Abstract: A substrate processing apparatus, comprising a substrate support (32) provided with a support surface (34) for supporting a substrate or a substrate carrier (24) thereon and a support heater (50) constructed and arranged to heat the support surface (34). The apparatus comprises a heat shield constructed and arranged to cover and shield the substrate support (32) when no substrate or substrate carrier (24) is on the support surface.

Abstract: An information handling system may include an information handling resource and an air mover configured to drive a flow of air. The air mover may have one or more air mover components for driving the flow of air and a coil configured to heat the one or more air mover components.

Abstract: An air impingement conveyor oven incorporating a case having orthogonal walls, the case being opened by opposite end food passage ports; an air plenum mounted within the case; vertical pairs of forwardly extending finger ducts mounted to the plenum; a food conveyor extending between the finger ducts pairs and through the food passage ports; register plates having air jet matrixes, the register plates covering the finger ducts; and the matrixes air jets upon the register plates, the air jets being configured for air flow direction biasing both toward the rearward ends of the food passage ports and away from the forward ends of the food passage ports.

Abstract: The present application provides a reflow oven (100) and a gas recovery method. The reflow oven (100) comprises a reflow oven hearth (101), a separator (105), the separator inlet (110) being connected to the gas outlet (102) of the reflow oven hearth (101) so that the gases in the reflow oven hearth (101) can flow into the separator (105), a zeolite box (107), the zeolite box inlet (112) being connected to the separator outlet (111), and the zeolite box outlet (113) being connected to the gas inlet (103) of the reflow oven hearth (101) so that the gases flowing through the separator (105) can enter the zeolite box (107) and the gases flowing through the zeolite box (107) can flow out of the zeolite box outlet (113), a sensor (106), which is provided in the gas passage between said zeolite box outlet (113) and the gas inlet (103) of the reflow oven hearth (101). The reflow oven (100) in the present application enables the gases flowing through the separator (105) to enter the zeolite box (107).

Abstract: A transfer device comprises a transfer arm to which a pick is attached and an inclination adjusting mechanism disposed below the transfer arm and configured to adjust an inclination of the transfer arm. The inclination adjusting mechanism includes an upper portion fixed to a lower portion of the transfer arm, a lower portion disposed below the upper portion to face the upper portion, a support portion that rotatably supports the upper portion with respect to the lower portion, and at least two actuators disposed between the upper portion and the lower portion.

Abstract: A solder reflow oven may include a reflow chamber and a plurality of vertically spaced apart wafer-support plates positioned in the reflow chamber. A plurality of semiconductor wafers each including a solder are configured to be disposed in the reflow chamber such that each semiconductor wafer is disposed proximate to, and vertically spaced apart from, a wafer-support plate. Each wafer-support plate may include at least one of liquid-flow channels or resistive heating elements. A control system control the flow of a hot liquid through the channels or activate the heating elements to heat a wafer to a temperature above the solder reflow temperature.

Abstract: The present invention mainly relates to a susceptor for a reactor for epitaxial growth, comprising: a disc-shaped body (90) having a first face and a second face, wherein the first face comprises at least one zone (99) adapted to receive a substrate (2000) to be subjected to epitaxial growth and at least one supporting element (91+97) for the substrate (2000), located at the zone (99); the supporting element (91+97) comprises a circular disc (91) with an edge (97) which is raised with respect to the disc; the zone (99) may be a bottom of a recess (99) or a top of a relief of the disc-shaped body (90); the disc-shaped body (90) is solid at least at the recess (99) or relief; the edge is accessible from a side of the susceptor for handling the supporting element.

Abstract: A heat-recovering oven system based on temperature gradient comprises: multiple chambers arranged in a sequence, the chambers configured for operating at various temperatures according to a temperature gradient arrangement that spans the sequence; a conveyor configured for transporting product through the multiple chambers in the sequence for heat treatment according to the temperature gradient arrangement; and multiple temperature-segregated heat exchanger systems, each heat exchanger system including a heat exchanger, a conduit to at least one of the chambers based on its temperature in the temperature gradient arrangement, and a return conduit from the at least one chamber to the heat exchanger.

Abstract: A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.

Abstract: A direct reduction process producing DRI from iron oxide particles by reduction at a about 750° C. with a reducing gas mainly H2 and CO, that also includes CO2, H20, and methane, a the reduction reactor and the top gas effluent from the reduction reaction after cooling/scrubbing is split. The resulting first top gas portion with a first hydrocarbon-containing make-up gas passes through a catalytic reformer yielding an improved hot reducing gas first effluent. The second top gas portion passes through a CO2 removal unit and then with the second hydrocarbon-containing make-up gas passes through a heater yielding a hot CO2-lean recycle reducing gas second effluent. The first and second effluents are fed to the reducing zone of the reduction reactor as the reducing gas reactant. The flow rate of at least the second of the two make-up gases is regulated to control the carbon content of the DRI produced.

Abstract: Apparatus for continuously conveying and pre-heating a metal charge inside a container of a melting plant, includes at least a channel for conveying the metal charge, at least a hood disposed above the conveyor channel defining a tunnel and/or an expansion chamber, inside which at least part of the fumes exiting from the container advance, and apertures made in cooperation with lateral walls of the conveyor channel to discharge the fumes. The conveyor channel includes an activator that divert the fumes and/or delimit the zone occupied by the metal charge of the conveyor channel, and that cooperate longitudinally with at least part of the conveyor channel.

Abstract: A method and system for improving high excess air combustion system efficiency, including induration furnaces, using a re-routing of flue gas within the system by gas recirculation. Flue gas is drawn from hot system zones including zones near the stack, for re-introduction into the process whereby the heat recovery partially replaces fuel input. At least one pre-combustion drying zone, at least one combustion zone, and at least a first cooling zone exist in these furnaces. At least one exhaust gas outlet is provided to each pre-combustion drying and combustion zone. At least part of the gaseous flow from each system zone exhaust outlet is selectively delivered to an overall system exhaust, the remaining flow being selectively delivered via recirculation to cooling zones. Recirculation flow is adjusted to meet required system temperatures and pressures. The method and system provide efficiency improvements, reducing fuel requirements and greenhouse gas emissions.

Abstract: The tunnel kiln according to the present invention includes a tunnel kiln main body having an inner wall constituted by a furnace material, and having a debinding zone and a sintering zone wherein respectively debinding and sintering of a body to be fired containing an organic component are performed; a conveying unit for conveying the body to be fired from an inlet side to an outlet side of the tunnel kiln main body; and a lining provided so that at least an inner wall of the debinding zone of the inner wall of the tunnel kiln main body is covered therewith.

Abstract: An air impingement tunnel oven including a baking case having a plurality of walls, the case's interior having high and low pressure zones; a food conveyor spanning between food passage ports; a plenum and air impingement registers combination having pluralities of finger ducts overlying and underlying the food conveyor, each finger duct being attached to and extending from the plenum, and the plenum dividing the baking case's high and low pressure zones; a gas burner supported upon one of the baking case's walls and including a shell and a gas tube within the shell, the shell defining an annulus which opens the baking case's low pressure zone; and an optical flame sensor operatively mounted for detecting burner flame light passing outwardly through the annulus.

Abstract: A disclosed substrate processing apparatus comprises a heat exchange plate configured to heat and/or cool the substrate; plural protrusions provided on the heat exchange plate so as to allow the substrate to be placed on the plural protrusions, leaving a gap between the substrate and the heat exchange plate; a suction portion configured to attract the substrate onto the plural protrusion by suction through plural holes formed in the heat exchange plate; and a partition member that is provided on the heat exchange plate and lower than the plural protrusions, wherein the partition member is configured to divide the gap into two or more regions including at least one of the holes so that at least one of the two or more regions is two-dimensionally closed by the partition member.

Abstract: The present invention provides a preheat module, which comprises a heating chamber, a blower and a platform; the heating chamber comprises a heating device and a first inlet; the blower comprises a second inlet and a first outlet, and the second inlet is connected to the heating chamber; the platform comprises a third inlet and a second outlet, and the third inlet is connected to the first outlet; the first inlet and the second outlet are set in a same plane. An advantage of the present invention is that it can reduce the energy consumption also can satisfy the requirement of conserving electrical power and protecting the environment.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: The invention relates to a process for manufacturing cement clinker in a plant having a cyclone preheater, a precalcination reactor, a rotary furnace and a clinker cooler. In the process, the flue gases from the furnace are conducted to the precalcination reactor, or even to the cyclone preheater. According to the invention, the precalcination reactor is fed with an oxygen-rich gas, the nitrogen content of which is less than 30%, constituting the sole oxygen source for said reactor, and a portion leaving the cyclone preheater is recycled into the plant so as to obtain a suitable flux necessary for suspending matter in said preheater, while the other portion, rich in carbon dioxide, is adapted for the purpose of a treatment for limiting the amount of carbon dioxide discharged into the atmosphere, such as particularly sequestration.

Abstract: The invention provides a tunnel kiln for firing ceramic porous bodies which can fire ceramic porous bodies containing organic binders in a shorter period of time than in conventional methods without producing breaks or requiring nitrogen gas. The tunnel kiln includes a preheating zone 1, a firing zone 2, and a cooling zone 3 and fires the ceramic porous bodies loaded on a carriage 7 by driving it in a furnace. A heat storage regenerative burner 10 is used as means of heating the firing zone 2 so that low-oxygen-concentration exhaust gas discharged from the heat storage regenerative burner 10 may be returned to an exhaust gas return line 14 and supplied into the preheating zone 1. The exhaust gas return line 14 may be provided with a combustion device 17 that reduces the oxygen concentration by consuming oxygen contained in the exhaust gas.

Abstract: The invention provides a shuttle kiln that can fire ceramic porous bodies containing organic binders in a shorter period of time than in conventional methods without occurring breaks due to a temperature difference between the inside and the outside. The shuttle kiln of the invention is suited for firing of ceramic porous bodies containing organic binders. It includes a gas suction path 4 that suctions in-furnace gas and discharges it via an afterburner 5 and a circulation path 7 that suctions the in-furnace gas to the furnace outside to burn organic binder gas and then returns it into the furnace.

Abstract: A nozzle housing assembly, which is used in a convection heating furnace for a heat treatable glass sheet. The nozzle housing assembly comprises an elongated enclosure, at least one elongated heating resistance in the enclosure for heating convection air, and orifices in a bottom surface of the enclosure for blasting heated convection air against the glass sheet. The enclosure is divided with a flow-throttling partition into a top supply duct and a bottom nozzle box, the heating resistances being housed in the latter. Flow-throttling openings present in the partition are positioned to comply with the location and shape of the heating resistances.

Abstract: An oven apparatus 24 having a modular construction for curing paint on the surface of a vehicle body 26 using radiant and convection heat. The oven apparatus 24 includes a plurality of oven modules 30. Each oven module 30 includes a pair of convection return air assemblies 128 for removing exhaust gases from the oven interior 98 and a pair of radiant heating tubes 100 for heating the vehicle body. Each of the convection return air assemblies 128 has a reflective outer surface 94 for reflecting radiant heat from the radiant heating tubes 100 at the vehicle body 26.

Abstract: A method delivers fuel gas to a furnace combustion chamber from a premix burner having a reaction zone with an outlet to the furnace combustion chamber. This includes the steps of injecting a premix of primary fuel gas and combustion air into the reaction zone, and combusting the premix to provide combustion products including vitiated combustion air in the reaction zone. Further steps include injecting staged fuel gas into the reaction zone separately from the premix, discharging the staged fuel gas and vitiated combustion air from the reaction zone through the outlet to the furnace combustion chamber, and combusting the staged fuel gas and vitiated combustion air in the furnace combustion chamber. This enables low NOx combustion in the furnace combustion chamber to be achieved as a result of interacting the staged fuel gas with the vitiated combustion air in the reaction zone.

Abstract: A rotary tube furnace (1) comprising an insulated heating chamber (4), the insulated heating chamber having a product discharge outlet (21) and a process tube inlet (39), a heating element (14) operatively arranged to selectively heat the heating chamber, a generally horizontally extending process tube (2) supported for rotation relative to the heating chamber, the process tube having a first portion (36) generally arranged outside of the heating chamber and a cantilevered second portion (37) extending from the first portion into the heating chamber and terminating at a discharge end (38) within the heating chamber, a feed mechanism (40) configured and arranged to feed product into the process tube, and a bearing assembly operating between a support frame (34) and the first portion of the process tube and configured and arranged to support the process tube and transmit rotational torque to the process tube.

Abstract: A method for processing solar cells comprising: providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing; composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber, loading the solar cell substrates into the process chamber; subjecting the solar cell substrates to a process in the process chamber.

Abstract: An industrial furnace comprises a main body, multiple heating sets, multiple heat-distributing plates, and an atmosphere pressurizing device. The main body defines a space therein. The heating sets are provided in the main body and arranged evenly above or below the space. The heat-distributing plates are provided corresponding to the heating sets, each plate being mounted between the space and one of the heating sets, so that the space is located between the heat-distributing plates. The atmosphere pressurizing device is mounted on the main body and provided with a conduit for communicating with the space. Thereby, the atmosphere pressurizing device can supply an inert atmosphere to the space via the conduit. The inert atmosphere will have a pressure greater than that of the gas if sublimated from the graphite so that the heat-distributing plates can be prevented from being damaged after a long time of use.

Abstract: A method for firing raw ceramic blanks in a furnace includes the steps of guiding trains of blanks running parallel to one another along a longitudinal furnace section having a firing zone, wherein the trains are moved in opposite directions during one movement operation, and the furnace is loaded using blanks to be moved in a first direction. A furnace for firing raw ceramic blanks having a plurality of trains which are arranged parallel to one another and can move along a longitudinal furnace section, so trains comprising a plurality of furnace bogies on which the blanks are to be arranged, wherein the furnace section has a firing zone, and wherein the trains are moved in opposite directions, and the furnace is at a first end of the furnace section for loading the blanks to be moved in a first direction into the furnace.

Abstract: Contact lens curing systems and methods are described. A contact lens curing system includes an oven that has a plurality of curing zones, a mold advancement system for moving contact lens mold assemblies between the plurality of zones, and a controlled atmosphere in the curing zones that provides a substantially chemically inert environment in which contact lens precursor materials can be polymerized in contact mold assemblies located in the curing zones. Methods of producing contact lenses include curing contact lens precursor materials in contact lens mold assemblies in the lens curing system.

Abstract: A conveyor oven is described. The conveyor oven includes a frame made of load-bearing structural members. The conveyor oven has a modular construction, with the structural members defining a rectangular prism. Blocks of insulation are placed in the frame openings, and a flexible insulating material, such as a multi-layer insulating textile, is used to cover joints between adjacent modules. Along the length of the conveyor oven, idler rollers that support the conveyor belt have ends that penetrate the sides of the oven and are supported such that the rollers can shift as the oven expands and contracts without creating openings for heat or air leakage. Air flow within the oven is managed using sets of adjustable baffle plates above and below the conveyor belt.

Abstract: A roller hearth calcining furnace that uses a movable fluid bed that is transported through plural heating modules, each heating module independently heated using an indirect heating system. The indirect heating system includes an oxidizer, an all-ceramic, indirect, air-to-air heat exchanger, and one or more metal heat exchangers. The oxidizer can be fired with oil, coal, natural gas or other means, is impervious to attack from dirty fuels, and produces clean hot air for productive use. The movable fluid bed includes a permeable silicon carbide ceramic plate that resides within, and is supported by, a sagger or tray. The sagger is transported on rollers through the plural heating modules, and thus different temperature zones within a furnace as required by the temperature profile of the material being calcined.

Abstract: A multizone convection furnace is provided in which gas from a cooling chamber of the furnace is directed into one or more heat zones of the furnace for the purpose of providing a specified thermal profile. The gas introduced from the cooling chamber into the one or more heat zones is of the same type of gas present in the heat zones, and typically is nitrogen. In a preferred embodiment, the convection furnaces comprises a heating chamber composed of a plurality of adjacent heat zones and a cooling chamber at the exit end of the heating chamber. A conveyer extends through the furnace for movement of a product through the heat zones and cooling chamber of the furnace. The cooling chamber is coupled to one or more of the heat zones such that cooled gas from the cooling chamber can be introduced into selected heat zones. In one version, a cooled gas path is provided to all of the heat zones and cooled gas is introduced into intended zones by opening associated valves.

Abstract: A conveyor oven has several heating zones. Each heating zone is comprised of one or more infrared emitters that are configured to emit a spectrum of infrared wavelengths that varies in intensity and spectrum over time. The spectra of emitted infrared wavelengths in each zone can have the same or different profile. Zones are regions wherein infrared emitters are configured and operated to emit the same or substantially the same infrared energy wavelengths and intensity levels across an IR spectrum. Access to the infrared emitters and the conveyor is provided by one or more access or maintenance ports formed into a side of the conveyor oven. Temperature control inside the oven is effectuated by venting hot air through air vents formed into the oven sides and/or top.

Abstract: The heat recovery system includes an oven having a treatment air with a treatment air temperature and a treatment air dew point temperature to treat a product or product in process. A zone outlet exhaust waste treatment air following the treatment of the product. A preheating zone includes a preheating inlet for the introduction of preheating air having a preheating air temperature and a preheating air dew point temperature to preheat the product. A transfer duct extends between the zone outlet of the oven and the preheating zone to transfer a portion of waste treatment air from the oven to the preheating zone to create the preheating air to preheat additional product. The preheating air preheats the product in the preheating zone to a product temperature that is at least equal to the treatment air dew point temperature to eliminate surface condensation on the product during treatment in the oven.

Abstract: A device intended to assist in the accurate and controlled shrinkage of thermo-shrinkable container-jacketing material. Said device producing at least an elevated temperature in a heated processing zone. Heat energy available in said heated processing zone primarily derived from a first heat source, preferably pressurized steam. Said first heat source steam exhibiting preferred characteristics related to the controlled shrinking of thermo-shrinkable materials. A second heat source, other than steam, acting in cooperative relationship with said first heat source steam, delaying the decay of one or more preferred characteristics of said first heat source steam. Said first heat source steam, urging said heat-shrinkable materials to shrink, substantially conforming to receiving containers in a preferred manner along one or more axis.

Abstract: An air impingement conveyor oven incorporating a baking case having an interior space bordered by opposing longitudinal walls, opposing lateral walls, a ceiling, and a floor; an air plenum partitioning the baking case's interior space into an air impingement space and an air return space, the air plenum having at least a first intake port opening at the air return space, the air plenum further having a plurality of air impingement ducts extending into and opening at the air impingement space; a passive flow conduit opening the baking case, the passive flow conduit having an output end positioned at the return air space; a combustible fuel injector and igniter connected operatively to the passive flow conduit; and an air impelling fan mounted operatively within the baking case's interior space for recirculating impingement air from the air impingement space into the air return space, for drawing outside combustion air through the passive flow conduit, and for driving the air through the at least first intake p

Abstract: A heating device for a soldering system. One embodiment of the heating device has at least one heating nozzle equipped with at least two tubular outlet channels. At least one outlet channel of the heating nozzle is arranged at an angle opposite another outlet channel of the heating nozzle. One embodiment of a selective soldering system is also provided. The selective soldering system comprises a heating device and a selective soldering device which is connected downstream from the heating device. The heating device is equipped with at least one heating nozzle in order to guide the heating current in the direction of a flat side of each board to be soldered. At least one heating nozzle is equipped with at least two tubular outlet channels, and at least one outlet channel of each heating nozzle is arranged at an angle opposite another outlet channel of each heating nozzle.

Abstract: A multiple moving hearth furnace (10) having a furnace housing (11) with at least two moving hearths (20) positioned laterally within the furnace housing, the hearths moving in opposite directions and each moving hearth (20) capable of being charged with at least one layer of iron oxide and carbon bearing material at one end, and being capable of discharging reduced material at the other end. A heat insulating partition (92) is positioned between adjacent moving hearths of at least portions of the conversion zones (13), and is capable of communicating gases between the atmospheres of the conversion zones of adjacent moving hearths. A drying/preheat zone (12), a conversion zone (13), and optionally a cooling zone (15) are sequentially positioned along each moving hearth (30) in the furnace housing (11).

Abstract: Apparatus and methods that minimize surface defect development in silicon wafers during thermal processing at relatively high temperatures at which silicon wafers are annealed and at less extreme temperature, or for other purposes. The apparatus and methods have utility to horizontally-disposed furnaces for silicon wafers and to vertically-oriented furnaces in which larger wafers can be thermally processed. A selectively-sealable process tube encloses silicon wafers during heating of the silicon wafers to a predetermined temperature, and a heating atmosphere supply system induces through the process tube a positive flow of a process gas, such as hydrogen or argon, that is non-reactive with solid silicon at the predetermined temperature. A process tube outlet vents gas from the process tube, and an impurity sensor in the process tube outlet detects oxygen and moisture in the vented gas to verify the purity of the atmosphere surrounding the wafers during thermal processing.

Abstract: An apparatus characterized by a feature that in a stage on which a substrate or a jig holding a substrate is mounted, an opening closed when the substrate or the jig is mounted is provided and the substrate or the jig is heated by blowing hot air against the lower portion of the substrate or the jig and by a feature that a solder bump is formed on a pad electrode by heating or reflowing a solder composition which is a mixture containing solder particles, a flux component, and a liquid material which is liquid at normal temperature or changing to liquid when heated, and the composition is heated from the substrate side.

Abstract: Apparatus and a process for the continuous cycle decoration of profiled bars for shutters and frames, or other similar objects, with a carrier film of plastic material, printed with the desired decoration with sublimable inks. The process provides for a significant number of profiled bars or decorated steel sheets to be produced per unit of time.

Abstract: The present invention has an object to provide burning equipment that can prevent uneven burning and increase productivity. The burning equipment of the present invention includes: a furnace body (13) having an inner space in which a powdery or granular subject to be treated (11) is burned; a gas ejection portion (21) having an opening for ejecting an atmospheric gas from above the subject to be treated (11) which is conveyed in the inner space of the furnace body (13); a gas supply portion (18) for supplying the atmospheric gas from a side wall (13c) of the furnace body (13) to the gas ejection portion (21); and a heating portion (24a, 24b) for controlling temperature distribution in the inner space of the furnace body (13).

Abstract: The facility is comprised of an oven (8) fitted with rotating supports (3) disposed parallel to each other, upon which preformed tubes (11) rest and rotate, which are introduced from a feeder (14) where they are contained at room temperature for their homogeneous circumferential heating inside said oven (8). Additionally, transverse displacement means (5, 6) are disposed inside the oven (8) in order to facilitate the elevation and transverse displacement of the preformed tubes (11), in such a manner as to favour the progressive and uniform heating throughout the thickness of said preformed tubes (11). On the other hand, it features assemblies that generate heating currents (15, 10, 2) comprised of elements (15), fans (10) and deflectors (2) longitudinally distributed in sectors or quadrants inside the oven (8), for the purpose of heating and distributing the air over the preformed tubes (11).

Abstract: An oven apparatus including wall members which constitute an oven wall defining internal and external regions of an oven and partition walls forming oven compartments within the oven by defining internal and external regions thereof, the wall members including an inner wall panel facing an internal side of the oven or oven compartment, an outer wall panel facing the external side of the oven or oven compartment, and thermal insulation installed between the inner and outer wall panels, wherein a sealable ventilation port is formed on the inner wall panel, a sealable suction port is formed on the outer wall panel, and a suction-generator is connected to the suction port for evacuating the atmosphere within the wall member.

Abstract: A reflow furnace comprises: a carrier device to carry a printed circuit board with electronic components mounted thereon; a heating chamber to heat through an ambient gas the printed circuit board carried therein to solder the electronic components on a surface of the printed circuit board; and an ambient gas purification equipment including a retrieving device to retrieve a part of the ambient gas containing vaporized flux component when soldering, a heating device to heat the retrieved ambient gas to a desired temperature, an oxidation catalyst to burn the flux component contained in the heated ambient gas, and a returning device to return a high temperature gas after being burned to the heating chamber.

Abstract: Apparatus for batch processing source material into charcoal in a battery of kilns, each of which use forced convection of process gases through the source material to shorten the process cycle time, and all of which use an external combustor to burn the process waste gases from each kiln to provide the primary source of applied energy for the process.

Abstract: An air impingement conveyor oven incorporating a baking case having an interior space bordered by opposing longitudinal walls, opposing lateral walls, a ceiling, and a floor; an air plenum partitioning the baking case's interior space into an air impingement space and an air return space, the air plenum having at least a first intake port opening at the air return space, the air plenum further having a plurality of air impingement ducts extending into and opening at the air impingement space; a passive flow conduit opening the baking case, the passive flow conduit having an output end positioned at the return air space; a combustible fuel injector and igniter connected operatively to the passive flow conduit; and an air impelling fan mounted operatively within the baking case's interior space for recirculating impingement air from the air impingement space into the air return space, for drawing outside combustion air through the passive flow conduit, and for driving the air through the at least first intake p

Abstract: A heating apparatus for a substrate to be processed with a coating film has a chamber with an inner space, a heating plate heating the substrate to be processed in the inner space, and a partition member. The heating plate has a support surface which supports the substrate to be processed within the chamber. The partition member is arranged in the chamber so as to face the support surface. The partition member partitions the inner space into first and second spaces, and has a plurality of pores which allow the first and second spaces to communicate with each other. The support surface of the heating plate is set in the first space. An air stream formation mechanism forming an air stream is arranged in the second space. This mechanism discharges a substance evaporated from the photoresist film.

Abstract: The present invention relates generally to semiconductor wafer fabrication and more particularly but not exclusively to advanced process control methodologies for controlling oxide formation using pressure. The present invention, in one or more implementations, includes a pressure stabilization system to dynamically adjust scavenger pressure in a furnace during wafer fabrication in relation to a pressure formation range, value, or one or more pressure indicators in a wafer fabrication process.

Abstract: The present invention is a heat processing apparatus comprising: a processing vessel that receives a plurality of objects to be processed in a tier-like manner to subject the objects to be processed to a predetermined heating process; a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; an exhaust heat system for discharging an atmosphere in a space between the heater and the processing vessel; and a cooling unit that blows-out a cooling fluid into the space to cool the processing vessel. The heater has a tubular heat insulating member, and a heating resistor arranged on an inner circumference of the heat insulating member. The cooling unit has a plurality of blowing nozzles embedded in the heat insulating member. Each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other.

Abstract: In a method and system for an improved annealing furnace cooling and purging, atmosphere injection jets are provided in close proximity to a bottom of a tray carrying a lamination product in a cooling section. Atmospheric extraction tubes are also provided extracting atmosphere which is delivered to a high temperature variable speed fan which then outputs at a pressure side atmosphere to tubes having the injection jets. The system may be retrofit into an existing annealing furnace already having water cooled finned tubes and a recirculation fan in the cooling section. Cooling water tubes and a recirculating fan may also be provided in a purge vestibule located after an output from the cooling section for additional cooling.