Cam Actuated Patents (Class 451/18)
  • Method and device for cutting a multiplicity of disks from a hard brittle workpiece
    Patent number: 6390896
    Abstract: A method for cutting a multiplicity of disks from a hard brittle workpiece is by moving the workpiece at a defined feed rate through a wire web of a wire saw. In the method, the wire web is formed by a sawing wire which moves in a reciprocating manner and is covered with bonded abrasive grain. A cooling liquid is provided beneath the wire web, in which cooling liquid the sawing wire of the wire web is immersed when cutting off the disks. Also provided is a wire saw which is suitable for carrying out the method.
    Type: Grant
    Filed: September 1, 1999
    Date of Patent: May 21, 2002
    Assignee: Wacker Siltronic Gesellschaft für Halbleitermaterialien AG
    Inventors: Anton Huber, Joachim Junge, Jörg Moser