Including Apparatus To Advance A Material-supporting Element To A Point Within Chamber, Release Material, And Retract Element Patents (Class 414/180)
  • Patent number: 10526542
    Abstract: Systems and methods of dynamically charging coal in coke ovens related to the operation and output of coke plants including methods of automatically charging a coke oven using a charging ram in communication with a control system to increase the coke output and coke quality from coke plants. In some embodiments, the control system is capable of moving the charging ram in a horizontal first direction, a horizontal second direction and a vertical third direction while charging coal into the oven. In some embodiments, the coal charging system also includes a scanning system configured to scan an oven floor to generate an oven floor profile and/or oven capacity. The scanning system used in combination with the control system allows for dynamic leveling of the charging ram throughout the charging process. In some embodiments, the charging ram includes stiffener plates and support members to increase the mechanical strength of the charging ram and decrease the sag of the charging ram at a distal end.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: January 7, 2020
    Assignee: SUNCOKE TECHNOLOGY AND DEVELOPMENT LLC
    Inventors: John Francis Quanci, Chun Wai Choi, Mark Anthony Ball
  • Patent number: 8820516
    Abstract: A device for loading and unloading the standing surface of the drying chamber of a freeze drying installation. The device includes a carriage disposed above an unloading position of the surface which extends transversely to a movement direction during a loading or unloading process and in parallel with the standing surface and forms a movable guiding edge for the drying vessels. Guides disposed on both sides of the standing surface extend in parallel with the movement direction and form fixed guiding edges for the drying vessels. The carriage is driven by two linear motors, the respective primary parts of which are fixedly connected to both side ends of the carriage and are supported on the guides which at the same time receive the secondary parts. All of the components of the devices thus defined are located within the drying chamber, wherein a mechanically extremely simple and low-wear construction is achieved.
    Type: Grant
    Filed: October 11, 2010
    Date of Patent: September 2, 2014
    Assignee: Martin Christ Gefriertrocknungsanlagen GmbH
    Inventor: Martin Christ
  • Patent number: 8197171
    Abstract: Disclosed is an apparatus for loading and unloading a tray of a freeze drying plant with a number of vials. An example apparatus includes a transfer table upstream of the freeze drying plant for receiving temporarily said vials and a pusher apparatus for displacing said vials between said transfer table and said tray. The pusher apparatus includes right and left transport carriages and a loading element. With the example apparatus, the vials are securely transferred with little friction onto/from the tray, and the transport carriages are disposed on the transfer table and/or on the tray to form a lateral limitation of the transfer table and/or of the tray for the vials located on the edge of the transfer table and/or of the tray to directly abut a transport carriage during loading or unloading.
    Type: Grant
    Filed: July 18, 2008
    Date of Patent: June 12, 2012
    Assignee: Accurro GmbH
    Inventors: Alexander Wagner, Ralf Battenberg
  • Patent number: 7695230
    Abstract: An apparatus having a supporting surface (3) for containers (4) and a device for loading and unloading the containers (4) onto the supporting surface (3). The device has a component (11) for unloading the containers from the supporting surface and a drive unit (12) for facilitating movement of the component (11) relative to a supporting surface (3).
    Type: Grant
    Filed: February 5, 2004
    Date of Patent: April 13, 2010
    Assignee: GEA Lyophil GmbH
    Inventor: Johannes Selch
  • Patent number: 7673660
    Abstract: Particulate filling devices and methods are disclosed that utilize a swivel connector, a mounting surface connected to the swiveling connector, and several obstacles mounted on the mounting surface. The obstacles are positioned consecutively to form a helix-pattern.
    Type: Grant
    Filed: March 24, 2006
    Date of Patent: March 9, 2010
    Assignee: Catalyst Services, Inc.
    Inventor: Michael D. McNaughton
  • Publication number: 20080298933
    Abstract: An apparatus includes a first enclosure, a first door, at least one first valve, at least one inlet diffuser and at least one substrate holder. The first enclosure has a first opening. The first door is configured to seal the first opening. The first valve is coupled to the first enclosure. The inlet diffuser is coupled to the first valve and configured to provide a first gas with a temperature substantially higher than a temperature of an environment around the first enclosure. Each substrate holder disposed within the first enclosure supports at least one substrate.
    Type: Application
    Filed: May 29, 2007
    Publication date: December 4, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Li Hsiao, Chen-Hua Yu, Jean Wang, Fu-Kang Tien, Jui-Pin Hung
  • Patent number: 7210990
    Abstract: In order to provide a treatment apparatus for treating workpieces or groups of workpieces that are conveyed from an inlet to an outlet of the treatment apparatus, wherein the treatment apparatus comprises a plurality of treatment levels and with said treatment apparatus the workpieces to be treated are passed from level to level in a safe and controlled manner, it is proposed that the treatment apparatus comprises a housing and receiving chambers, which rotate relative to the housing, for receiving the workpieces or groups of workpieces, wherein the receiving chambers are disposed in at least two different chamber levels and an outlet opening in the housing is associated with a first chamber level, through which the workpieces or groups of workpieces travel first, and an inlet opening is associated with a second chamber level, through which the workpieces or groups of workpieces travel after the first chamber level, and wherein the treatment apparatus comprises at least one transfer apparatus, which moves the
    Type: Grant
    Filed: March 29, 2005
    Date of Patent: May 1, 2007
    Assignee: Durr Ecoclean GmbH
    Inventors: Richard Buchmann, Andreas Metzger
  • Patent number: 6712576
    Abstract: A batch charger has a telescopic belt conveyor with a vertical take-up system for the belt when the conveyor retracts. The conveyor may pivot and/or shift laterally besides the furnace on a track. Fixed silos are positioned to refill an on conveyor bin while it is pivoting.
    Type: Grant
    Filed: September 18, 2001
    Date of Patent: March 30, 2004
    Inventors: Joseph Skarzenski, Witold S. Czastkiewicz, Erkki Paivinen
  • Patent number: 6435797
    Abstract: A method is provided for loading a heated susceptor or a susceptor segment of a deposition reactor with a substrate wafer which is resting on a holding means. Before making contact between the substrate wafer and the susceptor or susceptor segment, a holding position is reached in which the substrate wafer and the susceptor or susceptor segment are at a spaced vertical distance from one another. The substrate wafer is only brought into contact with the susceptor or the susceptor segment after a residence time in this holding position. There is also a device for loading a susceptor, in particular a susceptor segment of a deposition reactor.
    Type: Grant
    Filed: October 24, 2000
    Date of Patent: August 20, 2002
    Assignee: Wacker Siltronic Gesellschaft für Halbleitermaterialien AG
    Inventors: Herbert Mittermaier, Georg Brenninger, Alois Aigner
  • Patent number: 6293749
    Abstract: A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A robotic arm end effector engaging only the lower surface of the outer edge of the wafer permits hot wafer pick-up and unloading by the inner susceptor section. Several end effectors are disclosed that minimize non-uniform thermal effect on the substrate.
    Type: Grant
    Filed: November 17, 1998
    Date of Patent: September 25, 2001
    Assignee: ASM America, Inc.
    Inventors: Ivo Raaijmakers, Loren R. Jacobs, Michael W. Halpin, James A. Alexander, Ken O'Neill, Dennis L. Goodwin
  • Patent number: 6231716
    Abstract: An apparatus for processing substrates includes a chamber, a substrate transfer element for transferring a substrate to and from the chamber, and a substrate support for receiving and holding a substrate within the chamber. The apparatus also includes multiple pins positioned and configured to be received by respective holes in the chamber bottom and moveable between a retracted position and an extended position. A pin actuation system is provided for moving the pins between the retracted position and the extended position. The pin actuation system controls the velocity at which the pins move and varies the speed of the pins by accelerating or decelerating at particular points during the pin cycle. A reduction in the cycle time is facilitated by accelerating the lift pins to relatively high speeds and then slowing the pins down prior to their arrival at locations where the substrate or wafer may be damaged.
    Type: Grant
    Filed: November 9, 1998
    Date of Patent: May 15, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Anthony White, Eugene Smargiassi
  • Patent number: 6068441
    Abstract: A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A fork type robotic arm end effector permits wafer pick up and unloading by the inner susceptor section.
    Type: Grant
    Filed: November 21, 1997
    Date of Patent: May 30, 2000
    Assignee: ASM America, Inc.
    Inventors: Ivo Raaijmakers, Loren Jacobs, Mike Halpin, Jim Alexander, Ken O'Neill, Dennis Lee Goodwin
  • Patent number: 5649800
    Abstract: A table for the transfer of fragile materials such as containers of freeze dried products, flasks, or the like, has a slide that displaces horizontally on the surface of the table. The table has a marginal section including a plurality of marginal tongues that independently pivot about an axis parallel to the edge of the table surface. The containers are moved from the surface of the transfer table across the tongues onto a support surface, or vice versa.
    Type: Grant
    Filed: February 9, 1995
    Date of Patent: July 22, 1997
    Assignee: Finn-Aqua GmbH
    Inventors: Siegfried Hemmersbach, Heinz May
  • Patent number: 5397011
    Abstract: A collapsible container for collecting and disposing of valuable materials, salvage material, garbage or the like, including two container sections, such as shells, which are divided along a common closing plane and are connected to one another at their upper side by hinges aligned parallel to the closing plane so that they can be unfolded. Each container section or each shell has, offset to the axis of the hinges, at the upper side hooking elements, with which power-driven hooks of a suspended cross arm, disposed at a crane boom or the like, can be coupled for lifting as well as for controlling the opening and closing process.
    Type: Grant
    Filed: October 22, 1993
    Date of Patent: March 14, 1995
    Assignee: Fritz Schafer Gesellschaft mit beschrankter Haftung
    Inventor: Gerhard Schafer
  • Patent number: 5372500
    Abstract: A loader device for an automatic space treatment furnace having a longitudinal axis and means for driving the furnace in guided translation along said longitudinal axis. The loader device is disposed in the vicinity of the furnace and comprises both a cartridge-carrying carousel fitted with a set of cartridge holders removably receiving sealed closed cartridges each designed to contain a sample for treatment in said space furnace, the cartridges being disposed in the carousel parallel to its axis of rotation, and a control mechanism for imparting indexed rotary drive to the cartridge holders. The carousel is itself mounted relative to the furnace in such a manner that its axis of rotation forms a predetermined angle a relative to the longitudinal axis of the furnace, and each cartridge holder of the carousel co-operates with a tilting mechanism to enable each cartridge to take up a working position in which the axis of the cartridge is tilted through said predetermined angle .alpha.
    Type: Grant
    Filed: November 19, 1993
    Date of Patent: December 13, 1994
    Assignee: Societe Europeenne de Propulsion
    Inventor: Dominique Valentian
  • Patent number: 5069591
    Abstract: A semiconductor wafer-processing apparatus has a plurality of support members provided respectively for the processing units of a processing apparatus, and designed for supporting wafer receptacles each containing semiconductor wafers, and receptacle-inserting/extracting mechanism for inserting a wafer receptacle from the support members into the processing units, and for extracting the wafer receptacle from the processing units back to the support members. Receptacle-transporting mechanism is provided, operated independently of the receptacle inserting/extracting mechanism, for transporting the wafer receptacle between each support member and a predetermined position.
    Type: Grant
    Filed: March 23, 1989
    Date of Patent: December 3, 1991
    Assignee: Tel Sagami Limited
    Inventor: Kenichi Kinoshita
  • Patent number: 4984952
    Abstract: A charging appliance for melting units that work under vacuum or under protective gas atmosphere includes a charging shovel, for holding charging stock, attached to a carriage which transports the charging stock to an advanced position inside the melting unit. The charging appliance further includes an ejector that holds the charging stock in the advanced position while the charging shovel is being retracted, resulting in the charging stock being deposited in the melting unit. The rolling carriage which transports the charging stock runs along a rail set. The rail set is movable via lifting cylinders. By selective displacement of two lifting cylinders, the elevation and angle of tilt of the rail set can be adjusted. Accordingly, the charging shovel can be maneuvered in a wide variation of positions inside the melting chamber. The charging appliance can be quickly and accurately adapted for use to a particular melting unit.
    Type: Grant
    Filed: July 31, 1989
    Date of Patent: January 15, 1991
    Assignee: Leybold Aktiengesellschaft
    Inventor: Wolfgang Reuter
  • Patent number: 4909696
    Abstract: A method and apparatus for loading a refrigerator box which has a door along one side and insulation in all of the surfaces of the box including the bottom. The invention specifically relates to devices for loading the box using a pallet loaded with prepackaged material such as ice. The insulation in the bottom of the box is divided into three parts; the insulation along one side, the insulation along the opposite side and then the center insulation portion.The method is accomplished by removing the center insulated portion and rolling a pallet loaded with prepackaged material into the refrigerated box using an ordinary transportation vehicle such as a lift cart. Once the vehicle has moved the pallet of prepackaged material into the refrigerated ice box or container, the transportation device is then lowered so that the pallet will settle onto the pieces of insulation on each side of the box. The transportation device is then removed and a piece of insulation is inserted under the pallet.
    Type: Grant
    Filed: April 4, 1989
    Date of Patent: March 20, 1990
    Inventor: Freddy J. Wigley
  • Patent number: 4872799
    Abstract: A novel boat transfer and queuing furnace elevator and method includes an X, Z, and Y assembly movable between furnace processing tubes, a furnace loading island, and an operator work station. The X, Z, and Y assembly includes X, Z, and Y drive motors mounted in a region below the region defined by the operative transfer, queuing, loading, and unloading movement paths for preventing motor-produced pollutants from contaminating wafer-loaded boats. The X, Z, and Y assembly includes X, Z, and Y linkages having resilient members mounted along moving and mounting interfaces thereof for providing shock and vibration isolation. In one embodiment, the work station and furnace are arranged in-line, and in another embodiment the work station and furnace are arranged in laterally offset relation. In both embodiments, the X, Z, and Y assembly has a multi-mode operation capability that minimizes "dead time" between transfers and significantly improves system processing throughput.
    Type: Grant
    Filed: June 16, 1987
    Date of Patent: October 10, 1989
    Assignee: BTU Engineering Corporation
    Inventor: Daniel J. Fisher, Jr.
  • Patent number: 4849175
    Abstract: A method and apparatus for automatically measuring the grain fineness, the gypsum content and the limestone content of a cement sample.A first fraction of the sample is loaded by a vibrating hopper into a crucible resting on an automatic scale. This crucible is handled sequentially by tongs on two revolving arms carried on slidable vertical shafts. The circular paths of the arms intersect at a point just above the scale. Motions of the arms and of the tongs are controlled by a programming unit. The weighed sample is poured into a sieve and the weight of oversize grains is automatically related to the sample weight.Gypsum is measured by heating a second fraction of the sample at 1000.degree. C. plus in an oxygen stream, Fe powder being added from a fixed hopper. The crucible is raised into an induction furnace. Released SO.sub.2 is bubbled in a titration cell to which potassium iodate is gradually added by a burette giving an automatic read-out of the SO.sub.3 (gypsum) titration.
    Type: Grant
    Filed: January 4, 1988
    Date of Patent: July 18, 1989
    Assignee: Societe Des Ciments Francais
    Inventors: Jean R. Dupain, Christian P. Vernet
  • Patent number: 4671726
    Abstract: A cantilevered, soft landing boat loading system for semiconductor processing furnaces includes an alignment mechanism, a paddle, and a boat loader. The alignment mechanism includes five handles for five degrees of freedom. The boat loader is supported from a vertical plane.
    Type: Grant
    Filed: November 7, 1984
    Date of Patent: June 9, 1987
    Assignee: Breed Corporation
    Inventor: Ted Thuen
  • Patent number: 4645401
    Abstract: A system for loading and unloading of magnetic discs into and out of a processing chamber in a manner to provide and maintain the discs in spaced positions from each other. A quantity of discs are contained within respective slots of a cartridge carrier movable between first and second positions. In a first position a tubular mandrel is inserted through the aligned central openings of the discs within the cartridge, the mandrel having spaced circumferential grooves spaced correspondingly with the spacing between discs retained in the cartridge. The mandrel is inserted through the central openings of the disc with the respective grooves in alignment, and the cartridge is moved to its second position to leave the discs supported by the respective grooves of the mandrel. The mandrel with the discs supported thereon is inserted into a chamber for processing.
    Type: Grant
    Filed: June 13, 1984
    Date of Patent: February 24, 1987
    Assignee: Disc Technology Corporation
    Inventors: Allen B. Hopkins, John P. Dockx
  • Patent number: 4626203
    Abstract: Disclosed is a furnace having a furnace chamber formed with a work inlet and a work outlet, and a work mount turntable rotatably provided within the furnace chamber, the furnace further comprising work carry-in means for carrying a work while mounting the work thereon into the furnace chamber through work inlet to transfer the work onto given one of work mount portions on the turntable, and work carry-out means for carrying a work mounted on one of the the work mounts out of the work outlet while mounting the work thereon. Each of the work mounts, the work carry-in means, and the work carry-out means is constituted by a plurality of strip members disposed at regular intervals. The respective strip members of each of the work carry-in means and the work carry-out means are arranged to move up and down passing through the gaps formed between the adjacent strip members of the work mounts.
    Type: Grant
    Filed: October 2, 1985
    Date of Patent: December 2, 1986
    Assignee: Furnace Juko Kabushiki Kaisha
    Inventor: Hidesato Sakamoto
  • Patent number: 4624638
    Abstract: A semi-cylindrical low-profile cantilevered paddle of refractory material is separably clamped to a cantilevered arm fastened to a movable boat-loader. A clamping mechanism is disclosed that preferably includes spaced brackets fastened to the arm defining retaining loops for slidably receiving the paddle. A flexible, stress-relief saddle portion is provided on one of the brackets. The rugged and breakage-resistant semi-cylindrical paddle is inexpensive to procure and replace, and its low profile makes it possible to adapt existing CVD furnaces for operation with larger semiconductor wafers.
    Type: Grant
    Filed: November 29, 1984
    Date of Patent: November 25, 1986
    Assignee: BTU Engineering Corporation
    Inventor: Robert F. Sarkozy
  • Patent number: 4620832
    Abstract: A furnace loading system is provided for loading and unloading wafer boats or other receptacles from a furnace tube of the type used in semiconductor processing. The system includes a carrier for supporting the receptacles in a cantilevered manner out of contact with the furnace tube. Actuators are provided for moving the carrier and receptacles into the furnace tube and for depositing the receptacles on the floor of the furnace tube without any contact between the carrier and the furnace tube. The carrier is then withdrawn, completing the loading cycle. Unloading is accomplished by inserting the carrier into the furnace tube while supported in a cantilevered manner. The carrier is then raised to pick up and support the receptacles on the carrier, after which they are withdrawn from the furnace tube. Only the feet of the receptacles contact the furnace tube, reducing particulate matter generation to a minimum.
    Type: Grant
    Filed: March 7, 1984
    Date of Patent: November 4, 1986
    Assignee: Motion Manufacturing, Inc.
    Inventor: Norman S. Cay
  • Patent number: 4601660
    Abstract: There is described a loading apparatus for conveying charging grates in heat treatment furnaces has one or more chain strands which run in guide rails which also extend into the heat treatment furnace; at the end of the chain strands facing toward the furnace, the chain links have pivoting rocker arms on which there are secured support segments; the raising and lowering of the support segments is carried out by means of support blocks and retaining cams.
    Type: Grant
    Filed: June 18, 1985
    Date of Patent: July 22, 1986
    Assignee: Degussa Aktiengesellschaft
    Inventor: Rolf Schuster
  • Patent number: 4585411
    Abstract: This invention relates to a method of and a walking beam furnace for the intermediate heating of pipes, or the like, in hot rolling mills, by means of a furnace located between the plug-mill and the sizing mill. According to the invention, in a forehearth (17) of the intermediate heating furnace, at the inlet side thereof, there is maintained a temperature which is lower than that at the outlet side, and which, anyway, is such that the hottest pipes will be cooled down and the coldest pipes will be heated up whereby, when exiting from said forehearth (17) of the furnace, the difference between the temperatures of the various pipes is zero or, at least, is small and, in any case, is smaller than that at the inlet, whereas in the successive chamber (18) of the furnace there is maintained such a temperature as to give the pipes the desired temperature when exiting from the furnace.
    Type: Grant
    Filed: June 29, 1984
    Date of Patent: April 29, 1986
    Assignee: ITALIMPIANTI Societa Italiana Impianti p.a.
    Inventors: Giorgio Bocci, Sando Brizielli, Agostino Triuzzi, Stefano Deplano
  • Patent number: 4568278
    Abstract: The invention relates to a charging and discharging device with a vertically and longitudinally movable supporting arm. According to the invention, a pivotable lifting fork is provided which is fastened, horizontally and rotatably about its longitudinal axis, to the free ends of a supporting arm extending essentially in the form of a U and open at the bottom.
    Type: Grant
    Filed: July 27, 1984
    Date of Patent: February 4, 1986
    Assignee: Rheiner Maschinenfabrik Windhoff
    Inventors: Heinrich Patalon, Alfred Mues
  • Patent number: 4557795
    Abstract: A melt recharge method is disclosed which uses a self-actuated charge container open at one end except for deformable support members which are positioned to support the charge material. The support members are formed of a material which has sufficient rigidity at room temperature to support the charge material but which when heated above its annealing temperature loses its rigidity and can no longer support the charge material which therefore falls into the existing melt. Upon cooling, the support members regain their rigidity and can be reformed for reuse.
    Type: Grant
    Filed: November 15, 1982
    Date of Patent: December 10, 1985
    Assignee: Motorola, Inc.
    Inventors: Robert W. Helda, deceased, by Cynthia Halextine, personal representative, H. Ming Liaw
  • Patent number: 4557657
    Abstract: An article handling device which is particularly well suited for loading articles into a reactor furnace for processing and subsequently unloading the processed articles. The article handling device is supported and vertically movable into alignment with the reactor furnace and includes an article moving device which is reciprocally vertically elevatable and reciprocally horizontally extensible for loading the articles into the reactor furnace and subsequent unloading thereof with minimal disturbing of the reactor process residue which is inherently deposited in the interior of the reactor furnace.
    Type: Grant
    Filed: October 5, 1983
    Date of Patent: December 10, 1985
    Assignee: Advanced Semiconductor Materials America, Inc.
    Inventors: Donald M. Olson, Norman L. Jackson, Jerry E. Tong
  • Patent number: 4516897
    Abstract: A cantilever wafer paddle system for use in the manufacture of semiconductor devices so the system having two support members positioned above and attached to a suspension member such that the suspension member is capable of supporting and suspending a series of wafer boats within a diffusion tube without allowing any portion of the paddle, boats or wafers contained within the boats to contact the internal walls of the diffusion tube.
    Type: Grant
    Filed: May 23, 1983
    Date of Patent: May 14, 1985
    Assignee: Berkeley Glasslab
    Inventors: Wendall L. Snider, Edward A. Wagner
  • Patent number: 4505630
    Abstract: Apparatus and methods for transferring articles, such as concrete blocks, from a conveyor to a curing kiln and return comprise a carriage movable along a path leading from the block conveyor to any selected one of a number of curing kilns. The carriage supports a rotary turntable on which is mounted a transfer vehicle provided with article supporting forks that are vertically movable so as to shift articles off and onto the block conveyor, deposit the articles within the kiln, and retrieve the articles from the kiln. the transfer vehicle is movable horizontally relatively to the turntable to enable the article supporting forks to overlie the block conveyor, and the transfer vehicle also is movable horizontally relatively to the turntable and carriage into and out of the selected kiln.
    Type: Grant
    Filed: December 5, 1983
    Date of Patent: March 19, 1985
    Assignee: Besser Company
    Inventors: William C. Kaschner, Elroy Bobolts, Jr.
  • Patent number: 4468195
    Abstract: The semiconductor device manufacturing process for producing semiconductors (transistor, IC, LSI or the like) needs a large number of thermal treatments for semiconductor wafers, such as thermal oxidation, diffusion, CVD, annealing or the like. The above-mentioned various thermal treatments are conducted by employing thermal treatment apparatus. The thermal treatment apparatus according to the present invention performs thermal treatments for semiconductor wafers, such as thermal oxidation, diffusion, CVD, annealing or the like, and has a soft landing loader capable of loading and unloading a wafer jig housing therein a plurality of semiconductor wafers into and from a process tube of the thermal treatment apparatus with high reliability and a high thermal efficiency as well as capable of automatic control of the movement of the semiconductor wafers in accordance with thermal treatment conditions.
    Type: Grant
    Filed: September 15, 1982
    Date of Patent: August 28, 1984
    Assignee: Hitachi, Ltd.
    Inventors: Tamotsu Sasaki, Tetsuya Takagaki, Kenichi Ikeda
  • Patent number: 4394352
    Abstract: A self-actuated charge container is open at one end except for deformable support members which are positioned to support the charge material. The support members are formed of a material which has sufficient rigidity at room temperature to support the charge material but which when heated above its annealing temperature loses its rigidity and can no longer support the charge material which therefore falls into the existing melt. Upon cooling, the support members regain their rigidity and can be reformed for reuse.
    Type: Grant
    Filed: March 17, 1980
    Date of Patent: July 19, 1983
    Assignee: Motorola, Inc.
    Inventors: Robert W. Helda, deceased, by Cynthia Hazeltine, executor, H. Ming Liaw
  • Patent number: 4322386
    Abstract: A catalytic apparatus characterized in that a plurality of catalyst elements are arranged to form a catalyst block and thus formed catalyst blocks are placed in the passage of exhaust gas. This apparatus permits to form a catalyst bed easily in the exhaust gas duct and ensures a good quality of the formed catalyst bed.
    Type: Grant
    Filed: September 18, 1979
    Date of Patent: March 30, 1982
    Assignee: Babcock-Hitachi Kabushiki Kaisha
    Inventors: Hiroshi Masutomi, Minoru Izutsu
  • Patent number: 4298305
    Abstract: A method and apparatus for transferring loads between selected stations includes a transfer car operable for selective shifting along a predetermined path interposed between first and second stations and a load carrier mounted on the transfer car operable for reciprocative shifting relative to the transfer car from a pre-spot position to load receiving and depositing positions. An orienting device such as a turntable is positioned adjacent the predetermined path and is operable for selectively rotating the transfer car and the load carrier through a predetermined angular displacement.
    Type: Grant
    Filed: November 22, 1978
    Date of Patent: November 3, 1981
    Assignee: Columbia Machine, Inc.
    Inventor: Walter Neth