Continuous Processing Patents (Class 438/61)
  • Patent number: 9537032
    Abstract: One embodiment of the present invention provides a double-sided heterojunction solar cell module. The solar cell includes a frontside glass cover, a backside glass cover situated below the frontside glass cover, and a number of solar cells situated between the frontside glass cover and the backside glass cover. Each solar cell includes a semiconductor multilayer structure situated below the frontside glass cover, including: a frontside electrode grid, a first layer of heavily doped amorphous Si (a-Si) situated below the frontside electrode, a layer of lightly doped crystalline-Si (c-Si) situated below the first layer of heavily doped a-Si, and a layer of heavily doped c-Si situated below the lightly doped c-Si layer. The solar cell also includes a second layer of heavily doped a-Si situated below the multilayer structure; and a backside electrode situated below the second layer of heavily doped a-Si.
    Type: Grant
    Filed: June 2, 2009
    Date of Patent: January 3, 2017
    Assignee: SolarCity Corporation
    Inventors: Jiunn Benjamin Heng, Chentao Yu, Zheng Xu, Jianming Fu, Peijun Ding
  • Patent number: 9040340
    Abstract: A method for fabricating a photovoltaic device includes depositing a p-type layer at a first temperature and depositing an intrinsic layer while gradually increasing a deposition temperature to a final temperature. The intrinsic layer deposition is completed at the final temperature. An n-type layer is formed on the intrinsic layer.
    Type: Grant
    Filed: November 14, 2011
    Date of Patent: May 26, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ahmed Abou-Kandil, Keith E. Fogel, Augustin J. Hong, Jeehwan Kim, Mohamed Saad, Devendra K. Sadana
  • Publication number: 20150136199
    Abstract: An interconnect assembly. The interconnect assembly includes a trace that includes a plurality of electrically conductive portions. The plurality of electrically conductive portions is configured both to collect current from a first solar cell and to interconnect electrically to a second solar cell. In addition, the plurality of electrically conductive portions is configured such that solar-cell efficiency is substantially undiminished in an event that any one of the plurality of electrically conductive portions is conductively impaired.
    Type: Application
    Filed: November 12, 2014
    Publication date: May 21, 2015
    Inventors: Mulugeta Zerfu Wudu, Jason Stephen Corneille, Steven Thomas Croft, Steven Douglas Flanders, William James McColl
  • Patent number: 8993371
    Abstract: The method of manufacturing a light absorbing layer for a solar cell by performing thermal treatment on a specimen configured to include thin films of one or more of copper, indium, and gallium on a substrate and element selenium, includes steps of: (a) heating a wall of a chamber up to a predefined thin film formation temperature in order to maintain a selenium vapor pressure; (b) mounting the specimen and the element selenium on the susceptor at the room temperature and loading the susceptor in the chamber; and (c) heating the specimen in the lower portion of the susceptor and, at the same time, heating the element selenium in the upper portion of the susceptor, wherein, in the step (c), in order for liquefied selenium not to be condensed on the specimen which is loaded at the room temperature and is not yet heated, the temperature of the element selenium and the specimen loaded in the chamber are individually controlled, so that the selenium vapor pressure of an inner space of the chamber does not exceed a
    Type: Grant
    Filed: August 4, 2011
    Date of Patent: March 31, 2015
    Assignee: Semics Inc.
    Inventor: Seong Hoon Song
  • Patent number: 8993373
    Abstract: Methods of doping a solar cell, particularly a point contact solar cell, are disclosed. One surface of a solar cell may require portions to be n-doped, while other portions are p-doped. At least one lithography step can be eliminated by the use of a blanket doping of species having one conductivity and a patterned counterdoping process of species having the opposite conductivity. The areas doped during the patterned implant receive a sufficient dose so as to completely reverse the effect of the blanket doping and achieve a conductivity that is opposite the blanket doping. In some embodiments, counterdoped lines are also used to reduce lateral series resistance of the majority carriers.
    Type: Grant
    Filed: May 4, 2012
    Date of Patent: March 31, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Nicholas Bateman, John Graff
  • Patent number: 8987033
    Abstract: A method includes forming a blocking layer over a substrate, and etching the blocking layer to form a trench in the blocking layer. A dielectric layer is formed, wherein the dielectric layer comprises a first portion over the blocking layer, and a second portion in the trench. After the step of forming the dielectric layer, an implantation is performed to implant an impurity into the substrate to form a deep well region. After the implantation, the dielectric layer and the blocking layer are removed.
    Type: Grant
    Filed: August 2, 2011
    Date of Patent: March 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Chung Su, Shih-Chang Liu, Shih Pei Chou, Chia-Shiung Tsai, Chun-Tsung Kuo, Wen-I Hsu, Yi-Shin Chu
  • Publication number: 20150079719
    Abstract: In one embodiment, a method (e.g., a method for forming one or more semiconductor layers on a device) includes modifying a first side of a first semiconductor body inside of a processing system to at least partially manufacture one or more photovoltaic modules; flipping the first semiconductor body over inside the processing system; and modifying an opposite, second side of the first semiconductor body inside of the processing system to continue fabrication of the one or more photovoltaic cells, wherein modifying at least one of the first side or second side of the first semiconductor body is performed in at least one of a reduced pressure or increased temperature environment of the processing system and flipping the first semiconductor body is performed without removing the first semiconductor body from the processing system.
    Type: Application
    Filed: September 16, 2013
    Publication date: March 19, 2015
    Applicant: JiFu Machinery & Equipment Inc.
    Inventor: Linh Can
  • Publication number: 20150072461
    Abstract: An ion implantation system having a grid assembly. The system includes a plasma source configured to provide plasma in a plasma region; a first grid plate having a plurality of apertures configured to allow ions from the plasma region to pass therethrough, wherein the first grid plate is configured to be biased by a power supply; a second grid plate having a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate, wherein the second grid plate is configured to be biased by a power supply; and a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the second grid plate.
    Type: Application
    Filed: October 8, 2014
    Publication date: March 12, 2015
    Inventors: Babak Adibi, Moon Chun
  • Patent number: 8927317
    Abstract: A method for producing a selective doping structure in a semiconductor substrate in order produce a photovoltaic solar cell. The method includes the following steps: A) applying a doping layer (2) to the emitter side of the semiconductor substrate, B) locally heating a melting region of the doping layer (2) and a melting region of the semiconductor substrate lying under the doping layer (2) in such a way that dopant diffuses from the doping layer (2) into the melted semiconductor substrate via liquid-liquid diffusion, so that a high doping region (3) is produced after the melt mixture solidifies, C) producing the planar low doping region by globally heating the semiconductor substrate, D) removing the doping layer (2) and E) removing or converting a layer of the semiconductor substrate on the doping side in such a way that part of the low doping region and of the high doping region close to the surface is removed or is converted into an electrically non-conducting layer.
    Type: Grant
    Filed: June 16, 2011
    Date of Patent: January 6, 2015
    Assignees: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V., Albert-Ludwigs-Universität Freiburg
    Inventors: Ulrich Jager, Daniel Biro, Anne-Kristin Volk, Johannes Seiffe, Sebastian Mack, Andreas Wolf, Ralf Preu
  • Patent number: 8853098
    Abstract: Embodiments disclosed herein generally relate to an apparatus and a method for placing a substrate substantially flush against a substrate support in a processing chamber. When a large area substrate is placed onto a substrate support, the substrate may not be perfectly flush against the substrate support due to gas pockets that may be present between the substrate and the substrate support. The gas pockets can lead to uneven deposition on the substrate. Therefore, pulling the gas from between the substrate and the support may pull the substrate substantially flush against the support. During deposition, an electrostatic charge can build up and cause the substrate to stick to the substrate support. By introducing a gas between the substrate and the substrate support, the electrostatic forces may be overcome so that the substrate can be separated from the susceptor with less or no plasma support which takes extra time and gas.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: October 7, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Sam H. Kim, John M. White, Soo Young Choi, Carl A. Sorensen, Robin L. Tiner, Beom Soo Park
  • Patent number: 8836082
    Abstract: A novel reversal lithography process without etch back is described. The reversal material comprises nanoparticles that are selectively deposited into the gaps between features without overcoating the tops of the features. As a result, a patterned imaging layer can be removed using solvent, blanket exposure followed by developer washing, or dry etching directly, without an etch-back process, and the original bright field lithography pattern can be reversed into dark field features, and transferred into subsequent layers using the nanoparticle reversal material as an etch mask.
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: September 16, 2014
    Assignee: Brewer Science Inc.
    Inventors: Qin Lin, Daniel M. Sullivan, Hao Xu, Tony D. Flaim
  • Patent number: 8828776
    Abstract: Multi-zone, solar cell diffusion furnaces having a plurality of radiant element (SiC) or/and high intensity IR lamp heated process zones, including baffle, ramp-up, firing, soaking and cooling zone(s). The transport of solar cell wafers, e.g., silicon, selenium, germanium or gallium-based solar cell wafers, through the furnace is implemented by use of an ultra low-mass, wafer transport system comprising laterally spaced shielded, synchronously driven, metal bands or chains carrying non-rotating alumina tubes suspended on wires between them. The wafers rest on raised circumferential standoffs spaced laterally along the alumina tubes, which reduces contamination. The high intensity IR flux rapidly photo-radiation conditions the wafers so that diffusion occurs >3× faster than conventional high-mass thermal furnaces. Longitudinal side wall heaters comprising coil heaters in Inconel sheaths inserted in carrier tubes are employed to insure even heating of wafer edges adjacent the side walls.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: September 9, 2014
    Assignee: TP Solar, Inc.
    Inventors: Richard W. Parks, Luis Alejandro Rey Garcia, Peter G. Ragay
  • Patent number: 8796064
    Abstract: A method for producing thin-film solar modules, comprising the following steps: providing flexible thin-film solar cells as separate segments in a container or on a web wound up to a roll, the flexible thin-film solar cells bearing with a first side against the web, wherein each of the flexible thin-film solar cells is designed to have a first electric pole and a second electric pole; transferring the flexible thin-film solar cells from the web to a first film web such that the first pole of a first flexible thin-film solar cell is positioned next to the second pole of a second thin-film solar cell; and applying electrically conductive contact strips to the first and second poles of the flexible thin-film solar cells in longitudinal and/or transverse direction relative to the conveying direction of the first film web.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: August 5, 2014
    Assignee: Muehlbauer AG
    Inventor: Volker Brod
  • Publication number: 20140193939
    Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.
    Type: Application
    Filed: January 4, 2013
    Publication date: July 10, 2014
    Applicant: TSMC SOLAR LTD.
    Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
  • Patent number: 8748212
    Abstract: A method and an apparatus for producing solar cell strings by connecting at least two solar cells by a least one conductor ribbon of a first length, wherein the solar cells are respectively spaced from one another at a string cell spacing(s), until a desired number of solar cells for producing a first solar cell string is connected together, connecting a further solar cell with a last solar cell of the first solar string by at least another conductor ribbon which is longer than the at least one conductor ribbon, wherein the second solar cell is spaced from the last solar cell at a greater spacing than the string cell spacing(s) and wherein the second solar cell forms the first solar cell for a second solar string, and separating the at least another conductor ribbon for decoupling the first solar cell string.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: June 10, 2014
    Assignee: Komax Holding AG
    Inventors: William D. Duncan, Adrian H. Gretler, James R. Lyon, Brad M. Dingle
  • Patent number: 8709859
    Abstract: A method of fabricating a solar cell on a conveyer belt is provided. The method includes the following steps. A first surface of an aluminum foil is coated with a layer of phosphorous mixed with a plurality of graphite powders and put on the conveyer belt. A first thermal treatment is performed to activate a portion of the aluminum foil and the phosphorous layer on the first surface to form an aluminum phosphide (AlP) layer. A molten silicon material is spray-coated on a second surface of the remaining aluminum foil, and a second thermal treatment is performed to make the silicon material transferring into a p-type polySi layer on the n-type AlP layer. A solar cell including the n-type AlP layer and the p-type polySi layer is formed, and the solar cell is respectively annealed and cooled down in a first and a second vertical stack.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: April 29, 2014
    Assignee: GAMC Biotech Development Co., Ltd.
    Inventor: Chia-Gee Wang
  • Patent number: 8703528
    Abstract: A method for forming a back-side illuminated image sensor, including the steps of: a) forming, from the front surface, doped polysilicon regions, of a conductivity type opposite to that of the substrate, extending in depth orthogonally to the front surface and emerging into the first layer; b) thinning the substrate from its rear surface to reach the polysilicon regions, while keeping a strip of the first layer; c) depositing, on the rear surface of the thinned substrate, a doped amorphous silicon layer, of a conductivity type opposite to that of the substrate; and d) annealing at a temperature capable of transforming the amorphous silicon layer into a crystallized layer.
    Type: Grant
    Filed: April 12, 2012
    Date of Patent: April 22, 2014
    Assignees: STMicroelectronics S.A., STMicroelectronics (Crolles 2) SAS
    Inventors: Michel Marty, François Roy, Jens Prima
  • Patent number: 8691613
    Abstract: A crystalline-based silicon photoelectric conversion device comprises: an intrinsic silicon-based layer and a silicon-based layer of a first conductivity type, on one surface of a single-crystal silicon substrate of the first conductivity type; and an intrinsic silicon-based and a silicon-based layer of an opposite conductivity type, in this order on the other surface of the silicon substrate. At least one of forming the intrinsic silicon-based layer of the first conductivity type layer-side forming the intrinsic silicon-based layer of the opposite conductivity type layer-side includes: forming a first intrinsic silicon-based thin-film layer having a thickness of 1-10 nm on the silicon substrate; plasma-treating the silicon substrate in a gas containing mainly hydrogen; and forming a second intrinsic silicon-based thin-film layer on the first intrinsic silicon-based thin-film.
    Type: Grant
    Filed: August 31, 2011
    Date of Patent: April 8, 2014
    Assignee: Kaneka Corporation
    Inventors: Masashi Yoshimi, Mitsuru Ichikawa, Toshihiko Uto, Kenji Yamamoto
  • Patent number: 8673777
    Abstract: An apparatus for vapor deposition of a sublimated source material as a thin film on a substrate is provided. The apparatus includes a receptacle configured to hold a source material and a distribution plate positioned above the receptacle. The distribution plate defines a pattern of passages therethrough. The apparatus also includes a conveyor configured to travel in a continuous loop such that its transfer surface passes above the distribution plate in a first direction to receive thereon sublimated source material passing through the passages of the distribution plate. The conveyor is also configured to travel in a second direction while carrying a substrate on its raised edges. A heating system heats the conveyor while it travels in the second direction to transfer the source material from the transfer surface to the substrate. A process is provided for vapor deposition of a sublimated source material to form thin film.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: March 18, 2014
    Assignee: First Solar, Inc.
    Inventors: Russell Weldon Black, Scott Daniel Feldman-Peabody, Christopher Rathweg
  • Patent number: 8674377
    Abstract: An optoelectonice device package, an array of optoelectronic device packages and a method of fabricating an optoelectronic device package. The array includes a plurality of optoelectronic device packages, each enclosing an optoelectronic device, and positioned in at least one row. Each package including two geometrically parallel transparent edge portions and two geometrically parallel non-transparent edge portions, oriented substantially orthogonal to the transparent edge portions. The transparent edge portions are configured to overlap at least one adjacent package, and may be hermetically sealed. The optoelectronic device portion fabricated using R2R manufacturing techniques.
    Type: Grant
    Filed: August 30, 2011
    Date of Patent: March 18, 2014
    Assignee: General Electric Company
    Inventor: Donald Seton Farquhar
  • Patent number: 8658455
    Abstract: A system and a method for mass production of Dye-Sensitized Solar Cells at low cost via a continuous roll-to-roll process. While a flexible conductive substrate is constantly in transit on a conveyor, a titanium dioxide (TiO2) layer is: formed by spray printing; sintered; dyed in a dye tank, with or without immersion, by a dye solution sprayed from nozzles while the substrate moves along a conveyor line configured as multiple alternating U-shaped lines; washed and dried; loaded with a gel-type electrolyte by roll-type printing; and covered and pressure-sealed by another flexible conductive substrate, aided by preloaded sealants. The dye solution in the dye tank may be re-circulated, during which process, the temperature, level, concentration of the dye solution may be adjusted and controlled. The roll-to-roll production process may further include erecting anti-leakage walls and leveling the electrolyte layer for preventing post-sealing leakage of the electrolyte.
    Type: Grant
    Filed: July 2, 2010
    Date of Patent: February 25, 2014
    Assignee: Konkuk University Industrial Cooperation Corp.
    Inventors: Kee-Hyun Shin, Jin-Hyun Ahn, Hyun-Kyoo Kang, Yun Shick Eom
  • Publication number: 20140041712
    Abstract: Power generator including a supporting substrate and a plurality of organic photovoltaic cells that are provided on the supporting substrate along a prescribed alignment direction and are serially connected with each other. Each of the organic photovoltaic cells includes a pair of electrodes and an active layer placed between the pair of electrodes. The active layer extends along the prescribed alignment direction s plurality of organic photovoltaic cells. Each of the pair of electrodes has an extending portion that extends to protrude from the active layer into a direction perpendicular to both a thickness direction of the supporting substrate and the alignment direction. One electrode out of the pair of electrodes further has a connecting portion that extends in the alignment direction from the extending portion to the opposite electrode of other organic photovoltaic cell adjacent in the alignment direction and is connected to the opposite electrode.
    Type: Application
    Filed: October 18, 2011
    Publication date: February 13, 2014
    Applicant: SUMITOMO CHEMCIAL COMPANY, LIMITED
    Inventors: Shoji Mima, Takahiro Seike
  • Patent number: 8617943
    Abstract: A method for fabricating a flexible semiconductor device includes: preparing a layered film 80 including a first metal layer 10, an inorganic insulating layer 20, a semiconductor layer 30, and a second metal layer 40 which are sequentially formed; etching the first metal layer 10 to form a gate electrode 12g; compression bonding a resin layer 50 to a surface of the layered film 80 provided with the gate electrode 12g to allow the gate electrode 12g to be embedded in the resin layer 50; and etching the second metal layer 40 to form a source electrode 42s and a drain electrode 42d, wherein the inorganic insulating layer 20 on the gate electrode 12g functions as a gate insulating film 22, and the semiconductor layer 30 between the source electrode 42s and drain electrode 42d on the inorganic insulating layer 20 functions as a channel 32.
    Type: Grant
    Filed: July 22, 2009
    Date of Patent: December 31, 2013
    Assignee: Panasonic Corporation
    Inventors: Takashi Ichiryu, Seiichi Nakatani, Koichi Hirano, Yoshihisa Yamashita, Shingo Komatsu
  • Patent number: 8609451
    Abstract: Fabrication of a single crystal silicon solar cell with an insitu epitaxially deposited very highly doped p-type silicon back surface field obviates the need for the conventional aluminum screen printing step, thus enabling a thinner silicon solar cell because of no aluminum induced bow in the cell. Furthermore, fabrication of a single crystal silicon solar cell with insitu epitaxial p-n junction formation and very highly doped n-type silicon front surface field completely avoids the conventional dopant diffusion step and one screen printing step, thus enabling a cheaper manufacturing process.
    Type: Grant
    Filed: March 19, 2012
    Date of Patent: December 17, 2013
    Assignee: Crystal Solar Inc.
    Inventors: Tirunelveli S. Ravi, Ashish Asthana
  • Patent number: 8603850
    Abstract: To provide a method for manufacturing a solar cell, whereby solar cells can be mass-produced by a simple process at low cost. A first conductivity-type silicon powder (11) is prepared, a silicon powder layer (11a) is formed by disposing the powder in the form of a layer, the powder layer is melted by heating the powder layer to the melting point of silicon or higher, and a first conductivity-type silicon layer (11b) is formed by cooling the melted layer. A second conductivity-type silicon powder (12) is prepared, a second conductivity-type silicon powder layer (12a) is formed by disposing the powder in the form of a layer on the first conductivity-type silicon layer (11b), the powder layer is melted by heating the powder layer to the melting point of silicon or higher, and a second conductivity-type silicon layer (12b) is formed by cooling the melted layer.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: December 10, 2013
    Assignee: Sanki Dengyo Co., Ltd.
    Inventors: Hiroaki Oka, Nariaki Oka
  • Patent number: 8581236
    Abstract: An electrically pumped optoelectronic semiconductor chip includes at least two radiation-active quantum wells comprising InGaN or consisting thereof. The optoelectronic semiconductor chip includes at least two cover layers which include AlGaN or consist thereof. Each of the cover layers is assigned to precisely one of the radiation-active quantum wells. The cover layers are each located on a p-side of the associated radiation-active quantum well. The distance between the radiation-active quantum well and the associated cover layer is at most 1.5 nm.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: November 12, 2013
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Matthias Peter, Tobias Meyer, Jürgen Off, Tetsuya Taki, Joachim Hertkorn, Matthias Sabathil, Ansgar Laubsch, Andreas Biebersdorf
  • Patent number: 8557625
    Abstract: A method for fabricating a thin film photovoltaic device. The method includes providing a substrate comprising an absorber layer and an overlying window layer. The substrate is loaded into a chamber and subjected to a vacuum environment. The vacuum environment is at a pressure ranging from 0.1 Torr to about 0.02 Torr. In a specific embodiment, a mixture of reactant species derived from diethylzinc species, water species and a carrier gas is introduced into the chamber. The method further introduces a diborane species using a selected flow rate into the mixture of reactant species. A zinc oxide film is formed overlying the window layer to define a transparent conductive oxide using the selected flow rate to provide a resistivity of about 2.5 milliohm-cm and less and an average grain size of about 3000 to 5000 Angstroms.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: October 15, 2013
    Assignee: Stion Corporation
    Inventor: Robert D. Wieting
  • Publication number: 20130217167
    Abstract: A process for sealing a multilayer article against environmental degradation. The article comprises a photoactive layer disposed on a length of flexible substrate and is sealed by applying a sol-gel layer to the outermost layer of the article and curing the sol-gel layer into a flexible, glass protective-coating. The multilayer article can be a photovoltaic device.
    Type: Application
    Filed: February 14, 2013
    Publication date: August 22, 2013
    Applicant: E I DU PONT DE NEMOURS AND COMPANY
    Inventor: E I DU PONT DE NEMOURS AND COMPANY
  • Patent number: 8497150
    Abstract: This invention discloses a defect isolation method for thin-film solar cell having at least a defect therein. The thin-film solar cell comprises a substrate, a front electrode layer, an absorber layer and a back electrode layer stacked in such a sequence. The defect isolation method includes the steps of: detecting at least a defect formed in thin-film solar cell and acquiring the positions of the defects, and applying a laser light to scribe the outer circumference of the defects according to the positions of the defects so as to form at least an isolation groove having a closed-curve configuration.
    Type: Grant
    Filed: September 29, 2009
    Date of Patent: July 30, 2013
    Assignee: Nexpower Technology Corp.
    Inventors: Yung-Yuan Chang, Hui-Chu Lin
  • Patent number: 8481355
    Abstract: A system and associated process for vapor deposition of a thin film layer on a photovoltaic (PV) module substrate is includes establishing a vacuum chamber and introducing the substrates individually into the vacuum chamber. A conveyor system is operably disposed within the vacuum chamber and is configured for conveying the substrates in a serial arrangement through a vapor deposition apparatus within the vacuum chamber at a controlled constant linear speed. A post-heat section is disposed within the vacuum chamber immediately downstream of the vapor deposition apparatus in the conveyance direction of the substrates. The post-heat section is configured to maintain the substrates conveyed from the vapor deposition apparatus in a desired heated temperature profile until the entire substrate has exited the vapor deposition apparatus.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: July 9, 2013
    Assignee: Primestar Solar, Inc.
    Inventors: Mark Jeffrey Pavol, Russell Weldon Black, Brian Robert Murphy, Christopher Rathweg, Edwin Jackson Little, Max William Reed
  • Publication number: 20130157401
    Abstract: A method for producing a selective doping structure in a semiconductor substrate in order produce a photovoltaic solar cell. The method includes the following steps: A) applying a doping layer (2) to the emitter side of the semiconductor substrate, B) locally heating a melting region of the doping layer (2) and a melting region of the semiconductor substrate lying under the doping layer (2) in such a way that dopant diffuses from the doping layer (2) into the melted semiconductor substrate via liquid-liquid diffusion, so that a high doping region (3) is produced after the melt mixture solidifies, C) producing the planar low doping region by globally heating the semiconductor substrate, D) removing the doping layer (2) and E) removing or converting a layer of the semiconductor substrate on the doping side in such a way that part of the low doping region and of the high doping region close to the surface is removed or is converted into an electrically non-conducting layer.
    Type: Application
    Filed: June 16, 2011
    Publication date: June 20, 2013
    Applicant: ALBERT-LUDWIGS-UNIVERSITAT FREIBURG
    Inventors: Ulrich Jäger, Daniel Biro, Anne-Kristin Volk, Johannes Seiffe, Sebastian Mack, Andreas Wolf, Ralf Preu
  • Patent number: 8455754
    Abstract: A solar cell element and method of manufacturing same is disclosed. A reverse-conductive-type layer is formed on at least one part of a first surface side of a one-conductive-type semiconductor substrate. A conductive layer is formed on the reverse-conductive-type layer. A contact region for electrically connecting the conductive layer and the one-conductive-type semiconductor substrate is formed by heating and melting at least one part of the conductive layer. The solar cell element can be manufactured without conducting complicated treatments, such as removal by etching and re-growing of a silicon thin layer.
    Type: Grant
    Filed: April 27, 2009
    Date of Patent: June 4, 2013
    Assignee: KYOCERA Corporation
    Inventors: Koichiro Niira, Manabu Komoda
  • Publication number: 20130122631
    Abstract: A method for vapor deposition of a sublimated source material, such as CdTe, onto substrates in a continuous, non-stop manner through the apparatus is provided. The sublimated source material moves through a distribution plate and deposits onto the upper surface of the substrates as they are conveyed through the deposition area. The substrates move into and out of the deposition area through entry and exit slots that are defined by transversely extending entrance and exit seals. The seals are disposed at a gap distance above the upper surface of the substrates that is less than the distance or spacing between the upper surface of the substrates and the distribution plate. The seals have a ratio of longitudinal length (in the direction of conveyance of the substrates) to gap distance of from about 10:1 to about 100:1.
    Type: Application
    Filed: January 28, 2013
    Publication date: May 16, 2013
    Applicant: PRIMESTAR SOLAR, INC.
    Inventor: PRIMESTAR SOLAR, INC.
  • Publication number: 20130122630
    Abstract: An apparatus and related process are provided for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate. A deposition head is configured for sublimating a source material supplied thereto. The sublimated source material condenses onto a transport conveyor disposed below the deposition head. A substrate conveyor is disposed below the transport conveyor and conveys substrates in a conveyance path through the apparatus such that an upper surface of the substrates is opposite from and spaced below a lower leg of the transport conveyor. A heat source is configured adjacent the lower leg of the transport conveyor. The source material plated onto the transport conveyor is sublimated along the lower leg and condenses onto to the upper surface of substrates conveyed by the substrate conveyor.
    Type: Application
    Filed: January 28, 2013
    Publication date: May 16, 2013
    Applicant: PRIMESTAR SOLAR, INC.
    Inventor: PRIMESTAR SOLAR, INC.
  • Publication number: 20130102103
    Abstract: Embodiments of the present invention provide apparatus and methods for closed-loop control utilized in printing a multilayer pattern on a substrate. In one embodiment, a solar cell formation process is provided. The process comprises positioning a substrate on a substrate receiving surface of a printing station, printing a first patterned layer on a region of the substrate, acquiring a first optical image of the first patterned layer and storing the first optical image in a buffer, printing a second patterned layer over the region of the substrate, wherein the second patterned layer is aligned over the region of the substrate using information received from the acquired first optical image.
    Type: Application
    Filed: October 23, 2012
    Publication date: April 25, 2013
    Applicant: APPLIED MATERIALS ITALIA S.r.I.
    Inventor: APPLIED MATERIALS ITALIA S.r.I.
  • Publication number: 20130084669
    Abstract: An apparatus for vapor deposition of a sublimated source material as a thin film on a substrate is provided. The apparatus includes a receptacle configured to hold a source material and a distribution plate positioned above the receptacle. The distribution plate defines a pattern of passages therethrough. The apparatus also includes a conveyor configured to travel in a continuous loop such that its transfer surface passes above the distribution plate in a first direction to receive thereon sublimated source material passing through the passages of the distribution plate. The conveyor is also configured to travel in a second direction while carrying a substrate on its raised edges. A heating system heats the conveyor while it travels in the second direction to transfer the source material from the transfer surface to the substrate. A process is provided for vapor deposition of a sublimated source material to form thin film.
    Type: Application
    Filed: September 30, 2011
    Publication date: April 4, 2013
    Applicant: PRIMESTAR SOLAR, INC.
    Inventors: Russell Weldon Black, Scott Daniel Feldman-Peabody, Christopher Rathweg
  • Patent number: 8409904
    Abstract: Protuberances, having vertical and lateral dimensions less than the wavelength range of lights detectable by a photodiode, are formed at an optical interface between two layers having different refractive indices. The protuberances may be formed by employing self-assembling block copolymers that form an array of sublithographic features of a first polymeric block component within a matrix of a second polymeric block component. The pattern of the polymeric block component is transferred into a first optical layer to form an array of nanoscale protuberances. Alternately, conventional lithography may be employed to form protuberances having dimensions less than the wavelength of light. A second optical layer is formed directly on the protuberances of the first optical layer. The interface between the first and second optical layers has a graded refractive index, and provides high transmission of light with little reflection.
    Type: Grant
    Filed: June 21, 2011
    Date of Patent: April 2, 2013
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, Jeffrey P. Gambino, Charles F. Musante
  • Publication number: 20130045559
    Abstract: To provide a method for manufacturing a solar cell, whereby solar cells can be mass-produced by a simple process at low cost. A first conductivity-type silicon powder (11) is prepared, a silicon powder layer (11a) is formed by disposing the powder in the form of a layer, the powder layer is melted by heating the powder layer to the melting point of silicon or higher, and a first conductivity-type silicon layer (11b) is formed by cooling the melted layer. A second conductivity-type silicon powder (12) is prepared, a second conductivity-type silicon powder layer (12a) is formed by disposing the powder in the form of a layer on the first conductivity-type silicon layer (11b), the powder layer is melted by heating the powder layer to the melting point of silicon or higher, and a second conductivity-type silicon layer (12b) is formed by cooling the melted layer.
    Type: Application
    Filed: August 22, 2012
    Publication date: February 21, 2013
    Applicant: SANKI DENGYO CO., LTD.
    Inventors: Hiroaki Oka, Nariaki Oka
  • Patent number: 8367453
    Abstract: When a layered structure of a transparent electrode layer and a metal layer is formed as a back side electrode layer over a surface on a side opposite to a side of incidence of light of a thin film solar battery, a time when formation of the transparent electrode layer is completed and a time when formation of the metal layer is started are made to coincide for one substrate.
    Type: Grant
    Filed: April 9, 2012
    Date of Patent: February 5, 2013
    Assignee: Sanyo Electric Co., Ltd.
    Inventor: Kazushige Kaneko
  • Patent number: 8349645
    Abstract: A mask includes: a tabular first section which includes a side portion and an opening portion formed at a position corresponding to a film formation region of a substrate and on which the substrate is to be disposed so that the first section overlaps a face of the substrate on which a film is to be formed; and a second section which is provided along the side portion of the first section, and covers at least one of portions of a side face of the substrate, wherein second sections of two adjacent masks overlap each other and a superposed section is thereby formed when a plurality of masks are arrayed in a lateral direction thereof.
    Type: Grant
    Filed: October 21, 2009
    Date of Patent: January 8, 2013
    Assignee: Ulvac, Inc.
    Inventors: Miwa Watai, Kazuya Saito, Takashi Komatsu, Yusuke Mizuno, Atsushi Ota, Shunji Kuroiwa
  • Patent number: 8324012
    Abstract: A tandem solar cell and fabricating method thereof are disclosed. The steps of the fabricating method comprises: a top inverted solar cell having a plurality of inverted solar sub-cells is provided; a bottom normal solar cell having a plurality of normal solar sub-cells accompanying with the inverted solar sub-cells is provided; and processing fit process of the top inverted solar cell and the bottom normal solar cell is executed, wherein an interlayer is disposed between the bottom normal solar cell and the top inverted solar cell, and the interlayer includes a plurality of conductive dots. The plurality of inverted solar sub-cells and normal solar sub-cells are placed with an offset distance from each other, and a plurality of solar sub-cells are formed after the pressing fit process, and the plurality of solar sub-cells are series/parallel connection each other by electrically connecting the plurality of conductive dots.
    Type: Grant
    Filed: March 25, 2010
    Date of Patent: December 4, 2012
    Assignee: National Tsing Hua University
    Inventors: Sheng-Fu Horng, Hsin-Fe Meng, Ming-Kun Lee, Jen-Chun Wang, Tsung-Te Chen
  • Patent number: 8318531
    Abstract: thermal management for large scale processing of CIS and/or CIGS based thin film is described. The method includes providing a plurality of substrates, each of the substrates having a copper and indium composite structure. The method also includes transferring the plurality of substrates into a furnace, each of the plurality of substrates provided in a vertical orientation with respect to a direction of gravity, the plurality of substrates being defined by a number N, where N is greater than 5. The method further includes introducing a gaseous species including a selenide species and a carrier gas into the furnace and transferring thermal energy into the furnace to increase a temperature from a first temperature to a second temperature, to at least initiate formation of a copper indium diselenide film.
    Type: Grant
    Filed: November 9, 2011
    Date of Patent: November 27, 2012
    Assignee: Stion Corporation
    Inventor: Robert D. Wieting
  • Patent number: 8263428
    Abstract: This disclosure provides polymer electrolytes for dye-sensitized solar cells that can not only prevent electrolytes from leaking, but also exhibit a higher solar conversion efficiency when compared with conventional polymer electrolytes, whereby the polymer electrolytes are applicable to a process for manufacturing dye-sensitized solar cells with a large surface area or flexible dye-sensitized solar cells, and methods for manufacturing modules of dye-sensitized solar cells using the same.
    Type: Grant
    Filed: March 22, 2010
    Date of Patent: September 11, 2012
    Assignee: Toray Advanced Materials Korea Inc.
    Inventors: Chang-Hoon Sim, Sang-Pil Kim, Ki-Jeong Moon
  • Patent number: 8247741
    Abstract: A system is provided for heating or cooling discrete, linearly conveyed substrates having a gap between a trailing edge of a first substrate and a leading edge of a following substrate in a conveyance direction. The system includes a chamber, and a conveyor operably configured within the chamber to move the substrates through at a conveyance rate. A plurality of individually controlled temperature control units, for example heating or cooling units, are disposed linearly within the chamber along the conveyance direction. A controller is in communication with the temperature control units and is configured to cycle output of the temperature control units from a steady-state temperature output as a function of the spatial position of the conveyed substrates within the chamber relative to the temperature control units so as to decrease temperature variances in the substrates caused by movement of the substrates through the chamber.
    Type: Grant
    Filed: March 24, 2011
    Date of Patent: August 21, 2012
    Assignee: PrimeStar Solar, Inc.
    Inventors: Kevin Michael Pepler, James Joseph Jones, Sean Timothy Halloran
  • Patent number: 8247255
    Abstract: A process and associated system for vapor deposition of a thin film layer on a photovoltaic (PV) module substrate is includes establishing a vacuum chamber and introducing the substrates individually into the vacuum chamber. The substrates are pre-heated as they are conveyed through the vacuum chamber, and are then conveyed in serial arrangement through a vapor deposition apparatus in the vacuum chamber wherein a thin film of a sublimed source material is deposited onto an upper surface of the substrates. The substrates are conveyed through the vapor deposition apparatus at a controlled constant linear speed such that leading and trailing sections of the substrate in a conveyance direction are exposed to the same vapor deposition conditions within the vapor deposition apparatus. The vapor deposition apparatus may be supplied with source material in a manner so as not to interrupt the vapor deposition process or non-stop conveyance of the substrates through the vapor deposition apparatus.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: August 21, 2012
    Assignee: PrimeStar, Inc.
    Inventors: Mark Jeffrey Pavol, Russell Weldon Black, Brian Robert Murphy, Christopher Rathweg, Edwin Jackson Little, Max William Reed
  • Publication number: 20120208312
    Abstract: A method of manufacturing an organic photovoltaic device of a pre-defined shape and size is provided. The method includes providing a first substrate with said pre-defined shape and size, the size being less than 900 square centimeters and depositing an organic photoactive layer on said first substrate followed by depositing an electrically conducting layer on said organic photoactive layer. Thereafter, said electrically conducting layer and said organic photoactive layer are scribed from said first substrate forming zones on first substrates, whereby forming an active substrate. Further, providing a second substrate with said pre-defined shape and size and depositing a gas-absorbent layer on said second substrate whereby forming an inactive substrate. Finally, encapsulating said active substrate with said inactive substrate to form said organic photovoltaic device with said pre-defined shape and size, whereby not involving cutting of said first substrate after deposition of said organic photoactive layer.
    Type: Application
    Filed: May 4, 2011
    Publication date: August 16, 2012
    Inventors: Nikhil Agrawal, Gopalan Rajeswaran, Rajeev Jindal
  • Patent number: 8236601
    Abstract: Methods for forming a TCO layer on a substrate are generally provided and include sputtering a TCO layer on a substrate from a target including cadmium stannate. A cap material (e.g., including cadmium) is deposited onto an outer surface of an indirect anneal system, and the TCO layer can be annealed at an anneal temperature while in contact with or within about 10 cm of the cap material. An anneal oven is also generally provided and includes an indirect anneal system defining a deposition surface and an anneal surface such that a cap material deposited on the anneal surface of the indirect anneal system is positioned to be in contact with or within about 10 cm of a thin film on the substrate. A cap material source can be positioned to deposit the cap material onto the deposition surface such that the anneal surface comprises the cap material.
    Type: Grant
    Filed: July 2, 2010
    Date of Patent: August 7, 2012
    Assignee: PrimeStar Solar, Inc.
    Inventors: Scott Daniel Feldman-Peabody, Russell Weldon Black
  • Patent number: 8236596
    Abstract: Multi-zone, solar cell diffusion furnaces having a plurality of radiant element (SiC) or/and high intensity IR lamp heated process zones, including baffle, ramp-up, firing, soaking and cooling zone(s). The transport of solar cell wafers, e.g., silicon, selenium, germanium or gallium-based solar cell wafers, through the furnace is implemented by use of an ultra low-mass, wafer transport system comprising laterally spaced shielded metal bands or chains carrying non-rotating alumina tubes suspended on wires between them. The wafers rest on raised circumferential standoffs spaced laterally along the alumina tubes, which reduces contamination. The bands or chains are driven synchronously at ultra-low tension by a pin drive roller or sprocket at either the inlet or outlet end of the furnace, with appropriate tensioning systems disposed in the return path. The high intensity IR flux rapidly photo-radiation conditions the wafers so that diffusion occurs >3× faster than conventional high-mass thermal furnaces.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: August 7, 2012
    Assignee: TP Solar, Inc.
    Inventors: Richard W. Parks, Luis Alejandro Rey Garcia, Peter M. Ragay
  • Patent number: 8207006
    Abstract: An apparatus and related process are provided for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate. A receptacle is disposed within a vacuum head chamber and is configured for receipt of a source material. A heated distribution manifold is disposed below the receptacle and includes a plurality of passages defined therethrough. The receptacle is indirectly heated by the distribution manifold to a degree sufficient to sublimate source material within the receptacle. A molybdenum distribution plate is disposed below the distribution manifold and at a defined distance above a horizontal plane of a substrate conveyed through the apparatus. The molybdenum distribution plate includes a pattern of holes therethrough that further distribute the sublimated source material passing through the distribution manifold onto the upper surface of the underlying substrate. The molybdenum distribution plate includes greater than about 75% by weight molybdenum.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: June 26, 2012
    Assignee: PrimeStar Solar, Inc.
    Inventors: Christopher Rathweg, Max William Reed, Mark Jeffrey Pavol
  • Patent number: 8173474
    Abstract: When a layered structure of a transparent electrode layer and a metal layer is formed as a back side electrode layer over a surface on a side opposite to a side of incidence of light of a thin film solar battery, a time when formation of the transparent electrode layer is completed and a time when formation of the metal layer is started are made to coincide for one substrate.
    Type: Grant
    Filed: March 30, 2010
    Date of Patent: May 8, 2012
    Assignee: Sanyo Electric Co., Ltd.
    Inventor: Kazushige Kaneko