Abstract: One embodiment of the present invention is a method for manufacturing an organic electroluminescence device, including forming an organic light emitting layer by a relief printing method, the method including transferring an organic light emitting material ink from an ink supplier to a printing plate, and subsequently transferring the organic light emitting material ink from the printing plate to a substrate, wherein a solvent of the organic light emitting material ink comprises a solvent having a vapor pressure over 500 Pa at 20-25 degrees Celsius, and wherein the time between the reception of the ink by the printing plate and the transfer of the ink to the substrate is equal to or less than 5 seconds.

Abstract: The present invention (i) uses a mask unit (80) including: a shadow mask (81) that has an opening (82) and that is smaller in area than a vapor deposition region (210) of a film formation substrate (200) and; a vapor deposition source (85) that has a emission hole (86) for emitting a vapor deposition particle, the emission hole (86) being provided so as to face the shadow mask (81), the shadow mask (81) and the vapor deposition source (85) being fixed in position relative to each other, (ii) adjusts an amount of a void between the shadow mask (81) and the film formation substrate (200), (iii) moves at least a first one of the mask unit (80) and the film formation substrate (200) relative to a second one thereof while uniformly maintaining the amount of the void between the mask unit (80) and the film formation substrate (200), and (iv) sequentially deposit the vapor deposition particle onto the vapor deposition region (210) through the opening (82) of the shadow mask (81).

Abstract: To provide an organic electroluminescence device that can suppress rise in the driving voltage at the time of constant-current energization and degradation in brightness at the time of energization, and thus excels in its driving lifetime, the organic electroluminescence device comprises: a substrate; an anode and a cathode overlying the substrate; and a plurality of organic layers disposed between the anode and the cathode, and the plurality of organic layers comprise at least: a first layer formed by means of polymerization of a polymerizable compound; and a second layer disposed adjacently to the first layer and containing a polymerization initiator.

Abstract: A method for producing display devices for forming deposited patterns conforming to pixels on a substrate by means of elongated evaporation sources and a deposition mask having regularly arranged apertures, the method including the steps of arranging the deposition mask and the substrate in such a way that the long sides of the apertures and pixels are parallel to the lengthwise direction of the evaporation sources irrespective of the direction in which the display panel regions are arranged within the substrate; and moving the substrate and the deposition mask relative to the evaporation sources, thereby forming the deposited patterns conforming to the pixels on the substrate.

Abstract: An organic EL device manufacturing method includes a step of supplying a substrate, and while moving the substrate with a non-electrode-layer side thereof in contact with a surface of a can roller, the non-electrode-layer provided with no electrode layer, discharging a material from a nozzle of a vapor deposition source to form an organic layer on an electrode-layer side of the substrate, the electrode-layer side provided with an electrode layer. The vapor deposition step includes supplying a shadow mask including an opening portion to interpose the shadow mask between the substrate contacting the can roller, and the nozzle; and forming the organic layer corresponding to the opening portion on the electrode-layer side of the substrate while moving the substrate and the shadow mask with through holes included at each of the substrate and the shadow mask engaged with projections included in the can roller.

Abstract: In accordance with one or more embodiments of the present disclosure, a method of manufacturing a light-emitting element includes forming an anode on a substrate, forming a first transport layer including one or more first polar compounds on the anode, forming a first non-polar solvent layer on the first transport layer, forming a first polar solution layer including one or more light-emitting compounds on the first non-polar solution layer, drying a polar solvent of the first polar solution layer and the first non-polar solvent layer so that a light-emitting layer including the one or more light-emitting compounds is formed on the first transport layer and forming a cathode on the light-emitting layer. The cathode is disposed opposite to the anode. As such, damage to the first transport layer may be reduced when forming the light-emitting layer, which may improve the reliability and productivity of a manufacturing process.

Abstract: A method of manufacturing a panel from a base using a droplet ejection apparatus including two groups of heads with each group including first to fourth heads. In each group, the nozzle arrays of the first and third heads overlap throughout a first sub-area, the nozzle arrays of the first and fourth heads overlap throughout a second sub-area, and the nozzle arrays of the second and fourth heads overlap throughout a third sub-area when viewed from a second direction. The second sub-areas of the two groups partially overlap each other when viewed from the second direction. The method includes preparing the base, and supplying the liquid materials of the predetermined colors onto the base in the form of the droplets by ejecting the droplets by the droplet ejection apparatus while mutually moving the base and the head unit in the second direction.

Abstract: The present invention is a fabrication method of a light-emitting device characterized by ejecting a solution containing a luminescent material toward an anode or a cathode under a reduced pressure and characterized in that in a duration before the solution is arrived at the anode or the cathode, the solvent in the solution is volatilized, the remaining part of the luminescent material is deposited on the anode or the cathode, and thereby formed a light-emitting layer. By the present invention, a baking process for thickness reduction is not required after applying the solution. Accordingly, it is possible to provide a fabrication method with high throughput although the method is low in cost and simple.

Abstract: An organic EL display includes a substrate on which pixel areas are arranged in a matrix; first and second electrodes; functional material layers each including a carrier transport layer and a non-carrier transport layer; and a barrier to define the pixel areas. The barrier includes communication recesses arranged to extend the non-carrier transport layers from respective first pixel areas to respective second pixel areas adjacent to each other in the pixel areas defined by the barrier.

Abstract: A color conversion luminescent sheet and a method of preparing the same, the color conversion luminescent sheet including: an optical sheet having a plurality of protrusions and depressions on its lower surface; a conductive layer disposed on the upper surface of the optical sheet; a color conversion luminescent layer deposited on the upper surface of the conductive layer and comprising a mixture of nanofibers and nanobeads having a binder resin and a color conversion luminescent material; and a protective layer on the upper surface of the color conversion luminescent layer, the protective layer having a stacked structure including an organic polymer protective layer and an inorganic thin protective layer.

Abstract: An object of the present invention is to carry out stable film deposition for a long stretch of time without an evaporation material being stuck in a manufacturing apparatus that carries out evaporation. A driving portion that can move a crucible up and down is provided for an evaporation source of an evaporation apparatus. When the opening of the crucible is clogged with the evaporation material, the crucible is moved down and sealed in the evaporation source. The heater of the evaporation source can heat the opening efficiently; therefore, the evaporation material with which the opening is filled is evaporated; therefore, the blockage can be dissolved. Thereafter, the crucible is moved above and heated to carry out evaporation. It is possible to carry out film deposition without exposure to the atmosphere for a long stretch of time, which can improve the productivity of an organic EL element.

Abstract: In an organic EL element, an organic EL layer is interposed between anodes and cathodes formed on a substrate. Each of the cathodes is made of a first conductive film that comes into contact with the organic EL layer and a second conductive film that constitutes a laminated structure together with the first conductive film. The first conductive film contains any one of an alkaline metal and an alkaline earth metal. The second conductive film contains any one of at least one type metal selected from a group consisting of Ru (ruthenium), Rh (rhodium), Ir (iridium), Os (osmium) and Re (rhenium) and its oxide.

Abstract: A method for making en electro-optic device includes a filling step of ejecting liquid matter containing a solvent and a functional layer-forming material into recesses formed in a substrate to fill the recesses with the liquid matter; and a fixing step of removing a solvent component from the liquid matter to fix the functional layer-forming material in the recesses. In the filling step, the concentration of the functional layer-forming material in the liquid matter filling each recess is changed on the basis of the size of an opening width of the recess.

Abstract: The present invention relates to a method for manufacturing a light-emitting device. At least one of a light-emitting film forming step, a conductive film forming step and an insulating film forming step is carried out while holding a substrate in a manner that an angle subtended by a surface of the substrate and the direction of gravity is within a range of from 0 to 30°.

Abstract: A method for producing an organic radiation-emitting component is provided, comprising the following steps: A) providing an organic radiation-emitting layer sequence (10) having at least one organic functional layer (3), which is suited to emit electromagnetic radiation during operation, and a transparent layer (11), B) applying a transparent radiation decoupling layer (20) having a surface structure (21) onto a surface (12) of the transparent layer (11) facing away from the at least one functional layer (3) by means of spray coating. Furthermore, an organic radiation-emitting component is provided.

Abstract: A first substrate including, on one of surfaces, a light absorption layer having metal nitride and a material layer which is formed so as to be in contact with the light absorption layer is provided; the surface of the first substrate on which the material layer is formed and a deposition target surface of a second substrate are disposed to face each other; and part of the material layer is deposited on the deposition target surface of the second substrate in such a manner that irradiation with laser light having a repetition rate of greater than or equal to 10 MHz and a pulse width of greater than or equal to 100 fs and less than or equal to 10 ns is performed from the other surface side of the first substrate to selectively heat part of the material layer which overlaps with the light absorption layer.

Abstract: A pixel structure of an organic electroluminescent display panel has a plurality of sub-pixel regions. Each of the sub-pixel regions has a plurality of organic luminescent devices electrically connected in series, and the organic luminescent devices disposed in a same sub-pixel region are disposed between a source electrode of a thin film transistor and a voltage source Vdd.

Abstract: A method of forming a film on a substrate includes depositing first and second evaporating source materials respective from first and second evaporating sources onto the substrate while moving the evaporating sources together with respect to the substrate, the first and second evaporating source materials being different from each other and positioned to provide a non-overlapping deposition region of the first evaporating source material, an overlapping deposition region of the first and second evaporating source materials and a non-overlapping deposition region of the second source material such that when the evaporating sources are moved, a film is formed to include a first layer that is a deposition of only the first evaporating source material, a second layer that is a deposition of a mixture of the first evaporating source material and the second evaporating source material and a third layer that is a deposition of only the second source material.

Abstract: The invention provides methods and materials suitable for increasing the output efficiency of light emitting diodes (LEDs), particularly organic LEDs (OLEDs). In one embodiment, for example, there is described a method for providing a porous coating over an OLED stack. The porous coating reduces optical loss and improves light extraction efficiency from the OLED device.

Abstract: Methods for repairing barrier coatings involving providing a component having a barrier coating including at least one damaged portion, removing the damaged portion of the barrier coating leaving a void, applying a replacement tape cast barrier coating to the void of the component, and sintering the component having the replacement tape cast barrier coating layer.

Abstract: A continuous roll-to-roll apparatus for providing a patterned deposit of a material onto a moving substrate web includes a payout station for feeding out a substrate web, a take-up station for taking up the substrate web, and a web transport system for advancing the web through the apparatus from the payout station to the take-up station. The apparatus includes at least one deposition station disposed between the payout station and the take-up station, and the deposition station is operative to deposit a material onto the web as it moves therethrough. The apparatus includes a masking system associated with a deposition station. The masking system is operative to dispose a deposition mask in registry with a portion of the length of the moving web. The deposition mask is comprised of a plurality of filaments which are aligned with the longitudinal axis of the web.

Abstract: Embodiments of the invention are directed to yellow-to-transmissive conjugated polymers, a method to prepare the yellow conjugated polymers, the use of the yellow conjugated polymers in an electrochromic and/or electroluminescent device comprising neutral state primary subtractive colored conjugated polymers, and a method to prepare the device comprising the yellow conjugated polymer. The yellow conjugated polymers comprise a sequence of dioxythiophene units alternating with aromatic units, thiophene units, furan units, and/or pyrrole units. The yellow conjugated polymers are prepared by cross-condensation reactions. The yellow conjugated polymers can be soluble and preparation of the device involves deposition of the yellow conjugated polymer from solution onto a surface.

Abstract: An optically coupled device includes a light emitting element and a light receiving element which are electrically isolated from each other, and an optical waveguide allowing therethrough transmission of light from the light emitting element to the light receiving element, wherein the optical waveguide is covered with an encapsulation resin containing a light reflective inorganic particle which is typically composed of titanium oxide, the light emitting element and the light receiving element are respectively provided on a base (for example, package terminals), and the entire portion of the outer surface of the optical waveguide, brought into contact with none of the light emitting element, the light receiving element and the base, is covered with the encapsulation resin.

Abstract: An electroluminescent device comprises a hole injecting electrode, an electron injecting electrode and at least one organic light emitting layer disposed between said hole injecting electrode and said electron injecting electrode wherein a layered metal chalcogenide layer is disposed between said hole injecting electrode and said light emitting layer.

Abstract: An ejection rate measurement method for a device having a plurality of droplet ejection head columns mounted on a plurality of carriages includes the steps of (a) measuring an ejection rate of a liquid ejected from a droplet ejection head included in one of the plurality of droplet ejection head columns sandwiched between other two of the plurality of droplet ejection head columns, (b) sandwiching, after step (a), one of the plurality of droplet ejection head columns, which has not been sandwiched between other two of the plurality of droplet ejection head columns in step (a), between other two of the plurality of droplet ejection head columns, and (c) measuring an ejection rate of a liquid ejected from a droplet ejection head included in one of the plurality of droplet ejection head columns sandwiched between other two of the plurality of droplet ejection head columns in step (b).

Abstract: An organic film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet spaced apart from the deposition source nozzle unit and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction; a first blocking member between the substrate and the deposition source and movable together with the substrate to be positioned to screen at least a part of the substrate; and a second blocking member between the first blocking member and the substrate and fixedly held relative to the deposition source, wherein the substrate is spaced apart from the organic film deposition apparatus and at least one of the substrate or the organic film deposition apparatus moves relative to the other.

Abstract: Disclosed are: a resin composition for pattern formation, which enables the stable formation of a pattern at a level of the wavelength of light; a method for forming a pattern having a sea-island structure using the composition; and a process for producing a light-emitting element that can achieve high luminous efficiency properties.

Abstract: There is provided a vapor deposition apparatus and a vapor deposition method capable of efficiently sublimating/melting a granular organic material with high mobility. The vapor deposition apparatus for forming a thin film on a substrate by vapor deposition includes a depressurizable material supply apparatus configured to supply a material gas, and a film forming apparatus configured to form a thin film on the substrate. The material supply apparatus includes a quantity control unit configured to control a quantity of a material, and a material gas generating unit configured to vaporize the material supplied from the quantity control unit.

Abstract: The invention relates to a method for coating particles with a luminescent inorganic shell. Furthermore, the invention relates to particles having a luminescent inorganic shell and also use thereof.

Abstract: The present invention provides a method of forming a liquid crystal alignment film comprising a process of coating a liquid crystal alignment agent onto a substrate, and then processing said alignment agent with dehydration/ring-closure reaction and free radical polymerization, wherein said liquid crystal alignment agent comprises a molecular compound containing at least 2 polymerizable maleamic acid groups (A), a polymer (B), and an organic solvent (C); wherein the polymer (B) comprises at least one kind of polymer obtained from condensation polymerization, which is selected from the groups consisting of polyester, polyesterimide, polyamide-imide acid, polyamide-imide, polyamide acid ester, polyamide and polyimide series polymer.

Abstract: An ordered multilayer crystalline organic thin film structure is formed by depositing at least two layers of thin film crystalline organic materials successively wherein the at least two thin film layers are selected to have their surface energies within ±50% of each other, and preferably within ±15% of each other, whereby every thin film layer within the multilayer crystalline organic thin film structure exhibit a quasi-epitaxial relationship with the adjacent crystalline organic thin film.

Abstract: Disclosed herein is a method for producing display devices for forming deposited patterns conforming to pixels on a substrate by means of elongated evaporation sources and a deposition mask having regularly arranged apertures, the method including the steps of arranging the deposition mask and the substrate in such a way that the long sides of the apertures and pixels are parallel to the lengthwise direction of the evaporation sources irrespective of the direction in which the display panel regions are arranged within the substrate; and moving the substrate and the deposition mask relative to the evaporation sources, thereby forming the deposited patterns conforming to the pixels on the substrate.

Abstract: A film forming apparatus is provided with a processing chamber having a substrate holding table for holding a substrate to be processed inside the container; a gas material generation unit arranged outside the processing chamber, for generating a gas material by evaporating or sublimating a film forming source material including a metal; a gas material supply unit for supplying the processing chamber with the gas material; and a transport path for transporting the gas material to the gas material supply unit from the gas material generation unit. The film forming apparatus is characterized in that a metal-containing layer is formed on an organic layer including a light emitting layer on the target substrate.

Abstract: A method of producing a phosphor film includes performing a first treatment wherein a suspension, in which a plurality of first particles having a median diameter that is equal to or smaller than 1/10 of a median diameter of a plurality of phosphor particles is dispersed in a dispersion medium, is applied to a first phosphor particle layer having the plurality of phosphor particles previously provided on a base substance, and subsequently the dispersion medium in the suspension is vaporized, thereby obtaining a second phosphor particle layer in which the plurality of first particles have been arranged in a space between the mutually adjacent phosphor particles. A binding solution is applied to the second phosphor particle layer, and a dispersion medium or a solvent contained in the binding solution is vaporized to bind the plurality of phosphor particles.

Abstract: A dense cathode electrode layer having a step coverage is to be formed on an electron injection layer. The electron injection layer in which fine particles of an electron injection material is dispersed in an organic thin film having an electron transport property is formed by vapor co-depositing the electron transport material and the electron injection material; and a cathode electrode layer made of an alloy layer of MgAg is formed by a sputtering method. Since lower portions of the fine particles of the electron injection material dispersed in the surface of the organic thin film are buried in the organic thin film, the electron injection particles are not peeled off even if sputtering particles collide with the electron injection particles, and the upper portions are in contact with the cathode electrode layer formed by sputtering particles.

Abstract: The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.

Abstract: An organic-inorganic lighting device and a method for fabricating the same is disclosed. Firstly, a conductive substrate is provided, and an inorganic conducting film layer and a seed layer are formed in turn on the conductive substrate. Next, an array of micro and nano zinc oxide wire is formed on the seed layer by using properties of the seed layer. Finally, an electrode layer is formed on the array of micro and nano zinc oxide wire. The invention solves the problem of low mobility of electrons in inorganic materials.

Abstract: A display device includes an underlying layer formed over a substrate; an insulating layer formed over the substrate to expose the underlying layer; and an organic EL layer formed on the exposed portion of the underlying layer, wherein a thickness of the insulating layer is formed to a predetermined thickness to prevent defects in the organic EL layer that can occur in an edge portion of the exposed portion.

Abstract: Microencapsulated particles having improved resistance to moisture and extended release capabilities are produced by microencapsulating the particles in a film-forming, cross-linked, hydrolyzed polymer.

Abstract: A light extracting structure which can efficiently extract light emitted from a light-emitting layer. A capture layer is formed onto a first translucent material film formed on a substrate. A dispersion liquid obtained by dispersing particles into a dispersion medium is coated onto the capture layer. The dispersion medium is volatilized. A particle sediment layer is formed onto the capture layer. The particles in the lowest layer of the sediment layer are captured into the capture layer at a filling rate of 93% or more for the 2-dimensional closest packing. The non-captured particles are removed. An etching is performed by using the captured particles as a mask. Concave portions are formed in the first translucent material film. The particles remaining after the etching and the capture layer are removed. Thereafter, the concave portions are embedded with a second translucent material having a different refractive index.

Abstract: A method for treating a metal surface to reduce corrosion thereon and/or to increase the reflectance of the treated surface, the method comprising a) plating a metal surface with an electroless nickel plating solution; and thereafter b) immersion plating silver on the electroless nickel plated surface, whereby corrosion of the metal surface is substantially prevented and/or the reflectance of the silver plated surface is substantially improved. The treating method is useful for increasing the solderability of the metal surface, for example, in electronic packaging applications.

Abstract: An organic electroluminescent device comprises an anode; a cathode; a first electroluminescent layer between the anode and the cathode comprising an electron transporting material; and a second electroluminescent layer between the first electroluminescent layer and the anode. The second electroluminescent layer comprises a hole transporting material and an electroluminescent electron trapping material. The first electroluminescent layer may comprises a polymer having an electron transporting material and an electroluminescent material, and may include an optionally electroluminescent hole-transporting material. The electron transporting material and one or both of the hole transporting material of the first electroluminescent layer and the electroluminescent material of the first electroluminescent layer are part of the same molecule or polymer. Preferably, the electron transporting material comprises a plurality of adjacent arylene repeat units.

Abstract: The present invention provides a light-emitting device comprising a supporting substrate and a plurality of organic EL elements provided on the supporting substrate to be connected in series, in which each of the organic EL elements comprises a pair of electrodes and a light-emitting layer placed between the electrodes, the light-emitting layer extends in the prescribed array direction across the plurality of organic EL elements, each electrode out of the pair of electrodes comprises an extended portion that extends, as viewed from one thickness direction of the supporting substrate, protruding from the light-emitting layer in a width direction vertical to both of the thickness direction of the supporting substrate and the array direction, and one electrode out of the pair of electrodes further comprises a connecting portion that extends from the extended portion in the array direction to the other electrode of the organic EL element neighboring in the array direction so as to be connected to the other electr

Abstract: An organic/inorganic white lighting device is disclosed. The organic/inorganic white lighting device includes an anode, an organic/inorganic lighting layer, and a cathode. The organic/inorganic lighting layer is disposed between the anode and the cathode. The organic/inorganic lighting layer includes organic material and an inorganic micro/nano structure of Zinc Oxide (ZnO), wherein the organic material is capable of emitting blue light, the inorganic micro/nano structure of Zinc Oxide is capable of emitting green-yellow light, and the blue light and green-yellow light are mixed for generating white light.

Abstract: An object is to provide a manufacturing method of a light-emitting device including an organic compound layer, in which a desired organic compound layer is easily formed using a plurality of evaporation materials. A first organic compound layer containing a plurality of evaporation materials is formed over a first substrate. The first organic compound layer is formed using a mixture formed by mixture of the plurality of evaporation materials in advance. A second substrate is placed at a position facing the first substrate so as to face the first organic compound layer provided for the first substrate. The first organic compound layer as an evaporation source is heated to be vaporized and a desired second organic compound layer is formed over the second substrate placed so as to face the first substrate. Accordingly, a light-emitting device is manufactured.

Abstract: An organic electronic device includes: a pair of electrodes, an organic film layer containing an organic substance having a benzothiadiazole skeleton, a metal oxide layer provided on the organic film layer by vacuum vapor deposition, and an interface formed between the pair of electrodes out of the organic film layer and the metal oxide layer.

Abstract: A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.

Abstract: A method of forming a film consisted of an organic compound material at low cost using an organic compound material having the high luminescence efficiency is provided. The present invention is characterized by the fact that a layer containing an organic compound is formed on the substrate under the inactive gas atmosphere by spreading the colloidal solution (referred to as sol) in which an aggregate of organic compound is dispersed. Noted that in the present invention, an organic compound may be particulate that several pieces of organic compound is aggregated in the liquid, or may be an organic compound partially dissolved in the liquid. Moreover, according to the present invention, a metal thin film is formed using the colloidal solution in which a metal material having a small work function is dispersed on the layer containing an organic compound by a coat method and made it a cathode or one portion of a cathode.

Abstract: Droplets of a liquid are ejected through a plurality of nozzles to a plurality of coating regions on a substrate based on nozzle information including the ejection amount of a droplet of the liquid ejected through each nozzle. According to arrangement information for disposing the liquid, a plurality of droplet groups are disposed in each coating region while the plurality of nozzles and the substrate are scanned for relative movement. A calculation is performed according to the nozzle information and the arrangement information. Adjustment amount is calculated so that the assigned adjustment amounts vary from one droplet group to another. Driving signals, which drive selected nozzles, are set so that combinations of the driving signals give coating amounts that have taken the assigned adjustment amounts into account.

Abstract: Provided is a method of fabricating a substrate where patterns are formed, the method including: preparing a solution in which a plurality of oxide beads are dispersed; forming patterns on a substrate; installing a provisional structure in an upper portion of the substrate so that a micro-channel is formed on the substrate; injecting the solution in which the oxide beads are dispersed, into the micro-channel and fixing the oxide beads at the substrate; and thermally processing the substrate. A plurality of low-priced oxide beads can be patterned on a substrate to have a desired shape so that damages can be prevented from occurring in the substrate during dry etching, and an etching process is not performed so that a yield of a device is not reduced and mass production of the device increases.