Abstract: In a method of manufacturing a semiconductor element (6) having a cathode (3) and an anode (5), the starting material used is a relatively thick wafer (1) to which, as a first step, a barrier region (21) is added on the anode side. It is then treated on the cathode side, and the thickness of the wafer (1) is then reduced on the side opposite to the cathode (3), and an anode (5) is produced on this side in a further step. The result is a relatively thin semiconductor element which can be produced economically and without epitaxial layers.
Abstract: A method for stabilizing a tunnel junction component, in which a mask is formed on the surface of a substrate, and conductors (3, 4) are constructed by evaporation onto the substrate in an evaporation chamber, and at least one thin oxide layer element (5) is oxidized on top of a selected conductor (3). This remains partly under the following conductor (4), thus forming a tunnel junction element (2) with those conductors (3, 4), and titanium (Ti) or another gettering substance is evaporated on top of the said following conductor (4), before the tunnel junction component is removed from the evaporation chamber, when the titanium layer (7) thus created protects the tunnel junction element (2) from the detrimental effects of air molecules.
Type:
Application
Filed:
June 17, 2002
Publication date:
December 19, 2002
Inventors:
Juha Kauppinen, Jukka Pekola, Antti Manninen
Abstract: The invention comprises an integrated circuit including integral high and low-voltage peripheral transistors and a method for making the integrated circuit. In one aspect of the invention, a method of integrating high and low voltage transistors into a floating gate memory array comprises the steps of forming a tunnel oxide layer outwardly from a semiconductor substrate, forming a floating gate layer disposed outwardly from the tunnel oxide layer and forming an insulator layer disposed outwardly from the floating gate layer to create a first intermediate structure. The method further includes the steps of masking a first region and a second region of the first intermediate structure leaving a third region unmasked, removing at least a portion of the insulator layer, the floating gate layer and the tunnel oxide layer from the third region and forming a first dielectric layer disposed outwardly from the substrate in a region approximately coextensive with the third region.
Abstract: A method of manufacturing a joined-type semiconductor device having a gate structure. The semiconductor device includes a first and second semiconductor substrates each having a substrate body, and a first and a second main surfaces which are opposite to each other. A gate structure is formed in the first main surface of the first substrate. A highly-doped semiconductor layer is formed in the first main surface of the second substrate and has an impurity-concentration which is higher than that of the substrate body of the second substrate. The first main surfaces of the two substrates are joined with each other, by subjecting the two substrates to a heat treatment so that impurities in the highly-doped semiconductor layer of the second substrate are driven into the surface region of the first substrate, and a diffusion layer is thereby formed in the first main surface of the first substrate.
Abstract: A process for manufacturing a MOS-technology power device chip and package assembly, the MOS-technology power device chip comprises a semiconductor material layer in which a plurality of elementary functional units is integrated, each elementary functional unit contributing a respective fraction to an overall current and including a first doped region of a first conductivity type formed in the semiconductor layer, and a second doped region of a second conductivity type formed inside the first doped region; the package comprises a plurality of pins for the external electrical and mechanical connection; the plurality of elementary functional its is composed of sub-pluralities of elementary functional units, the second doped regions of all the elementary functional units of each sub-plurality being contacted by a same respective metal plate electrically insulated from the metal plates contacting the second doped regions of all the elementary functional units of the other sub-pluralities; each of the metal plates
Type:
Grant
Filed:
February 4, 1997
Date of Patent:
December 22, 1998
Assignees:
SGS-Thomson Microelectronics S.r.l., Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno