Measuring, Testing, Or Indicating Patents (Class 427/8)
  • Patent number: 11273461
    Abstract: A device for intermittently applying a flowable substance to a substrate includes an applicator nozzle for applying the flowable substance to the substrate, a tank for holding the flowable substance, a pump for delivering the substance, wherein the pump is actively connected to the tank, and further including an actuator actively connected to the pump and transferred into two positions, in a first position the actuator conducts the substance to the applicator nozzle, and in a second position the actuator blocks the feed to the applicator nozzle, and further including a control device for activating the actuator and for regulating the speed of the pump. A method for applying the substance using the device is also provided.
    Type: Grant
    Filed: March 17, 2019
    Date of Patent: March 15, 2022
    Assignee: ROBATECH AG
    Inventors: Micha Schären, Claudio Hofer, Hanspeter Felix
  • Patent number: 11264266
    Abstract: A substrate processing method is implemented in a substrate processing apparatus including a processing chamber, a turntable on which a substrate is placed inside the processing chamber, and first and second gas supplies that supply first and second gases, respectively. The substrate processing method deposits a film, generated by a reaction between the first gas and the second gas, on the substrate in a first state where the substrate rotates and the turntable undergoes a clockwise orbital rotation around a rotating shaft so that the substrate passes through a region supplied with the first gas and thereafter passes through a region supplied with the second gas, and deposits the film on the substrate in a second state where the substrate rotates and the turntable undergoes a counterclockwise orbital rotation.
    Type: Grant
    Filed: January 7, 2020
    Date of Patent: March 1, 2022
    Assignee: Tokyo Electron Limited
    Inventors: Hitoshi Kato, Yuji Nishino
  • Patent number: 11248294
    Abstract: A substrate processing apparatus includes: a mounting stand for mounting a substrate thereon; a support rod for supporting the mounting stand from below; a revolution mechanism provided below the mounting stand and for supporting the support rod to revolve the mounting stand; a heating part provided between the mounting stand and the revolution mechanism as seen in a height direction and for heating a revolution region of the mounting stand; a heat transfer plate provided between the heating part and the revolution region and for radiating a heat generated from the heating part to the revolution region; and a processing gas supply part for supplying a processing gas to the revolution region. Each of the heating part and the heat transfer plate is divided into a center side and an outer side of the processing container via a gap so as to form a movement path of the support rod.
    Type: Grant
    Filed: May 10, 2018
    Date of Patent: February 15, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Hitoshi Kato
  • Patent number: 11244820
    Abstract: There is provided a substrate processing apparatus including: a rotatable holding part configured to rotate a substrate while holding the substrate; a liquid supply part configured to supply a processing liquid to a peripheral edge portion of the substrate held by the rotatable holding part; a sensor configured to detect a temperature distribution at the peripheral edge portion; and a controller configured to execute an operation of detecting a boundary portion between a region of the peripheral edge portion to which the processing liquid adheres and a region of the peripheral edge portion to which the processing liquid does not adhere, based on the temperature distribution.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: February 8, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Yoichi Tokunaga
  • Patent number: 11203030
    Abstract: The disclosure concerns a coating method and a corresponding coating device for coating components with a nozzle applicator with several nozzles, in particular for painting motor vehicle body components. The disclosure provides that the nozzle applicator is flexibly controlled during the coating method.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: December 21, 2021
    Assignee: Dürr Systems AG
    Inventors: Hans-Georg Fritz, Benjamin Wöhr, Marcus Kleiner, Moritz Bubek, Timo Beyl, Frank Herre, Steffen Sotzny
  • Patent number: 11192131
    Abstract: The disclosure relates to a coating method for coating a component with a coating agent, comprising the following steps: moving an application device over a component surface of the component to be coated, delivering a coating agent jet (9) from the application device to the component surface that is to be coated, defining switching points on the component surface for initiating a switching action, in particular for switching on or switching off a coating agent jet, and performing the switching action when one of the switching points is reached. The disclosure provides the following steps: marking the switching points on the component surface by generating a switching marking on the component surface at the individual switching points, detecting the switching markings corresponding to the individual switching points during movement of the application device, and performing the switching actions when the switching markings are detected on the component surface.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: December 7, 2021
    Assignee: Dürr Systems AG
    Inventors: Hans-Georg Fritz, Benjamin Wöhr, Marcus Kleiner, Moritz Bubek
  • Patent number: 11173501
    Abstract: Methods and systems for coating with shear and moisture sensitive materials are disclosed. A method of coating a product includes filling an inner bellows chamber of a bellows, which is provided within and isolated from an outer bellows chamber of a tank, with a predetermined amount of the coating material. The method of coating the product further includes supplying a pressurized material to the outer bellows chamber to pressurize the coating material within the inner bellows chamber to an operating pressure, and supplying the coating material within the inner bellows chamber to a spray gun at the operating pressure. The method of coating also includes determining that a measured actual pressure is within a predetermined control range of the target pressure and subsequently coating the product by spraying the product with the coating material from the spray gun.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: November 16, 2021
    Assignee: Nordson Corporation
    Inventors: John Roos, Todd Frenk, Robert Sims, Benjamin S. Price
  • Patent number: 11177447
    Abstract: A method for manufacturing a flexible display includes forming a coating film. Forming the coating film includes depositing a high rigidity material layer on a substrate and forming a transfer layer on the high rigidity material layer. The coating film is bonded to a display surface of a display panel by the transfer layer. The substrate is removed after the coating film is bonded to the display surface of the display panel.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: November 16, 2021
    Assignee: ASUSTEK COMPUTER INC.
    Inventors: Fei-Lin Yang, Bin-Yi Lin, Yang-Po Chiu
  • Patent number: 11155923
    Abstract: There is provided a gas supply device for vaporizing a raw material inside a raw material container and supplying a raw material gas into a processing vessel together with a carrier gas, including: a mass flow controller connected to an upstream side of the raw material container and configured to control a flow rate of the carrier gas; a flow meter connected to a downstream side of the raw material container; and a control part configured to perform a control so as not to supply the raw material gas into the processing vessel until a detection value of the flow meter with respect to the carrier gas controlled to have a constant flow rate by the mass flow controller is stabilized after replacing the raw material container.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: October 26, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Katsumasa Yamaguchi, Kensaku Narushima, Hironori Yagi
  • Patent number: 11121008
    Abstract: A liquid of a hydrophobizing agent is supplied to a surface of a substrate to form a liquid film of the hydrophobizing agent that covers an entire surface region of the substrate. Thereafter, a liquid amount of the hydrophobizing agent on the substrate is decreased while maintaining a state in which the entire surface region of the substrate is covered with the liquid film of the hydrophobizing agent. Thereafter, the liquid of the hydrophobizing agent on the substrate is replaced with a liquid of the first organic solvent by supplying the liquid of the first organic solvent to the surface of the substrate covered with the liquid film of the hydrophobizing agent in a state in which the liquid amount of the hydrophobizing agent on the substrate has decreased. Thereafter, the substrate is dried.
    Type: Grant
    Filed: August 31, 2018
    Date of Patent: September 14, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventors: Takayoshi Tanaka, Akira Oato
  • Patent number: 11087961
    Abstract: A quartz structure includes a protective layer comprising yttrium oxide. The quartz structure may be fabricated by: (a) receiving a quartz structure; and (b) coating the quartz structure with a protective layer comprising yttrium oxide to form a part to be used in the plasma reactor. The part has a size and shape adapted for forming a window or injector in a plasma reactor. The protective layer does not substantially change the size or shape of the quartz structure. The part may be installed in the plasma reactor at a location where, during operation, a plasma will contact or be proximate to the part.
    Type: Grant
    Filed: March 2, 2018
    Date of Patent: August 10, 2021
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Lin Xu, Robin Koshy, John E. Daugherty, Satish Srinivasan, David Wetzel
  • Patent number: 11064570
    Abstract: Provided is a cooking appliance which includes a concentration sensor for detecting a concentration of a reference substance in which proportional amounts of ingredients change in accordance with progress in cooking an object to be heated; a control unit for determining a cooked state of the object to be heated based on the detected concentration of the reference substance; and a communication unit for transmitting, to an external device which is connected to a home network, information which indicates the cooked state of the object to be heated.
    Type: Grant
    Filed: December 17, 2015
    Date of Patent: July 13, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Boo-Keun Yoon, Jong Hee Han
  • Patent number: 11054403
    Abstract: Methods comprising the steps of contacting a surface with a liquid composition comprising a cleaning agent, an adhesion promoter, and at least one dye, the surface having a first surface contamination; transitioning at least one portion of the surface in the first surface contamination state to a second surface contamination state and simultaneously distributing the at least one dye and at least one adhesion promoter on the surface associated with the second surface contamination state, the second surface contamination state having reduced or eliminated surface contamination, the transitioning step simultaneously cleaning and preparing the at least one portion of the surface for adhesion to another material; and identifying remaining surface in the first surface contamination state, and compositions adapted for the method thereof.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: July 6, 2021
    Assignee: The Boeing Company
    Inventors: Binil Itty Ipe Kandapallil, Carissa Ann Pajel, Dion Paul Coleman, Darrin Michael Hansen, Judith A. Werner
  • Patent number: 11024372
    Abstract: Methods, systems, and devices for operating memory cell(s) are described. A resistance of a storage element included in a memory cell may be programmed by applying a voltage to the memory cell that causes ion movement within the storage element, where the storage element remains in a single phase and has different resistivity based on a location of the ions within the storage element. In some cases, multiple of such storage elements may be included in a memory cell, where ions within the storage elements respond differently to electric pulses, and a non-binary logic value may be stored in the memory cell by applying a series of voltages or currents to the memory cell.
    Type: Grant
    Filed: August 13, 2018
    Date of Patent: June 1, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Mattia Boniardi, Agostino Pirovano, Innocenzo Tortorelli
  • Patent number: 11008190
    Abstract: A method for monitoring a machine element in a paper finishing machine (10). The machine element mounted for rotation machine elements (16-19) equipped with a sensor assembly (24) measuring force or pressure, and a counter-pair (15, 20, 33, 44) for said machine element. The machine element is made to rotate against the counter-pair, a measurement signal (25) is generated between the machine element and the counter-pair with the sensor assembly, and recording a reference cross-directional profile (21) of force or pressure generated. Condition monitoring (38) of vibration with the reference profile is by comparison of current signals with the reference so as to detect periodic variation (39.1, 39.2) in the cross-directional pressure profile, and producing visual information (37) from the analysis for monitoring. The invention also relates to a corresponding system, a rotating machine element for the method or the system, and a computer program product.
    Type: Grant
    Filed: February 24, 2017
    Date of Patent: May 18, 2021
    Assignee: VALMET TECHNOLOGIES OY
    Inventors: Tatu Pitkänen, Heikki Kettunen, Todd Vandenheuvel
  • Patent number: 10998244
    Abstract: Techniques herein include systems and methods for fine control of temperature distribution across a substrate. Such techniques can be used to provide uniform spatial temperature distribution, or a biased spatial temperature distribution to improve plasma processing of substrates and/or correct characteristics of a given substrate. Embodiments include a plasma processing system with temperature control. Temperature control systems herein include a primary heating mechanism to heat a substrate, and a secondary heating mechanism that precisely modifies spatial temperature distribution across a substrate being processed. At least one heating mechanism includes a digital projection system configured to project a pattern of electromagnetic radiation onto or into a substrate, or through the substrate and onto a substrate support assembly.
    Type: Grant
    Filed: October 18, 2018
    Date of Patent: May 4, 2021
    Assignee: Tokyo Electron Limited
    Inventor: Anton J. deVilliers
  • Patent number: 10981331
    Abstract: In one example, a fusing system for an additive manufacturing machine includes a first carriage carrying a layering device and a fusing lamp, and a second carriage carrying a fusing agent dispenser. The first carriage and the second carriage are movable back and forth over the work area along the same line of motion so that the first carriage follows the second carriage in one direction and the second carriage follows the first carriage in the other direction.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: April 20, 2021
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Arthur H. Barnes, Wesley R. Schalk, Matthew A. Shepherd
  • Patent number: 10953604
    Abstract: Apparatus for the additive production of three-dimensional objects by successive layerwise selective exposure and consequent successive layerwise selective solidification of construction material layers of a construction material that can be solidified by means of an energy beam, comprising: —an exposure device, which is configured in order to generate an energy beam for the successive layerwise selective exposure and consequent successive layerwise selective solidification of construction material layers of a construction material that can be solidified by means of the energy beam, and—a measuring device for measuring a temperature, wherein the measuring device is configured in order to measure a temperature at at least one measurement point, the measurement point being assigned to at least one three-dimensional object formed at least partially from solidified construction material or to at least one object section formed in the scope of the additive production of an object to be produced additively.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: March 23, 2021
    Assignee: CONCEPT LASER GMBH
    Inventors: Philipp Schumann, Ralf Hetzel, Tanja Traut
  • Patent number: 10906060
    Abstract: A coating device has: a die head that is provided with a supply port into which a coating slurry is supplied, a manifold that stores the coating slurry, and a slit that dispenses the coating slurry; a supply pipe that is connected to the supply port of the die head; and a cover plate that is provided in the supply port or the supply pipe and that reduces the flow rate of the coating slurry at the center of a cross-section that is orthogonal to the direction in which the coating slurry in the supply port or the supply pipe flows into the die head.
    Type: Grant
    Filed: October 4, 2019
    Date of Patent: February 2, 2021
    Assignee: Envision AESC Enerev Devices Ltd.
    Inventor: Masanori Hirai
  • Patent number: 10876227
    Abstract: A multi-composition fiber is provided including a primary fiber material and an elemental additive material deposited on grain boundaries between adjacent crystalline domains of the primary fiber material. A method of making a multi-composition fiber is also provided, which includes providing a precursor laden environment, and promoting fiber growth using laser heating. The precursor laden environment includes a primary precursor material and an elemental precursor material.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: December 29, 2020
    Assignee: FREE FORM FIBERS, LLC
    Inventors: Shay L. Harrison, Joseph Pegna, Erik G. Vaaler, Ram K. Goduguchinta, Kirk L. Williams, John L. Schneiter
  • Patent number: 10854686
    Abstract: A package structure and packing method for an organic electroluminescence element and an organic electroluminescence device are provided. The package structure for the organic electroluminescence element includes: a substrate, an organic electroluminescence element, and a quantum dot packaging layer. The organic electroluminescence element is disposed on the substrate, the quantum dot packaging layer is disposed on the substrate and the organic electroluminescence element, and consists of a quantum dot material.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: December 1, 2020
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Kai Wang, Yongliang Zhao
  • Patent number: 10825662
    Abstract: There is provided a method for driving a member provided in a processing chamber. The method includes irradiating to the member measurement light having a wavelength that penetrates the member, detecting intensity distribution of reflected light based on reflected light from an upper surface of the member and reflected light from a bottom surface of the member, calculating an optical path difference by applying Fourier transform to a spectrum indicating the intensity distribution, and determining a driving amount of the member based on the optical path difference. The method further includes driving the member based on the determined driving amount.
    Type: Grant
    Filed: May 14, 2019
    Date of Patent: November 3, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Rumiko Moriya, Takanori Banse, Suguru Sato, Yuuji Akiduki, Takehiro Tanikawa
  • Patent number: 10825654
    Abstract: A measurement device includes a plurality of slits, a beam current measurement unit provided at a position away from the slits in a beam traveling direction, and a measurement control unit. The beam current measurement unit is configured to be capable of measuring a beam current at a plurality of measurement positions to be different positions in a first direction perpendicular to the beam traveling direction. The slits are disposed to be spaced apart in the first direction such that the first direction coincides with a slit width direction and are configured to be movable in the first direction. The measurement control unit acquires a plurality of beam current values measured at the plurality of measurement positions to be the different positions in the first direction with the beam current measurement unit while moving the slits in the first direction.
    Type: Grant
    Filed: February 7, 2019
    Date of Patent: November 3, 2020
    Assignee: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
    Inventors: Noriyasu Ido, Hiroyuki Kariya, Masahide Ooura
  • Patent number: 10816491
    Abstract: The disclosure is directed at a method and apparatus for integrated real-time monitoring and control of microstructure and/or geometry in thermal material processing (TMP) technologies. The method includes obtaining real-time thermal dynamic variables, such as, but not limited to the cooling rate, peak temperature and heating rate, and geometry of the thermal material process. These real-time thermal variables are then analyzed along with a thermal model to determine a microstructure/geometry model. This microstructure/geometry model can then be used to provide the real-time monitoring and control of a finished state for the material being processed by the thermal material processing procedure.
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: October 27, 2020
    Inventors: Amir Khajepour, Mohammad Hossein Farshidianfar, Adrian Gerlich
  • Patent number: 10807301
    Abstract: Method for manufacturing a mechatronic system comprising: a step of manufacturing a mechanical structure (SM) by three-dimensional printing by fused filament deposition of at least one first electrically insulating material (M1), and a step of manufacturing at least one electrical component (CE) in contact with at least one element of said mechanical structure and secured therewith; characterized in that said step of manufacturing at least one electrical component is implemented by three-dimensional printing by fused filament deposition of at least one second material (M2), conductive or resistive, directly in contact with said element of the mechanical structure. Apparatus for implementing such a method. Mechatronic system that can be manufactured by such a method.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: October 20, 2020
    Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITE PARIS-SUD
    Inventors: Mehdi Ammi, Florian Longnos
  • Patent number: 10786821
    Abstract: Methods and systems for coating with shear and moisture sensitive materials are disclosed. A method of coating a product includes filling an inner bellows chamber of a bellows, which is provided within and isolated from an outer bellows chamber of a tank, with a predetermined amount of the coating material. The method of coating the product further includes supplying a pressurized material to the outer bellows chamber to pressurize the coating material within the inner bellows chamber to an operating pressure, and supplying the coating material within the inner bellows chamber to a spray gun at the operating pressure. The method of coating also includes determining that a measured actual pressure is within a predetermined control range of the target pressure and subsequently coating the product by spraying the product with the coating material from the spray gun.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: September 29, 2020
    Assignee: Nordson Corporation
    Inventors: John Roos, Todd Frenk, Robert Sims, Benjamin S. Price
  • Patent number: 10773310
    Abstract: A method of additively manufacturing an article includes forming a first portion of the article by three-dimensional printing of a plurality of first layers from a first powder material cut having a first average particle size corresponding to a first feature resolution. The first layers have a first average layer thickness. The method also includes forming a second portion of the article by three-dimensional printing of a plurality of second layers from a second powder material cut having a second average particle size corresponding to a second feature resolution less than the first feature resolution. The second portion includes at least one feature. The second layers have a second average layer thickness less than the first average layer thickness. A three-dimensional printing system and an article formed from a powder material by three-dimensional printing are also disclosed.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: September 15, 2020
    Assignee: GENERAL ELECTRIC COMPANY
    Inventors: Srikanth Chandrudu Kottilingam, Prabhjot Singh
  • Patent number: 10754312
    Abstract: A cleaning process optimization device includes a machine learning device that learns a cleaning condition when cleaning an object to be cleaned. The machine learning device includes: a state observation unit that observes cleaning condition data indicating the cleaning condition, and contamination state data indicating a contamination state of the object to be cleaned measured before cleaning as a state variable representing a current state of environment; a determination data acquisition unit that acquires determination data indicating an adequacy determination result on accuracy of a contamination state of the object to be cleaned after cleaning; and a learning unit that learns the cleaning condition when cleaning the object to be cleaned in association with the contamination state data using the state variable and the determination data.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: August 25, 2020
    Assignee: FANUC CORPORATION
    Inventors: Chikara Tango, Masahiro Murota
  • Patent number: 10741794
    Abstract: An organic light emitting diode device and a manufacture method thereof, a display panel are provided. The organic light emitting diode device includes a plurality of pixels, each of the pixels includes at least two sub-pixels that are capable of generating light of different colors, and each of the sub-pixels includes a first electrode, a second electrode, and a light emitting layer between the first electrode and the second electrode; and each of the sub-pixels further includes a microcavity adjusting layer including pores, the microcavity adjusting layer is on a side of the first electrode that is far away from the light emitting layer, and a porosity and an average aperture of the pores in the microcavity adjusting layer of each of the sub-pixels that are capable of generating light of different colors are different.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: August 11, 2020
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yuanhui Guo, Yanni Liu
  • Patent number: 10695784
    Abstract: A coating apparatus for coating a component with a coating agent includes an applicator for delivering at least one coating agent jet of the coating agent to the component. The coating apparatus includes an intercepting device which in an active position intercepts the at least one coating agent jet between the applicator and the component so that the at least one coating agent jet does not strike the component.
    Type: Grant
    Filed: November 16, 2016
    Date of Patent: June 30, 2020
    Assignee: Dürr Systems AG
    Inventors: Hans-Georg Fritz, Benjamin Wöhr, Marcus Kleiner, Moritz Bubek
  • Patent number: 10679076
    Abstract: A projection pattern is projected onto an object from a projection point of a distance sensor. The projection pattern is created by a plurality of beams of light projected from the projection point. The plurality of beams creates a plurality of projection artifacts that is arranged on the surface of the object. A layout of the plurality of projection artifacts depends on a positional relationship between the projection point and an image capturing device of the distance sensor. At least one parameter that defines the positional relationship between the projection point and an image capturing device of the distance sensor is optimized, prior to projecting the pattern, to minimize overlap of trajectories associated with the projection artifacts. An image of the object, including at least a portion of the adjusted projection pattern, is captured. A distance from the distance sensor to the object is calculated using information from the image.
    Type: Grant
    Filed: October 18, 2018
    Date of Patent: June 9, 2020
    Assignee: Magik Eye Inc.
    Inventor: Akiteru Kimura
  • Patent number: 10665481
    Abstract: An upper processing liquid nozzle moves back and forth between a processing position above a substrate held on a spin chuck and a standby position outside a processing cup. Before a processing liquid is discharged from the upper processing liquid nozzle having moved to the processing position, a camera takes a discharge standard image of an imaging region including the tip of the upper processing liquid nozzle. Then, multiple monitor target images of the imaging region taken successively by the camera are compared sequentially to the discharge standard image to determine discharge of a processing liquid from the upper processing liquid nozzle. The discharge standard image is obtained for each process on a new target substrate. This eliminates influence of a substrate surface to appear as a background both of the monitor target image and the discharge standard image. Thus, discharge of a processing liquid can be detected reliably.
    Type: Grant
    Filed: July 19, 2018
    Date of Patent: May 26, 2020
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Hiroshi Sano, Hiroaki Kakuma
  • Patent number: 10655216
    Abstract: A pressure control method in a film forming apparatus having a plurality of incompletely partitioned processing regions in one vacuum container, includes a first adjustment step of adjusting an opening degree of an exhaust valve provided in each of the processing regions, on the basis of a target pressure and a target flow rate determined for each of the processing regions and learning information indicating a relationship between a flow rate, a pressure and an opening degree, and a second adjustment step of, after the first adjustment step, adjusting an opening degree of an exhaust valve provided in one of the processing regions, on the basis of a pressure in one of the processing regions.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: May 19, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Yuki Chida
  • Patent number: 10625501
    Abstract: When a wave shape is formed in a sheet of paper, a suppression of a reduction in recording quality that is caused by a shape of the paper is achieved, and thus, favorable recording quality is obtained.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: April 21, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Hikari Shomura, Kazunori Mori
  • Patent number: 10627836
    Abstract: A pumping apparatus includes a pump chamber, a piston, a motor, and a controller. The controller determines an imaginary terminal point by referring to a dispense command, theoretical information, and a current position of the piston. The controller corrects the imaginary terminal point to a target position by referring to a correction graph. The controller outputs a drive command to the motor for moving the piston from a start position to the target position.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: April 21, 2020
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Toru Momma, Hiroyuki Ogura, Masahito Kashiyama, Satoshi Yamamoto, Hiroyuki Takeuchi, Shoji Kirita, Junki Nishimura, Shogo Yoshida
  • Patent number: 10601027
    Abstract: A method of making an electrode includes the step of dispersing an active electrode material and a conductive additive in a solvent to create a mixed dispersion. The solvent has a surface tension less than 40 mN/m and an ozone forming potential of no more than 1.5 lbs. ozone/lb. solvent. A surface of a current collector is treated to raise the surface energy of the surface to at least the surface tension of the solvent or the mixed dispersion. The dispersed active electrode material and conductive additive are deposited on the current collector. The coated surface is heated to remove solvent from the coating.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: March 24, 2020
    Assignee: UT-BATTELLE, LLC
    Inventors: Zhijia Du, Claus Daniel, Jianlin Li, David L. Wood, III
  • Patent number: 10591347
    Abstract: To measure the mass per unit area of an applied layer in a layered film while preventing a measurement error from being caused by thickness unevenness, a per-unit-area-mass measuring device (30) includes a light projector (31a) configured to project light having a center wavelength of 405 nm, a light projector (31b) configured to project light having a center wavelength of 850 nm, light receivers (32a, 32b) configured to receive light having been transmitted through a separator (12), and a control section (33) configured to calculate the mass per unit area of a heat-resistant layer (4) on the basis of the respective transmitted-light intensities of the light having a center wavelength of 405 nm and the light having a center wavelength of 850 nm.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: March 17, 2020
    Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Takayuki Yamano, Takahiro Okugawa
  • Patent number: 10533918
    Abstract: The present invention is directed to a process, which can be used in the production of exhaust catalysts. In particular, the present process describes way of testing the leak-tightness of the coating equipment before a new coating campaign begins or during a running campaign.
    Type: Grant
    Filed: December 11, 2014
    Date of Patent: January 14, 2020
    Assignee: UMICORE AG & CO. KG
    Inventors: Stéphane Masson, Joachim Geiser, Wolfgang Hasselmann
  • Patent number: 10513656
    Abstract: A pre-polymer formulation comprising quantum dots and a precursor for a polymer having a free volume parameter VFH2/? with a value less than or equal to 0.03 cm3/g is disclosed. A pre-polymer formulation comprising quantum dots and a cyclohexylacrylate monomer is further disclosed. Also disclosed are a quantum dot composition including quantum dots dispersed in a polymer matrix, the quantum dot composition being prepared from a pre-polymer formulation comprising quantum dots and a precursor for a polymer having a free volume parameter VFH2/? with a value less than or equal to cm3/g; a method; and other products including a quantum dot composition described herein.
    Type: Grant
    Filed: September 8, 2015
    Date of Patent: December 24, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Robert J. Nick, Whitney Miller
  • Patent number: 10507483
    Abstract: A coating method for coating components, e.g. motor vehicle bodywork components in a painting installation, is provided. The coating method includes moving an application device over a component surface to be coated along a pre-determined coating path, and applying a coating medium stream onto the component surface by means of an application device. The coating medium stream is not rotationally symmetrical relative to its stream axis and therefore generates on the component surface an elongate spray pattern with a particular longitudinal direction. The method further includes rotation of the application device about the stream axis relative to the coating path during the movement of the application device so that the angular position of the longitudinal direction of the spray pattern relative to the path transverse direction changes along the coating path.
    Type: Grant
    Filed: November 4, 2015
    Date of Patent: December 17, 2019
    Assignee: DÜRR SYSTEMS AG
    Inventors: Hans-Georg Fritz, Benjamin Wöhr, Marcus Kleiner, Timo Beyl, Moritz Bubek
  • Patent number: 10350535
    Abstract: The invention relates to a spray arrangement having at least one return flow nozzle for injecting liquid into a process environment, having a storage tank for the liquid to be injected, at least one return flow nozzle, at least one feed line from the storage tank to the at least one return flow nozzle, at least one pump in the feed line, at least one return line from the return flow nozzle to the storage tank and at least one regulating valve for regulating a liquid quantity injected by the at least one return flow nozzle, wherein at least one further nozzle is provided, which is connected to the feed line by means of a controllable valve for enabling and shutting off a liquid feed.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: July 16, 2019
    Assignee: LECHLER GMBH
    Inventor: Thomas Zeeb
  • Patent number: 10295903
    Abstract: A substrate processing apparatus according to the present disclosure includes: a nozzle that ejects a processing liquid to a wafer; a force-feeding unit that force-feeds the processing liquid to the nozzle side; a liquid feeding pipeline that includes first and second valves and guides the processing liquid from the force-feeding unit to the nozzle; and a controller. The controller is configured to perform opening the first valve in a state where the second valve is closed and a pressure between the first and second valves is higher than a pressure between the force-feeding unit and the first valve, controlling the force-feeding unit to increase the pressure between the first and second valves that has been decreased by the opening of the first valve, and opening the second valve after the pressure between the first and second valves is decreased by the opening of the first valve.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: May 21, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Shinichi Hatakeyama, Masanobu Watanabe, Kouzo Nishi, Seiya Totsuka, Kentaro Yoshihara
  • Patent number: 10266941
    Abstract: A monomer vaporizing device and a method of controlling the same are disclosed. The monomer vaporizing device includes: a first vaporizer and a second vaporizer that receive a purge gas and vaporize a first monomer and a second monomer, respectively; a first flow pipe and a second flow pipe that are connected to the respective vaporizers and allow the first monomer and the second monomer, vaporized by the respective vaporizers, to flow therethrough; a transition tube that is connected to the first flow pipe and the second flow pipe and supplies at least one of the first monomer and the second monomer to a deposition chamber; and a control valve apparatus that regulates monomer flow into the deposition chamber. The device facilitates smooth and uninterrupted application of monomer to the interior of a deposition chamber.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: April 23, 2019
    Assignee: Samsung Display Co., Ltd.
    Inventors: Yong-Suk Lee, Myung-Soo Huh, Suk-Won Jung, Jeong-Ho Yi, Mi-Ra An
  • Patent number: 10269601
    Abstract: Embodiments presented herein provide techniques for controlling deposition processes in a process chamber based on monitoring contaminant gas levels in a chamber. Embodiments include generating a data model defining acceptable levels within the chamber for each of a plurality of gas types. Gas levels of the plurality of gas types within the chamber are monitored using one or more sensor devices within the chamber. Upon determining that at least one gas level within the chamber violates the acceptable level for the respective gas type within the data model, embodiments perform a corrective action for the chamber.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: April 23, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Shuo Julia Na, Patrick L. Smith, Ilias Iliopoulos, Songfu Jiang, Bo Zhang
  • Patent number: 10255997
    Abstract: Systems and methods of a medical analytics system are described herein. The medical analytics system can include a machine learning model for processing patient tissue images for either training the machine learning model or for clinical use, such as providing information for assisting a clinician with at least diagnosing a disease or condition of a patient. Implementations of the medical analytics system can further include a user interface that is configured to allow a user to interact with a patient image for assisting with diagnosing at least a part of the tissue captured in the patient image.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: April 9, 2019
    Assignee: Mindshare Medical, Inc.
    Inventors: Michael E. Calhoun, Samir Chowdhury, Ilya Goldberg
  • Patent number: 10246743
    Abstract: This disclosure provides a biochip comprising a plurality of wells. The biochip includes a membrane that is disposed in or adjacent to an individual well of the plurality of wells. The membrane comprises a nanopore, and the individual well comprises an electrode that detects a signal upon ionic flow through the pore in response to a species passing through or adjacent to the nanopore. The electrode can be a non-sacrificial electrode. A lipid bilayer can be formed over the plurality of wells using a bubble.
    Type: Grant
    Filed: December 20, 2016
    Date of Patent: April 2, 2019
    Assignee: GENIA TECHNOLOGIES, INC.
    Inventors: Randall W. Davis, Edward Shian Liu, Eric Takeshi Harada, Anne Aguirre, Andrew Trans, James Pollard, Cynthia Cech
  • Patent number: 10249476
    Abstract: A system for controlling an impedance of a radio frequency (RF) return path includes a matchbox further including a match circuitry. The system further includes an RF generator coupled to the matchbox to supply an RF supply signal to the matchbox via a first portion of an RF supply path. The RF generator is coupled to the matchbox to receive an RF return signal via a first portion of an RF return path. The system also includes a switch circuit and a plasma reactor coupled to the switch circuit via a second portion of the RF return path. The plasma reactor is coupled to the match circuitry via a second portion of the RF supply path. The system includes a controller coupled to the switch circuit, the controller configured to control the switch circuit based on a tune recipe to change an impedance of the RF return path.
    Type: Grant
    Filed: April 19, 2016
    Date of Patent: April 2, 2019
    Assignee: Lam Research Corporation
    Inventors: Alexei Marakhtanov, Rajinder Dhindsa, Ken Lucchesi, Luc Albarede
  • Patent number: 10201826
    Abstract: Disclosed is a liquid coating method. The method executes processes of: coating a coating liquid in a spiral form on a surface of a substrate by ejecting the coating liquid from the ejection nozzle while moving the ejection nozzle in a predetermined direction between the rotary axis and a peripheral edge of the substrate during rotation of the substrate; making a linear velocity at an ejection position of the coating liquid from the ejection nozzle substantially constant by reducing a number of rotations of the substrate as the ejection position is positioned closer to the peripheral edge of the substrate; and making an ejection flow rate of the coating liquid ejected from the ejection nozzle substantially constant by changing a gap between the ejection port of the ejection nozzle and the surface of the substrate based on a flow rate of the coating liquid before ejection from the ejection nozzle.
    Type: Grant
    Filed: June 3, 2015
    Date of Patent: February 12, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Katsunori Ichino, Takayuki Ishii, Kouzou Kawahara, Daisuke Simokawa, Kazuyuki Tashiro
  • Patent number: 10196737
    Abstract: On a vapor deposition target surface of a vapor deposition target substrate placed on a substrate tray in a vapor deposition device, display regions on which vapor deposition particles are to be deposited are arranged in alignment to be apart from each other in a direction parallel with a scanning direction, and the substrate tray includes a blocking part configured to block the vapor deposition particles to be deposited onto regions adjacent to the display regions in a direction parallel with the scanning direction. This prevents a degree of freedom in designing of the vapor deposition target substrate from being restricted even in performing scan vapor deposition.
    Type: Grant
    Filed: November 25, 2016
    Date of Patent: February 5, 2019
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Satoshi Inoue, Shinichi Kawato, Yuhki Kobayashi
  • Patent number: 10186685
    Abstract: The present invention relates to a method for manufacturing a light extraction substrate for an organic light emitting diode, a light extraction substrate for an organic light emitting diode, and an organic light emitting diode comprising same, and more specifically, to a method for manufacturing a light extraction substrate for an organic light emitting diode, a light extraction substrate for an organic light emitting diode, and an organic light emitting diode comprising same, capable of significantly increasing light extraction efficiency of the organic light emitting diode.
    Type: Grant
    Filed: December 18, 2015
    Date of Patent: January 22, 2019
    Assignee: Corning Precision Materials Co., Ltd.
    Inventor: Joo Young Lee