Abstract: For the purpose of solving problems inherent to a plasma spray coating of white base Al2O3—Y2O3 composite oxide, i.e. drawbacks that the corrosion resistance, heat resistance and abrasion resistance are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, a spray coating member having an excellent heat emission property and the like is proposed wherein a surface of a substrate is covered with a spray coating of a colored composite oxide made of a low luminosity, achromatic or chromatic Al2O3—Y2O3.

Abstract: A plasma spray process for structuring self-cleaning glass surfaces and self-cleaning glass surfaces formed according to the process. Molten or heat softened particles of inorganic material are plasma spray deposited onto the surface of a substrate to create a micro-rough surface. If desired, a hydrophobic top coating layer can optionally be applied to the micro-rough surface. The micro-structured surface formed according to the invention is durable and self-cleaning.

Abstract: The fuel cell uses a solid oxide as an electrolyte and includes a cell main body. The cell main body, which includes an anode layer, an electrolyte layer and a cathode layer, is formed on a mesh conductor according to a plasma spraying method. Atmospheres respectively in contact with the anode and cathode layers are operated according a method in which they are isolated from each other. The method for manufacturing the solid type fuel cell is characterized in that an anode composition, an electrolyte composition and a cathode composition are plasma sprayed onto the mesh conductor sequentially in this order.

Abstract: A member is obtained by forming a Y2O3 black spray coating on a surface of a substrate or covering the surface of the substrate with a Y2O3 black spray coating through an undercoat or a middle layer. This coating has good heat characteristics and is good in the resistance to damaging through a high hardness. The Y2O3 black spray coating is produced by subjecting white Y2O3 powdery material to a plasma spraying in an inert gas atmosphere containing substantially no oxygen or by forming a Y2O3 white spray coating and then irradiating an electron beam or a laser beam to this coating to melt at least a part of the white coating under heating to thereby smoothen denseness and blacken the surface of the coating.

Abstract: An optical composite material comprises an amorphous optical material (6) with a first refractive index (na), into which crystalline nanoparticles (7) having a second, higher refractive index (nn) are embedded, wherein the amorphous material (6) and the nanoparticles (7) are resistant to UV radiation. A microlithography projection exposure apparatus comprises a projection objective (2) with at least one optical element (3) which is, in particular, operated in transmission and consists of an optical composite material of this type. In a method for producing the optical composite material, crystalline nanoparticles are introduced into the amorphous optical material during flame deposition in a soot or direct process.

Abstract: Coated body of carbon fiber reinforced plastic (CFP) for paper machines and printing machines, particularly roller, comprising an adhesion promoter layer and a wear protective layer of hard metal or oxide ceramics which is applied onto the adhesion promoter layer, characterized in that the adhesion promoter layer consists of ductile metal selected from the group consisting of copper, nickel, iron, lead and tin and is applied by plasma spraying or flame spraying.

Abstract: Disclosed herein are methods for coating metal substrates, systems therefore, and articles made therefrom. In one embodiment, the method of coating a metal substrate comprises: disposing a metallic bond coating on the metal substrate, creating ions with a reverse polarity high frequency apparatus at a frequency of greater than or equal to about 2.5 kHz, roughening the surface with the ions to a subsequent average surface roughness of greater than or equal to about 5 ?m, and disposing a ceramic coating on the metallic bond coating surface. The metallic bond coating had a surface with an initial average surface roughness of less than or equal to about 1 ?m.

Abstract: A method of producing a photocatalyst according to the invention comprises forming an amorphous titanium oxide and heat-treating it in an atmosphere containing oxygen, whereby a photocatalyst having a good photocatalysis can be obtained. In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate. This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.

Abstract: A thermal barrier coating comprises a bond coating 12 made of high temperature corrosion resistance superior to a substrate 11 and a thermal barrier coating 13 made of ZrO2 series ceramics formed on the bond coating. The thermal barrier coating has cracks extending in the direction of the thickness of the barrier coat. Substantially all of the tips of the cracks have a distance between the tips and the boundary at the substrate side.

Abstract: The invention relates to a method of depositing a coating on a part having its surface made of silicon carbide. The method comprises the following steps: a) applying laser treatment to the SiC surface by superposing laser impacts for the purpose of increasing the roughness of said surface; and b) depositing a coating on the SiC surface by atmospheric thermal spraying. The invention also provides a device for measuring deformation, which device comprises a first alumina coating obtained by atmospheric thermal spraying onto the silicon carbide layer covering the substrate of the part after it has been treated by superposing laser impacts, a free filament strain gauge placed on the coating, and an additional alumina coating obtained by atmospheric thermal spraying onto the strain gauge.

Abstract: A ceramic thermal barrier coating (8) for coating the surface (7) of a component (1) of a nickel-based superalloy, and an adhesive coating optionally applied thereon (6), preferably a gas turbine component, includes zirconium oxide (ZrO2) stabilized by yttrium oxide (Y2O3) and production-related impurities, as well as at least one high-temperature and oxidation resistant intermetallic compound, for example NiAl, YRh, ErIr, the volume fraction of which decreases continuously or in stages as the distance from the surface (7) of the component (1)/the adhesive coating (6) increases. Advantageously, a less steep stress gradient is produced by gradually varying the composition of the thermal barrier coating (8).

Abstract: There is provided a method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention relate to a method of making a coated article including a step of heat treating a glass substrate coated with at least a layer of or including diamond-like carbon (DLC) and an overlying protective film (e.g., of or including zinc oxide) thereon. In certain example embodiments, the protective film may be ion beam treated with at least carbon ions. It has been found that the ion beam treatment improves the shelf-life of the product prior to HT. Following and/or during heat treatment (e.g., thermal tempering, or the like), the protective film may be removed.

Abstract: A coating material for a thermal barrier coating having excellent corrosion resistance and heat resistance comprises a substrate, an undercoat made of an aluminum-containing heat-resistant alloy, Cr2O3 layer as a middle layer on the undercoat, and a top coat made of ZrO2 based ceramic on the middle coat.

Abstract: By engineering thermal spray parameters, such as temperature and velocity, and engineering feedstock powder size and morphology, ceramic coatings may be produced having desired mechanical and thermal properties. The ceramic thermal spray coating may have a microstructure having about 10-80% by cross-sectional area of a particulate phase based on surface area of the coating, and the particulate phase is uniformly distributed throughout the coating. The particulate phase is an unmelted portion of the thermal sprayed feedstock, which is highly porous and may be produced by agglomerating nanoparticles of the ceramic. Such coatings can be applied as TBCs or as abradable coatings.

Abstract: This invention relates to thermal spray processes comprising thermally depositing a high purity yttria or ytterbia stabilized zirconia powder, said powder comprising from about 0 to about 0.15 weight percent impurity oxides, from about 0 to about 2 weight percent hafnium oxide (hafnia), from about 6 to about 25 weight percent yttrium oxide (yttria) or from about 10 to about 36 weight percent ytterbium oxide (ytterbia), and the balance zirconium oxide (zirconia), onto a substrate to produce a coating having vertical segmentation cracks, essentially through the full thickness of the coating, and having from about 5 to about 200 cracks per linear inch measured in a line parallel to the plane of the coating, and having a thickness of from about 5 to about 200 mils; and having a final surface layer comprising a dipped or solution-sprayed ceramic frit coating having a thickness up to about 5 mils; and treating said surface layer with a high temperature air heat treatment to bond and adhere the surface layer.

Abstract: Methods are provided for forming a coating system on a gas turbine component. In one embodiment, and by way of example only, the method includes cold spraying a material onto the component surface to form an overlay coating, the material comprising MCrAlY, wherein M comprises a constituent selected from the group consisting of Ni, Co, or Fe, or combinations of Ni, Co, and Fe. Then, the overlay coating is heat treated. The overlay coating is then shot peened and vibro polished. A thermal barrier coating is then applied onto the overlay coating to form the coating system via air plasma spaying or electron beam physical vapor deposition technique.

Abstract: It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

Abstract: The oxidation behavior of the bond coat is improved using a HVOF nanostructured NiCrAlY coating. NiCrAlY powder is mechanically cryomilled and HVOF sprayed onto Ni-based alloy to form a nanocrystalline bond coat. Oxidation is performed on the coating to form the thermally grown oxide layer (thermally grown oxide). After heat treatment at 1000° C. for 24 and 95 hour, a homogeneous ?-Al2O3 layer is formed on top of the bond coat. The nanostructured characteristic of the coating and the presence of Al2O3 within the cryomilled powders (oxidation occurred during cryomilling process) affects the nucleation of the alumina layer on the top of the coating. The formation of a continuous thermally grown oxide layer protects the coating from further oxidation and avoids the formation of mixed oxide protrusions, such as those presented in the coating sprayed using the as-received powder.

Abstract: Methods of making a metallic or cerment coating include suspending solid fine metal or cerment particles in a liquid to form a liquid feedstock and injecting the liquid feedstock into an high-velocity oxygen fuel flame gun to thermally spray the liquid feedstock on a substrate to form a coating thereon.

Abstract: The invention relates to a piston ring coated with a coating material by a thermal spray process, exposed to heat treatment of the coating material at an elevated temperature and for a time effective to at least partially diffuse the coating material into the piston ring surface or underlying layer of coating material, and an additionally applied coating material layer subject to successive heat treatments of each coating material layer in order to lay down on the piston ring surface a plurality of layers of the same coating material.

Abstract: This invention relates to processes for coating blades for a gas turbine engine, said blades having an inner end adapted for mounting on a hub and a blade tip located opposite the inner end, and wherein at least a portion of the blade tip is coated with a thermally sprayed coating of a high purity yttria or ytterbia stabilized zirconia powder, said thermally sprayed coating having a density greater than 88% of the theoretical density with a plurality of vertical macrocracks substantially homogeneously dispersed throughout the coating in which a cross-sectional area of the coating normal to the blade tip exposes a plurality of vertical macrocracks extending at least half the coating thickness in length up to the full thickness of the coating and having from about 5 to about 200 vertical macrocracks per linear inch measured in a line parallel to the surface of the blade tip and in a plane perpendicular to the surface of the blade tip, and said high purity yttria or ytterbia stabilized zirconia powder comprising

Abstract: A metal is used as a predominant component of an outermost metallic portion of a ceramic-containing and metal-containing vibration damping coating for a metallic article, for the purpose of enhancing resistance of the coating to foreign object damage and/or erosion while substantially maintaining or enhancing vibration damping performance of the coating. The outermost metallic portion is preferably substantially free of non-metallic intrusions and cavities.

Abstract: A method for manufacturing a ceramic glow pin which is formed of more than two layers arranged especially coaxially to the axis of the glow pin and symmetrically. The layers of the layer structure are manufactured by co-extrusion.

Abstract: The invention proposes a process for obtaining a flexible/adaptive thermal barrier, the thermal barrier comprising a ceramic layer deposited on a substrate covered with a sublayer, the ceramic layer being deposited by thermal spraying using a torch. The ceramic layer is deposited in a single pass and the torch is set to give the ceramic layer a thickness of at least 80 ?m.

Abstract: A thermal spray mixed with a substrate using a non-consumable cylindrical rotating tool. The process may be repeated to create a composite-like coating or material. The coating or material may be machine to improve surface quality.

Abstract: A method applying a thermal barrier coating to a metal substrate, or for repairing a thermal barrier coating previously applied by physical vapor deposition to an underlying aluminide diffusion coating that overlays the metal substrate. The aluminide diffusion coating is treated to make it more receptive to adherence of a plasma spray-applied overlay alloy bond coat layer. An overlay alloy bond coat material is then plasma sprayed on the treated aluminide diffusion coating to form an overlay alloy bond coat layer. A ceramic thermal barrier coating material is plasma sprayed on the overlay alloy bond coat layer to form the thermal barrier coating. In the repair embodiment of this method, the physical vapor deposition-applied thermal barrier coating is initially removed from the underlying aluminide diffusion coating.

Abstract: According to an embodiment of the invention, a method for repairing a coated high pressure turbine blade, which has been exposed to engine operation, to restore coated airfoil contour dimensions of the blade, is disclosed. The method comprises providing an engine run high pressure turbine blade including a base metal substrate made of a nickel-based alloy and having thereon a thermal barrier coating system. The thermal barrier coating system comprises a diffusion bond coat on the base metal substrate and a top ceramic thermal barrier coating comprising a yttria stabilized zirconia material. The top ceramic thermal barrier coating has a nominal thickness t. The method further comprises removing the thermal barrier coating system, wherein a portion of the base metal substrate also is removed, and determining the thickness of the base metal substrate removed. The portion of the base metal substrate removed has a thickness, ?t.

Abstract: This invention provides a unique gas shield or shroud surrounding the effluent of a thermal spray device that effectively can extend the working distance or standoff between the thermal spray device and the surface being coated. This invention provides a method of spraying materials, including ceramic materials and reactive materials, at a long standoff and a method of controlling the temperature of the effluent being deposited using heated gas shield.

Abstract: A thermal barrier coating for an underlying metal substrate of articles that operate at, or are exposed to, high temperatures, as well as being exposed to environmental contaminant compositions. This coating comprises an optional inner layer nearest to the underlying metal substrate comprising a non-alumina ceramic thermal barrier coating material in an amount up to 100%, and an outer layer having an exposed surface and comprising at least about 50% of a non-alumina ceramic thermal barrier coating material and alumina in an amount up to about 50% and sufficient to protect the thermal barrier coating at least partially against environmental contaminants that become deposited on the exposed surface. This coating can be used to provide a thermally protected article having a metal substrate and optionally a bond coat layer adjacent to and overlaying the metal substrate.

Abstract: A process of selectively removing layers of a thermal barrier coating system from a surface of a component. A thermal barrier coating system of interest comprises an inner metallic bond coat layer, an outer metallic bond coat layer that is less dense than the inner metallic bond coat layer, and a ceramic topcoat having vertical cracks therethrough. The process involves directing a jet of liquid at the component to simultaneously remove the topcoat and the outer metallic bond coat layer without removing the inner metallic bond coat layer.

Abstract: The process for coating a substrate with a coating giving a polished effect and improved corrosion resistance and coatings produced from this process. The process includes the steps of applying an atomized metal layer onto the substrate and applying a corrosion inhibiting layer to the atomized metal layer.

Abstract: Method of producing a profiled abradable coating on a substrate in which an abradable ceramic coating composition is applied to a substrate using direct-write technology, or plasma sprayed onto the substrate through a mask or by use of a narrow foot-print plasma gun. These methods of producing abradable coatings are performed in the absence of a grid.

Abstract: A method for applying a highly porous alumina material that is useful in the hot section of a jet aircraft engine. In order to apply the porous alumina, an aluminum-based metal/alumina material known in the art is first placed onto an aircraft engine component substrate. The aluminum-based metal is then dissolved using a solution that will not affect the alumina or the underlying substrate. The alumina is then washed with deionized water and dried. The aircraft engine component may be first masked by applying a non-porous metal oxide material to the component or by oxidizing the surface of the component. The resulting alumina has a porosity in the range of about 20% to about 45%. The alumina has globular interconnected surface features in the range of about 0.5 ?m to about 20 ?m.

Abstract: It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

Abstract: The present invention comprises an aluminum base material 2 constituting the plasma processing chamber of the plasma processing apparatus, a bonding layer 3 deposited on the base material consisting of a transition metal or transition metal alloy that modifies the difference in thermal expansion coefficient of the base material and the material constituting a plasma contact surface, and the plasma contact surface 1 formed of a material selected from a group consisting of La2O3, LaAlO3, MgLaAl11O19, and a mixture of La2O3 and Al2O3 being a metal oxide including at least La and O deposited on the bonding layer 3 via a thermal spray process.

Abstract: A method for manufacturing an article for use in a high-temperature environment, and an article for use in such an environment, are presented. The method comprises providing a substrate; selecting a desired vertical crack density for a protective coating to be deposited on the substrate; providing a powder, wherein the powder has a size range selected to provide a coating having the desired vertical crack density; and applying a thermal-sprayed coating to the substrate, the coating having the desired vertical crack density, wherein the powder is used as a raw material for the coating.

Abstract: A corrosion resistant component of semiconductor processing equipment such as a plasma chamber comprises a cerium oxide containing ceramic material as an outermost surface of the component. The cerium oxide containing ceramic material comprises one or more cerium oxides as the single largest constituent thereof. The component can be made entirely of the cerium oxide containing ceramic material or, alternatively, the cerium oxide containing ceramic can be provided as a layer on a substrate such as aluminum or an aluminum alloy, a ceramic material, stainless steel, or a refractory metal. The cerium oxide containing ceramic layer can be provided as a coating by a technique such as plasma spraying. One or more intermediate layers may be provided between the component and the cerium oxide containing ceramic coating.

Abstract: A method of placing a ceramic coating on an article of manufacture comprising a substrate formed of a nickel or cobalt-based superalloy, which includes the steps of placing a bonding layer on the substrate and placing an anchoring layer, which is chemically different from the bonding layer and comprises a nitride compound, on the bonding layer. The method further includes the step of placing the ceramic coating on the anchoring layer.

Abstract: A method for forming a carbon deposit inhibiting thermal barrier coating for an internal element or component of a gas turbine engine. Such coating includes a layer of thermal barrier material coated onto the surface of an engine component that will be exposed to the flow of burning engine gases. Such coating further includes a layer of carbon deposit inhibiting material coated on top of the layer of thermal barrier material.

Abstract: A fiber-reinforced plastic base body is first of all provided with a coating of hard rubber or thermoplastic having a dispersed metal or ceramic content of 5% by volume to 80% by volume, and the coating is ground down to provide a smooth surface In a further step a layer of metal and/or ceramic, which has a printing function, is applied to the smooth surface, preferably by thermal spraying.

Abstract: A production method and a production apparatus for a magnetic recording medium, which enable the efficient production of a discrete type magnetic recording medium, while reliably preventing any deterioration of the partitioned recording elements.

Abstract: A process of depositing a coating system suitable for use as an environmental barrier coating on various substrate materials, particularly those containing silicon and intended for high temperature applications such as the hostile thermal environment of a gas turbine engine. The process comprises depositing a first coating layer containing mullite, and preferably a second coating layer of an alkaline earth aluminosilicate, such as barium-strontium-aluminosilicate (BSAS), by thermal spraying while maintaining the substrate at a temperature of 800° C. or less, preferably 500° C. or less, by which a substantially crack-free coating system is produced with desirable mechanical integrity.

Abstract: The present invention relates to the design and manufacture of single cell units for planar, thin-film, ceramic electrochemical devices such as solid oxide fuel cells, electrochemical oxygen generators, gas separation membranes, and membrane modules and stacks and the fabrication of multi-cell stacks and modules of the single cell units. The design is based upon a single cell wherein manufacturing all layers of the device into an integral unit produces a monolithic structure. The design produces a gas-tight single cell that is easily assembled into multi-cell stacks and modules without external seals or sealing mechanisms. The design may use standard ceramic and metallurgical production techniques. The design of the present invention enhances device performance since the single cell units are inherently sealed for gas tightness and have reduced interfacial electrical resistances.

Abstract: The oxidation behavior of the bond coat is improved using a HVOF nanostructured NiCrAlY coating. NiCrAlY powder is mechanically cryomilled and HVOF sprayed onto Ni-based alloy to form a nanocrystalline bond coat. Oxidation is performed on the coating to form the thermally grown oxide layer (thermally grown oxide). After heat treatment at 1000° C. for 24 and 95 hour, a homogeneous &agr;-Al2O3 layer is formed on top of the bond coat. The nanostructured characteristic of the coating and the presence of Al2O3 within the cryomilled powders (oxidation occurred during cryomilling process) affects the nucleation of the alumina layer on the top of the coating. The formation of a continuous thermally grown oxide layer protects the coating from further oxidation and avoids the formation of mixed oxide protrusions, such as those presented in the coating sprayed using the as-received powder.

Abstract: A device (10) is made, having a ceramic thermal barrier coating layer (16) characterized by a microstructure having gaps (18) with a sintering inhibiting material (22) disposed on the columns (20) within the gaps (18). The sintering resistant material (22) is stable over the range of operating temperatures of the device (10), is not soluble with the underlying ceramic layer (16) and is applied by a process that is not an electron beam physical vapor deposition process.

Abstract: A process for depositing a ceramic coating system for Si-containing materials, particularly those for articles exposed to high temperatures. The process is particularly applicable to depositing a compositionally-graded coating system comprising multiple ceramic layers with differing compositions, including a dense, strain-tolerant, vertically-cracked YSZ-containing ceramic layer deposited on a ceramic layer having a composition that is a mixture of YSZ and either mullite or BSAS. The process entails depositing the YSZ-containing ceramic layer using a plasma spraying technique while maintaining the substrate at a temperature so as not to form horizontal cracks in the coating system, but still maintain the dense vertically-cracked structure of the YSZ-containing ceramic layer for strain tolerance.

Abstract: A method for improving the electrical conductivity of a substrate of metal, metal alloy or metal oxide comprising depositing a small or minor amount of metal or metals from Group VIIIA metals (Fe, Ru, Os, Co, Rh, Ir, Ni, Pd, Pt) or from Group IA metals (Cu, Ag, Au) on a substrate of metal, metal alloys and/or metal oxide from Group IVA metals (Ti, Zr, Hf), Group VA metals (V, Nb, Ta), Group VIA metals (Cr, Mo, W) and Al, Mn, Ni and Cu and then directing a high energy beam onto the substrate to cause an intermixing of the deposited material with the native oxide of the substrate metal or metal alloy. The native oxide layer is changed from electrically insulating to electrically conductive. The step of depositing can be carried out, for example, by ion beam assisted deposition, electron beam deposition, chemical vapor deposition, physical vapor deposition, plasma assisted, low pressure plasma and plasma spray deposition and the like.

Abstract: A method for forming a thermal barrier coating system on an article subjected to a hostile thermal environment, such as the hot gas path components of a gas turbine engine. The coating system is generally comprised of a ceramic layer and an environmentally resistant beta phase nickel aluminum intermetallic (&bgr;-NiAl) bond coat that adheres the ceramic layer to the component surface. A thin aluminum oxide scale forms on the surface of the &bgr;-NiAl during heat treatment. The &bgr;-NiAl may contain alloying elements in addition to nickel and aluminum in order to increase the environmental resistance of the &bgr;-NiAl. The &bgr;-NiAl powder having a size in the range of 20-50 microns is applied using air plasma spray techniques to produce a surface having a roughness of 400 microinches or rougher. The ceramic top coat can be applied using inexpensive thermal spray techniques to greater thicknesses than achievable otherwise because of the rough surface finish of the underlying &bgr;-NiAl bond coat.

Abstract: A method for improving the electrical conductivity of a substrate of metal, metal alloy or metal oxide comprising depositing a small or minor amount of metal or metals from Group VIIIA metals (Fe, Ru, Os, Co, Rh, Ir, Ni, Pd, Pt) or from Group IA metals (Cu, Ag, Au) on a substrate of metal, metal alloys and/or metal oxide from Group IVA metals (Ti, Zr, Hf), Group VA metals (V, Nb, Ta), Group VIA metals (Cr, Mo, W) and Al, Mn, Ni and Cu and then directing a high energy beam onto the substrate to cause an intermixing of the deposited material with the native oxide of the substrate metal or metal alloy. The native oxide layer is changed from electrically insulating to electrically conductive. The step of depositing can be carried out, for example, by ion beam assisted deposition, electron beam deposition, chemical vapor deposition, physical vapor deposition, plasma assisted, low pressure plasma and plasma spray deposition and the like.

Abstract: A base member is blasted to roughen the surface. Next, a thermal spray member containing for example Al is formed on the blast treated surface of the base member by a thermal spraying. Next, an extremely thin oxide film at an atom layer level is coated on the surface of the thermal spray member, as an uppermost surface. The oxide film is a layer that is formed from stacked layers of about 15 to 23 atoms, and is formed by an O2 or O3 gas plasma, an atmospheric pressure plasma, or a CVD (chemical vapor deposition) method. A nitride film can be coated instead of the oxide film.