Chromium (cr), Molybdenum (mo), Or Tungsten (w) Metal Carbide Containing Coating Patents (Class 427/249.18)
  • Patent number: 11859275
    Abstract: Implementations of the present disclosure generally relate to hardmask films and methods for depositing hardmask films. More particularly, implementations of the present disclosure generally relate to tungsten carbide hardmask films and processes for depositing tungsten carbide hardmask films. In one implementation, a method of forming a tungsten carbide film is provided. The method comprises forming a tungsten carbide initiation layer on a silicon-containing surface of a substrate at a first deposition rate. The method further comprises forming a tungsten carbide film on the tungsten carbide initiation layer at a second deposition rate, wherein the second deposition rate is greater than the first deposition rate.
    Type: Grant
    Filed: January 3, 2019
    Date of Patent: January 2, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Vivek Bharat Shah, Anup Kumar Singh, Bhaskar Kumar, Ganesh Balasubramanian
  • Patent number: 9890450
    Abstract: A coating method based on gas phase deposition by arc evaporation, with the steps: selecting a first target as a material source for the coating; providing a coating chamber with an arc evaporation source including the selected target; loading the chamber with substrates to be coated; pumping down the chamber to a process pressure suitable for the arc evaporation; and igniting and operating the arc such that material is evaporated from the first target and is then deposited on the substrates to be coated, optionally after reaction with a reactive gas admitted into the coating chamber. The first target includes at least one matrix component and one doping component such that the doping component has a melting point at least 500° C. lower than the matrix component, and a melted drop of the doping component on a solid surface of the matrix component assumes a contact angle of a least 90°.
    Type: Grant
    Filed: November 28, 2013
    Date of Patent: February 13, 2018
    Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
    Inventors: Jurgen Ramm, Beno Widrig, Matthias Lukas Sobiech, Doris Fopp-Spori
  • Patent number: 9004465
    Abstract: A helical compression spring, preferably of steel, in particular CrSi steel or CrNi steel, comprises a coating which has at least one a-C: H: Me coating or a plurality of layers of CrN (16) and a-C: H: Me coatings (14) alternately. In a method for coating a helical compression spring, preferably of steel, a plurality of layers of CrN and a-C: H: Me coatings are applied alternately.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: April 14, 2015
    Assignee: Federal-Mogul Burscheid GmbH
    Inventors: Marcus Kennedy, Han-Rainer Brillert, Michael Zinnabold
  • Patent number: 8956510
    Abstract: The present invention relates generally to methods for producing metallic products comprising a substrate and a metallic, external coating. In preferred embodiments, the metallic products are jewelry articles.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: February 17, 2015
    Assignee: Frederick Goldman, Inc.
    Inventor: Andrew Derrig
  • Publication number: 20140113453
    Abstract: A tungsten carbide coated chamber component of semiconductor processing equipment includes a metal surface, optional intermediate nickel coating, and outer tungsten carbide coating. The component is manufactured by optionally depositing a nickel coating on a metal surface of the component and depositing a tungsten carbide coating on the metal surface or nickel coating to form an outermost surface.
    Type: Application
    Filed: October 24, 2012
    Publication date: April 24, 2014
    Applicant: Lam Research Corporation
    Inventors: Hong Shih, Lin Xu, John Michael Kerns, Anthony Amadio, Duane Outka, Yan Fang, Allan Ronne, Robert G. O'Neil, Rajinder Dhindsa, Travis Taylor
  • Publication number: 20140102599
    Abstract: A method of coating all surfaces of a plurality of piston rings in a single run by a chemical vapor deposition (CVD) process is provided. The method can include providing a coil formed of an iron-based material; heating the coil; and depositing a coating on all surfaces of the coil during a single continuous period of time, without having to move the coil during the CVD process. The coil is maintained in a fixed position during the depositing step. The method next includes splitting the coil into a plurality of separate coated piston rings. Alternatively, the method can include providing a plurality of stacked keystone piston ring bodies; and disposing a cylinder around the stack to maintain the keystone piston ring bodies in position while depositing the CVD coating on all surfaces of the keystone piston ring bodies during the single coating run.
    Type: Application
    Filed: October 11, 2013
    Publication date: April 17, 2014
    Applicant: Federal-Mogul Corporation
    Inventors: Robert Aharonov, Haron Gekonde
  • Publication number: 20140106177
    Abstract: A friction stir welding tool of the present invention is used for friction stir welding, and includes: a base material; and a coating layer formed on a surface of at least a portion of the base material that is to be caused to contact workpieces during friction stir welding, the coating layer containing cubic WC1-x.
    Type: Application
    Filed: February 25, 2013
    Publication date: April 17, 2014
    Inventors: Yoshiharu Utsumi, Hideki Moriguchi
  • Publication number: 20130136861
    Abstract: In a method for coating at least part of the inner face of a piston ring, said ring preferably consisting of cast iron or steel, a PVD and/or DLC coating is applied by means of at least one of the following methods: PA-CVD, glow discharge and/or HIPIMS. A piston ring has a coating that is formed at least on part of the inner face of said ring, said coating being a PVD and/or DLC coating that preferably has been applied by means of PA-CVD, glow discharge and/or HIPIMS.
    Type: Application
    Filed: February 17, 2011
    Publication date: May 30, 2013
    Inventors: Dirk Barenreuter, Marcus Kennedy, Markus Kellner, Ralf Lammers
  • Publication number: 20130065706
    Abstract: An approach is provided for coating a golf club head with a material. The approach involves securing a first golf club head component to a second golf club head component using an adhesive, resulting in a golf club head main body having an exterior surface. The approach further includes physical vapor depositing at least one layer on at least a portion of the exterior surface of the golf club head main body at a temperature less than a melting point of the adhesive.
    Type: Application
    Filed: September 14, 2011
    Publication date: March 14, 2013
    Applicant: SRI SPORTS LIMITED
    Inventors: Sharon J. PARK, Joseph C. CHEN
  • Publication number: 20130004261
    Abstract: A first element (10) adapted to selectively engage a second element (20), wherein the first element comprises a coating (12) and at least an engaging portion (14) of the first element is coated in said coating, wherein the coating is formed by vapour deposition to provide a thermo-chemically stable layer for temperatures up to 800° C. The coating (12) may comprise one or more of a nitride, oxide or carbide of titanium, chromium or aluminium.
    Type: Application
    Filed: June 20, 2012
    Publication date: January 3, 2013
    Applicant: ROLLS-ROYCE PLC
    Inventors: Glen PATTINSON, Michael ROBINSON
  • Patent number: 8343582
    Abstract: A method for depositing a non-oxide ceramic-type coating based on chrome carbides, nitrides or carbonitrides, by DLI-CVD at low temperature and atmospheric pressure on a metallic substrate, includes: a) a solution is prepared, containing a molecular compound which is a precursor of the metal to be deposited, belongs to the bis(arene) family, and has a decomposition temperature of 300° C.-550° C., the compound being dissolved in an oxygen atom depleted solvent; b) the solution is introduced as aerosol into a heated evaporator at a temperature between the solvent boiling temperature and the precursor decomposition temperature; and c) the precursor and the vaporized solvent are driven from the evaporator towards a CVD reactor having cold walls, with a susceptor carrying the substrate to be covered and heated to a temperature higher than the decomposition temperature of the precursor, to a maximum of 550° C., the evaporator and the CVD reactor being at atmospheric pressure.
    Type: Grant
    Filed: July 19, 2007
    Date of Patent: January 1, 2013
    Assignee: Institut National Polytechnique de Toulouse (I.N.P.T.)
    Inventors: Francis Maury, Aurélia Douard
  • Patent number: 8012535
    Abstract: The invention relates to a method for producing a coated substrate body by chemical vapor deposition at least on one layer made of a carbonitride of a metal of IVa-Vla-groups of the periodic table, wherein a monocyclic hydrocarbon is used in the gas atmosphere during the deposition, in addition to a nitrile. According to the invention, the thus produced coated substrate body has a high degree of hardness and is used, preferably, in cutting operations where the cutting speeds are ?250 m/min.
    Type: Grant
    Filed: October 7, 2006
    Date of Patent: September 6, 2011
    Assignee: Kennametal Widia Produktions GmbH & Co KG
    Inventors: Volkmar Sottke, Doris Lenk, Hartmut Westphal, Hendrikus Van Den Berg
  • Publication number: 20110164842
    Abstract: A layered composite which has a substrate made of a ferrous material with a PVD/PACVD coating and a corrosion protection layer that is disposed on the PVD/PACVD coating. The PVD/PACVD coating has pores into which the corrosion protection layer protrudes.
    Type: Application
    Filed: August 26, 2009
    Publication date: July 7, 2011
    Applicant: SCHAEFFLER TECHNOLOGIES GMBH & CO. KG
    Inventors: Tim Matthias Hosenfeldt, Bertram Haag, Yashar Musayev
  • Patent number: 7968218
    Abstract: A method for coating a tool or tool part, includes providing a base structure of the tool or the tool part at a temperature of 850° C. to 950° C. and applying at least one layer to the base structure. One or more layers of the at least one layer is formed of a metal carbonitride of composed of at least one of titanium, zirconium, hafnium, vanadium, niobium, tantalum and chromium. The one or more layers of the at least one layer is deposited by a deposition of a gas containing methane, nitrogen and at least one metal compound. After beginning the applying, the temperature is increased by at least 40° C. to an increased temperature and the deposition is continued for a time at the increased temperature.
    Type: Grant
    Filed: November 16, 2006
    Date of Patent: June 28, 2011
    Assignee: Boehlerit GmbH & Co. K.G.
    Inventors: Reinhard Pitonak, Jose Garcia, Ronald Weissenbacher, Klaus Ruetz-Udier
  • Publication number: 20110075293
    Abstract: A guide for guiding a magnetic data storage tape has a curved support portion for supporting a major tape surface and at least one flange adjoining the support portion. At least in a region of transition between the support portion and the at least one flange, the guide has an under coating of a diamond like carbon material, tungsten carbide, or similarly wear resistant material, and a surface coating having lower surface tension than the under coating. A tape guide apparatus and a method of making a tape guide are also disclosed.
    Type: Application
    Filed: September 30, 2009
    Publication date: March 31, 2011
    Inventors: Henricus Ruyten, Catherine Dinhobl
  • Patent number: 7824733
    Abstract: A process for producing a wear-resistant coating and to a wear-resistant coating on predetermined surfaces (2) of machine or engine parts (1) consisting of a sintered material which are exposed to frictional wear, for fuel feed units in particular, comprising at least one metal-free amorphous hydrocarbon layer (5) with sp2- and sp3-hybridized carbon applied to the predetermined surface (2) of the machine or engine part (I) for reducing friction and increasing the wear resistance of the predetermined surface (2) of the machine or engine part (1), and at least one intermediate layer of a metal-containing hydrocarbon layer formed between the predetermined surface of the machine or engine part and the amorphous hydrocarbon layer wherein the metal is a combination of W, Ti, Hf and Ge.
    Type: Grant
    Filed: July 23, 2008
    Date of Patent: November 2, 2010
    Assignee: Schaeffler KG
    Inventors: Tim Matthias Hosenfeldt, Martin Kramer, Alexander Freiburg
  • Publication number: 20100104860
    Abstract: A cemented tungsten carbide-based material includes: a cemented tungsten carbide substrate having a chromized layer that contains a tungsten carbide and a chromium carbide; and a diamond film formed on said chromized layer. A method for making the cemented tungsten carbide-based material involves subjecting a cemented tungsten carbide substrate to chromization so as to form the cemented tungsten carbide substrate with a chromized layer that contains a tungsten carbide and a chromium carbide; and forming a diamond film on the chromized layer.
    Type: Application
    Filed: April 27, 2009
    Publication date: April 29, 2010
    Applicant: NATIONAL TAIWAN OCEAN UNIVERSITY
    Inventors: Chau-Chang Chou, Jyh-Wei Lee, Yen-Yi Chen, Hsin-Han Lin
  • Patent number: 7513961
    Abstract: A family of extremely fine-grained alloys are used to make coatings or free-standing bodies having desirable properties for use as a heat-resistant and wear-resistant material. In an illustrative embodiment, the alloys are comprised of a multiplicity of alternate, microcrystalline or nanocrystalline films of tungsten metal and tungsten compound. The tungsten compound film may be comprised of a tungsten carbide or a tungsten boride. The tungsten films are the primary films. Their desirable characteristics, in addition to their very fine crystalline habit, per se, are the high strength, high hardness, high resilience, and high fracture energy which these fine crystallites foster. They may be manufactured by a chemical vapor deposition process in which reactive gas flows are rapidly switched to produce alternate films with abrupt hetero-junctions and thereby to produce the useful micro-crystalline habit. The unique synthesis method allows effective control of critical flaw size.
    Type: Grant
    Filed: December 6, 2004
    Date of Patent: April 7, 2009
    Inventors: Robert A. Holzl, Robert L. Shinavski
  • Publication number: 20090047510
    Abstract: A coated product is disclosed consisting of a metallic substrate and a composite coating wherein at least one component of the composite coating is of MAX material type. Furthermore, a method of producing such a coated product is disclosed using vapour deposition technique in a continuous roll to roll process.
    Type: Application
    Filed: November 28, 2005
    Publication date: February 19, 2009
    Inventors: Mikael Schuisky, Jen-Petter Palmquist
  • Patent number: 7384258
    Abstract: There is disclosed a die 1 for forming a honeycomb structure comprises: a plate-like die substrate 2 having at least two surfaces 8, 9, in which back holes 3 for introducing a green material are formed in one surface 8, and slits 4 communicating with back holes 3 are formed in the other surface 9; an underlayer 5 disposed on the substrate 2 so as to coat at least a part of a portion constituting the back hole 3 and the slit 4; an intermediate layer 6 disposed so as to coat at least a part of the underlayer 5 and constituted of tungsten carbide particles whose average particle diameter is 5 ?m or less and containing W3C as a main component; and a surface layer 7 disposed so as to coat at least a part of the intermediate layer 6 and constituted of diamond and/or diamond-like carbon.
    Type: Grant
    Filed: July 6, 2005
    Date of Patent: June 10, 2008
    Assignee: NGK Insulators, Ltd.
    Inventors: Hiroshi Kuwahara, Susumu Matsuoka, Takao Saito
  • Patent number: 7270719
    Abstract: The invention relates to the use of PVD technique for the application of a low static friction and wear resistant coating consisting essentially of titanium nitride or a diamond-like carbon—DLC, with or without an addition of tungsten carbide, on a stainless steel, in one and the same operation as the surface hardening of the stainless steel. In this way, in one single operation, a low static friction is obtained on a very hard and wear resistant surface. Moreover, the dimensions of the work-piece are maintained unaltered, which makes the invention very useful in the production of, e.g., cam followers, cylinder tubes and piston rods for shock absorbers. The used stainless steel has the following composition (in weight %): carbon max about 0.1; nitrogen max about 0.1; copper from about 0.5 to about 4; chromium from about 10 to about 14; molybdenum from about 0.5 to about 6; nickel from about 7 to about 11; cobalt 0 to about 9; tantalum max about 0.1; niobium max about 0.1; vanadium max 0.
    Type: Grant
    Filed: January 13, 2004
    Date of Patent: September 18, 2007
    Assignee: Sandvik Intellectual Property AB
    Inventor: Göran Berglund
  • Patent number: 7246586
    Abstract: The present invention relates to a process for producing a wear-resistant coating and to a wear-resistant coating on predetermined surfaces of machine or engine parts, in particular for internal combustion engines, which are exposed to frictional wear, comprising at least one nanocrystalline functional layer (4) made up of at least two CrNx phases for reducing friction and increasing the wear resistance of the predetermined surface (2) of the machine or engine part (1).
    Type: Grant
    Filed: September 7, 2005
    Date of Patent: July 24, 2007
    Assignee: INA - Schaeffler KG
    Inventors: Tim Matthias Hosenfeldt, Karl-Ludwig Grell
  • Patent number: 7198820
    Abstract: A process depositing a carbon- and transition metal-containing thin film on a substrate involves placing a substrate within a reaction space and sequentially pulsing into the reaction space a transition metal chemical and an organometallic chemical. Following each chemical pulse, the reaction space is purged, and the pulse and purge sequence is repeated until a desired film thickness is obtained. A preferred deposition process uses atomic layer deposition techniques and may result in an electrically conductive thin carbide film having uniform thickness over a large substrate area and excellent adhesion and step coverage properties.
    Type: Grant
    Filed: August 15, 2003
    Date of Patent: April 3, 2007
    Assignee: Planar Systems, Inc.
    Inventors: Kari Härkönen, Mark Doczy, Teemu Lang, Nathan E. Baxter
  • Patent number: 7077918
    Abstract: A coating is stripped off a work piece by applying a chromous and aluminiforous coat directly on the work piece and stripping the work piece with an alkaline solution containing a strong oxidant. A single-compartment system can be used, which includes a spray chamber including a circulatory spray-cycle system; a support for holding the work piece; and a media container connected to the spray chamber via a media circulation system.
    Type: Grant
    Filed: January 31, 2005
    Date of Patent: July 18, 2006
    Assignee: Unaxis Balzers Ltd.
    Inventors: Udo Michael Rauch, Wolfgang Kalss, Christian Wohlrab, Caroline Siebert, Norbert Froemel
  • Patent number: 6960280
    Abstract: The present invention provides a method of forming a surface coating having a micro-Vickers hardness of about 1600 kgf/mm2 or more on a substrate made of metal, alloy or ceramic. The method comprises subjecting the substrate to a reactive plasma process which uses a target material consisting of tungsten or its alloy, a sputtering gas consisting of argon, and at least one reactive gas selected firm the group consisting of carbon dioxide and carbon monoxide, to form a tungsten oxycarbide coating on the surface of the substrate, wherein the reactive plasma process is performed additionally using at least one noble gas selected from the group consisting of helium, neon, krypton and radon, as an auxiliary gas, while maintaining the substrate at a temperature in the range of about 550 to 680 K.
    Type: Grant
    Filed: February 12, 2003
    Date of Patent: November 1, 2005
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventor: Tetsuo Kado
  • Patent number: 6849299
    Abstract: A method of introducing small amounts of a refractory element into a vapor deposition coating. A second material (30), containing at least two elements which are desired to be deposited as a coating on a base material, has placed over it a first material (20) substantially comprising such two elements and a refractory element. The first material (20) is adapted to permit transport of the at least two elements in the second material (30) through the first material (20) when the first (20) and second (30) material are in a molten state and in touching contact with the other so as to permit evaporation of the two elements and the refractory element from an exposed surface. Heat is supplied to the first (20) and second (30) materials to permit evaporation of the at least two elements of second material (30) and the refractory element in the first material (20), and the resulting vapors are condensed as a deposit on a base material (50).
    Type: Grant
    Filed: October 16, 2002
    Date of Patent: February 1, 2005
    Assignee: General Electric Company
    Inventors: Reed Roeder Corderman, Melvin Robert Jackson, Richard Arthur Nardi, Jr.
  • Patent number: 6827796
    Abstract: A family of extremely fine-grained alloys are used to make coatings or free-standing bodies having desirable properties for use as a heat-resistant and wear-resistant material. In an illustrative embodiment, the alloys are comprised of a multiplicity of alternate, microcrystalline or nanocrystalline films of tungsten metal and tungsten compound. The tungsten compound film may be comprised of a tungsten carbide or a tungsten boride. The tungsten films are the primary films. Their desirable characteristics, in addition to their very fine crystalline habit, per se, are the high strength, high hardness, high resilience, and high fracture energy which these fine crystallites foster. They may be manufactured by a chemical vapor deposition process in which reactive gas flows are rapidly switched to produce alternate films with abrupt hetero-junctions and thereby to produce the useful micro-crystalline habit. The unique synthesis method allows effective control of critical flaw size.
    Type: Grant
    Filed: November 1, 2001
    Date of Patent: December 7, 2004
    Assignee: Composite Tool Company, Inc.
    Inventors: Robert A. Holzl, Robert J. Shinavski
  • Patent number: 6827977
    Abstract: A method of making a coated article (e.g., window unit), and corresponding coated article are provided. A layer of or including diamond-like carbon (DLC) is formed on a glass substrate. Then, a protective layer is formed on the substrate over the DLC inclusive layer. During heat treatment (HT), the protective layer prevents the DLC inclusive layer from significantly burning off. Thereafter, the resulting coated glass substrate may be used as desired, it having been HT and including the protective DLC inclusive layer.
    Type: Grant
    Filed: March 7, 2002
    Date of Patent: December 7, 2004
    Assignee: Guardian Industries Corp.
    Inventor: Vijayen S. Veerasamy
  • Patent number: 6800552
    Abstract: The present invention relates generally to a method of depositing transition metal carbide thin films. In particular, the invention concerns a method of depositing transition metal carbide thin films by atomic layer deposition (ALD), in which a transition metal source compound and a carbon source compound are alternately provided to the substrate. A variety of metal and carbon source gases are disclosed. The methods are applicable to forming metal carbide thin films in semiconductor fabrication, and particularly to forming thin, conductive diffusion barriers within integrated circuits.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: October 5, 2004
    Assignee: ASM International, N.V.
    Inventors: Kai-Erik Elers, Suvi P. Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Juha Soininen
  • Patent number: 6723391
    Abstract: Method for producing cutting tools provides a first hard material coating on a first region of a tool base body containing at least one cutting edge, using a plasma vacuum coating process. A second hard material coating is provided on a second region which is adjacent the first, also via plasma vacuum coating process. Hard material for the coatings is a carbide, oxide, oxicarbide, nitride, nitrocarbide, oxinitride or nitrooxicarbide of at least two of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al. The first coating has a content of at least two of the metal elements which is at most 2 at % different from the content of the two metal elements in the second coating if the tool is for higher adhesive strength than hardness. The first coating has a content of the two metal elements that is different from the content of the two metal elements of the second coating by more than 2 at % if the tool is for higher hardness than high adhesive strength.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: April 20, 2004
    Assignee: Unaxis Balzers AG
    Inventors: Volker Derflinger, Harald Zimmermann
  • Patent number: 6716483
    Abstract: A conventional cutting tool is provided and a cutting edge of that tool is formed and/or sharpened. A relatively hard layer is applied over at least a portion of the cutting tool that includes the cutting edge and then a friction-reducing layer is applied over the hard layer. The entire coated cutting tool, or at least a portion of the coated cutting tool that includes the cutting edge, is cryogenically treated. The coated and cryogenically treated cutting tool is mounted in a conventional manner to a conventional cutting machine, and then used cut articles containing at least a substantial amount of wood.
    Type: Grant
    Filed: June 26, 2001
    Date of Patent: April 6, 2004
    Assignee: Moulder Services, Inc.
    Inventor: David Daniel Rankin, Sr.
  • Patent number: 6656520
    Abstract: A non-carbon, metal-based, high temperature resistant, electrically conductive and electrochemically active anode of a cell for the production of aluminum has a metal-based substrate to which an adherent coating is applied prior to its immersion into the electrolyte and start up of the electrolysis by connection to the positive current supply. The coating is obtainable from one or more layers applied from: a liquid solution, a dispersion in a liquid or a paste, a suspension in a liquid or a paste, and a pasty or non-pasty slurry, and combinations thereof with or without one or more further applied layers, with or without heat treatment between two consecutively applied layers when at least two layers are applied.
    Type: Grant
    Filed: March 14, 2002
    Date of Patent: December 2, 2003
    Assignee: Moltech Invent-SA
    Inventor: Vittorio de Nora
  • Patent number: 6599572
    Abstract: A process for growing an electrically conductive metalloid thin film on a substrate with a chemical vapor deposition process. A metal source material and a reducing agent capable of reducing the metal source material to a reduced state are vaporized and fed into a reaction space, where the metal source material and the reducing agent are contacted with the substrate. The reducing agent is a boron compound having at least one boron-carbon bond, and the boron compound forms gaseous by-products when reacted with the metal source material. Generally, the boron compound is an alkylboron compound with 0-3 halogen groups attached to the boron. The metal source material and the reducing agent may be fed continuously or in pulses during the deposition process.
    Type: Grant
    Filed: January 18, 2001
    Date of Patent: July 29, 2003
    Assignee: ASM Microchemistry Oy
    Inventors: Ville Antero Saanila, Kai-Erik Elers, Sari Johanna Kaipio, Pekka Juha Soininen
  • Patent number: 6482262
    Abstract: The present invention relates generally to a method of depositing transition metal carbide thin films. In particular, the invention concerns a method of depositing transition metal carbide thin films by atomic layer deposition (ALD), in which a transition metal source compound and a carbon source compound are alternately provided to the substrate. A variety of metal and carbon source gases are disclosed. The methods are applicable to forming metal carbide thin films in semiconductor fabrication, and particularly to forming thin, conductive diffusion barriers within integrated circuits.
    Type: Grant
    Filed: October 13, 2000
    Date of Patent: November 19, 2002
    Assignee: ASM Microchemistry Oy
    Inventors: Kai-Erik Elers, Suvi P. Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Juha Soininen
  • Patent number: 6376015
    Abstract: A multi-layer thermal barrier coating for a superalloy article includes a metallic matrix coating containing particles, a MCrAlY alloy bond coating on the metallic matrix coating, a thin oxide layer on the MCrAlY alloy bond coating and a columnar grain ceramic thermal barrier coating. The metallic matrix coating includes a 80 wt % nickel-20 wt % chromium alloy. The particles include metallic compounds such as carbides, oxides, borides and nitrides, which react with harmful transition metal elements such as titanium, tantalum and hafnium, in the superalloy substrate. One suitable compound is chromium carbide because the hafnium transition metal elements will take part in an exchange reaction with the chromium in the chromium carbide to form a stable carbide of the harmful transition metal element. This reduces the amount of harmful elements in the superalloy reaching the oxide layer and increases the service life of the thermal barrier coating.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: April 23, 2002
    Assignees: Rolls-Royce, PLC, Chromalloy United Kingdon Limited
    Inventor: David S Rickerby
  • Publication number: 20020025378
    Abstract: A method is disclosed for treating the surface of tools made of tool steel, wherein primary carbides are embedded in the tool steel matrix. The thickness of the primary carbides disposed near the surface can be reduced by forming a surface which has point-wise recess; alternatively, the primary carbides can be completely removed. A hard material layer is deposited on this surface. The invention also describes tools made of tool steel, wherein primary carbides are embedded in the tool steel matrix. The primary carbides are significantly recessed, and a hard material layer is deposited thereon.
    Type: Application
    Filed: August 13, 2001
    Publication date: February 28, 2002
    Inventors: Klaus Keller, Fritz Koch
  • Patent number: 6331332
    Abstract: In accordance with the present invention, there is provided a process for depositing diamond-like carbon (DLC) films by cathodic arc evaporation (CAE), wherein the high energy of CAE metal ions causes the cracking reaction of the hydrocarbon gases fed into the vacuum reaction chamber and then results in the deposition of DLC films having high hardness and lubrication. Due to the metallic constituents doped in the DLC films, the films also have good toughness. Moreover, prior to the feeding of hydrocarbon gases for the DLC deposition, the same metal arc source may deposits one or more interlayers of metal, metal nitride, or metal carbide on the substrate so as to further enhance the adhesion of the DLC films to be deposited.
    Type: Grant
    Filed: November 5, 1999
    Date of Patent: December 18, 2001
    Inventor: Da-Yung Wang
  • Publication number: 20010006724
    Abstract: For coating a cutting tool with an aluminum oxide layer, a bonding layer has been provided that is preferably formed by aluminum titanate and has a flake-like crystal structure. This bonding layer improves the adherence of an aluminum oxide layer, in particular to underlying titanium nitride, titanium carbide, or titanium carbonitride layers.
    Type: Application
    Filed: December 22, 2000
    Publication date: July 5, 2001
    Inventor: Helga Holzschuh
  • Patent number: 6197436
    Abstract: A method for diffusion coating workpieces of ferrous base metals such as carbon steel and cast iron includes the step of weighing and mixing the following components, in powdered form: Chromium 40-50 wt % Ferrochromium 25-37 wt % Tantalum Carbide 0.40-0.65 wt % Vanadium 0.35-0.70 wt % Ammonium Halide 4-5 wt % Aluminum Oxide Remainder The workpieces are preferably degreased and then placed in a container with the mixed components. The container is sealed and heated to a temperature of 1000°-1050° C. The workpieces and the composition are kept at that temperature for a predetermined period, on the order of forty-five minutes or longer, to permit a surface layer of desired thickness to form. The container is then cooled in a conventional cooling chamber and the workpieces are removed. The method produces coatings having good wear and corrosion resistance.
    Type: Grant
    Filed: April 14, 1999
    Date of Patent: March 6, 2001
    Assignee: Jamar Venture Corporation
    Inventors: Inna I. Zayets, Lidia O. Chunayeva, Grigory A. Tkach