Channeled Substrate Patents (Class 372/46.012)
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Patent number: 12191634Abstract: A semiconductor laser element includes: a first conductivity-type cladding layer; a first guide layer disposed above the first conductivity-type cladding layer; an active layer disposed above the first guide layer; and a second conductivity-type cladding layer disposed above the active layer. A window region is formed in a region of the active layer including part of at least one of the front-side end face or the rear-side end face, the first conductivity-type cladding layer consists of (AlxGa1-x)0.5In0.5P, the first guide layer consists of (AlyGa1-y)0.5In0.5P, and the second conductivity-type cladding layer consists of (AlzGa1-z)0.5In0.5P, where x, y, and z each denote an Al composition ratio, 0<x?y<z?y is satisfied, and D/L>0.03 is satisfied, where L denotes a length of the resonator and D denotes a length of the window region in the first direction.Type: GrantFiled: September 28, 2021Date of Patent: January 7, 2025Assignee: NUVOTON TECHNOLOGY CORPORATION JAPANInventors: Kazuya Yamada, Tougo Nakatani, Hiroki Nagai, Masayuki Hata
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Patent number: 11881683Abstract: A semiconductor device fabrication method in which a growing process is followed by a capping process in which a phosphor containing material cap layer is deposited over a final GaAs based layer. The wafer, containing many such substrates, can be removed from the reaction chamber to continue processing at a later time without creating an oxide layer on the final GaAs based layer. In continuing processing, a decomposition process selectively decomposes the phosphor containing material cap layer, after which a regrowing process is performed to grow additional layers of the device structure. The capping, decomposition and regrowth processes can be repeated multiple times on the semiconductor devices on the wafer during device fabrication.Type: GrantFiled: November 5, 2020Date of Patent: January 23, 2024Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Constance J. Chang-Hasnain, Jiaxing Wang, Jonas H. Kapraun, Emil Kolev
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Patent number: 11532921Abstract: A semiconductor device includes a substrate, an epitaxial stack disposed on the substrate, a first connection layer between the epitaxial stack and the substrate and a first electrode disposed on the first connection layer. The substrate has a first side surface and a second side surface. The epitaxial stack has a semiconductor structure with a first lateral surface adjacent to the first side surface and a second lateral surface opposing the first lateral surface and adjacent to the second side surface. The first connection layer has a first protruding portion extending beyond the first lateral surface and a second protruding portion extending beyond the second lateral surface. The first electrode is in contact with the first protruding portion and the second protruding portion.Type: GrantFiled: April 30, 2020Date of Patent: December 20, 2022Assignees: EPISTAR CORPORATION, iReach CorporationInventors: Hsin-Chan Chung, Shou-Lung Chen
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Patent number: 11146038Abstract: A semiconductor laser is disclosed. Trim loss region is provided in inner ridge region of surface of transmission layer facing away from substrate, blind hole is provided in trim loss region, and distance from bottom surface of blind hole to surface of second cladding layer facing to substrate is smaller than evanescent wave length in transmission layer. Blind hole can affect optical field characteristics of light transmission in semiconductor laser by affecting evanescent wave. A method for fabricating a semiconductor laser is also provided.Type: GrantFiled: June 22, 2019Date of Patent: October 12, 2021Assignee: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of SciencesInventors: Cunzhu Tong, Jiaxin Xu, Lijie Wang, Shili Shu, Sicong Tian, Xin Zhang, Lijun Wang
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Patent number: 10901146Abstract: Techniques are provided for single edge coupling of chips with integrated waveguides. For example, a package structure includes a first chip with a first critical edge, and a second chip with a second critical edge. The first and second chips include integrated waveguides with end portions that terminate on the first and second critical edges. The second chip includes a signal reflection structure that is configured to reflect an optical signal propagating in one or more of the integrated waveguides of the second chip. The first and second chips are edge-coupled at the first and second critical edges such that the end portions of the integrated waveguides of the first and second chips are aligned to each other, and wherein all signal input/output between the first and second chips occurs at the single edge-coupled interface.Type: GrantFiled: June 19, 2019Date of Patent: January 26, 2021Assignee: International Business Machines CorporationInventors: Yves Martin, Jason S. Orcutt, Tymon Barwicz, William Green
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Patent number: 10763641Abstract: A method of manufacturing a light emitting device comprising: providing an element-structure wafer having a first substrate and a laser element structure on the first substrate, the laser element structure having ridges on a side opposite to the first substrate and raising layers respectively formed above the ridges; bonding a laser element structure side of the element-structure wafer to a second substrate to obtain a bonded wafer; removing at least a portion of the first substrate to obtain a thinned bonded wafer; singulating the thinned bonded wafer to obtain a laser element with the second substrate; mounting the laser element with the second substrate on a heat dissipating member such that a laser element side of the laser element with the second substrate faces the heat dissipating member; and removing the second substrate from the laser element.Type: GrantFiled: October 22, 2019Date of Patent: September 1, 2020Assignee: NICHIA CORPORATIONInventor: Shingo Tanisaka
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Patent number: 10490973Abstract: A method of manufacturing a light emitting device includes providing an element-structure wafer that includes a first substrate and a laser element structure on the first substrate, bonding a laser element structure side of the element-structure wafer to a second substrate to obtain a bonded wafer, removing at least a portion of the first substrate to obtain a thinned bonded wafer, singulating the thinned bonded wafer to obtain a laser element with the second substrate, mounting the laser element with the second substrate on a heat dissipating member such that a laser element structure side of the laser element with the second substrate faces the heat dissipating member, and removing the second substrate from the laser element.Type: GrantFiled: August 24, 2018Date of Patent: November 26, 2019Assignee: NICHIA CORPORATIONInventor: Shingo Tanisaka
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Patent number: 10277005Abstract: An edge emitting structure includes an active region configured to generate radiation in response to excitation by a pumping beam incident on the structure. A front facet of the edge emitting structure is configured to emit the radiation generated by the active region. A metallic reflective coating disposed on at least one of the front and rear facets of the edge emitting structure. The metallic reflective coating is configured to reflect the radiation generated by the active region.Type: GrantFiled: September 13, 2017Date of Patent: April 30, 2019Assignee: Palo Alto Research Center IncorporatedInventors: Jorg Jeschke, Thomas Wunderer, Mark Teepe
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Patent number: 10033159Abstract: A mode-controlled laser system includes an active region to generate optical energy in response to an electric signal. The system also includes a mirror to resonate the optical energy in an optical cavity. The system also includes a HCG mode control reflector arranged in the optical cavity to control the resonated optical energy into a substantially non-Gaussian intensity profile. The resonated optical energy can be emitted as an optical signal having the substantially non-Gaussian intensity profile.Type: GrantFiled: June 20, 2013Date of Patent: July 24, 2018Assignee: Hewlett Packard Enterprise Development LPInventors: Wayne Victor Sorin, Michael Renne Ty Tan, David A. Fattal, Marco Fiorentino
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Patent number: 9923336Abstract: A laser diode includes a ridge portion, channel portions located adjacent to the ridge portion such that the ridge portion is sandwiched, the channel portions being shorter in height than the ridge portion, terrace portions adjacent to opposite sides of the respective channel portions from the ridge portion and longer in height than the channel portions, supporting portions provided over the respective channel portions, separated from side surfaces of the ridge portion or side surfaces of terrace portions or both, and made of resin, a ceiling portion including first portions provided over the supporting portions and second portions continuous with the first portions and located over the respective channel portions with hollow portions interposed therebetween, the ceiling portion being made of resin, and a metal layer provided over the ceiling portion and connected to an upper surface of the ridge portion.Type: GrantFiled: January 17, 2017Date of Patent: March 20, 2018Assignee: Mitsubishi Electric CorporationInventors: Kazuhiro Maeda, Masafumi Minami, Naoki Nakamura, Daisuke Morita
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Patent number: 9711936Abstract: A method for manufacturing a semiconductor laser of the present invention includes a step of forming an insulating film on a surface of a grooved semiconductor substrate, a step of pasting an insulating sheet to a top surface of the insulating film so as to cover an opening of the groove and forming an insulating layer on the semiconductor substrate, a step of forming an opening of providing a first opening in the insulating layer so that a part corresponding to an electrode of the semiconductor substrate is exposed and a step of forming the electrode on a top surface of the insulating layer so as to fill the first opening.Type: GrantFiled: July 25, 2016Date of Patent: July 18, 2017Assignee: Mitsubishi Electric CorporationInventors: Masafumi Minami, Naohisa Tamada, Takahiro Ueno, Motoshi Kitagawa
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Patent number: 9343871Abstract: Nonpolar or semipolar laser diode technology incorporating etched facet mirror formation and conventional optical coating layer techniques for reflectivity modification to enable a method for ultra-high catastrophic optical mirror damage thresholds for high power laser diodes are disclosed.Type: GrantFiled: March 25, 2013Date of Patent: May 17, 2016Assignee: Soraa Laser Diode, Inc.Inventors: James W. Raring, Hua Huang
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Patent number: 9130352Abstract: An optical semiconductor device includes: a substrate of semiconductor; an array having a plurality of active regions arranged on the substrate so as to emit light to the same direction, the plurality of active regions being arranged more densely at ends of the array than in the center of the array in a direction crossing the light emitting direction; and electrodes which inject current to the plurality of active regions.Type: GrantFiled: March 15, 2013Date of Patent: September 8, 2015Assignee: NEC CORPORATIONInventors: Nobuaki Hatori, Masashige Ishizaka, Takanori Shimizu
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Patent number: 9083152Abstract: The semiconductor optical amplifier device includes a plurality of active units. Each active unit includes an active stripe structure of an optical amplifying medium and a current circuit configured to inject current into the corresponding active stripe structure. Each active stripe structure extends from an input end to an output end. An optical splitter device is configured to split an incoming signal light and for distributing corresponding parts of the incoming signal light into the different input ends of the active stripe structures. The optical splitter device is configured to supply each active stripe structure with the same signals.Type: GrantFiled: April 4, 2012Date of Patent: July 14, 2015Assignee: Alcatel LucentInventor: Gerhard Meyer
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Patent number: 9025631Abstract: Provided is a high-output light-emitting device capable of emitting a light beam in a single mode. The light-emitting device includes a laminate structure body configured by laminating, in order, a first compound semiconductor layer, an active layer, and a second compound semiconductor layer on a base substrate, a second electrode, and a first electrode. The first compound semiconductor layer has a laminate structure including a first cladding layer and a first light guide layer in order from the base substrate, and the laminate structure body has a ridge stripe structure configured of the second compound semiconductor layer, the active layer, and a portion in a thickness direction of the first light guide layer. Provided that a thickness of the first light guide layer is t1, and a thickness of the portion configuring the ridge stripe structure of the first light guide layer is t1?, 6×10?7 m<t1 and 0(m)<t1??0.5·t1 are satisfied.Type: GrantFiled: September 4, 2012Date of Patent: May 5, 2015Assignee: Sony CorporationInventors: Masaru Kuramoto, Rintaro Koda, Hideki Watanabe
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Patent number: 8649408Abstract: According to one embodiment, a semiconductor laser device with high reliability and excellent heat dissipation is provided. The semiconductor laser device includes an active layer, a p-type semiconductor layer on the active layer, a pair of grooves formed by etching into the p-type semiconductor layer, a stripe sandwiched by the pair of grooves and having shape of ridge, and a pair of buried layers made of insulator to bury the grooves. The bottom surfaces of the grooves are shallower with an increase in distance from the stripe.Type: GrantFiled: September 2, 2010Date of Patent: February 11, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Rei Hashimoto, Maki Sugai, Jongil Hwang, Yasushi Hattori, Shinji Saito, Masaki Tohyama, Shinya Nunoue
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Patent number: 8619826Abstract: A laser diode includes: a plurality of strip-shaped laser structures arranged in parallel with each other, and including a lower cladding layer, an active layer, and an upper cladding layer in this order; a plurality of strip-shaped upper electrodes singly formed on a top face of the respective laser structures, and being electrically connected to the upper cladding layer; a plurality of wiring layers being at least singly and electrically connected to one of the respective upper electrodes; and a plurality of pad electrodes formed in a region different from that of the plurality of laser structures, and being electrically connected to one of the respective upper electrodes with the wiring layer in between. The respective wiring layers have an end in a region different from a region where the respective wiring layers are contacted with the upper electrode.Type: GrantFiled: June 9, 2010Date of Patent: December 31, 2013Assignee: Sony CorporationInventors: Makoto Nakashima, Takahiro Yokoyama, Sachio Karino, Eiji Takase, Yuta Yoshida
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Patent number: 8619829Abstract: The present invention provides a semiconductor laser device including: a plurality of light emitting sections arranged in strip shapes in parallel; a plurality of first electrodes arranged along top faces of the light emitting sections, respectively; an insulating film covering a whole surface of the plurality of first electrodes, and including contact apertures corresponding to the first electrodes, respectively; a plurality of second electrodes arranged in positions different from those of the plurality of light emitting sections, correspondingly to the first electrodes; a plurality of wiring layers arranged on the insulating layer, and electrically connecting the second electrodes and the corresponding first electrodes through the contact apertures, respectively; and a plurality of window regions arranged for the light emitting sections in the insulating film so as to expose the first electrodes, respectively, and including at least two window regions having areas different from each other.Type: GrantFiled: June 10, 2010Date of Patent: December 31, 2013Assignee: Sony CorporationInventors: Yuta Yoshida, Sachio Karino, Takahiro Yokoyama, Makoto Nakashima, Eiji Takase
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Patent number: 8548023Abstract: A semiconductor laser element includes a laminate composed of a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer; and a second embedded layer that is in contact with the second conductivity type semiconductor layer, has a stripe-like groove parallel to the cavity direction, and is composed of an insulator, the groove is embedded with a first embedded layer composed of a dielectric on the cavity end face side, and with a conductive layer on the inside.Type: GrantFiled: October 31, 2008Date of Patent: October 1, 2013Assignee: Nichia CorporationInventors: Shinya Sonobe, Shingo Masui
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Patent number: 8537872Abstract: A light emitting device includes first and second cladding layers and an active layer therebetween including first and second side surfaces and first and second gain regions, a second side reflectance is higher than a first side reflectance, a first end surface part of the first gain region overlaps a second end surface part of the second gain region in an overlapping plane, the first gain region obliquely extends from the first end surface to a third end surface, the second gain region obliquely extends from the second end surface to a fourth end surface, a first center line connecting the centers of the first and third end surfaces and a second center line connecting the centers of the second and fourth end surfaces intersect, and the overlapping plane is shifted from the intersection point toward the first side surface.Type: GrantFiled: June 22, 2012Date of Patent: September 17, 2013Assignee: Seiko Epson CorporationInventor: Masamitsu Mochizuki
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Patent number: 8526476Abstract: A semiconductor chip with a semiconductor body has a semiconductor layer sequence with an active region provided for generating radiation. A mirror structure that includes a mirror layer and a dielectric layer that is arranged at least in regions between the mirror layer and semiconductor body is arranged on the semiconductor body.Type: GrantFiled: April 24, 2008Date of Patent: September 3, 2013Assignee: OSRAM Opto Semiconductors GmbHInventors: Karl Engl, Lutz Hoeppel, Christoph Eichler, Matthias Sabathil, Andreas Weimar
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Patent number: 8488645Abstract: A semiconductor device is provided that has a VCSEL and a protection diode integrated therein and that has an additional intrinsic layer. The inclusion of the additional intrinsic layer increases the width of the depletion region of the protection diode, which reduces the amount of capacitance that is introduced by the protection diode. Reducing the amount of capacitance that is introduced by the protection diode allows the VCSEL to operate at higher speeds.Type: GrantFiled: July 31, 2011Date of Patent: July 16, 2013Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.Inventor: Ramana M. V. Murty
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Patent number: 8472491Abstract: A semiconductor laser device includes a semiconductor-layer lamination (20) having an active layer (26) formed over a substrate (11). The semiconductor-layer lamination (20) includes a front face which emits light, a strip-shaped optical waveguide formed in a direction transverse to the front face, a first region (20A) extending in a direction transverse to the front face, a second region (20B) having a top surface whose height is different from that of the first region (20A), and a planar region (20C) formed between the first region (20A) and the second region (20B), and having periodic surface undulations whose variation is smaller than that of the second region (20B). The optical waveguide is formed in the planar region (20C).Type: GrantFiled: October 16, 2009Date of Patent: June 25, 2013Assignee: Panasonic CorporationInventor: Masao Kawaguchi
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Patent number: 8457167Abstract: Embodiments describe a semiconductor laser device driven at low voltage and which is excellent for cleavage and a method of manufacturing the device. In one embodiment, the semiconductor laser device includes a GaN substrate; a semiconductor layer formed on the GaN substrate; a ridge formed in the semiconductor layer; a recess formed in the bottom surface of the GaN substrate. The recess has a depth less than the thickness of the GaN substrate. The device also has a notch deeper than the recess formed on a side surface of the GaN substrate and separated from the recess. In the semiconductor laser device, the total thickness of the GaN substrate and the semiconductor layer is 100 ?m or more, and the distance between the top surface of the ridge and the bottom surface of the recess is 5 ?m or more and 50 ?m or less.Type: GrantFiled: September 1, 2010Date of Patent: June 4, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Maki Sugai, Shinji Saito, Rei Hashimoto, Yasushi Hattori, Jongil Hwang, Masaki Tohyama, Shinya Nunoue
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Patent number: 8442085Abstract: By forming upper-bank patterns made of Au with a thickness of 1.5 ?m or larger on bank portions, a solder material on a submount and a surface of a conductive layer in an upper part of a ridge portion of a laser chip are separated so as not to be in contact with each other, thereby preventing the stress generated in a bonding portion when bonding the laser chip and the submount from being applied to the ridge portion.Type: GrantFiled: November 18, 2010Date of Patent: May 14, 2013Assignee: Oclaro Japan, Inc.Inventors: Susumu Sorimachi, Yutaka Inoue, Yasuhisa Semba
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Patent number: 8340147Abstract: A laser diode includes an n-type semiconductor region, a p-type semiconductor region, a semiconductor mesa provided between the n-type semiconductor region and the p-type semiconductor region, the semiconductor mesa including an active layer, and a semiconductor burying region located between the n-type semiconductor region and the p-type semiconductor region, the semiconductor burying region being provided on a side face of the semiconductor mesa. The semiconductor burying region includes an n-type semiconductor burying layer and a p-type semiconductor burying layer. The n-type semiconductor burying layer is provided between the p-type semiconductor region and the p-type semiconductor burying layer. The p-type semiconductor burying layer is doped with an element that forms an electron trapping level in the band gap of the p-type semiconductor burying layer.Type: GrantFiled: October 12, 2010Date of Patent: December 25, 2012Assignee: Sumitomo Electric Industries, Ltd.Inventors: Noriaki Kaida, Takahiko Kawahara
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Patent number: 8335243Abstract: An optoelectronic semiconductor body comprises a substrate (10), which has on a first main area (12) an epitaxial semiconductor layer sequence (20), suitable for generating electromagnetic radiation, in a first region (14) and a first trench (24) in a second region (22) adjacent to the first region (14), and at least one second trench (30) arranged outside the first region (14). The invention also relates to an optoelectronic semiconductor body and a method for producing an optoelectronic semiconductor body.Type: GrantFiled: February 11, 2009Date of Patent: December 18, 2012Assignee: Osram Opto Semiconductors GmbHInventors: Stefanie Brüninghoff, Christoph Eichler
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Patent number: 8243767Abstract: A Vertical-Cavity Surface-Emitting Laser (VCSEL) device includes a substrate, a first semiconductor multi-layer film of a first conductive type formed on the substrate, an active layer, a second semiconductor multi-layer film of a second conductive type, an electrode pad electrically coupled to the second semiconductor multi-layer film, and a post structure formed on the substrate, the post structure comprising a light emitter, the post structure being continuously surrounded by a first groove, and a second groove being continuously formed outside of the first groove with respect to the post structure.Type: GrantFiled: August 24, 2010Date of Patent: August 14, 2012Assignee: Fuji Xerox Co., Ltd.Inventor: Yasuaki Miyamoto
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Patent number: 8228967Abstract: A light emitting device includes first and second cladding layers and an active layer therebetween including first and second side surfaces and first and second gain regions, a second side reflectance is higher than a first side reflectance, a first end surface part of the first gain region overlaps a second end surface part of the second gain region in an overlapping plane, the first gain region obliquely extends from the first end surface to a third end surface, the second gain region obliquely extends from the second end surface to a fourth end surface, a first center line connecting the centers of the first and third end surfaces and a second center line connecting the centers of the second and fourth end surfaces intersect, and the overlapping plane is shifted from the intersection point toward the first side surface.Type: GrantFiled: March 12, 2010Date of Patent: July 24, 2012Assignee: Seiko Epson CorporationInventor: Masamitsu Mochizuki
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Publication number: 20120170084Abstract: A surface-emitting semiconductor laser includes a substrate, a first semiconductor multi-layered reflector of a first conductivity type, an active region, a second semiconductor multi-layered reflector of a second conductivity type, a columnar structure, a current-confining layer including a conductive area surrounded with an oxidized area, a first electrode defining a light-emitting window, a first dielectric film covering the light-emitting window, and a second dielectric film formed on the first dielectric film. The second dielectric film has an asymmetrical shape having a long axis and a short axis, the second dielectric film is located at a position overlapping with the conductive area, the second refractive index n2 is greater than the first refractive index n1, the thickness of the first dielectric film is an odd multiple of ?/4·n1 (?: oscillation wavelength), and the thickness of the second dielectric film is an odd multiple of ?/4·n2.Type: ApplicationFiled: July 25, 2011Publication date: July 5, 2012Applicant: FUJI XEROX CO., LTD.Inventors: Kazutaka TAKEDA, Hideo NAKAYAMA
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Publication number: 20120114003Abstract: A laser device includes a ridge waveguide having an active layer between upper and lower cladding layers. A ridge formed in the upper cladding layer defines the width of a light guiding region in the active layer, and is formed so that a portion of the light guiding region extends into the ridge. A plurality of reflecting slots extend across and into the ridge to a depth sufficient to extend into the extending portion in order that the reflectivity of each slot is on the order of 2%. The slots intersect more than 20% of the total mode energy in the light guiding region, and this in combination with the gain of the active layer facilitates lasing within the light guiding region independently of the reflectivity of end facets of the waveguide. The laser device is particularly suitable for integrally forming with other optical components on a single semiconductor chip.Type: ApplicationFiled: September 16, 2011Publication date: May 10, 2012Applicants: UNIVERSITY COLLEGE CORK, NATIONAL UNIVERSITY OF IRELAND, CORK, UNDIVIDED TRINITY OF QUEEN ELIZABETH, NEAR DUBLINInventors: John F. DONEGAN, Wei-Hua GUO, Qiao-Yin LU, Diarmuid BYRNE, Brian CORBETT, Paul Martin LAMBKIN, Brendan John ROYCROFT, Jan-Peter ENGELSTAEDTER, Frank PETERS
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Publication number: 20120106583Abstract: A VCSEG-DFB laser, fully compatible with MGVI design and manufacturing methodologies, for single growth monolithic integration in multi-functional PICs is presented. It comprises a laser PIN structure, in mesa form, etched from upper emitter layer top surface through the active, presumably MQW, gain region, down to the top surface of the lower emitter. Lower electrical contacts sit adjacent the mesa disposed on the lower emitter layer with upper strip contacts disposed atop the upper emitter layer on the mesa top. An SEG is defined/etched from mesa top surface, between the upper strip contacts, through upper emitter layer down to or into the SCH layers. Vertical confinement is provided by the SCH structure and the lateral profile in the bottom portion of the mesa provides lateral confinement. The guided mode interacts with the SEG by the vertical tail penetrating the SEG and evanescent field coupling to the SEG.Type: ApplicationFiled: November 2, 2010Publication date: May 3, 2012Applicant: ONECHIP PHOTONICS INC.Inventors: Christopher Watson, Kirill Pimenov, Valery Tolstikhin, Fang Wu, Yury Logvin
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Publication number: 20120082178Abstract: A vertical cavity surface emitting laser capable of high-speed modulation and stabilized control of polarization direction of the laser light is provided, including a resonator which is formed by stacking a semiconductor substrate, a lower mirror layer formed on the upper side of the semiconductor substrate, an active layer formed on the upper side of the lower mirror layer, and an upper mirror layer including an oxidized layer formed on the upper side of the active layer, and a portion of which is formed in a mesa shape from a predetermined position to the upper surface in a height direction; an insulation layer covering the side surface of the mesa-shaped portion of the resonator, and the upper surface of the non-mesa-shaped portion of the resonator; and electrodes being wired on the upper surface of the upper mirror layer and on the lower surface of the semiconductor substrate, respectively.Type: ApplicationFiled: December 8, 2010Publication date: April 5, 2012Applicant: SAE Magnetics (H.K.) Ltd.Inventor: Takemasa Tamanuki
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Publication number: 20120057902Abstract: A disclosed method of manufacturing a surface emitting laser includes laminating a transparent dielectric layer on an upper surface of a laminated body; forming a first resist pattern on an upper surface of the dielectric layer, the first resist pattern including a pattern defining an outer perimeter of a mesa structure and a pattern protecting a region corresponding to one of the relatively high reflection rate part and the relatively low reflection rate part included in an emitting region; etching the dielectric layer by using the first resist pattern as an etching mask; and forming a second resist pattern protecting a region corresponding to an entire emitting region. These steps are performed before the mesa structure is formed.Type: ApplicationFiled: March 15, 2010Publication date: March 8, 2012Applicant: RICOH COMPANY, LTD.,Inventors: Hiroyoshi Shouji, Shunichi Sato, Akihiro Itoh, Kazuhiro Harasaka
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Publication number: 20110317733Abstract: A nitride semiconductor laser chip that operates with reduced electric power consumption and helps achieve cost reduction has: an active layer formed of a nitride semiconductor; a nitride semiconductor layer formed above the active layer; a ridge portion formed in a part of the nitride semiconductor layer; and an electrically conductive film having a light-absorbing property and formed at least in a region outside the ridge portion above the nitride semiconductor layer. The ridge portion has a ridge width of 2 ?m or more but 6 ?m or less.Type: ApplicationFiled: June 23, 2011Publication date: December 29, 2011Applicant: Sharp Kabushiki KaishaInventors: Kentaro Tani, Toshiyuki Kawakami, Yoshihiko Tani
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Publication number: 20110304684Abstract: A surface emitting laser device includes a substrate and plural semiconductor layers laminated on the substrate, the plural semiconductor layers including a first semiconductor multi-layer film including aluminum (Al), an active layer, and a second semiconductor multi-layer film, a light emitting section having a mesa structure being formed on the first semiconductor multi-layer film. When viewed in a direction orthogonal to a surface of the substrate, an outer shape of the first semiconductor multi-layer film is a macroscopically smooth shape without an angular corner, and a side surface of the first semiconductor multi-layer film is coated with a passivation film and a protection film.Type: ApplicationFiled: June 8, 2011Publication date: December 15, 2011Applicant: RICOH COMPANY, LTD.Inventors: Masayuki NUMATA, Shunichi Sato
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Patent number: 8077752Abstract: A Vertical Cavity Surface Emitting Laser (VCSEL) capable of providing high output of fundamental transverse mode while preventing oscillation of high-order transverse mode is provided. The VCSEL includes a semiconductor layer including an active layer and a current confinement layer, and a transverse mode adjustment section formed on the semiconductor layer. The current confinement layer has a current injection region and a current confinement region. The transverse mode adjustment section has a high reflectance area and a low reflectance area. The high reflectance area is formed in a region including a first opposed region opposing to a center point of the current injection region. A center point of the high reflectance area is arranged in a region different from the first opposed region. The low reflectance area is formed in a region where the high reflectance area is not formed, in an opposed region opposing to the current injection region.Type: GrantFiled: December 29, 2008Date of Patent: December 13, 2011Assignee: Sony CorporationInventors: Osamu Maeda, Masaki Shiozaki, Takahiro Arakida
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Publication number: 20110298006Abstract: A semiconductor light emitting device includes a nitride semiconductor layer including a first cladding layer, an active layer, and a second cladding layer, and a current blocking layer configured to selectively inject a current into the active layer. The second cladding layer has a stripe-shaped ridge portion. The current blocking layer is formed in regions on both sides of the ridge portion, and is made of zinc oxide having a crystalline structure.Type: ApplicationFiled: June 15, 2011Publication date: December 8, 2011Applicant: PANASONIC CORPORATIONInventors: Hiroyuki HAGINO, Hiroshi OHNO, Kazuhiko YAMANAKA, Nobuaki NAGAO, Takahiro HAMADA
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Publication number: 20110292959Abstract: A semiconductor laser device includes a semiconductor laminated film including a ridge stripe portion. The semiconductor laminated film includes a first scribed level-different portion formed in a resonator surface which is an edge surface thereof intersecting the ridge stripe portion and a second scribed level-different portion formed in each side surface thereof extending in parallel to the ridge stripe portion, the first scribed level-difference portion is located between the second scribed level-different portion and the ridge stripe portion, a cross-sectional shape of the first scribe level-different portion taken along the resonator surface is polygonal, and one of angles of inclined parts which is located closer to an associated one of the ridge stripe portions is smaller than the other one of the angles located closer to an associated one of the second scribed portions, the inclined parts being sides of the polygonal shape.Type: ApplicationFiled: February 18, 2011Publication date: December 1, 2011Inventors: Toshitaka Shimamoto, Naoto Shimada, Kouji Makita, Yoshiaki Hasegawa
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Publication number: 20110280268Abstract: A laser diode includes a substrate having a lattice constant of GaAs or between GaAs and GaP, a first cladding layer of AlGaInP formed on the substrate, an active layer of GaInAsP formed on the first cladding layer, an etching stopper layer of GaInP formed on the active layer, a pair of current-blocking regions of AlGaInP formed on the etching stopper layer so as to define a strip region therebetween, an optical waveguide layer of AlGaInP formed on the pair of current-blocking regions so as to cover the etching stopper layer in the stripe region, and a second cladding layer of AlGaInP formed on the optical waveguide layer, wherein the current-blocking regions having an Al content substantially identical with an Al content of the second cladding layer.Type: ApplicationFiled: July 21, 2011Publication date: November 17, 2011Inventors: Naoto Jikutani, Shunichi Sato
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Publication number: 20110261856Abstract: A VCSEL includes a grating layer configured with a non-periodic, sub-wavelength grating, in which the non-periodic, sub-wavelength grating includes at least one first section configured to have a relatively low reflection coefficient and at least one second section configured to have a relatively high reflection coefficient to cause light to be reflected in a predetermined, non-Gaussian, spatial mode across the sub-wavelength grating. The VCSEL also includes a reflective layer and a light emitting layer disposed between the grating layer and the reflector, in which the sub-wavelength grating and the reflector form a resonant cavity.Type: ApplicationFiled: April 26, 2010Publication date: October 27, 2011Inventors: David A. Fattal, Raymond G. Beausoleil, Sagi Varghese Mathai
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Publication number: 20110216798Abstract: Embodiments describe a semiconductor laser device driven at low voltage and which is excellent for cleavage and a method of manufacturing the device. In one embodiment, the semiconductor laser device includes a GaN substrate; a semiconductor layer formed on the GaN substrate; a ridge formed in the semiconductor layer; a recess formed in the bottom surface of the GaN substrate. The recess has a depth less than the thickness of the GaN substrate. The device also has a notch deeper than the recess formed on a side surface of the GaN substrate and separated from the recess. In the semiconductor laser device, the total thickness of the GaN substrate and the semiconductor layer is 100 ?m or more, and the distance between the top surface of the ridge and the bottom surface of the recess is 5 ?m or more and 50 ?m or less.Type: ApplicationFiled: September 1, 2010Publication date: September 8, 2011Applicant: Kabushiki Kaisha ToshibaInventors: Maki SUGAI, Shinji SAITO, Rei HASHIMOTO, Yasushi HATTORI, Jongil HWANG, Masaki TOHYAMA, Shinya NUNOUE
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Publication number: 20110217077Abstract: A surface-emitting laser device configured to emit laser light in a direction perpendicular to a substrate includes a p-side electrode surrounding an emitting area on an emitting surface to emit the laser light; and a transparent dielectric film formed on an outside area outside a center part of the emitting area and within the emitting area to lower a reflectance to be less than that of the center part. The outside area within the emitting area has shape anisotropy in two mutually perpendicular directions.Type: ApplicationFiled: November 24, 2009Publication date: September 8, 2011Applicant: Ricoh Company, Ltd.Inventors: Kazuhiro Harasaka, Shunichi Sato, Naoto Jikutani
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Publication number: 20110216799Abstract: According to one embodiment, a semiconductor laser device with high reliability and excellent heat dissipation is provided. The semiconductor laser device includes an active layer, a p-type semiconductor layer on the active layer, a pair of grooves formed by etching into the p-type semiconductor layer, a stripe sandwiched by the pair of grooves and having shape of ridge, and a pair of buried layers made of insulator to bury the grooves. The bottom surfaces of the grooves are shallower with an increase in distance from the stripe.Type: ApplicationFiled: September 2, 2010Publication date: September 8, 2011Applicant: Kabushiki Kaisha ToshibaInventors: Rei Hashimoto, Maki Sugai, Jongil Hwang, Yasushi Hattori, Shinji Saito, Masaki Tohyama, Shinya Nunoue
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Publication number: 20110182315Abstract: A manufacturing method of a surface-emitting semiconductor laser includes the steps of: forming a stacked structure having a lower-multilayer film reflector including a lower oxidizable layer having at least one layer, an active layer having a light emitting region, an upper-multilayer film reflector including an upper oxidizable layer and an upper layer on a substrate in this order; providing a first groove in the upper layer; and providing a second groove including a portion overlapping the first groove in a planar shape and a portion not overlapping the first groove in the stacked structure.Type: ApplicationFiled: December 17, 2010Publication date: July 28, 2011Applicant: Sony CorporationInventors: Masaki Shiozaki, Osamu Maeda, Takahiro Arakida, Susumu Sato
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Publication number: 20110182314Abstract: A vertical cavity surface emitting laser that includes: a substrate; a first reflector of a first conductive type formed on the substrate; an active region formed on the first reflector; a second reflector of a second conductive type formed on the active region; and a current confining layer formed between the first reflector and the second reflector; and a metallic electrode that is formed on the second reflector, and is electrically connected to the second reflector. A conductive region with an anisotropy where a length in a longitudinal direction is different from a length in a short direction is formed in the current confining layer, and an opening defining a beam aperture is formed in the metallic electrode, and a diameter of the opening in the longitudinal direction is smaller than the length of the conductive region in the longitudinal direction.Type: ApplicationFiled: August 23, 2010Publication date: July 28, 2011Applicant: FUJI XEROX CO., LTD.Inventors: Masahiro YOSHIKAWA, Hideo Nakayama
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Publication number: 20110164642Abstract: An LD with an improved heat dissipating function in the edge regions is disclosed. The LD provides the core region including the active layer and extending whole of the substrate, and the ridge waveguide structure on the core region that extends in a direction along which the light generated in the active layer is guided. The ridge waveguide structure is buried by a thick resin layer in both sides thereof, but the resin layer is removed in the edge regions close to respective facets of the LD.Type: ApplicationFiled: December 17, 2010Publication date: July 7, 2011Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventors: Yutaka ONISHI, Hideki Yagi
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Publication number: 20110150022Abstract: In a GaN-based laser device having a GaN-based semiconductor stacked-layered structure including a light emitting layer, the semiconductor stacked-layered structure includes a ridge stripe structure causing a stripe-shaped waveguide, and has side surfaces opposite to each other to sandwich the stripe-shaped waveguide in its width direction therebetween. At least part of at least one of the side surfaces is processed to prevent the stripe-shaped waveguide from functioning as a Fabry-Perot resonator in the width direction.Type: ApplicationFiled: December 30, 2010Publication date: June 23, 2011Applicant: SHARP KABUSHIKI KAISHAInventors: Toshiyuki KAWAKAMI, Tomoki Ono, Shigetoshi Ito
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Publication number: 20110142085Abstract: A chaotic light generator device comprises laser structures integrated on a common substrate. Each laser structure comprises a ridge of light amplifying material that forms a waveguide extending between at least partly reflective surfaces. Each laser structure comprises an injection electrode for injecting electric current into the ridge of light amplifying material. The laser structures are mutually coupled for exchanging light. A current feed circuit is coupled to the electrodes and configured to apply mutually different current densities to the electrodes of the laser structures. Choosing different lengths of the laser structures and suitable current densities, chaotic light emission is achieved suitable for telecommunication. Ultrashort pulses result from coupling of Eigenmodes with relaxation oscillations.Type: ApplicationFiled: June 19, 2009Publication date: June 16, 2011Applicant: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNOInventor: Mirvais Yousefi
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Publication number: 20110142090Abstract: A laser diode includes: a substrate; a semiconductor layer including a lower cladding layer, an active layer, and an upper cladding layer; a strip-shaped ridge provided on an upper cladding layer side in the semiconductor layer; and a pair of resonator end faces sandwiching the semiconductor layer and the ridge. The substrate includes strip-shaped grooves provided on both sides of a portion facing the ridge along the portion facing the ridge, and extending in a direction different from a direction orthogonal to the extending direction of the ridge, and L1, L2, and L3 satisfy the following relationship, L1<L3/2 L2?L3/3 where L1 is a length of each groove, L2 is a length of a groove non-form rectangular region in the extending direction of the ridge, the groove non-form rectangular region being sandwiched by the grooves from the extending direction of the ridge, and L3 is a resonator length.Type: ApplicationFiled: December 7, 2010Publication date: June 16, 2011Applicant: Sony CorporationInventors: Mikihiro Yokozeki, Junji Sawahata, Katsunori Yanashima, Miwa Okubo