Voltage Variable Capacitance Device Manufacture (e.g., Varactor, Etc.) Patents (Class 438/379)
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Patent number: 11133467Abstract: Subject matter disclosed herein may relate to programmable fabrics including correlated electron switch devices.Type: GrantFiled: July 27, 2020Date of Patent: September 28, 2021Assignee: Cerfe Labs, Inc.Inventors: Carlos Alberto Paz de Araujo, Lucian Shifren
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Patent number: 11015262Abstract: An apparatus and method for molecular beam epitaxy are described herein. The apparatus comprises an enclosure defining a vacuum chamber. A substrate holder is mounted within the vacuum chamber. At least one molecular beam source is in fluid communication with the vacuum chamber. A cooling shroud having at least one surface is mounted within the vacuum chamber spaced from the substrate holder. A cryocooler having at least a portion extending into the vacuum chamber is operatively coupled to the cooling shroud for extracting heat therefrom, and cooling the at least one surface of the cooling shroud to cryogenic temperatures.Type: GrantFiled: February 21, 2019Date of Patent: May 25, 2021Assignee: ANYON SYSTEMS INC.Inventors: Alireza Najafi-Yazdi, William Georges
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Patent number: 9660038Abstract: A lateral semiconductor device and/or design including a space-charge generating layer and an electrode or a set of electrodes located on an opposite side of a device channel as contacts to the device channel is provided. The space-charge generating layer is configured to form a space-charge region to at least partially deplete the device channel in response to an operating voltage being applied to the contacts to the device channel.Type: GrantFiled: July 12, 2016Date of Patent: May 23, 2017Assignee: Sensor Electronic Technology, Inc.Inventors: Grigory Simin, Mikhail Gaevski, Michael Shur
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Patent number: 9570630Abstract: The invention provides a Schottky diode structure. An exemplary embodiment of a Schottky diode structure includes a semiconductor substrate having an active region. A first well region having a first conductive type is formed in the active region. A first doped region having the first conductive type is formed on the first well region. A first electrode is disposed on the active region, covering the first doped region. A second electrode is disposed on the active region, contacting to the first well region. A gate structure is disposed on the first well region. A second doped region, having a second conductive type opposite to the first conductive type, and is formed on the first well region. The gate structure and the second doped region are disposed between the first and second electrodes.Type: GrantFiled: June 26, 2013Date of Patent: February 14, 2017Assignee: MEDIATEK INC.Inventor: Puo-Yu Chiang
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Patent number: 9461183Abstract: A diode comprising a reduced surface field effect trench structure, the reduced surface field effect trench structure comprising at least two trenches formed in a substrate and separated from one another by a joining region of the substrate, the joining region comprising an electrical contact and a layer of p-doped semiconductor material.Type: GrantFiled: September 29, 2014Date of Patent: October 4, 2016Assignee: NXP B.V.Inventors: Tim Boettcher, Jan Fischer
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Patent number: 9431510Abstract: Methods and apparatus for metal semiconductor wafer bonding for high-Q devices are provided. An exemplary capacitor includes a first plate formed on a glass substrate, a second plate, and a dielectric layer. No organic bonding agent is used between the first plate and the glass substrate, and the dielectric layer can be an intrinsic semiconductor. A extrinsic semiconductor layer that is heavily doped contacts the dielectric layer. The dielectric and extrinsic semiconductor layers are sandwiched between the first and second plates. An intermetallic layer is formed between the first plate and the dielectric layer. The intermetallic layer is thermo compression bonded to the first plate and the dielectric layer. The capacitor can be coupled in a circuit as a high-Q capacitor and/or a varactor, and can be integrated with a mobile device.Type: GrantFiled: November 26, 2014Date of Patent: August 30, 2016Assignee: QUALCOMM IncorporatedInventors: Changhan Yun, Chengjie Zuo, Chi Shun Lo, Jonghae Kim, Mario F. Velez
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Patent number: 9269832Abstract: Disclosed is an integrated circuit (100), comprising a semiconductor substrate (110) carrying a plurality of circuit elements; and a pressure sensor including a cavity (140) on said semiconductor substrate, said cavity comprising a pair of electrodes (120, 122) laterally separated from each other; and a flexible membrane (130) over and spatially separated from said electrodes such that said membrane interferes with a fringe field between said electrodes, said membrane comprising at least one aperture (132). A method of manufacturing such an IC is also disclosed.Type: GrantFiled: June 11, 2013Date of Patent: February 23, 2016Assignee: AMS INTERNATIONAL AGInventors: Axel Nackaerts, Willem Frederik Adrianus Besling, Klaus Reimann
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Patent number: 9224828Abstract: A semiconductor structure includes a III-nitride substrate with a first side and a second side opposing the first side. The III-nitride substrate is characterized by a first conductivity type and a first dopant concentration. The semiconductor structure further includes a III-nitride epitaxial layer of the first conductivity type coupled to the first surface of the III-nitride substrate, a first metallic structure electrically coupled to the second surface of the III-nitride substrate, and a III-nitride epitaxial structure of a second conductivity type coupled to the III-nitride epitaxial layer. The III-nitride epitaxial structure comprises at least one edge termination structure.Type: GrantFiled: October 11, 2011Date of Patent: December 29, 2015Assignee: Avogy, Inc.Inventors: Andrew Edwards, Hui Nie, Isik C. Kizilyalli, Richard J. Brown, David P. Bour, Linda Romano, Thomas R. Prunty
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Patent number: 9184240Abstract: There is provided a method of producing a semiconductor wafer, including: forming a compound semiconductor layer on a base wafer by epitaxial growth; cleansing a surface of the compound semiconductor layer by means of a cleansing agent containing a selenium compound; and forming an insulating layer on the surface of the compound semiconductor layer. Examples of the selenium compound include a selenium oxide. Examples of the selenium oxide include H2SeO3. The cleansing agent may further contain one or more substances selected from the group consisting of water, ammonium, and ethanol. When the surface of the compound semiconductor layer is made of InxGa1-xAs (0?x?1), the insulating layer is preferably made of Al2O3, and Al2O3 is preferably formed by ALD.Type: GrantFiled: December 6, 2013Date of Patent: November 10, 2015Assignees: SUMITOMO CHEMICAL COMPANY, LIMITED, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYInventors: Masahiko Hata, Osamu Ichikawa, Yuji Urabe, Noriyuki Miyata, Tatsuro Maeda, Tetsuji Yasuda
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Publication number: 20150118819Abstract: Methods and apparatus for metal semiconductor wafer bonding for high-Q devices are provided. An exemplary capacitor includes a first plate formed on a glass substrate, a second plate, and a dielectric layer. No organic bonding agent is used between the first plate and the glass substrate, and the dielectric layer can be an intrinsic semiconductor. A extrinsic semiconductor layer that is heavily doped contacts the dielectric layer. The dielectric and extrinsic semiconductor layers are sandwiched between the first and second plates. An intermetallic layer is formed between the first plate and the dielectric layer. The intermetallic layer is thermo compression bonded to the first plate and the dielectric layer. The capacitor can be coupled in a circuit as a high-Q capacitor and/or a varactor, and can be integrated with a mobile device.Type: ApplicationFiled: November 26, 2014Publication date: April 30, 2015Inventors: Changhan Hobie YUN, Chengjie ZUO, Chi Shun LO, Jonghae KIM, Mario Francisco VELEZ
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Patent number: 8981529Abstract: A variable capacitance device including: first and second transistors coupled in parallel between first and second nodes of the capacitive device, a control node of the first transistor being adapted to receive a control signal, and a control node of the second transistor being adapted to receive the inverse of the control signal, wherein the first and second transistors are formed in a same semiconductor well.Type: GrantFiled: January 18, 2013Date of Patent: March 17, 2015Assignees: STMicroelectronics SA, International Business Machines CorporationInventors: Yvan Morandini, Romain Debrouke
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Publication number: 20140367831Abstract: A variable capacitance device includes a capacitor having a first capacitance and a variable resistor coupled in series with the capacitor. The variable resistor includes a gate structure formed over a channel region defined in a doped well formed in a semiconductor substrate. A resistance of the variable resistor is based on a voltage applied to the gate structure, which adjusts a resistance of the channel and a capacitance of the variable capacitance device.Type: ApplicationFiled: June 13, 2013Publication date: December 18, 2014Inventors: Hsiao-Tsung YEN, Cheng-Wei LUO
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Publication number: 20140332928Abstract: A novel semiconductor variable capacitor is presented. The semiconductor structure is simple and is based on a semiconductor variable capacitor with MOS compatible structure suitable for integrated circuits, which has at least three terminals, one of which is used to modulate the capacitance value between the other two terminals of the device, by increasing or decreasing its DC voltage with respect to one of the main terminals of the device. Furthermore, the present invention decouples the AC signal and the DC control voltage preventing distortion of the RF signal. The present invention describes a controllable capacitor whose capacitance value is not necessarily linear with its control voltage, but although possibly abrupt in its characteristic, is utilized to manufacture a semiconductor variable capacitor with digital control to improve its noise and linearity performance while maintaining high quality factor.Type: ApplicationFiled: May 7, 2013Publication date: November 13, 2014Inventors: Fabio Alessio Marino, Paolo Menegoli
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Publication number: 20140327016Abstract: A varactor comprising two Schottky diodes, each diode comprising a substrate and a plurality of layers formed on the substrate including at least one GaN layer and at least one semi-insulating material layer formed of a material with an energy gap greater than 3.5 and free carrier mobility less than 300 cm2/V-s; the Schottky diodes having cathodes adapted to be connected to an AC voltage input and being configured so that as the AC voltage applied to the cathodes increases the capacitance decreases nonlinearly, the nonlinear transition from high capacitance to low capacitance being adjustable by utilizing the intrinsic carrier concentration of the semi-insulating layer to obtain an optimal nonlinear transition for the predetermined AC voltage applied to the cathodes. A method of making a varactor comprising computer modeling to produce capacitance-voltage curves, modifying at least one semi-insulating region, and modeling power input/output efficiency for a predetermined input signal.Type: ApplicationFiled: July 23, 2014Publication date: November 6, 2014Inventors: PANKAJ B. SHAH, H. ALFRED HUNG
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Publication number: 20140308793Abstract: An electrical device includes a semiconductor material. The semiconductor material includes a first region of the semiconductor material having a first conductivity type, a second region of the semiconductor material having a second conductivity type complementary to the first conductivity type and an intermediate region of the semiconductor material between the first region and the second region. The first and second regions lie next to each other the intermediate region so as to form a diode structure. A shape of the intermediate region tapers from the first region to the second region.Type: ApplicationFiled: June 27, 2014Publication date: October 16, 2014Inventors: Josef Dietl, Raimund Peichl, Gabriele Bettineschi
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Patent number: 8796809Abstract: A varactor diode includes a contact layer having a first conductivity type, a voltage blocking layer having the first conductivity and a first net doping concentration on the contact layer, a blocking junction on the voltage blocking layer, and a plurality of discrete doped regions in the voltage blocking layer and spaced apart from the carrier injection junction. The plurality of discrete doped regions have the first conductivity type and a second net doping concentration that is higher than the first net doping concentration, and the plurality of discrete doped regions are configured to modulate the capacitance of the varactor diode as a depletion region of the varactor diode expands in response to a reverse bias voltage applied to the blocking junction. Related methods of forming a varactor diode are also disclosed.Type: GrantFiled: September 8, 2008Date of Patent: August 5, 2014Assignee: Cree, Inc.Inventor: Christopher Harris
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Patent number: 8748934Abstract: The present disclosure discloses a vertical selection transistor, a memory cell having the vertical selection transistor, a three-dimensional memory array structure and a method for fabricating the three-dimensional memory array structure. The vertical selection transistor comprises: an upper electrode; a lower electrode; a first semiconductor layer, a second semiconductor layer, a third semiconductor layer and a fourth semiconductor layer vertically stacked between the lower electrode and the upper electrode; and a gate stack formed on a side of the second semiconductor layer, in which the first semiconductor layer and the third semiconductor layer are first type doped layers, the second semiconductor layer and the fourth semiconductor layer are second type doped layers, and a doping concentration of the second semiconductor layer is lower than that of the first semiconductor layer or that of the third semiconductor layer respectively.Type: GrantFiled: March 12, 2012Date of Patent: June 10, 2014Assignee: Tsinghua UniversityInventors: Liyang Pan, Fang Yuan
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Patent number: 8735257Abstract: Apparatus and methods for a MOS varactor structure are disclosed. An apparatus is provided, comprising an active area defined in a portion of a semiconductor substrate; a doped well region in the active area extending into the semiconductor substrate; at least two gate structures disposed in parallel over the doped well region; source and drain regions disposed in the well region formed on opposing sides of the gate structures; a gate connector formed in a first metal layer overlying the at least two gate structures and electrically coupling the at least two gate structures; source and drain connectors formed in a second metal layer and electrically coupled to the source and drain regions; and interlevel dielectric material separating the source and drain connectors in the second metal layer from the gate connector formed in the first metal layer. Methods for forming the structure are disclosed.Type: GrantFiled: May 22, 2013Date of Patent: May 27, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chi-Feng Huang, Chia-Chung Chen
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Patent number: 8728933Abstract: A method of kerf formation and treatment for solar cells and semiconductor films and a system therefor are described. A semiconductor film is backed by a first metal layer and topped by a second metal layer. A reference feature is defined on the film. An ultraviolet laser beam is aligned to the reference feature. A kerf is cut along the reference feature, using the ultraviolet laser beam. The beam cuts through the second metal layer, through the film and through the first metal layer. Cutting leaves debris deposited on walls of the kerf. The debris is cleaned off of the walls, using an acid-based solvent. In the case of solar cells, respective first terminals of the solar cells are electrically isolated by the cleaned kerf, and respective negative terminals of the solar cells are electrically isolated by the cleaned kerf.Type: GrantFiled: August 31, 2011Date of Patent: May 20, 2014Assignee: Alta Devices, Inc.Inventors: Michael Andres, Laila Mattos, Daniel G. Patterson, Gang He
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Publication number: 20140124893Abstract: An electrical device includes a semiconductor material. The semiconductor material includes a first region of the semiconductor material having a first conductivity type, a second region of the semiconductor material having a second conductivity type complementary to the first conductivity type and an intermediate region of the semiconductor material between the first region and the second region. The first and second regions lie next to each other the intermediate region so as to form a diode structure. A shape of the intermediate region tapers from the first region to the second region.Type: ApplicationFiled: November 2, 2012Publication date: May 8, 2014Applicant: INFINEON TECHNOLOGIES AGInventors: Josef Dietl, Raimund Peichl, Gabriele Bettineschi
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Patent number: 8716126Abstract: Disclosed herein is an illustrative semiconductor device that includes a transistor having drain and source regions and a gate electrode structure. The disclosed semiconductor device also includes a contact bar formed in a first dielectric material that connects to one of the drain and source regions and includes a first conductive material, the contact bar extending along a width direction of the transistor. Moreover, the illustrative device further includes, among other things, a conductive line formed in a second dielectric material, the conductive line including an upper portion having a top width extending along a length direction of the transistor and a lower portion having a bottom width extending along the length direction that is less than the top width of the upper portion, wherein the conductive line connects to the contact bar and includes a second conductive material that differs from the first conductive material.Type: GrantFiled: February 18, 2013Date of Patent: May 6, 2014Assignee: GLOBALFOUNDRIES Inc.Inventors: Thomas Werner, Peter Baars, Frank Feustel
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Patent number: 8691707Abstract: A voltage-switchable dielectric layer may be employed on a die for electrostatic discharge (ESD) protection. The voltage-switchable dielectric layer functions as a dielectric layer between terminals of the die during normal operation of the die. When ESD events occur at the terminals of the die, a high voltage between the terminals switches the voltage-switchable dielectric layer into a conducting layer to allow current to discharge to a ground terminal of the die without the current passing through circuitry of the die. Thus, damage to the circuitry of the die is reduced or prevented during ESD events on dies with the voltage-switchable dielectric layer. The voltage-switchable dielectric layer may be deposited on the back side of a die for protection during stacking with a second die to form a stacked IC. A method includes depositing a voltage-switchable dielectric layer on a first die between a first terminal and a second terminal.Type: GrantFiled: August 1, 2013Date of Patent: April 8, 2014Assignee: QUALCOMM IncorporatedInventors: Shiqun Gu, Ratibor Radojcic, Yiming Li
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Patent number: 8685827Abstract: A method for manufacturing a semiconductor device, comprising forming a first gate stack portion on a substrate, the first gate stack portion including a first gate oxide layer and a first polysilicon layer on the first gate oxide layer, forming a second gate stack portion on the substrate, the second gate stack portion including a second gate oxide layer and a second polysilicon layer on the second gate oxide layer, forming a resistor portion on the substrate, the resistor portion including a third gate oxide layer and a third polysilicon layer on the third gate oxide layer, covering the resistor portion with a photoresist, removing respective first portions of the first and second polysilicon layers from the first and second gate stack portions, removing the photoresist from the resistor portion, and after removing the photoresist from the resistor portion, removing respective remaining portions of the first and second polysilicon layers from the first and second gate stack portions.Type: GrantFiled: July 13, 2011Date of Patent: April 1, 2014Assignee: Samsung Electronics Co., LtdInventors: Ju Youn Kim, Jedon Kim
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Patent number: 8669605Abstract: A semiconductor device comprises a circuit cell and a basic end cell. The circuit cell includes a plurality of elements aligned in a first direction, and the basic end cell is arranged adjacent to the circuit cell in the first direction and has a compensation capacitor capable of being connected to a supply voltage of the circuit cell. In the semiconductor device, a diffusion layer forming the compensation capacitor extends along the first direction in a predetermined region of the circuit cell.Type: GrantFiled: March 11, 2010Date of Patent: March 11, 2014Inventor: Yoshiaki Shimizu
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Patent number: 8633562Abstract: A voltage-switchable dielectric layer may be employed on a die for electrostatic discharge (ESD) protection. The voltage-switchable dielectric layer functions as a dielectric layer between terminals of the die during normal operation of the die. When ESD events occur at the terminals of the die, a high voltage between the terminals switches the voltage-switchable dielectric layer into a conducting layer to allow current to discharge to a ground terminal of the die without the current passing through circuitry of the die. Thus, damage to the circuitry of the die is reduced or prevented during ESD events on dies with the voltage-switchable dielectric layer. The voltage-switchable dielectric layer may be deposited on the back side of a die for protection during stacking with a second die to form a stacked IC.Type: GrantFiled: April 1, 2011Date of Patent: January 21, 2014Assignee: QUALCOMM IncorporatedInventors: Shiqun Gu, Ratibor Radojcic, Yiming Li
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Patent number: 8609479Abstract: In at least one embodiment, a method of manufacturing a varactor includes forming a well over a substrate. The well has a first type doping. A first source region and a second source region are formed in the well, and the first source region and the second source region have a second type doping. A drain region is formed in the well, and the drain region has the first type doping. A first gate region is formed over the well between the drain region and the first source region. Moreover, a second gate region is formed over the well between the drain region and the second source region.Type: GrantFiled: August 27, 2012Date of Patent: December 17, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Chewn-Pu Jou, Chin Wei Kuo, Sally Liu
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Patent number: 8598683Abstract: A semiconductor structure includes a semiconductor substrate having a first region of a first polarity and a second region of a second polarity adjacent to the first region; and a first terminal including: a first deep trench located in the first region, a first node dielectric abutting all but an upper portion of sidewalls and a bottom of the first deep trench; a first conductive inner electrode inside the first node dielectric and electrically insulated from the first region by the first node dielectric; and a first electrical contact electrically coupling the first conductive inner electrode to the first region.Type: GrantFiled: April 19, 2012Date of Patent: December 3, 2013Assignee: International Business Machines CorporationInventors: David M. Fried, Edward J. Nowak
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Publication number: 20130292683Abstract: An electronic device comprising a substrate; a pair of stacks of polar semiconductor materials which create a charge by spontaneous and/or piezoelectric polarization; one of the pair of stacks having a spontaneous and/or piezoelectric polarity which is in a direction opposite to the other of the pair of stacks; whereby due to the opposing polarities, the polarization is balanced. A method of substantially eliminating the bias required to offset polarization charges in an electronic device having a heterobarrier comprising providing a substrate; growing at least one pair of stacks of semiconductor materials; one of the pair of stacks having a spontaneous and/or piezoelectric polarity which is opposite to the other of the pair of stacks; whereby due to the opposing polarities, the polarization is balanced to substantially eliminate the need for a voltage bias.Type: ApplicationFiled: May 3, 2012Publication date: November 7, 2013Applicant: U.S. Government as represented by the Secretary of the ArmyInventor: PANKAJ B. SHAH
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Patent number: 8530319Abstract: An apparatus and a method of manufacturing an e-fuse includes a substrate, a patterned gate insulator on the substrate, and a patterned gate conductor on the patterned gate insulator. The patterned gate conductor has sidewalls and a top. A silicide contacts the sidewalls of the patterned gate conductor, the top of the patterned gate conductor, and a region of the substrate adjacent the patterned gate insulator and the patterned gate conductor.Type: GrantFiled: October 14, 2010Date of Patent: September 10, 2013Assignee: International Business Machines CorporationInventors: Ephrem G. Gebreselasie, Joseph M. Lukaitis, Robert R. Robison, William R. Tonti, Ping-Chuan Wang
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Publication number: 20130200494Abstract: A replaceable chamber element for use in a plasma processing system, such as a plasma etching system, is described. The replaceable chamber element includes a chamber component configured to be exposed to plasma in a plasma processing system, wherein the chamber component is fabricated to include a semiconductor junction, and wherein a capacitance of the chamber component is varied when a voltage is applied across the semiconductor junction.Type: ApplicationFiled: February 5, 2012Publication date: August 8, 2013Applicant: TOKYO ELECTRON LIMITEDInventors: Zhiying CHEN, Jianping ZHAO, Lee CHEN, Merritt FUNK, Radha SUNDARARAJAN
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Patent number: 8502348Abstract: The present invention provides a differential varactor device including a substrate having a first conductive type, a well having a second conductive type, five doped regions having the second conductive type, a first gate, a second gate, a third gate, and a fourth gate. The well is disposed in the substrate, and the doped regions are disposed in the well and arranged along a direction. The first gate, the second gate, the third gate and the fourth gate are respectively disposed on the well between any two of the adjacent doped regions, and are arranged sequentially along the direction.Type: GrantFiled: July 8, 2011Date of Patent: August 6, 2013Assignee: United Microelectronics Corp.Inventors: Yue-Shiun Lee, Cheng-Hsiung Chen, Meng-Fan Wang
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Publication number: 20130181784Abstract: A variable capacitance device including: first and second transistors coupled in parallel between first and second nodes of the capacitive device, a control node of the first transistor being adapted to receive a control signal, and a control node of the second transistor being adapted to receive the inverse of the control signal, wherein the first and second transistors are formed in a same semiconductor well.Type: ApplicationFiled: January 18, 2013Publication date: July 18, 2013Applicants: International Business Machines Corporation, STMicroelectronics S.A.Inventors: STMicroelectronics S.A., International Business Machines Corporation
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Patent number: 8486798Abstract: A replaceable chamber element for use in a plasma processing system, such as a plasma etching system, is described. The replaceable chamber element includes a chamber component configured to be exposed to plasma in a plasma processing system, wherein the chamber component is fabricated to include a semiconductor junction, and wherein a capacitance of the chamber component is varied when a voltage is applied across the semiconductor junction.Type: GrantFiled: February 5, 2012Date of Patent: July 16, 2013Assignee: Tokyo Electron LimitedInventors: Zhiying Chen, Jianping Zhao, Lee Chen, Merritt Funk, Radha Sundararajan
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Publication number: 20130140678Abstract: The present invention relates to using an insulator layer between two metal layers of a semiconductor die to provide a micro-electromechanical systems (MEMS) device, such as an ohmic MEMS switch or a capacitive MEMS switch. In an ohmic MEMS switch, the insulator layer may be used to reduce metal undercutting during fabrication, to prevent electrical shorting of a MEMS actuator to a MEMS cantilever, or both. In a capacitive MEMS switch, the insulator layer may be used as a capacitive dielectric between capacitive plates, which are provided by the two metal layers. A fixed capacitive element may be provided by the insulator layer between the two metal layers. In one embodiment of the present invention, an ohmic MEMS switch, a capacitive MEMS switch, a fixed capacitive element, or any combination thereof may be integrated into a single semiconductor die.Type: ApplicationFiled: January 25, 2013Publication date: June 6, 2013Applicant: RF MICRO DEVICES, INC.Inventor: RF Micro Devices, Inc.
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Patent number: 8450832Abstract: Large tuning range junction varactor includes first and second junction capacitors coupled in parallel between first and second varactor terminals. First and second plates of the capacitors are formed by three alternating doped regions in a substrate. The first and third doped regions are of the same type sandwiching the second doped region of the second type. A first input terminal is coupled to the first and third doped regions and a second terminal is coupled to the second doped region. At the interfaces of the doped regions are first and second depletion regions whose width can be varied by varying the voltage across the terminals from zero to full reverse bias.Type: GrantFiled: April 5, 2007Date of Patent: May 28, 2013Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Manju Sarkar, Purakh Raj Verma
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Patent number: 8450827Abstract: Apparatus and methods for a MOS varactor structure are disclosed An apparatus is provided, comprising an active area defined in a portion of a semiconductor substrate; a doped well region in the active area extending into the semiconductor substrate; at least two gate structures disposed in parallel over the doped well region; source and drain regions disposed in the well region formed on opposing sides of the gate structures; a gate connector formed in a first metal layer overlying the at least two gate structures and electrically coupling the at least two gate structures; source and drain connectors formed in a second metal layer and electrically coupled to the source and drain regions; and interlevel dielectric material separating the source and drain connectors in the second metal layer from the gate connector formed in the first metal layer. Methods for forming the structure are disclosed.Type: GrantFiled: January 25, 2011Date of Patent: May 28, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chi-Feng Huang, Chia-Chung Chen
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Publication number: 20130113081Abstract: A plate varactor includes a dielectric substrate and a first electrode embedded in a surface of the substrate. A capacitor dielectric layer is disposed over the first electrode, and a layer of graphene is formed over the dielectric layer to contribute a quantum capacitance component to the dielectric layer. An upper electrode is formed on the layer of graphene. Other embodiments and methods for fabrication are also included.Type: ApplicationFiled: November 8, 2011Publication date: May 9, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: ZHIHONG CHEN, SHU-JEN HAN, SIYURANGA O. KOSWATTA, ALBERTO VALDES GARCIA
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Publication number: 20130100090Abstract: This disclosure provides systems, methods and apparatus for electromechanical systems variable capacitance devices. In one aspect, an electromechanical systems variable capacitance device includes a substrate with a first metal layer including a first bias electrode overlying the substrate. A member suspended above the first metal layer includes a dielectric beam and a second metal layer including a first radio frequency electrode and a ground electrode. The member and the first metal layer define a first air gap. A third metal layer over the member includes a second bias electrode, and the third metal layer and the member define a second air gap. The member includes a plane of symmetry substantially parallel a plane containing the first bias electrode.Type: ApplicationFiled: October 21, 2011Publication date: April 25, 2013Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.Inventors: Daniel FELNHOFER, Wenyue ZHANG, Je-Hsuing LAN
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Patent number: 8399352Abstract: When forming metal lines of the metal zero level, a reduced bottom width and an increased top width may be achieved by using appropriate patterning regimes, for instance using a spacer structure after forming an upper trench portion with a top width, or forming the lower portion of the trenches and subsequently applying a further mask and etch regime in which the top width is implemented. In this manner, metal lines connecting to self-aligned contact bars may be provided so as to exhibit a bottom width of 20 nm and less, while the top width may allow reliable contact to any vias of the metallization system.Type: GrantFiled: December 20, 2011Date of Patent: March 19, 2013Assignee: GLOBALFOUNDRIES Inc.Inventors: Thomas Werner, Peter Baars, Frank Feustel
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Publication number: 20130049646Abstract: An energy conversion device, and methods of manufacturing and operating the same. The energy conversion device includes: a monolithic single-crystal silicon layer that includes a plurality of doping regions; a vibrator that is disposed in the single-crystal silicon layer and is connected to a doping region of the plurality of doping regions; a first diode that is a PN junction diode and allows an input signal applied to the vibrator to pass therethrough; and a second diode that is a PN junction diode and allows a signal output from the vibrator to pass therethrough.Type: ApplicationFiled: June 19, 2012Publication date: February 28, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Che-heung KIM, Jong-oh KWON
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Patent number: 8334179Abstract: A semiconductor system is described, which is made up of a highly n-doped silicon substrate and a first n-silicon epitaxial layer, which is directly contiguous to the highly n-doped silicon substrate, and having a p-doped SiGe layer, which is contiguous to a second n-doped silicon epitaxial layer and forms a heterojunction diode, which is situated above the first n-doped silicon epitaxial layer and in which the pn-junction is situated within the p-doped SiGe layer. The first n-silicon epitaxial layer has a higher doping concentration than the second n-silicon epitaxial layer. Situated between the two n-doped epitaxial layers is at least one p-doped emitter trough, which forms a buried emitter, a pn-junction both to the first n-doped silicon epitaxial layer and also to the second n-doped silicon epitaxial layer being formed, and the at least one emitter trough being completely enclosed by the two epitaxial layers.Type: GrantFiled: September 17, 2008Date of Patent: December 18, 2012Assignee: Robert Bosch GmbHInventors: Ning Qu, Alfred Goerlach
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Patent number: 8324064Abstract: Methods are disclosed for forming an improved varactor diode having first and second terminals. The methods include providing a substrate having a first surface in which are formed isolation regions separating first and second parts of the diode. A varactor junction is formed in the first part with a first side coupled to the first terminal and a second side coupled to the second terminal via a sub-isolation buried layer (SIBL) region extending under the bottom and partly up the sides of the isolation regions to a further doped region that is ohmically connected to the second terminal. The first part does not extend to the SIBL region. The varactor junction desirably comprises a hyper-abrupt doped region. The combination provides improved tuning ratio, operating frequency and breakdown voltage of the varactor diode while still providing adequate Q.Type: GrantFiled: September 30, 2011Date of Patent: December 4, 2012Assignee: Freescale Semiconductors, Inc.Inventors: Pamela J. Welch, Wen Ling M. Huang, David G. Morgan, Hernan A. Rueda, Vishal P. Trivedi
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Publication number: 20120262229Abstract: Methods of fabricating an on-chip capacitor with a variable capacitance, as well as methods of adjusting the capacitance of an on-chip capacitor and design structures for an on-chip capacitor. The method includes forming first and second ports configured to be powered with opposite polarities, first and second electrodes, and first and second voltage-controlled units. The method includes configuring the first voltage-controlled unit to selectively couple the first electrode with the first port, and the second voltage-controlled unit to selectively couple the second electrode with the second port. When the first electrode is coupled by the first voltage-controlled unit with the first port and the second electrode is coupled by the second voltage-controlled unit with the second port, the capacitance of the on-chip capacitor increases.Type: ApplicationFiled: June 27, 2012Publication date: October 18, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Douglas M. Daley, Mete Erturk, Edward J. Gordon
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Patent number: 8288839Abstract: A vertical transient voltage suppressing (TVS) device includes a semiconductor substrate of a first conductivity type where the substrate is heavily doped, an epitaxial layer of the first conductivity type formed on the substrate where the epitaxial layer has a first thickness, and a base region of a second conductivity type formed in the epitaxial layer where the base region is positioned in a middle region of the epitaxial layer. The base region and the epitaxial layer provide a substantially symmetrical vertical doping profile on both sides of the base region. In one embodiment, the base region is formed by high energy implantation. In another embodiment, the base region is formed as a buried layer. The doping concentrations of the epitaxial layer and the base region are selected to configure the TVS device as a punchthrough diode based TVS or an avalanche mode TVS.Type: GrantFiled: April 30, 2009Date of Patent: October 16, 2012Assignee: Alpha & Omega Semiconductor, Inc.Inventors: Lingpeng Guan, Madhur Bobde, Anup Bhalla
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Patent number: 8273616Abstract: Various embodiments of the invention provide a varactor structure that, depends on configurations, can provide a C-V characteristic based on one or a combination of a reverse bias junction capacitor, a channel capacitor, and an oxide capacitor. The junction capacitor is formed by reverse biasing the P+ source region and the N-well. The channel capacitance is formed between the P+ source region and the N+ drain region, and the oxide capacitor is formed in the gate oxide area. Depending on biasing one or a combination of the gate voltage VG, the source voltage VS, and the drain voltage VD, embodiments can utilize one or a combination of the above capacitors. Other embodiments using the varactors in a Voltage-Controlled Oscillator (VCO) are also disclosed.Type: GrantFiled: February 19, 2010Date of Patent: September 25, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Chewn-Pu Jou, Chin-Wei Kuo, Sally Liu
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Patent number: 8232624Abstract: A semiconductor structure includes a semiconductor substrate having a first region of a first polarity and a second region of a second polarity adjacent to the first region; and a first terminal including: a first deep trench located in the first region, a first node dielectric abutting all but an upper portion of sidewalls and a bottom of the first deep trench; a first conductive inner electrode inside the first node dielectric and electrically insulated from the first region by the first node dielectric; and a first electrical contact electrically coupling the first conductive inner electrode to the first region.Type: GrantFiled: September 14, 2009Date of Patent: July 31, 2012Assignee: International Business Machines CorporationInventors: David M. Fried, Joseph E. Nowak
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Publication number: 20120146188Abstract: A PN-junction varactor in a BiCMOS process is disclosed which comprises an N-type region, a P-type region and N-type pseudo buried layers. Both of the N-type and P-type regions are formed in an active area and contact with each other, forming a PN-junction; the P-type region is situated on top of the N-type region. The N-type pseudo buried layers are formed at bottom of shallow trench field oxide regions on both sides of the active area and contact with the N-type region; deep hole contacts are formed on top of the N-type pseudo buried layers in the shallow trench field oxide regions to pick up the N-type region. A manufacturing method of PN-junction varactor in a BiCMOS process is also disclosed.Type: ApplicationFiled: December 8, 2011Publication date: June 14, 2012Inventors: Fan Chen, Xiongbin Chen
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Patent number: 8163612Abstract: Methods and heterostructure barrier varactor (HBV) diodes optimized for application with frequency multipliers at providing outputs at submillimeter wave frequencies and above. The HBV diodes include a silicon-containing substrate, an electrode over the silicon-containing substrate, and one or more heterojunction quantum wells of alternating layers of Si and SiGe of one or more electrodes of the diode. Each SiGe quantum well preferably has a floating SiGe layer between adjacent SiGe gradients followed by adjacent Si layers, such that, a single homogeneous structure is provided characterized by having no distinct separations. The plurality of Si/SiGe heterojunction quantum wells may be symmetric or asymmetric.Type: GrantFiled: December 17, 2009Date of Patent: April 24, 2012Assignee: International Business Machines CorporationInventors: Erik M Dahlstrom, Alvin J Joseph, Robert M Rassel, David C Sheridan
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Publication number: 20120081188Abstract: A resonator of a VCO includes a fine tuning main varactor circuit, an auxiliary varactor circuit, and a coarse tuning capacitor bank circuit coupled in parallel with an inductance. The main varactor circuit includes a plurality of circuit portions that can be separately disabled. Within each circuit portion is a multiplexing circuit that supplies a selectable one of either a fine tuning control signal (FTAVCS) or a temperature compensation control signal (TCAVCS) onto a varactor control node within the circuit portion. If the circuit portion is enabled then the FTAVCS is supplied onto the control node so that the circuit portion is used for fine tuning. If the circuit portion is disabled then the TCAVCS is supplied onto the control node so that the circuit portion is used to combat VCO frequency drift as a function of temperature. How the voltage of the TCAVCS varies with temperature is digitally programmable.Type: ApplicationFiled: October 5, 2010Publication date: April 5, 2012Applicant: QUALCOMM INCORPORATEDInventors: Li Liu, Chiewcharn Narathong
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Patent number: 8148800Abstract: A nanowire-based device and method employ removal of residual carriers. The nanowire-based device includes a semiconductor nanowire having a semiconductor junction, and a residual carrier sink. The residual carrier sink is located at or adjacent to the semiconductor nanowire near the semiconductor junction and employs one or both of enhanced recombination and direct extraction of the residual carriers. The method includes providing a semiconductor nanowire, forming a semiconductor junction within the semiconductor nanowire, forming a residual carrier sink, and removing residual carriers from the semiconductor junction region using the residual carrier sink.Type: GrantFiled: October 1, 2008Date of Patent: April 3, 2012Assignee: Hewlett-Packard Development Company, L.P.Inventor: Theodore I. Kamins