Abstract: A plasma generator includes several plasma sources distributed in an array for plasma treatment of surfaces. Each plasma source includes first and second conductive electrodes. Each second electrode has a gas passage defined therein, and one of the first electrodes is situated within the gas passage in spaced relation from the second electrode, with each gas passage thereby constituting the free space for plasma generation between each pair of first and second electrodes. An insulating layer is interposed between the first and second electrodes to facilitate plasma formation via dielectric barrier discharge (DBD) in the gas passages between the first and second electrodes. The first electrodes may be provided in a monolithic structure wherein they all protrude from a common bed, and similarly the second electrodes may be monolithically formed by defining the gas passages within a common second electrode member.

Abstract: An ozone generation apparatus and method is described. The apparatus includes a dielectric body having a wall defining a fluid passageway operable to contain and conduct fluid containing oxygen, a first conductor generally having a line geometry extending lengthwise in the passageway and a second conductor generally having a line geometry, supported outside of the passageway by the body to extend generally parallel to the first conductor. The first and second conductors are arranged to cause an electric field to be established therebetween and through the fluid passageway when an electric potential is applied across the first and second conductors.

Abstract: An ozone generator includes a dielectric member having first and second faces, a first electrode provided on the first face of the member, and a second electrode provided on the second face of the member. The first electrode can be an electrically conductive plate, having a first and a second face. It is provided with at least one elongated recess in the first face. The first face is in contact with the first face of the dielectric member, such that the recess(es) and the dielectric member define channels in cooperation with the dielectric plate.

Abstract: An ozone generator including a pair of electrodes separated by a dielectric element including a plurality of passages defining a corona discharge zone. In one embodiment of the invention, the passages may be convoluted in the sense that the lengths of the passages defining the corona discharge zone are greater than the length of the first and second electrodes and the dielectric element. This configuration provides for an extended period of exposure of the gas to the electric field and may result in production of ozone exhibiting improved stability and oxidation rate. In one embodiment, inner and outer concentric electrodes are held in spaced apart relationship by a concentric tubular dielectric. A corona discharge zone is defined between an inner surface of the outer tubular electrode and the outer surface of the concentric tubular dielectric by a plurality of passages formed on the outer surface of the concentric tubular dielectric.

Abstract: An apparatus and method for generating ozone is provided. An ozone generator comprises a substantially transparent element having ozone-generating means mounted on an inner element area and an outer element area. An enclosure is positioned over the element, and an oxygen-containing gas is directed through the inner element area, creating ozone from a portion of the oxygen-containing gas. The ozone and oxygen-containing gas is then redirected over the outer element area, so that the oxygen-containing gas is at least twice exposed to the ozone-generating means, thereby generating additional ozone.

Abstract: The invention relates to an ozone generator, comprising a dielectric member having first and second faces, a first electrode provided on the first face of said member, and a second electrode provided on the second face of said member. The first electrode can be an electrically conductive plate, having a first and a second face. It is provided with at least one elongated recess in said first face. The first face is in contact with said first face of said dielectric member, such that said recessse(s) and said dielectric member define channels in cooperation with said dielectric plate.

Abstract: Ozone is generated by directing ambient air through a co-axially oriented cathode and anode. In a preferred embodiment, the outer electrode is a tubular cathode, with the anode disposed about a longitudinal axis therein. The anode is provided with a plurality of vane assemblies, with each individual vane canted at an angle of from about 15° to about 70°, and preferably about 45°, to the planar body of the vane assembly. Air flow is provided either coincident with the longitudinal axis, or tangentially thereto.

Abstract: A fluid dynamic ozone generator includes a coaxial gas-fluid mixing tube, an air-cooled ozone formation tube, and a liquid-pressurized gas-liquid mixer. The air-cooled ozone formation tube has an electric discharge region for inducing and sustaining micro-discharges. An oxygen-containing gas flowing through the region is capable of forming ozone. The air-cooled ozone formation tube is installed within the coaxial gas-fluid mixing tube. The liquid-pressurized gas-liquid mixer has an airtight container with an inlet pipe for gas-contained water. Undissolved gas leaves the water and, with the addition of water pressure, builds a positive pressure in the container. The positive pressure helps to dissolve the gas in the water.

Abstract: The present invention is a method and apparatus for altering a carbon-containing compound in an aqueous mixture. According to a first aspect of the present invention, it has been discovered that for an aqueous mixture having a carbon containing compound with an ozone reaction rate less than the ozone reaction rate of pentachlorophenol, use of corona discharge in a low or non-oxidizing atmosphere increases the rate of destruction of the carbon containing compound compared to corona discharge an oxidizing atmosphere. For an aqueous mixture containing pentachlorphenol, there was essentially no difference in destruction between atmospheres. According to a second aspect of the present invention, it has been further discovered that an aqueous mixture having a carbon-containing compound in the presence of a catalyst and oxygen resulted in an increased destruction rate of the carbon containing compound compared to no catalyst.

Abstract: An apparatus and method for generating ozone is provided. An ozone generator comprises a substantially transparent element having ozone-generating means mounted on an inner element area and an outer element area. An enclosure is positioned over the element, and an oxygen-containing gas is directed through the inner element area, creating ozone from a portion of the oxygen-containing gas. The ozone and oxygen-containing gas is then redirected over the outer element area, so that the oxygen-containing gas is at least twice exposed to the ozone-generating means, thereby generating additional ozone.

Abstract: The present invention provides a DBD cell (500) including ring shaped electrodes (512 and 514) that are positioned side-by-side on a dielectric tube (516). An AC power supply (518) is provided such that the cell and the power supply form a DBD treatment device (540) for abatement of noxious gases for example FCs that can be discharged from semiconductor fabricating devices. Additionally, one or more sensors (822) and/or one or more gas addition ports (816) can be included in a DBD cell (800) of the present invention. Several DBD cells (1030, 1036 and 1042) of the present invention can be combined to form a DBD reactor (1010) of the present invention. AC power supplies (1012, 1014 and 1016) are utilized to energize the cells (1030, 1036 and 1042), forming a novel noxious gas treatment device (1000) wherein plasmas are created when gas is present inside the reactor.

Abstract: An ozone generator has a dielectric element, first and second opposed end cap members and a gas passageway positioned between a high voltage electrode and a ground plane and positioned internal of the dielectric element, and at least one securring member extending between the opposed end caps whereby the securring member holds the end caps in place.

Abstract: An apparatus and method for generating ozone is provided. An ozone generator comprises a substantially transparent element having ozone-generating means mounted on an inner element area and an outer element area. An enclosure is positioned over the element, and an oxygen-containing gas is directed through the inner element area, creating ozone from a portion of the oxygen-containing gas. The ozone and oxygen-containing gas is then redirected over the outer element area, so that the oxygen-containing gas is at least twice exposed to the ozone-generating means, thereby generating additional ozone.

Abstract: Ozone is generated by directing ambient air through a co-axially oriented cathode and anode. In a preferred embodiment, the outer electrode is a tubular cathode, with the anode disposed about a longitudinal axis therein. The anode is provided with a plurality of vane assemblies, with each individual vane canted at an angle of from about 15° to about 70°, and preferably about 45°, to the planar body of the vane assembly. Air flow is provided either coincident with the longitudinal axis, or tangentially thereto.

Abstract: An ozone generator comprises a pair of spaced opposing electrodes, electrically conductive members connecting the pair of electrodes to a high-voltage alternating-current power source to generate an electric discharge between the electrodes, a dielectric provided between the opposing electrodes, and a gas flow passage for effecting flow of a material gas defined by the surfaces of the electrodes. At least one of the surfaces of the pair of electrodes has a plurality of parallel grooves. The material gas flows in a space between the plurality of grooves and the dielectric, in a direction transverse to the grooves.

Abstract: An ozonizer is disclosed, having a first electrode and a second electrode between which a discharge gap is formed, a dielectric being arranged between the first electrode and the second electrode. The dielectric comprises a support element made of glass or glass ceramic, onto which a thin dielectric film on the order of up to 100 &mgr;m is applied. The use of glass or glass ceramic as the dielectric, in conjunction with an additional thin ceramic dielectric film, allows a considerable improvement in the ozone concentration in the carrier gas, simultaneously with a good ozone yield.

Abstract: An ozone generator comprises an electrically insulating housing and a high voltage electrode, a ground electrode and a dielectric element positioned within the housing.

Abstract: Ozone is generated and combined with water. The combined water and ozone are then mixed to provide a substantially homogeneous mixture which subsequently is transported along a confined flow path having a length sufficient to provide substantially complete decomposition of the ozone.

Abstract: A corona treatment system (10d) has a corona treatment generator (11d), a first stationary electrode (12d) having a dielectric layer (18d) disposed thereon and a second roller electrode (13d) spaced from the first stationary electrode (12d) by a gap (15d). The second roller electrode (13d) has a layer of dielectric material (19d) disposed around a core (23d) and has a conductive layer (24d) disposed over a substantial portion of a length of the second roller (13d). A switch (20) is electrically connected between the conductive layer (24d) and an electrical ground, and the switch (20) is operable to switch the system between a grounded web mode and a dual dielectric mode.

Abstract: A tubular ozone generator comprises concentric inner tubular electrode/dielectric with inner electrode in intimate length-to-length contact with dielectric and outer tubular electrode with corona discharge zone between the inner tubular electrode/dielectric and outer tubular electrode. A dielectric of the inner tubular electrode/dielectric has a sealed end and an open end. The outer tubular electrode has an open exhaust end concentric with the sealed end of the dielectric and a closed end that forms a port with the open end of the dielectric. A tubular gas injector is situated within and concentric with the inner tubular electrode/dielectric and in conductive electrical contact with an electrode portion of the inner tubular electrode/dielectric. The sealed end of the dielectric is sealed with a transparent end cap to permit visual inspection of an electrode of the electrode/dielectric during operation of the generator.