Excimer Or Exciplex Patents (Class 372/57)
  • Patent number: 11271361
    Abstract: An excimer laser apparatus according to the present disclosure includes a chamber configured to accommodate a laser gas and a pair of electrodes and generate pulse-oscillating laser light when the gas pressure of the laser gas is controlled in accordance with voltage applied between the pair of electrodes, a power supply configured to apply the voltage between the pair of electrodes, and a controller to which a target value of the spectral linewidth of the laser light is inputted, the controller configured to correct the voltage used to control the gas pressure, when the target value changes from a first target value to a second target value, based on a first function having the second target value as a parameter and control the gas pressure in accordance with the corrected voltage.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: March 8, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Keisuke Ishida, Satoshi Komuro, Hiroshi Furusato
  • Patent number: 11239625
    Abstract: A laser apparatus includes a controller that selects one of a first gas control and a second gas control based on gas pressure measured by a pressure sensor. The first gas control causes at least one of first laser gas and second laser gas is supplied to a chamber such that the gas pressure in the chamber after the first gas control is higher than the gas pressure in the chamber before the first gas control. The second gas control causes at least the first laser gas is supplied to the chamber and causes a part of the laser gas in the chamber is exhausted such that a difference between the gas pressure in the chamber before the second gas control and the gas pressure in the chamber after the second gas control is smaller than a difference between the gas pressure in the chamber before the first gas control and the gas pressure in the chamber after the first gas control.
    Type: Grant
    Filed: October 3, 2018
    Date of Patent: February 1, 2022
    Assignee: Gigaphoton Inc.
    Inventor: Takeshi Asayama
  • Patent number: 10908431
    Abstract: Tapered cavity structures disposed within a stratum may be configured as a spectral component splitters, a spectral component combiners, and various combinations thereof including a reflective mode of operation. The tapered cavities have an aperture at their wider and a tip at the narrower, and are dimensioned such that multi-spectral radiant energy admitted into the cavity via the aperture would depart the tapered cavity via its side periphery at a depth and/or direction dependent on its frequency and/or its polarization, and that a plurality of spectral components admitted to the cavities via the its peripheral side or sides will be mixed and emitted via the aperture. Reflective type structures where portions of radiant energy is selectively absorbed and other portions are reflected are also considered. Differing stratums are disclosed. Applications of the tapered cavities in a stratum are also disclosed.
    Type: Grant
    Filed: May 29, 2017
    Date of Patent: February 2, 2021
    Inventor: Shalom Wertsberger
  • Patent number: 10892592
    Abstract: A laser gas purifying system to purify laser gas emitted from a laser apparatus and return purified gas to the laser apparatus may include a first pipe configured to pass the laser gas emitted from the laser apparatus, a purifying apparatus connected to the first pipe and configured to purify the laser gas emitted from the laser apparatus, a second pipe connected to the purifying apparatus and configured to return the purified gas purified by the purifying apparatus to the laser apparatus, and an exhausting device provided in at least one of the first pipe, the purifying apparatus, and the second pipe.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: January 12, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Natsushi Suzuki, Masanori Yashiro, Osamu Wakabayashi
  • Patent number: 10727048
    Abstract: A method for producing a glass substrate with through glass vias according to the present invention includes: irradiating a glass substrate (10) with a laser beam to form a modified portion; forming a first conductive portion (20a) on a first principal surface of the glass substrate (10), the first conductive portion (20a) being positioned in correspondence with the modified portion (12); and forming a through hole (14) in the glass substrate (10) after formation of the first conductive portion by etching at least the modified portion (12) using an etchant. This method allows easy handling of a glass substrate during formation of a conductive portion such as a circuit on the glass substrate, and is also capable of forming a through hole in the glass substrate relatively quickly while preventing damage to the conductive portion such as a circuit formed on the glass substrate.
    Type: Grant
    Filed: January 15, 2019
    Date of Patent: July 28, 2020
    Assignee: NIPPON SHEET GLASS COMPANY, LIMITED
    Inventors: Keiji Tsunetomo, Hideki Hashizume, Kazuya Ohkawa
  • Patent number: 10666008
    Abstract: A gas supply system may include a first gas supply line, a second gas supply line, a circulation gas pipe, a gas purification unit, a first valve, and a second valve. The first gas supply line may include a first branching point at which the first gas supply line branches into a first branch connected to a first chamber and a second branch connected to a second chamber and the second gas supply line may include a second branching point at which the second gas supply line branches into a third branch connected to the first chamber and a fourth branch connected to the second chamber. A first portion of the first gas supply line upstream from the first branching point and a second portion of the second gas supply line upstream from the second branching point may be constituted by separate pipes from each other.
    Type: Grant
    Filed: November 1, 2018
    Date of Patent: May 26, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Natsushi Suzuki, Osamu Wakabayashi, Hiroaki Tsushima, Masanori Yashiro
  • Patent number: 10663866
    Abstract: An optical source for an extreme ultraviolet (EUV) photolithography tool includes a light-generation system including a light-generation module; an optical amplifier including a gain medium associated with a gain band, the gain medium configured to amplify light having a wavelength in the gain band; and a wavelength-based optical filter system on a beam path between the light-generation module and the optical amplifier, the wavelength-based optical filter system including at least one optical element configured to allow light having a wavelength in a first set of wavelengths to propagate on the beam path and to remove light having a wavelength in a second set of wavelengths from the beam path, the first set of wavelengths and the second set of wavelengths including different wavelengths in the gain band of the optical amplifier.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: May 26, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Alexander Anthony Schafgans, Igor Vladimirovich Fomenkov, Yezheng Tao, Rostislav Rokitski, Robert Jay Rafac, Daniel John William Brown, Cory Alan Stinson
  • Patent number: 10461494
    Abstract: A laser apparatus according to one aspect of the present disclosure includes a master oscillator configured to output laser light, a plurality of amplifiers each configured to include carbon dioxide as a laser medium and amplify the laser light, a first optical path pipe configured to cover a laser optical path between the amplifiers, a gas supply port configured to supply, into the first optical path pipe, gas having lower carbon dioxide concentration than that of the air, a first carbon dioxide densitometer configured to measure carbon dioxide concentration in the first optical path pipe, and an alarm device configured to issue an alarm when the carbon dioxide concentration measured by the first carbon dioxide densitometer exceeds a preset prescribed value.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: October 29, 2019
    Assignee: GIGAPHOTON INC.
    Inventors: Yoshiaki Kurosawa, Takashi Suganuma
  • Patent number: 10416471
    Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: September 17, 2019
    Assignee: Cymer, LLC
    Inventor: Eric Anders Mason
  • Patent number: 10218147
    Abstract: In a method, energy is supplied to a first gas discharge chamber of a first stage until a pulsed amplified light beam is output from the first stage and directed toward a second stage. While the energy is supplied to the first gas discharge chamber: a value of an operating parameter of the first gas discharge chamber is measured; it is determined whether to adjust an operating characteristic of the first gas discharge chamber based on the measured value; and, the operating characteristic of the first gas discharge chamber is adjusted if it is determined that the operating characteristic of the first gas discharge chamber should be adjusted. After it is determined that the operating characteristic of the first gas discharge chamber no longer should be adjusted, then an adjustment procedure is applied to an operating characteristic of a second gas discharge chamber of the second stage.
    Type: Grant
    Filed: March 13, 2017
    Date of Patent: February 26, 2019
    Assignee: Cymer, LLC
    Inventor: Tanuj Aggarwal
  • Patent number: 10205931
    Abstract: A voltage mode laser diode driver selectively turns on and off a laser diode. An output stage has an output node configured to be connected to one of the terminals of the laser diode. Depending upon implementation, an active swing controller drives the output stage in a manner that substantially prevents inductive kickback from causing the output node voltage to swinging above the voltage level at the voltage output of the power supply, or swing below ground. The output stage provides a discharge path around the laser diode to shunt current associated with the inductive kickback, and substantially eliminates ringing on the output node of the output stage while the laser diode is off. A power supply controller adjusts the voltage level of the voltage output of the power supply so that current through the laser diode when on and emitting light is substantially equal to a predetermined desired current.
    Type: Grant
    Filed: March 13, 2017
    Date of Patent: February 12, 2019
    Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
    Inventors: Barry Thompson, Stefan Wurster, Lawrence A. Prather, Dane Snow, Richard McCauley
  • Patent number: 10126413
    Abstract: A method can be used for operating an optoelectronic proximity sensor. The proximity sensor includes a radiation-emitting component, a radiation-detecting component and a control unit. The radiation-emitting component is operated by means of a pulsed current. During each measurement period, the pulsed current of the radiation-emitting component has an on-time and an off-time. The pulsed current has a pulse current intensity during the on-time, and the control unit evaluates a detector signal of the radiation-detecting component and lowers the pulse current intensity for a subsequent measurement period, when the detector signal exceeds a threshold value during at least one measurement period.
    Type: Grant
    Filed: July 21, 2014
    Date of Patent: November 13, 2018
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventor: Hubert Halbritter
  • Patent number: 10112264
    Abstract: A method of treating a metallic surface comprising a copper alloy, such as phosphor bronze, whereby the metallic surface is ablated by directing a laser beam with a diameter of 200-400 ?m produced by a CO2 laser with a pulse frequency of 1200-1800 HZ onto the metallic surface, and a N2 assist gas is concurrently applied with a pressure of 550-650 KPa co-axially with the laser beam to form an ablated metallic surface comprising microgrooves with Cu3N present on a surface of the microgrooves, wherein the ablated metallic surface has a higher surface hydrophobicity than the metallic surface prior to the ablating.
    Type: Grant
    Filed: February 9, 2018
    Date of Patent: October 30, 2018
    Assignee: King Fahd University of Petroleum and Minerals
    Inventors: Bekir Sami Yilbas, Haider Ali
  • Patent number: 10069273
    Abstract: A xenon chloride (XeCl) excimer laser includes a lasing-gas mixture including a buffer gas, a noble gas, a halogen-donating gas, and deuterium. The deuterium is present in a concentration greater than about 10 parts-per-million.
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: September 4, 2018
    Assignee: COHERENT LASERSYSTEMS GMBH & CO. KG
    Inventors: Igor Bragin, Oleg Melnikov, Timur Misyuryaev
  • Patent number: 10061197
    Abstract: Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: August 28, 2018
    Assignee: USHIO DENKI KABUSHIKI KAISHA
    Inventors: Tatsushi Owada, Shinji Suzuki
  • Patent number: 10044164
    Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
    Type: Grant
    Filed: August 17, 2016
    Date of Patent: August 7, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
  • Patent number: 9981340
    Abstract: A method of treating a metallic surface comprising a copper alloy, such as phosphor bronze, whereby the metallic surface is ablated by directing a laser beam with a diameter of 200-400 ?m produced by a CO2 laser with a pulse frequency of 1200-1800 HZ onto the metallic surface, and a N2 assist gas is concurrently applied with a pressure of 550-650 KPa co-axially with the laser beam to form an ablated metallic surface comprising microgrooves with Cu3N present on a surface of the microgrooves, wherein the ablated metallic surface has a higher surface hydrophobicity than the metallic surface prior to the ablating.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: May 29, 2018
    Assignee: King Fahd University of Petroleum and Minerals
    Inventors: Bekir Sami Yilbas, Haider Ali
  • Patent number: 9954340
    Abstract: Problem: to suppress the number of times complete gas replacement in a laser chamber. Solution: this excimer laser apparatus may include a gas supply unit, connected to a first receptacle that holds a first laser gas containing halogen gas and a second receptacle that holds a second laser gas having a lower halogen gas concentration than the first laser gas, that supplies the first laser gas and the second laser gas to the interior of the laser chamber. Then, gas pressure control in which the gas supply unit supplies the second laser gas to the interior of the laser chamber or a gas exhaust unit partially exhausts gas from within the laser chamber, and partial gas replacement control in which the gas supply unit supplies the first laser gas and the second laser gas to the interior of the laser chamber and the gas exhaust unit partially exhausts gas from within the laser chamber sequentially, may be selectively performed.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: April 24, 2018
    Assignee: Gigaphoton Inc.
    Inventors: Tooru Abe, Takeshi Ohta, Hiroaki Tsushima, Osamu Wakabayashi
  • Patent number: 9897548
    Abstract: A method using a laser to propagate a laser beam through an optically-transparent medium, wherein the laser has a power level beyond a critical value Pcr, and wherein the laser beam interacts with the optically transparent medium to generate a laser-induced plasma filament (LIPF); and adjusting the power level to qualitatively detect chemical components within the optically-transparent medium.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: February 20, 2018
    Assignee: The United States of America as represented by Secretary of the Navy
    Inventors: Alexandru Hening, Robert George, Ronald Wroblewski, Scott McGirr
  • Patent number: 9831627
    Abstract: The present invention relates to a system for recirculating the gas atmosphere within an excimer laser system, where contaminates, created in the laser's operation, are removed, and the gas concentrations of additive gases, such as Xe, Kr, or others, depleted in the laser operation, are rebalanced to specific lasing mixtures by analyzation and component replenishment from one or more external supplies.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: November 28, 2017
    Assignee: Maheson Tri-Gas, Inc.
    Inventors: Joseph Vininski, Dane Scott
  • Patent number: 9742141
    Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: August 22, 2017
    Assignee: Gigaphoton Inc.
    Inventors: Hiroaki Tsushima, Kouji Kakizaki, Takashi Matsunaga, Takeshi Asayama, Hisakazu Katsuumi, Hiroshi Umeda, Hiroyuki Ikeda
  • Patent number: 9599510
    Abstract: A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: March 21, 2017
    Assignees: Cymer, LLC, ASML Netherlands B.V.
    Inventors: Thomas P. Duffey, Herman Philip Godfried
  • Patent number: 9496678
    Abstract: A device for reducing spontaneous emission in laser oscillator laser amplifier laser system.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: November 15, 2016
    Assignee: Candela Corporation
    Inventors: Jayant D. Bhawalkar, Xiaoming Shang, Jinze Qiu, Michael Clancy
  • Patent number: 9423621
    Abstract: Prism beam expansion system which having two or more right angle prisms with the same structure. The incident light beam enters via an incident inclined plane and exits as an exit light beam that is perpendicular to an exit right angle plane of the same right angle prism. The vertex angle ? of all the right angle prisms are the same and satisfies the expression ? = arcsin ( n ? ? 1 n ? ? 2 × sin ? ? ? ? ? 1 ) , where n1 and n2 represent the refractive indexes of the laser beam respectively in the incident media and in the right angle prism.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: August 23, 2016
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Zhijun Yuan, Haibo Zhang, Jun Zhou, Liming Geng, Liyuan Jiang, Yunrong Wei
  • Patent number: 9373926
    Abstract: There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: June 21, 2016
    Assignee: GIGAPHOTON INC.
    Inventors: Hiroaki Tsushima, Hakaru Mizoguchi, Junichi Fujimoto, Hiroaki Nakarai, Natsushi Suzuki
  • Patent number: 9363878
    Abstract: A device is provided for controlling a laser beam. The device may include a first wavefront adjuster provided in a beam path of a laser beam outputted from a laser apparatus, a beam delivery unit provided in a beam path of the laser beam from the first wavefront adjuster, a second wavefront adjuster provided in a beam path of the laser beam from the beam delivery unit, a beam monitor provided in a beam path of the laser beam from the second wavefront adjuster, and a controller configured to control the first and second wavefront adjusters based on a detection result of the beam monitor. An extreme ultraviolet light apparatus including the device is also provided.
    Type: Grant
    Filed: July 9, 2014
    Date of Patent: June 7, 2016
    Assignee: GIGAPHOTON INC.
    Inventors: Masato Moriya, Osamu Wakabayashi
  • Patent number: 9295967
    Abstract: In the present invention, a nitrogen-free ozone generating unit integrates a plurality of functional means into a single package unit, the functional means including a nitrogen-free ozone generator that is cooled to a low temperature, an ozone power source, a MFC, an APC, a heat insulating cooling water inlet pipe, and a heat insulating cooling water outlet pipe. In the nitrogen-free ozone generator, a heat insulating layer made of a heat insulating material such as an insulator is formed to cover substantially the entire surface of an ozone generator outer frame. A cooling water system is configured to set the temperature of cooling water, which is supplied to the nitrogen-free ozone generator through the heat insulating cooling water inlet pipe, to 5° C. or less and to thereby cool the nitrogen-free ozone generator.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: March 29, 2016
    Assignee: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    Inventors: Noriyuki Nakamura, Yoichiro Tabata
  • Patent number: 9252557
    Abstract: A single-cavity dual-electrode discharge cavity and an excimer laser including such a discharge cavity are disclosed. The discharge cavity may comprise a cavity body and two sets of main discharge electrodes. The cavity body may comprise a left chamber and a right chamber arranged to form a symmetric dual-chamber cavity. The left and right chambers can interface and communicate with each other at a plane of symmetry of the entire discharge cavity. The two sets of main discharge electrodes can be disposed in the left and right chambers on the upper side, respectively. According to the present disclosure, the single-cavity configuration can be used to achieve functions of dual-cavity configurations, such as MOPA, MOPO, and MOPRA. Thus, it is possible to reduce system complexities and also ensure synchronization of discharging in the discharge cavity.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: February 2, 2016
    Assignee: Academy of Opto-Electronics, Chinese Academy of Sciences
    Inventors: Yu Wang, Yi Zhou, Jinbin Ding, Bin Liu, Lijia Zhang, Jiangshan Zhao, Pengfei Sha
  • Patent number: 9106052
    Abstract: A laser pumping method pumps a primary amount of energy into the near red satellite band of a metal vapor and noble gas mixture laser medium and a lesser amount of energy is pumped into a highly excited level to stimulate laser output. The medium is can be a Rb vapor and Xe gas mixture. The lesser amount of energy is pumped into the laser medium to populate an excited level that lies above the upper laser level and transfers atomic or molecular population to the upper laser level by a nonradiative process. In preferred embodiments, the intermediate level is within a few kT of the upper laser level and the primary amount of energy is a large majority of the total energy. A laser device includes metal vapor and noble gas mixture laser medium to populate an intermediate level near an upper laser level, and pumping a lesser amount of energy into a highly excited level to stimulate laser output. The medium can be an Rb vapor and Xe gas mixture in preferred embodiments.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: August 11, 2015
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: J. Gary Eden, John Darby Hewitt
  • Patent number: 9071036
    Abstract: A laser apparatus may include an optical resonator, a laser chamber, an optical loss adjustment mechanism, and a spectral line width adjustment mechanism. The optical resonator includes a mirror configured to reflect a part of light and a grating. The laser chamber is provided in the optical resonator and contains a laser gain medium, configured to emit a laser beam. The optical loss adjustment mechanism is provided in the optical resonator and configured to adjust an optical loss of the laser beam. The spectral line width adjustment mechanism is provided in the optical resonator and configured to adjust a spectral line width of the laser beam.
    Type: Grant
    Filed: May 16, 2013
    Date of Patent: June 30, 2015
    Assignee: GIGAPHOTON, INC.
    Inventors: Takahito Kumazaki, Takashi Onose, Osamu Wakabayashi
  • Patent number: 9054008
    Abstract: Described herein is device configured to be a solar-blind UV detector comprising a substrate; a plurality of pixels; a plurality of nanowires in each of the plurality of pixel, wherein the plurality of nanowires extend essentially perpendicularly from the substrate.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: June 9, 2015
    Assignee: ZENA TECHNOLOGIES, INC.
    Inventors: Young-June Yu, Munib Wober
  • Patent number: 9031112
    Abstract: A manufacturing method for an excimer laser that includes a reflective Echelle diffraction grating includes obtaining information of a wavelength of a light source, a blazed order, a repetitive pitch of the grating, a material of the grating, and a predefined orientation ratio B/A that is a ratio between that a diffraction efficiency A of the blazed order and a diffraction efficiency Bb of an order lower by one order than the blazed order, and determining an initial value of a blaze angle based upon these pieces of information.
    Type: Grant
    Filed: October 2, 2012
    Date of Patent: May 12, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tsuyoshi Kitamura, Takashi Sukegawa
  • Patent number: 9018561
    Abstract: An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.
    Type: Grant
    Filed: September 17, 2008
    Date of Patent: April 28, 2015
    Assignee: Cymer, LLC
    Inventors: Richard L Sandstrom, Daniel J. W. Brown, Thomas Hoffmann, Jason D Robinson, Craig W Unick
  • Patent number: 8989225
    Abstract: A laser apparatus includes a master oscillator capable of outputting a laser beam having a spectrum that includes at least three wavelength peaks, a multi-wavelength oscillation control mechanism capable of controlling energy of each of the wavelength peaks, a spectrum detecting unit that detects the spectrum of the above-mentioned laser beam, and a controller that controls the multi-wavelength oscillation control mechanism based on a detection result detected by the spectrum detecting unit.
    Type: Grant
    Filed: August 21, 2012
    Date of Patent: March 24, 2015
    Assignee: Gigaphoton Inc.
    Inventors: Kouji Kakizaki, Shinji Okazaki, Osamu Wakabayashi, Takashi Onose, Shinichi Matsumoto
  • Patent number: 8942271
    Abstract: A blower apparatus includes a blower casing; an elastic member for mounting a mounting portion that projects on an outer circumferential portion of the blower casing, to a blower support member disposed on the inlet side of the mounting portion; and a flange portion provided on the inlet side of the mounting portion. At least three elastic members are disposed in the same plane that is almost orthogonal to a rotation shaft, and adhesion surfaces are provided on both ends, in the rotation shaft direction, of each elastic member. The mounting portion is fixed to one of the adhesion surfaces, and the blower support member is fixed to the other of the adhesion surfaces. The flange portion is provided so as to oppose the blower support member through a gap having a thickness less than a thickness, in the rotation shaft direction, of the elastic member.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: January 27, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Kouji Funaoka, Takayuki Nakayama, Tomohiro Kyoto
  • Patent number: 8929419
    Abstract: An excimer laser system in which the expensive noble gases are reclaimed, while the halogen gas is sacrificed, and the impurities developed during operation of the excimer laser are removed. In the approach disclosed a multi-stage gas purifier is used with a single, premix gas bottle containing a halogen-rich laser gas mixture comprising noble, buffer and halogen gas, to maintain the optimum halogen content of the laser, while also maintaining a consistent ratio of noble, buffer and halogen gases without complicated control apparatus.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: January 6, 2015
    Assignee: LightMachinery Inc.
    Inventors: Jesse Dean, Ian J. Miller, Edward S. Williams, John H. Hunter
  • Publication number: 20150003485
    Abstract: An excimer laser apparatus includes a gas supply unit, connected to a first receptacle that holds a first laser gas containing halogen gas and a second receptacle that holds a second laser gas having a lower halogen gas concentration than the first laser gas, that supplies the first laser gas and the second laser gas to the interior of the laser chamber. Gas pressure control in which the gas supply unit supplies the second laser gas to the interior of the laser chamber or a gas exhaust unit partially exhausts gas from within the laser chamber, and partial gas replacement control in which the gas supply unit supplies the first laser gas and the second laser gas to the interior of the laser chamber and the gas exhaust unit partially exhausts gas from within the laser chamber sequentially, may be selectively performed.
    Type: Application
    Filed: September 16, 2014
    Publication date: January 1, 2015
    Applicant: GIGAPHOTON INC.
    Inventors: Tooru ABE, Takeshi OHTA, Hiroaki TSUSHIMA, Osamu WAKABAYASHI
  • Patent number: 8913642
    Abstract: In a slab laser, a gas mixture containing carbon dioxide CO2 is formed as a laser-active medium in a discharge space which is formed between two plate-shaped metal electrodes, the flat faces of which are located opposite one another. A resonator mirror is arranged on each of the mutually opposite end faces of the discharge space, the mirrors forming an unstable resonator parallel to the flat faces. At least one of the mutually facing flat faces is provided either on the entire flat face with a dielectric layer the thickness of which is greater on at least one sub-surface than in the remaining area of the flat face, or the at least one flat face is provided with a dielectric layer exclusively on at least one sub-surface.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: December 16, 2014
    Assignee: Rofin-Sinar Laser GmbH
    Inventors: Florian Engel, Stefan Ruppik, Volker Scholz, Hermann Hage
  • Patent number: 8908735
    Abstract: A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.
    Type: Grant
    Filed: September 13, 2011
    Date of Patent: December 9, 2014
    Assignee: Cymer, LLC
    Inventors: Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov
  • Patent number: 8902948
    Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: December 2, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki
  • Patent number: 8891574
    Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
    Type: Grant
    Filed: March 21, 2012
    Date of Patent: November 18, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki
  • Patent number: 8867583
    Abstract: An excimer laser apparatus includes a gas supply unit, connected to a first receptacle that holds a first laser gas containing halogen gas and a second receptacle that holds a second laser gas having a lower halogen gas concentration than the first laser gas, that supplies the first laser gas and the second laser gas to the interior of the laser chamber. Gas pressure control in which the gas supply unit supplies the second laser gas to the interior of the laser chamber or a gas exhaust unit partially exhausts gas from within the laser chamber, and partial gas replacement control in which the gas supply unit supplies the first laser gas and the second laser gas to the interior of the laser chamber and the gas exhaust unit partially exhausts gas from within the laser chamber sequentially, may be selectively performed.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: October 21, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Tooru Abe, Takeshi Ohta, Hiroaki Tsushima, Osamu Wakabayashi
  • Patent number: 8853657
    Abstract: A regenerative ring resonator in the path of a light beam includes a discharge chamber having electrodes and a gain medium between the electrodes; an optical coupler that is partially reflective so that at least a portion of a light beam impinging on the optical coupler from the discharge chamber is reflected back through the discharge chamber and at least a portion of the light beam impinging on the optical coupler from the discharge chamber is transmitted through the optical coupler; and an attenuation optical system in the path of the light beam within the resonator, the attenuation optical system having a plurality of distinct attenuation states, with each attenuation state defining a distinct attenuation factor applied to the light beam to provide adjustment of an energy of the light beam.
    Type: Grant
    Filed: July 28, 2012
    Date of Patent: October 7, 2014
    Assignee: Cymer, LLC
    Inventors: Robert J. Rafac, Rostislav Rokitski
  • Patent number: 8855166
    Abstract: A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.
    Type: Grant
    Filed: January 17, 2012
    Date of Patent: October 7, 2014
    Assignee: Cymer, LLC
    Inventors: Richard C. Ujazdowski, Richard M. Ness, J. Martin Algots, Vladimir B. Fleurov, Frederick A. Palenschat, Walter D. Gillespie, Bryan G. Moosman, Thomas D. Steiger, Brett D. Smith, Thomas E. McKelvey
  • Patent number: 8855167
    Abstract: A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window (2) and a second window (3) of the gas discharge chamber have an incident plane and an emitting plane in parallel with a (111) crystal plane of their calcium fluoride crystal. With respect to an arrangement where laser light entering the calcium fluoride crystal passes through a plane including a <111> axis and a <001> axis of each of the first window (2) and the second window (3) as seen from inside the chamber (1), the first window (2) and the second window (3) are arranged in positions rotated in the same direction by the same angle about their <111> axis.
    Type: Grant
    Filed: June 29, 2013
    Date of Patent: October 7, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki
  • Patent number: 8855164
    Abstract: A laser apparatus may include: a first module including an oscillator configured to output a laser beam and an oscillator support portion for supporting the oscillator; a second module including a beam delivery unit for delivering the laser beam and a beam delivery unit support portion for supporting the beam delivery unit; a third module including an amplifier for amplifying the laser beam and an amplifier support portion for supporting the amplifier; and a frame on which the modules are placed, the frame including mounts on which the oscillator support portion, the beam delivery support portion and the amplifier support portion are placed.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: October 7, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Yasufumi Kawasuji, Osamu Wakabayashi, Junichi Fujimoto, Hideo Iwase
  • Patent number: 8842704
    Abstract: An RF power-supply for driving a carbon dioxide CO2 gas-discharge laser includes a plurality of power-oscillators phase-locked to a common reference oscillator. Outputs of the phase-locked power-oscillators are combined by a power combiner for delivery, via an impedance matching network, to discharge-electrodes of the laser. In one example the powers are analog power-oscillators. In another example, the power-oscillators are digital power-oscillators.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: September 23, 2014
    Assignee: Coherent, Inc.
    Inventors: David P. Schmelzer, W. Shef Robotham, Jr., Frederick W. Hauer, Joel Fontanella
  • Patent number: 8837549
    Abstract: Continuous mass flow gas replenishment may be implemented in a gas lasing device, such as a gas laser or amplifier, by using a restrictive orifice to bleed one or more gases into a reservoir and/or discharge chamber of the gas laser or amplifier at a predefined mass flow rate. The mass flow rate is a function of the pressure drop across the restrictive orifice resulting from the pressure differential between the depleted gas and the source gas. Thus, gases may be added as needed such that the gas total pressure, as well as the constituent partial pressures, is maintained within a desired range throughout the laser or amplifier fill lifetime. The continuous mass flow gas replenishment may thus make up the lost partial pressure of reactive gases in gas lasing devices in a manner that is less complicated and is less expensive than other continuous flow methodologies.
    Type: Grant
    Filed: November 23, 2012
    Date of Patent: September 16, 2014
    Assignee: IPG Microsystems LLC
    Inventors: Jeffrey P. Sercel, Dana K. Sercel, Michael Von Dadelszen, Daniel B. Masse, Bruce R. Jenket
  • Patent number: 8817839
    Abstract: The invention relates to a two-stage laser system well fit for semiconductor aligners, which is reduced in terms of spatial coherence while taking advantage of the high stability, high output efficiency and fine line width of the MOPO mode. The two-stage laser system for aligners comprises an oscillation-stage laser (50) and an amplification-stage laser (60). Oscillation laser light having divergence is used as the oscillation-stage laser (50), and the amplification-stage laser (60) comprises a Fabry-Perot etalon resonator made up of an input side mirror (1) and an output side mirror (2). The resonator is configured as a stable resonator.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: August 26, 2014
    Assignees: Komatsu Ltd., Gigaphoton Inc.
    Inventors: Osamu Wakabayashi, Tatsuya Ariga, Takahito Kumazaki, Kotaro Sasano
  • Patent number: RE45957
    Abstract: A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.
    Type: Grant
    Filed: March 6, 2013
    Date of Patent: March 29, 2016
    Assignee: Cymer, LLC
    Inventors: Hong Ye, Richard L. Sandstrom, Rostislav Rokitski, Daniel J. W. Brown, Robert J. Rafac