With Scanning Or Temperature Distribution Display Patents (Class 374/124)
  • Patent number: 10191109
    Abstract: Disclosed are exemplary embodiments of transient scanning data visualization methods and systems. Also disclosed are exemplary embodiments of embedded transient scanning systems and methods.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: January 29, 2019
    Assignee: Pragma Design, Inc.
    Inventors: Jeffrey C. Dunnihoo, Rayfes Ahmed Mondal
  • Patent number: 10126175
    Abstract: A system includes a turbomachine having one or more inspection ports. An LWIR sensor is positioned in the inspection port of the turbomachine to sense thermal energy emitted by a turbomachine component. An imaging device can be operably connected to the LWIR sensor to convert signals from the LWIR sensor to a thermal image of the turbomachine component based on the sensed thermal energy. In some embodiments, the LWIR sensor configured to image a ceramic coated turbine blade.
    Type: Grant
    Filed: December 9, 2014
    Date of Patent: November 13, 2018
    Assignee: UNITED TECHNOLOGIES CORPORATION
    Inventors: Charles W. Haldeman, Andrew Consiglio, Mark F. Zelesky, Joel H. Wagner
  • Patent number: 9851318
    Abstract: A method of detecting an air gap in a gypsum-based building board includes cooling a surface of a gypsum-based building board that has generated heat because of a hydration reaction of calcined gypsum by applying a cooling medium to the surface, and detecting a temperature distribution of the surface of the gypsum-based building board after completion of the cooling.
    Type: Grant
    Filed: June 17, 2013
    Date of Patent: December 26, 2017
    Assignee: YOSHINO GYPSUM CO., LTD.
    Inventors: Shinji Yonezawa, Yasutoshi Ueno
  • Patent number: 9835445
    Abstract: A method for enabling easier interpretation and analysis of an observed real world scene by presenting a visible representation of infrared (IR) radiation information, based on IR radiation emitted from said real world scene, and additional information onto said observed real world scene, using thermography arrangement comprising an IR imaging system, a visible light imaging system and a visible light projecting system.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: December 5, 2017
    Assignee: FLIR Systems AB
    Inventors: Katrin Strandemar, Henrik Jönsson
  • Patent number: 9739666
    Abstract: The embodiments described herein generally relate to methods of noise compensation for proper temperature detection in thermal processing chambers and devices for achieving the same. Methods can include determining noise produced by a lamp zone and extrapolating the noise from the detected photocurrent. Devices can include a processing chamber, a substrate support disposed in the processing chamber, the substrate support having a high thermal mass, a pyrometer below the substrate support and oriented to view radiation emitted by the substrate and a controller configured to subtract a time invariant noise component and a time variant noise component from the pyrometer signal.
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: August 22, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Kailash Kiran Patalay, Aaron Muir Hunter
  • Patent number: 9689820
    Abstract: Methods and apparatus for the detection of irregularities in a thin film by measurement of transient thermal response.
    Type: Grant
    Filed: October 25, 2012
    Date of Patent: June 27, 2017
    Assignee: Purdue Research Foundation
    Inventors: James Michael Caruthers, Douglas E. Adams, Anand David, Peter R. O'Regan, Farshid Sadeghi, Nathan Daniel Sharp, Mark David Suchomel
  • Patent number: 9653340
    Abstract: An apparatus includes a carrier rotatable about an axis of rotation where the carrier has a top surface adapted to hold at least one semiconductor wafer and a surface characterization tool which is operative to move over a plurality of positions relative to the top surface of the carrier and/or the wafer transverse to the axis of rotation. The surface characterization tool is operative to move over a plurality of positions relative to the top surface of the carrier and/or the wafer transverse to the axis of rotation and is further adapted to produce characterization signals over the plurality of positions on at least a portion of the carrier and/or on at least a portion of said major surface of the wafer as the carrier rotates.
    Type: Grant
    Filed: May 30, 2012
    Date of Patent: May 16, 2017
    Assignee: Veeco Instruments Inc.
    Inventors: Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Eric A. Armour, Alexander I. Gurary, William E. Quinn, Guray Tas
  • Patent number: 9541453
    Abstract: An infrared detector includes a detecting element, a first electrode, a second electrode, and a covering structure. The detecting element defines an absorbing part and a non-absorbing part. The detecting element includes a first end and a second end opposite with the first end. The first end is disposed in the absorbing part. The second end is disposed in the non-absorbing part. The first electrode is electrically connected with the first end. The second electrode is electrically connected with the second end. The covering structure covers the non-absorbing part. The detecting element further includes a carbon nanotube layer. The carbon nanotube layer includes a plurality of carbon nanotubes disposed uniformly.
    Type: Grant
    Filed: September 7, 2010
    Date of Patent: January 10, 2017
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Chun-Hua Hu, Chang-Hong Liu, Shou-Shan Fan
  • Patent number: 9451745
    Abstract: Plant canopy temperature and multi-spectral reflectance are measured with a wireless multi-band sensor, and the temperature data are qualified and the spectral reflectance measurements are classified. The multi-band sensor includes sensors for measuring plant canopy temperature radiation and spectral reflectance over five bands, a microprocessor to receive and store measured data, and a wireless transmitter for transmitting data from the microprocessor to a remote receiver, all enclosed within a single housing. The data are used to detect variations in spectral signature due to plant stress (e.g., disease, water stress) and due to soil background and to qualify temperature data accordingly.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: September 27, 2016
    Assignees: The United States of America, as represented by the Secretary of Agriculture, Board of Trustees of Southern Illinois University
    Inventors: Susan A. O'Shaughnessy, Steven R. Evett, Martin A. Hebel, Paul D. Colaizzi
  • Patent number: 9267905
    Abstract: A method for detecting defect in a weld seam during laser welding. The method includes performing a two-dimensionally locally resolved detection of radiation that is emitted by a solidified molten mass that is adjacent to a liquid melting bath. The method also includes determining at least one characteristic value for heat dissipation in the solidified molten mass by evaluating the detected radiation along at least one profile-section of the solidified molten mass, and detecting a defect in the weld seam by comparing the at least one characteristic value with at least one reference value.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: February 23, 2016
    Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KG
    Inventors: Dieter Pfitzner, Tim Hesse, Winfried Magg
  • Patent number: 9212949
    Abstract: An improved system and method of measuring the temperature of a workpiece in a processing chamber is disclosed. Because silicon has very low emissivity in the infrared band, a coating is disposed on at least a portion of the workpiece. This coating may be graphite or any other material that can be readily applied, and has a relatively constant emissivity over temperature in the infrared spectrum. In one embodiment, a coating of graphite is applied to a portion of the workpiece, allowing the temperature of the workpiece to be measured by observing the temperature of the coating. This technique can be used to calibrate a processing chamber, validate operating conditions within the processing chamber, or to develop a manufacturing process.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: December 15, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Jeffrey E. Krampert, Roger B. Fish
  • Patent number: 9134185
    Abstract: An improved system for evaluating one or more components of a vehicle is provided. The system includes a set of imaging devices configured to acquire image data based on infrared emissions of at least one vehicle component of the vehicle as it moves through a field of view of at least one of the set of imaging devices. An imaging device in the set of imaging devices can include a linear array of photoconductor infrared detectors and a thermoelectric cooler for maintaining an operating temperature of the linear array of detectors at a target operating temperature. The infrared emissions can be within at least one of: the mid-wavelength infrared (MWIR) radiation spectrum or the long wavelength infrared (LWIR) radiation spectrum.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: September 15, 2015
    Assignee: International Electronic Machines Corp.
    Inventors: Zahid F. Mian, Ronald W. Gamache, Shankar B. Baliga
  • Patent number: 9058649
    Abstract: The present invention relates to an ultrasound imaging system (10) and method that allow for a quantitative analysis of the acquired images during acquisition and for an optimized workflow for image acquisition and analysis. The proposed ultrasound imaging system (10) comprises a transducer (12) configured to acquire ultrasound images (14) of an object based on one or more adjustable acquisition parameters, an analyzer (22) configured to analyze an ultrasound image (14) in real-time for a mean intensity value (24), and a processor (28) configured to determine in real-time when the mean intensity value (24) has reached a peak and to change the setting of at least one of the one or more adjustable acquisition parameters after a peak has been determined.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: June 16, 2015
    Assignee: Koninklijke Philips N.V.
    Inventors: Gerard Joseph Harrison, Thomas Patrice Jean Arsene Gauthier
  • Patent number: 9039276
    Abstract: A control unit sets a time interval for measuring a temperature of a liquid crystal panel as a first time interval (1 second), and thereafter measures the temperature of the liquid crystal panel each time the first time interval elapses. When the temperature of the liquid crystal panel is stabilized, the control unit sets a time interval for measuring the temperature of the liquid crystal panel as a second time interval (5 seconds). The control unit measures the temperature of the liquid crystal panel each time the second time interval elapses. Moreover, if an operation to change the amount of light reaching the liquid crystal panel is performed, the control unit restores the time interval for measuring the temperature of the liquid crystal panel to the first time interval.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: May 26, 2015
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Shinsuke Fujikawa
  • Publication number: 20150123562
    Abstract: Temperature monitoring systems for data centers include a plurality of ceiling-mounted infrared sensor arrays. Each infrared sensor array includes a two-dimensional array of infrared emission sensors, and at least some of the infrared emission sensors have field of view patterns that project onto aisle faces of equipment racks that are mounted in rows in the data center. These systems may further include a controller that is remote from at least some of the infrared sensor arrays and that is in communications with the infrared sensor arrays, the controller configured to provide a two-dimensional thermal map of the aisle faces of the equipment racks based at least in part on temperature data received from the infrared sensor arrays.
    Type: Application
    Filed: October 22, 2014
    Publication date: May 7, 2015
    Inventors: Luc W. Adriaenssens, Stewart Findlater
  • Patent number: 8985848
    Abstract: The method and apparatus to automatically inspect or pre-screen the Equipment of passing CMVs employs the novel application of acquiring, processing and analyzing the temperature data from areas of interest on passing wheels using a computer based imaging system to improve the efficiency of current CMV inspecting and/or pre-screening manual methods that require an inspection system operator. The inspection system includes a triggering device, thermographic camera(s), computer based image acquisition hardware, image processing and analysis software, user interface and operator workspace (herein referred to as the “Inspection System”). The components of the apparatus are not limited to the list above nor are all components required to embody the method for inspection or pre-screening of equipment of passing CMVs. The method is a means of collecting the thermal information of the Equipment as it passes through an Inspection Area and analyzing it to determine or estimate its condition or fitness.
    Type: Grant
    Filed: July 2, 2007
    Date of Patent: March 24, 2015
    Assignee: BDC Capital Inc.
    Inventors: Brian Heath, Tse Young (Fred) Ko, Gurcharn Lotey
  • Patent number: 8950935
    Abstract: A non-touch thermometer that senses temperature from a digital infrared sensor is described. A digital signal representing a temperature without conversion from analog is transmitted from the digital infrared sensor received by a microprocessor and converted to body core temperature by the microprocessor.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: February 10, 2015
    Assignee: ARC Devices, Ltd
    Inventors: Mark Khachaturian, Michael G. Smith
  • Patent number: 8911147
    Abstract: A graphical user interface for analyzing thermal images is provided. The interface can be used to identify the temperatures at multiple areas of interest defined on an image. The areas can be denoted by configurable markers of different predetermined shapes. In some embodiments, the interface simultaneously displays temperature statistics relating to the user-identified areas of interest.
    Type: Grant
    Filed: June 15, 2007
    Date of Patent: December 16, 2014
    Assignee: Fluke Corporation
    Inventors: Stefan H. Warnke, Thomas Heinke
  • Patent number: 8911144
    Abstract: A product critical temperature during freeze drying is determined. The product is imaged using optical coherence tomography (“OCT”). The product is freeze dried while the temperature of the product is measured. The product critical temperature is the temperature at which a product structure event occurs during freeze drying.
    Type: Grant
    Filed: April 24, 2012
    Date of Patent: December 16, 2014
    Assignee: Physical Sciences, Inc.
    Inventors: Mircea Mujat, William J. Kessler
  • Patent number: 8905633
    Abstract: A combination fire detection and fire suppression system may include a fire detection system configured to detect an undesirably high temperature associated with an area. The fire detection system may include a temperature sensor including a temperature sensor array and a fire alerting system associated with the temperature sensor. The fire alerting system may be configured to receive information from the temperature sensor and generate a warning signal based on an undesirably high temperature associated with the area. The fire detection system may include a fire control panel configured to receive the warning signal. The system may also include a fire suppression system including a fire suppressant delivery system configured to provide at least one fire suppressant agent to the area associated with the undesirably high temperature.
    Type: Grant
    Filed: August 27, 2009
    Date of Patent: December 9, 2014
    Assignee: Federal Express Corporation
    Inventors: James B. Popp, Arthur J. Benjamin
  • Publication number: 20140334519
    Abstract: A method for monitoring a temperature of a survey surface in a room. The method includes: providing a number of temperature sensors coupled to the survey surface; receiving from the number of temperature sensors respective temperature values; applying an extrapolation model to the received temperature values and extrapolating an extrapolated thermographic scan of the survey surface; and monitoring the temperature of the survey surface on the basis of the extrapolated thermographic scan.
    Type: Application
    Filed: December 21, 2011
    Publication date: November 13, 2014
    Applicant: Telecom Italia S.p.A.
    Inventors: Roberto Antonini, Felice Fulvio Faraci, Marco Gaspardone
  • Publication number: 20140328370
    Abstract: The invention provides a method for a non-destructive, non-contacting and image forming examination of a sample by means of the heat flow thermography method where the examination consists of evaluating an existence and/or depth distance values of any heat flow velocity transitions below a surface of the sample, wherein the sample is excited by heat pulses of at least one excitation source, and a thermal flow originating therefrom is captured by at least one infrared sensor in an image sequence of thermal images, and wherein the thermal images obtained from the image sequence are evaluated by means of a signal and image processing and depicting a thermal flow with a resolution in time and in space.
    Type: Application
    Filed: December 10, 2012
    Publication date: November 6, 2014
    Inventors: Haymo Lang, Jochen Mielke
  • Patent number: 8858069
    Abstract: There is provided an optical fiber temperature distribution measuring device which measures a temperature distribution along an optical fiber (3) using backward Raman scattering light generated in the optical fiber. The device includes: a reference temperature thermometer (11) disposed in the vicinity of the optical fiber so as to measure a reference temperature (T1, T2) of the optical fiber; an arithmetic controller (7) that calculates a temperature (T) of the optical fiber based on the backward Raman scattering light; and a temperature corrector (12) that corrects the calculated temperature (T) based on a correction formula containing the reference temperature as a parameter.
    Type: Grant
    Filed: June 21, 2011
    Date of Patent: October 14, 2014
    Assignee: Yokogawa Electric Corporation
    Inventor: Hisao Agawa
  • Publication number: 20140294043
    Abstract: A portable thermal imaging system includes a portable housing configured to be carried by a user, a bolometer sensor assembly supported by the housing and including an array of thermal sensor elements and at least one plasmonic lens, a memory including program instructions, and a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements, assign each of the obtained signals with a respective color data associated with a temperature of a sensed object, and render the color data.
    Type: Application
    Filed: December 20, 2013
    Publication date: October 2, 2014
    Inventors: Ashwin Samarao, Gary O'Brien, Ando Feyh, Gary Yama, Fabian Purkl
  • Patent number: 8764285
    Abstract: This invention provides an apparatus for nondestructive residential inspection and various methods for using a thermal imaging apparatus coupled to inspect exterior residential components, interior residential component, for mold. More specifically, this invention provided a computerized method to facilitate inspecting a residential building.
    Type: Grant
    Filed: September 12, 2008
    Date of Patent: July 1, 2014
    Assignee: Homesafe Inspection, Inc.
    Inventors: Peng Lee, Kevin J. Seddon
  • Patent number: 8740454
    Abstract: An optical fiber is provided with a first measurement portion and a second measurement portion provided with covering layers different at least in any one of heat capacity and heat conductivity. Then, the first measurement portion and the second measurement portion are located in the same measurement position and light is inputted from a temperature measurement device into the optical fiber. Thereafter, the temperature measurement device receives backscattered light generated inside the optical fiber to measure temperature distribution in a longitudinal direction of the optical fiber. An analyzer analyzes a variation over time of the temperature distribution outputted from the temperature measurement device to calculate a temperature and a wind velocity in a measurement position where the first measurement portion and the second measurement portion are located.
    Type: Grant
    Filed: August 1, 2012
    Date of Patent: June 3, 2014
    Assignee: Fujitus Limited
    Inventors: Fumio Takei, Kazushi Uno, Takeo Kasajima
  • Patent number: 8682417
    Abstract: Methods for detection of heat-related symptoms can include use of a thermal sensor to obtain thermal data. Subsets of the thermal data can correspond with multiple subjects. The subsets can be compared to determine whether any of the subjects is a thermal outlier relative to the remaining subjects.
    Type: Grant
    Filed: October 26, 2011
    Date of Patent: March 25, 2014
    Assignee: Intermountain Invention Management, LLC
    Inventor: Glen Forrest Huff
  • Patent number: 8636406
    Abstract: An apparatus determines cooling characteristics of an operational cooling device used for transferring heat from an electronic device. The operational cooling device is thermally coupled to a heat pipe. The heat pipe has an exposed surface for selective application of heat thereon. Heat from a localized heat source is selectively applied to at least one region of the exposed surface. The heat source is preferably capable of being varied both positionally relative to the exposed surface and in heat intensity. A heat shield is preferably positioned around the exposed surface of the heat pipe to isolate the operational cooling device from the heat from the localized heat source. A temperature detector repeatedly measures a temperature distribution across the exposed surface while the cooling device is in a heat transfer mode. The temperature distribution is then used to thermally characterize the operational cooling device.
    Type: Grant
    Filed: April 12, 2012
    Date of Patent: January 28, 2014
    Assignee: International Business Machines Corporation
    Inventors: Hendrik F. Hamann, Madhusudan K. Iyengar, James A. Lacey, Roger R. Schmidt
  • Patent number: 8523427
    Abstract: A sensor device formed on a semiconductor substrate. The device comprises a thermal radiation sensor including a sensing cell and a referencing cell which are co-operable for providing a first output signal indicative of the temperature fluctuation resulting from incident radiation. A gradient sensor including a pair of cells spatially located on the semiconductor substrate is provided which are co-operable to provide a second output signal indicative of the temperature gradient across the semiconductor substrate for facilitating calibrating the first output signal. At least one of the cells of the gradient sensor is not common to the cells of the thermal radiation sensor.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: September 3, 2013
    Assignee: Analog Devices, Inc.
    Inventor: Luke Alexander Pillans
  • Patent number: 8496373
    Abstract: A test specimen having a to-be-photographed surface and an attachment surface which is a back side thereof is produced, and attached to a structure. An artificial abnormal portion is provided between a to-be-inspected surface of the structure and the to-be-photographed surface of the test specimen. The to-be-photographed surface of the test specimen is photographed by the infrared camera. When a surface temperature difference between the abnormal and the sound portions increases to a certain level on the to-be-photographed surface, it is capable of discriminating between the abnormal and the sound portions by an infrared thermal image of the test specimen. In a time zone in which discriminating between the abnormal and the sound portions is capable, the to-be-inspected surface of the structure is photographed by the infrared camera. If there is a damage in the surface layer of the structure, a damaged position can be discriminated by an infrared thermal image.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: July 30, 2013
    Assignee: West Nippon Expressway Engineering Shikoku Company Limited
    Inventors: Yukio Akashi, Kazuaki Hashimoto, Shogo Hayashi
  • Patent number: 8496376
    Abstract: An automatic and continuous method is presented to improve the accuracy of fiber optic distributed temperature measurements derived from Raman back scatterings utilizing two light sources with different wavelengths, by choosing the wavelengths of the two sources so the primary source's return anti-Stokes component overlaps with the incident wavelength of the secondary light source thereby canceling out the non-identical attenuations generated by the wavelength differences between Stokes and anti-Stokes bands.
    Type: Grant
    Filed: July 7, 2008
    Date of Patent: July 30, 2013
    Assignee: SensorTran, Inc.
    Inventors: Chung Lee, Kwang Suh
  • Patent number: 8480300
    Abstract: A device for analyzing a beam profile of a laser beam includes a carrier plate, a plurality of first temperature-sensitive measuring elements, in particular diodes, which are arranged in a preferably matrix-like arrangement on a first side of the carrier plate at a plurality of measuring locations, and a plurality of second temperature-sensitive measuring elements, in particular diodes, which are arranged in another preferably matrix-like arrangement on a second side of the carrier plate. One of the first measuring elements is arranged in each case opposite one of the second measuring elements and is thermally coupled to the first measuring element using strip conductors which extend through the carrier plate. Such a device can be included in a laser processing machine and used in an associated method for analyzing a beam profile of a laser beam.
    Type: Grant
    Filed: November 2, 2010
    Date of Patent: July 9, 2013
    Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KG
    Inventors: Wolfgang Scholich-Tessmann, Marcelo Cabaleiro Martins
  • Patent number: 8469588
    Abstract: A system includes a radiation detector array directed toward a fluid flow into a compressor. The radiation detector array is configured to output a signal indicative of a two-dimensional temperature profile of the fluid flow. The system also includes a controller communicatively coupled to the radiation detector array. The controller is configured to detect a temperature variation across the fluid flow based on the signal.
    Type: Grant
    Filed: May 3, 2010
    Date of Patent: June 25, 2013
    Assignee: General Electric Company
    Inventors: Rahul Jaikaran Chillar, Adil Ansari
  • Patent number: 8454230
    Abstract: The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.
    Type: Grant
    Filed: February 16, 2010
    Date of Patent: June 4, 2013
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Frank Melzer, Axel Scholz
  • Patent number: 8449176
    Abstract: A method for processing thermographic data is disclosed including thermally disturbing a specimen of unknown quality, collecting thermal data from said specimen, converting the collected data into a measure of variance and comparing the variance from the sample of unknown quality against the variance of a sample of known quality in order to determine if the quality of the specimen of unknown quality is acceptable.
    Type: Grant
    Filed: April 20, 2010
    Date of Patent: May 28, 2013
    Assignee: Thermal Wave Imaging, Inc.
    Inventor: Steven Shepard
  • Patent number: 8442263
    Abstract: A method for determining heat and/or energy loss from a building using a thermographic image of the building, the image of the building being captured at a pre-determined angle, preferably perpendicular to the building, the method comprising analyzing automatically the image to determine the temperature of areas of the image, determining the real size of the scene associated with the image areas that are above a pre-determined temperature and using this to determine heat and/or energy loss from the building.
    Type: Grant
    Filed: December 10, 2008
    Date of Patent: May 14, 2013
    Assignee: IRT Surveys Ltd
    Inventors: Stewart Little, Alan Little
  • Patent number: 8408786
    Abstract: In one aspect, the present invention provides techniques and apparatus for optical characterization of photonic devices and/or circuits. By way of example, the techniques can be used to identify damaged devices in photonic integrated circuits. In some embodiments, thermal imaging is employed as a diagnostic tool for characterizing the devices/circuits under investigation. For example, in one embodiment, integrated cascaded semiconductor amplifiers can be characterized using amplified spontaneous emission from one amplifier as a thermal modulation input to another amplifier. A thermoreflectance image of the second amplifier can reveal flaws, if present. Further, in some embodiments, thermal imaging in conjunction with a total energy model can be employed to characterize the elements of photonic circuits optically and/or to map the optical power distribution throughout the circuits.
    Type: Grant
    Filed: May 5, 2008
    Date of Patent: April 2, 2013
    Assignees: Massachusetts Institute of Technology (MIT), Mount Holyoke College
    Inventors: Janice A. Hudgings, Rajeev J. Ram, Maryam Farzaneh
  • Patent number: 8376209
    Abstract: Systems and methods can produce thermal images of the mounting of a thermally-enhanced integrated circuit (IC) upon a circuit board. The system includes a thermal imaging camera that is operable to image the thermal dissipation and/or conduction through the heat sink into a mounting pad on the substrate. In testing the thermally-enhanced IC, the substrate or IC is connected to a power source, and the IC is operated such that the IC begins to generate heat. As the heat is conducted or dissipated through the heat sink into the mounting pad, a thermal imaging camera can detect the heat conduction and/or dissipation through the heat sink into the substrate. If there are voids or other types of failures in the mounting of the IC, the thermal imaging camera can detect cooler or colder spots in the image.
    Type: Grant
    Filed: May 13, 2010
    Date of Patent: February 19, 2013
    Assignee: Avaya Inc.
    Inventors: Jae Choi, Mark D. Woolley
  • Patent number: 8353626
    Abstract: An apparatus for determining a temperature of an object without contacting the object. An etalon filter may be used to receive spectral radiation of the object over a plurality of wavelengths and to generate a spectral output signal. A linear array detector may be used that is responsive to the spectral output signal from the etalon filter and adapted to generate an output indicative of the spectral radiation at each of one of the plurality of wavelengths. An actuator may be used that controls movement of one element of the etalon filter to assist in generating the output. A processor may be used which is responsive to the output of the linear array detector and which analyzes a known characteristic of a black body at a plurality of test temperatures, against the output of the linear array detector, to determine a specific temperature of the object.
    Type: Grant
    Filed: January 24, 2011
    Date of Patent: January 15, 2013
    Assignee: The Boeing Company
    Inventors: Mark D. Rogers, Loyal B. Shawgo
  • Patent number: 8348502
    Abstract: There is provided a lighting apparatus that is capable of accurately measuring the temperature of an optical member that transmits therethrough light emitted from a light source without blocking the optical path of the light.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: January 8, 2013
    Assignee: Nikon Corporation
    Inventor: Norifumi Nakagawa
  • Patent number: 8337079
    Abstract: To provide a fluorescent temperature sensor capable of identifying easily the location of a failure. A fluorescent temperature sensor for producing a temperature signal from fluorescent light from a fluorescent material and that has been optically stimulated comprises a light projecting module having an LED for projecting light at the fluorescent material and a second photodiode for receiving light emitted from the LED and a light receiving module having a first photodiode for receiving the light emitted from the fluorescent material, where the location of a failure in the sensor can be identified based on, at least, the output signal from the second photodiode.
    Type: Grant
    Filed: May 21, 2009
    Date of Patent: December 25, 2012
    Assignee: Azbil Corporation
    Inventors: Seiichiro Kinugasa, Atsushi Kato, Shunji Ichida
  • Patent number: 8300922
    Abstract: Methods are provided for using a programmable hand-held inspection system to direct an inspection process. Methods typically involve loading a survey template application software routine into the programmable hand-held inspection system where the survey template application software routine describes at least one aspect of the inspection process. Some embodiments involve wirelessly uploading at least a portion of the survey template application software routine. Generally an image representation of an area is provided on a display. The system may be used to guide an operator through at least one aspect of the inspection process or to perform steps in a survey. A location within the vicinity of the area may be identified using a global positioning system. A record may of the survey may be created.
    Type: Grant
    Filed: June 7, 2011
    Date of Patent: October 30, 2012
    Assignee: CSI Technology, Inc.
    Inventor: Raymond E. Garvey, III
  • Patent number: 8300880
    Abstract: A system and method is disclosed for acquiring temperature data from a plurality of features in a chamber including capturing a first image of an interior area of the chamber, capturing a second image of the interior area of the chamber, identifying a plurality of features within the data for the first image and the data for the second image, generating an interior area representation based on the first image data, the second image data, and the identification of each feature of the plurality of features in the interior area, and correlating the interior area representation to temperature information related to the interior area.
    Type: Grant
    Filed: June 5, 2009
    Date of Patent: October 30, 2012
    Inventors: Ali Esmaili, Xianming Jimmy Li, William Robert Licht, Kevin Boyle Fogash, Oliver Jacob Smith, IV, Blaine Edward Herb, Thomas Joseph Bzik
  • Patent number: 8240912
    Abstract: A non-contact measurement device includes two or more detectors for sensing scene data from corresponding measurement zones within a target scene. Devices further include an optical system for imaging scene data from the target scene onto the detectors. The optical system is configured to provide a different optical profile for each detector, such that the device can be used to provide a best-fit optical profile for a variety of non-contact applications.
    Type: Grant
    Filed: August 15, 2008
    Date of Patent: August 14, 2012
    Assignee: Fluke Corporation
    Inventors: Medwin E. Schreher, Kenneth A. Pomper
  • Patent number: 8109669
    Abstract: Methods and systems for determining a radial differential metrology profile of a substrate heated in a process chamber is provided. Methods and systems for determining an angular or azimuthal differential metrology profile of a rotating substrate in a processing chamber are also provided. The radial and azimuthal differential metrology profiles are applied to adjust a reference metrology profile to provide a Virtual metrology of the process chamber. The virtual metrology is applied to control the performance of the process chamber.
    Type: Grant
    Filed: November 19, 2008
    Date of Patent: February 7, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Wolfgang Aderhold, Jallepally Ravi, Balasubramanian Ramachandran, Aaron M. Hunter, Ilias Iliopoulos
  • Patent number: 8104951
    Abstract: Methods and apparatus for measuring substrate uniformity is provided. The invention includes placing a substrate in a thermal processing chamber, rotating the substrate while the substrate is heated, measuring a temperature of the substrate at a plurality of radial locations as the substrate rotates, correlating each temperature measurement with a location on the substrate, and generating a temperature contour map for the substrate based on the correlated temperature measurements. Numerous other aspects are provided.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: January 31, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Wolfgang Aderhold, Andreas G. Hegedus, Nir Merry
  • Publication number: 20110268149
    Abstract: A system includes a radiation detector array directed toward a fluid flow into a compressor. The radiation detector array is configured to output a signal indicative of a two-dimensional temperature profile of the fluid flow. The system also includes a controller communicatively coupled to the radiation detector array. The controller is configured to detect a temperature variation across the fluid flow based on the signal.
    Type: Application
    Filed: May 3, 2010
    Publication date: November 3, 2011
    Applicant: General Electric Company
    Inventors: Rahul Jaikaran Chillar, Adil Ansari
  • Patent number: 7989769
    Abstract: Thermographic imaging equipment is incorporated directly into cabinets housing electrical switchgear to provide for dedicated, nearly continuous monitoring of the contained equipment. A mechanical scanning technique may allow low-cost sensors to provide essentially continuous thermographic monitoring. Dedicated thermal imaging equipment allows automatic analysis through predefined temperature threshold maps.
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: August 2, 2011
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: David D. Brandt, David L. Jensen
  • Patent number: 7980758
    Abstract: The invention concerns an equipment for non-contact temperature measurement (1) of samples of materials (2) arranged in a vacuum chamber (12). A UV lamp (6) illuminates the samples (2) through a window (4), so as to subject them to a predetermined thermal cycle and to perform an environmental test, in particular for materials designed for space missions. An external pyrometer measures the temperature of the samples (2) through a window (6). It is associated with a scanning module (9) including a mobile mirror, with two axes of rotation and three orthogonal axes of translation, arranged on the optical path of the infrared radiation (Rir) so as to obtain a two-dimensional scanning of each sample (2) by means of a measuring spot focused on the surface of the samples. In a preferred embodiment, the samples are of slight thickness and locked pressed against a convex support. The whole assembly is monitored by an automatic data processing system with recorded program (10).
    Type: Grant
    Filed: June 7, 2006
    Date of Patent: July 19, 2011
    Assignee: Organisation Intergouvernementale Dite Agence Spatiale Europeenne
    Inventors: Christoph SempriMoschnig, Marc Van Eesbeek, Stan Heltzel
  • Patent number: 7946760
    Abstract: In one embodiment, the invention is a method and apparatus for dynamic measurement of across-chip temperatures. One embodiment of a method for measuring temperatures across an integrated circuit chip includes generating a plurality of surface images of the integrated circuit chip, deriving power values across the integrated circuit chip from the surface images, computing the temperatures across the integrated circuit chip in accordance with the power values, and outputting the temperatures.
    Type: Grant
    Filed: May 23, 2008
    Date of Patent: May 24, 2011
    Assignee: International Business Machines Corporation
    Inventor: Kerry Bernstein