Abstract: A flow-through cavitation device having an elongated housing with an inlet and an outlet. An inner annular body and an outer annular body are concentrically and nestingly disposed in the elongated housing. The outer annular body is fixed relative to the housing and the inner annular body is rotatable about a longitudinal axis of the housing. Each annular body has a plurality of channels that pass therethrough. Rotation of the inner body relative to the outer body provides for selective alignment or misalignment of the plurality of channels to control fluid flow from the inlet to the outlet. The device may have a plurality of pairs of inner and outer annular bodies as described.

Abstract: A flow-through cavitation device having an elongated housing with an inlet and an outlet. An inner annular body and an outer annular body are concentrically and nestingly disposed in the elongated housing. The outer annular body is fixed relative to the housing and the inner annular body is rotatable about a longitudinal axis of the housing. Each annular body has a plurality of channels that pass therethrough. Rotation of the inner body relative to the outer body provides for selective alignment or misalignment of the plurality of channels to control fluid flow from the inlet to the outlet. The device may have a plurality of pairs of inner and outer annular bodies as described.

Abstract: Planetary gear mechanisms require internal toothed gears in housings. A drive rotor and driven rotors are accommodated in a mixing space in a housing, and chemical inflow paths to the mixing space are formed in an upper portion of the housing. A mixture outflow path is formed in a lower portion of the housing. The mixing space is formed to allow the drive rotor and the driven rotors to rotate and to regulate the positions of the drive rotor and the driven rotors. Meshing the drive rotor with the driven rotors allows the driven rotors to rotate opposite to the rotating direction of the drive rotor accompanying the rotation of the drive rotor while the lower ends of the driven rotors are located above a bottom portion of the mixing space and the upper ends of the driven rotors are located below the lower surface of the lid body.

Abstract: A gas delivery system and method for delivering reactants such as a first gas through a first conduit and a second gas through at least one second conduit, for example, through a plurality of second conduits. The plurality of second conduits may each have a length, wherein at least a portion of the length is entirely disposed within the first conduit. In an implementation, the first conduit may deliver carbon monoxide and the one or more second conduits may deliver carbon monoxide doped with a catalyst such as iron pentacarbonyl. The first and second gases may be introduced into a reaction vessel such as a reactor chamber and used to form carbon nanotubes.

Abstract: Embodiments of the present invention can include a turbidity measuring device. Typically, the turbidity measuring device can include a fluidic module and a measurement module. The measurement module can removably couple to the fluidic module and be implemented to measure a turbidity of a liquid passing through the fluidic module. The fluidic module can include a sub-assembly that can form a deaerator within the fluidic module. In one instance, the deaerator can be implemented to separate entrained air and/or other gases from a continuous flow of liquid by means of nucleation before the liquid is assayed.

Abstract: A method for treating a mixture in a single-shaft or multi-shaft mixer (M), especially a kneader-mixer, especially for preparing a spinning solution. A solvent or solvent mixture is added to the product over the length of a product chamber in order to reduce a viscosity of the solvent or of the mixture and to increase an evaporative capacity. The viscosity of the solution or of the mixture is determined and/or modified in predetermined locations in the product chamber.

Abstract: A mixer (10) for preparing a dental material comprises a mixing barrel (17) and a mixing rotor (16), a mixer inlet (13, 14), and an outlet (15). The mixing rotor is rotatable about a rotation axis (A), and comprises four mixing paddle levels (21, 22, 23, 24) each comprising at least one mixing paddle. The mixing paddle levels are axially disposed over a portion of the mixing rotor with the paddle levels being axially spaced at a generally uniform paddle spacing. The mixing paddles further have a thickness in the dimension parallel to the rotation axis, and the ratio between the paddle spacing and the paddle thickness is at least 2:1, thereby maximizing the mixing efficiency, and minimizing energy consumption.

Abstract: A process of making a foamed conformable material by reaction injection molding comprises providing a first component from a first feed tank at a first flow rate, via a first conduit, to a mixing device; providing a second component from a second feed tank at a second flow rate, via a second conduit, to the mixing device, the second component reactive with the first component in the presence of a foaming agent; mixing the first component and the second component in the mixing device to form a reaction mixture; introducing the reaction mixture into an injection molding device; molding the reaction mixture to form a foamed conformable material; wherein the mixing of the reaction mixture is adjusted to achieve a desired average cell size of the foamed conformable material. The process can produce wellbore-conforming materials that can function to filter out sand or other undesirable fines from a formation.

Abstract: A mixing device for mixing a first and second material together to create an output mixture. The device includes a first chamber containing the first material coupled to a mixing chamber defined between a rotor and a stator. The rotor is disposed inside the stator and rotates therein about an axis of rotation. The first chamber houses an internal pump configured to pump the first material from the first chamber into the mixing chamber. The pump may be configured to impart a circumferential velocity into the first material before it enters the mixing chamber. At least one of the rotor and stator have a plurality of through-holes through which the second material is provided to the mixing chamber. Optionally, a second chamber is coupled to the mixing chamber. The second chamber may house an internal pump configured to pump the output material from the mixing chamber into the second chamber.

Abstract: Mixing apparatus and methods for the continuous production of monomer emulsions that may be used in the production of polymer dispersions by radical aqueous emulsion polymerization. The mixing apparatus can include a pipe-in-pipe injector (100) and a suitable rotor-stator mixer (102). Liquids are delivered to the rotor-stator mixer via an inner (110) and an outer (108) pipe in such a way as to substantially prevent feed inconsistencies in a feed ratio of the liquids prior to entering a mixing zone of the rotor-stator mixer for emulsion formation.

Abstract: A method and apparatus for the treatment of water and, more particularly, to the mineralization of water in order to improve pH, hardness, turbidity, and/or alkalinity is described. More particularly, a system is provided for the treatment of water that needs additional hardness, alkalinity, and/or pH adjustment while also meeting turbidity requirements. The use of sodium hydroxide and other methods for avoiding turbidity problems can be eliminated and/or minimized.

Abstract: A dynamic mixer for a plurality of fluid components contains a housing and a rotor element which is rotatably arranged in the housing, with the housing having one inlet opening for at least one component each and at least one outlet opening. A ring-shaped intermediate space is provided between the rotor element and the housing in which a mixing element connected to the rotor element is arranged. A seal for sealing the rotor element in the mixer housing is provided at the bearing location of the rotor element in the housing.

Abstract: An agricultural system including an emulsifier, an oils and additives tank, an oils and additives feed pump, a water tank, a water feed pump, a spray pump, and at least one spay nozzle, wherein the agricultural system is configured for shearing oil drops into oil droplets at a first mechanical shear stage of the emulsifier and forcing the oil, the additive, and the water by centrifugal force for shearing the oil droplets at a second mechanical shear stage of the emulsifier into oil emulsion droplets against a centrifugal force.

Abstract: A technique facilitates mixing operations by removing foaming that results from air entrained during mixing of constituents. A mixing system comprises a container body having an interior and an inlet through which material enters the interior for mixing. The container body also comprises a discharge through which the mixed material is delivered downstream. A mechanical foam breaker is disposed within the container body and extends upwardly a sufficient distance to extend through a surface level to which the material rises during mixing within the container body. The mechanical foam breaker is oriented to break down foam along the surface of the material as the material moves through the interior.

Abstract: Single-use cartridges for the storing and dispensing of dental two-component impression materials have a closable external chamber with a cylinder-shaped external wall, a cylindrical closable internal chamber that is arranged coaxially or eccentric therein, a mixing element including housing and mobile mixer that is to be mounted separately or connected firmly to the external chamber at its inlet end. Either the internal cylindrical chamber is arranged such that it can be rotated and forms the drive shaft for the mobile mixer part of the mixing element, or the drive shaft extends parallel to the central axis through the internal cylindrical chamber or forms the central axis. The content of the chambers can be dispensed by means of conveying means whose axial thrust motions can be controlled independent of each other.

Abstract: A vertical solid-liquid contact apparatus including a plurality of stirring chambers disposed vertically adjacent to each other in series, a plurality of partitioning plates each partitioning an adjacent pair of the stirring chambers and provided with a communicating hole for communication between the adjacent pair of the stirring chambers, and a liquid inlet and a solid inlet provided at an upper part and a lower part of the apparatus. Each stirring chamber having an inner side wall defining the stirring chamber, a radially ejecting stirring blade, and at least one baffle fixed on the inner side wall. The stirring blade and the baffle are positionally biased to a lower side of the stirring chamber. The apparatus provides a good uniformity of solid-liquid flows and a high contact efficiency, is also simple in structure and allows easy scale-up.

Abstract: A metering apparatus for introducing a powdery medium into a fluid includes a mixing vessel that can be filled with a fluid and a metering unit for the powdery medium. The metering unit has an inlet for the powdery medium, an inlet for a compressed gas and an outlet extending towards the mixing vessel, through which the powdery medium and the compressed gas can be discharged into the mixing vessel.

Abstract: A device for mixing and dispensing dental materials is provided, comprising a drive shaft for driving a mixer. The mixer is placeable on the drive shaft in a first and a second position, wherein in the first position a guiding section of the drive shaft is mated with an engagement section of the mixer, but an engagement section of the drive shaft is not engaged with the engagement section of the mixer, and in the second position the engagement section of the drive shaft is also engaged with the engagement section of the mixer.

Abstract: The present invention provides a device for handling fluids, and more particularly a merging apparatus for fluidic and microfluidic devices utilizing passive valving in conjunction with a single sensor to uniformly blend contributory working fluid streams. Symmetric and non symmetric embodiments with and without branch channels are described. The present invention also provides methods for merging liquids using the device of the invention.

Abstract: The present invention is directed to an in-line mixer for mixing a plurality of fluids to produce a mixed product. The mixer includes one or more mixing chambers, an impeller in each of the mixing chambers, one or more inlets coupled to injection valves for conveying the fluids into the mixing chamber, and an outlet for conveying the mixed product out of the mixing chamber. The in-line mixer is well suited to components, such as those used in making automotive OEM and refinish paints.

Abstract: A method and apparatus for pre-treating a cellulosic feedstock are disclosed. Embodiments of the method comprise conveying the cellulosic feedstock through an enclosed volume, adding moisture to the cellulosic feedstock simultaneously at multiple spaced-apart moisture injection points as the cellulosic feedstock travels through the volume, and heating the cellulosic feedstock as it travels through the volume to obtain a heated moistened feedstock. Embodiments of the apparatus comprise a shell defining a treatment chamber having a lower inner surface. The treatment chamber has an inlet and an outlet spaced longitudinally apart from the inlet to define an axial length. A conveyance member is housed within the shell and is configured to sweep the lower inner surface. A plurality of injection ports are provided in at least one of the shell and the conveyance member.

Abstract: A mixing device for mixing a first and second material together to create an output mixture. The device includes a first chamber containing the first material coupled to a mixing chamber defined between a rotor and a stator. The rotor is disposed inside the stator and rotates therein about an axis of rotation. The first chamber houses an internal pump configured to pump the first material from the first chamber into the mixing chamber. The pump may be configured to impart a circumferential velocity into the first material before it enters the mixing chamber. At least one of the rotor and stator have a plurality of through-holes through which the second material is provided to the mixing chamber. Optionally, a second chamber is coupled to the mixing chamber. The second chamber may house an internal pump configured to pump the output material from the mixing chamber into the second chamber.

Abstract: An apparatus for mixing a powdery medium with a fluid includes a mixing vessel which can be filled with the fluid and which has a feed for the fluid, an inlet for the powdery medium and an outlet for the fluid mixed with the powdery medium, and at least one mixing screen which divides the mixing vessel into a first section which includes the feed and a second section which includes the inlet.

Abstract: A mixer for mixing at least two-components of a dental material comprises a mixing rotor with a coupling for coupling with a drive shaft for driving the mixing rotor. Further a device for dispensing at least two components of a dental material comprises a drive shaft for driving a mixing rotor of a mixer. The coupling of the mixer and/or the device comprises at least one guiding ridge which preferably facilitates coupling to the drive shaft.

Abstract: The present invention is directed to an in-line mixer for mixing a plurality of fluids to produce a mixed product. The mixer includes one or more mixing chambers, an impeller in each of the mixing chambers, one or more inlets coupled to injection valves for conveying the fluids into the mixing chamber, and an outlet for conveying the mixed product out of the mixing chamber. The in-line mixer is well suited to components, such as those used in making automotive OEM and refinish paints.

Abstract: An apparatus for treating waste water comprises a mixing chamber including mixing members therein for mixing waste water and treatment chemicals therein and a separating chamber at the outlet of the mixing chamber for separating the flocculated contaminants and to provide a supply of clarified water. In a preferred embodiment, the chemicals are injected at sequential locations along an injection tube for sequential mixing of the chemicals with one another in the injection tube prior to the chemicals being injected and mixed into the mixing chamber for mixing with the waste water.

Abstract: The present invention relates to an apparatus, which can be part of a pre-treatment system in a plant for the production of fuels, e. g. bio-ethanol, derived from plant biomass, e. g. first generation crops, such as grain, sugarcane and corn or second generation crops such as lignocellulosic biomass. The invention relates to an apparatus for processing, such as fluffing and mixing, at least two media, such as a solid, e. g. biomass, and a fluid, e. g. steam, so as to rendering the first medium susceptible to efficient receiving of energy and/or mass which is provided by localized release of the second medium. Although the description of the present invention focuses on biomass, it is envisaged that the invention is generally applicable to control the mixing of at least two media by crossing their stream of while dispersing at least one of them.

Abstract: A tip (10) for mixing a plurality of components and for dispensing the mixture. The tip is particularly suited for use with a bulk supply of the components (11). The tip is further particularly suited for the mixing and dispensing of reactive materials. The tip (10) includes a housing (32) having a stator (31) positioned therein. The housing (32) includes a plurality of feeder channels (20, 21) that correspond to outlet channels of the bulk storage device. At least one of the feeder channels (20, 21) has a length dimension such that it extends into the outlet channel of the bulk storage device to prevent cross-contamination of the components held within the bulk storage device.

Abstract: An agitation method for mixing a solution and a solvent to precipitate a solid substance from the solution. The method includes preparing an agitation mixer including an agitation vessel, an impeller rotated in the agitation vessel, and a feed pipe connected to the agitation vessel and having a multiple pipe structure including an outer pipe and an inner pipe arranged in the outer pipe. A shearing clearance is formed in the agitation vessel between the impeller and the feed pipe. The method further includes shearing the solution and the solvent by rotating the impeller to precipitate the solid substance while feeding the solution and the solvent into the shearing clearance from the outer pipe and the inner pipe.

Abstract: A device for producing a multi-component compound, in particular for dental purposes, by mixing its components after they have been pressed out of cartridges which open into a dynamic mixer and are arranged exchangeably in the device, with a first motor for advancing all of the pistons assigned to the cartridges, and with a second motor for rotary driving of mixing elements in the mixer via a shaft, which is held in engagement with the mixer by spring pretensioning and can be pulled back from the mixer counter to the spring pretensioning, is characterized in that the shaft is provided with a radially extending projection which, by the spring pretensioning, is pressed onto a ramp-like upwardly sloping cam surface, which is provided on its foot with an abutment surface, of a toothed wheel, which is provided with saw-like teeth and is coaxial to the shaft, which toothed wheel, in a first angle direction in which the cam surface slopes upwards, is prevented from rotating by a catch and, in the second angle positi

Abstract: A device (100) for manufacturing ready-to-use knifing filler for spackling surfaces, in particular of motor vehicle bodies, by mixing a binder component and a hardener component to a pasty or fluid mixing material using a mixing device (1) consisting of a hollow cylindrical stator section and a rotor section rotatably accommodated, and an annular gap forming the mixing chamber formed between the rotor section and stator section.

Abstract: A mixing device for mixing a first and second material together to create an output mixture. The device includes a first chamber containing the first material coupled to a mixing chamber defined between a rotor and a stator. The rotor is disposed inside the stator and rotates therein about an axis of rotation. The first chamber houses an internal pump configured to pump the first material from the first chamber into the mixing chamber. The pump may be configured to impart a circumferential velocity into the first material before it enters the mixing chamber. At least one of the rotor and stator have a plurality of through-holes through which the second material is provided to the mixing chamber. Optionally, a second chamber is coupled to the mixing chamber. The second chamber may house an internal pump configured to pump the output material from the mixing chamber into the second chamber.

Abstract: A device for mixing two paste components, such as a dental impression substance and a catalyst, comprising a tubular housing, two inlet openings for the two paste components to be mixed, and an outlet opening for delivering the mixed paste, is presented. The housing consists of a premixing chamber at the front end and a tubular mixing chamber at the rear end. The two paste components are mixed first in the premixing chamber by a dynamic rotor and then mixed in the tubular mixing chamber by a twisted static shaft, resulting in a well mixed, bubble-free paste at the outlet opening of the housing.

Abstract: The present invention provides a food waste disposal system including a housing with a food waste introduction opening and a door receiving depression, the door for covering the food waste introduction opening, a prefabricated mixing basin disposed inside the housing and composed of a box-shaped upper body, a hemispherical lower body, and a rotational shaft axially installed on a horizontal central line of the prefabricated mixing basin, a plurality of prefabricated mixing wings engaged with the rotational shaft for cutting food waste into small pieces and agitating the food waste in the prefabricated mixing basin, a geared driving motor for driving the rotational shaft, in which a touch screen panel installed on an upper surface of the housing and a personal computer incorporate PLC Ethernet cards respectively therein so as to allow the food waste disposal system to be controlled from a distance using the computer, which is networked.

Abstract: A mixer adapted to mix a base and a catalyst to make a paste for dental castings has a holding body adapted to receive the components to be mixed through two inlets (3, 4). The components are conveyed into a mixing chamber (6) where a dynamic rotor (7) is present which, through suitable fins (12), allows mixing of the two components. Downstream of the dynamic mixing (7) along a feeding direction (A) of the material, a static-mixing structure (9) is also provided which is equipped with a predetermined number of shaped elements (10) to enable further mixing of the materials before the latter come out of the mixer.

Abstract: The invention relates to a dynamic mixer for mixing at least two paste components of different volume proportions. Said mixer comprises a housing with at least two inlet openings and at least one outlet opening, a mixer element being rotatably mounted in a mixing chamber of said housing. The housing has at least one delay chamber comprising a limiting wall that blocks the paste stream in the direction of flow and at least one opening that opens into the mixing chamber, said opening(s) being set back in relation to the limiting wall. The mixer is particularly suitable for mixing paste components with a relatively high viscosity of, for example, greater than 800 Pas.

Abstract: Sludge can be treated by placing it in a carrier sized for bulk shipment of sludge by road or by rail. An antipathogenic substance such as lime is mixed into the sludge located in the carrier in order to treat pathogens in the sludge. At least one mixer adapted for mixing sludge throughout the carrier is employed. A dispenser such as a conduit or a loader bucket can dispense the antipathogenic substance so that the mixer can mix the substance with the sludge. The sludge is transported in the carrier either before or after the mixing with the antipathogenic substance. The mixture of sludge and antipathogenic substance is allowed to remain in the carrier long enough to treat pathogens with the substance before unloading the sludge from the carrier at a destination established for utilization, storage, transfer or disposal of the sludge.

Abstract: The present invention is related to an apparatus for massaging and/or tumbling of a product with a drum and a shaft with paddles rotated by a motor.

Abstract: An arrangement for and a method of treating pulp, and a method of modernizing a pulp tower are disclosed. The arrangement and method relate to treating pulp in connection with high-consistency pulp towers, and especially to means (36, 42) for diluting pulp arranged substantially at the level of the smallest cross-sectional area between the parting member (31) and the wall (12) of the pulp tower (10).

Abstract: An applicator assembly for mixing, homogenizing and/or emulsifying two or more components is disclosed. The applicator assembly includes a housing configured to receive a motor and a power source, a fluid supply source operably connected to the housing, the fluid supply sources including at least a first and a second source of solution, and a nozzle assembly extending from the housing and in fluid communication with the fluid supply source, the nozzle assembly including a smooth impeller for mixing the at least first and second solutions.

Abstract: Superfine powder particles (70-400 mesh, mean average) are wetted in a processing unit that disperses the powder by impact with an impeller before substantial contact with a solvent, such as water. The impeller is provided with posts that extend the dispersion zone above the impeller to capture and disperse any powder that may accumulate on the top of the impeller. The impeller is driven by a variable speed motor to adjust the rotational speed of the impeller to increase the efficiency of wetting. Processing may be adapted to wetting of other superfine materials, such as clays.

Abstract: In a fluid mixing apparatus and a fluid mixing system including the apparatus, a micro-reactor has a plate sandwiched by a lid member and a receiving member. In the plate, a plate through hole, a slit cylindrical through hole, and an outer layer channel are formed, and three fluids flowing in the lid member are allowed to flow out in the same direction, respectively. Further, in the micro-reactor, the receiving member having a mixing channel having an outer periphery in the same form as an outermost periphery of the outer layer channel is provided detachably to the plate.

Abstract: A controlled cavitation device for mixing and heating of fluids in industries where sanitary conditions must be maintained. The device is easily disassembled for thorough cleaning and then easily assembled for continued operation. All internal surfaces are devoid of angles and are polished to food industry standards to maintain sanitary operation. The controlled cavitation device includes a cylindrical bearing housing for supporting a drive shaft that extends through each end of the bearing housing. An interior end plate is mounted to a C-face mount adjacent to the bearing housing and has a plurality of threaded bores around a periphery. A rotor is mounted adjacent to the interior end plate on the C-face mount. A housing assembly includes a cylindrical housing wall and is mounted on a swing arm assembly that is secured in place adjacent to the rotor.

Abstract: An apparatus and method for preparing and dispensing a liquid deicer. The apparatus and method allow deicer ingredients or precursors to be combined in an exothermic reaction to produce a heated deicer at the location where it will be used. In one implementation, potassium hydroxide and acetic acid are combined using the apparatus and method to make hot potassium acetate for use in numerous deicer applications, including deicing of airport runways.

Abstract: An apparatus and method for preparing and dispensing a liquid deicer. The apparatus and method allow deicer ingredients or precursors to be combined in an exothermic reaction to produce a heated deicer at the location where it will be used. In one implementation, potassium hydroxide and acetic acid are combined using the apparatus and method to make hot potassium acetate for use in numerous deicer applications, including deicing of airport runways.

Abstract: Disclosed is an applicator system for mixing, homogenizing and/or emulsifying two or more solutions and/or substances prior to application. The system includes a first and a second container of solution, a hand-held homogenizer having a homogenizing assembly and an applicator assembly configured to fluidly communicate the first and second containers with the homogenizing assembly. The solution from each container is mixed by the homogenizing assembly when the solution is dispensed from the containers. The applicator assembly may be integrally formed with the homogenizer and may be configured to include an outlet for dispensing the homogenized solution. The outlet may form an applicator tip or a connection for releasably securing a hose or tube. The homogenizing assembly may be integrally formed with the applicator and may include rotors and stators.

Abstract: The present disclosure is generally directed to systems and methods for applying liquid feed additives to a feed composition. In one embodiment, the system has a spray housing defining a spray chamber located adjacent a mix housing carrying a material composition. The mix housing defines a mix chamber, which contains an actuating device, such as an auger, that moves the material stream through the mix chamber. The mix chamber and spray chamber are in fluid communication. A spray nozzle is coupled to the spray housing and in fluid communication with an air source and liquid additive tank. The spray nozzle sprays a fog of air and liquid additive through the spray chamber and into the mix chamber, which gets deposited on the passing feed stream.

Abstract: The present invention relates to an apparatus for mixing of a chemical medium in gaseous or liquid state with a pulp suspension. The apparatus comprises a housing having a wall (2) that defines a mixing chamber (4), a first feeder (6) for feeding the pulp suspension to the mixing chamber, a rotor shaft (8, 104, 204, 300, 406, 502), that extends in the mixing chamber, a drive device for rotation of the rotor shaft, a rotor body (10, 200, 407, 504), that is connected to the rotor shaft and arranged to supply kinetic energy to the pulp suspension flow, during rotation of the rotor shaft by the rotation of the drive device, such that turbulence is produced in a turbulent flow zone (12) in the mixing chamber, a second feeder (13) for feeding of the chemical medium to the mixing chamber, and an outlet for discharging the mixture of chemical medium and pulp suspension from the mixing chamber.

Abstract: Apparatus for mixing a chemical medium with a pulp suspension is disclosed, comprising a housing, a first feeder for feeding the pulp suspension to a mixing chamber, a rotor body connected to a rotor shaft to supply kinetic energy to the pulp suspension flow, such that turbulence is produced in a turbulent flow zone in the mixing chamber, a second feeder for feeding the chemical medium to the mixing chamber, and a flow-restraining disk in the outlet from the mixing chamber with flow passages arranged to temporarily increase the flow velocity of the pulp suspension, the second feeder comprising a chemical distribution element integrated with the rotor body to distribute the chemical medium close to the turbulent flow zone, and the rotor body comprising a number of rotor pins which extend from the rotor shaft.

Abstract: According to the present invention, an anti-reflective film formed under a resist film is removed in a photolithography process of a wafer without affecting the resist film. According to the present invention, in a photolithography process of a substrate, an anti-reflective film having solubility in the developing solution is formed and thereafter a resist film is formed. In development treatment after exposure processing, a developing solution is supplied to the substrate to develop the resist film. At an instant when the development of the resist film is finished, a second developing solution lower in concentration than the developing solution is supplied to the substrate. Only the anti-reflective film is dissolved and removed by the supply of the second developing solution. The developing solution is supplied to the substrate by a supply nozzle having a stirrer.