Abstract: A coating includes a nano-composite layer including a plurality of films. The films are stacked together one after another. Each film includes a zirconium-copper carbonitride layer and a zirconium carbonitride layer.

Abstract: A coating includes a titanium aluminum layer; a titanium aluminum nitride layer deposited on the titanium aluminum layer; a titanium aluminum carbon-nitride layer deposited on the titanium aluminum nitride layer; and a silicon carbon-nitride layer deposited on the titanium aluminum carbon-nitride layer.

Abstract: Provided is a glass article that improves the film strength of a photocatalyst film while maintaining the photocatalytic function and the reflection suppressing function of the photocatalyst film. The photocatalyst film on the glass sheet is formed to contain, in mass %, 50 to 82% of silicon oxide particles, 8 to 40% of titanium oxide particles, and 7 to 20% of a binder component composed of silicon oxide. The average particle diameter of the silicon oxide particles is set to at least 5 times the average particle diameter of the titanium oxide particles. The photocatalyst film is formed to have a structure such that some of the silicon oxide particles in the film serve as protruding silicon oxide particles that are not in contact with the glass sheet and that have their top portions protruding from the surrounding titanium oxide particles and being exposed on the surface of the film, while some of the titanium oxide particles are interposed between the glass sheet and the protruding silicon oxide particles.

Abstract: Lithium silicate glass ceramics and glasses containing at least 6.1 wt.-% ZrO2 are provided which can advantageously be applied to zirconium oxide ceramics in particular by pressing-on in the viscous state and forming a solid bond with the zirconium oxide ceramics.

Abstract: An antimicrobial substrate (glass, ceramic or metallic) coated on at least one of its surface with at least one mixed layer deposited by a sputtering under vacuum magnetically enhanced process is described. The layer comprising at least one antimicrobial agent mixed to binder material chosen amongst the metal oxides, oxynitrides, oxycarbides or nitrides. This substrate present antimicrobial properties, in particular bactericidal activity even when no thermal treatment has been applied. If a tempered and antimicrobial glass is required, the same co-sputtering process can be used, optionally an underlayer can be added. Antimicrobial properties are maintained even after a tempering process.

Abstract: A transparent conductive film for constructing a transparent electrode that is free from the generation of residue, etc. by etching with a weak acid (for example, organic acid). Further, there is provided a sputtering target for producing the transparent conductive film. In particular, there is provided a sputtering target composed of indium oxide and cerium oxide, characterized in that in the observation of crystal peaks by X-ray diffractometry, the presence of peaks ascribed to indium oxide and cerium oxide is observed, and that in the EPMA measurement, the diameter of cerium oxide particles dispersed in indium oxide is measured as being ?5 ?m. A transparent conductive film is formed by a sputtering technique with the use of this sputtering target. This transparent conductive film is substantially free from the generation of residue, etc. by etching with a weak acid (for example, organic acid).

Abstract: A heating apparatus 11A includes a susceptor having a heating face 12a of heating a semiconductor. The susceptor includes a plate shaped main body 13 and a surface corrosion resistant layer 14 including the heating face. The surface corrosion resistant layer 14 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.

Abstract: In order to obtain a ferroelectric thin film that is formed to have a predetermined thickness on a substrate, that have satisfactory crystallization and that achieves a high piezoelectric property, a method of manufacturing such a ferroelectric thin film and a method of manufacturing a piezoelectric element having such a ferroelectric thin film, when a dielectric material of a perovskite structure is formed into a film on the substrate, a predetermined amount of additive is mixed with PZT, and the concentration of the additive mixed is varied in the thickness direction of the thin film.

Abstract: Some aspects of the invention provide an oxide substrate having a flat surface at the atomic layer level, and suited to forming a thin film of a perovskite manganese oxide. One aspect of the invention provides a single-crystal oxide substrate 10 having a single-crystal supporting substrate 1 of (210)-oriented SrTiO3 and a single-crystal underlayer 2 of (LaAlO3)0.3-(SrAl0.5Ta0.5O3)0.7, which is LSAT, formed on the (210) plane surface of the supporting substrate. In another aspect of the present invention, the LSAT underlayer 2A is formed in an amorphous state. Other aspects of the invention are also disclosed.

Abstract: Certain example embodiments of this invention relate to articles including anticondensation and/or low-E coatings that are exposed to an external environment, and/or methods of making the same. In certain example embodiments, the anticondensation and/or low-E coatings may be survivable in an outside environment. The coatings also may have a sufficiently low sheet resistance and hemispherical emissivity such that the glass surface is more likely to retain heat from the interior area, thereby reducing (and sometimes completely eliminating) the presence condensation thereon. The articles of certain example embodiments may be, for example, skylights, vehicle windows or windshields, IG units, VIG units, refrigerator/freezer doors, and/or the like.

Abstract: A production method capable of producing ITO particles without using a solvent with a high boiling point as a solvent used in the producing step by a simple treatment method without through a heating process in an atmosphere which disadvantageously causes sintering among the ITO particles to coarsen the ITO particles. An ITO powder suitable for a coating material for a transparent electroconductive material, being produced by a first step of dissolving salt containing indium and salt containing tin into an organic solvent, then adding to this organic solvent, an organic solvent containing a basic precipitant, to thereby manufacture a mixture of a precursor containing indium and tin, and the organic solvent; and a second step of applying heat treatment to the mixture of the precursor containing indium and tin, and the organic solvent in a pressurizing vessel at 200° C. or more and 300° C. or less, to generate ITO particles.

Abstract: It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film. The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer with a (110) orientation, where 0.30?x?0.46 and 0.51?y?0.62.

Abstract: A solid solution-comprising ceramic article useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide, zirconium oxide, and aluminum oxide. In a first embodiment, the solid solution-comprising ceramic article is a solid, sintered body of the solid solution ceramic material. In a second embodiment, the solid solution-comprising article comprises a substrate underlying a solid solution-comprising coating.

Abstract: A dental block for producing a dental prosthesis comprises a green body including zirconia and having a chemical composition including increasing amounts of yttria through a thickness of the green body. The green body is substantially opaque with a substantially consistent optical characteristic of non-translucency with respect to visible light across the thickness, and is subsequently millable and sinterable to form the dental prosthesis with an optical characteristic of increasing translucency through a thickness of the dental prosthesis.

Abstract: In one aspect, coated cutting tools are described herein which, in some embodiments, can demonstrate improved wear resistance in one or more cutting applications. In some embodiments, a coated cutting tool described herein comprises a substrate and a coating adhered to the substrate, the coating comprising an inner layer deposited by physical vapor deposition and an outer deposited by physical vapor deposition over the inner layer.

Abstract: [Object] To provide a bismuth-substituted rare-earth iron garnet crystal film (RIG) which has an insertion loss of less than 0.6 dB and which can be produced in a high yield, as well as an optical isolator. [Solving means] Provided is a bismuth-substituted rare-earth iron garnet crystal film which is grown by liquid phase epitaxy on a non-magnetic garnet substrate represented by a chemical formula of Gd3(ScGa)5O12, wherein the RIG is represented by a chemical formula of Nd3-x-yGdxBiyFe5O12, and x and y satisfy 0.89×1.43 and 0.85?y?1.19. In contrast to conventional RIGs, the RIG represented by the chemical formula of Nd3-x-yGdxBiyFe5O12 of the present invention has an insertion loss of less than 0.6 dB and makes it possible to reduce the amount of heat generated because of absorption of light at wavelengths of about 1 ?m. Hence, the RIG has such a remarkable effect that the RIG can be used as a Faraday rotator used for an optical isolator in a high-power laser device for processing.

Abstract: A coating includes a zirconium yttrium carbon-nitride layer including a first surface and an opposite second surface, the atomic carbon content and the atomic nitrogen content in the zirconium yttrium carbon-nitride layer gradually increasing from the first surface to the second surface.

Abstract: A coating includes a titanium aluminum silicon carbon-nitride layer including a first surface and an opposite second surface. The atomic carbon content and/or the atomic nitrogen content in the titanium aluminum silicon carbon-nitride layer gradually increases from the first surface to the second surface.

Abstract: A method for forming a heterostructure includes forming a first perovskite crystal structure complex oxide material layer over a substrate to a first thickness. A second perovskite crystal structure oxygen deficient complex oxide oxygen getter material layer is formed upon the first perovskite crystal structure complex oxide material layer. When the second perovskite crystal structure oxygen deficient complex oxide oxygen getter material layer reaches a critical thickness that may approximate one-half to one times the first thickness, the first perovskite crystal structure complex oxide material layer spontaneously transforms into a first brownmillerite crystal structure complex oxide material layer, with an attendant transfer of substantially one-half oxygen atom per perovskite unit cell to the second perovskite crystal structure oxygen deficient complex oxide oxygen getter material layer, thus forming a second perovskite crystal structure oxygen enriched complex oxide oxygen getter material layer.

Abstract: Cutting tools and cutting inserts having a wear resistant coating on a substrate comprising a metal carbide particle and a binder. For certain applications, a cutting insert having a wear resistant coating comprising hafnium carbon nitride and a binder comprising ruthenium may provide a greater service life. The wear resistant coating comprising hafnium carbon nitride may have a thickness of from 1 to 10 microns. In another embodiment, the cutting tool comprises a cemented carbide substrate with a binder comprising at least one of iron, nickel and cobalt.

Abstract: The present invention relates to a cutting tool for metal machining with improved wear properties, comprising a cutting tool substrate of cemented carbide, cermet, ceramics or a super hard material, and a wear resistant coating, wherein the wear resistant coating comprises a PVD Ti—Si—C—N layer with a compositional gradient, and a method of making thereof.

Abstract: The present invention discloses a multi-layer hard film for an indexable insert. The multi-layer hard film for the indexable insert provided by the present invention is formed by sequentially depositing a base layer, an intermediate layer and a top layer with different composition ratios and film structures individually on the indexable insert, thus minimizing a delamination and tool wear which may occur in high speed machining.

Abstract: The present invention relates to a cutting tool insert, solid end mill, or drill, comprising a substrate and a coating. The coating is composed of one or more layers of refractory compounds of which at least one layer comprises a h-Me1Me2X phase, where Me1 is one or several of the elements V, Cr, Nb, and Ta and Me2 is one or several of the elements Ti, Zr, Hf, Al, and Si and X is one or several of the elements N, C, O or B. The ratio R=(at-% X)/(at-% Me1+at-% Me2) of the h-MelMe2X phase is between 0.5 and 1.0, preferably between 0.8 and 1.0 and X contains less than 30 at-% of O+B. This invention is particularly useful in metal cutting applications where the chip thickness is small and the work material is hard e.g. copy milling using solid end mills, insert milling cutters or drilling of hardened steels.

Abstract: A target for sputtering or a tablet for ion plating, which enables to attain high rate film-formation and a nodule-less, an oxide sintered body suitable for obtaining the same and a production method therefor, and a transparent conductive film having low absorption of blue light and low specific resistance, obtained by using the same. It is provided by an oxide sintered body having indium and gallium as an oxide, characterized in that an In2O3 phase with a bixbyite-type structure forms a major crystal phase, and a GaInO3 phase of a ?-Ga2O3-type structure, or GaInO3 phase and a (Ga,In)2O3 phase is finely dispersed therein, as a crystal grain having an average particle diameter of equal to or smaller than 5 ?m, and a content of gallium is equal to or higher than 10% by atom and below 35% by atom as atom number ratio of Ga/(In+Ga) or the like.

Abstract: A replaceable chamber element for use in a plasma processing system, such as a plasma etching system, is described. The replaceable chamber element includes a chamber component configured to be exposed to plasma in a plasma processing system, wherein the chamber component is fabricated of a ferroelectric material.

Abstract: A dielectric material is provided. The dielectric material includes at least one layer of a substantially continuous phase material. The material is selected from the group consisting of an organic, organometallic, or combination thereof in which the substantially continuous phase material has delocalized electrons.

Abstract: A transparent dielectric composition comprising tin, oxygen and one of aluminum or magnesium with preferably higher than 15% by weight of aluminum or magnesium offers improved thermal stability over tin oxide with respect to appearance and optical properties under high temperature processes. For example, upon a heat treatment at temperatures higher than 500 C, changes in color and index of refraction of the present transparent dielectric composition are noticeably less than those of tin oxide films of comparable thickness. The transparent dielectric composition can be used in high transmittance, low emissivity coated panels, providing thermal stability so that there are no significant changes in the coating optical and structural properties, such as visible transmission, IR reflectance, microscopic morphological properties, color appearance, and haze characteristics, of the as-coated and heated treated products.

Abstract: An organic EL element includes a transparent substrate; a first electrode; an organic light emitting layer formed on the first electrode; and a second electrode formed on the organic light emitting layer, wherein a scattering layer including a base material made of glass and scattering substances dispersed in the base material is provided on the transparent substrate, and a light extraction assistance layer is provided between the scattering layer and the first electrode, the light extraction assistance layer being made of an inorganic material other than glass.

Abstract: The invention relates to a cutting tool for the machining of wood or a wood-based material, in particular a wood composite material, or a plastic, wherein a layer system for the formation of a surface coating is present on a surface of a cutting edge of the cutting tool. An outermost surface layer of the layer system is formed from a composition of the form [Cr1-xOx]zXaCbNc with 0.05<x<0.75 and 0<z?1, 0?a<1, 0?b<1, 0?c<1 and z+a+b+c=1 and X being an element from the group of the chemical elements consisting of Si, B, Al, Mn, Fe, Co, Ni, Cu, Sc, Y, La, Th, the elements of the group of the lanthanides and the elements of the group IIa of the periodic system of the elements. The invention further relates to a method for the manufacture of a workpiece.

Abstract: The coating system comprises: at least one layer of type A, a layer of type A substantially consisting of (AlyCr1-y)X, wherein X depicts one of the group consisting of N, CN, BN, NO, CNO, CBN, BNO and CNBO, y describing the stoichiometric composition of the metallic phase fraction; and at least one layer of type B, a layer of type B substantially consisting of (AluCr1-u-v-wSivMew)X, wherein X depicts one of the group consisting of N, CN, BN, NO, CNO, CBN, BNO or CNBO, and wherein Me depicts one of the group consisting of W, Nb, Mo and Ta or a mixture of two or more of the constituents of that group, u, v and w describing the stoichiometric composition of the metallic phase fraction. A thickness ratio of said layer of type A to said layer of type B is higher than 1. The workpiece comprises such a coating system. Through this, an excellent wear-protection is provided, and the coating system and workpieces can be used for a broad range of different applications.

Abstract: Disclosed herein is a surface renewable iridium oxide-glass or ceramic composite hydrogen ion electrode and, more particularly, a surface renewable iridium oxide-glass or ceramic composite hydrogen ion electrode, which has a long life due to its excellent physical strength, pH dependency approximate to a theoretical value (59 mV/pH unit), and high surface renewability, and a method of manufacturing the same. The iridium oxide composite hydrogen ion electrode according to the present invention is effective in that, when the electrode is contaminated or inactivated, the surface of the electrode can be regenerated through a simple grinding process because the electrode has high surface renewability, unlike conventional electrodes.

Abstract: A transparent conductive multilayer body of the invention comprises a transparent film substrate with a thickness of 2 to 120 ?m; a first transparent dielectric thin film, a second transparent dielectric thin film and a transparent conductive thin film laminated in this order on one side of the transparent film substrate; and a transparent substrate bonded to the other side of the film substrate through a transparent pressure-sensitive adhesive layer, wherein the second dielectric thin film is made of an inorganic material or a mixture of an organic material and an inorganic material, and the conductive thin film contains a crystalline material in which the content of crystal particles whose maximum particle sizes are at most 300 nm is higher than 50% by area. Such a transparent conductive multilayer body fully satisfies the pen input bending durability for a touch panel.

Abstract: Cutting tools and cutting inserts having a wear resistant coating on a substrate comprising a metal carbide particle and a binder. For certain applications, a cutting insert having a wear resistant coating comprising hafnium carbon nitride and a binder comprising ruthenium may provide a greater service life. The wear resistant coating comprising hafnium carbon nitride may have a thickness of from 1 to 10 microns. In another embodiment, the cutting tool comprises a cemented carbide substrate with a binder comprising at least one of iron, nickel and cobalt.

Abstract: A sintered cubic boron nitride tool can perform stable machining without causing any defect for a long lifetime even under a high-load cutting condition and a high-efficiency cutting condition.

Abstract: A treated refractory material includes a porous refractory material having one or more protective materials disposed within pores of the refractory material. Methods of preparing the treated refractory material are also provided. The treated refractory material provides protection from the penetration of slag and extends the service life of the refractory material.

Abstract: In order to provide a white hard decorative member being remarkably enhanced in scratch resistance and abrasion resistance and having a high-quality color impression, and furthermore supply a product capable of freely controlling the color tone, corrosion resistance performance, and etching performance, the white hard decorative member includes a base material having thereon an alloy adherence layer having a high adherence effect, an alloy gradient adherence layer in which the reaction gas content is gradually increased, an abrasion-resistant layer having high hardness, and an alloy color-up gradient layer in which the reaction gas content is gradually decreased, which are formed by using a film of an alloy combining a metal having a high adherence effect to a metal and high brightness, a metal having high film hardness and high corrosion resistance, and a metal for enhancing the corrosion performance.

Abstract: The invention provides for a sorbent composition comprising Fe(IV), Fe(V), Fe(VI), and/or a mixture of thereof. (“the ferrate compound”), wherein upon exposure to CO2 and moisture, the sorbent composition absorbs CO2 and co-generates O2, and materials, systems and methods of using this sorbent composition.

Abstract: A coated article has a substrate and a coating scheme, which has a PVD coating region. The PVD coating region contains aluminum, yttrium, nitrogen and at least one element selected from the group of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten and silicon. The sum of the aluminum and yttrium contents is between about 3 atomic percent and about 55 atomic percent of the sum of aluminum, yttrium and the other elements. The yttrium content is between about 0.5 atomic percent and about 5 atomic percent of the sum of aluminum, yttrium and the other elements. There is also a method of making the coated article that includes steps of providing the substrate and depositing the above coating scheme with the PVD coating region.

Abstract: A member covered with a hard coating having good wear resistance, a tool using the member, and a target for forming the hard coating are provided. A hard-coating-coated member has a hard coating on a substrate, in which the hard coating has a composition of (TiaCrbAlcSidYeRf)(CyNz), the R being at least one element selected from Ho, Sm, Dy and La, and when the subscripts a, b, c, d, e, f, y and z denote atomic ratios respectively, 0.05?a?0.3, 0.05?b?0.3, 0.4?c?0.65, 0?d?0.05, 0?e?0.05, 0.005?f?0.05, a+b+c+d+e+f=1, 0?y?0.3, 0.7?z?1, and y+z=1 are satisfied.

Abstract: There is provided a hard film excellent in wear resistance. The hard film in accordance with the present invention includes (TiaCrbAlcLd)(BxCyNz) in terms of composition, in which the L is at least one of Si and Y, and the a, b, c, d, x, y, and z each denote the atomic ratio, and satisfy: 0.1?a<0.3; 0.3<b<0.6; 0.2?c<0.35; 0.01?d<0.1; a+b+c+d=1; x?0.1; y?0.1; 0.8?z?1; and x+y+z=1.

Abstract: A composite article includes a substrate, at least one protective layer on the substrate and an intermediate layer between the at least one protective layer and the substrate. The intermediate layer includes dense silicon oxycarbide.

Abstract: A coated ceramic cutting insert for removing material from a workpiece, as well as a method for making the same, that includes a ceramic substrate with a rake surface and at least one flank surface wherein a cutting edge is at the juncture therebetween. A wear-resistant coating scheme that includes an alumina-containing base coating layer region, which has at least one exposed alumina coating layer, deposited by chemical vapor deposition on the substantially all of the surfaces of the ceramic substrate that experience wear during removal of material from the workpiece. The exposed alumina coating layer exhibits a blasted stress condition ranging between about 50 MPa (tensile stress) and about ?2 GPa (compressive) as measured by XRD using the Psi tilt method and the (024) reflection of alumina. The exposed alumina coating layer is the result of wet blasting a titanium-containing outer coating layer region from the surface of the alumina-containing base coating layer region.

Abstract: [Object] To provide an optical recording layer that is capable of controlling a reflectance and a transmittance of each recording layer and obtaining good recording properties in each recording layer [Solving Means] An optical recording medium 10 includes a substrate 11 and two or more layers of recording layers 121, 122, and 123 that contain Pd, O, and M (M is one or more elements of Zn, Al, In, and Sn), O is contained in an amount greater than a stoichiometric composition thereof when M is completely oxidized (into ZnO, Al2O3, In2O3, and SnO2), and in a case where a recording layer is an nth recording layer of the two or more layers of recording layers 121, 122, and 123 as counted from an opposite side of an incident side of recording light, a Pd content therein is less than that in an n?1th recording layer.

Abstract: Provided is an electroconductive polymer composition with a good film forming property. Also, provided is an clectroconductive polymer material with a high electroconductivity and a high transparency as well as an electroconductive substrate having the electroconductive polymer material on a substrate, and an electrode. Further, provided is an electronic device having the electrode as well as a solid electrolytic capacitor with a high capacitance and a low ESR. Disclosed is an electroconductive polymer composition, containing an electroconductive polymer in which a dopant is doped, a water-soluble polymer resin, and a solvent which contains water and an organic solvent whose dielectric constant is higher than that of water.

Abstract: The invention relates to a layer system for the formation of a surface layer on a surface of a substrate, in particular on the surface of a tool, wherein the layer system includes at least one first hard layer of the composition (MoSipAYq)?(NrCsOt)? with (o+p+q)=?, (r+s+t)=?, and (?+?)=100, wherein 40???60 and wherein M is at least one metal of the group of the chemical elements consisting of Al and the elements of the secondary groups IVb, Vb, VIb of the periodic system of elements. In accordance with the invention the component AY is at least one element of the group of the chemical elements consisting of Mn, Fe, Co, Ni, Cu and the elements of the secondary group IIIB and the elements of the main group IA, IIA and IIIA and the elements of the group of the lanthanoids of the periodic system of chemical elements, with AY preferably additionally containing boron.

Abstract: A composite article includes a substrate and a protective layer disposed on the substrate. The protective layer has a silicon-aluminum-carbon-nitrogen solid solution composition and microstructure.

Abstract: The invention relates to a transparent glass substrate, associated with a transparent electro-conductive layer capable of constituting an electrode of a photovoltaic cell and composed of a doped oxide, characterized by the interposition, between the glass substrate and the transparent electroconductive layer, of a mixed layer of one or more first nitride(s) or oxynitride(s), or oxide(s) or oxycarbide(s) having good adhesive properties with glass, and one or more second nitride(s) or oxynitride(s) or oxide(s) or oxycarbide(s) capable of constituting, possibly in the doped state, a transparent electroconductive layer; a method for producing this substrate; a photovoltaic cell, a tempered and/or curved glass, a shaped heating glass, a plasma screen and a flat lamp electrode having this substrate.

Abstract: An oxide film, an oxide film coated material and a method for forming the oxide film, which oxide film is more excellent in wear resistance than existing aluminum oxide-based oxide films are provided. The oxide film of the invention is an oxide film consisting of (Zr1-a-b-cAlaMgbYc) (O1-xNx), characterized in that the following formulas (1)-(5) are satisfied (first invention) 0?a?0.7??formula (1) 0?b?0.15??formula (2) 0?c?0.15??formula (3) 0<b+c??formula (4) 0?x?0.5??formula (5) (wherein a represents an atomic ratio of Al, b represents an atomic ratio of Mg, c represents an atomic ratio of Y, 1-a-b-c represents an atomic ratio of Zr, x represents atomic ratio of N, and 1-x represents an atomic ratio of O.

Abstract: The invention provides methods for the application of active materials onto active surfaces useful in organic electronic devices. The methods of the invention include selecting a liquid composition including an active material and a suitable liquid medium whereby when the liquid composition is deposited on the desired active surface it has no greater than about a 40° contact angle; treating the active surface to raise its surface tension before the deposition of a liquid composition containing the desired active material is deposited thereon; and combination thereof. The invention also provides organic electronic devices having at least two active layers, wherein at least one active layer comprises an active material that was deposited using at least one practice of the method of the invention.

Abstract: A hard coating film to be applied to the surface of a tool, which has a composition of (Cr1-a-bAlaSib) (BxCyN1-x-y) with atomic ratios specified below. 0<a?0.4 0.05?b?0.35 0.25?1?a?b?0.9 0?x?0.15 0?y?0.5 or a composition of (M1-a-bAlaSib) (BxCyN1-x-y) with atomic ratios specified below. 0.05?a?0.5 0.1<b?0.35 0?x?0.15 0?y?0.5 where M denotes Ti and Cr. The hard coating film for cutting tools has better wear resistance than conventional ones.