With Diffraction Grating (bragg Reflector) Patents (Class 372/50.11)
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Patent number: 7194014Abstract: A semiconductor laser device having two active-layer stripe structures includes an n-InP substrate, an n-InP clad layer, a lower GRIN-SCH layer, an active layer, an upper GRIN-SCH layer, a p-InP clad layer, and a p-InGaAsP contact layer grown in this order, in a side cross section cut along one of the stripe structure. A high-reflection film is disposed on a reflection-side end surface, and a low-reflection film is disposed on an emission-side end surface. A p-side electrode is disposed on only a part of the upper surface of the p-InGaAsP contact layer so that a current non-injection area is formed on an area absent the p-side electrode.Type: GrantFiled: December 31, 2003Date of Patent: March 20, 2007Assignee: The Furukawa Electric Co., Ltd.Inventors: Junji Yoshida, Naoki Tsukiji, Toshio Kimura, Masashi Nakae, Takeshi Aikiyo
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Patent number: 7180648Abstract: An electro-absorption light intensity modulator device is provided that comprises a first and a second layer disposed relative to the first layer so as to provide a light-absorbing optical confinement region. The first layer comprises a first insulator layer, and the light-absorbing optical confinement region comprises at least one quantum-confined structure. The at least one quantum-confined structure possesses dimensions such, that upon an application of an electric field in the at least one quantum-confined structure, light absorption is at least partially due to a transition of at least one carrier between a valence state and a conduction state of the at least one quantum-confined structure. A method is also provided for fabricating an electro-absorption light intensity modulator device.Type: GrantFiled: June 13, 2005Date of Patent: February 20, 2007Assignee: Massachusetts Institute of TechnologyInventors: Carl Dohrman, Saurabh Gupta, Eugene A. Fitzgerald
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Patent number: 7170916Abstract: DBR mirrors, and vertical cavity surface emitting lasers that incorporate such mirrors, comprised of stacked, multiple levels of different materials having different etching rates for a selected etchant and etching method. Such DBRs are fabricated by etching an upper level(s) down to a lower level(s) to form a pillar or trenched structure, beneficially having an aperture, that has predetermined optical characteristics. When part of a vertical cavity surface emitting laser, a lower level can include an ion-implanted region that optionally extends into an active region and into a bottom DBR.Type: GrantFiled: October 30, 2002Date of Patent: January 30, 2007Assignee: Finisar CorporationInventor: Jin K. Kim
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Patent number: 7157730Abstract: Ion implantation by mounting a semiconductor wafer on a rotating plate that is tilted at an angle relative to an ion implantation flux. The tilt angle and the ion implantation energy are adjusted to produce a desired implantation profile. Ion implantation of mesa structures, either through the semiconductor wafer's surface or through the mesa structure's wall is possible. Angled ion implantation can reduce or eliminate ion damage to the lattice structure along an aperture region. This enables beneficial ion implantation profiles in vertical cavity semiconductor lasers. Mask materials, beneficially that can be lithographically formed, can selectively protect the wafer during implantation. Multiple ion implantations can be used to form novel structures.Type: GrantFiled: December 20, 2002Date of Patent: January 2, 2007Assignee: Finisar CorporationInventor: Tzu-Yu Wang
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Patent number: 7139299Abstract: A semiconductor laser that includes a feedback laser section and an amplifier section. The feedback laser section generates a laser beam that has a maximum intensity at a first wavelength. The amplifier section amplifies the laser beam into a high powered beam. The amplifier section is constructed to have a peak optical gain located at a second wavelength that is offset from the first wavelength. Offsetting the wavelength generated in the feedback laser section from the peak gain wavelength of the amplifier section will result in an output beam that has a much broader linewidth that the feedback section alone. The broader linewidth is relatively stable even when part of the light reflects back into the semiconductor laser.Type: GrantFiled: February 28, 2003Date of Patent: November 21, 2006Assignee: Quintessence Photonics CorporationInventor: Jeffrey E. Ungar
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Patent number: 7130325Abstract: The present invention relates to a semiconductor laser, having a construction capable of tuning a wavelength, in which a sampled grating distributed feedback SG-DFB structure portion and a sampled grating distributed Bragg reflector SG-DBR structure portion are integrated. In the present invention, the refraction index are varied in accordance with a current applied to the phase control area in the SG-DFB structure portion and the SG-DBR structure portion, whereby it is possible to continuously or discontinuously tune the wavelength. Therefore, in such a wavelength tunable semiconductor laser, its construction is relatively simple, and it is relatively useful to the manufacturing and mass-producing the semiconductor laser. In addition, such a wavelength tunable semiconductor laser has an excellent output optical efficiency while making it possible to tune the wavelength of the wide band.Type: GrantFiled: December 29, 2003Date of Patent: October 31, 2006Assignee: Electronics and Telecommunications Research InstituteInventors: Su Hwan Oh, Moon Ho Park, Ji Myon Lee, Ki Soo Kim, Chul Wook Lee, Hyun Sung Ko, Sahng Gi Park, Young Chul Chung, Su Hyun Kim
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Patent number: 7123642Abstract: A multi-wavelength laser device includes at least two of a blue laser diode, a red laser diode, and an infrared laser diode, which are arranged in the same direction on the same base. One laser light emission point is arranged behind another in increasing order of wavelengths of the laser diodes.Type: GrantFiled: February 27, 2004Date of Patent: October 17, 2006Assignee: Sharp Kabushiki KaishaInventors: Toshiyuki Kawakami, Mototaka Taneya
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Patent number: 7113526Abstract: A surface emitting semiconductor laser system having four cavities that couple light from a single aperture. Each of the four cavities overlaps at the outcoupling aperture. Each cavity is fabricated to resonate at a different central wavelength, outputting a different frequency of light, each of which can be independently modulated.Type: GrantFiled: October 9, 2003Date of Patent: September 26, 2006Assignee: Photodigm, Inc.Inventors: Gary A. Evans, Dubravko Babic
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Patent number: 7106765Abstract: A tuneable laser includes a gain section bounded at one end by a first reflector adapted to produce a comb of reflective peaks and on the other end by a second reflector in the form of a plurality of discrete grating units each capable of reflecting at one of the peaks of the comb, and each grating unit having at least two independently actuable electrodes, which when actuated independently one from the other is capable of reducing the reflectivity of the grating unit and in which at least two of the grating units have different pitches.Type: GrantFiled: September 12, 2002Date of Patent: September 12, 2006Assignee: Bookham Technology, plcInventors: Andrew Carter, Douglas Reid
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Patent number: 7103081Abstract: This invention provides a semiconductor laser that enables to oscillate at a wavelength defined by a Bragg grating formed therein in a wide temperature range without any temperature-controlling. The semiconductor laser comprises an active region and the Bragg grating formed with the active region. A light-emitting surface and a light-reflecting surface are formed so as to sandwiches the active region. The light-emitting surface has an anti-reflective coating, the reflectivity of which is so adjusted that the minimum thereof is at the wavelength where the gain attributed to the FP modes is the maximum and is smaller than 0.3%.Type: GrantFiled: October 16, 2003Date of Patent: September 5, 2006Assignee: Sumitomo Electric Industries, Ltd.Inventor: Toshio Nomaguchi
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Patent number: 7099075Abstract: Systems and methods for tuning a DBR stack for an optical amplifier. The DBR layers in a mirror of the optical amplifier have a duty cycle that can be altered to tune a location of a channel drop in a gain spectrum. In addition to changing the duty cycle, the DBR stacks can be segmented. The segmented DBR stacks and/or the selected duty cycle tunes a location of a channel drop outside of a range of wavelengths of interest.Type: GrantFiled: September 3, 2004Date of Patent: August 29, 2006Assignee: Finisar CorporationInventors: Richard P. Ratowsky, Daniel A. Francis, Ashish K. Verma
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Patent number: 7099360Abstract: An optical transmitter includes an external cavity laser array formed in a PLC, a trench-based detector array and an AWG. The external cavity laser is formed using an array of substantially similar laser gain blocks and an array of gratings formed in waveguides connected to the gain blocks. Each grating defines the output wavelength for its corresponding external cavity laser. Each detector of the detector array includes a coupler to cause a portion of a corresponding laser output signal of the laser array to propagate through a first sidewall of a trench and reflect off a second sidewall of the trench to a photodetector. In one embodiment, the photodetector outputs a signal indicative of the power level of the reflected signal, which a controller uses to control the laser array to equalize the power of the laser output signals.Type: GrantFiled: February 3, 2003Date of Patent: August 29, 2006Assignee: Intel CorporationInventors: Achintya K. Bhowmik, Nagesh K. Vodrahalli, Gennady Farber, Hai-Feng Liu, Hamid Eslampour, Ut Tran, William B. Wong, Ruolin Li, Jesper Jayaswal-Arentoff
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Patent number: 7092425Abstract: Using lateral physical modulation, the optical properties of VCSELs can be stabilized and controlled by spatially varying the characteristics of the device material. This results in stabilization of the linewidth, the numerical aperture, the near and far field, as a function of bias and temperature. A VCSEL includes a substrate, an active region sandwiched between an upper and lower distributed Bragg reflector (DBRs), and electrical contacts. A light emission property e.g. the index of refraction, may be varied by patterning or texturing the surface of the substrate prior to growth of the epitaxial DBR layers or at least one layer of either the upper or lower DBRs, or by inserting a non-planar layer.Type: GrantFiled: October 5, 2000Date of Patent: August 15, 2006Assignee: Avago Technologies General IP (Singapore) Ptd. Ltd.Inventors: Richard P. Schneider, Frank H. Peters, An-Nien Cheng, Laura Giovane, Hao-chung Kuo, Sheila K. Mathis
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Patent number: 7072376Abstract: A method of fabricating an indium phosphide-based vertical cavity surface emitting laser (VCSEL) having a high reflectivity distributed Bragg reflector (DBR) that is particularly adapted for emitting a light having a center wavelength of around 1.30 micrometers. The method includes the steps of selecting a specific operating wavelength, determining the photon energy corresponding to the selected operating wavelength, selecting a maximum operating temperature in degrees Centigrade, and fabricating at least half of the high index layers of the distributed Bragg reflector (DBR) of the VCSEL from AlGaInAs or other material that can be epitaxially grown on the InP substrate to have a band gap equal to or greater than the sum of the photon energy (in milli-electron volts) plus the sum of the maximum operating temperature plus 110 divided by 1.96.Type: GrantFiled: September 16, 2004Date of Patent: July 4, 2006Assignee: Corning IncorporatedInventors: Catherine G Caneau, Benjamin L Hall, Nobuhiko Nishiyama, Chung-En Zah
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Patent number: 7065123Abstract: First and second diffraction grating layers are provided above a semiconductor substrate, and are spaced from each other in an output direction of a beam with a flat connecting layer sandwiched therebetween. An active layer is disposed above or below the first and second diffraction grating layers and the connecting layer. A cladding layer is disposed above the active layer or above the first and second diffraction grating layers and the connecting layer. A diffraction grating including the first and second diffraction grating layers has a plurality of slits penetrating from an upper surface to a lower surface that are perpendicular to the output direction of the beam. The connecting layer is formed from two layers grown epitaxially in a direction perpendicular to the output direction of the beam. One of the two layers is formed of the same material as the first and second diffraction grating layers.Type: GrantFiled: June 13, 2003Date of Patent: June 20, 2006Assignee: Anritsu CorporationInventors: Hiroshi Mori, Tomoyuki Kikugawa, Yoshio Takahashi, Motoaki Fujita
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Patent number: 7065120Abstract: A monolithic integrated component (10) comprises a plurality of sections (21, 22) including a section (21) constituting a laser having a cavity delimited by a partially reflecting reflector and at least one other section (22) adjacent said laser section (21). The partially reflecting reflector (11) is disposed between the laser section (21) and one of the adjacent sections (22) and is a Bragg reflector grating (11) that allows multimode operation of the laser (21).Type: GrantFiled: July 1, 2002Date of Patent: June 20, 2006Assignee: Avanex CorporationInventors: François Brillouet, Jean-René Burie
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Patent number: 7061962Abstract: A semiconductor laser with a semiconductor substrate, a laser layer arranged on the semiconductor substrate, a waveguide arranged parallel to the laser layer and a strip shaped grating structure is disclosed. The laser layer, the waveguide and the grating are arranged a configuration which results in weak coupling between the laser light and the grating structure, so that the laser light interacts with an increased number of grating elements. A process for the production of such a semiconductor laser is also disclosed.Type: GrantFiled: August 5, 2002Date of Patent: June 13, 2006Assignee: nanoplus GmbHInventors: Johann Peter Reithmaier, Lars Bach
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Patent number: 7058096Abstract: Alternative laser structures, which have potentially the same tuning performance as (S)SG-DBR and GCSR lasers, and a fabrication process which is similar to that of the (S)SG-DBR laser, are presented. The advantage of these structures is that the output power does not pass through a long passive region.Type: GrantFiled: November 25, 2003Date of Patent: June 6, 2006Assignee: Interuniversitair Microelektronica Centrum (IMEC vzw)Inventors: Gert Sarlet, Jens Buus, Roel Baets
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Patent number: 7042921Abstract: A semiconductor complex coupled light emitting device is disclosed having a lower cladding layer, an optical cavity formed adjacent the lower cladding layer and an upper cladding layer formed adjacent the optical cavity. The optical cavity includes a lower multi-quantum well active region formed from a first high reactivity material system and an upper multi-quantum well diffraction grating structure formed from a second low reactivity material system that is not subject to oxidation when etched.Type: GrantFiled: July 11, 2003Date of Patent: May 9, 2006Assignee: Emcore CorporationInventors: Bernd Witzigmann, Charles Tsai
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Patent number: 7023894Abstract: An optically pumped semiconductor laser device having a substrate (12) having a first main area (14) and a second main area (16), a pump laser (30) and a vertically emitting laser (40) optically pumped by the pump laser (30) being arranged on the first main area (14). The first main area (14) of the substrate (12) is patterned and has first regions (20) situated at a higher level and also second regions (18) situated at a lower level. The pump laser (30) is arranged on a region (20) situated at a higher level of the substrate (12), and the vertically emitting laser (40) is arranged above intermediate layers (50, 30?) on a region (18) situated at a lower level of the substrate (12). The height difference (?) between the first (20) and second (18) regions of the substrate (12) and the layer thickness of the intermediate layers (50, 30?) is chosen in such a way that the pump laser (30) and the vertically emitting laser (40) are situated at the same level.Type: GrantFiled: October 10, 2003Date of Patent: April 4, 2006Assignee: Osram Opto Semiconductors GmbHInventor: Tony Albrecht
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Patent number: 7020172Abstract: Selectively oxidized vertical cavity lasers emitting at about 1290 nm using InGaAsN quantum wells that operate continuous wave below, at and above room temperature are reported. The lasers employ a semi-insulating GaAs substrate for reduced capacitance, high quality, low resistivity AlGaAs DBR mirror structures, and a strained active region based on InGaAsN. In addition, the design of the VCSEL reduces free carrier absorption of 1.3 ?m light in the p-type materials by placing relatively higher p-type dopant concentrations near standing wave nulls.Type: GrantFiled: May 10, 2004Date of Patent: March 28, 2006Assignee: Optical Communication Products, Inc.Inventors: Ryan Likeke Naone, Andrew W. Jackson, Leo M. F. Chirovsky
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Patent number: 7009216Abstract: A semiconductor light emitting device of the present invention comprises a n-type InP substrate (1), and a stripe structure (10) formed in the stripe shape on the n-type InP substrate (1) and comprised of a n-type InP lower cladding layer (3), an active layer (4) having a resonator in a direction parallel to the n-type InP substrate (1), and a p-type InP upper cladding layer (5). The stripe structure (10) has a photonic crystal structure (2) with concave portions 9 arranged in rectangular lattice shape, and the direction in which the concave portions (9) of the photonic crystal structure (2) are arranged corresponds with a resonator direction. A stripe-shaped upper electrode (6) is formed on the stripe structure (10) to extend in the resonator direction. The semiconductor light emitting device of the present invention so structured is configured to radiate light in the direction perpendicular to the n-type InP substrate (1).Type: GrantFiled: November 24, 2003Date of Patent: March 7, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Nobuyuki Otsuka, Shigeo Yoshii, Toshiya Yokogawa
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Patent number: 7010183Abstract: A device including an input port configured to receive an input signal is described. The device also includes an output port and a structure, which structure includes a tunneling junction connected with the input port and the output port. The tunneling junction is configured in a way (i) which provides electrons in a particular energy state within the structure, (ii) which produces surface plasmons in response to the input signal, (iii) which causes the structure to act as a waveguide for directing at least a portion of the surface plasmons along a predetermined path toward the output port such that the surface plasmons so directed interact with the electrons in a particular way, and (iv) which produces at the output port an output signal resulting from the particular interaction between the electrons and the surface plasmons.Type: GrantFiled: March 20, 2002Date of Patent: March 7, 2006Assignee: The Regents of the University of ColoradoInventors: Michael J. Estes, Garrett Moddel
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Patent number: 6990134Abstract: A GaN series surface-emitting laser diode and a method for manufacturing the same are provided. The GaN series surface-emitting laser diode includes: an active layer; p-type and n-type material layers on the opposite sides of the active layer; a first-distributed Bragg reflector (DBR) layer formed on the n-type material layer; an n-type electrode connected to the active layer through the n-type material layer such that voltage is applied to the active layer for lasing; a spacer formed on the p-type material layer with a laser output window in a portion aligned with the first DBR layer, the spacer being thick enough to enable holes to effectively migrate to a center portion of the active layer; a second DBR layer formed on the laser output window; and a p-type electrode connected to the active layer through the p-type material layer such that voltage is applied to the active layer for lasing.Type: GrantFiled: April 5, 2004Date of Patent: January 24, 2006Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Yong-jo Park, Kyoung-ho Ha, Heon-su Jeon, Si-hyun Park
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Patent number: 6982182Abstract: Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELs) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, a VCSEL includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region disposed between the top mirror and the bottom mirror and including an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator as a result of exposure to an oxidizing agent. The vertical stack structure defines two or more etched holes each extending from the substantially planar top surface to the oxidized peripheral region.Type: GrantFiled: July 14, 2003Date of Patent: January 3, 2006Assignee: Agilent Technologies, Inc.Inventors: Seongsin Kim, Wilson H. Widjaja, Suning Xie