Abstract: One embodiment of the present invention is a film forming method including the steps of forming an absorption layer 12 over one surface of a first substrate 11; forming a layer 16 containing a high molecular compound over the absorption layer; removing an impurity in the layer containing the high molecular compound by performing a first heat treatment on the layer 16; forming a material layer 18 containing a first film formation material and a second film formation material over the layer 16; performing a second heat treatment to form a mixed layer 19 in which the material layer and the layer 16 are mixed over the absorption layer; and performing third heat treatment to form a layer 19a containing the first film formation material and the second film formation material on a film-formation target surface of a second substrate.

Abstract: Example embodiments provide micro-heaters including a heating section, a plurality of connecting sections, and a plurality of support structures. The heating section is on the substrate, separated from the substrate and extended in a longitudinal direction. The plurality of connecting sections are arranged at a distance from each other in the longitudinal direction of the heating section, and extended from two sides of the heating section in a perpendicular direction with respect to the longitudinal direction of the heating section. The plurality of support structures are formed between the substrate and the plurality of connecting sections, so as to support the heating section and the plurality of connecting sections from underneath the plurality of connecting sections.

Abstract: A rare earth ion doped lanthanum gallate luminous material containing metal particles and preparation method thereof are provided. The chemical formula of the lanthanum gallate luminous material is La1-xGaO3:Lnx,My, wherein Ln is one or more of Tm3+, Tb3+, Eu3+ and Sm3+, M is one of Ag, Au, Pt and Pd, the value range of x is 0.001 to 0.1, and the value range of y is 0.00002 to 0.01. The luminous performance of the lanthanum gallate luminous material can be greatly improved under the same excitation condition and the wavelength of emission light doesn't change, due to the introduction of metal particles into the rare earth ion doped lanthanum gallate luminous material. The lanthanum gallate luminous material has excellent luminous performance, and its emitting photochromic purity and light emitting luminance after excitation are high, so it can be used widely in various kinds of light emitting devices.

Abstract: A deposition apparatus 50 forms a thin film 3 in a predetermined pattern on a substrate 10 for an organic EL display. A first correction plate 81 and a second correction plate 82 are placed between a shadow mask 60 and a deposition source 53 that emits deposition particles. Each of the correction plates 81, 82 has a plurality of blade plates 83 and a frame 84 that supports the plurality of blade plates 83. The blade plates 83 are placed so as to be tilted with respect to the shadow mask 60, and to extend parallel to each other with an opening 86 between adjoining ones of the blade plates 83 as viewed in a direction perpendicular the deposition mask 60.

Abstract: A disk processing system with a load chamber having a stationary heater and a movable heater.

Abstract: The invention provides a colored composition including a dye multimer having an alkali-soluble group as a dye, the dye multimer having a weight-average molecular weight (Mw) of from 5,000 to 20,000 and a dispersity (weight-average molecular weight (Mw)/number-average molecular weight (Mn)) of from 1.00 to 2.50.

Abstract: A printed material as an embodiment of the invention comprising; a substrate; partition walls for partitioning the surface of the substrate into a plurality of regions; and an ink film formed by printing method using a printing apparatus in the plurality of regions, in which the partition wall comprises an ink repellent material containing a resin binder and an ink repellent agent, and the ink repellent agent is a compound having a site showing a compatibility with the resin binder and a site having an ink repellency, the critical surface tension of the partition wall is from 24 to 30 mN/m, and the number average molecular weight of the ink repellent agent is from 40,000 to 100,000.

Abstract: A method of fabricating an organic light emitting device is provided. A first electrode is provided, over which the rest of the device will be fabricated. A first organic layer is deposited over the first electrode via solution processing. The first organic layer includes: i. an organic host material of the first organic layer; ii. a first organic emitting material of the first organic layer; iii. a second organic emitting material of the first organic layer; A second organic layer is deposited over and in direct contact with the first organic layer. The second organic layer includes an organic emitting material of the second organic layer. A second electrode is then deposited over the second organic layer. The device may include other layers.

Abstract: Systems, apparatuses, and methods are provided that include or use a chuck, an inkjet printhead, and a gas knife to form film layers on a substrate, which have uniform feature dimensions and which avoid pile-up of inkjet ink. In some systems, a gas movement device is used instead of a gas knife. The systems, apparatus, and methods can be used to print layers on a substrate, which are used in an organic light-emitting device.

Abstract: Methods for making tin oxide films comprising nano-whiskers comprises providing a solution comprising a tin precursor and a solvent; preparing aerosol droplets of the solution; and applying the aerosol droplets to a heated glass substrate, converting the tin chloride to tin oxide to form a tin oxide film on the glass substrate, wherein the tin oxide film comprises nano-whiskers.

Abstract: The present invention relates to compounds of the general structure: wherein Y is O, X is O, bond ? is absent and bond ? is present, or Y is H, X is CH, bond ? is present, and bond ? is absent; atom Z is a carbon and bonds ?, ? and ? are present, or is a nitrogen and bonds ?, ? and ? are absent; R1 is —H, —OH, —O—R7, —N(H)—R8, —N(H)—(CH2)n—NH2, —N(R9)(R10), or a piperazine cation; R2 is either covalently bound to R9, or is —H, or is covalently bound to R3 so as to form a substituted or unsubstituted pyrrole or R2 is covalently bound to R9 or R8 or R7; or R1 and R2 are covalently joined to form an aromatic ring; R3 is either covalently bound to R2 so as to form a pyrrole, or is, inter alia, —H, —OH, alkyl, or when Z is nitrogen R3 is ?O; R4 is, inter alia, —H, —OH, or —R11NH2; R5 is, inter alia, —H, —OH, or —R12NH2, and R6 is either is covalently bound to R10 or is —H, or R6 is covalently bound to R10 or R8 or R7.

Abstract: A method for manufacturing a display device of the present invention comprises the steps of forming insulating barriers which surround electrode and project upward from the surface of the electrode, and bringing the whole substrate into contact with water after applying the solution including an acceptor in wet process. According to the present invention, an organic conductive layer can be uniformly formed over a substrate in wet process even if the substrate does not have a smooth surface and has distribution in wettability of the surface.

Abstract: To provide a method for producing an organic electroluminescent device having luminescent characteristics of high efficiency and prolonged lifetime and in which the occurrence of defects is suppressed, the organic electroluminescent device, and an electronic apparatus. A method for producing an organic electroluminescent device including a first electrode, a second electrode, and a functional layer disposed between the first electrode and the second electrode, the functional layer including at least a luminescent layer, the method includes the steps of mixing a solvent and a functional material to produce a functional solution; and applying the functional solution to form the functional layer by a wet film formation process, wherein, before the functional solution is produced, the solvent is subjected to dehydration and deoxygenation in order to remove water and oxygen in the solvent.

Abstract: In a deposited thin film for use in a semiconductor device or the like, adsorption of contaminants is a problem. In the case in which a gas pressure in a chamber is maintained in a viscous flow region, the adsorption of the organic substances is significantly decreased as compared with the case in which the gas pressure is maintained in a molecular flow region. The gas pressure is controlled so that it can be set in the molecular flow region when forming the deposited thin film, and set in the viscous flow region when such deposition is not being performed. Thus, the deposited thin film is formed with less contamination from the organic substances.

Abstract: Provided according to embodiments of the invention are method of coating a phosphor that include contacting the phosphor with a sol comprising at least one of silica, alumina, borate and a precursor thereof, to form a coating on the phosphor; and heating the phosphor. Also provided are phosphors that are coated with alumina, silica and/or borate, and light emitting devices that include such phosphors.

Abstract: A liquid droplet discharging apparatus includes a substrate having a plurality of film formation regions; a plurality of nozzles discharging droplets of a liquid, the nozzles being positioned facing the substrate and moved relatively with respect to the substrate to perform a scanning operation so as to discharge the droplets in the film formation regions during the scanning operation; a first moving mechanism moving the substrate relatively with the nozzles in a first direction; a plurality of driving units provided, each corresponding to one of the nozzles; a nozzle driving section generating a plurality of driving signals to supply one of the driving signals changing amounts of the droplets to be discharged to the driving units so as to allow the droplets to be discharged from the nozzles; and a control section controlling the first moving mechanism to allow the scanning operation to be performed a plurality of times over a same film formation region and controlling the nozzle driving section to allow a pr

Abstract: Provided are a light emitting material comprising one or more tetraphenylethene (TPE) derivatives of formula (1a) with high thermal stability and high solid quantum yield efficiency, and an electroluminescent or light emitting device such as OLED comprising the same TPE derivatives and a method of preparing the same.

Abstract: A pixel observation system includes a memory unit, a coordinate generation unit, and an observation unit. The memory unit is configured to store at least nozzle information indicative of discharge states of a liquid material in a plurality of nozzles and arrangement information indicative of an arrangement of each of the nozzles with respect to each of a plurality of pixel regions in relative movement of the nozzles and a substrate. The coordinate generation unit is configured to generate observation coordinates of observation regions on the substrate based on the nozzle information and the arrangement information, and to include coordinates of at least some of the pixel regions over which the nozzles scan through one cycle of the relative movement in the observation coordinates. The observation unit is configured and arranged to observe the pixel regions positioned at the observation coordinates generated by the coordinate generation unit.

Abstract: A display device includes a first organic electroluminescent element and a second organic electroluminescent element. The first and second organic electroluminescent elements have different luminescent colors. The first and second organic electroluminescent elements each include, in series, a first electrode, a first charge transport layer, a second charge transport layer, a light-emitting layer, and a second electrode. The first charge transport layer is common to the first and second organic electroluminescent elements. The second charge transport layer of the first organic electroluminescent element is different in thickness from the second charge transport layer of the second organic electroluminescent element. The concentration of a dopant material contained in the first charge transport layer is less than that of the second charge transport layer.

Abstract: A method of producing a light-emitting element is provided. The method includes forming a first half-transmitting/reflecting film and a second half-transmitting/reflecting film sequentially on an organic layer by physical vapor deposition.

Abstract: An object is to improve use efficiency of an evaporation material, to reduce manufacturing cost of a light-emitting device, and to reduce manufacturing time needed for a light-emitting device including a layer containing an organic compound. The pressure of a film formation chamber is reduced, a plate is rapidly heated by heat conduction or heat radiation by using a heat source, a material layer on a plate is vaporized in a short time to be evaporated to a substrate on which the material layer is to be formed (formation substrate), and then the material layer is formed on the formation substrate. The area of the plate that is heated rapidly is set to have the same size as the formation substrate and film formation on the formation substrate is completed by one application of heat.

Abstract: It is an object to provide a composition in which an anthracene derivative is dissolved and a technique in which a thin film that has a favorable film quality is formed by a wet process using the composition. In addition, it is another object to manufacture a highly reliable light-emitting element using the composition at low cost with high productivity. A composition having a solvent and an anthracene derivative having one anthracene structure and one carbazolyl group which is bonded to the anthracene structure directly or through a phenyl group is formed. A thin film with a favorable film quality can be formed by a wet process using the composition. Accordingly, a highly reliable light-emitting element can be manufactured using such a thin film.

Abstract: An electrostatic chuck, a thin film deposition apparatus including the electrostatic chuck, and a method of manufacturing an organic light emitting display apparatus using the thin film deposition apparatus. The electrostatic chuck includes: a first plate; a first common wire disposed on the first plate and electrically connected to a plus terminal of an electric power source; first electrode patterns electrically connected to the first common wire, separated by a distance from each other, and extending from the first common wire; a second common wire disposed on the first plate and electrically connected to a minus terminal of the electric power source; second electrode patterns electrically connected to the second common wire, separated by a distance from each other, and extending from the second common wire; a first additional wire electrically connected to the first common wire; and a second additional wire electrically connected to the second common wire.

Abstract: A conductive composition for use in an organic light-emitting device comprising: a polycation having a conjugated backbone; a polyanion to balance the charge on the polycation; and a semiconductive hole transport polymer containing side groups pendant from the polymer backbone, each side group comprising one or more groups XY, where XY represents a group with a high dissociation constant such that it is ionized completely.

Abstract: There is provided a method for manufacturing a light emitting device including a plurality of organic EL elements, in which a plurality of rows extending in a row direction different from a predetermined column direction are set at predetermined intervals in the column direction on a plane, and the plurality of organic EL elements are provided in each of the rows at predetermined intervals in the row direction. Each of the plurality of organic EL elements includes a pair of electrodes, and a common layer that is commonly provided for each of the organic EL elements between the electrodes. The method for manufacturing a light emitting device includes a step of forming the common layer. In the step of forming the common layer, the process of applying and forming the common layer is performed (m+1) times at intervals of m row in the column direction to the rows in which the common layer is not formed.

Abstract: A method of aligning an OLED substrate with a shadow mask includes forming a shadow mask with at least three spaced alignment openings, providing a precision alignment element into each of the alignment openings, and positioning the OLED substrate so that the edges of the OLED substrate engage the precision alignment elements and thereby align the shadow mask with the OLED substrate.

Abstract: In a method for producing especially doped layers for electronic, luminescent or photovoltaic components, especially OLEDs, one or more liquid or solid starting materials are evaporated in a source (11, 12, 13, 14) or are admixed as aerosol to a carrier gas and transported in this form to a deposition chamber (1) where they condense on a substrate (5), especially as a result of a temperature gradient, forming a doped matrix. In order to improve the doping of electronic, luminescent or photovoltaic layers, it is proposed that the doping occurs by modification of a starting material during its transport.

Abstract: Disclosed is a barrier laminate comprising at least one organic layer and at least one inorganic layer, wherein the organic layer is formed by vacuum vapor deposition of a composition containing a radical-polymerizing monomer and a polymerization initiator, followed by curing the composition, and the polymerization initiator is liquid at 30° C. under one atmosphere and/or has a melting point of not higher than 30° C.

Abstract: Provided is a method of manufacturing an organic electroluminescence display device including: an organic compound layer-forming step of forming an organic compound layer on a first electrode; a release layer-forming step of forming a release layer on the organic compound layer; a first processing step for the release layer of patterning the release layer; an organic compound layer-processing step of removing the organic compound layer in a region not covered with the release layer processed in the first processing step for the release layer; and a second processing step for the release layer of removing a part of the release layer, in which the release layer is a deposited film formed of a charge-transportable organic compound and is dissolved by a solvent containing an organic solvent miscible with water.

Abstract: By irradiating a first substrate which is an evaporation donor substrate including a function layer in which films having different refractive indexes (high-refractive index films and low refractive index films) are stacked with first light (wavelength=?1), a material layer over the first substrate is patterned, and by irradiating the first substrate with second light (wavelength=?2) which is different from ?1, the material layer which is patterned is evaporated onto a second substrate which is a deposition target substrate.

Abstract: A method of manufacturing a zinc oxide-based thin film for a transparent electrode and a zinc oxide-based thin film manufactured using the method, in which both conductivity and transmittance can be improved. The method includes the step of forming a transparent oxide thin film doped with a dopant on a transparent substrate, and the step of rapidly heat-treating the transparent oxide thin film.

Abstract: A lightweight, flexible, plastic substrate is coated with at least one layer, such that the substrate has desired barrier and electrode characteristics useful in constructing OLED displays. The layer has both a low enough resistance to function as an electrode for the display, and low oxygen and moisture permeability. The display is thereby protected from oxygen and moisture degradation. For lower permeability and/or higher conductivity, multiple alternating layers of barrier materials and conductive materials may be applied. The barrier material includes at least one of a thin metallic film, an organic polymer, a thin transparent dielectric, a thin transparent metal nitride, and a thin transparent conductive oxide. The conductive material includes at least one of a thin transparent conductive oxide, a thin transparent metallic film, and a thin transparent metal nitride. Preferably, a multilayer polymer base coat is deposited over the substrate to exclude moisture and atmospheric gases.

Abstract: Disclosed are compositions, useful in ink jet printing methods, that prevent clogging during dispensing, achieve stable dispensing, prevent precipitating of content matter during dispensing, and prevent phase separation during film formation. Also disclosed are uniform, homogenous, functional films formed using the compositions and manufacturing methods therefor, as well as organic EL devices and other such display devices and manufacturing methods therefor. The compositions contain a functional material and a solvent comprising at least one benzene derivative having one or more substituents, whereby the substitiuents have at least three carbon atoms in total.

Abstract: A simple and efficient method for transforming conformation of parts of chains in the amorphous phase in a conjugated polymer to extended conjugation length (termed as ? phase) is disclosed. The ? phase acts as a dopant and can be termed self-dopant. The generated self-dopant in the amorphous host allows an efficient energy transfer and charge trapping to occur and leads to more balanced charge fluxes and more efficient charge recombination. For example, a polyfluorene film was dipped into a mixed solvent/non-solvent, tetrahydrofuran/methanol in volume ratio of 1:1, to generate a ?-phase content up to 1.32%. A polymer light emitting diode with the dipped polyfluorene film as a light emitting layer therein provides a more pure and stable blue-emission (solely from the self-dopant) with CIE color coordinates x+y<0.3 and a performance of 3.85 cd A?1 (external quantum efficiency 3.33%) and 34326 cd m?2.

Abstract: A compound having a stable deposition rate suitable for forming an electron-transporting layer of an organic El element. The compound is represented by the following formula (1): wherein in the formula (1), plural R1 are each an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, a halogen atom, or a hydrogen atom, and may be the same as or different from one another; and plural Ar are each a monovalent substituted or unsubstituted aromatic group optionally containing a hetero atom, and may be the same as or different from one another.

Abstract: A method for forming a film in which throughput is improved and a desired pattern is obtained smoothly in stacking a plurality of material layers over a substrate and a method for manufacturing a light emitting device are provided. In advance, a material layer is formed selectively by a droplet discharge method to be in contact with a light absorption layer on a first substrate. A second substrate is disposed so that the material layer faces the second substrate. The light absorption layer is irradiated with a laser light so that a film containing a material included in the material layer is formed on the second substrate. When the light absorption layer have a desired pattern, a film reflecting the pattern of the light absorption layer that has undergone the laser light irradiation is formed on the second substrate.

Abstract: Disclosed herein is an organic electroluminescence display including a plurality of first electrodes, a hole injection/transport layer, a second organic light emitting layer for another color, a connection layer, a first organic light emitting layer for blue color, an electron injection/transport layer, and an electron injection/transport layer. The first electrodes are provided on a substrate on the basis of each of a first organic electroluminescence element for blue color and a second organic electroluminescence element for another color. The hole injection/transport layer is provided over the whole surface area on the first electrodes and having a property for one of hole injection or transport. The second organic light emitting layer for another color is provided over the whole surface area on the hole injection/transport layer and having a crystal part in a part. The connection layer is provided over the whole surface area on the second organic light emitting layer.

Abstract: An organic electroluminescence display device includes: a first electrode provided over a substrate for each of first and second organic electroluminescence elements; a hole injection/transport layer provided over a whole surface of the first electrode, having at least one of hole injection and transportation characteristics; a second organic light emitting layer provided on an area on the hole injection/transport layer except an area opposed to the first organic electroluminescence element; a first organic light emitting layer provided over whole surfaces of the hole injection/transport and second organic light emitting layers; an electron injection/transport layer, provided over a whole surface of the first organic light emitting layer, having at least one of electron injection and transportation characteristics; a second electrode provided on the electron injection/transport layer; and a color filter provided over the second electrode, having a color or colors in an area above the second organic electrolum

Abstract: A light-emitting panel can be manufactured in which a first light-emitting element emits light having high brightness and a pale color and causing less eyestrain even in the case of long time, a second light-emitting element emits light of a bright red color, a third light-emitting element emits green light, and a fourth light-emitting element emits blue light. Further, a layer transmitting light of a specific color (e.g., a color filter) is not provided in all the light-emitting elements except the second light-emitting element; thus, light emitted from the layer containing a light-emitting organic compound can be efficiently used. As a result, a light-emitting panel which is capable of bright, full-color light emission and whose power consumption is reduced can be provided.

Abstract: It is an object of the present invention to provide an organic EL device having a structure to enhance a barrier property against gases such as water vapor and oxygen which penetrate into an organic EL element formed on a substrate. That is, the present invention provides the organic EL device including a substrate 10, an organic EL element 20 holding an organic EL layer including a light emitting layer between one pair of electrodes of which at least one is transparent or translucent, a sealing layer 30 which seals the organic EL element 20 and in which multiple layers are formed by stacking an inorganic film and an organic film alternately and a sealing glass substrate 40 disposed by tightly adhering onto an uppermost organic film 33-n in the sealing layer 30, on the substrate 10.

Abstract: A successive deposition apparatus by which a reduction in the luminous efficiency of a light-emitting element can be suppressed even in high-speed deposition of a light-emitting layer thereof is provided. The apparatus includes: a second deposition chamber; a third deposition chamber coupled to the second deposition chamber; a transfer unit for transferring a substrate from second deposition chamber to third deposition chamber; plural third deposition sources arranged in the substrate transfer direction in the second deposition chamber; and a fourth and fifth deposition sources alternately arranged in the transfer direction in the third deposition chamber. In the third deposition chamber, the fourth deposition source is placed nearest to the second deposition source. The fourth deposition source contains a host material, and the fifth deposition source contains a dopant material. The HOMO level of a material of the third deposition source is adjusted to that of the host material.

Abstract: A compressed multilayered film for a flexible functional element includes a base film, a transparent conductive layer coated on one side of the base film, and a support layer with a low adhesion layer liner on an opposite side of the base film. The support layer is separable from the base film. The base film has a thickness of 3 to 25 ?m, and the transparent conductive layer is composed mainly of conductive oxide microparticles and a binder matrix. The multilayered film is compressed to increase the filling density of the conductive microparticles in the transparent conductive layer.

Abstract: Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.

Abstract: A color organic EL display includes: a substrate; a color filter layer disposed on the substrate; a gas barrier layer disposed on the color filter layer; and an organic EL structural body disposed on the gas barrier layer. The substrate and the color filter layer provide an underlayer of the gas barrier layer. The underlayer is a degassed underlayer. The gas barrier layer is provided by an atomic layer deposition method at a temperature equal to or lower than a decomposition starting temperature of the color filter layer.

Abstract: The lighting device includes a first resin layer having a first refractive index and a second resin layer having a second refractive index lower than the first refractive index and higher than the refractive index of the air, which are over a light-emitting element layer, a plurality of granules provided at the interface between the first resin layer and the second resin layer and each having the second refractive index or a plurality of projections each having an apex provided inside the first resin layer and a flat surface in contact with the interface between the first resin layer and the second resin layer and having the second refractive index, an uneven structure provided at the interface with the air, and a resin substrate having the second refractive index.

Abstract: A method of manufacturing an electroluminescent display apparatus includes: discharging first droplets of the fluid luminescent material from the first nozzles to the target discharge areas when the first nozzles are positioned in an area above the target discharge areas so that all of the first droplets are arranged in the target discharge areas on different X-axis direction positions so as not to overlap each other when viewed in the Y-axis direction; and discharging second droplets of fluid luminescent material from the second nozzles to the target discharge areas to which the first droplets have been discharged when the second nozzles are positioned in the area above the target discharge areas after a predetermined period of time passed since the discharge of the first droplets to the target discharge areas.

Abstract: A liquid material arrangement method includes performing a first pattern generating step, a dot deleting step, and a liquid material arranging step. The first pattern generating step includes generating a first dot pattern in which a first prescribed number of dots is set according to the prescribed region. The dot deleting step includes deleting a second prescribed number of dots from the first prescribed number of dots to generate a second dot pattern. The liquid material arranging step includes arranging a liquid material in a prescribed region on a substrate by causing a nozzle and the substrate to scan in relative manner and discharging the liquid material from the nozzle based on the second dot pattern. The performing of the dot deleting step further includes deleting at least one prohibited dot with priority with the prohibited dot being determined based on discharge information of the nozzle determined in advance.

Abstract: An object is to provide a deposition method in which an organic material layer which is a material of a common layer is evenly formed over an entire surface of a donor substrate (a first substrate) and can be transferred to an element formation substrate (a second substrate) as transfer layers which are common layers for red (R), green (G), and blue (B) with different thicknesses. An organic material layer over a first absorption layer and a second absorption layer is deposited to a second substrate as a first transfer layer and a second transfer layer by sublimating the organic material layer over the first substrate. The thicknesses of the first and second transfer layers differ in accordance with the ratio of the area of the first absorption layer to the area of the second absorption layer.

Abstract: To provide a polymer compound which is useful as a light emitting material or charge transport material having a boron atom. A polymer compound comprising a structure represented by a formula (1) as described below: wherein R1, R2, and R3 each independently represents a hydrogen atom or a substituent.

Abstract: A cleaning method of removing a vapor-deposition material adhering to equipments without exposure to the atmosphere is provided. A vapor-deposition material adhering to equipments (components of a film-forming apparatus) such as a substrate holder, a vapor-deposition mask, a mask holder, or an adhesion preventing shield provided in a film-forming chamber are subjected to heat treatment. Because of this, the adhering vapor-deposition material is re-sublimated, and removed by exhaust through a vacuum pump. By including such a cleaning method in the steps of manufacturing an electro-optical device, the manufacturing steps are shortened, and an electro-optical device with high reliability can be realized.