Having Distinct Atmosphere Supply, Removal Or Recirculation Structure Patents (Class 432/152)
  • Patent number: 10697087
    Abstract: The present invention mainly relates to a susceptor for a reactor for epitaxial growth, comprising: a disc-shaped body (90) having a first face and a second face, wherein the first face comprises at least one zone (99) adapted to receive a substrate (2000) to be subjected to epitaxial growth and at least one supporting element (91+97) for the substrate (2000), located at the zone (99); the supporting element (91+97) comprises a circular disc (91) with an edge (97) which is raised with respect to the disc; the zone (99) may be a bottom of a recess (99) or a top of a relief of the disc-shaped body (90); the disc-shaped body (90) is solid at least at the recess (99) or relief; the edge is accessible from a side of the susceptor for handling the supporting element.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: June 30, 2020
    Assignee: LPE S.P.A.
    Inventors: Francesco Corea, Danilo Crippa, Laura Gobbo, Marco Mauceri, Vincenzo Ogliari, Franco Preti, Marco Puglisi, Carmelo Vecchio
  • Patent number: 10641552
    Abstract: A heat-recovering oven system based on temperature gradient comprises: multiple chambers arranged in a sequence, the chambers configured for operating at various temperatures according to a temperature gradient arrangement that spans the sequence; a conveyor configured for transporting product through the multiple chambers in the sequence for heat treatment according to the temperature gradient arrangement; and multiple temperature-segregated heat exchanger systems, each heat exchanger system including a heat exchanger, a conduit to at least one of the chambers based on its temperature in the temperature gradient arrangement, and a return conduit from the at least one chamber to the heat exchanger.
    Type: Grant
    Filed: December 16, 2016
    Date of Patent: May 5, 2020
    Assignee: Tesla, Inc.
    Inventors: Christopher Gandhi Van Dyke, Turner Boris Caldwell
  • Patent number: 10490431
    Abstract: A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.
    Type: Grant
    Filed: March 12, 2018
    Date of Patent: November 26, 2019
    Assignee: Yield Engineering Systems, Inc.
    Inventors: William Moffat, Craig Walter McCoy
  • Patent number: 9938595
    Abstract: A direct reduction process producing DRI from iron oxide particles by reduction at a about 750° C. with a reducing gas mainly H2 and CO, that also includes CO2, H20, and methane, a the reduction reactor and the top gas effluent from the reduction reaction after cooling/scrubbing is split. The resulting first top gas portion with a first hydrocarbon-containing make-up gas passes through a catalytic reformer yielding an improved hot reducing gas first effluent. The second top gas portion passes through a CO2 removal unit and then with the second hydrocarbon-containing make-up gas passes through a heater yielding a hot CO2-lean recycle reducing gas second effluent. The first and second effluents are fed to the reducing zone of the reduction reactor as the reducing gas reactant. The flow rate of at least the second of the two make-up gases is regulated to control the carbon content of the DRI produced.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: April 10, 2018
    Inventors: Jorge Octavio Becerra-Novoa, Alessandro Martinis
  • Patent number: 9638467
    Abstract: Apparatus for continuously conveying and pre-heating a metal charge inside a container of a melting plant, includes at least a channel for conveying the metal charge, at least a hood disposed above the conveyor channel defining a tunnel and/or an expansion chamber, inside which at least part of the fumes exiting from the container advance, and apertures made in cooperation with lateral walls of the conveyor channel to discharge the fumes. The conveyor channel includes an activator that divert the fumes and/or delimit the zone occupied by the metal charge of the conveyor channel, and that cooperate longitudinally with at least part of the conveyor channel.
    Type: Grant
    Filed: December 10, 2010
    Date of Patent: May 2, 2017
    Inventors: Thomas Narholz, Bernard Villemin
  • Patent number: 9033704
    Abstract: A method and system for improving high excess air combustion system efficiency, including induration furnaces, using a re-routing of flue gas within the system by gas recirculation. Flue gas is drawn from hot system zones including zones near the stack, for re-introduction into the process whereby the heat recovery partially replaces fuel input. At least one pre-combustion drying zone, at least one combustion zone, and at least a first cooling zone exist in these furnaces. At least one exhaust gas outlet is provided to each pre-combustion drying and combustion zone. At least part of the gaseous flow from each system zone exhaust outlet is selectively delivered to an overall system exhaust, the remaining flow being selectively delivered via recirculation to cooling zones. Recirculation flow is adjusted to meet required system temperatures and pressures. The method and system provide efficiency improvements, reducing fuel requirements and greenhouse gas emissions.
    Type: Grant
    Filed: December 10, 2010
    Date of Patent: May 19, 2015
    Assignee: Her Majesty The Queen in Right of Canada as Represented by the Minister of Natural Resources
    Inventors: Bruce Clements, Richard Pomalis
  • Publication number: 20140327191
    Abstract: The tunnel kiln according to the present invention includes a tunnel kiln main body having an inner wall constituted by a furnace material, and having a debinding zone and a sintering zone wherein respectively debinding and sintering of a body to be fired containing an organic component are performed; a conveying unit for conveying the body to be fired from an inlet side to an outlet side of the tunnel kiln main body; and a lining provided so that at least an inner wall of the debinding zone of the inner wall of the tunnel kiln main body is covered therewith.
    Type: Application
    Filed: January 9, 2013
    Publication date: November 6, 2014
    Inventors: Keiichiro Suzuki, Teruo Komori
  • Patent number: 8776773
    Abstract: An air impingement tunnel oven including a baking case having a plurality of walls, the case's interior having high and low pressure zones; a food conveyor spanning between food passage ports; a plenum and air impingement registers combination having pluralities of finger ducts overlying and underlying the food conveyor, each finger duct being attached to and extending from the plenum, and the plenum dividing the baking case's high and low pressure zones; a gas burner supported upon one of the baking case's walls and including a shell and a gas tube within the shell, the shell defining an annulus which opens the baking case's low pressure zone; and an optical flame sensor operatively mounted for detecting burner flame light passing outwardly through the annulus.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: July 15, 2014
    Assignee: Wolfe Electric, Inc.
    Inventors: Ronald D. Wolfe, Steven M. Wolfe, Brent Staver
  • Patent number: 8748780
    Abstract: A disclosed substrate processing apparatus comprises a heat exchange plate configured to heat and/or cool the substrate; plural protrusions provided on the heat exchange plate so as to allow the substrate to be placed on the plural protrusions, leaving a gap between the substrate and the heat exchange plate; a suction portion configured to attract the substrate onto the plural protrusion by suction through plural holes formed in the heat exchange plate; and a partition member that is provided on the heat exchange plate and lower than the plural protrusions, wherein the partition member is configured to divide the gap into two or more regions including at least one of the holes so that at least one of the two or more regions is two-dimensionally closed by the partition member.
    Type: Grant
    Filed: January 16, 2008
    Date of Patent: June 10, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Shouken Moro, Yasuhiro Takaki, Masatoshi Kaneda
  • Publication number: 20140109431
    Abstract: The present invention provides a preheat module, which comprises a heating chamber, a blower and a platform; the heating chamber comprises a heating device and a first inlet; the blower comprises a second inlet and a first outlet, and the second inlet is connected to the heating chamber; the platform comprises a third inlet and a second outlet, and the third inlet is connected to the first outlet; the first inlet and the second outlet are set in a same plane. An advantage of the present invention is that it can reduce the energy consumption also can satisfy the requirement of conserving electrical power and protecting the environment.
    Type: Application
    Filed: May 20, 2013
    Publication date: April 24, 2014
    Inventors: Wen-fu LEE, Yu-shan LEE
  • Publication number: 20140079376
    Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.
    Type: Application
    Filed: November 22, 2013
    Publication date: March 20, 2014
    Inventors: Ming-Kuei (Michael) TSENG, Norman L. TAM, Yoshitaka YOKOTA, Agus S. TJANDRA, Robert NAVASCA, Mehran BEHDJAT, Sundar RAMAMURTHY, Kedarnath SANGAM, Alexander N. LERNER
  • Patent number: 8647430
    Abstract: The invention relates to a process for manufacturing cement clinker in a plant having a cyclone preheater, a precalcination reactor, a rotary furnace and a clinker cooler. In the process, the flue gases from the furnace are conducted to the precalcination reactor, or even to the cyclone preheater. According to the invention, the precalcination reactor is fed with an oxygen-rich gas, the nitrogen content of which is less than 30%, constituting the sole oxygen source for said reactor, and a portion leaving the cyclone preheater is recycled into the plant so as to obtain a suitable flux necessary for suspending matter in said preheater, while the other portion, rich in carbon dioxide, is adapted for the purpose of a treatment for limiting the amount of carbon dioxide discharged into the atmosphere, such as particularly sequestration.
    Type: Grant
    Filed: July 17, 2009
    Date of Patent: February 11, 2014
    Assignee: Fives FCB
    Inventors: Alain Cordonnier, Sébastien Devroe
  • Publication number: 20140011151
    Abstract: The invention provides a shuttle kiln that can fire ceramic porous bodies containing organic binders in a shorter period of time than in conventional methods without occurring breaks due to a temperature difference between the inside and the outside. The shuttle kiln of the invention is suited for firing of ceramic porous bodies containing organic binders. It includes a gas suction path 4 that suctions in-furnace gas and discharges it via an afterburner 5 and a circulation path 7 that suctions the in-furnace gas to the furnace outside to burn organic binder gas and then returns it into the furnace.
    Type: Application
    Filed: September 10, 2013
    Publication date: January 9, 2014
    Applicant: NGK Insulators, Ltd.
    Inventors: Jotaro MIYATA, Chikashi IHARA, Takashi YASUE
  • Publication number: 20140011150
    Abstract: The invention provides a tunnel kiln for firing ceramic porous bodies which can fire ceramic porous bodies containing organic binders in a shorter period of time than in conventional methods without producing breaks or requiring nitrogen gas. The tunnel kiln includes a preheating zone 1, a firing zone 2, and a cooling zone 3 and fires the ceramic porous bodies loaded on a carriage 7 by driving it in a furnace. A heat storage regenerative burner 10 is used as means of heating the firing zone 2 so that low-oxygen-concentration exhaust gas discharged from the heat storage regenerative burner 10 may be returned to an exhaust gas return line 14 and supplied into the preheating zone 1. The exhaust gas return line 14 may be provided with a combustion device 17 that reduces the oxygen concentration by consuming oxygen contained in the exhaust gas.
    Type: Application
    Filed: September 10, 2013
    Publication date: January 9, 2014
    Applicant: NGK Insulators, Ltd.
    Inventors: Jotaro MIYATA, Chikashi IHARA, Takashi YASUE
  • Patent number: 8618442
    Abstract: A nozzle housing assembly, which is used in a convection heating furnace for a heat treatable glass sheet. The nozzle housing assembly comprises an elongated enclosure, at least one elongated heating resistance in the enclosure for heating convection air, and orifices in a bottom surface of the enclosure for blasting heated convection air against the glass sheet. The enclosure is divided with a flow-throttling partition into a top supply duct and a bottom nozzle box, the heating resistances being housed in the latter. Flow-throttling openings present in the partition are positioned to comply with the location and shape of the heating resistances.
    Type: Grant
    Filed: August 23, 2011
    Date of Patent: December 31, 2013
    Assignee: Glaston Services Ltd. Oy
    Inventor: Mikko Rantala
  • Patent number: 8519307
    Abstract: An oven apparatus 24 having a modular construction for curing paint on the surface of a vehicle body 26 using radiant and convection heat. The oven apparatus 24 includes a plurality of oven modules 30. Each oven module 30 includes a pair of convection return air assemblies 128 for removing exhaust gases from the oven interior 98 and a pair of radiant heating tubes 100 for heating the vehicle body. Each of the convection return air assemblies 128 has a reflective outer surface 94 for reflecting radiant heat from the radiant heating tubes 100 at the vehicle body 26.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: August 27, 2013
    Assignee: GK Licensing, LLC
    Inventors: James C. Schumacher, Curt D. Hite, Tracy E. Roberts
  • Publication number: 20130203003
    Abstract: A method delivers fuel gas to a furnace combustion chamber from a premix burner having a reaction zone with an outlet to the furnace combustion chamber. This includes the steps of injecting a premix of primary fuel gas and combustion air into the reaction zone, and combusting the premix to provide combustion products including vitiated combustion air in the reaction zone. Further steps include injecting staged fuel gas into the reaction zone separately from the premix, discharging the staged fuel gas and vitiated combustion air from the reaction zone through the outlet to the furnace combustion chamber, and combusting the staged fuel gas and vitiated combustion air in the furnace combustion chamber. This enables low NOx combustion in the furnace combustion chamber to be achieved as a result of interacting the staged fuel gas with the vitiated combustion air in the reaction zone.
    Type: Application
    Filed: August 10, 2012
    Publication date: August 8, 2013
    Inventors: Bruce E. Cain, Thomas F. Robertson, Mark C. Hannum, Todd A. Miller, Joseph P. Brown
  • Patent number: 8485815
    Abstract: A rotary tube furnace (1) comprising an insulated heating chamber (4), the insulated heating chamber having a product discharge outlet (21) and a process tube inlet (39), a heating element (14) operatively arranged to selectively heat the heating chamber, a generally horizontally extending process tube (2) supported for rotation relative to the heating chamber, the process tube having a first portion (36) generally arranged outside of the heating chamber and a cantilevered second portion (37) extending from the first portion into the heating chamber and terminating at a discharge end (38) within the heating chamber, a feed mechanism (40) configured and arranged to feed product into the process tube, and a bearing assembly operating between a support frame (34) and the first portion of the process tube and configured and arranged to support the process tube and transmit rotational torque to the process tube.
    Type: Grant
    Filed: May 7, 2009
    Date of Patent: July 16, 2013
    Assignee: Harper International Corporation
    Inventors: Peter R. Witting, William J. Stry, Carl H Vander Weide, Jeffrey E. Purdy, Jason A. Ginn
  • Patent number: 8455293
    Abstract: A method for processing solar cells comprising: providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing; composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber, loading the solar cell substrates into the process chamber; subjecting the solar cell substrates to a process in the process chamber.
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: June 4, 2013
    Assignee: ASM International N.V.
    Inventors: Chris G. M. de Ridder, Klaas P. Boonstra, Adriaan Garssen, Frank Huussen
  • Publication number: 20130078590
    Abstract: An industrial furnace comprises a main body, multiple heating sets, multiple heat-distributing plates, and an atmosphere pressurizing device. The main body defines a space therein. The heating sets are provided in the main body and arranged evenly above or below the space. The heat-distributing plates are provided corresponding to the heating sets, each plate being mounted between the space and one of the heating sets, so that the space is located between the heat-distributing plates. The atmosphere pressurizing device is mounted on the main body and provided with a conduit for communicating with the space. Thereby, the atmosphere pressurizing device can supply an inert atmosphere to the space via the conduit. The inert atmosphere will have a pressure greater than that of the gas if sublimated from the graphite so that the heat-distributing plates can be prevented from being damaged after a long time of use.
    Type: Application
    Filed: September 22, 2011
    Publication date: March 28, 2013
    Inventor: CHIN-TAO CHIANG
  • Publication number: 20130071800
    Abstract: A method for firing raw ceramic blanks in a furnace includes the steps of guiding trains of blanks running parallel to one another along a longitudinal furnace section having a firing zone, wherein the trains are moved in opposite directions during one movement operation, and the furnace is loaded using blanks to be moved in a first direction. A furnace for firing raw ceramic blanks having a plurality of trains which are arranged parallel to one another and can move along a longitudinal furnace section, so trains comprising a plurality of furnace bogies on which the blanks are to be arranged, wherein the furnace section has a firing zone, and wherein the trains are moved in opposite directions, and the furnace is at a first end of the furnace section for loading the blanks to be moved in a first direction into the furnace.
    Type: Application
    Filed: September 12, 2012
    Publication date: March 21, 2013
    Applicant: Keller HCW GmbH
  • Patent number: 8376735
    Abstract: Contact lens curing systems and methods are described. A contact lens curing system includes an oven that has a plurality of curing zones, a mold advancement system for moving contact lens mold assemblies between the plurality of zones, and a controlled atmosphere in the curing zones that provides a substantially chemically inert environment in which contact lens precursor materials can be polymerized in contact mold assemblies located in the curing zones. Methods of producing contact lenses include curing contact lens precursor materials in contact lens mold assemblies in the lens curing system.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: February 19, 2013
    Assignee: CooperVision International Holding Company, LP
    Inventors: Hayden Atkinson, Paul Riggs, John Gibson, Tim Warren, Ronnie Dover, Arthur Williams, Jennifer Cowden, Michael Gunner
  • Publication number: 20130034821
    Abstract: A conveyor oven is described. The conveyor oven includes a frame made of load-bearing structural members. The conveyor oven has a modular construction, with the structural members defining a rectangular prism. Blocks of insulation are placed in the frame openings, and a flexible insulating material, such as a multi-layer insulating textile, is used to cover joints between adjacent modules. Along the length of the conveyor oven, idler rollers that support the conveyor belt have ends that penetrate the sides of the oven and are supported such that the rollers can shift as the oven expands and contracts without creating openings for heat or air leakage. Air flow within the oven is managed using sets of adjustable baffle plates above and below the conveyor belt.
    Type: Application
    Filed: June 7, 2012
    Publication date: February 7, 2013
    Applicant: Brunnschweiler S.A.
    Inventors: Oscar Lopez, Raul Esteban, James Schrader
  • Publication number: 20120322016
    Abstract: A roller hearth calcining furnace that uses a movable fluid bed that is transported through plural heating modules, each heating module independently heated using an indirect heating system. The indirect heating system includes an oxidizer, an all-ceramic, indirect, air-to-air heat exchanger, and one or more metal heat exchangers. The oxidizer can be fired with oil, coal, natural gas or other means, is impervious to attack from dirty fuels, and produces clean hot air for productive use. The movable fluid bed includes a permeable silicon carbide ceramic plate that resides within, and is supported by, a sagger or tray. The sagger is transported on rollers through the plural heating modules, and thus different temperature zones within a furnace as required by the temperature profile of the material being calcined.
    Type: Application
    Filed: August 30, 2012
    Publication date: December 20, 2012
    Inventor: Robert G. Graham
  • Patent number: 8328551
    Abstract: A multizone convection furnace is provided in which gas from a cooling chamber of the furnace is directed into one or more heat zones of the furnace for the purpose of providing a specified thermal profile. The gas introduced from the cooling chamber into the one or more heat zones is of the same type of gas present in the heat zones, and typically is nitrogen. In a preferred embodiment, the convection furnaces comprises a heating chamber composed of a plurality of adjacent heat zones and a cooling chamber at the exit end of the heating chamber. A conveyer extends through the furnace for movement of a product through the heat zones and cooling chamber of the furnace. The cooling chamber is coupled to one or more of the heat zones such that cooled gas from the cooling chamber can be introduced into selected heat zones. In one version, a cooled gas path is provided to all of the heat zones and cooled gas is introduced into intended zones by opening associated valves.
    Type: Grant
    Filed: June 17, 2003
    Date of Patent: December 11, 2012
    Assignee: BTU International, Inc.
    Inventors: Gary Orbeck, Robert Honnors, Wayne L. Gibbs
  • Publication number: 20120295210
    Abstract: A conveyor oven has several heating zones. Each heating zone is comprised of one or more infrared emitters that are configured to emit a spectrum of infrared wavelengths that varies in intensity and spectrum over time. The spectra of emitted infrared wavelengths in each zone can have the same or different profile. Zones are regions wherein infrared emitters are configured and operated to emit the same or substantially the same infrared energy wavelengths and intensity levels across an IR spectrum. Access to the infrared emitters and the conveyor is provided by one or more access or maintenance ports formed into a side of the conveyor oven. Temperature control inside the oven is effectuated by venting hot air through air vents formed into the oven sides and/or top.
    Type: Application
    Filed: May 18, 2011
    Publication date: November 22, 2012
    Applicant: PRINCE CASTLE LLC
    Inventors: Loren Veltrop, Frank Agnello, Thomas Serena, Nathaniel Howard
  • Publication number: 20120246967
    Abstract: The heat recovery system includes an oven having a treatment air with a treatment air temperature and a treatment air dew point temperature to treat a product or product in process. A zone outlet exhaust waste treatment air following the treatment of the product. A preheating zone includes a preheating inlet for the introduction of preheating air having a preheating air temperature and a preheating air dew point temperature to preheat the product. A transfer duct extends between the zone outlet of the oven and the preheating zone to transfer a portion of waste treatment air from the oven to the preheating zone to create the preheating air to preheat additional product. The preheating air preheats the product in the preheating zone to a product temperature that is at least equal to the treatment air dew point temperature to eliminate surface condensation on the product during treatment in the oven.
    Type: Application
    Filed: March 28, 2012
    Publication date: October 4, 2012
    Inventors: Nicholson Hirzel, James Breslin
  • Patent number: 8235712
    Abstract: A device intended to assist in the accurate and controlled shrinkage of thermo-shrinkable container-jacketing material. Said device producing at least an elevated temperature in a heated processing zone. Heat energy available in said heated processing zone primarily derived from a first heat source, preferably pressurized steam. Said first heat source steam exhibiting preferred characteristics related to the controlled shrinking of thermo-shrinkable materials. A second heat source, other than steam, acting in cooperative relationship with said first heat source steam, delaying the decay of one or more preferred characteristics of said first heat source steam. Said first heat source steam, urging said heat-shrinkable materials to shrink, substantially conforming to receiving containers in a preferred manner along one or more axis.
    Type: Grant
    Filed: January 9, 2009
    Date of Patent: August 7, 2012
    Inventor: Graham Louis Lewis
  • Patent number: 8210844
    Abstract: An air impingement conveyor oven incorporating a baking case having an interior space bordered by opposing longitudinal walls, opposing lateral walls, a ceiling, and a floor; an air plenum partitioning the baking case's interior space into an air impingement space and an air return space, the air plenum having at least a first intake port opening at the air return space, the air plenum further having a plurality of air impingement ducts extending into and opening at the air impingement space; a passive flow conduit opening the baking case, the passive flow conduit having an output end positioned at the return air space; a combustible fuel injector and igniter connected operatively to the passive flow conduit; and an air impelling fan mounted operatively within the baking case's interior space for recirculating impingement air from the air impingement space into the air return space, for drawing outside combustion air through the passive flow conduit, and for driving the air through the at least first intake p
    Type: Grant
    Filed: October 27, 2008
    Date of Patent: July 3, 2012
    Assignee: Wolfe Electric, Inc.
    Inventors: Ronald D. Wolfe, Frederick Hausler, Brent Staver
  • Publication number: 20120088202
    Abstract: A heating device for a soldering system. One embodiment of the heating device has at least one heating nozzle equipped with at least two tubular outlet channels. At least one outlet channel of the heating nozzle is arranged at an angle opposite another outlet channel of the heating nozzle. One embodiment of a selective soldering system is also provided. The selective soldering system comprises a heating device and a selective soldering device which is connected downstream from the heating device. The heating device is equipped with at least one heating nozzle in order to guide the heating current in the direction of a flat side of each board to be soldered. At least one heating nozzle is equipped with at least two tubular outlet channels, and at least one outlet channel of each heating nozzle is arranged at an angle opposite another outlet channel of each heating nozzle.
    Type: Application
    Filed: October 6, 2011
    Publication date: April 12, 2012
    Inventor: Lambertus Petrus Christinus Willemen
  • Patent number: 8133299
    Abstract: A multiple moving hearth furnace (10) having a furnace housing (11) with at least two moving hearths (20) positioned laterally within the furnace housing, the hearths moving in opposite directions and each moving hearth (20) capable of being charged with at least one layer of iron oxide and carbon bearing material at one end, and being capable of discharging reduced material at the other end. A heat insulating partition (92) is positioned between adjacent moving hearths of at least portions of the conversion zones (13), and is capable of communicating gases between the atmospheres of the conversion zones of adjacent moving hearths. A drying/preheat zone (12), a conversion zone (13), and optionally a cooling zone (15) are sequentially positioned along each moving hearth (30) in the furnace housing (11).
    Type: Grant
    Filed: November 8, 2007
    Date of Patent: March 13, 2012
    Assignee: Nu-Iron Technology, LLC
    Inventors: Mark M. Brandon, Bradford G. True
  • Patent number: 8124916
    Abstract: Apparatus and methods that minimize surface defect development in silicon wafers during thermal processing at relatively high temperatures at which silicon wafers are annealed and at less extreme temperature, or for other purposes. The apparatus and methods have utility to horizontally-disposed furnaces for silicon wafers and to vertically-oriented furnaces in which larger wafers can be thermally processed. A selectively-sealable process tube encloses silicon wafers during heating of the silicon wafers to a predetermined temperature, and a heating atmosphere supply system induces through the process tube a positive flow of a process gas, such as hydrogen or argon, that is non-reactive with solid silicon at the predetermined temperature. A process tube outlet vents gas from the process tube, and an impurity sensor in the process tube outlet detects oxygen and moisture in the vented gas to verify the purity of the atmosphere surrounding the wafers during thermal processing.
    Type: Grant
    Filed: April 16, 2007
    Date of Patent: February 28, 2012
    Assignee: Maxim Integrated Products, Inc.
    Inventors: Amit S. Kelkar, Larry Puechner, David E. Billings
  • Patent number: 8042727
    Abstract: An apparatus characterized by a feature that in a stage on which a substrate or a jig holding a substrate is mounted, an opening closed when the substrate or the jig is mounted is provided and the substrate or the jig is heated by blowing hot air against the lower portion of the substrate or the jig and by a feature that a solder bump is formed on a pad electrode by heating or reflowing a solder composition which is a mixture containing solder particles, a flux component, and a liquid material which is liquid at normal temperature or changing to liquid when heated, and the composition is heated from the substrate side.
    Type: Grant
    Filed: March 29, 2005
    Date of Patent: October 25, 2011
    Assignees: Tamura Corporation, Japan Science and Technology Agency
    Inventors: Masaru Shirai, Junichi Onozaki, Hiroshi Saito, Isao Sakamoto, Masahiko Furuno, Haruhiko Ando, Atsushi Hiratsuka
  • Patent number: 8011922
    Abstract: Apparatus and a process for the continuous cycle decoration of profiled bars for shutters and frames, or other similar objects, with a carrier film of plastic material, printed with the desired decoration with sublimable inks. The process provides for a significant number of profiled bars or decorated steel sheets to be produced per unit of time.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: September 6, 2011
    Assignee: Decoral System USA Corp.
    Inventor: Paolo Checcucci
  • Publication number: 20110136069
    Abstract: The present invention has an object to provide burning equipment that can prevent uneven burning and increase productivity. The burning equipment of the present invention includes: a furnace body (13) having an inner space in which a powdery or granular subject to be treated (11) is burned; a gas ejection portion (21) having an opening for ejecting an atmospheric gas from above the subject to be treated (11) which is conveyed in the inner space of the furnace body (13); a gas supply portion (18) for supplying the atmospheric gas from a side wall (13c) of the furnace body (13) to the gas ejection portion (21); and a heating portion (24a, 24b) for controlling temperature distribution in the inner space of the furnace body (13).
    Type: Application
    Filed: May 25, 2010
    Publication date: June 9, 2011
    Inventors: Naoya Ryoki, Naoko Matsuda, Hiroyuki Naka, Shinji Arimoto
  • Publication number: 20110037196
    Abstract: The facility is comprised of an oven (8) fitted with rotating supports (3) disposed parallel to each other, upon which preformed tubes (11) rest and rotate, which are introduced from a feeder (14) where they are contained at room temperature for their homogeneous circumferential heating inside said oven (8). Additionally, transverse displacement means (5, 6) are disposed inside the oven (8) in order to facilitate the elevation and transverse displacement of the preformed tubes (11), in such a manner as to favour the progressive and uniform heating throughout the thickness of said preformed tubes (11). On the other hand, it features assemblies that generate heating currents (15, 10, 2) comprised of elements (15), fans (10) and deflectors (2) longitudinally distributed in sectors or quadrants inside the oven (8), for the purpose of heating and distributing the air over the preformed tubes (11).
    Type: Application
    Filed: December 13, 2007
    Publication date: February 17, 2011
    Inventor: Antonio Arena Fernandez
  • Patent number: 7871266
    Abstract: An oven apparatus including wall members which constitute an oven wall defining internal and external regions of an oven and partition walls forming oven compartments within the oven by defining internal and external regions thereof, the wall members including an inner wall panel facing an internal side of the oven or oven compartment, an outer wall panel facing the external side of the oven or oven compartment, and thermal insulation installed between the inner and outer wall panels, wherein a sealable ventilation port is formed on the inner wall panel, a sealable suction port is formed on the outer wall panel, and a suction-generator is connected to the suction port for evacuating the atmosphere within the wall member.
    Type: Grant
    Filed: February 14, 2005
    Date of Patent: January 18, 2011
    Assignee: Chugai Ro Co., Ltd.
    Inventor: Kinya Kisoda
  • Patent number: 7766651
    Abstract: A reflow furnace comprises: a carrier device to carry a printed circuit board with electronic components mounted thereon; a heating chamber to heat through an ambient gas the printed circuit board carried therein to solder the electronic components on a surface of the printed circuit board; and an ambient gas purification equipment including a retrieving device to retrieve a part of the ambient gas containing vaporized flux component when soldering, a heating device to heat the retrieved ambient gas to a desired temperature, an oxidation catalyst to burn the flux component contained in the heated ambient gas, and a returning device to return a high temperature gas after being burned to the heating chamber.
    Type: Grant
    Filed: March 21, 2007
    Date of Patent: August 3, 2010
    Assignee: Tamura FA System Corporation
    Inventors: Toshiyuki Asai, Motohiro Yamane, Takayuki Matsuoka, Atsushi Tanaka
  • Patent number: 7753678
    Abstract: Apparatus for batch processing source material into charcoal in a battery of kilns, each of which use forced convection of process gases through the source material to shorten the process cycle time, and all of which use an external combustor to burn the process waste gases from each kiln to provide the primary source of applied energy for the process.
    Type: Grant
    Filed: June 10, 2005
    Date of Patent: July 13, 2010
    Assignee: Nucor Corporation
    Inventors: Gerald A. Teeter, Jared S. Kaufman, John L. Pressly, Christopher Adam Goebel, Paul David Debski
  • Publication number: 20100104997
    Abstract: An air impingement conveyor oven incorporating a baking case having an interior space bordered by opposing longitudinal walls, opposing lateral walls, a ceiling, and a floor; an air plenum partitioning the baking case's interior space into an air impingement space and an air return space, the air plenum having at least a first intake port opening at the air return space, the air plenum further having a plurality of air impingement ducts extending into and opening at the air impingement space; a passive flow conduit opening the baking case, the passive flow conduit having an output end positioned at the return air space; a combustible fuel injector and igniter connected operatively to the passive flow conduit; and an air impelling fan mounted operatively within the baking case's interior space for recirculating impingement air from the air impingement space into the air return space, for drawing outside combustion air through the passive flow conduit, and for driving the air through the at least first intake p
    Type: Application
    Filed: October 27, 2008
    Publication date: April 29, 2010
    Applicant: WOLFE ELECTRIC, INC.
    Inventors: Ronald D. Wolfe, Frederick Hausler, Brent Staver
  • Patent number: 7662546
    Abstract: A heating apparatus for a substrate to be processed with a coating film has a chamber with an inner space, a heating plate heating the substrate to be processed in the inner space, and a partition member. The heating plate has a support surface which supports the substrate to be processed within the chamber. The partition member is arranged in the chamber so as to face the support surface. The partition member partitions the inner space into first and second spaces, and has a plurality of pores which allow the first and second spaces to communicate with each other. The support surface of the heating plate is set in the first space. An air stream formation mechanism forming an air stream is arranged in the second space. This mechanism discharges a substance evaporated from the photoresist film.
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: February 16, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenji Kawano, Shinichi Ito, Eishi Shiobara, Daisuke Kawamura, Kei Hayasaki
  • Publication number: 20090176181
    Abstract: The present invention relates generally to semiconductor wafer fabrication and more particularly but not exclusively to advanced process control methodologies for controlling oxide formation using pressure. The present invention, in one or more implementations, includes a pressure stabilization system to dynamically adjust scavenger pressure in a furnace during wafer fabrication in relation to a pressure formation range, value, or one or more pressure indicators in a wafer fabrication process.
    Type: Application
    Filed: November 12, 2007
    Publication date: July 9, 2009
    Applicant: MICREL, INC.
    Inventor: Miles DUDMAN
  • Publication number: 20090136888
    Abstract: The present invention is a heat processing apparatus comprising: a processing vessel that receives a plurality of objects to be processed in a tier-like manner to subject the objects to be processed to a predetermined heating process; a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; an exhaust heat system for discharging an atmosphere in a space between the heater and the processing vessel; and a cooling unit that blows-out a cooling fluid into the space to cool the processing vessel. The heater has a tubular heat insulating member, and a heating resistor arranged on an inner circumference of the heat insulating member. The cooling unit has a plurality of blowing nozzles embedded in the heat insulating member. Each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other.
    Type: Application
    Filed: June 12, 2006
    Publication date: May 28, 2009
    Inventors: Ken Nakao, Kazuhiko Kato
  • Patent number: 7520746
    Abstract: In a method and system for an improved annealing furnace cooling and purging, atmosphere injection jets are provided in close proximity to a bottom of a tray carrying a lamination product in a cooling section. Atmospheric extraction tubes are also provided extracting atmosphere which is delivered to a high temperature variable speed fan which then outputs at a pressure side atmosphere to tubes having the injection jets. The system may be retrofit into an existing annealing furnace already having water cooled finned tubes and a recirculation fan in the cooling section. Cooling water tubes and a recirculating fan may also be provided in a purge vestibule located after an output from the cooling section for additional cooling.
    Type: Grant
    Filed: June 5, 2007
    Date of Patent: April 21, 2009
    Assignee: Temple Steel Company
    Inventors: Gwynne Johnston, Michael E. Kubis
  • Publication number: 20080283515
    Abstract: A temperature control method is used for controlling a temperature of a hot plate, so that a measured temperature of the hot plate conforms to a target temperature thereof, in a heat processing apparatus for performing a heat process on a substrate placed on the hot plate, which is used in a coating/developing system for applying a resist coating onto the substrate to form a resist film and then performing development on the resist film after light exposure. The method includes acquiring adjustment data necessary for adjusting a reaching time defined by a time period for increasing the temperature of the substrate from a first temperature around an initial temperature to a second temperature around the target temperature; and adjusting the target temperature by use of the adjustment data thus acquired, after starting the process on the substrate.
    Type: Application
    Filed: January 30, 2008
    Publication date: November 20, 2008
    Inventors: Jun OOKURA, Eiichi SEKIMOTO, Hisakazu NAKAYAMA
  • Publication number: 20080241779
    Abstract: A continuous-atmosphere high-temperature furnace apparatus comprises a high-temperature furnace section, a mechanism for continuously supplying substrates or samples to the high-temperature furnace section, and a mechanism for continuously discharging treated substrates or samples from the high-temperature furnace section. Gas is exhausted from the high-temperature furnace section and ambient gas is supplied thereto for reaction to produce carbon materials and various other nanomaterials or to burn and graphitize the nanomaterials. The substrates or samples are sequentially moved for heat treatment, thereby improving the work efficiency of the high-temperature furnace.
    Type: Application
    Filed: March 27, 2008
    Publication date: October 2, 2008
    Inventors: Takao Kamiyama, Guochun Xu, Kazuki Shimizu
  • Publication number: 20080199822
    Abstract: The apparatus for the continuous catalytic removal of binder from metallic and/or ceramic shaped bodies produced by powder injection molding, which comprises a binder removal furnace through which the shaped bodies pass in a transport direction and are brought to a suitable process temperature, a feed facility for introduction of a process gas which is required for binder removal and comprises a reactant, at least one facility for the introduction of a protective gas into a reaction space of the binder removal furnace and a flare to burn the gaseous reaction products obtained in binder removal, wherein one or more devices which lead to a flow of the process gas directed transversely to the transport direction in the apparatus are present.
    Type: Application
    Filed: June 7, 2006
    Publication date: August 21, 2008
    Applicant: BASF Aktiengesellschaft
    Inventors: Martin Blomacher, Johan Herman Hendrik ter Maat, Hans Wohlfromm, Tsung-Chieh Cheng, Franz-Dieter Martischius, Arnd Thom
  • Publication number: 20080182118
    Abstract: One aspect of the present invention provides a continuous heat treatment furnace in which an atmosphere-control gas is introduced to a heating chamber 1 having a heating zone 1a, metal tubes are continuously charged along an axial direction from a furnace entrance 2a, and the metal tube subjected to a heat treatment is taken out from a furnace exit 2b. The continuous heat treatment furnace includes a front chamber 4 which has a preheating zone 3 on an entrance side of the heating chamber and seal curtains 5a and 5b which are located on an entrance side and an exit side of the front chamber. Another aspect of the present invention provides a metal tube subjected to the heat treatment using the continuous heat treatment furnace, and yet another aspect of the present invention provides a heat treatment method for performing the heat treatment using the heat treatment furnace.
    Type: Application
    Filed: January 24, 2008
    Publication date: July 31, 2008
    Inventors: MIKIO TATSUOKA, Akhiro Sakamoto
  • Publication number: 20080156237
    Abstract: The combustor for solid particulate fuels is particularly well suited for burning shelled corn, but is also capable of burning other solid particulate fuels as desired, with no modification required for their use. The combustor includes a rotary agitator extending across the combustor chamber or “burning pot,” with the agitator having a plurality of radial arms. Combustion air passes through the hollow agitator shaft outwardly through the hollow arms, the arms distributing combustion air into the fuel mass as the arms rotate therethrough to produce more efficient combustion of the fuel and thereby reduce coagulation of partially burned corn on the internal surfaces of the combustor. The opposed walls of the combustor include at least one pivotally mounted wall, with the angle of that wall being adjustable to adjust the ash dispersal gap between the pivoting wall and the opposite wall.
    Type: Application
    Filed: December 28, 2006
    Publication date: July 3, 2008
    Inventor: Joseph Q. Leihgeber
  • Patent number: 7384181
    Abstract: A milled materials processor consists of a self contained, stationary or fully mobile thermal process plant for the thermal processing of 100% recycled asphalt pavement into new hot mix paving material. Mobile units are designed for transportation by vehicle to a job site and rapid arrangement. For example, the milled materials processing unit at the standard legal load or non-permit load size and configuration processes approximately 25 tons per hour of pre-sized recycled asphalt pavement materials, approximately 50,000 lbs gross, having up to 3% moisture content. Larger unit sizes are available in transportable configurations of 10? wide×54? long, and 12? wide×62? long. Alternatively, units are designed and erected as stationary modular systems for higher tonnage capacities from approximately 200 tons per hour to approximately 400 tons per hour and higher.
    Type: Grant
    Filed: March 10, 2005
    Date of Patent: June 10, 2008
    Inventor: Jerry R. Collette