Abstract: A thickness measurement method includes: heating a surface of the measurement object in a dot shape by a heating device; generating a thermal image corresponding to a temperature of the surface of the measurement object by capturing an image of the heated surface of the measurement object at a predetermined time interval by an imaging device; acquiring temperature data indicating temporal changes in temperature at multiple positions on the surface of the measurement object based on the thermal image generated by the imaging device; fitting a solution function indicating a solution of a heat conduction equation corresponding to a point heat source and including a parameter related to the thickness of the measurement object to the temperature data; and calculating the thickness of the measurement object based on a value of the parameter in the fitted solution function.

Abstract: Methods and systems for operating an engine, the engine having an engine core, an exhaust nozzle, and variable geometry mechanisms, are provided. A request for an increase in thrust generated by the engine is received. In response to receipt of the request, it is determined that at least one operating condition for engine degradation thrust is met. In response to this determination, the variable geometry mechanisms are modulated to degrade an efficiency of the engine, thereby increasing a temperature of core air flowing through the engine core. The increase in thrust is generated from the increased temperature of the core air flowing through the engine core and into the exhaust nozzle.

Abstract: Methods and systems for operating an engine are provided. An engine core temperature is monitored. When the engine core temperature is below an engine thermal limit adjusted for a level of deterioration of the engine, an output power of the engine is set in accordance with a reference power based on non-thermal limits of the engine. When the engine core temperature is near or above the engine thermal limit adjusted for the level of deterioration of the engine, the output power of the engine is set to a value lower than the reference power based on non-thermal limits of the engine to reduce the engine core temperature.

Abstract: A temperature sensor assembly having a support tube defining an interior, a temperature sensor having a distal end and a proximal end located within the interior, and, a concentric ring surrounding at least a portion of the temperature sensor and the concentric ring is positioned between the temperature sensor and the support tube for holding the temperature sensor in the support tube.

Abstract: An apparatus for the non-invasive measurement of the blood flow through a shunt of a patient has at least one bandage which can be worn by the patient, as well as a plurality of sensors which are arranged in or at the bandage, which are arranged in at least one multidimensional matrix, and which are configured such that they create a multidimensional matrix of measured values of at least one parameter detected by the sensors.

Abstract: An air temperature sensor for use on an aircraft can include a housing defining an interior and having a trailing edge, a temperature sensor having a distal end and located within the interior, a support tube surrounding at least a portion the temperature sensor, an element shroud surrounding at least a portion of support tube, and a bushing isolating the trailing edge of the housing from the distal end of temperature sensor.

Abstract: A gas turbine engine component includes a conformal surface. An array of resistance temperature detector (RTD) sensors is disposed across at least a portion of the conformal surface and a plurality of printed circuit traces are deposited on the conformal surface. The printed circuit traces connect each of the RTD sensors to a controller via a corresponding four wire circuit. Each circuit trace in the plurality of circuit traces extends to a circumferential edge of the conformal surface.

Abstract: A probe includes a housing defining a flow passage for a first fluid and having an entrance port and an exit port, a sensor configured to sense a parameter of the first fluid and positioned within the flow passage, and a hoop ejector connected externally to the housing such that a channel of the hoop ejector surrounds the exit port. The hoop ejector has a plurality of holes configured to port a second fluid from the channel such that the first fluid is aspirated from the flow passage and out through the exit port.

Abstract: A total air temperature probe includes a housing defining a total air temperature sensor flow passage and a sensor assembly positioned within the total air temperature sensor flow passage. The sensor assembly includes an element flow tube, and a sensing element within the element flow tube. An upper portion of the element flow tube is an entrance including a plurality of protrusions that extend in an upstream direction.

Abstract: A temperature sensor assembly includes a bluff body, and a first member spaced apart from the bluff body that defines a first flow channel in relation to the bluff body. The temperature sensor assembly also includes a second member spaced apart from the bluff body that defines a second flow channel in relation to the bluff body. The first member and the second member further define a third flow channel in fluid communication with and downstream of the first flow channel and the second flow channel. The temperature sensor assembly also includes a sensor element spaced apart from the bluff body and disposed at least partially within the third flow channel.

Abstract: A method and apparatus for the temperature control of a component within a storage system wherein the storage system includes a heat exchanger in thermal communication with the component to control the temperature of the component. One method includes: generating a flow of heat transfer fluid through the heat exchanger to transfer heat to or from the heat exchanger; receiving a set point signal indicative of the desired temperature of the component in the storage system; receiving temperature data regarding the component and the heat transfer fluid, and generating an output signal to control the flow of heat transfer fluid. The heat transfer fluid may be a gas or liquid.

Abstract: A total air temperature probe includes a housing having inner surfaces defining an airflow passage, a first section of the airflow passage of the housing having an airflow inlet scoop with a first cross-sectional area and an inertial separation bend downstream of the airflow inlet scoop, wherein the airflow passage is configured to be substantially straight; and a second section of the airflow passage of the housing having a main exit channel and an elongated outlet with a second cross-sectional area, wherein the airflow passage is contoured to direct particle deflections to the elongated outlet, wherein the second section is downstream from the first section, and wherein the first cross-sectional area is greater than the second cross-sectional area

Abstract: A Doppler phantom includes a first reservoir, a second reservoir, a fluid line coupling the first and second reservoirs, a pressure line coupling the first and second reservoirs, and a tissue mimicking material surrounding at least the fluid line. The phantom can be positioned in first and second positions, where the first reservoir defines an elevated reservoir and the second reservoir defines a lower reservoir in the first position, where the second reservoir defines the elevated reservoir and the first reservoir defines the lower reservoir in the second position. The fluid line provides a path for fluid to travel from the elevated reservoir to the lower reservoir via gravity in either of the first or second positions, and the pressure line provides a path for gas to transfer from the lower reservoir to the elevated reservoir while the fluid travels in either of the first or second positions.

Abstract: A total air temperature (TAT) sensor assembly is disclosed. The assembly includes a housing that accommodates a temperature sensor. The assembly also includes a first airfoil that includes a leading end and a trailing end and a second airfoil that includes a leading end and a trailing end. The first and second airfoils are disposed in a spaced-apart fashion that defines a curved passageway so incoming air can flow between the first and second airfoils before engaging the housing and the temperature sensor. The trailing ends of the airfoils are disposed on opposite sides of the housing and spaced apart from the housing to permit air flowing through the curved passageway to pass the housing.

Abstract: High accuracy temperature measurement devices, methods, and systems for measuring the temperature of medical fluids are described. In embodiments, the devices have the features that they are compatible with the measurement of temperatures in a sealed fluid circuit, thereby promoting compatibility with sterile disposable circuits. Also described are combinations of temperature sensors and conductivity measurement for precise determination of the concentration of ions in a medicament.

Abstract: An air temperature sensor arrangement for a vehicle includes a temperature sensor housing having a base portion, an inlet and an outlet. Also included is a main flow path defined by a continuously curvilinear wall, the main flow path extending from the inlet to the outlet for separating particulate matter from an inlet airflow. Further included is a temperature sensor disposed within an internal cavity of the temperature sensor housing.

Abstract: A total air temperature probe includes a probe head having an airflow inlet, a main airflow outlet, a main probe head wall extending from the airflow inlet to the main airflow outlet, and a flow separation bend wall positioned between the airflow inlet and the main airflow outlet. The flow separation bend wall is opposite the main probe head wall across a primary flow passage defined through the probe head from the airflow inlet to the main airflow outlet. A flow separation trip feature is defined on an interior surface of the main probe head wall for tripping a boundary layer flow separation in flow in the primary flow passage, e.g., for reduction of deicing heater error.

Abstract: Deicing performance of a total air temperature (TAT) probe may be improved by reducing the size of a frontal projected area upstream of an inertial bend of the TAT probe. In accordance with various embodiments, a TAT probe may comprise an airflow inlet having a first surface substantially parallel to an incoming airflow, a primary airflow passage through the TAT probe from the airflow inlet to a primary airflow outlet, and a total air temperature sensor assembly disposed within a sensor flow passage. In various embodiments, the sensor flow passage may be oriented perpendicular to a mounting surface of the TAT probe. Further, the first surface may be perpendicular to the sensor flow passage. In various embodiments, the airflow inlet may have a second surface that is inclined relative to the first surface to help facilitate a desirable pressure gradient and boundary bleed passage function.

Abstract: A method and device for testing for the presence, absence and/or rate of flow in a shunt tubing implanted under the skin by using a measurement pad having a plurality of temperature sensors, one of which is aligned with the shunt and the other sensors being symmetrically displaced on either side of the first temperature sensor in a direction transverse to the shunt tubing. These “outer” temperature sensors act as control temperature sensors. A temperature source, e.g., a cooling agent, positioned within an insulated enclosure, is then applied at a predetermined location on the measurement pad that is insulated from the temperature sensors. The movement of this temperature “pulse” is detected by the shunt-aligned temperature sensor via the shunt tubing as the CSF carries the temperature pulse while the control sensors detect the pulse via convection through the skin. The temperature data from these sensors are provided to a CSF analyzer that determines a CSF shunt flow status or flow rate.

Abstract: Apparatus and method are provided for facilitating simulation of heated airflow exhaust of an electronics subsystem, electronics rack or row of electronics racks. The apparatus includes a thermal simulator, which includes an air-moving device and a fluid-to-air heat exchanger. The air-moving device establishes airflow from an air inlet to air outlet side of the thermal simulator tailored to correlate to heated airflow exhaust of the electronics subsystem, rack or row of racks being simulated. The fluid-to-air heat exchanger heats airflow through the thermal simulator, with temperature of airflow exhausting from the simulator being tailored to correlate to temperature of the heated airflow exhaust of the electronics subsystem, rack or row of racks being simulated. The apparatus further includes a fluid distribution apparatus, which includes a fluid distribution unit disposed separate from the fluid simulator and providing hot fluid to the fluid-to-air heat exchanger of the thermal simulator.

Abstract: A constant-flow control valve and BTU meter assembly that has a pressure independent, constant-flow control valve assembly connectable to the fluid-based heating or cooling system. A valve stem is connected to a valve member and is rotatable as a unit relative to a valve body to change the position of valve member to change a fluid flow rate through the valve. The valve member's position relative to the fluid path is directly related to the fluid flow rate. A BTU meter assembly is connected to the valve stem, which is rotatable relative to the BTU meter assembly. A position sensor of the BTU meter assembly detects a rotational position of the valve stem relative to the BTU body. A controller of the BTU meter assembly determines the fluid flow rate based upon the pressure drop across the valve assembly and the rotational position of the valve stem.

Abstract: A thermal-fluid-simulation analyzing apparatus includes an execution unit that generates an analysis model using analysis conditions to conduct a first thermal fluid simulation analysis based on the generated analysis model, an analysis-condition collecting unit that collects analysis conditions when a predetermined period passes after the first thermal fluid simulation analysis, a condition extracting unit that extracts a boundary condition from the analysis conditions collected by the analysis-condition collecting unit, and a re-execution unit that selects a region corresponding to the boundary condition extracted by the condition extracting unit from regions of the analysis model generated by the execution unit, updates the selected region with the boundary condition, and conducts a second thermal fluid simulation analysis for the updated analysis model.

Abstract: A temperature detecting apparatus for adjusting heat dissipating angle of a fan according to status of heat sources, includes detection module, a comparison module, a control module, and a driver module. The detection module detects temperatures of the heat sources, and converts the detected temperatures to voltage signals. The comparison module receives the voltage signals, and compares the voltage signals with a reference voltage to output control signals. The control module receives the control signals, and turns on according to the control signals. The driver module drives a plurality of air guiding fins rotating thereon. A direction of current flowing through the driver module is adjustable when the control module turns on. The driver module drives the air guiding fins turning toward to guide air flowing to one of the heat sources according to the direction of the current.

Abstract: Provided is a temperature measuring apparatus for a fluid in a micro channel, having a micro channel through which a fluid is allowed to flow; a unit for measuring an amount of flow of the fluid; a unit for measuring pressures at an inlet and an outlet of the micro channel; and a unit for calculating a viscosity of the fluid and a temperature in the micro channel from a difference between the pressures.

Abstract: A method and system for monitoring the flow of heat into and out of a building comprising at least one infrared detector adapted to be positioned on opposite sides of a building opening; at least one processor for processing data obtained from the at least one infrared detector; the at least one infrared detector operatively connected to the at least one processor; whereby the at least one infrared detector operates to detect heat transfer through the building opening for processing by the at least one processor, the at least one processor being operative to detect energy usage.

Abstract: A temperature detecting apparatus for adjusting direction of airflow from a fan according to thermal status in an electronic device, includes a detection module, a control module, and a driver module. The detection module detects temperatures of a plurality of position coordinates in the electronic device and converts the detected temperatures and the plurality of position coordinates corresponding to the detected temperatures to first voltage signals. The control module receives the first voltage signals and compares the temperatures of corresponding position coordinates to output a position coordinate of the greatest temperature according to the first voltage signals. The driver module receives the position coordinate of the greatest temperature and directs airflow towards a position having the greatest temperature.

Abstract: Systems for analyzing effects of cargo fire on primary aircraft structure are provided. A particular system includes a processor and a memory accessible to the processor. The memory includes instructions executable by the processor to access a thermal profile of a suppressed fire in a physical model of a cargo compartment of an aircraft. The instructions are also executable to analyze heat transfer resulting from applying the thermal profile of the suppressed fire to a structure of the aircraft surrounding the cargo compartment to determine a predicted temperature reached by one or more parts of the structure surrounding the cargo compartment as a result of the suppressed fire. The instructions are also executable to generate an output including the predicted temperature reached by the one or more parts of the structure surrounding the cargo compartment.

Abstract: Cloud point monitoring systems for determining a cloud point temperature value for diesel fuel are provided. In one exemplary embodiment, a cloud point monitoring system receives diesel fuel in the tubular conduit and propagates light through the diesel fuel. The cloud point monitoring system further determines a cloud point temperature value indicative of a cloud point of the diesel fuel based on a light intensity level of the light that has propagated through cooled diesel fuel.

Abstract: A device according to present invention embodiments measures the temperature of fluid within an IV line at selected locations. The device may be in the form of a fitting including a projection in fluid communication with a fluid channel to receive a temperature sensor. A thermally conductive receptacle may be disposed in the projection to receive the temperature sensor and partially extends into the fluid channel for contact with the fluid. The temperature sensor may be coupled to a temperature display device and/or controller to display the measured temperature and/or control a thermal element to regulate fluid temperature. The fitting may further include a looped configuration and/or a control valve that controls the flow of fluid through the fluid channel. In addition, the device may further be connected to, or be in the form of, a needle hub to measure fluid temperature proximate the entry site on a patient.

Abstract: A temperature sensing device enclosed in a housing having at least one thermally isolative wall and machined slot for isolating the temperature sensing device to ensure accurate reading of ambient temperature in room.

Abstract: The invention provides a total gas temperature sensor for measuring the temperature of gas in a gas flow. A gas temperature sensor in accordance with the invention comprises a measurement chamber having a gas inlet and a gas outlet; an outlet valve located at the gas outlet, operable to seal the gas outlet when in a closed position, and a temperature sensing element located in the measurement chamber. The sensor is simple to manufacture, is robust, provides for a low recovery correction and does not suffer from significant boundary layer problems.

Abstract: An internal combustion engine includes an exhaust gas feedstream flowing past a gas sensing device disposed therein. The gas sensor includes an integrated electrical heating element which provides a resistance indicative of its temperature. An unknown input observer is used to determine the exhaust gas feedstream temperature based on the heating element temperature.

Abstract: Disclosed is a heat transfer evaluation apparatus of a nano-fluid including: a long pipe formed as a circular pipe; a rubber tube connected to one end of the long pipe to surround the outer surface of the long pipe; a short pipe communicated through the rubber tube; and a hot wire sensor formed of a metal hot wire at one end of the short pipe.

Abstract: A total air temperature probe includes an inlet through which airflow enters a primary airflow passage through the probe. A sensor flow passage is connected to the primary flow passage. Bleed ports extend between the primary airflow passage and a cross-port which extends laterally across the probe. An aspiration aperture in the cross-port couples the cross-port to an internal cavity of a strut of the probe. The aspiration aperture can be centered within the cross-port to provide symmetrical deicing heater error behavior of the probe during changes in angle of attack. An aspiration tube couples the internal cavity of the probe to a pressure source.

Abstract: A high-resolution, non-contact sensor that measures the temperature of an elongated roll comprises an array of low-mass air temperature elements positioned adjacent the cylindrical surface. As the roll rotates a boundary layer of air is formed along the contour of the roll. Each air temperature element can be housed in a chamber into which a portion of the boundary layer air directed. The temperature of the air temperature element eventually stabilizes and is a function of the roll surface temperature. Associated air compensator elements detect ambient air temperatures and the actual surface temperature profile is extracted from calibration curves based on measurements from both the air temperature and compensator elements.

Abstract: Heat flow sensor having at least two plates with the heat (thermo) sensitive elements and with holes (openings) for the passage of air flow, so that the tops of both plates with the thermo sensitive elements are placed facing the outer surface of the sensor, so that their openings coincide and the construction provides passage of air through the openings whereby the thermo sensitive elements are located between all the holes of the plates and serially connected on every plate, and then the said sensor (plates) has one common point of connection in the middle of each side so that each sensor has at least three output wires—the total, the output of each plate, and therefore the magnitude and direction of the heat flow, are determined by the difference between the outputs of the two earlier described plates.

Abstract: A method is provided for facilitating installation of one or more electronics racks within a data center. The method includes: placing a plurality of thermal simulators in the data center in a data center layout to establish a thermally simulated data center, each thermal simulator simulating at least one of airflow intake or heated airflow exhaust of a respective electronics rack of a plurality of electronics racks to be installed in the data center; monitoring temperature within the thermally simulated data center at multiple locations, and verifying the data center layout if measured temperatures are within respective acceptable temperature ranges for the data center when containing the plurality of electronics racks; and establishing the plurality of electronics racks within the data center using the verified data center layout, the establishing including at least one of reconfiguring or replacing each thermal simulator with a respective electronics rack.

Abstract: In a temperature estimation apparatus for an aeroplane gas turbine engine mounted on an aircraft and having a combustion chamber, a high-pressure turbine rotated by combustion gas exhausted from the combustion chamber, a low-pressure turbine located downstream of the high-pressure turbine to be rotated by low-pressure gas which has passed through the high-pressure turbine, a high-pressure turbine rotational speed sensor, a low-pressure turbine rotational speed sensor, and a temperature sensor, inlet temperature at an inlet of the high-pressure turbine is estimated based on the detected outlet temperature of the low-pressure turbine and the rotational speed of the low-pressure turbine and is corrected with the detected rotational speed of the high-pressure turbine.

Abstract: Two vertically offset thermistors for sensing a fluid such as oil and refrigerant in a compressor shell are monitored by a method that takes into account rapidly changing conditions within the shell. The system can determine the fluid's sump temperature, high/low liquid levels, and can determine whether the thermistors are sensing the fluid as a liquid, gas, or a mixture of the two, such as a foam or mist of liquid and gas. For greater accuracy, thermistor readings can be dithered and filtered to provide temperature or voltage values having more significant digits than the readings originally processed through a limited-bit A/D converter. For faster response, limited microprocessor time is conserved by sampling thermistor readings at strategic periods that enable the microprocessor to identify certain conditions and temperatures via simple delta-temperature ratios and undemanding equations rather than resorting to exponential functions or lookup tables to determine time constants.

Abstract: The invention relates to electrical sensors, which are tight against longitudinal water, and to a process for a simple and cost efficient manufacture, with a tightly closed housing, a sensor element, at least one cable leading out of the housing, wherein the electrical conductors of the cable in the housing comprise a massive cross section without a cavity at least in one longitudinal section, a conductor seal seals the massive cross section against the lead insulation, a lead seal seals the lead insulation against the jacket of the cable, and against all other jackets, and a jacket seal seals the cable jacket against the housing.

Abstract: Apparatus and method are provided for facilitating simulation of heated airflow exhaust of an electronics subsystem, electronics rack or row of electronics racks. The apparatus includes a thermal simulator, which includes an air-moving device and a fluid-to-air heat exchanger. The air-moving device establishes airflow from an air inlet to air outlet side of the thermal simulator tailored to correlate to heated airflow exhaust of the electronics subsystem, rack or row of racks being simulated. The fluid-to-air heat exchanger heats airflow through the thermal simulator, with temperature of airflow exhausting from the simulator being tailored to correlate to temperature of the heated airflow exhaust of the electronics subsystem, rack or row of racks being simulated. The apparatus further includes a fluid distribution apparatus, which includes a fluid distribution unit disposed separate from the fluid simulator and providing hot fluid to the fluid-to-air heat exchanger of the thermal simulator.

Abstract: A total air temperature probe includes an inlet through which airflow enters a primary airflow passage through the probe. A sensor flow passage is connected to the primary flow passage. Bleed ports extend between the primary airflow passage and a cross-port which extends laterally across the probe. An aspiration aperture in the cross-port couples the cross-port to an internal cavity of a strut of the probe. The aspiration aperture can be centered within the cross-port to provide symmetrical deicing heater error behavior of the probe during changes in angle of attack. An aspiration tube couples the internal cavity of the probe to a pressure source.

Abstract: A temperature probe assembly is provided. The temperature probe assembly may comprise a housing formed of a first thermally conductive material and having an inner diameter defined by an inner bore, an insert formed of a second thermally conductive material disposed in the inner bore and having an outer diameter that is substantially equal to the inner diameter of the housing at a first temperature and a temperature sensor mounted within the insert. The second thermally conductive material has a thermal coefficient of expansion that is greater than the first thermally conductive material, such that the insert is insertable into the inner bore at the first temperature and is tightly locked in the inner bore at a second temperature that is greater than the first temperature.

Abstract: A computer which functions by a performance prediction program for a ground source heat pump system of the present invention and a performance prediction system constructed thereby include a dimensionless distance calculating means, a first dimensionless time calculating means, a second dimensionless time calculating means, a boundary time acquiring means, an underground temperature change calculating means, and a tube surface temperature change calculating means. The performance prediction program and performance prediction system can be applied to the design of heat exchange system by obtaining predicted underground temperature data for the ground source heat pump system with high accuracy and predicting the performance for the ground source heat pump system based on the resulting underground temperature changes, etc., in view of the use of a plurality of buried tubes, underground temperature change patterns for buried tubes placed at different intervals, and the use of U-shaped tube heat exchangers.

Abstract: A method and/or system is provided that compensates for the flow of air through fiberglass insulation. In certain example embodiments, a dynamic heat flow meter or the like is provided for measuring and/or determining any detrimental effects of air flow through insulation such as fiberglass insulation. Once the possible detrimental effects are recognized, an insulation system is adapted (e.g., by providing a foam based insulation in a wall cavity in addition to the fiberglass insulation) to compensate, or substantially compensate, for the effects of air flow through the fiberglass. For instance, a sufficient amount of foam insulation may be provided in a cavity adjacent fiberglass, where the foam blocks or substantially blocks air from flowing through the cavity, thereby compensating for the effects of air flow through fiberglass and permitting the intended R-value to be maintained or substantially maintained.

Abstract: An optical fiber temperature sensing device has a sensor body; a light source housed in the sensor body; a temperature measuring optical fiber disposed outside the sensor body and extended to a temperature measurement site, wherein, when a light is emitted from the light source into the temperature measuring optical fiber, Stokes light intensity and anti-Stokes light intensity of backscattered light generated in the temperature measuring optical fiber are detected to determine a temperature at the temperature measurement site; a reference temperature optical fiber disposed inside the sensor body; and a controller that is operable to control an output of the light source by monitoring Stokes light intensity and anti-Stokes light intensity of backscattered light generated in the reference temperature optical fiber.

Abstract: A temperature probe assembly is provided. The temperature probe assembly may comprise a housing formed of a first thermally conductive material and having an inner diameter defined by an inner bore, an insert formed of a second thermally conductive material disposed in the inner bore and having an outer diameter that is substantially equal to the inner diameter of the housing at a first temperature and a temperature sensor mounted within the insert. The second thermally conductive material has a thermal coefficient of expansion that is greater than the first thermally conductive material, such that the insert is insertable into the inner bore at the first temperature and is tightly locked in the inner bore at a second temperature that is greater than the first temperature.

Abstract: Embodiments provide systems and methods for analyzing effects of cargo fire on primary aircraft structure. A thermal profile of a suppressed fire in a cargo compartment of an aircraft is developed. The thermal profile is applied to a heat transfer model of structure of an aircraft, and structural integrity of the modeled structure is analyzed. The thermal profile may be developed by introducing a fire in a physical model of a cargo compartment instrumented with temperature sensors and determining profiles of temperature versus time. A heat transfer model of aircraft structure is built, boundary conditions are input into the heat transfer model, and the model is run. When analysis of the modeled structure determined structural integrity to be insufficient to satisfy flight certification requirements, structural parameters are modified, the thermal profile is applied to a heat transfer model of the modified structure, and the analysis is repeated.

Abstract: In a deposited-film formation apparatus or process having the means or steps of evacuating the inside of an inside-evacuatable chamber through an evacuation piping by an evacuation means, feeding a material gas into the chamber while evacuating the inside of the chamber, and applying a high-frequency power to form a deposited film on a substrate disposed inside the chamber, a leak is detected on the basis of a measured value of a temperature sensor which detects the heat of reaction that is generated when the material gas fed into the chamber reacts with oxygen contained in air having entered from the outside, so as to be able to stop the material gas feeding. In deposited-film formation apparatus or processes making use of spontaneously ignitable gases, the leak can quickly be detected when air enters the chamber because of any unexpected accident such as a break of piping.

Abstract: A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.