Abstract: In the manufacturing method of a semiconductor device according to the present embodiment, a resist is supplied on a base material. A template including a first template region having a device pattern and a second template region being adjacent to the device pattern and having supporting column patterns is pressed against the resist on the base material. The resist is cured, thereby transferring the device pattern to the resist on a first material region of the base material corresponding to the first template region and at the same time transferring the supporting column patterns to the resist on a second material region of the base material corresponding to the second template region to form supporting columns. The supporting columns are contacted with the first template region when the device pattern is transferred to a resist supplied to the second material region.

Abstract: Means, apparatus, systems, and/or methods are described for forming improved rigid or flexible semi-transparent imprinting templates. These templates can be used to produce patterning masks having improved resolution that do not require plasma etching for residue removal. The methods and apparatus are compatible with roll-to-roll manufacturing processes and enable roll-to-roll formation of a wide range of metal patterned films.

Abstract: The present invention relates to a TiO2-containing quartz glass substrate for an imprint mold having a main surface and a side surface, in which the side surface has an arithmetic average roughness (Ra) of 1 nm or less, and the side surface has a root mean square (MSFR_rms) of concaves and convexes in the wavelength region of from 10 ?m to 1 mm being 10 nm or less.

Abstract: A method of producing a mold includes obtaining a master mold, the master mold including surface details; exposing a curable material to the surface details; and curing the curable material with the surface details. A mold includes a surface for molding a composite part, the surface including surface details, wherein the mold is made of phenolic material.

Abstract: An imprint apparatus which brings a resin on a substrate into contact with a pattern surface of a mold and cures the resin, includes a substrate holder which holds the substrate, a mold holder which holds the mold with a mold holding surface, a driving mechanism which moves the substrate holder relative to the mold holder, and a controller which controls the driving mechanism such that the substrate holder moves relative to the mold holder while the substrate holder holds a cleaning member instead of the substrate, and the cleaning member is in contact with the mold holding surface, thereby cleaning the mold holding surface.

Abstract: A patterning apparatus includes a stage arranged under a flexible substrate, a plurality of correction units arranged closely to the stage, attached to the flexible substrate, and configured to apply a tension force to the flexible substrate, and a pattern forming unit configured to form a pattern on the flexible substrate. The patterning apparatus corrects distortion of the flexible substrate by using the correction units.

Abstract: Disclosed is fabrication of a resin compact using a mold. The mold includes a resin mold body satisfies any one of conditions which are: a width of a protrusion is 5 nm or greater and less than 50 nm, an aspect ratio of the protrusion is 2 or greater, and Martens hardness is 200 or greater; the width of the protrusion is 50 nm or greater and less than 100 nm, the aspect ratio of the protrusion is 3 or greater, and Martens hardness is 200 or greater; and the width of the protrusion is 100 nm or greater and less than 1 ?m, the aspect ratio of the protrusion is 4 or greater, and Martens hardness is 150 or greater. The inversion pattern has a space between the adjacent protrusions less than twice a height of the protrusion. The mold further includes an adhesion layer and a release layer.

Abstract: A method for producing a film having a fine irregular pattern intermittently includes feeding a film to be processed intermittently from upstream side to the vicinity of the surface of a die having a fine irregular pattern, transferring the pattern to the surface of the film by pressing the film against the surface of a die, stripping the processed film on which a pattern is formed from the surface of a die, and then feeding a new film to be processed to the die, wherein the processed film is stripped from the surface of a die by gripping and moving the processed film to the upstream side, and then the processed film is fed by a length of intermittent feed to the surface of a die while preventing the processed film from creasing.

Abstract: A heating mold for thermal nanoimprint lithography is disclosed. According to one aspect, the mold includes a resistive heating element and collecting element for collecting the electromagnetic energy of a variable electromagnetic field emitted by a source located outside the mold. The collecting element being connected to the resistive heating element in which the electromagnetic energy is dissipated. A method for manufacturing the mold, a thermal nanoimprint lithography device including the mold, and a a method for preparing a substrate including a surface nanostructured by a thermal nanoimprint lithography technique using the mold is applied are also disclosed.

Abstract: A solution for texturing silicon wafers configured to constitute photovoltaic (PV) cells. Silicon wafers can be produced, the surface of which include uniformly engraved patterns having a depth of between 5 and 50 ?m.

Abstract: A modular tool for imparting profile characteristics into fluent cementitious material. The tool has an elongated base forming a permanently fixed blade, and at least one handle. The blade is configured to act as a dovetail to which any of several modular blades may frictionally fit in removable fashion. The fixed blade forms a deflector disposed to deflect removed cementitious material away from the handles. Other blades may fit by peg and socket engagement. The tool may have detachable rollers enabling the tool to advance at a controlled elevation along a wall being formed and shaped. A slide block may be arranged to engage the rollers so as to adjust their position on the tool. The tool may have integral bubble levels.

Abstract: Imprint lithography templates having alignment marks with highly absorptive material. The alignment marks are insensitive to the effects of liquid spreading and can provide stability and increase contrast to alignment system during liquid imprint filling of template features.

Abstract: An imprint lithography template is disclosed. In an embodiment, the template includes a patterned region to imprint a layer of imprintable medium, and an alignment mark for use in aligning the imprint template, the alignment mark configured such that imprintable medium is prevented from filling the alignment mark when the imprint template imprints the imprintable medium.

Abstract: Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.

Abstract: A fabricating apparatus and a method of a flat plate display are disclosed. A fabricating apparatus of a flat plate display includes a stage on which a substrate having liquid resin formed thereon is seated, a imprinting mold bonded with the liquid resin of the substrate to form a thin film pattern on the substrate, the imprinting mold comprises projections and grooves, and a planarization layer formed between the stage and the substrate to planarize a surface of the stage.

Abstract: A powder press in which seals of cylinder/piston units that can hydraulically activate or apply pressure to additional plates with reference to a die plate, the upper yoke and/or the lower yoke are kept free of powder to the greatest possible extent disposes a cylinder of a cylinder/piston unit facing away from a die plate and/or an additional plate, preferably below the additional plate.

Abstract: A prototype aluminum mold for stampers that is used to manufacture stampers having a fine irregular surface structure on the surface thereof and containing aluminum and magnesium, wherein the content of magnesium is 0.1% by mass to 3% by mass, the content of silicon is 100 ppm by mass or less, the total content of elements other than aluminum and magnesium is 500 ppm by mass or less, and the number of magnesium silicide particles having an equivalent diameter of 10 nm or more on the surface of the prototype aluminum mold for stampers is 10/1000 ?m2 or less.

Abstract: An apparatus for forming a serration pattern on a light guide plate having a top surface emitting a light, a bottom surface opposite to the top surface, and at least one side surface, arranged between the top surface and the bottom surface, as an incident surface. The apparatus includes a base plate supporting the bottom surface of the light guide plate; a fixing plate facing the top surface of the light guide plate with a predetermined interval; and a serration core transferring the serration pattern onto the at least one side surface of the light guide plate by a thermal pressing process causing a thickness deformation of the light guide plate. Further, the fixing plate induces a changed thickness of the light guide plate to be uniform by limiting a thickness change amount of the light guide plate to the predetermined interval.

Abstract: A cookie decorating tool includes a main body having attachment points for a plurality of decorating tool heads. In one version, the tool heads are in the form of one or more interchangeable stamps or rollers, each having a different design that may be imparted onto cookie dough to leave an impression prior to baking.

Abstract: A lithography system includes at least two lithography apparatuses disposed on the same fixed base, each of which includes an object, a moving body, and a vibration isolation unit. A control unit configured to control the lithography apparatuses controls a vibration isolation unit included in a first lithography apparatus based on driving instruction information to be given to a moving body included in a second lithography apparatus, and a control indicator regarding vibration directed onto an object to be vibration-isolated included in the first lithography apparatus due to a moving operation of the moving body.

Abstract: The present invention relates to a device for manufacture of three-dimensional models by means of a 3D printing process, whereby the build material is deposited on a build platform in layers and the build platform is moveable in the Z-direction and one or several drive units and one or several guide elements is/are provided to move the build platform. In so doing, drive units and guiding elements are arranged in such a way that a movement of the drive units is decoupled from the movement of the guiding elements.

Abstract: A resist layered product (30) is provided with an inorganic substrate (21), first resist layer (22) provided on one main surface of the inorganic substrate (21), and second resist layer (23), provided on the first resist layer (22), provided with a concavo-convex structure (23a) on its surface. In the concavo-convex structure (23a), a thickness of a residual film after transfer is 50 nm or less, the ratio (lcv/lcc) of a top width of convex-portion (lcv) to an opening width of concave-portion (lcc) of a fine pattern of a mold is in a predetermined range, and the ratio (Vr2/Vcm) between a concave-portion volume (Vcm) of the fine pattern of the mold and a volume (Vr2) of the second resist layer (23) is in a predetermined range. It is possible to easily form a resist mask (25) having a thin and uniform residual film on the inorganic substrate (21).

Abstract: A system, method and apparatus for manufacturing high density magnetic media is disclosed. A flexible mold having a very low modulus of less than about 4 GPa is made on a rigid support. The mold nano-imprints a resist material on disks for hard disk drives. The flexible mold may comprise a perfluoropolyether with urethane acrylate end groups with a low surface adhesion from which the cured resist is easily released.

Abstract: An imprint apparatus is provided with: an application unit; a substrate holding unit including an auxiliary plate; a gas supply unit including multiple supply outlets, which supplies gas to an interstice between a mold and a substrate, in conjunction with movement of a shot region by driving of the substrate holding unit from an application position of the application unit to a pressing position where pressing is conducted, when pressing the mold against an uncured resin applied to the shot region; and a controller which selects a supply outlet to supply the gas so that the supply outlet that supplies the gas among the multiple supply outlets is opposed by either the substrate or the auxiliary plate, while the shot region to which the uncured resin was applied is moved toward the pressing position, and which controls a direction of movement of the shot region.

Abstract: An aspect of one embodiment, there is provided a template employed in imprinting including a substrate having a main surface, a pattern including a concave portion and a convex portion on the main surface, and a liquid-repellent layer selectively provided on the convex portion, the liquid-repellent layer having liquid-repellency to resist having fluidity in the imprinting.

Abstract: A device and method to create additional segments of crust and topping zones on baked products such as pizza. The device is a base with a top surface and a bottom surface opposing the top surface and at least one pattern that protrudes from the surface of the base. Before cooking the baked product, the pattern is embossed into uncooked dough. Additional dough may be applied along the pattern on the flattened uncooked dough along the embossed pattern. The newly created crust results in additional segments of crust and topping zones throughout the pizza. Within the new topping zones, singular or combinations of toppings can be applied. Once baked, the product may be sliced along the crust segments, with each individual slice having toppings and a crust section.

Abstract: A mold for transferring a fine pattern, suitable for producing a substrate having a concave-convex structure such as a diffraction grating, can be provided by a simple process and with a high throughput. A method for producing a mold for transferring a fine pattern includes: a step of coating a surface of a base member with a solution containing a block copolymer and polyalkylene oxide; a solvent phase-separation step of phase-separating the block copolymer under a presence of vapor of an organic solvent so as to obtain a block copolymer film of the block copolymer, the block copolymer film having a concave-convex structure on a surface thereof and a horizontal cylinder structure in an interior thereof; a step of stacking a metal layer by electroforming; and a step of releasing the base member having the concave-convex structure formed thereon from the metal layer.

Abstract: An apparatus and method are provided for molding breast cups in a seamless circularly-knitted brassiere having a breast-covering portion and a torso encircling band, the apparatus comprising a base, a rear wall extending upwardly from the base, an upper mold plate extending outwardly and substantially horizontally from the rear wall, the upper plate having a pair of spaced openings formed therethrough, the openings spaced and dimensioned to correspond to a pair of breast cups, and a plate intermediate to the base and the upper mold plate, and being vertically moveable between a first, upper position and a second, lower position for securing a brassiere blank in position against the upper plate for the molding of breast cups therein.

Abstract: A mold comprising alumina having a microscopic pattern, in which distances between adjacent recesses or salients therein are not longer than wavelength of visible light, formed by anodic oxidation on a surface of an aluminum pre-mold without a rolling mark, wherein height or depth difference at a crystal grain boundary is 300 nm or less.

Abstract: A light guide plate transfer molding method for performing transfer molding of a light guide plate using a first mold and a second mold, includes performing, on a resin material, transfer molding of a first pattern and a second pattern that are provided on a transfer face of the first mold. The first pattern changes with a specific interval P serving as one period. The second pattern changes with one or two or more periods that correspond to 1/Na of the interval P. Na is a positive integer that satisfies Na?m, m being a specific positive integer.

Abstract: A fine concavo-convex structure product (10) is provided with an etching layer (11), and a resist layer (12) comprised of a heat-reactive resist material for dry etching provided on the etching layer (11), a concavo-convex structure associated with opening portions (12a) formed in the resist layer (12) is formed in the etching layer (11), a pattern pitch P of a fine pattern of the concavo-convex structure ranges from 1 nm to 10 ?m, a pattern depth H of the fine pattern ranges from 1 nm to 10 ?m, and a pattern cross-sectional shape of the fine pattern is a trapezoid, a triangle or a mixed shape thereof. The heat-reactive resist material for dry etching has, as a principal constituent element, at least one species selected from the group consisting of Cu, Nb, Sn, Mn, oxides thereof, nitrides thereof and NiBi.

Abstract: The foil embossing device comprises an embossing roller and two counter-rollers, one of the rollers being driven by a drive and the rollers having a configuration where the teeth, rings, or ridges project from the base cylinder, at least the embossing roller having teeth that project from the base cylinder and at least partly also serve for driving the counter-roller. To increase the uniformity of the embossing of the foil, the embossing roller has a diameter that is reduced by 0.02 to 0.20 mm over a certain length that is at least the same as the width of the foil. The length of the reduced diameter is preferably chosen so as to exceed the width of the foil being printed. Due to this depression, such a device allows a perfectly uniform embossing of foils of any kind independently of the design of the embossing rollers.

Abstract: A lithography apparatus comprises a projection system arranged to transfer a pattern from a patterning device onto a substrate, a carrier, and a drive system for moving the carrier relative to the projection system in a plane defined by reference to orthogonal axes X and Y. The drive system comprises a shuttle moving parallel to the Y-axis, a shuttle connector connecting the shuttle to the carrier, the shuttle connector allowing movement of the carrier in a direction parallel to the X-axis relative to the shuttle, and a shuttle driver driving movement of the shuttle parallel to the Y-axis. The shuttle is located to one side of the carrier in a direction parallel to the X-axis and it is desirable if only one of the shuttle is connected to the carrier.

Abstract: An imprint lithography release agent having general formula (1): where R1 represents H or CH3, n is an integer from 1 to 5, and m is an integer from 1 to 40. Fluorinated silazanes of general formula (1) can be used to form a release layer on an imprint lithography template, added to an imprint lithography resist, or both.

Abstract: Sample cell assemblies containing and holding powdered, granular, paste, or liquid samples are assembled and manufactured in a way that allows them to be inexpensive enough to be disposable and configured to be attached to a fork member for providing shaking or vibrating movement to the samples for X-ray Diffraction and X-ray Fluorescence testing. The sample cell assemblies include the usage of double-sided adhesive films and spacer for sealing the component of the sample cell assemblies, and latches as locking means for locking and unlocking the cell assemblies.

Abstract: The present invention provides an imprint, apparatus which performs an imprint process of transferring a pattern onto a substrate, the apparatus comprising a deforming unit configured to deform the pattern surface by applying a force to the mold, an obtaining unit configured to obtain thickness information of the mold, a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by the obtaining unit, so that the pattern surface has a target, shape in the imprint process, and a control unit configured to control the deforming unit, to apply the force calculated by the calculation unit to the mold in the imprint process.

Abstract: The present invention provides a mold including a pattern to be transferred to a resin coated on a substrate, by performing an imprint process, the mold comprising a first portion including a first surface which include a pattern portion provided with the pattern and a peripheral portion surrounding the pattern portion, and a second surface which is opposite to the first surface, and a second portion which surrounds the first portion and is thicker than the first portion, wherein a concave portion is formed by the second surface of the first portion and an inner surface of the second portion, and the concave portion is provided with a light-shielding portion in a region on an opposite side to the peripheral portion.

Abstract: An optical sheet includes a sheet-like body portion, and unit prisms arranged on one surface of the body portion. Each unit prism extends linearly in a direction intersecting the arrangement direction. Each unit prism, when viewed in a direction parallel to the arrangement direction of the unit prisms, has an uneven polygonal-line-shaped contour and, with reference to raised portions defined by the polygonal-line-shaped contour of each unit prism, the distance between a top of each raised portion, a farthest point from the body portion in the raised portion, and the body portion in the normal direction of the body portion is not constant. The optical sheet can prevent significant problems when it is superimposed on another member.

Abstract: A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

Abstract: A pressing assembly (10) and a method for forming a depression (105) within a moving, wet gypsum board (100) is disclosed. The assembly comprises a pressing head (16) comprising a pressing surface which is arranged to contact the board, and a support member (17), the pressing head (16) being arranged to compress a portion of the board between the pressing surface and the support member (17) to form a depression (105) within the board (10). The pressing surface comprises a first and second surface portion (24, 25) separated by a relief portion (27), which is arranged to press the board (100) toward the support head (17) with less compressive force than the first and second surface portion (24, 25).

Abstract: A stamper of an embodiment includes: a base portion having a main surface; and a plurality of guides arranged on the main surface in mutually different first and second directions and serving as references of arrangement of a plurality of self-assembled dots. A distance between the guides in a third direction is within a range of an integer m1±0.05 times of a pitch of the plural self-assembled dots. The third direction corresponds to a third vector obtained by combining a first vector corresponding to the arrangement of the guides in the first direction and a second vector corresponding to the arrangement of the guides in the second direction. A distance between the plural guides in the first direction falls out of a range of an integer m2±0.15 times of the pitch of the plural self-assembled dots.

Abstract: The present disclosure relates to a tool such as an injection moulding tool or an embossing tool. A heating device including a stack of layers is provided for heating a tool surface. The stack may include a coil carrier layer with a number of wound coils for generating a magnetic field, and a conductive top layer, being adjacent to the tool surface currents are induced in the top layer to heat the surface. Efficient heating may be provided by solutions involving low resistivity layers that lead currents to the top layer without themselves developing heat to any greater extent. A conduction frame device can be provided beneath the top layer and around the perimeter thereof to provide reliable contact with a backing layer.

Abstract: In an imprint method according to one embodiment, a template on which a template pattern is formed is pushed against resist on a substrate to be transferred while the resist is cured in this state. The template is subsequently separated from the cured resist. The template is then degassed from the template pattern surface side between after the template is separated from the cured resist and till the template is pushed against resist at the next shot.

Abstract: A transport container for use in a device for producing a three-dimensional object of selective solidification of a build-up material deposited in layers, in which the device has a process chamber closed during operation, where the three-dimensional object is produced in layers. The transport container has a container, in which a height-adjustable platform is arranged, on which the three-dimensional object is produced in layers. The process chamber has first and second sections in which the second section can be separated from the first section and operated in a separate state independently from the device and also can be connected to the first section to produce an operating state of the device.

Abstract: A compact deformation-based micro-texturing apparatus and method employ flexure bearing houses for rotatably supporting opposite ends of each of a first (e.g. upper) roll and a second (e.g. lower) roll to provide a working roll gap between the rolls, wherein at least one of the rolls has one or more micro surface features to plastically deform a surface of a workpiece deformed by rolling action in the roll gap. An electrical current may be passed through the workpiece to assist micro deformation. A roll gap adjusting device is operably associated with the first and second flexure bearing houses for adjusting the roll gap dimension to the final depth of the micro surface features to be imparted to the surface of the workpiece by the rolling action.

Abstract: Disclosed herein is a patterning mold configured to form a micropattern on a substrate or glass. The disclosed patterning mold includes a transfer body with a patterning part formed at one end of the transfer body to transfer a nanoparticle material to one surface of the substrate. The patterning mold further includes a fixing member coupled to an exterior of the transfer body, to prevent or reduce deformation of the exterior of the transfer body.

Abstract: Providing a mold and a manufacturing method therefor wherein protrusions are easy to be pressed into a resin base material and the protrusions are easy to be pulled out from the resin base material. The present invention provides a mold comprising a stamping surface (1a) formed depending on a via pattern and a protruding portion (21, 22) formed in convex shape from the stamping surface (1a), wherein the protruding portion has a base portion (111, 121) merging into a main surface of the stamping surface (1a) to have a curvature and a slope portion (113, 123) progressively decreasing in outer diameter thereof from the base portion (111, 121) to a top portion (112, 122) of the protruding portion (21, 22).

Abstract: Manufacture of a roller die configured for molding microstructures onto an optical film, includes an uncoated roller and a number of micro-structures formed on an outer surface of the roller, and a layer of diamond-like carbon film being formed on the surfaces of the micro-structures.

Abstract: Provided is a mold for imprint having a leveling agent layer in which a desired uneven pattern is formed on an outermost surface by embedding unevenness on a main surface of a base body by coting this portion with a leveling agent.

Abstract: The present invention provides an imprint apparatus for transferring a pattern of a mold to a shot region on a substrate by curing an imprint material on the substrate while the mold and the imprint material are in contact with each other, comprising a heating unit configured to deform a shape of the shot region by heating each of a plurality of portions of the substrate, and a control unit configured to obtain a target heat quantity in each of the plurality of portions so that the shape of the shot region becomes closer to a target shape, generate a heating profile for each of the plurality of portions so that a heat quantity in the portion becomes equal to the target heat quantity, and control the heating unit to heat each of the plurality of portions according to the generated heating profile.