Vertical Channel Patents (Class 438/137)
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Patent number: 12120866Abstract: Present invention relates to a highly-integrated memory cell and a semiconductor device including the same. According to an embodiment of the present invention, a semiconductor device comprises: an active layer including a channel, the active layer being spaced apart from a substrate and extending in a direction parallel to a surface of the substrate; a gate dielectric layer formed over the active layer; a word line laterally oriented in a direction crossing the active layer over the gate dielectric layer and including a low work function electrode and a high work function electrode, the high work function electrode having a higher work function than the low work function electrode; and a dipole inducing layer disposed between the high work function electrode and the gate dielectric layer.Type: GrantFiled: April 28, 2022Date of Patent: October 15, 2024Assignee: SK hynix Inc.Inventor: Jun Sik Kim
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Patent number: 12094926Abstract: Semiconductor devices and methods of forming a semiconductor device that includes a deep shielding pattern that may improve a reliability and/or a functioning of the device. An example method may include forming a wide band-gap semiconductor layer structure on a substrate, the semiconductor layer structure including a drift region that has a first conductivity type; forming a plurality of gate trenches in an upper portion of the semiconductor layer structure, the gate trenches spaced apart from each other, each gate trench having a bottom surface, a first sidewall, a second sidewall, and an upper opening; forming an obstruction over a portion of each gate trench that partially obscures the upper opening; and implanting dopants having a second conductivity type that is opposite the first conductivity type into the bottom surfaces of the gate trenches, where the dopants implanted into the bottom surface of the gate trenches form deep shielding patterns.Type: GrantFiled: August 14, 2020Date of Patent: September 17, 2024Assignee: Wolfspeed, Inc.Inventors: Daniel J. Lichtenwalner, Naeem Islam, Woongsun Kim, Sei-Hyung Ryu
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Patent number: 12034046Abstract: Thyristor semiconductor device comprising an anode region, a first base region and a second base region having opposite types of conductivity, and a cathode region, all superimposed along a vertical axis.Type: GrantFiled: June 28, 2022Date of Patent: July 9, 2024Assignee: STMicroelectronics (Crolles 2) SASInventor: Nicolas Guitard
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Patent number: 12009420Abstract: A semiconductor device includes a semiconductor layer having a first face with a trench formed thereon and a second face opposite to the first face, a gate electrode, and a gate insulating layer. The semiconductor layer includes a first n-type semiconductor layer, a second n-type semiconductor layer, a p-type semiconductor layer, and an n-type semiconductor region. The trench is formed to penetrate through the p-type semiconductor layer and to reach the second n-type semiconductor layer. The p-type semiconductor layer includes an extended portion extending to a position closer to the second face of the semiconductor layer than the trench is. Such structure allows suppressing dielectric breakdown in the gate insulating layer.Type: GrantFiled: September 14, 2023Date of Patent: June 11, 2024Assignee: ROHM CO., LTD.Inventor: Yuki Nakano
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Patent number: 11984499Abstract: A trench silicon carbide metal-oxide semiconductor field effect transistor includes a silicon carbide semiconductor substrate and a trench metal-oxide semiconductor field effect transistor, the field effect transistor includes a trench vertically arranged and penetrating along a first horizontal direction, a gate insulating layer formed on an inner wall of the trench, a first poly gate formed on the gate insulating layer, a shield region formed outsides and below the trench, and a field plate arranged between a bottom wall of the trench and the shield region, and the field plate has semiconductor doping and is laterally in contact to a current spreading layer to deplete electrons of the current spreading layer when a reverse bias voltage is applied.Type: GrantFiled: January 11, 2021Date of Patent: May 14, 2024Assignee: SHANGHAI HESTIA POWER INC.Inventors: Chien-Chung Hung, Kuo-Ting Chu, Lurng-Shehng Lee, Chwan-Yin Li
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Patent number: 11942549Abstract: A semiconductor device and method of manufacture are provided. In embodiments a first liner is deposited to line a recess between a first semiconductor fin and a second semiconductor fin, the first liner comprising a first material. The first liner is annealed to transform the first material to a second material. A second liner is deposited to line the recess, the second liner comprising a third material. The second liner is annealed to transform the third material to a fourth material.Type: GrantFiled: December 12, 2022Date of Patent: March 26, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wan-Yi Kao, Yu-Cheng Shiau, Chunyao Wang, Chih-Tang Peng, Yung-Cheng Lu, Chi On Chui
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Patent number: 11527653Abstract: A semiconductor device and method of manufacture are provided. In embodiments a first liner is deposited to line a recess between a first semiconductor fin and a second semiconductor fin, the first liner comprising a first material. The first liner is annealed to transform the first material to a second material. A second liner is deposited to line the recess, the second liner comprising a third material. The second liner is annealed to transform the third material to a fourth material.Type: GrantFiled: January 25, 2021Date of Patent: December 13, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wan-Yi Kao, Yu-Cheng Shiau, Chunyao Wang, Chih-Tang Peng, Yung-Cheng Lu, Chi On Chui
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Patent number: 10943819Abstract: The present disclosure provides a semiconductor structure and a method of manufacturing the semiconductor structure. The semiconductor structure includes a base, a plurality of islands, and an isolation layer. At least one of the plurality of islands includes a pillar extending from an upper surface of the base, a protrusion connected to the pillar, a capping layer disposed on the protrusion, and a passivation liner disposed on sidewalls of the protrusion and the capping layer. The isolation layer surrounds the islands.Type: GrantFiled: March 8, 2019Date of Patent: March 9, 2021Assignee: Nanya Technology CorporationInventor: Ying-Cheng Chuang
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Methods of reducing the electrical and thermal resistance of SiC substrates and devices made thereby
Patent number: 10505035Abstract: A power semiconductor device includes a silicon carbide substrate and at least a first layer or region formed above the substrate. The silicon carbide substrate has a pattern of pits formed thereon. The device further comprising an ohmic metal disposed at least in the pits to form low-resistance ohmic contacts.Type: GrantFiled: October 2, 2017Date of Patent: December 10, 2019Assignees: Purdue Research Foundation, GLOBAL POWER TECHNOLOGIES GROUPInventor: James Albert Cooper, Jr. -
Patent number: 10361114Abstract: The present disclosure provides a method for preparing a substrate with a carrier trapping center. The method includes: implanting bubbling ions into the semiconductor substrate to form a splitting layer, and implanting modified ions into the insulating layer to form a nano cluster; providing a supporting substrate; bonding the supporting substrate to the semiconductor substrate by using the insulating layer as an intermediate layer; performing a first heat treatment for the bonded substrate such that a splitting layer is formed at the position where the bubbling ions are implanted, and causing the semiconductor substrate to split at the position of the splitting layer; performing rapid thermal annealing for the substrate; and performing a second heat treatment for the rapidly thermally annealed semiconductor substrate to consolidate the bonding interface and form the nano cluster at the position where the modified ions are implanted.Type: GrantFiled: February 26, 2018Date of Patent: July 23, 2019Assignee: SHANGHAI SIMGUI TECHNOLOGY CO., LTD.Inventors: Xing Wei, Yongwei Chang, Meng Chen, Guoxing Chen, Lu Fei, Xi Wang
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Patent number: 10196731Abstract: A treatment method for modifying the reflected color of a sapphire material surface comprising bombardment by a single- and/or multi-charged gas ion beam so as to modify the reflected color of the treated sapphire material surface, wherein the ions are selected from ions of the elements from the list consisting of helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), boron (B), carbon (C), nitrogen (N), oxygen (O), fluorine (F), silicon (Si), phosphorus (P) and sulphur (S).Type: GrantFiled: May 22, 2015Date of Patent: February 5, 2019Assignee: IONICS FRANCEInventors: Frederic Guernalec, Denis Busardo
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Methods of reducing the electrical and thermal resistance of SiC substrates and devices made thereby
Patent number: 9780206Abstract: A power semiconductor device includes a silicon carbide substrate and at least a first layer or region formed above the substrate. The silicon carbide substrate has a pattern of pits formed thereon. The device further comprising an ohmic metal disposed at least in the pits to form low-resistance ohmic contacts.Type: GrantFiled: February 29, 2016Date of Patent: October 3, 2017Assignees: Purdue Research Foundation, Global Power Technologies Group, Inc.Inventor: James Albert Cooper, Jr. -
Patent number: 9054066Abstract: According one embodiment, a semiconductor device includes: a first electrode; a second electrode; a first semiconductor layer provided between the first electrode and the second electrode and being in contact with the first electrode; a second semiconductor layer including a first part and a second part, and the second part being contact with the first electrode, and the second semiconductor layer having an effective impurity concentration lower than an effective impurity concentration in the first semiconductor layer; a third semiconductor layer provided between the second semiconductor layer and the second electrode, and having an effective impurity concentration lower than an effective impurity concentration in the second semiconductor layer; and a fourth semiconductor layer provided between the third semiconductor layer and the second electrode, and being in contact with the second electrode.Type: GrantFiled: August 29, 2013Date of Patent: June 9, 2015Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Tsuneo Ogura, Tomoko Matsudai, Yuuichi Oshino, Yoshiko Ikeda, Kazutoshi Nakamura, Ryohei Gejo
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Publication number: 20150102361Abstract: A Silicon Carbide (SiC) semiconductor device having back-side contacts to a P-type region and methods of fabrication thereof are disclosed. In one embodiment, an SiC semiconductor device includes an N-type substrate and an epitaxial structure on a front-side of the N-type substrate. The epitaxial substrate includes a P-type layer adjacent to the N-type substrate and one or more additional SiC layers on the P-type layer opposite the N-type substrate. The semiconductor device also includes one or more openings through the N-type substrate that extend from a back-side of the N-type substrate to the P-type layer and a back-side contact on the back-side of the N-type substrate and within the one or more openings such that the back-side contact is in physical and electrical contact with the P-type layer. The semiconductor device further includes front-side contacts on the epitaxial structure opposite the N-type substrate.Type: ApplicationFiled: October 10, 2013Publication date: April 16, 2015Applicant: Cree, Inc.Inventors: Vipindas Pala, Edward Robert Van Brunt, Daniel Jenner Lichtenwalner, Lin Cheng, Anant Kumar Agarwal, John Williams Palmour
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Patent number: 9006041Abstract: A method for manufacturing a bipolar punch-through semiconductor device is disclosed, which includes providing a wafer having a first and a second side, wherein on the first side a high-doped layer of the first conductivity type having constant high doping concentration is arranged; epitaxially growing a low-doped layer of the first conductivity type on the first side; performing a diffusion step by which a diffused inter-space region is created at the inter-space of the layers; creating at least one layer of the second conductivity type on the first side; and reducing the wafer thickness within the high-doped layer on the second side so that a buffer layer is created, which can include the inter-space region and the remaining part of the high-doped layer, wherein the doping profile of the buffer layer decreases steadily from the doping concentration of the high-doped region to the doping concentration of the drift layer.Type: GrantFiled: October 4, 2013Date of Patent: April 14, 2015Assignee: ABB Technology AGInventors: Munaf Rahimo, Arnost Kopta, Thomas Clausen, Maxi Andenna
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Patent number: 8981469Abstract: A problem associated with n-channel power MOSFETs and the like that the following is caused even by relatively slight fluctuation in various process parameters is solved: source-drain breakdown voltage is reduced by breakdown at an end of a p-type body region in proximity to a portion in the vicinity of an annular intermediate region between an active cell region and a chip peripheral portion, arising from electric field concentration in that area. To solve this problem, the following measure is taken in a power semiconductor device having a superjunction structure in the respective drift regions of a first conductivity type of an active cell region, a chip peripheral region, and an intermediate region located therebetween: the width of at least one of column regions of a second conductivity type comprising the superjunction structure in the intermediate region is made larger than the width of the other regions.Type: GrantFiled: September 25, 2013Date of Patent: March 17, 2015Assignee: Renesas Electronics CorporationInventors: Tomohiro Tamaki, Yoshito Nakazawa
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Patent number: 8975639Abstract: A surface of a substrate consists of a plurality of neighboring stripes. Longer edges of the flat surfaces are parallel one to another and planes of these surfaces are disoriented relatively to the crystallographic plane of gallium nitride crystal defined by Miller-Bravais indices (0001), (11-22) or (11-20). The disorientation angle of each of the flat surfaces is between 0 and 3 degrees and is different for each pair of neighboring flat surfaces. The substrate according to the invention allows epitaxial growth of a layered AlInGaN structure by a MOCVD or MBE method which allow to obtain a non-absorbing mirrors laser diode emitting a light in the wavelength from 380 to 550 nm.Type: GrantFiled: March 15, 2011Date of Patent: March 10, 2015Assignee: Instytut Wysokich Ciśnień Polskiej Akademi NaukInventors: Piotr Perlin, Marcin Sarzyński, Michal Leszczyński, Robert Czernecki, Tadeusz Suski
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Patent number: 8912053Abstract: A method for fabricating a non-volatile memory device includes forming a stacked structure where a plurality of inter-layer dielectric layers and a plurality of second sacrificial layers are alternately stacked over a substrate, forming a channel layer that is coupled with a portion of the substrate by penetrating through the stacked structure, forming a slit that penetrates through the second sacrificial layers by selectively etching the stacked structure, removing the second sacrificial layers that are exposed through the slit, forming an epitaxial layer over the channel layer exposed as a result of the removal of the second sacrificial layers, and forming a gate electrode layer filling a space from which the second sacrificial layers are removed, and a memory layer interposed between the gate electrode layer and the epitaxial layer.Type: GrantFiled: September 7, 2012Date of Patent: December 16, 2014Assignee: SK Hynix Inc.Inventor: Hyun-Seung Yoo
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Patent number: 8907372Abstract: A thyristor includes a base region, a pair of first doping regions, at least one second doping region, at least one third doping region, and a pair of metal layers. The first doping regions are formed in two opposite sides of the base region and touch the base region. The second doping region is formed between the base region and one of the first doping regions. The second doping region touches the base region and the first doping region. The third doping region is formed in one of the first doping regions and touches the first doping region. The type of the first doping region is different from the types of the second doping region, the third doping region, and the base region. The metal layers touch the first doping regions respectively. The first doping regions and the third doping region are located between the metal layers.Type: GrantFiled: October 19, 2012Date of Patent: December 9, 2014Assignee: Lite-On Semiconductor Corp.Inventors: Pen-Te Chang, Wen-Chung Liu
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Patent number: 8883612Abstract: A method of manufacturing a semiconductor device includes forming a porous area of a semiconductor body. The semiconductor body includes a porous structure in the porous area. A semiconductor layer is formed on the porous area. Semiconductor regions are formed in the semiconductor layer. Then, the semiconductor layer is separated from the semiconductor body along the porous area, including introducing hydrogen into the porous area by a thermal treatment.Type: GrantFiled: September 12, 2011Date of Patent: November 11, 2014Assignee: Infineon Technologies Austria AGInventors: Hans-Joachim Schulze, Francisco Javier Santos Rodriguez, Anton Mauder, Johannes Baumgartl, Carsten Ahrens
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Patent number: 8859369Abstract: Provided is a semiconductor device having a vertical MOS transistor and a method of manufacturing the same. The vertical MOS transistor has a trench gate, a distance between a gate electrode and an N-type high concentration buried layer below the gate electrode is formed longer than that in the conventional structure, and a P-type trench bottom surface lower region (5) is formed therebetween. In this manner, when a high voltage is applied to a drain region and 0 V is applied to the gate electrode, the trench bottom surface lower region (5) is depleted, thereby increasing the breakdown voltage in the OFF state.Type: GrantFiled: February 7, 2013Date of Patent: October 14, 2014Assignee: Seiko Instruments Inc.Inventor: Yukimasa Minami
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Patent number: 8847278Abstract: A semiconductor device includes an active section for a main current flow and a breakdown withstanding section for breakdown voltage. An external peripheral portion surrounds the active section on one major surface of an n-type semiconductor substrate. The breakdown withstanding section has a ring-shaped semiconductor protrusion, with a rectangular planar pattern including a curved section in each of four corners thereof, as a guard ring. The ring-shaped semiconductor protrusion has a p-type region therein, is sandwiched between a plurality of concavities deeper than the p-type region, and has an electrically conductive film across an insulator film on the surface thereof. Because of this, it is possible to manufacture at low cost a breakdown withstanding structure with which a high breakdown voltage is obtained in a narrow width, wherein there is little drop in breakdown voltage, even when there are variations in a patterning process of a field oxide film.Type: GrantFiled: January 16, 2012Date of Patent: September 30, 2014Assignee: Fuji Electric Co., Ltd.Inventors: Manabu Takei, Yusuke Kobayashi
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Patent number: 8816696Abstract: A continuity testing device is provided which can reliably detect incomplete-fitting of the retainer of the connector. The continuity testing device includes a connector guide block into which the connector is inserted in a transverse direction and which is fixed above an opening formed on a cover plate of a case of the continuity testing device, a detection plate provided to the connector guide block and arranged above the connector so as to contact with the incompletely-fitted retainer of the connector when moved downward, a detection pin arranged at the detection plate, a continuity testing part arranged to move in the vertical direction toward the connector, a drive mechanism that operates the detection plate to move in the vertical direction in conjunction with the continuity testing part, and a switch that is activated by the detection pin when the detection pin is completely moved down to the switch.Type: GrantFiled: July 14, 2011Date of Patent: August 26, 2014Assignee: Yazaki CorporationInventor: Kozo Kogasumi
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Patent number: 8803191Abstract: Methods and systems for lateral switched-emitter thyristors in a single-layer implementation. Lateral operation is advantageously achieved by using an embedded gate. Embedded gate plugs are used to controllably invert a portion of the P-base region, so that the electron population at the portion of the inversion layer which is closest to the anode will provide a virtual emitter, and will provide sufficient gain so that the combination of bipolar devices will go into latchup.Type: GrantFiled: October 15, 2012Date of Patent: August 12, 2014Assignee: Pakal Technologies LLCInventor: Richard A. Blanchard
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Patent number: 8786130Abstract: A method of forming an electromechanical power switch for controlling power to integrated circuit (IC) devices and related devices. At least some of the illustrative embodiments are methods comprising forming at least one IC device on a front surface of a semiconductor substrate. The at least one IC device includes at least one circuit block and at least one power switch circuit. A dielectric layer is deposited on the IC device, and first and second electromechanical power switches are formed on the dielectric layer. The first power switch gates a voltage to the circuit block and the second power switch gates the voltage to the IC device. The first power switch is actuated by the power switch circuit, and the voltage to the circuit block is switched off. Alternatively, the second power switch is actuated by the power switch circuit, and the voltage to the IC device is switched off.Type: GrantFiled: August 23, 2013Date of Patent: July 22, 2014Assignee: INOSO, LLCInventors: Kiyoshi Mori, Ziep Tran, Giang T. Dao, Michael E. Ramon
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Patent number: 8779499Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes sheet-like memory strings arranged in a matrix shape substantially perpendicularly to a substrate. A control gate electrode film includes a common connecting section that extends in a first direction and an electrode forming section that is provided for each of memory cells above or below a floating gate electrode film via an inter-electrode dielectric film to project from the common connecting section in a second direction. The floating gate electrode film extends in the second direction and is formed on a first principal plane of a sheet-like semiconductor film via a tunnel dielectric film.Type: GrantFiled: January 18, 2012Date of Patent: July 15, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Masahiro Kiyotoshi
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Patent number: 8742452Abstract: Disclosed herein are a semiconductor device, and a method for manufacturing the semiconductor device. The semiconductor device includes a semiconductor substrate, a base region formed on an upper region of an inside of the semiconductor substrate, at least one gate electrode that penetrates through the base region and has an inverted triangular shape, a gate insulating film formed to enclose an upper portion of the semiconductor substrate and the gate electrode, an inter-layer insulating film formed on an upper portion of the gate electrode and the gate insulating film, an emitter region formed inside the base region and on both sides of the gate electrode, an emitter metal layer formed on an upper portion of the base region and inter-layer insulating film, and a buffer region formed to enclose a lower portion of the gate electrode and to be spaced apart from the base region.Type: GrantFiled: February 6, 2013Date of Patent: June 3, 2014Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Kwang Soo Kim, Bum Seok Suh, In Hyuk Song, Jae Hoon Park, Dong Soo Seo
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Patent number: 8728877Abstract: On a single-crystal substrate, a drift layer is formed. The drift layer has a first surface facing the single-crystal substrate, and a second surface opposite to the first surface, is made of silicon carbide, and has first conductivity type. On the second surface of the drift layer, a collector layer made of silicon carbide and having second conductivity type is formed. By removing the single-crystal substrate, the first surface of the drift layer is exposed. A body region and an emitter region are formed. The body region is disposed in the first surface of the drift layer, and has the second conductivity type different from the first conductivity type. The emitter region is disposed on the body region, is separated from the drift layer by the body region, and has first conductivity type.Type: GrantFiled: November 28, 2012Date of Patent: May 20, 2014Assignee: Sumitomo Electric Industries, Ltd.Inventors: Keiji Wada, Takeyoshi Masuda
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Patent number: 8729617Abstract: A semiconductor memory device includes: a lower pillar protruding from a substrate in a vertical direction and extending in a first direction by a trench formed in the first direction; an upper pillar protruding on the lower pillar in a second direction perpendicular to the first direction; a buried bit line junction region disposed on one sidewall of the lower pillar; a buried bit line contacting the buried bit line junction region and filling a portion of the trench; an etch stop film disposed on an exposed surface of the buried bit line; a first interlayer dielectric film recessed to expose a portion of an outer side of at least the upper pillar disposed on the etch stop film; a second interlayer dielectric film disposed on the first interlayer dielectric film; and a gate surrounding the exposed outer side of the upper pillar and crossing the buried bit line.Type: GrantFiled: February 7, 2012Date of Patent: May 20, 2014Assignee: SK Hynix Inc.Inventor: Tae Kyun Kim
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Publication number: 20140110751Abstract: A thyristor includes a base region, a pair of first doping regions, at least one second doping region, at least one third doping region, and a pair of metal layers. The first doping regions are formed in two opposite sides of the base region and touch the base region. The second doping region is formed between the base region and one of the first doping regions. The second doping region touches the base region and the first doping region. The third doping region is formed in one of the first doping regions and touches the first doping region. The type of the first doping region is different from the types of the second doping region, the third doping region, and the base region. The metal layers touch the first doping regions respectively. The first doping regions and the third doping region are located between the metal layers.Type: ApplicationFiled: October 19, 2012Publication date: April 24, 2014Applicant: LITE-ON SEMICONDUCTOR CORP.Inventors: PAN-TE CHANG, WEN-CHUNG LIU
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Patent number: 8679903Abstract: A method is provided for fabricating a vertical insulated gate transistor. A horizontal isolation region is formed in a substrate to separate and electrically isolate upper and lower portions of the substrate. A vertical semiconductor pillar with one or more flanks and a cavity is formed so as to rest on the upper portion, and a dielectrically isolated gate is formed so as to include an internal portion within the cavity and an external portion resting on the flanks and on the upper portion. One or more internal walls of the cavity are coated with an isolating layer and the cavity is filled with a gate material so as to form the internal portion of the gate within the cavity and the external portion of the gate that rests on the flanks, and to form two connecting semiconductor regions extending between source and drain regions of the transistor.Type: GrantFiled: July 27, 2007Date of Patent: March 25, 2014Assignee: STMicroelectronics, Inc.Inventor: Richard A. Blanchard
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Patent number: 8679906Abstract: In one embodiment, there is an asymmetric multi-gated transistor that has a semiconductor fin with a non-uniform doping profile. A first portion of the fin has a higher doping concentration while a second portion of the fin has a lower doping concentration. In another embodiment, there is an asymmetric multi-gated transistor with gate dielectrics formed on the semiconductor fin that vary in thickness. This asymmetric multi-gated transistor has a thin gate dielectric formed on a first side portion of the semiconductor fin and a thick gate dielectric formed on a second side portion of the fin.Type: GrantFiled: November 4, 2009Date of Patent: March 25, 2014Assignee: International Business Machines CorporationInventor: Kangguo Cheng
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Patent number: 8643085Abstract: A high-voltage-resistant semiconductor component (1) has vertically conductive semiconductor areas (17) and a trench structure (5). These vertically conductive semiconductor areas are formed from semiconductor body areas (10) of a first conductivity type and are surrounded by a trench structure (5) on the upper face (6) of the semiconductor component. For this purpose the trench structure has a base (7) and a wall area (8) and is filled with a material (9) with a relatively high dielectric constant (?r). The base area (7) of the trench structure (5) is provided with a heavily doped semiconductor material (11) of the same conductivity type as the lightly doped semiconductor body areas (17), and/or having a metallically conductive material (12).Type: GrantFiled: September 23, 2005Date of Patent: February 4, 2014Assignee: Infineon Technologies AGInventor: Frank Pfirsch
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Publication number: 20140001487Abstract: A semiconductor device and its method of manufacture. In the method, a front surface element structure is formed on a front surface of a semiconductor wafer, for example an SiC wafer. Then, a supporting substrate is bonded to wafer's front surface through an adhesive. The wafer's rear surface is ground and polished to thin it, with the supporting substrate bonded to the wafer. Next a V groove passing through the SiC wafer and reaching the adhesive is formed in the wafer's rear surface, and the wafer is cut into individual chips. An electrode film is formed on the groove's side wall and the chip's rear surface and a Schottky junction is formed between a drift layer, which is the chip, and the film. Then, the film is annealed. A tape is attached to the wafer's rear surface which has been cut into the chips. Then, the supporting substrate peels off from the wafer.Type: ApplicationFiled: September 13, 2011Publication date: January 2, 2014Applicant: FUJI ELECTRIC CO., LTD.Inventors: Haruo Nakazawa, Masaaki Ogino, Tsunehiro Nakajima
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Patent number: 8617936Abstract: A method for manufacturing a reverse-conducting semiconductor device (RC-IGBT) with a seventh layer formed as a gate electrode and a first electrical contact on a emitter side and a second electrical contact on a collector side, which is opposite the emitter side, a wafer of a first conductivity type with a first side and a second side opposite the first side is provided. For the manufacturing of the RC-IGBT on the collector side, a first layer of the first conductivity type or of a second conductivity type is created on the second side. A mask with an opening is created on the first layer and those parts of the first layer, on which the opening of the mask is arranged, are removed. The remaining parts of the first layer form a third layer. Afterwards, for the manufacturing of a second layer of a different conductivity type than the third layer, ions are implanted into the wafer on the second side into those parts of the wafer, on which the at least one opening is arranged.Type: GrantFiled: June 21, 2010Date of Patent: December 31, 2013Assignee: ABB Technology AGInventors: Munaf Rahimo, Babak H-Alikhani
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Patent number: 8569117Abstract: An integrated trench-MOS-controlled-thyristor plus trench gated diode combination, in which the trenches are preferably formed at the same time. A backside polarity reversal process permits a backside p+ region in the thyristor areas, and only a backside n+ region in the diode areas (for an n-type device). This is particularly advantageous in motor control circuits and the like, where the antiparallel diode permits the thyristor to be dropped into existing power MOSFET circuit designs. In power conversion circuits, the antiparallel diode can conveniently serve as a freewheeling diode.Type: GrantFiled: October 10, 2012Date of Patent: October 29, 2013Assignee: Pakal Technologies LLCInventors: Hidenori Akiyama, Richard A. Blanchard, Woytek Tworzydlo
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Patent number: 8564060Abstract: There is no effective method for fabricating a semiconductor power device containing UMOSFET possessing large channel mobility and whose threshold voltage can be lowered with no loss in blocking voltage. A semiconductor device with large blocking voltage is provided utilizing silicon carbide trench MOSFET possessing both narrow regions where the p body concentration is low, and wide regions where the p body concentration is high.Type: GrantFiled: July 12, 2010Date of Patent: October 22, 2013Assignee: Hitachi, Ltd.Inventors: Haruka Shimizu, Natsuki Yokoyama
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Patent number: 8563373Abstract: A method of manufacturing a semiconductor device which can prevent leakage current caused by gate electrodes intersecting element isolation layers in a major axis of an active region, and which further has vertical channels to provide a sufficient overlap margin, and a semiconductor device manufactured using the above method. The device includes gate electrodes formed on element isolation layers that are disposed between active regions and have top surfaces that are higher than the top surfaces of the active regions. Since the gate electrodes are formed on the element isolation layers, leakage current in a semiconductor substrate is prevented. In addition, the gate electrodes are formed using a striped shape mask pattern, thereby obtaining a sufficient overlap margin compared to a contact shape or bar shape pattern.Type: GrantFiled: August 26, 2009Date of Patent: October 22, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Yong-Sung Kim, Tae-Young Chung, Soo-Ho Shin
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Patent number: 8536003Abstract: A method for fabricating a semiconductor power device includes the following steps. First, a substrate having thereon at least a semiconductor layer and a pad layer is provided. Then, at least a trench is etched into the pad layer and the semiconductor layer followed by depositing a dopant source layer in the trench and on the pad layer. A process is carried out thermally driving in dopants of the dopant source layer into the semiconductor layer. A rapid thermal process is performed to mend defects in the dopant source layer and defects between the dopant source layer and the semiconductor layer. Finally, a polishing process is performed to remove the dopant source layer from a surface of the pad layer.Type: GrantFiled: August 17, 2011Date of Patent: September 17, 2013Assignee: Anpec Electronics CorporationInventors: Yung-Fa Lin, Shou-Yi Hsu, Yi-Lin Sun
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Patent number: 8536004Abstract: A method for fabricating a semiconductor power device includes the following steps. First, a substrate having at least a semiconductor layer and a pad layer thereon is provided. At least a trench is etched into the pad layer and the semiconductor layer. Then, a dopant source layer is deposited in the trench and on the pad layer followed by thermally driving in dopants of the dopant source layer into the semiconductor layer. A polishing process is performed to remove the dopant source layer from a surface of the pad layer and a thermal oxidation process is performed to eliminate micro-scratches formed during the polishing process. Finally, the pad layer is removed to expose the semiconductor layer.Type: GrantFiled: August 17, 2011Date of Patent: September 17, 2013Assignee: Anpec Electronics CorporationInventors: Yung-Fa Lin, Shou-Yi Hsu, Yi-Lin Sun
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Publication number: 20130221403Abstract: A semiconductor device and related method of manufacturing a semiconductor device that has an active region in the inner circumference of a chip with a thickness less than that of the outer circumference of the chip in which a termination structure is provided. An n field stop region, a p collector region, and a collector electrode are on the other main surface of an n? drift region. The n field stop region, the p collector region, and the collector electrode extend from the active region to the termination structure. In the termination structure, a silicon oxide film has a position from a first main surface of the n? drift region in a first depth direction substantially the same as the position of the collector electrode from the first main surface of the n? drift region (2) in the first depth direction in the active region.Type: ApplicationFiled: April 9, 2013Publication date: August 29, 2013Applicant: FUJI ELECTRIC CO., LTD.Inventor: Fuji Electric Co., Ltd.
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Patent number: 8513675Abstract: Semiconductor devices and methods of making the devices are described. The devices can be junction field-effect transistors (JFETs). The devices have raised regions with sloped sidewalls which taper inward. The sidewalls can form an angle of 5° or more from vertical to the substrate surface. The devices can have dual-sloped sidewalls in which a lower portion of the sidewalls forms an angle of 5° or more from vertical and an upper portion of the sidewalls forms an angle of <5° from vertical. The devices can be made using normal (i.e., 0°) or near normal incident ion implantation. The devices have relatively uniform sidewall doping and can be made without angled implantation.Type: GrantFiled: May 21, 2012Date of Patent: August 20, 2013Assignee: Power Integrations, Inc.Inventors: David C. Sheridan, Andrew P. Ritenour
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Patent number: 8513125Abstract: A method for manufacturing a device comprising a structure with nanowires based on a semiconducting material such as Si and another structure with nanowires based on another semiconducting material such as SiGe, and is notably applied to the manufacturing of transistors.Type: GrantFiled: August 30, 2010Date of Patent: August 20, 2013Assignee: Commissariat a l'energie atomique et aux alternativesInventors: Emeline Saracco, Jean-Francois Damlencourt, Michel Heitzmann
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Patent number: 8507335Abstract: Semiconductor devices are described wherein current flow in the device is confined between the rectifying junctions (e.g., p-n junctions or metal-semiconductor junctions). The device provides non-punch-through behavior and enhanced current conduction capability. The devices can be power semiconductor devices as such as Junction Field-Effect Transistors (VJFETs), Static Induction Transistors (SITs), Junction Field Effect Thyristors, or JFET current limiters. The devices can be made in wide bandgap semiconductors such as silicon carbide (SiC). According to some embodiments, the device can be a normally-off SiC vertical junction field effect transistor. Methods of making the devices and circuits comprising the devices are also described.Type: GrantFiled: May 16, 2011Date of Patent: August 13, 2013Assignee: Power Integrations, Inc.Inventors: Igor Sankin, David C. Sheridan, Joseph Neil Merrett
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Patent number: 8502282Abstract: Wide bandgap semiconductor devices including normally-off VJFET integrated power switches are described. The power switches can be implemented monolithically or hybridly, and may be integrated with a control circuit built in a single- or multi-chip wide bandgap power semiconductor module. The devices can be used in high-power, temperature-tolerant and radiation-resistant electronics components. Methods of making the devices are also described.Type: GrantFiled: August 11, 2011Date of Patent: August 6, 2013Assignee: Power Integrations, Inc.Inventors: Igor Sankin, Joseph Neil Merrett
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Patent number: 8492235Abstract: A fin type transistor includes a dielectric layer on a substrate surface which serves to isolate the gate of the transistor from the substrate. The dielectric layer includes a non-selectively etched surface to produce top portions of fin structures which have reduced height variations across the wafer. The fin type transistor may also include a buried stressor and/or raised or embedded raised S/D stressors to cause a strain in the channel to improve carrier mobility.Type: GrantFiled: December 29, 2010Date of Patent: July 23, 2013Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Eng Huat Toh, Jae Gon Lee, Chung Foong Tan, Elgin Quek
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Publication number: 20130153917Abstract: A vertical III-nitride field effect transistor includes a drain comprising a first III-nitride material, a drain contact electrically coupled to the drain, and a drift region comprising a second III-nitride material coupled to the drain and disposed adjacent to the drain along a vertical direction. The field effect transistor also includes a channel region comprising a third III-nitride material coupled to the drift region, a gate region at least partially surrounding the channel region, and a gate contact electrically coupled to the gate region. The field effect transistor further includes a source coupled to the channel region. The source includes a GaN-layer coupled to an InGaN layer. The channel region is disposed between the drain and the source along the vertical direction such that current flow during operation of the vertical III-nitride field effect transistor is along the vertical direction.Type: ApplicationFiled: December 14, 2011Publication date: June 20, 2013Applicant: EPOWERSOFT, Inc.Inventors: Linda Romano, Andrew Edwards, Dave P. Bour, Isik C. Kizilyalli
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Publication number: 20130115739Abstract: An integrated trench-MOS-controlled-thyristor plus trench gated diode combination, in which the trenches are preferably formed at the same time. A backside polarity reversal process permits a backside p+ region in the thyristor areas, and only a backside n+ region in the diode areas (for an n-type device). This is particularly advantageous in motor control circuits and the like, where the antiparallel diode permits the thyristor to be dropped into existing power MOSFET circuit designs. In power conversion circuits, the antiparallel diode can conveniently serve as a freewheeling diode.Type: ApplicationFiled: October 10, 2012Publication date: May 9, 2013Applicant: PAKAL TECHNOLOGIES, LLCInventor: Pakal Technologies, LLC
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Patent number: 8426258Abstract: A vertical semiconductor device (e.g. a vertical power device, an IGBT device, a vertical bipolar transistor, a UMOS device or a GTO thyristor) is formed with an active semiconductor region, within which a plurality of semiconductor structures have been fabricated to form an active device, and below which at least a portion of a substrate material has been removed to isolate the active device, to expose at least one of the semiconductor structures for bottom side electrical connection and to enhance thermal dissipation. At least one of the semiconductor structures is preferably contacted by an electrode at the bottom side of the active semiconductor region.Type: GrantFiled: October 11, 2011Date of Patent: April 23, 2013Assignee: IO Semiconductor, Inc.Inventors: Stuart B. Molin, Michael A. Stuber
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Patent number: 8421118Abstract: A rectifier building block has four electrodes: source, drain, gate and probe. The main current flows between the source and drain electrodes. The gate voltage controls the conductivity of a narrow channel under a MOS gate and can switch the RBB between OFF and ON states. Used in pairs, the RBB can be configured as a three terminal half-bridge rectifier which exhibits better than ideal diode performance, similar to synchronous rectifiers but without the need for control circuits. N-type and P-type pairs can be configured as a full bridge rectifier. Other combinations are possible to create a variety of devices.Type: GrantFiled: January 23, 2009Date of Patent: April 16, 2013Assignee: STMicroelectronics N.V.Inventors: Alexei Ankoudinov, Vladimir Rodov