Silicon Containing Backing Or Protective Layer Patents (Class 430/272.1)
  • Patent number: 10845703
    Abstract: A film-forming composition having favorable effects such as curability and embeddability and resist underlayer film for use in lithography process for semiconductor devices. The film-forming composition including, as silane, hydrolyzable silane, hydrolysis product thereof, or hydrolysis-condensation product thereof, wherein hydrolyzable silane includes hydrolyzable silane of Formula (1): R1aR2bSi(R3)4?(a+b)??Formula (1) in Formula (1), R1 is organic group of Formula (2) and is bonded to silicon atom through Si—C bond: The film-forming composition, wherein the hydrolyzable silane is combination of hydrolyzable silane of Formula (1) with another hydrolyzable silane, wherein other hydrolyzable silane is at least one selected from group made of hydrolyzable silane of Formula (3): R7cSi(R8)4?c??Formula (3) and hydrolyzable silane of Formula (4): R9dSi(R10)3?d2Ye??Formula (4) Resist underlayer film, obtained by applying the resist underlayer film-forming composition on semiconductor substrate and baking.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: November 24, 2020
    Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
    Inventors: Makoto Nakajima, Kenji Takase, Masahisa Endo, Hiroyuki Wakayama
  • Patent number: 10843453
    Abstract: A composite panel for use in the manufacture of a letterpress plate has a carrier layer, with at least one photo layer which can be structured via electromagnetic radiation in a wavelength range. The photo layer is arranged on the carrier layer. The task of proposing a composite panel use in the manufacture of a letterpress plate is achieved by the fact that a barrier layer is provided. The barrier layer is arranged on the side of the photo layer opposite to the carrier layer. The barrier layer is essentially transparent in the wavelength range in which the photo layer can be structured. The present disclosure concerns a process for manufacturing a letterpress plate using at least one composite panel and a process for manufacturing a composite plate in accordance with the invention. The invention concerns the use of a composite material in a composite panel for a letterpress plate.
    Type: Grant
    Filed: October 9, 2017
    Date of Patent: November 24, 2020
    Assignee: AKK GmbH
    Inventor: Peter Kesper
  • Patent number: 10750623
    Abstract: A method and associated apparatus are disclosed for forming a conductive via that extends partly through a multi-layer assembly, wherein the method comprises forming a cavity from a surface of the multi-layer assembly to a first depth. The cavity extends through a plurality of layers of the multi-layer assembly. The plurality of layers comprises a healing layer comprising a plurality of microcapsules. Forming the cavity ruptures some of the plurality of microcapsules to release encapsulated material into the cavity. The released encapsulated material defines a second depth from the surface, the second depth being closer to the surface than the first depth. The method further comprises depositing conductive material within the cavity to form the conductive via that extends to the second depth.
    Type: Grant
    Filed: May 12, 2017
    Date of Patent: August 18, 2020
    Assignee: International Business Machines Corporation
    Inventors: Matthew S. Doyle, Joseph Kuczynski, Phillip V. Mann, Kevin M. O'Connell
  • Patent number: 10591817
    Abstract: The present invention provides a method for producing a composition for forming a coating film for a lithography used in manufacture of a semiconductor device by using a producing apparatus provided with a metal adsorbent and a filter, comprising the steps of: (1) introducing a solvent used in the composition into the producing apparatus, (2) circulating the solvent in the producing apparatus to adsorb a metal impurity by the metal adsorbent, (3) adding a raw material of the composition into the circulated solvent and homogenizing them to prepare the composition, and (4) circulating the prepared composition in the producing apparatus to remove a microscopic foreign matter by the filter. This method enables to produce a composition for forming a coating film for a lithography with its metal impurities, which cause an etching defect, extremely reduced.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: March 17, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Tsutomu Ogihara, Motoaki Iwabuchi
  • Patent number: 10558119
    Abstract: The invention provides a composition for coating a resist pattern and reversing the pattern by utilizing a difference in etching rates. A composition for applying to a resist pattern includes a component (A) which is at least one compound selected from the group consisting of a metal oxide (a1), a polyacid (a2), a polyacid salt (a3), a hydrolyzable silane (a4), a hydrolysis product (a5) of the hydrolyzable silane, and a hydrolysis condensate (a6) of the hydrolyzable silane; and a component (B), which is an aqueous solvent, in which the hydrolyzable silane (a4) is (i) a hydrolyzable silane containing an organic group having an amino group, (ii) a hydrolyzable silane containing an organic group having an ionic functional group, (iii) a hydrolyzable silane containing an organic group having hydroxy group, or (iv) a hydrolyzable silane containing an organic group having a functional group convertible to hydroxy group.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: February 11, 2020
    Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
    Inventors: Wataru Shibayama, Makoto Nakajima, Shuhei Shigaki, Hiroaki Yaguchi, Rikimaru Sakamoto
  • Patent number: 10475656
    Abstract: An example of forming semiconductor devices can include forming a silicon-hydrogen (Si—H) terminated surface on a silicon structure that includes patterned features by exposing the silicon structure to a hydrogen fluoride (HF) containing solution and performing a surface modification via hydrosilylation by exposing the Si—H terminated surface to an alkene and/or an alkyne.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: November 12, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Matthew S. Thorum, Gurtej S. Sandhu
  • Patent number: 10429737
    Abstract: New methods and substrates are provided that include antireflective compositions that comprise one or more thermal acid generators.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: October 1, 2019
    Assignee: Rohm and Haas Electronic Materials Korea Ltd.
    Inventors: Jung-June Lee, Jae Bong Lim
  • Patent number: 10409162
    Abstract: The present invention relates to a highly heat resistant silsesquioxane-based photosensitive resin composition for a liquid crystal display device or an organic EL display device, and a positive resist insulating layer prepared therefrom, and in particular, to a silsesquioxane-based photosensitive resin composition having high heat resistance and a low dielectric property, capable of being used as an insulating layer forming a via hole of the thin film transistor (TFT), and simultaneously, capable of being used as an insulating layer for forming a bank pattern dividing pixels of an organic EL display device.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: September 10, 2019
    Assignee: LTC CO., LTD.
    Inventors: Jun Young Kim, Hwa Young Kim, Sang Hun Cho, Kwang Hyun Ryu, Ho Sung Choi
  • Patent number: 10329459
    Abstract: An adhesive composition includes an acryl copolymer having a carboxyl group, and a silane compound represented by Formula 1 or 2, thereby it is possible to exhibit excellent initial adhesiveness and adhesive durability under severe conditions, and prevent the substrate from being torn due to a decrease in adhesiveness by water applied thereto, and the adhesive from remaining on the substrate during peeling-off the adhesive layer, as well as after drying, the adhesive layer may exhibit favorable adhesiveness again, thus being used for re-bonding.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: June 25, 2019
    Assignee: DONGWOO FINE-CHEM CO., LTD.
    Inventors: Han Young Choi, Ju Yeol Jang
  • Patent number: 10031420
    Abstract: Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.
    Type: Grant
    Filed: August 11, 2016
    Date of Patent: July 24, 2018
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Owendi Ongayi, Charlotte Cutler, Mingqi Li, Shintaro Yamada, James Cameron
  • Patent number: 9638998
    Abstract: A composition provided to contain: an alkoxysilane condensate obtained by the condensation of alkoxysilane A represented by general formula (1): (CH3)Si(OR1)3 (In the general formula (1), R1 mutually independently represents methyl group or ethyl group.), alkoxysilane B represented by general formula (2): (Ph)Si(OR1)3 (In the general formula (2), R1 mutually independently represents methyl group or ethyl group.), and alkoxysilane C represented by general formula (3): (CH3)2Si(OR1)2 (In the general formula (3), R1 mutually independently represents methyl group or ethyl group.) at an A:B:C mole ratio within the range of 30-70:10-50:20-60; and a polyether-modified polydimethylsiloxane.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: May 2, 2017
    Assignee: Central Glass Company, Limited
    Inventors: Tsuyoshi Ogawa, Junya Nakatsuji, Kazuhiro Yamanaka
  • Patent number: 9555615
    Abstract: In ablation-type printing plates involving silicone acrylate top layers, curing at high oxygen levels not only substantially reduces or eliminates toning, but does not adversely affect plate durability or printing performance.
    Type: Grant
    Filed: July 9, 2013
    Date of Patent: January 31, 2017
    Assignee: Presstek, LLC
    Inventors: Sonia Rondon, Kevin Ray
  • Patent number: 9442377
    Abstract: Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: September 13, 2016
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Owendi Ongayi, Charlotte Cutler, Mingqi Li, Shintaro Yamada, James Cameron
  • Patent number: 9372402
    Abstract: Described herein are organometallic or inorganic complexes with high extreme ultraviolet (EUV) optical density (OD) and high mass density for use in thin films. These thin films are used as high resolution, low line edge roughness (LER) EUV photoresists. The complexes may also be included in nanoparticle form for use in photoresists.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: June 21, 2016
    Assignee: The Research Foundation for the State University of New York
    Inventors: Daniel Freedman, Miles Marnell, Robert Brainard, Brian Cardineau
  • Patent number: 9366966
    Abstract: Methods and apparatuses for minimizing line edge/width roughness in lines formed by photolithography are provided. In one example, a method of processing a substrate, the method includes applying a photoresist layer comprising a photoacid generator to a substrate, exposing a first portion of the photoresist layer unprotected by a photomask to a radiation light in a lithographic exposure process, and applying an electric field or a magnetic field to alter movement of photoacid generated from the photoacid generator substantially in a vertical direction.
    Type: Grant
    Filed: September 5, 2014
    Date of Patent: June 14, 2016
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Peng Xie, Ludovic Godet
  • Patent number: 9337052
    Abstract: A resist underlayer film forming composition for EUV lithography, comprising: as a silane, a hydrolyzable silane, a hydrolyzate of the hydrolyzable silane, a hydrolysis condensate of the hydrolyzable silane, or a mixture of any of the hydrolyzable silane, the hydrolyzate, and the hydrolysis condensate, wherein the hydrolyzable silane includes a combination of tetramethoxysilane, an alkyltrimethoxysilane, and an aryltrialkoxysilane, and the aryltrialkoxysilane is represented by formula (1): (R2)n2—R1—(CH2)n1—Si(X)3??Formula (1) In formula (1), R1 is an aromatic ring consisting of a benzene ring or a naphthalene ring or a ring including an isocyanuric acid structure, R2 is a substituent replacing a hydrogen atom on the aromatic ring and is a halogen atom or a C1-10 alkoxy group, and X is a C1-10 alkoxy group, a C2-10 acyloxy group, or a halogen group.
    Type: Grant
    Filed: October 2, 2012
    Date of Patent: May 10, 2016
    Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
    Inventors: Shuhei Shigaki, Hiroaki Yaguchi, Rikimaru Sakamoto, Bang-ching Ho
  • Patent number: 9315728
    Abstract: A polymerizable liquid crystal composition is provided that can exhibit a uniform homogeneous alignment by coating the composition on a supporting substrate having been subjected to an alignment treatment. The polymerizable liquid crystal composition contains a mixture of polymerizable compounds containing a compound selected from a group of compounds represented by the formula (1-1) as a component A and a compound selected from a group of compounds represented by the formula (2-1) as a component B as essential components, and optionally containing a compound selected from a group of compounds represented by the formulae (3-1) to (3-3) as a component C and/or a compound selected from a group of compounds represented by the formula (4-1) as a component D, and contains at least one nonionic surfactant as a component E. Examples of each of the components are shown in the disclosure.
    Type: Grant
    Filed: December 10, 2009
    Date of Patent: April 19, 2016
    Assignees: JNC CORPORATION, JNC PETROCHEMICAL CORPORATION
    Inventor: Yoshiharu Hirai
  • Patent number: 9249354
    Abstract: Networks of semiconductor structures with fused insulator coatings and methods of fabricating networks of semiconductor structures with fused insulator coatings are described. In an example, a method of fabricating a semiconductor structure involves forming a mixture including a plurality of discrete semiconductor nanocrystals. Each of the plurality of discrete semiconductor nanocrystals is discretely coated by an insulator shell. The method also involves adding a base to the mixture to fuse the insulator shells of each of the plurality of discrete nanocrystals, providing an insulator network. Each of the plurality of discrete semiconductor nanocrystals is spaced apart from one another by the insulator network. The base one such as, but not limited to, LiOH, RbOH, CsOH, MgOH, Ca(OH)2, Sr(OH)2, Ba(OH)2, (Me)4NOH, (Et)4NOH, or (Bu)4NOH.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: February 2, 2016
    Assignee: Pacific Light Technologies Corp.
    Inventors: Benjamin Daniel Mangum, Weiwen Zhao, Kari N. Haley, Juanita N. Kurtin, Nathan Evan Stott
  • Patent number: 9164383
    Abstract: A resist composition comprising a salt of a mono- to tetrafunctional carboxylic acid with a metal selected from magnesium, chromium, manganese, iron, cobalt, nickel, copper, zinc, silver, cadmium, indium, tin, antimony, cesium, zirconium, and hafnium, and a solvent is improved in film uniformity when coated, and exhibits a high resolution, high sensitivity, and minimal LER when processed by the EB or EUV lithography.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: October 20, 2015
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Jun Hatakeyama
  • Patent number: 9023588
    Abstract: There is provided a resist underlayer film forming composition for lithography for forming a resist underlayer film capable of being used as a hardmask. A resist underlayer film forming composition for lithography, includes as a silane compound, a hydrolyzable organosilane, a hydrolysis product thereof, or a hydrolysis-condensation product thereof, wherein the hydrolyzable organosilane is a hydrolyzable organosilane of Formula (1): R1aR2bSi(R3)4?(a+b)??Formula (1) wherein R1 is Formula (2): in which R4 is an organic group, and R5 is a C1-10 alkylene group, a hydroxyalkylene group, a sulfide bond, an ether bond, an ester bond, or a combination thereof, X1 is Formula (3), Formula (4), or Formula (5): R2 is an organic group, and R3 is a hydrolysable group.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: May 5, 2015
    Assignee: Nissan Chemical Industries, Ltd.
    Inventors: Makoto Nakajima, Yuta Kanno, Wataru Shibayama
  • Patent number: 8999625
    Abstract: Embodiments include a silicon-containing antireflective material including a silicon-containing base polymer, a non-polymeric silsesquioxane material, and a photoacid generator. The silicon-containing base polymer may contain chromophore moieties, transparent moieties, and reactive sites on an SiOx background, where x ranges from approximately 1 to approximately 2. Exemplary non-polymeric silsesquioxane materials include polyhedral oligomeric silsesquioxanes having acid labile side groups linked to hydrophilic groups Exemplary acid labile side groups may include tertiary alkyl carbonates, tertiary alkyl esters, tertiary alkyl ethers, acetals and ketals, Exemplary hydrophilic groups may include phenols, alcohols, carboxylic acids, amides, and sulfonamides.
    Type: Grant
    Filed: February 14, 2013
    Date of Patent: April 7, 2015
    Assignee: International Business Machines Corporation
    Inventors: Martin Glodde, Wu-Song Huang, Javier Perez, Ratnam Sooriyakumaran, Takeshi Kinsho, Tsutomu Ogihara, Seiichiro Tachibana, Takafumi Ueda
  • Patent number: 8993218
    Abstract: One or more techniques or systems for controlling a profile for photo resist (PR) are provided herein. In some embodiments, a first shield layer is formed on a first PR layer and a second PR layer is formed on the first shield layer. A first window is formed within the second PR layer during a first exposure with a mask. A second window is formed within the first shield layer based on the first window. A third window is formed within the first PR layer during a second exposure without a mask. Because, the third window is formed while the first shield layer and the second PR layer are on the first PR layer, a profile associated with the first PR layer is controlled. Contamination during ion bombardment is mitigated due to the controlled profile.
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: March 31, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Li Huai Yang, Chien-Mao Chen
  • Patent number: 8992806
    Abstract: An absorbing composition is described herein that includes at least one inorganic-based compound, at least one absorbing compound, and at least one material modification agent. In addition, methods of making an absorbing composition are also described that includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) allowing the reaction mixture to form the absorbing composition at room temperature. Another method of making an absorbing composition includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) heating the reaction mixture to form the absorbing composition.
    Type: Grant
    Filed: August 25, 2011
    Date of Patent: March 31, 2015
    Assignee: Honeywell International Inc.
    Inventors: Bo Li, Joseph Kennedy, Nancy Iwamoto, Mark A. Fradkin, Makarem A. Hussein, Michael D. Goodner, Victor Lu, Roger Leung
  • Patent number: 8968458
    Abstract: A composition for a resist underlayer film is provided. The composition has excellent storage stability and can form a resist underlayer film which has excellent adhesion to a resist film, can improve reproducibility of a resist pattern and is resistant to an alkaline liquid used in development and to oxygen asking during the removal of a resist. The composition comprises a hydrolyzate and/or a condensate of a silane compound of the following formula (A), R1bR2cSi(OR3)4-a??(A) wherein R1 is a monovalent organic group having at least one unsaturated bond, R2 individually represents a hydrogen atom, a halogen atom or a monovalent organic group, R3 individually represents a monovalent organic group, R1 is a group other than OR3, a is an integer of 1 to 3, b is an integer of 1 to 3, and c is an integer of 0 to 2, provided that a=b+c.
    Type: Grant
    Filed: March 2, 2010
    Date of Patent: March 3, 2015
    Assignee: JSR Corporation
    Inventors: Keiji Konno, Masato Tanaka, Momoko Ishii, Junichi Takahashi, Tomoki Nagai
  • Patent number: 8956806
    Abstract: A method and material layer for forming a pattern are disclosed. The method includes providing a substrate; forming a first material layer over the substrate; forming a second material layer over the first material layer, wherein the second material layer comprises a photoacid generator and a photobase generator; and exposing one or more portions of the second material layer.
    Type: Grant
    Filed: September 18, 2009
    Date of Patent: February 17, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Wei Wang, Ching-Yu Chang, Burn Jeng Lin
  • Patent number: 8956807
    Abstract: A resist pattern-forming method capable of forming a resist pattern excellent in pattern collapse resistance in the case of development with the organic solvent in multilayer resist processes. The method has the steps of: (1) providing a resist underlayer film on a substrate using a composition for forming a resist underlayer film; (2) providing a resist film on the resist underlayer film using a photoresist composition; (3) exposing the resist film; and (4) developing the exposed resist film using a developer solution containing no less than 80% by mass of an organic solvent, in which the composition for forming a resist underlayer film contains (A) a component that includes a polysiloxane chain and that has a carboxyl group, a group that can generate a carboxyl group by an action of an acid, an acid anhydride group or a combination thereof.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: February 17, 2015
    Assignee: JSR Corporation
    Inventors: Hiromitsu Tanaka, Kazunori Takanashi, Shinya Minegishi, Takashi Mori, Tomoaki Seko, Jyunya Suzuki
  • Patent number: 8951711
    Abstract: The invention provides a patterning process for forming a negative pattern by lithography, comprising at least the steps of: using a composition for forming silicon-containing film, containing specific silicon-containing compound (A) and an organic solvent (B), to form a silicon-containing film; using a silicon-free resist composition to form a photoresist film on the silicon-containing film; heat-treating the photoresist film, and subsequently exposing the photoresist film to a high energy beam; and using a developer comprising an organic solvent to dissolve an unexposed area of the photoresist film, thereby obtaining a negative pattern. There can be a patterning process, which is optimum as a patterning process of a negative resist to be formed by adopting organic solvent-based development, and a composition for forming silicon-containing film to be used in the process.
    Type: Grant
    Filed: June 17, 2014
    Date of Patent: February 10, 2015
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsutomu Ogihara, Takafumi Ueda, Toshiharu Yano
  • Patent number: 8945808
    Abstract: Resist compositions that can be used in immersion lithography without the use of an additional topcoat are disclosed. The resist compositions comprise a photoresist polymer, at least one photoacid generator, a solvent; and a self-topcoating resist additive. A method of forming a patterned material layer on a substrate using the resist composition is also disclosed.
    Type: Grant
    Filed: April 28, 2006
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Robert Allen David, Phillip Joe Brock, Carl E Larson, Daniel Paul Sanders, Ratnam Sooriyakumaran, Linda Karin Sundberg, Hoa D Truong, Gregory Michael Wallraff
  • Patent number: 8945820
    Abstract: The present invention is a silicon-containing resist underlayer film-forming composition containing a condensation product and/or a hydrolysis condensation product of a mixture comprising: one or more kinds of a compound (A) selected from the group consisting of an organic boron compound shown by the general formula (1) and a condensation product thereof and one or more kinds of a silicon compound (B) shown by the general formula (2). Thereby, there can be provided a silicon-containing resist underlayer film-forming composition being capable of forming a pattern having a good adhesion, forming a silicon-containing film which can be used as a dry-etching mask between a photoresist film which is the upperlayer film of the silicon-containing film and an organic film which is the underlayer film thereof, and suppressing deformation of the upperlayer resist during the time of dry etching of the silicon-containing film; and a patterning process.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: February 3, 2015
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsutomu Ogihara, Takafumi Ueda, Yoshinori Taneda
  • Patent number: 8940472
    Abstract: Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: January 27, 2015
    Inventors: James F. Cameron, Jin Wuk Sung, John P. Amara, Greogory P. Prokopowicz, David A. Valeri
  • Patent number: 8916329
    Abstract: A hardmask composition for processing a resist underlayer film includes a solvent and an organosilane polymer, wherein the organosilane polymer is represented by Formula 6: In Formula 6, R is methyl or ethyl, R? is substituted or unsubstituted cyclic or acyclic alkyl, Ar is an aromatic ring-containing functional group, x, y and z satisfy the relations x+y=4, 0.4?x?4, 0?y?3.6, and 4×10?4?z?1, and n is from about 3 to about 500.
    Type: Grant
    Filed: February 6, 2009
    Date of Patent: December 23, 2014
    Assignee: Cheil Industries, Inc.
    Inventors: Sang Kyun Kim, Sang Hak Lim, Mi Young Kim, Sang Ran Koh, Hui Chan Yun, Do Hyeon Kim, Dong Seon Uh, Jong Seob Kim
  • Patent number: 8906592
    Abstract: The invention relates to an antireflective coating composition comprising a crosslinkable polymer, where the crosslinkable polymer comprises at least one unit of fused aromatic moiety, at least one unit with a phenylene moiety in the backbone of the polymer, and at least one hydroxybiphenyl unit, furthermore where the polymer comprises a crosslinking moiety of structure (4), where R?3, R?3 and R??3 are independently hydrogen or a C1-C4alkyl. The invention further relates to a process for forming an image using the composition.
    Type: Grant
    Filed: August 1, 2012
    Date of Patent: December 9, 2014
    Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
    Inventors: M. Dalil Rahman, Clement Anyadiegwu, Douglas McKenzie, JoonYeon Cho
  • Patent number: 8889338
    Abstract: A method of making a flexographic printing form precursor for laser engraving including the steps of (i) providing at least one layer of a curable composition on a substrate; (ii) curing the at least one layer; wherein the curable composition defining an outermost layer includes at least 0.5% by weight relative to the total weight of the composition of an organo-silicon compound including at least one polymerizable group; and a urethane (meth)acrylate oligomer having three or less polymerizable groups.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: November 18, 2014
    Assignee: Agfa Graphics NV
    Inventors: Eddie Daems, Luc Leenders
  • Patent number: 8889344
    Abstract: In one aspect, coating compositions are provided that comprise a component a component that comprises one or more silicon, antimony, aluminum, yttrium, cerium, lanthanum, tin, titanium, zirconium, hafnium, indium or zinc compounds. In another aspect, coating compositions are provided that comprise a plurality of discrete particles. Preferred coating compositions of the invention are useful for antireflective purposes, particularly with an underlaying photoresist coating layer, as well as for a barrier layer in immersion lithography.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: November 18, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Gregory P. Prokopowicz, Michael K. Gallagher
  • Patent number: 8877425
    Abstract: A resist underlayer film forming composition for lithography includes: as a component (I), a fluorine-containing highly branched polymer obtained by polymerizing a monomer A having two or more radical polymerizable double bonds in the molecule thereof, a monomer B having a fluoroalkyl group and at least one radical polymerizable double bond in the molecule thereof, and a monomer D having a silicon atom-containing organic group and at least one radical polymerizable double bond in the molecule thereof, in the presence of a polymerization initiator C in a content of 5% by mole or more and 200% by mole or less, based on the total mole of the monomer A, the monomer B, and the monomer D; and as a component (II), a hydrolyzable silane compound, a hydrolysis product thereof, a hydrolysis-condensation product thereof, or a silicon-containing compound that is a combination of these compounds.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: November 4, 2014
    Assignee: Nissan Chemical Industries, Ltd.
    Inventors: Yuta Kanno, Makoto Nakajima, Tomoko Misaki, Motonobu Matsuyama, Masayuki Haraguchi
  • Patent number: 8871425
    Abstract: This invention relates generally to silicon based photoresist compositions that can be used in forming low k dielectric constant materials suitable for use in electronic devices, methods of their use and the electronic devices made therefrom.
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: October 28, 2014
    Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
    Inventors: Ruzhi Zhang, Jihoon Kim, Bharatkumar K. Patel, Elizabeth Wolfer
  • Patent number: 8852848
    Abstract: The present invention relates to an aqueous composition for coating over a photoresist pattern comprising a first water soluble compound comprising at least a silicon moiety and at least one amino group, and a second compound comprising at least 1 carboxylic acid group. The invention further relates to processes for using the novel invention.
    Type: Grant
    Filed: July 28, 2010
    Date of Patent: October 7, 2014
    Assignee: Z Electronic Materials USA Corp.
    Inventors: Hengpeng Wu, Meng Li, Yi Cao, Jian Yin, DongKwan Lee, SungEun Hong, Margareta Paunescu
  • Patent number: 8846292
    Abstract: A radiation-sensitive composition containing a resist compound having a high sensitivity, a high resolution, a high etching resistance, and a low outgas which forms a resist pattern with good shape and a method of forming a resist pattern and novel compositions for forming a photoresist under coat film which is excellent in optical properties and etching resistance and contains substantially no sublimable substance and an under coat film formed by the composition. Radiation-sensitive composition containing a solvent and a cyclic compound having, e.g., a cyclic compound (A) having a molecular weight of 700 to 5000 which is synthesized by the condensation reaction of a compound having 2 to 59 carbon atoms and 1 to 4 formyl groups with a compound having 6 to 15 carbon atoms and 1 to 3 phenolic hydroxyl groups, and a cyclic compound for use in the radiation-sensitive composition.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: September 30, 2014
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Masatoshi Echigo, Dai Oguro
  • Publication number: 20140272709
    Abstract: Methods and materials for making a semiconductor device are described. The method includes forming a middle layer (ML) of a patterning stack (e.g., a tri-layer patterning stack such as a tri-layer resist) and forming a photoresist layer directly on the middle layer. The middle layer includes an additive component having a photo base generator (PBG). The substrate including the photoresist layer and the middle layer is then exposed to a radiation. A covalent bond between the ML and the photoresist layer may be formed.
    Type: Application
    Filed: August 29, 2013
    Publication date: September 18, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Yu Liu, Ching-Yu Chang
  • Patent number: 8822138
    Abstract: There is provided a resist underlayer film having both heat resistance and etching selectivity. A composition for forming a resist underlayer film for lithography, comprising a reaction product (C) of an alicyclic epoxy polymer (A) with a condensed-ring aromatic carboxylic acid and monocyclic aromatic carboxylic acid (B). The alicyclic epoxy polymer (A) may include a repeating structural unit of Formula (1): (T is a repeating unit structure containing an alicyclic ring in the polymer main chain; and E is an epoxy group or an organic group containing an epoxy group). The condensed-ring aromatic carboxylic acid and monocyclic aromatic carboxylic acid (B) may include a condensed-ring aromatic carboxylic acid (B1) and a monocyclic aromatic carboxylic acid (B2) in a molar ratio of B1:B2=3:7 to 7:3. The condensed-ring aromatic carboxylic acid (B1) may be 9-anthracenecarboxylic acid and the monocyclic aromatic carboxylic acid (B2) may be benzoic acid.
    Type: Grant
    Filed: August 11, 2010
    Date of Patent: September 2, 2014
    Assignee: Nissan Chemical Industries, Ltd.
    Inventors: Tetsuya Shinjo, Hirokazu Nishimaki, Yasushi Sakaida, Keisuke Hashimoto
  • Publication number: 20140242516
    Abstract: A composition provided to contain: an alkoxysilane condensate obtained by the condensation of alkoxysilane A represented by general formula (1): (CH3)Si(OR1)3 (In the general formula (1), R1 mutually independently represents methyl group or ethyl group.), alkoxysilane B represented by general formula (2): (Ph)Si(OR1)3 (In the general formula (2), R1 mutually independently represents methyl group or ethyl group.), and alkoxysilane C represented by general formula (3): (CH3)2Si(OR1)2 (In the general formula (3), R1 mutually independently represents methyl group or ethyl group.) at an A:B:C mole ratio within the range of 30-70:10-50:20-60; and a polyether-modified polydimethylsiloxane.
    Type: Application
    Filed: October 5, 2012
    Publication date: August 28, 2014
    Inventors: Tsuyoshi Ogawa, Junya Nakatsuji, Kazuhiro Yamanaka
  • Patent number: 8808446
    Abstract: A composition for a resist underlayer film is provided. The composition has excellent storage stability and can form a resist underlayer film which has excellent adhesion to a resist film, can improve reproducibility of a resist pattern and is resistant to an alkaline liquid used in development and to oxygen ashing during the removal of a resist. The composition comprises a hydrolyzate and/or a condensate of a silane compound of the following formula (A), R1bR2cSi(OR3)4-a??(A) wherein R1 is a monovalent organic group having at least one unsaturated bond, R2 individually represents a hydrogen atom, a halogen atom or a monovalent organic group, R3 individually represents a monovalent organic group, R1 is a group other than OR3, a is an integer of 1 to 3, b is an integer of 1 to 3, and c is an integer of 0 to 2, provided that a=b+c.
    Type: Grant
    Filed: February 24, 2006
    Date of Patent: August 19, 2014
    Assignee: JSR Corporation
    Inventors: Keiji Konno, Masato Tanaka, Momoko Ishii, Junichi Takahashi, Tomoki Nagai
  • Publication number: 20140227642
    Abstract: A negative resist composition, includes: (A) an alkali-soluble polymer containing a specific repeating unit as defined in the specification; (B) a crosslinking agent capable of crosslinking with the alkali soluble polymer (A) under an action of an acid; (C) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (D) a specific quaternary ammonium salt as defined in the specification; and (E) an organic carboxylic acid, and a pattern forming method uses the composition.
    Type: Application
    Filed: April 17, 2014
    Publication date: August 14, 2014
    Applicant: FUJIFILM Corporation
    Inventors: Koji SHIRAKAWA, Tadateru YATSUO
  • Publication number: 20140227641
    Abstract: Embodiments include a silicon-containing antireflective material including a silicon-containing base polymer, a non-polymeric silsesquioxane material, and a photoacid generator. The silicon-containing base polymer may contain chromophore moieties, transparent moieties, and reactive sites on an SiOx background, where x ranges from approximately 1 to approximately 2. Exemplary non-polymeric silsesquioxane materials include polyhedral oligomeric silsesquioxanes having acid labile side groups linked to hydrophilic groups Exemplary acid labile side groups may include tertiary alkyl carbonates, tertiary alkyl esters, tertiary alkyl ethers, acetals and ketals, Exemplary hydrophilic groups may include phenols, alcohols, carboxylic acids, amides, and sulfonamides.
    Type: Application
    Filed: February 14, 2013
    Publication date: August 14, 2014
    Applicants: SHIN-ETSU CHEMICAL CO., LTD., INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Martin Glodde, Wu-Song Huang, Javier Perez, Ratnam Sooriyakumaran, Takeshi Kinsho, Tsutomu Ogihara, Seiichiro Tachibana, Takafumi Ueda
  • Patent number: 8785108
    Abstract: A structure for pattern formation adapted for optically forming a pattern, characterized by comprising: a photocatalyst-containing layer provided on a substrate, the photocatalyst-containing layer containing a material of which the wettability is variable through photocatalytic action upon pattern-wise exposure.
    Type: Grant
    Filed: October 5, 2007
    Date of Patent: July 22, 2014
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Hironori Kobayashi, Manabu Yamamoto, Daigo Aoki, Hironori Kamiyama, Shinichi Hikosaka, Mitsuhiro Kashiwabara
  • Patent number: 8778593
    Abstract: A chemical amplification resist composition contains: (A) a polymer compound having a phenolic hydroxyl group and a group formed by substituting a substituent for a hydrogen atom of a hydroxyl group in a phenolic hydroxyl group and satisfying the following (a) to (c) at the same time: (a) the polydispersity is 1.2 or less, (b) the weight average molecular weight is from 2,000 to 6,500, and (c) the glass transition temperature (Tg) is 140° C. or more.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: July 15, 2014
    Assignee: FUJIFILM Corporation
    Inventors: Tomotaka Tsuchimura, Tadateru Yatsuo
  • Patent number: 8758981
    Abstract: A photoresist underlayer composition includes a solvent, and a polysiloxane resin represented by Chemical Formula 1: {(SiO1.5—Y—SiO1.5)x(SiO2)y(XSiO1.5)z}(OH)e(OR1)f.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: June 24, 2014
    Assignee: Cheil Industries, Inc.
    Inventors: Mi-Young Kim, Sang-Kyun Kim, Hyeon-Mo Cho, Chang-Soo Woo, Sang-Ran Koh, Hui-Chan Yun, Woo-Jin Lee, Jong-Seob Kim
  • Patent number: 8728709
    Abstract: A lithographic printing plate precursor includes a support and an image-recording layer containing a star polymer, a radical polymerizable compound and a radical polymerization initiator, the star polymer is a star polymer in which a polymer chain is branched from a central skeleton via a sulfide bond and the polymer chain contains an acid group and a crosslinkable group in a side chain of the polymer chain.
    Type: Grant
    Filed: February 27, 2012
    Date of Patent: May 20, 2014
    Assignee: FUJIFILM Corporation
    Inventor: Hidekazu Oohashi
  • Patent number: 8715916
    Abstract: A pattern-forming method includes forming a resist underlayer film on a substrate using a resist underlayer film-forming composition. The resist underlayer film-forming composition includes a base component, and a crosslinking agent. The crosslinking agent has a partial structure represented by a following general formula (i). X represents an oxygen atom, a sulfur atom, or —NR—. R represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms. n1 is an integer from 1 to 6. R1 represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: May 6, 2014
    Assignee: JSR Corporation
    Inventors: Shin-ya Minegishi, Shin-ya Nakafuji, Takanori Nakano
  • Patent number: 8715913
    Abstract: The present invention is a silicon-containing resist underlayer film-forming composition containing at least any one of a condensation product and a hydrolysis condensation product or both of a mixture comprising: one or more kinds of a compound (A) selected from the group consisting of an organic boron compound shown by the following general formula (1) and a condensation product thereof and one or more kinds of a silicon compound (B) shown by the following general formula (2). Thereby, there can be provided a resist underlayer film applicable not only to the resist pattern formed of a hydrophilic organic compound obtained by the negative development but also to the resist pattern formed of a hydrophobic compound obtained by the conventional positive development.
    Type: Grant
    Filed: November 5, 2012
    Date of Patent: May 6, 2014
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsutomu Ogihara, Takafumi Ueda, Fujio Yagihashi