Silicon Or Metal Oxide Coating (e.g., Glass, Etc.) Patents (Class 427/567)
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Patent number: 9028923Abstract: The present invention relates to a ceramic coating and ion beam mixing apparatus for improving corrosion resistance, and a method of reforming an interface between a coating material and a base material. In samples fabricated using the coating and ion beam mixing apparatus, adhesiveness is improved, and the base material is reinforced, thereby improving resistance to thermal stress at high temperatures and high-temperature corrosion resistance of a material to be used in a sulfuric acid decomposition apparatus for producing hydrogen.Type: GrantFiled: February 3, 2012Date of Patent: May 12, 2015Assignee: Korea Atomic Energy Research InstituteInventors: Jaewon Park, Chang-Kue Park, Jonghwa Chang, Byungho Choi, Yongwan Kim
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Patent number: 8795767Abstract: Luminescent materials and the use of such materials in anti-counterfeiting, inventory, photovoltaic, and other applications are described herein. In one embodiment, a method of forming a luminescent material includes: (1) providing a source of A and X, wherein A is selected from at least one of elements of Group 1, and X is selected from at least one of elements of Group 17; (2) providing a source of B, wherein B is selected from at least one of elements of Group 14; (3) subjecting the source of A and X and the source of B to vacuum deposition to form a set of films adjacent to a substrate; and (4) heating the set of films to a temperature in the range of 120° C. to 350° C. to form a luminescent material adjacent to the substrate, wherein the luminescent material includes A, B, and X.Type: GrantFiled: November 2, 2009Date of Patent: August 5, 2014Assignee: OMNIPV, Inc.Inventors: William M. Pfenninger, Nemanja Vockic, John Kenney
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Patent number: 8652589Abstract: The method for manufacturing a hydrogen permeation barrier comprises the steps of a) depositing on a substrate (SUB) a layer system (LS) comprising at least one layer (L1,L2,L3); characterized in that step a) comprises the step of b) depositing at least one hydrogen barrier layer (HPBL) comprising an at least ternary oxide. The apparatus comprises a sealable volume and a wall forming at least a portion of a boundary limiting said volume, wherein said wall comprises a hydrogen permeation barrier comprising a layer system (LS) comprising at least one layer, wherein said layer system comprises at least one hydrogen barrier layer (HPBL) comprising an at least ternary oxide. Preferably, said at least ternary oxide is substantially composed of Al, Cr and O, and said depositing said at least one hydrogen barrier layer (HPBL) is carried out using a physical vapor deposition method, in particular a cathodic arc evaporation method.Type: GrantFiled: January 23, 2009Date of Patent: February 18, 2014Assignee: Oerlikon Trading AG, TruebbachInventor: Jurgen Ramm
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Patent number: 8440037Abstract: A coated article is provided that may be heat treated in certain example embodiments. A coating of the coated article includes a zinc oxide inclusive layer located over and contacting a contact layer that is in contact with an infrared (IR) reflecting layer of a material such as silver. It has been found that the use of such a zinc oxide inclusive layer results in improved thermal stability upon heat treatment, increased visible transmission, and/or lower sheet resistance (Rs).Type: GrantFiled: October 24, 2006Date of Patent: May 14, 2013Assignees: Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V.C.), Guardian Industries Corp.Inventors: Anton Dietrich, Philip J. Lingle, Jens-Peter Muller, Jean-Marc Lemmer
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Patent number: 8360001Abstract: Chemical vapor deposition processes utilize chemical precursors that allow for the deposition of thin films to be conducted at or near the mass transport limited regime. The processes have high deposition rates yet produce more uniform films, both compositionally and in thickness, than films prepared using conventional chemical precursors. In preferred embodiments, a higher order silane is employed to deposit thin films containing silicon that are useful in the semiconductor industry in various applications such as transistor gate electrodes.Type: GrantFiled: July 16, 2009Date of Patent: January 29, 2013Assignee: ASM America, Inc.Inventors: Michael A. Todd, Mark Hawkins
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Patent number: 8343591Abstract: A method for use with a coating process includes depositing a ceramic coating on a substrate within a coating chamber. Prior to depositing the ceramic coating, an electron beam source is used to heat a ceramic material. The ceramic material radiates heat to heat a substrate to an oxidation temperature to form an oxide layer on the substrate. A desired evaporation rate of the ceramic material is established during the heating to thereby provide an improved ceramic coating.Type: GrantFiled: October 24, 2008Date of Patent: January 1, 2013Assignee: United Technologies CorporationInventors: James W Neal, Michael J. Maloney, David A. Litton, Christopher Masucci
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Publication number: 20120100306Abstract: Particles coming from an evaporation source 9 are deposited on a substrate 21 at a specified film forming position 33 in a vacuum so as to form a thin film on the substrate 21. A rod-shaped material 32 containing a source material of the thin film is melted above the evaporation source 9 and the melted material is supplied to the evaporation source 9 in the form of droplets 14.Type: ApplicationFiled: July 1, 2010Publication date: April 26, 2012Applicant: Panasonic CorporationInventors: Yuma Kamiyama, Kazuyoshi Honda, Yasuharu Shinokawa
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Patent number: 8012562Abstract: The present technology generally relates to a wear-resistant coating, especially for gas turbine components, comprising a horizontally segmented or multilayered structure, i.e. at least one relatively hard, ceramic layer and at least one relatively soft, metallic layer. The ceramic layer and the metallic layer are alternately arranged on top of each other in such a way that an external layer forming an external surface of the wear-resistant coating is embodied as a ceramic layer. According to the invention, at least the external, ceramic layer is segmented in a column-type manner in a vertical direction.Type: GrantFiled: June 27, 2008Date of Patent: September 6, 2011Assignee: MTU Aero Engines GmbHInventors: Wolfgang Eichmann, Falko Heutling, Thomas Uihlein
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Publication number: 20110111135Abstract: Particles coming from an evaporation source 9 are deposited on a substrate 21 at a predetermined film forming position 33 in a vacuum so as to form a thin film on the substrate 21. A bulk material 32 containing a source material of the thin film is melted above the evaporation source 9, and the melted material is supplied to the evaporation source 9 in the form of droplets 14. A silicon material 32 including a plurality of pores therein is used as the bulk material 32. Preferably, the pores have a lower average internal pressure than an atmospheric pressure. More preferably, the average internal pressure is 0.1 atm or less.Type: ApplicationFiled: July 7, 2009Publication date: May 12, 2011Inventors: Yuma Kamiyama, Kazuyoshi Honda, Yasuharu Shinokawa
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Patent number: 7838083Abstract: Methods and apparatus for depositing thermal barrier coatings on gas turbine blades and vanes using Electron Beam Physical Vapor Deposition (EBPVD) combined with Ion Beam Assisted Deposition (IBAD).Type: GrantFiled: January 28, 2006Date of Patent: November 23, 2010Assignee: Sandia CorporationInventors: Dennis L. Youchison, Jimmie M. McDonald, Thomas J. Lutz, Michail A. Gallis
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Publication number: 20100247803Abstract: A chemical vapor deposition (CVD) method for depositing a thin film on a surface of a substrate is described. The CVD method comprises disposing a substrate on a substrate holder in a process chamber, and introducing a process gas to the process chamber, wherein the process gas comprises a chemical precursor. The process gas is exposed to a non-ionizing heat source separate from the substrate holder to cause decomposition of the chemical precursor. A thin film is deposited upon the substrate.Type: ApplicationFiled: March 23, 2010Publication date: September 30, 2010Applicants: TOKYO ELECTRON LIMITED, AIR PRODUCTS AND CHEMICALS, INC.Inventors: Eric M. LEE, Raymond Nicholas VRTIS, Mark Leonard O'NEILL, Patrick Timothy HURLEY, Jacques FAGUET, Takashi MATSUMOTO, Osayuki AKIYAMA
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Patent number: 7784306Abstract: An apparatus for and method of depositing material on a substrate, the method comprising the steps of: delivering from a first outlet a stream of droplets of a precursor liquid towards a substrate; applying an electric field between the first outlet and the substrate; and delivering from a second outlet a flow of fuel about the stream of droplets such as to provide an annular flame combustion region between the first outlet and the substrate through which at least a portion of the stream of droplets passes before reaching the substrate, whereby the precursor liquid is one or both of chemically reacted and decomposed to provide the deposited material.Type: GrantFiled: December 7, 1998Date of Patent: August 31, 2010Assignee: Innovative Materials Processing Technologies LimitedInventors: Kwang-Leong Choy, Issac Tsz Hong Chang
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Patent number: 7575979Abstract: A method includes forming a fluid including an inorganic semiconductor material, depositing a layer of said fluid on a substrate to form a film, and curing said film to form a porous semiconductor film.Type: GrantFiled: June 22, 2004Date of Patent: August 18, 2009Assignee: Hewlett-Packard Development Company, L.P.Inventors: David Punsalan, Peter Mardilovich, Randy Hoffman
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Patent number: 7575784Abstract: Light reactive deposition uses an intense light beam to form particles that are directly coated onto a substrate surface. In preferred embodiments, a coating apparatus comprising a noncircular reactant inlet, optical elements forming a light path, a first substrate, and a motor connected to the apparatus. The reactant inlet defines a reactant stream path. The light path intersects the reactant stream path at a reaction zone with a product stream path continuing from the reaction zone. The substrate intersects the product stream path. Also, operation of the motor moves the first substrate relative to the product stream. Various broad methods are described for using light driven chemical reactions to produce efficiently highly uniform coatings.Type: GrantFiled: November 17, 2000Date of Patent: August 18, 2009Assignee: NanoGram CorporationInventors: Xiangxin Bi, Ronald J. Mosso, Shivkumar Chiruvolu, Sujeet Kumar, James T. Gardner, Seung M. Lim, William E. McGovern
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Publication number: 20080085375Abstract: An MgO protective layer formed on a front substrate of a plasma display panel and a method of manufacturing the protective layer are disclosed. The protective layer is manufactured by using an MgO pellet, which is simultaneously doped with a first doping material of BeO and/or CaO among alkali earth metals and a second material selected from the group consisting of Sc2O3, Sb2O3, Er2O3, Mo2O3, and Al2O3, as a deposition source through a vacuum deposition method. The protective layer remarkably improves a discharge efficiency of the PDP and shortens a discharge delay time, so that it is applied to a signal can PDP. Also, it lowers a manufacturing cost by reducing the number of electronic components.Type: ApplicationFiled: February 16, 2007Publication date: April 10, 2008Inventors: Jeong Seok Kim, Seok Jung, You Han Kim, Jin Ho Pyo, Yong Seog Kim, Kyung Hyun Park
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Patent number: 7285312Abstract: A method and superalloy component for depositing a layer of material onto gas turbine engine components by atomic layer deposition. A superalloy component may have a ceramic thermal barrier coating on at least a portion of its surface, comprising a superalloy substrate and a bonding coat; and aluminum oxide (Al2O3) layer may be deposited on top of an yttria-stabilized zirconia layer and form a bonding coat by atomic layer deposition. The yttria-stabilized zirconia layer may have a plurality of micron sized gaps extending from the top surface of the ceramic coating towards the substrate and defining a plurality of columns of the yttria-stabilized zirconia layer. Also, atomic layer deposition may be used to lay an aluminum oxide (Al2O3) layer over a tantalum oxide (Ta2O5) layer on a silicon-based substrate.Type: GrantFiled: January 16, 2004Date of Patent: October 23, 2007Assignee: Honeywell International, Inc.Inventor: Chien-Wei Li
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Patent number: 7262897Abstract: A method of forming an inorganic alignment film on a base substrate is provided comprising forming a film made substantially of an inorganic material on the base substrate, and irradiating ion beams onto the surface of the film from a direction inclined at a predetermined angle ?b with respect to the direction vertical to the surface. By irradiating the ion beams onto the film, concave portions having a predetermined directivity are formed on the film. The predetermined angle ?b is preferably 2° or more.Type: GrantFiled: September 1, 2004Date of Patent: August 28, 2007Assignee: Seiko Epson CorporationInventors: Hidenobu Ota, Yukihiro Endo, Osamu Iwamoto
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Patent number: 7229675Abstract: The invention relates to metallurgy and mechanical engineering, in particular to the development of methods for providing metallic pieces with protective coatings with a view to improving the performance characteristics thereof. In accordance with the inventive method, a multilayer coating is formed by combining and simultaneously or consecutively using of various technologies including ion-plasma evaporation diffusive metallization and controlled atmosphere thermal treatment. The obtained coatings possess superior characteristics with respect to overall properties and are used for gas turbine construction, in particular, for manufacturing gas turbine vanes of aircraft engines.Type: GrantFiled: April 10, 2000Date of Patent: June 12, 2007Inventors: Anatoly Nikolaevich Paderov, Jury Genrikhovich Vexler
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Patent number: 7175888Abstract: The present invention is a turbine engine component comprising a superalloy substrate, a bond coat overlying the substrate having a thickness in the range of about 0.0005 inch to about 0.005 inch, a thin alumina scale overlying the bond coat, and a thermal barrier coating (TBC) overlying the thin alumina scale, the TBC having a thickness in the range of about 0.0025 inch to about 0.010 inch, and comprising at least mischmetal oxide.Type: GrantFiled: March 3, 2004Date of Patent: February 13, 2007Assignee: General Electric CompanyInventors: Mary B. Johnson, legal representative, Robert William Bruce, Lyman A. Johnson, deceased
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Patent number: 7170663Abstract: A method of forming an inorganic alignment film on a base substrate is provided comprising forming a film made substantially of an inorganic material on the base substrate, and irradiating ion beams onto the surface of the film from a direction inclined at a predetermined angle ?b with respect to the direction vertical to the surface. By irradiating the ion beams onto the film, concave portions having a predetermined directivity are formed on the film. The predetermined angle ?b is preferably 2° or more.Type: GrantFiled: September 1, 2004Date of Patent: January 30, 2007Assignee: Seiko Epson CorporationInventors: Hidenobu Ota, Yukihiro Endo, Osamu Iwamoto
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Patent number: 7112453Abstract: This invention provides methods of retentate chromatography for resolving analytes in a sample. The methods involve adsorbing the analytes to a substrate under a plurality of different selectivity conditions, and detecting the analytes retained on the substrate by desorption spectrometry. The methods are useful in biology and medicine, including clinical diagnostics and drug discovery.Type: GrantFiled: August 5, 2002Date of Patent: September 26, 2006Assignee: Ciphergen Biosystems, Inc.Inventors: T. William Hutchens, Tai-Tung Yip
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Patent number: 7087266Abstract: A thermal barrier coating, or TBC, and method for forming the TBC. The TBC is formed of a thermal-insulating material that contains yttria-stabilized zirconia (YSZ) alloyed with at least a third oxide. The TBC is formed to also contain elemental carbon, and may potentially contain carbides and/or a carbon-containing gas that forms from the thermal decomposition of carbon. The TBC is characterized by lower density and thermal conductivity, high temperature stability and improved mechanical properties. To exhibit the desired effect, the third oxide is more particularly one that increases the lattice strain energy of the TBC microstructure as a result of having an ion size that is sufficiently different than a zirconium ion.Type: GrantFiled: June 18, 2004Date of Patent: August 8, 2006Assignee: General Electric CompanyInventors: Ramgopal Darolia, Boris A. Movchan, Yuriy E. Rudoy, Leonella M. Nerodenko, Irene Spitsberg, David John Wortman
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Patent number: 6991826Abstract: This invention relates to antisoiling compositions for antireflective substrates. More particularly, this invention relates to methods for depositing antisoiling compositions onto antireflective substrates. In particular, this invention relates to a method of depositing an antisoiling composition on an antireflective substrate comprising vaporizing an antisoiling composition and depositing the antisoiling composition onto an antireflective substrate. In another aspect, this invention relates to method of preparing an antireflective film stack comprising depositing an antireflective layer onto the surface of a transparent substrate and vapor depositing an antisoiling layer onto the surface of the antireflective layer. In yet another aspect, this invention relates to a method of depositing an antisoiling composition on an antireflective coated ophthalmic lens comprising vaporizing an antisoiling composition and depositing the antisoiling composition onto an antireflective coated ophthalmic lens.Type: GrantFiled: April 20, 2004Date of Patent: January 31, 2006Assignee: 3M Innovative Properties CompanyInventors: Mark J. Pellerite, Rudolf J. Dams, Steven J. Martin
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Patent number: 6982797Abstract: The invention relates to an apparatus for devices for determining properties of thin layers applied on a substrate. This apparatus comprises two changing magazines wherein one magazine is provided for crystal resonators and the other magazine for test glasses. The changing magazine for crystal resonators has the form of a disk and is encompassed by the annular magazine for test glasses. Both can be rotated independently of one another. Each position of the magazines can be reproduced with the aid of sensors and evaluation devices. Consequently, it is possible to carry out multiple coatings.Type: GrantFiled: January 20, 2003Date of Patent: January 3, 2006Assignee: Leybold Optics GmbHInventor: Eckhard Wirth
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Patent number: 6846742Abstract: Embodiments of the present invention include a method of depositing an improved seasoning film. In one embodiment the method includes, prior to performing a substrate processing operation, forming a layer of silicon over an interior surface of the substrate processing chamber as opposed to a layer of silicon oxide. In certain embodiments, the layer of silicon comprises at least 70% atomic silicon, is deposited from a high density silane (SinH2n+2) process gas and/or is deposited from a plasma having a density of at least 1×1011 ions/cm3.Type: GrantFiled: June 16, 2003Date of Patent: January 25, 2005Assignee: Applied Materials, Inc.Inventor: Kent Rossman
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Publication number: 20040247796Abstract: Conducting polymers having improved optical properties, and a method of manufacturing the conducting polymers, are disclosed. The conducting polymers are prepared by a process wherein organic ions and neutral oligomers are deposited simultaneously on a substrate surface to provide a conducting polymer film.Type: ApplicationFiled: May 17, 2004Publication date: December 9, 2004Inventors: Luke Hanley, Sanja Tepavcevic, Yongsoo Choi
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Patent number: 6758915Abstract: The invention is a grain-oriented magnetic steel sheet having extremely low iron loss, suitable for use as an iron core material for transformers and power generators, and a method for producing the same. The method includes forming a coating layer on a surface of a steel sheet having a thickness of 0.27 mm or less by vapor deposition in a low oxidizing atmosphere with an oxygen partial pressure (Po2) of less than 0.1 atm and a total pressure of 0.1 atm or more. The steel sheet has extremely low iron loss with a thickness of 0.27 mm or less and includes a coating layer formed by vapor deposition on a matrix surface.Type: GrantFiled: December 5, 2002Date of Patent: July 6, 2004Assignee: JFE Steel CorporationInventors: Minoru Takashima, Mineo Muraki, Hiroi Yamaguchi, Mitsumasa Kurosawa, Michiro Komatsubara
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Patent number: 6673386Abstract: A method for forming a pattern on a surface of a panel substrate, includes electrically charging pattern-forming material particles, jetting out the electrically charged pattern-forming material particles through a nozzle by applying electrostatic force to the pattern-forming material particles to form a pattern, and fixing the pattern onto the panel substrate.Type: GrantFiled: June 28, 2001Date of Patent: January 6, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Daido Komyoji, Naoko Matsuda, Akira Fukano, Katsutoshi Ogawa, Akira Kumon, Hiroyuki Naka
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Patent number: 6620465Abstract: An improved method for applying a ceramic material, such as a thermal barrier coating to an article. A method for applying a ceramic material as a coating to a substrate article in which the thermal conductivity of the ceramic material is reduced or lowered is provided. The thermal conductivity of a coating applied by a physical vapor deposition (PVD) method is dependent upon its distance from the source(s) of material used for the coating. The thermal conductivity of the applied coating is altered by adjusting the position of the article undergoing the PVD process by increasing the distances of the article or workpiece from the ingot or source of ceramic material to provide a coating of lower thermal conductivity. In accordance with the present invention, the article to be coated is positioned at a distance required to achieve at least a 10% reduction in the thermal conductivity of the applied coating.Type: GrantFiled: April 23, 1999Date of Patent: September 16, 2003Assignee: General Electric CompanyInventors: Joseph D. Rigney, David J. Wortman
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Patent number: 6602553Abstract: An article that is particularly well suited for use as a gas turbine engine component has a metallic substrate and a ceramic thermal barrier layer including a mixed metal oxide system comprising a compound selected from the group consisting of (i) a lanthanum aluminate and (ii) a calcium zirconate, the calcium in which is partially replaced by at least one calcium-substitute element, such as strontium (Sr) or barium (Ba). In addition, the lanthanum in the lanthanum aluminate can be partially replaced by a lanthanum-substitute element from the lanthanide group, particularly gadolinium (Gd). A process for producing such an article comprises providing a pre-reacted mixed metal oxide system as described above and applying it to the substrate by plasma spraying or an evaporation coating process.Type: GrantFiled: July 1, 2002Date of Patent: August 5, 2003Assignees: Siemens Aktiengesellshaft, Rolls-Royce Deutschland GmbHInventors: Beate Heimberg, Wolfram Beele, Karl Kempter, Ulrich Bast, Thomas Haubold, Michael Hoffmann, Axel Endriss, Peter Greil, Chu-Wan Hong, Fritz Aldinger, Hans J. Seifert
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Patent number: 6598425Abstract: A method and apparatus for manufacturing optical components. A burner generates soot, and a surface area collector collects the soot. The burner is disposed such that the soot collected within the surface area collector is substantially not reheated by subsequently deposited soot. Magnetic forces direct the soot to desired location(s) within the surface area collector. The surface area collector operates at relatively low temperatures sufficient to retain rather volatile substances, such as fluorine, in the soot.Type: GrantFiled: November 20, 2000Date of Patent: July 29, 2003Assignee: Corning IncorporatedInventors: Daniel W. Hawtof, Joseph M. Whalen
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Patent number: 6578381Abstract: The oxides-enclosed fine glass particles are arranged such that two or more pieces of at least two kinds of enclosing particles, which comprise oxides, double oxides, or salts of oxyacids, or double oxides or double salts thereof, are enclosed in each of the fine glass particles. The fine particles can be easily manufactured by mixing a powder material of glass with a powder material of oxides which comprise oxides, double oxides, or salts of oxyacids, or double oxides or double salts thereof that are not made to glass; converting the thus obtained mixture of the materials into a mixture in a vapor-state by supplying the thermal plasma thereto; and quickly cooling the mixture in the vapor-state. Highly-scattered fine particles of oxides can be easily obtained from the fine particles, and thus a plurality of kinds of fine particles of oxides can be evenly and uniformly mixed in a small amount with a mother material without being unevenly scattered.Type: GrantFiled: December 20, 2001Date of Patent: June 17, 2003Assignees: Nisshin Seifun Group Inc., Nisshin Engineering Inc.Inventors: Keiichi Nishimura, Takashi Fujii, Kazuhiro Yubuta, Sadao Shinozaki
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Patent number: 6576294Abstract: Barrier film with a high colorless transparency comprising a flexible plastic substrate. A barrier layer is formed on the surface and has a thickness ranging from approximately 50 to less than 200 Angstroms and is formed of a material selected from the group of aluminum oxide, tin oxide and yttrium oxide. An additional barrier layer formed of silicon dioxide may also be formed on the barrier layer.Type: GrantFiled: May 14, 1993Date of Patent: June 10, 2003Assignee: Flex Products, Inc.Inventors: Roger W. Phillips, Lauren R. Wendt, Myra Tan-Johnson, David W. Todd, Charles Thomas Markantes
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Patent number: 6387539Abstract: A device (10) comprising a substrate (22) having a deposited ceramic thermal barrier coating characterized by a microstructure having gaps (28) where the thermal barrier coating comprises a first thermal barrier layer (40), and a second thermal barrier layer (30) with a pyrochlore crystal structure having a chemical formula of An+2−xBm+2+xO7−y, where A is selected from the group of elements consisting of La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and mixtures thereof, where B is selected from the group of elements consisting of Zr, Hf, Ti and mixtures thereof, where n and m are the valence of A and B respectively, and for −0.5≦x≦0.Type: GrantFiled: June 18, 2001Date of Patent: May 14, 2002Assignee: Siemens Westinghouse Power CorporationInventor: Ramesh Subramanian
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Patent number: 6365016Abstract: A method and apparatus for depositing a coating on a substrate. A method of coating a substrate comprises evaporating a first reactant; introducing the evaporated reactant into a plasma; and depositing the first reactant on a surface of the substrate. This method may be used to deposit an electrically conductive, ultraviolet filter coating at high rate on a glass or polycarbonate substrate, for example. An apparatus for depositing a UV filter coating on a polymeric substrate comprises a plasma generator having an anode and a cathode to form a plasma, and a first inlet for introducing a first reactant into the plasma, the first reactant comprising an evaporated material that is deposited on the substrate by the plasma. Optionally, a nozzle can be utilized to provide a controlled delivery of the first reactant into the plasma.Type: GrantFiled: March 17, 1999Date of Patent: April 2, 2002Assignee: General Electric CompanyInventors: Charles Dominic Iacovangelo, Keith Milton Borst, Elihu Calvin Jerabek, Patrick Peter Marzano, Barry Lee-Mean Yang
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Patent number: 6358572Abstract: A method for manufacturing a nonlinear optical thin film of a silica glass system with sufficient nonlinear optical characteristics, in which a glass substrate 12 is disposed within a vacuum deposition chamber 10 and an electron beam is applied to a SiO2—GeO2-system glass placed on a hearth liner 14 to form a SiO2—GeO2-system thin film on the surface of the substrate 12. In an application of this method, ions of argon, for example, are emitted from an ion source to produce dipoles in the deposited SiO2—GeO2-system thin film. By applying an electric field to the SiO2—GeO2-system thin film thus formed, the dipoles are oriented to let the thin film exhibit nonlinear optical characteristics.Type: GrantFiled: September 20, 1999Date of Patent: March 19, 2002Assignee: Toyota Jidosha Kabushiki KaishaInventors: Naoki Nakamura, Hiroshi Hasegawa, Kiyohito Murata, Hideki Nakayama
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Patent number: 6342278Abstract: A method of depositing a ceramic thermal barrier coating on an article that will be subjected to a hostile environment, such as turbine, combustor and augmentor components of a gas turbine engine. The thermal barrier coating is deposited by electron beam physical vapor deposition (EBPVD) using process parameters that include an absolute pressure of greater than 0.010 mbar and an oxygen partial pressure of greater than 50%, preferably at or close to 100%. Under these conditions, the desired ceramic material is evaporated with an electron beam to produce a vapor that deposits on the component to form a thermal barrier coating of the ceramic material.Type: GrantFiled: September 29, 1999Date of Patent: January 29, 2002Assignee: General Electric CompanyInventors: Joseph D. Rigney, Antonio F. Maricocchi, Brent R. Tholke, Karl S. Fessenden, John D. Evans, Sr.
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Patent number: 6332016Abstract: In order to provide a photoelectric conversion device of high S/N ratio or high resolution in which the outputs of sensor cells except any defective sensor cell can be made to have normal values, thereby to obtain data of higher precision, any switching element that does not operate normally is removed in a photoelectric conversion device wherein a plurality of sensor cells, in each of which a photoelectric element and a switching element are connected, are arrayed in two dimensions on a substrate.Type: GrantFiled: July 28, 1999Date of Patent: December 18, 2001Assignee: Canon Kabushiki KaishaInventor: Isao Kobayashi
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Patent number: 6296895Abstract: A pure metal is vaporized in a receiver, and a quantity of oxygen slightly substoichiometric for the oxide is introduced. To determine the thickness of the layer deposited on the film and to control the vaporization rate, optical sensors are installed in an area where the layer, because of the presence of unoxidized metal, has sufficient absorption for optical measurement. After the determination of the transparency by the sensors, the layer is subjected to a secondary oxidation process.Type: GrantFiled: May 1, 1995Date of Patent: October 2, 2001Assignee: Balzers und Leybold Deutschland Holding AGInventors: Gerhard Steiniger, Rainer Ludwig, Gerd Hoffmann
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Patent number: 6287644Abstract: A continuously-graded bond coat comprises a gradient of at least one material characteristic value. The gradient extends from a first material characteristic value at a first surface region to a second material characteristic value at a second surface region. The continuously-graded bond coat can be used in a thermal barrier coating system. A source ingot for forming the continuously-graded bond coat comprises aluminum, in an atomic percent range from about 50.0 to less than about 100.0; chromium in an atomic percent range from about 5.0 to about 40.0; silicon in an atomic percent range from about 1.0 to about 17.0; zirconium in an atomic percent range from about a trace to about a 0.5, yttrium in an atomic percent range from a trace to about 2.0; and hafnium in an atomic percent range from about 0.5 to about 2.0. A method for forming the continuously-graded bond coat with the gradient is also provided by the invention.Type: GrantFiled: July 2, 1999Date of Patent: September 11, 2001Assignee: General Electric CompanyInventors: Melvin Robert Jackson, Ann Melinda Ritter, Michael Francis Xavier Gigliotti, Jr., Ji-Cheng Zhao
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Patent number: 6265353Abstract: In a method for producing laminate, a buffer layer is applied to a substrate, with the buffer layer material being evaporated from the buffer layer material dispensing devices at an angle &agr;1≠0 at the normal to the substrate surface onto the latter, before an oriented thin layer is evaporated. According to the invention, provision is made such that (a) following evaporation of the buffer layer and prior to the evaporation of the oriented thin layer, at least one cover layer is evaporated under deposition conditions that vary from those under which the buffer layer was applied, especially at a different pressure, different temperature, different rate, and/or different angle &agr;2≠&agr;1, especially &agr;2<&agr;1, preferably &agr;2≈0° to the substrate surface normal, and/or is evaporated on the buffer layer in such fashion that the buffer layer has a biaxial texture and/or facets.Type: GrantFiled: April 12, 1999Date of Patent: July 24, 2001Assignee: Theva Duennschichttechnik GmbHInventors: Helmut Kinder, Markus Bauer, Joachim Schwachulla
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Patent number: 6258467Abstract: A device (10) comprising a substrate (22) having a deposited ceramic thermal barrier coating layer (20) characterized by a microstructure having gaps (28) where the thermal barrier coating (20) consists essentially of a pyrochlore crystal structure having a chemical formula consisting essentially of An+2−xBm+2+xO7−y, where A is selected from the group of elements selected from La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and mixtures thereof; where B is selected from the group of elements selected from Zr, Hf, Ti and mixtures thereof; n and m are the valence of A and B respectively, and for −0.5≦x≦0.Type: GrantFiled: August 17, 2000Date of Patent: July 10, 2001Assignee: Siemens Westinghouse Power CorporationInventor: Ramesh Subramanian
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Publication number: 20010006708Abstract: An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body.Type: ApplicationFiled: June 16, 1997Publication date: July 5, 2001Inventors: STEFAN LOCHER, ECKHARD WIRTH
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Patent number: 6235352Abstract: A method of repairing a damaged area of a thermal barrier coating on a component which is subjected to a hostile thermal environment, which comprises cleaning the damaged area, applying a partially stabilized zirconium sol-gel to the area, and pyrolizing the sol-gel to form a TBC repair layer.Type: GrantFiled: November 29, 1999Date of Patent: May 22, 2001Assignee: Electric Power Research Institute, Inc.Inventors: Gerald R. Leverant, Stuart T. Schwab, Partha P. Paul, Narayana S. Cheruvu
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Patent number: 6183884Abstract: A metallic article includes a bond coating and a ceramic thermal barrier coating on the bond coating. The ceramic thermal barrier coating includes a plurality of columnar grains, which extend perpendicularly to the surface of the metallic article. Each columnar grain includes a plurality of layers. Some of the layers include sub-grains extending at an acute angle to the surface of the metallic article to form voids between adjacent sub-grains. The voids are arranged at an acute angle to the surface of the metallic article and reduce the thermal conductivity of the ceramic thermal barrier coating. Some of the layers include sub-grains extending perpendicularly to the surface of the metallic article to provide erosion resistance.Type: GrantFiled: December 16, 1998Date of Patent: February 6, 2001Assignees: Rolls-Royce PLC, Chromalloy United Kingdom LimitedInventor: David S Rickerby
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Patent number: 6153271Abstract: A process for depositing a transparent coating of indium tin oxide on a substrate comprising providing said substrate in a partial vacuum environment and conducting electron beam evaporation of tin oxide doped indium oxide granules while operating an ion source providing oxygen adjacent said substrate until a coating of indium tin oxide is deposited on at least a portion of said substrate.Type: GrantFiled: December 30, 1999Date of Patent: November 28, 2000Assignee: General Vacuum, Inc.Inventor: Gerald T. Mearini
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Patent number: 6147033Abstract: This invention relates to an apparatus and method for forming a high temperature superconducting film on a tape substrate. In this invention, the superconducting film is deposited on the tape substrate wound around a cylindrical substrate holder inserted in an auxiliary chamber. The holder rotates during the whole deposition process. Vapors of film materials are supplied from a main chamber through an opening between the two chambers. According to the present invention, it is possible to form a highly uniform high temperature superconducting film on a tape substrate at high speeds suitable for large scale production. The manufacturing speed can easily be controlled by the size of the substrate holder.Type: GrantFiled: September 29, 1999Date of Patent: November 14, 2000Assignee: Korea Advanced Institute of Science and TechnologyInventors: Do Jun Youm, Doo Hoon Goo, Sang Hyun Oh
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Patent number: 6110604Abstract: A metallic article includes a bond coating and a ceramic thermal barrier coating on the bond coating. The ceramic thermal barrier coating includes a plurality of columnar grains extending substantially perpendicularly to the surface of the metallic article. Each columnar gain has a plurality of first layers, a plurality of second layers and a plurality of third layers. The first layers have a different structure from the second layers and the third layers. The second layers have a different structure from the third layers. The first layers have the same composition as the third layers. The second layers have a greater proportion of voids than the first layers and the third layers. The voids reduce the thermal conductivity of the thermal barrier coating. The second layers may also have a different composition from the first layers and the third layers to reduce the thermal conductivity.Type: GrantFiled: August 3, 1998Date of Patent: August 29, 2000Assignee: Rolls-Royce, PLCInventor: David S Rickerby
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Patent number: 6103318Abstract: A method of forming a layer of silicon on a surface comprises the steps of depositing silicon on the surface by a physical deposition process such as electron beam evaporation and, during said deposition process, subjecting the forming film to ionic bombardment. The resultant silicon film has stresses which are considerably reduced compared to a film produced by an ordinary physical deposition process. This method is particularly well adapted to the formation of relatively thick silicon layers (.gtoreq.1 .mu.m) on a layer (or stack of layers) of silica, to serve as an etching mask in a subsequent deep etching of the silica by reactive ion etching.Type: GrantFiled: May 26, 1998Date of Patent: August 15, 2000Assignee: Corning IncorporatedInventors: Alain M J Beguin, Philippe Lehuede
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Patent number: 6096700Abstract: A non-chrome process for the pretreatment of substrate surfaces to simultaneously clean them and improve their bonding strength for organic coatings such as adhesives, protective primers, sealants, paints, composites and similar materials conventionally bonded to such substrates, including non-chromated or chromated curable organic resin protective coatings applied directly to bare aluminum substrates. The invention involves the use of novel wipe solvent compositions containing a major volume of an environmentally-safe volatile organic solvent which has a low composite vapor pressure or is otherwise exempt from federal, state or local regulations, and a minor volume of a polyfunctional coupling agent, preferably of the silane type.Type: GrantFiled: August 24, 1998Date of Patent: August 1, 2000Assignee: Northrop Grumman CorporationInventors: John Douglas Weir, Joanne Swiderski McLaughlin