Abstract: A active thermographic method for detecting subsurface defects in a specimen, particularly kissing unbond defects, includes heating a specimen, applying a force to the surface of the specimen to shift and separate the walls of the defect, and obtaining thermographic images of the specimen over time to monitor the heat flow through the specimen and detect thermal discontinuities. Because kissing unbond defects normally have good physical contact, and therefore good thermal conductivity, between its walls, these defects can go undetected in conventional active thermographic methods. By distorting the surface of the specimen, the kissing unbond defect is enlarged enough to generate sufficient thermal contrast for the defect to appear in the thermographic images.

Abstract: Hot melt adhesive sensing systems and methods including detecting (410) multiple areas of a target, for example, a hot adhesive material, by sensing changes in temperature with a corresponding number of thermal sensors, summing (420) an output of the thermal sensors, and evaluating (430) the summed output by comparing the summed output with a reference, the results of which may be assessed relative to a specified tolerance.

Abstract: The invention relates to a method and to a device (1) for testing materials by determining and displaying as an image temperature differences above a threshold value on the surface of test objects (8). In a first step, a camera for determining and displaying as an image the temperature differences above a threshold value is used to determine the temperatures of object elements (22) within a test area (14) of the test object (8) facing the camera. The test area (14) is then provided with heat by beam (4) in such a manner that the temperature of the surface of the test object (8) rises in the test area (14) by at least of the threshold value. The object elements (22) are displayed as image elements in such a manner that the temperature differences above the threshold value between the object elements (22) are visible. The cool-down of the test area (14) is indicated by means of the image elements (20).

Abstract: A solar receiver system for utilizing solar energy to produce electrical power and to generate a temperature profile of a plurality of receiver tubes utilized in the system. The solar receiver system includes a solar receiver having a plurality of receiver panels including the plurality of receiver tubes through which a coolant flows. Additionally, the solar receiver system includes a plurality of IR cameras adapted to view at least a portion of a surface area of the solar receiver. Each IR camera is adapted to have a field of view including a different specified region of the surface area of the solar receiver. Furthermore, the solar receiver system includes a master control system adapted to receive an IR image from each IR camera, wherein each IR image depicts surface area temperatures and variances over the region of the solar receiver viewed by each IR camera. The master control system generates a temperature profile of the surface area of the solar receiver utilizing the IR images.

Abstract: The invention provides a cooling system for protecting an image fiber and an imaging device from thermal influences and a temperature measurement apparatus, for a molten metal, capable of being easily controlled and stably measuring the temperature. The temperature measurement apparatus for a molten metal comprises four connectable portions of a nozzle portion a purge/cooling gas introduction portion, an image fiber fitting portion with a window glass and an image fiber to a double pipe nozzle protection tube. A distance from a nozzle distal end as an introduction portion of thermal radiation light to a light reception portion at an image fiber distal end becomes short so that a greater amount of thermal radiation light can be received.

Abstract: An apparatus for measuring the temperature of workpieces transported on a conveyor is disclosed. In one broad aspect of the invention, the apparatus includes a translatable assembly which has a pick-up tool for picking up workpieces and a temperature-sensing device which is in proximity to the pick-up tool for measuring the temperature of the workpiece. Other embodiments are disclosed, including eliminating the pick-up tool, provided the temperature sensing device travels with the workpiece. Scanners can be utilized to designate the largest of the workpieces to be measured or for detecting overlapping workpieces. Feedback temperature control is achieved by varying a parameter, such as conveyor speed or a heat engine temperature. Also, a modeling module can be incorporated to assist with temperature control of the workpieces.

Abstract: A method for inspecting an object and detecting defects is taught (BGA and Flip-Chip solder joints on a PCB particularly). The method comprises injecting a thermal stimulation on the object; capturing a sequence of consecutive infrared images of the object to record heat diffusion resulting from the heat pulse; comparing the heat diffusion on said object to a reference; and determining whether the object comprises any defects. Also described is a system comprising a mounting for mounting the object; a thermal stimulation module for applying a thermal stimulation to the bottom surface of the object; an infrared camera for capturing infrared images of the object on the top surface of the object to record a change in infrared radiation from the top surface resulting from the thermal stimulation; and a computer for comparing the change in infrared radiation within a region on the top surface to a reference and determining whether the object comprises any defects.

Abstract: A system and method for sensing and controlling the temperature of a heating, ventilation and air conditioning (HVAC) system utilizes an infrared sensor. The infrared sensor is used to detect temperature over several different areas on an evaporator surface on which a cold spot may occur. More preferably, the infrared sensor continuously scans the whole surface on the air outlet side of the evaporator. The sensed temperature is used to detect any cold spots that may dynamically form on the evaporator surface. The system is controlled in response to the detected temperature.

Abstract: Described are methods and systems for providing improved defect detection and analysis using infrared thermography. Test vectors heat features of a device under test to produce thermal characteristics useful in identifying defects. The test vectors are timed to enhance the thermal contrast between defects and the surrounding features, enabling IR imaging equipment to acquire improved thermographic images. In some embodiments, a combination of AC and DC test vectors maximize power transfer to expedite heating, and therefore testing. Mathematical transformations applied to the improved images further enhance defect detection and analysis. Some defects produce image artifacts, or “defect artifacts,” that obscure the defects, rendering difficult the task of defect location. Some embodiments employ defect-location algorithms that analyze defect artifacts to precisely locate corresponding defects.

Abstract: In accordance with one aspect of the disclosure, a method of sensing the temperature of a molten metal vehicle is provided. In one exemplary embodiment, the method includes utilizing at least one thermal imager located to the side of the molten metal during the dispensing of the molten metal and capturing at least one thermal image for determining the rotational position of the molten metal vehicle by calculating an area of the molten metal.

Abstract: This invention provides an apparatus for nondestructive residential inspection and various methods for using a thermal imaging apparatus coupled to inspect exterior residential components, interior residential components, a pitched roof and basement of a residential building and the electrical system of a residential building.

Abstract: An infrared camera is configured to measure a temperature distribution on a surface of at least one rotating turbine bucket. With the measured surface temperature distribution, a condition index is determined which reflects either an overall condition of a bucket or a specific location on the bucket. The condition index can be used to predict the remaining useful life of a turbine bucket, which can be used to optimize maintenance intervals and thereby reduce maintenance costs.

Abstract: A method of measuring a temperature of an object body in an electric furnace, based on an intensity of a radiant energy emitted from the object body, the electric furnace being provided with an electric heater operable by application of a drive voltage thereto to heat the object body, the method comprising: a radiant-energy detecting step of detecting an intensity of a radiant energy emitted from the object body; a stray-light noise eliminating step of determining as a noise an intensity of a radiant energy of a stray light which is emitted from an inner wall surface of the electric furnace toward the object body and reflected by a surface of the object body, according to a predetermined relationship between the intensity of the radiant energy of the stray light and the drive voltage applied to the electric heater and based on an actually applied value of the drive voltage, and subtracting the intensity of the radiant energy of the stray light determined as the noise, from the detected intensity of the radian

Abstract: A method and device for photothermal imaging tiny metal particles which are immersed in a given medium like a living cell deposited onto a transparent glass slide. The given medium and immersed tiny metal particles are illuminated through separate phase reference laser beam and sensitive probe laser beam, with the sensitive probe laser beam including a heating laser beam undergoing through impingement on the given medium slight phase changes induced by photothermal effect due to a local heating, in the absence of any substantial phase changes to the phase reference laser beam. Illuminating is performed by focusing the separate phase reference and sensitive probe laser beam through the transparent glass slide at a given depth within the given medium and a transmitted phase reference laser beam and a transmitted sensitive probe laser beam undergoing the slight phase changes are generated.

Abstract: The invention is a synchronized electronic shutter system (SESS) and method for same side and through transmission thermal analysis and inspection of a material for finding defects, corrosion, disbond defects, integrity of a weld and determination of paint thickness. The system comprises an infrared detector that acquires background images of the sample. A shutter then covers the detector and lamps rapidly heat the sample above ambient temperature. Shutters cover all lamps at the same time the shutter over the infrared detector is opened. The infrared detector acquires a series of temperature images over time radiated from the sample as the sample cools down. After collecting a series of temperature images taken by the SESS, a processed image is developed using one of the group comprising time derivative calculation, temperature normalization data reduction routine, thermal diffusivity curve fitting and averaging the series of temperature images.

Abstract: The invention features methods and systems for detecting the presence of an energetic material in a sample in which the presence of the energetic material is unknown. The method includes the steps of: heating the sample; measuring heat flow between the sample and its surrounding environment, e.g., by using differential scanning calorimetry (DSC); and analyzing the measured heat flow between the sample and its surrounding environment. An exothermal peak in the measured heat flow indicates the presence of the energetic material in the sample. The system includes a thermal measuring apparatus for performing the heating and measuring steps, and an analyzer for detecting the presence of the energetic material based on the measured heat flow. The invention also features methods and systems for identifying contraband materials (e.g., explosives and drugs) by measuring the thermogram (e.g., by DSC) of a sample to be identified and comparing it to reference thermograms for known contraband materials.

Abstract: A process for thermal imaging scanning of a swaged heater of an anode subassembly of a hollow cathode assembly, comprising scanning a swaged heater with a thermal imaging radiometer to measure a temperature distribution of the heater; raising the current in a power supply to increase the temperature of the swaged heater; and measuring the swaged heater temperature using the radiometer, whereupon the temperature distribution along the length of the heater shall be less than plus or minus 5 degrees C.

Abstract: A plurality of miniature IR sensors disposed in a sensor array are aimed at a target area of interest, the array providing a thermal “image” of the target area. Processing electronics detect the hottest spot of the target as indicated by sensors in the array to directly indicate or estimate the hottest temperature(s) of the target area. Preferably, the sensor array can be utilized, for example, to determine the core body temperature of a patient by examination of the tympanic membrane.

Abstract: A method for high temperature process control in which the surface emission intensity of a surface is measured at two near-infrared wavelengths over an array of points covering a fill field of view. The emissivity variable is removed from the temperature calculation and the surface emission intensity measurements are digitally processed, resulting in generation of a color temperature map. The color temperature map is processed in a thermal imaging control algorithm process, producing control output signals, which are then input to a temperature control means for controlling the surface temperature. The apparatus used in carrying out this method is surface temperature monitoring system which includes a multiple-wavelength, near-infrared thermal imaging system.

Abstract: A method and apparatus are provided for automated non-destructive evaluation (NDE) thermal imaging tests of combustor liners and other products. The apparatus for automated NDE thermal imaging testing of a sample includes a flash lamp positioned at a first side of the sample. An infrared camera is positioned near a second side of the sample. A linear positioning system supports the sample. A data acquisition and processing computer is coupled to the flash lamp for triggering the flash lamp. The data acquisition and processing computer is coupled to the infrared camera for acquiring and processing image data. The data acquisition and processing computer is coupled to the linear positioning system for positioning the sample for sequentially acquiring image data.

Abstract: The invention relates to a method in the process of manufacturing and/or finishing a fibre web (11), in which method said continuous and moving web (11), and/or a moving means (16, 17) related to the processing of the web (11), is monitored by one or more thermal cameras (10) of the infrared range or a corresponding detector/detectors for the purpose of controlling the quality or condition. According to the invention, a substantially continuous two-dimensional thermal image or continuous thermal chart (20) of an object (11, 16, 17) being monitored and in a propagating and/or rotating movement is formed by said detector/detectors in a time-resolved manner and in synchronization with the movement of the object (11, 16, 17) in the direction of the movement.

Abstract: The invention relates to a method and a device for registering the presence of an ophthalmic moulding consisting of a biocompatible polymeric material, especially an ophthalmic lens, particularly a contact lens, in a package. The invention solves the problem through the use of an IR camera. Packages containing a moulding, especially a contact lens, have a change in their temperature distribution compared with a package without a contact lens. By evaluating the temperature difference, it is possible to determine whether or not there is a contact lens in a package. In particular, by using the detecting method according to the invention, one can determine whether there is a contact lens in the package directly after the filling procedure.

Abstract: Chemical agent warfare materials and their simulant liquids are identified on terrestrial surfaces at a distance by recognizing the contaminant's infrared fingerprint spectrum brought out in thermal luminescence (TL). Suspect surfaces are irradiated with microwave light that is absorbed into the surface and, subsequently, TL is released by the surface. An optics receiver collects the released TL radiant light, and a data acquisition system searches this TL radiant flux for the contaminant's fingerprint infrared spectrum. A decision on the presence or absence of any-of-N contaminants is done by a neural network system that acts as a filter through real-time pattern recognition of the contaminant's unique infrared absorption or emission spectra.

Abstract: A system and method for determining the stray radiation within a heating chamber of a thermal processing apparatus. The stray radiation is determined by moving a generally unheated wafer vertically through the heating chamber, and measuring with a detector the amount of radiation reflected from the wafer at each vertical wafer position. The total measured radiation is then correlated with the stray radiation component of the total radiation.

Abstract: A device for contactless testing of structural and/or surface defects of large-surface bodies, especially of slab-shaped materials includes a conveying device with an unsupported area; a source of heat arranged above the plane of conveyance and extending transversally to the direction of conveyance and which radiates heat in lines or strips onto the plane of conveyance; a thermographic camera having at least one camera line aligned transversally to the direction of conveyance and arranged above the plane of conveyance and after the source of heat in the direction of conveyance; and a computer connected to the camera that has a monitor and generates a separate heat image pattern from every camera line.

Abstract: The invention features methods and systems for detecting the presence of an energetic material in a sample in which the presence of the energetic material is unknown. The method includes the steps of: heating the sample; measuring heat flow between the sample and its surrounding environment, e.g., by using differential scanning calorimetry (DSC); and analyzing the measured heat flow between the sample and its surrounding environment. An exothermal peak in the measured heat flow indicates the presence of the energetic material in the sample. The system includes a thermal measuring apparatus for performing the heating and measuring steps, and an analyzer for detecting the presence of the energetic material based on the measured heat flow. The invention also features methods and systems for identifying contraband materials (e.g., explosives and drugs) by measuring the thermogram (e.g., by DSC) of a sample to be identified and comparing it to reference thermograms for known contraband materials.

Abstract: A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the thermal processing apparatus, and then determines the reflectivity of the workpiece during processing within the heating chamber of the thermal processing apparatus by correlating the ex situ wafer reflectivity with the intensity of the radiation reflected from the wafer within the heating chamber.

Abstract: A plastic identifying apparatus, includes a heating unit, a measuring unit, and a displaying unit. The heating unit heats a plastic object. The measuring unit measures a temperature of the plastic object to generate a measurement result and outputs a result data indicating the measurement result. The displaying unit displays the result data on the plastic object.

Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit more than two laser beams against a surface whose temperature is to be measured and positioning said laser beams about the energy zone to outline said energy zone. The apparatus comprises a laser sighting device adapted to emit more than two laser beams against the surface and means to position said laser beams about the energy zone to outline said energy zone. The laser beams may be rotated about the periphery of the energy zone. In another embodiment, a pair of laser beams are projected on opposite sides of the energy zone. The laser beams may be further pulsed on and off in a synchronised manner so as to cause a series of intermittent lines to outline the energy zone. Such an embodiment improves the efficiency of the laser and results in brighter laser beams being projected.

Abstract: Body temperature measurements are obtained by scanning a thermal radiation sensor across the side of the forehead over the temporal artery. A peak temperature measurement is processed to compute an internal temperature of the body as a function of ambient temperature and the sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature through a minimum in the range of 96° F. and 100° F. The radiation sensor views the target surface through an emissivity compensating cup which is spaced from the skin by a circular lip of low thermal conductivity.

Abstract: The invention refers to a measuring head for use in radiant energy flash measuring of the thermal diffusivity of heterogeneous samples (S) under employment of a probe beam (B) generated by a radiant energy generating means and a detector means for detecting a temperature rise of the sample (S), comprising a sample holder means (SH) for receiving the sample (S). The technical problem to be solved is to provide a measuring head offering the opportunity to align the sample (S) with the probe beam (B) in order to carry out local measurements of the thermal diffusivity in the axial direction of the sample (S) or to deposite the energy shot on the most suitable area of the sample (S), dependently on the given sample features. Therefore, according to the present invention it is proposed to arrange the sample holder means (SH) movable in at least one direction (X, Y) perpendicular to the optical axis (AB) of the probe beam (B).

Abstract: A peeling detector for a tunnel wall capable of rapidly inspecting the tunnel wall by effectively using infrared radiation is provided. The detector heats a tunnel wall 1 with a light emitting heater 4 while moving. An infrared camera 6 detects infrared radiation radiated by the wall after heating. Based on the quantity of the infrared energy, a difference in the temperature between peeled and normal portions induced by heating is grasped to evaluate whether the peeling of the tunnel wall 1 is present or not.

Abstract: A method for measuring the temperature of a scene using a detector having at least one reference pixel, with an integratable sampling circuit associated with each pixel. Initially, an ambient reference temperature is observed with the reference pixel(s) to provide a parameter, generally voltage, indicative of that temperature to provide a constant voltage output indicating that temperature by varying the sampling circuit integration time. Each non-reference pixel is exposed to different scene and ambient temperatures and the integration time for each set of data for each pixel is recorded. For each pixel, an equation is provided relating integration time to pixel voltage when the ambient temperature and the scene temperature are the same to correct for offsets and an equation is provided relating integration time and offset corrected pixel value to the difference between the ambient temperature and the scene temperature when the ambient temperature and scene temperature differ for correction of responsivity.

Abstract: A sample and a scanning probe microscope system are used as the detector for an infrared spectrometer to circumvent the diffraction limit of conventional infrared microscopy, and to provide spectroscopic images with a greatly improved spatial resolution, potentially as low as a few tens of nanometers. The beam from an infrared spectrometer is directed at the sample. The sample is heated to the extent that it absorbs infrared radiation. Thus the resulting temperature rise of an individual region depends upon the particular molecular species present, as well as the range of wavelengths of the infrared beam. These individual temperature differences are detected by a miniature thermal probe. The thermal probe is mounted in a scanning thermal microscope. The scanning thermal microscope is then operated used to produce multiple surface and sub-surface images of the sample, such that the image contrast corresponds to variations in either thermal diffusivity, surface topography or chemical composition.

Abstract: An apparatus for classifying a plurality of poultry eggs includes means for detecting the opacities of the eggs, means for detecting the temperatures of the eggs, and means for classifying the eggs using the opacities and the temperatures of the eggs. A method for classifying poultry eggs includes measuring the opacities of the eggs, measuring the temperatures of the eggs, and classifying the eggs as a function of the opacities and the temperatures of the eggs.

Abstract: A fiber draw furnace for drawing a fiber from a preform has a thermographic sensor in combination with a thermographic profiling processor. The thermographic sensor responds to infrared energy radiating from the fiber, for providing a thermographic sensor signal containing information about the infrared energy radiating from the fiber. The thermographic profiling processor responds to the thermographic sensor signal, for providing a thermographic profiling processor signal containing information about a thermographic profile of variations in the heat emitted across the width or along the length of the fiber. The fiber is typically quartz glass. The thermographic sensor includes an infrared filter and lens combination for filtering out infrared energy outside a range of 8-12 microns radiating from the quartz fiber. The thermographic sensor includes a lens and an infrared sensor for focusing and sensing infrared energy inside a range of 8-12 microns radiating from the quartz fiber.

Abstract: A rapid thermal processing system for large area substrates, such as glass panels for flat panel displays, includes a processing chamber, a transport assembly for transporting a substrate through the processing chamber, and a heating assembly for heating the substrate. The heating assembly includes a bank of elongated heating elements disposed in the processing chamber. The heating elements have longitudinal axes aligned with the substrate transport direction. In one embodiment, heating elements on one side of the substrate have longitudinal axes aligned perpendicular to the substrate transport direction and heating elements on the opposite side of the substrate have longitudinal axes aligned parallel to the substrate transport direction.

Abstract: A clinical thermometer is described, based on the measurement of the infrared radiation emitted by the patient, in which the body temperature of the patient in obtained in a non-invasive way and (normally) without any contact between the thermometer and the patient. During measurement of the temperature, the thermometer (1) is put at a preset distance (d) from the body of the patient, a distance which is normally determined by an optical aiming system consisting of two converging rays of light (5). A thermometer according to the invention may be used to obtain the temperature of the patient also by contact.

Abstract: This invention provides a method of manufacturing a wafer heating furnace having a desired heating distribution with less trials and errors by predicting heating distributions in the process of designing the heating furnace.

Abstract: The present invention provides an apparatus and method for measuring the temperature of a moving radiant object. A probe, such as a pyrometer, is disposed in an opening of a vacuum chamber adjacent a radiation transparent window. The probe defines an optical path which intercepts the radiant object entering or exiting a processing chamber. The radiant object is moved through the optical path and emits electromagnetic waves. The electromagnetic waves are collected by the probe and transmitted to a signal processing unit where the waves are detected and converted to a temperature reading. If desired, the accumulated data may then be used to generate a cooling curve representing the thermal effects experienced by the radiant object. Extrapolation or correlation methods may be used to extend the cooling curve to points in time prior to or after the data collected by the probe.

Abstract: A technique and system for tuning temperature sensor readings in a thermal processing chamber includes determining an actual temperature profile for a substrate based on measurements of the substrate. A simulated temperature profile for the substrate is calculated using a respective interim temperature correction value for one or more temperature sensors associated with the chamber. A Gaussian-like distribution for thermal contributions from multiple radiation sources in the chamber can be used to simulate the temperature profile. The simulated temperature profile and the actual temperature profile are combined to form an estimated temperature profile. A final value for each respective temperature correction value is determined using an optimization algorithm which results in the estimated temperature profile being substantially uniform across the surface of the substrate.

Abstract: The invention is directed to a method of computing the radiation temperature of a body from the signals of a radiation and an ambient temperature sensor, and further to a radiation thermometer, in particular a clinical radiation thermometer. In the method of the present invention, computation of the temperature is not using the Stefan Boltzmann law, but rather, a polynomial is used, preferably a third-degree polynomial, which is adjusted to the radiation-optical properties of the thermometer in the relevant wavelength range. The reciprocal value of the sensitivity of the radiation sensor is preferably represented as a polynomial as well. In this manner, the computation of a fourth root or divisions which are otherwise customary are avoided, enabling the necessary computations to be also performed, for example, by a 4-bit microprocessor with great speed.

Abstract: A process for determining a tissue composition characteristic of a live animal or carcass involves the steps of: (a) obtaining either or both of at least one infrared thermographic image of the animal while it is alive, taken from at least one view, or at least one image of the carcass of the animal after slaughter, taken from at least one view, each thermographic image being capable of being represented as an array of pixels providing temperature data representative of temperature information at the corresponding part of the image; (b) calculating the value of at least one statistical measure of the temperature data for each thermographic image; (c) providing a predictive model wherein the tissue composition characteristic is included as an output variable, and the statistical measures of temperature data for each thermographic image are included as input variables; and (d) solving the predictive model to provide the value of the tissue composition characteristic.

Abstract: A material to be cut has a face to be cut with a cutting tool, and a cutout which temporarily brings the cutting tool into a noncontact state. Images of the cutting tool during the period when it attains an exposed state by passing over the cutout are captured with a camera mechanism at an interval of a predetermined delay time .tau.. A plurality of image information items obtained by these capturing operations include temperature change information of each location as the cutting tool gradually passes from the point of instant when it enters the cutout. Therefore, the image information items are arranged in relation to the exposure time from the point of instant, and a two-dimensional temperature distribution of the cutting tool at the point of instance is computed according to the tendency of change in image information.

Abstract: An apparatus accurately measures a temperature of a substrate in a thermal processing chamber. The apparatus has a support structure to support the substrate within the thermal processing chamber. A first probe is provided with an input end positioned to receive radiation from the substrate during thermal processing. A second probe is also provided with an input end positioned to receive radiation from the substrate during thermal processing. The second probe is positioned such that it is angularly offset from the first probe so radiation provided at an output end of the second probe is out of phase with radiation provided at the output end of the first probe. A junction receives and combines radiation from the output ends of the first and second probes. The radiation is combined to provide an accurate representation of the temperature of a local region of the substrate by compensating for a temperature gradient between the support structure and the substrate.

Abstract: The subject invention relates to a technique employing a calibrated thermal radiometer, and the radiation characteristics of ionic crystals to measure the temperature distribution of crystals during crystal growth. When in high temperature, the ionic crystals often exhibit a transparent region having low reflectance, and low absorption in the spectrum between the short-wavelength absorption edge and the long-wavelength absorption edge. In addition, these crystals have an opaque spectral region having low reflectance and high absorption, i.e. have surface radiation of high emissivity when the spectrum is in the range between the long-wavelength absorption edge and the onset of the Reststrahlen band. The spectral emissivity of the ionic crystal may not change significantly with a variation of temperature in this opaque region.

Abstract: A system (80) for controlling deformations of optical components adapted for use with laser system aperture sharing elements (16) and deformable mirrors. The inventive system (80) includes a control loop (12, 40, 24, 20, 46, 28, 74, 78, 60, 34) for determining a desired temperature pattern. The control loop (12, 40, 24, 46, 28, 74, 78, 60, 34) provides a control signal (45) corresponding to the desired temperature pattern to a heat map applicator (18, 46, 47, 59, 60). The heat map applicator (18, 46, 47, 59, 60) applies the desired temperature pattern to the optical component (16) in response to the control signal and the optical component (16) is selectively deformed in response thereto. In a specific embodiment, the control loop (12, 40, 24, 20, 46, 28, 74, 78, 60, 34) is a closed loop control system that includes an interferometer (74).

Abstract: A method and apparatus for measuring the temperature of an object, such as a substrate, during processing. The object is illuminated by a light source. Infrared light that is transmitted through the object is then collected and transmitted to a photodiode. The amount of light transmitted through the substrate varies as a function of substrate temperature. The photodiode generates a signal in response to the light transmitted to the photodiode and an analyzing device generates a real-time temperature reading based on the signal. The photodiode may include at least one silicon photodiode or a plurality of photodiodes made from germanium or indium/gallium/arsenide.

Abstract: A broadband pyrometer is used for sensing temperature of a semiconductor wafer in an RTA system in association with a monochromator to cancel the backside characteristics of the semiconductor wafer. A rapid thermal anneal (RTA) system includes a rapid thermal anneal (RTA) chamber, a heating lamp arranged in the vicinity of the RTA chamber for heating interior to the RTA chamber, a broadband pyrometer disposed in the vicinity of the RTA chamber and directed to measure interior to the RTA chamber, and a grating monochromator connected to the broadband pyrometer.

Abstract: A mirror is moved in parallel to a print card to reflect the infrared radiated from the print card. The reflected infrared is detected by a detector such as an infrared camera though a wind rectifying plate which can permeate the infrared but interrupts the air stream between the inside and outside of a card rack. The signal corresponding to the detected infrared is processed by a personal computer to measure the temperature distribution.