packaging film 10, and to enhance ionizing efficiency.

Abstract: The present invention relates to an ionizer, a static charge eliminating system, an ion balance adjusting method, and a workpiece static charge eliminating method. In an ionizer, when positive and negative voltages are applied to an electrode, an amplitude Vm of the negative voltage is set to be smaller than an amplitude Vp of the positive voltage, and further, the time Tm for which the negative voltage is applied to the electrode is set to be longer than the time Tp for which the positive voltage is applied thereto.

Abstract: A corona igniter (20) comprises a central electrode (22) surrounded by an insulator (24), which is surrounded by a metal shell (26). A ceramic combustion seal (30) is disposed along the gap (32) between a shell lower end shell (52) and the insulator nose region (48) to provide a hermetic seal therebetween. The ceramic combustion seal (30) is typically a bushing, cylinder, or ring formed of sintered alumina. A glass material or glass/ceramic mixture (60) typically adheres the ceramic combustion seal (30) to the shell (26) and the insulator (24). Alternatively, the ceramic combustion seal (30) is brazed to the shell (26), and the glass material or glass/ceramic mixture (60) adheres the ceramic combustion seal (30) to the insulator (24).

Abstract: In an embodiment, a self-defense system is disclosed. The self-defense system may include or comprise a material sized to conform to an appendage, and a defense unit coupled with the material and positioned to initiate a defense event in response to an input.

Abstract: An electrostatic chuck includes: a ceramic substrate; a ceramic dielectric body provided on a top side of the ceramic substrate and having a first major surface where a processing target substrate is to be mounted; and an electrode provided between the ceramic substrate and the ceramic dielectric body. A material of the ceramic dielectric body is a ceramic sintered body. A plurality of protrusions and a groove for supplying a gas are provided on the first major surface of the ceramic dielectric body. A through hole is provided in a bottom face of the groove, the through hole penetrating to a second major surface of the ceramic substrate on a side opposite to the first major surface. A distance between the electrode and the groove is greater than or equal to a distance between the electrode and the first major surface.

Abstract: An electrostatic chuck for manufacturing a flat panel display is disclosed. In one embodiment, the electrostatic chuck includes i) a base substrate, ii) an insulating layer formed on the base substrate and iii) a conductive layer formed on the insulating layer and electrically connected to a power device. The electrostatic chuck further includes a dielectric layer formed on the conductive layer and including an emboss part and a trench part surrounding the emboss part. The emboss part comprises a plurality of contact parts and at least one protrusion. The trench part includes at least one channel. The contact parts and the protrusion have different shapes. The electrostatic chuck further includes a cooling gas line extending through the base substrate, the insulating layer, the conductive layer, and the dielectric layer.

Abstract: By directly connecting, ballast to an emitter electrode of an ion generator (e.g., a corona-discharge device), a rapid and self-corrective reduction in emitter-to-collector voltage may be provided responsive to an increase in current characteristic of incipient sparking discharge. Voltage levels in the emitter-to-collector gap can be rapidly reduced based on voltage drop across the ballast that, while negligible under nominal ion current conditions, transiently increases in the event of a sparking discharge. As a result, the portion of supply voltage (typically multi-KV supply voltage) across the emitter-to-collector gap is transiently reduced to levels below a current breakdown voltage and, indeed, field intensity proximate to the emitter is transiently reduced below levels otherwise necessary to sustain ion generation.

Abstract: A method for controlling an ionization device for ionizing air for the ventilation of motor vehicle interiors. The ionization device releases ions of a first ion type at least intermittently. In addition, the ionization device is operated at least intermittently in at least one regeneration mode.

Abstract: An ionizer includes two needle electrodes, and a high voltage generating unit for applying a first AC voltage to one of the needle electrodes, and for applying a second AC voltage, having a frequency higher than a frequency of the first AC voltage, to another of the needle electrodes. Static charge of a charged body is eliminated by releasing generated positive ions or negative ions, which are generated in the vicinity of the needle electrodes, toward the body.

Abstract: An ion generator is disclosed. The ion generator has improved portability and ion generation efficiency. As is apparent from the above description, the ion generator according to the present invention is configured so that the discharge unit is constituted by the felts, and the piezoelectric element, not the coil type transformer, is used in the high voltage generation unit which generates high voltage. Consequently, the present invention has the effect of improving portability of the ion generator and the present invention has the effect of improving ion generation efficiency although the portability of the ion generator is improved by configuring the ion generator according to the present invention so that the discharge unit is constituted by the felts, and the piezoelectric element, not the coil type transformer, is used in the high voltage generation unit which generates high voltage.

Abstract: An electrostatic chuck includes an isolating substrate that surrounds at least one electrode; multiple protrusions having upper portions arranged to contact a wafer; and at least one discharging element positioned between the at least one electrode and the upper portions of the multiple protrusions; which discharging element, once coupled to a discharging circuit, is arranged to discharge charge accumulated in the isolating substrate.

Abstract: A method and apparatus for transmission of charged particles along a laser-induced conduction path of concentric plasma channels in atmosphere. The apparatus comprises a high power laser array in operable communication with a high energy output means to accomplish initiation of at least two concentric plasma channels in atmosphere, a second energy source for outputting the charged particles to be transmitted, and means for introducing the charged particles to be transmitted into the wall of at least one of the laser-induced conduction channels. Other embodiments further include means for inducing the energy across the conduction path to a target capable of receiving and storing the energy, and a plurality of charging rods bearing a negative or positive charge and in communication with each conductive channel for shaping and stabilizing the charge transmitted therethrough.

Abstract: An ion generating device generates O2?(H2O)n (where n is a natural number) as negative ions and H+(H2O)m (where m is a natural number) as positive ions, and discharges those ions into the air so that airborne germs are killed through an oxidation reaction by hydrogen peroxide H2O2 or radical hydroxyl OH generated through as an active species a chemical reaction between the negative and positive ions. Satisfactory sterilization is achieved when the negative and positive ions are generated in such a way that the concentrations of the negative and positive ions are both 10,000 ion/cc at a distance of 10 cm from the point at which they are generated.

Abstract: An embodiment of the invention provides a method for generating ions within a space separating an emitter and a reference electrode, the method comprising: generating a variable number of small sharp pulses and rate of the pulses depending on the distance of the target from the emitter.

Abstract: An ionizer mechanism includes a corona electrode and a counter electrode positioned with respect to one another. The counter electrode includes a first layer of a porous, open cell foam material with a medium-to-high intrinsic resistance. The counter electrode has a point contact resistance that is at least two orders of magnitude greater than a broad contact resistance of the counter electrode. Charged particles produced by the ionizer mechanism are introduced to a combustion reaction to impart an electrical charge onto the combustion reaction.

Abstract: A charged particle generator includes a first electrode, a second electrode, and an insulating material that is provided between the first electrode and the second electrode. Charged particles are generated by discharge that occurs between the first and the second electrodes. The first electrode, the insulating material, and the second electrode are arranged in a first direction. The second electrode has a shape that does not intersect a path along which the charged particles move in a second direction perpendicular to the first direction.

Abstract: A static electricity removing apparatus for removing static electricity of a charged object comprises a discharge electrode which generates an ionized air having a polarity opposite to that of the object by discharge, an auxiliary electrode which is provided with openings for the ionized air generated by the discharge electrode to pass through, and an electric field forming means which forms an electric field in a space between the auxiliary electrode and the object. The electric field forming means generates the electric field between the auxiliary electrode and the object by allowing a potential having a polarity opposite to that of the object to occur in the auxiliary electrode at the start of the static electricity removal and decreases the electric field between the auxiliary electrode and the object when an absolute value of the potential of the object is equal to or less than a predetermined value.

Abstract: An object of the present invention is to provide an ionizer having a cleaning system for cleaning an electrode needle of the ionizer automatically or remotely, while also being compact in size. The cleaning system (6) has a rotating member (61) configured to coaxially rotate with the fan (3), a plurality of rods (62a to 62d) attached to the rotating member (61) such that each rod extends radially from the rotating member, and brushes (63a to 63d) each attached to the end of each rod. The rotating member (61) is driven by an electromagnetic solenoid (64) via a coupling means (66).

Abstract: A multi-sectional linear ionizing bar with at least four elements is disclosed. First, disclosed bars may include at least one ionization cell with at least one axis-defining linear ion emitter for establishing an ion cloud along the length thereof. Second, disclosed bars may include at least one reference electrode. Third, disclosed bars may include a manifold for receiving gas or air from a source and for delivering same past the linear emitter(s) such that substantially none of the gas/air flows into the ion cloud. Fourth, disclosed bars may include means for receiving the ionizing voltage and for delivering same to the linear emitter(s) to thereby establish the ion cloud. In this way, disclosed ionizing bars may transport ions from the plasma region toward a charge neutralization target without inducing substantial vibration of the linear emitter and without substantial contaminants from the gas/air flow reaching the linear emitter.

Abstract: Disclosed are a system and method for discharging electrical potential into the earth to disable or destroy electronics and/or explosive devices. The disclosed system includes an electrical power supply providing a pulsed electrical potential exceeding 30,000 volts with at least 30 Joules of energy in each pulse. The system includes a cathode emitter and an anode emitter configured to be moved along the earth in close proximity to the earth. The electrical potential is discharged into the earth through the cathode emitter and/or the anode emitter.

Abstract: A method for generating ions is disclosed. The method includes generating AC high voltage using a stationary AC generator, applying the AC high voltage to one or more AC/DC voltage converters via capacitive air coupling between a high voltage terminal of the AC generator and one or more high voltage terminals of the AC/DC voltage converters. The method also includes rotating the AC/DC voltage converters, each AC/DC voltage converter connected to an air ionizing electrode that rotates with the AC/DC voltage converter it is connected to when that AC/DC voltage converter is rotated, relative to the AC generator, in an air flow. The method further includes providing additional capacitive air coupling between a low voltage terminal of the AC generator and one or more low voltage terminals of the AC/DC voltage converters, and multiplying the voltage output of the AC/DC converters. An ion generator is also disclosed.

Abstract: The present invention provides methods and systems for an ion generator device that includes a base, a first and second pair of spaced-apart, opposed sidewalls projecting from the base to collectively form an interior storage compartment and to define an upper edge, a top portion engaged to the upper edge, at least one high voltage wire extending from the device, and a power supply for providing a voltage to the high voltage wire for producing ions.

Abstract: In an ionizer, two output resistors are connected to a needle electrode through a switch unit. DC high voltage generating circuits, respectively, generate DC high voltages continuously during operation of the ionizer. A first switch and a second switch, which constitute the switch unit, are turned ON in mutually different time bands, respectively.

Abstract: The present invention provides a microplasma jet generator capable of stably generating a microplasma jet in a microspace at atmospheric pressure with low electric power. The microplasma jet generator is driven with a VHF power supply to generate an inductively coupled microplasma jet and includes a substrate, a micro-antenna disposed on the substrate, and a discharge tube located close to the micro-antenna. The micro-antenna has a flat meandering shape with plural turns.

Abstract: A sterilizing apparatus and an ion generating apparatus, which generate sufficient amount of cations in a short period of time and also maintain the amount of ions generated at a level that is harmless to the human body. The sterilizing apparatus and the ion generating apparatus optimize the position of an electrode to maximize the generation of active hydrogen. The ion generating apparatus includes a first electrode for generating hydrogen ions and a second electrode located such that the second electrode is separated from the first electrode by a designated distance for generating electrons and superoxide anions. The hydrogen ions generated from the first electrode react with the electrons generated from the second electrode to produce hydrogen atoms, and the hydrogen atoms react with the superoxide anions generated from the second electrode to sterilize the air.

Abstract: An efficient and safe ionizer is disclosed. The ionizer includes a circuit to generate high voltage, a circuit case to surround the circuit, an electrode disposed outside of the circuit case and caused to discharge electricity by the high voltage generated by the circuit to ionize molecules in air, and an electrode cover disposed at a portion around the electrode.

Abstract: An ion diffusing apparatus is disclosed which can maintain a stable ion supplying capability. In the ion diffusing apparatus, the ion generator is detachable for easy maintenance and can deliver the positive ions and negative ions to a remote position while uniformly generating positive ions and negative ions. The ion diffusing apparatus includes an ion generator housing which houses the generator so that a positive ion generating part and a negative ion generating part are provided separately in a direction crossing a flow direction of a stream from a fan, and an ion generating surface is exposed which conforms to a stream flow surface of a stream flow passage extended from the fan to a supply opening. The ion generator may also be a cartridge which has an ion generating surface shaped to conform to the stream flow surface of the stream flow passage.

Abstract: A method and a device for automatic positive and negative ion balance control in a bipolar ion generator. The method may include applying bias voltage from a bias voltage source to a bias electrode from a power supply that includes an AC voltage generator and a voltage multiplying circuit of at least one cascade. The method may also include controlling a bias current flowing through the bias electrode for the purpose of stabilization of that current, wherein the step of controlling of the bias current is performed during charging of a capacitor in the voltage multiplying circuit.

Abstract: A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s).

Abstract: The present invention provides a method and apparatus for the dry fluxing of at least one component and/or solder surface via electron attachment. In one embodiment, there is provided a method for removing oxides from the surface of a component comprising: providing a component on a substrate wherein the substrate is grounded or has a positive electrical potential to form a target assembly; passing a gas mixture comprising a reducing gas through an ion generator comprising a first and a second electrode; supplying an amount of voltage to at least one of the first and second electrodes sufficient to generate electrons wherein the electrons attach to at least a portion of the reducing gas and form a negatively charged reducing gas; and contacting the target assembly with the negatively charged reducing gas to reduce the oxides on the component.

Abstract: Aspects of this disclosure relate to coupling and decoupling a power source of a device with circuitry within the device. For example, in aspects of this disclosure, when a short develops within the device, a switch circuit may decouple the power source from the some of the circuitry within the device. Decoupling the power source when a short develops may extent the operational time of the power source, and may reduce thermal excursion.

Abstract: An ion-generating device has a positive electrode pair and a negative electrode pair. The positive electrode pair and the negative electrode pair are disposed in a casing with a space interposed therebetween, such that an induction electrode in the positive electrode pair and an induction electrode in the negative electrode pair are separated from each other. It is thereby possible to obtain an ion-generating device and an electrical apparatus, capable of efficiently emitting both of positive ions and negative ions to an outside of the device, and easily achieving reduction in size and thickness.

Abstract: A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source.

Abstract: Methods and apparatus (40) to neutralize the charge on a moving web (42) by splitting the field present on the web (42). One portion of the field is removed by a grounded element (55a, 55) proximate to, and optionally contacting, one side of the web (42). Proximate the opposite side of the web, the apparatus includes an ion source (57a, 57b, 57c), which provides ions to the web (42) to neutralize the charge remaining on the web (42), and a second grounded element (50a, 50b, 50c) positioned between the ion source (57a, 57b,57c) and the web (42). The methods provide a web (42) that is net neutralized and is also dual-side or bipolar neutralized.

Abstract: A collapsible, high voltage electrical discharge generator uses a set of telescoping winding sections to achieve a compact form suitable for efficient transport, storage and deployment. The winding sections have two typical arrangements, fully collapsed and fully extended. In the fully collapsed mode the sections can be telescoped together into a nested configuration, thus occupying a small fraction of the volume of a fully extended system. The towers can be erected into the fully extended mode by applying internal pressure, or alternatively by using mechanical linkage to simply extend the telescoped stack of winding sections into position. Fully extended and connected, the individual sections perform as a large, continuous inductive element capable of generating very high voltages at the top of the tower for use in testing equipment and producing long electrical discharges.

Abstract: In one embodiment, an air current generating apparatus includes: a dielectric substrate exposed to gas: a first electrode disposed inside the dielectric substrate; a second electrode disposed near a surface of the dielectric so as to correspond the first electrode and having a sharp shape; and a power source applying a voltage between the first and second electrodes and plasmatizing part of the gas to generate an air current.

Abstract: In an ion generation apparatus, an induction electrode for generating positive ions and an induction electrode for generating negative ions are each formed as an independent part and separately mounted on a substrate. Therefore, even if the substrate is warped with changes in temperature, tip end portions of needle electrodes can be positioned at the centers of through holes in the induction electrodes, respectively, and positive ions and negative ions can be stably generated.