Rotary Work Holder Patents (Class 451/307)
  • Patent number: 9707659
    Abstract: In a polishing method of the present invention, the temperature of a carrier plate is measured, and the amount of polishing removal of a workpiece (workpiece) is accurately controlled based on change in the measured temperature of the carrier plate.
    Type: Grant
    Filed: October 19, 2011
    Date of Patent: July 18, 2017
    Assignee: SUMCO Corporation
    Inventors: Shinichi Ogata, Ryuichi Tanimoto, Keiichi Takanashi
  • Patent number: 9562914
    Abstract: In accord with one aspect, a microfluidic coagulation assessment device defining a plurality of microchannels is provided, wherein a blood sample is driven through the microchannels at a substantially constant flow rate and a controller is configured to, in combination with a timer and a pressure sensing device, determine a first pressure value (or flow value) at an initiation of flow, a first time (Tpg) at which a second pressure value is about twice the determined first pressure value, and a second time (Tpf) at which a third pressure value is about (1+e) times the determined first pressure value and establish a subject coagulation model predictive of channel occlusion therefrom. In another aspect, the blood sample is driven through the microchannels at a substantially constant pressure and a controller is configured to, in combination with a timer and a flow sensing device make the determination based on flow rate.
    Type: Grant
    Filed: October 16, 2014
    Date of Patent: February 7, 2017
    Assignee: President and Fellows of Harvard College
    Inventors: Abhishek Jain, Anna Waterhouse, Mike Super, Donald E. Ingber, Daniel C. Leslie
  • Patent number: 9242334
    Abstract: The invention discloses a transform mechanism of a finishing wheel for an abrasive belt polishing finisher in the field of mechanical technology. The invention is disposed on the inner side of the abrasive belt of the finisher, comprising several slide rails disposed on the side of the frame of the finisher and sliders on the slide rails. A finishing wheel is fixedly connected with each of the sliders. The curved surface of the rim of each of the said finishing wheels has a different curvature. A driving element connected with the slider is provided on the frame of the finisher close to each of the sliders. The finishing wheel corresponding to the driving element, driven by the said driving element, is pressed against the inner side of the abrasive belt. The transform mechanism of the invention could be widely applied and has a high polishing and finishing efficiency.
    Type: Grant
    Filed: August 3, 2014
    Date of Patent: January 26, 2016
    Assignee: Taizhou Federal Robot Technology Co., Ltd
    Inventor: Qiyue Chen
  • Publication number: 20150087210
    Abstract: A polishing apparatus including a chuck for supporting a wafer while exposing a peripheral portion of the wafer, a polishing head for polishing the peripheral portion of the wafer, and a polishing solution supplying assembly provided above the chuck and configured to spray a polishing solution on the wafer and to form a liquid curtain on the chuck to protect the wafer when the wafer is polished may be provided.
    Type: Application
    Filed: August 19, 2014
    Publication date: March 26, 2015
    Inventors: Sung-choul LEE, Choul-gue PARK, Ki-hong JUNG, Soo-young KIM
  • Patent number: 8821218
    Abstract: A method for manufacturing a magnetic disk is provided that includes the steps: forming a layer of a lubricant material on a surface of a magnetic storage medium, the layer of lubricant material also being located on an interior and/or exterior edge of the medium; and removing at least some of the lubricant material from the edge 160 of the medium.
    Type: Grant
    Filed: March 23, 2010
    Date of Patent: September 2, 2014
    Assignee: Seagate Technology LLC
    Inventors: Thuan Luu, Walter Crofton, Bill Liu, David Spaulding, Kwang Kon Kim
  • Patent number: 8814635
    Abstract: A substrate polishing method includes starting to rotate a circular substrate and polishing an inner peripheral edge surface of a center circular hole formed in the circular substrate into a chamfered or rounded surface by pressing the inner peripheral edge surface against a bypass polishing part of a polishing tape that is conveyed intermittently or continuously and by oscillating the bypass polishing part of the polishing tape about a direction perpendicular to a direction that the center circular hole penetrates through the circular substrate. The polishing tape is guided so as to have an advancing portion advancing toward the circular substrate, a returning portion returning from the circular substrate, and a turning-back portion between the advancing portion and the returning portion guided along a side bypass. The bypass polishing part of the polishing tape is the turning-back portion of the polishing tape.
    Type: Grant
    Filed: January 27, 2011
    Date of Patent: August 26, 2014
    Assignees: Sanshin Co., Ltd., Nihon Micro Coating Co., Ltd.
    Inventors: Nobukazu Hosokai, Isamu Oguro, Jun Watanabe, Tetsujiro Tada
  • Patent number: 8535117
    Abstract: A method capable of quickly polishing an angular portion formed by a grinded back surface and a circumferential surface of a substrate without causing damages on the thin substrate is provided. The method includes rotating the substrate about its center, and pressing a polishing tape against the angular portion formed by the back surface and the circumferential surface of the substrate to polish the angular portion.
    Type: Grant
    Filed: November 30, 2010
    Date of Patent: September 17, 2013
    Assignee: Ebara Corporation
    Inventors: Masayuki Nakanishi, Masunobu Onozawa, Masaya Seki
  • Publication number: 20120135668
    Abstract: A method of polishing a peripheral portion of a substrate is provided. This method includes: causing sliding contact between the peripheral portion of the substrate and a polishing tape; and supplying a polishing liquid onto the polishing tape contacting the peripheral portion of the substrate. The polishing tape includes a base tape and a fixed abrasive formed on the base tape, and the polishing liquid is an alkaline polishing liquid containing an alkaline chemical and an additive including molecules that cause steric hindrance.
    Type: Application
    Filed: November 23, 2011
    Publication date: May 31, 2012
    Inventors: Masayuki Nakanishi, Masaya Seki, Kenji Kodera
  • Patent number: 8187055
    Abstract: A polishing apparatus polishes a periphery of a substrate. This polishing apparatus includes a rotary holding mechanism configured to hold the substrate horizontally and rotate the substrate, plural polishing head assemblies provided around the substrate, plural tape supplying and recovering mechanisms configured to supply polishing tapes to the plural polishing head assemblies and recover the polishing tapes from the plural polishing head assemblies, and plural moving mechanisms configured to move the plural polishing head assemblies in radial directions of the substrate held by the rotary holding mechanism. The tape supplying and recovering mechanisms are located outwardly of the plural polishing head assemblies in the radial directions of the substrate, and the tape supplying and recovering mechanisms are fixed in position.
    Type: Grant
    Filed: November 24, 2008
    Date of Patent: May 29, 2012
    Assignee: Ebara Corporation
    Inventors: Tamami Takahashi, Masaya Seki, Hiroaki Kusa, Kenji Yamaguchi, Masayuki Nakanishi
  • Publication number: 20120045968
    Abstract: A substrate polishing method includes starting to rotate a circular substrate and polishing an inner peripheral edge surface of a center circular hole formed in the circular substrate into a chamfered or rounded surface by pressing the inner peripheral edge surface against a bypass polishing part of a polishing tape that is conveyed intermittently or continuously and by oscillating the bypass polishing part of the polishing tape about a direction perpendicular to a direction that the center circular hole penetrates through the circular substrate. The polishing tape is guided so as to have an advancing portion advancing toward the circular substrate, a returning portion returning from the circular substrate, and a turning-back portion between the advancing portion and the returning portion guided along a side bypass. The bypass polishing part of the polishing tape is the turning-back portion of the polishing tape.
    Type: Application
    Filed: January 27, 2011
    Publication date: February 23, 2012
    Applicants: NIHON MICRO COATING CO., LTD., SANSHIN CO., LTD.
    Inventors: Nobukazu HOSOKAI, Isamu OGURO, Jun WATANABE, Tetsujiro TADA
  • Patent number: 8087975
    Abstract: The present invention relates to a composite sheet for mounting a workpiece and a method for making the same. The composite sheet includes a buffer layer and an adsorption layer. The buffer layer has a plurality of continuous pores. The adsorption layer is located on the buffer layer for adsorbing a workpiece, and the compression ratio of the buffer layer is higher than that of the adsorption layer. Thereby, due to low hardness, good adsorption effect, and high compression ratio, the composite sheet of the present invention has good buffer effect.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: January 3, 2012
    Assignee: San Fang Chemical Industry Co., Ltd.
    Inventors: Chung-Chih Feng, I-Peng Yao, Lyang-Gung Wang, Zong-Yao Ku
  • Patent number: 8038508
    Abstract: A wafer polishing apparatus includes a polishing tape extending between two guide rollers, a first surface of the polishing tape contacting a surface of a wafer to be polished, a polishing head including a pusher pad, the pusher pad adapted to push the polishing tape against the surface of the wafer to be polished, a color image sensor adjacent to the polishing tape, the color image sensor being adapted to detect a color image of the polishing tape and to output a signal corresponding to the detected color image, and a controller connected to the color image sensor, the controller being adapted to receive the signal output from the color image sensor and to determine when a color of the color image detected by the color image sensor changes, a change in the color image indicating a polishing end point.
    Type: Grant
    Filed: October 15, 2008
    Date of Patent: October 18, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Heun Lim, Sung-Ho Shin, Bo-Un Yoon, Chang-Ki Hong
  • Patent number: 7976361
    Abstract: A polishing apparatus is suitable for use in polishing a periphery of a substrate, such as a semiconductor wafer. The polishing apparatus includes a holding section configured to hold a workpiece and a polishing head configured to bring a polishing tape into contact with the workpiece. The polishing apparatus also includes a supply reel configured to supply the polishing tape to the polishing head, a rewind reel configured to rewind the polishing tape that has contacted the workpiece, and a swinging mechanism configured to cause the polishing head to perform a swinging motion with its pivot at a predetermined point.
    Type: Grant
    Filed: June 16, 2008
    Date of Patent: July 12, 2011
    Assignee: Ebara Corporation
    Inventors: Tamami Takahashi, Masaya Seki, Hiroaki Kusa, Kenya Ito
  • Patent number: 7901270
    Abstract: A method of polishing objects using an apparatus comprised of a rotary positioning device comprising a turret; a base mounted on the turret; a drive wheel connected to a rotatable shaft, the drive wheel having a perimeter, and the rotatable shaft disposed in a housing. The polishing wheel assembly may include an elongated arm including a proximal end joined to the base, and a distal end; a rotatable polishing wheel supported at the end of the elongated arm; and a polishing belt comprising an inner surface and an outer surface, the inner surface engageable with the perimeters of the drive wheel and the polishing wheel. The method is comprised of contacting the outer surface of the polishing belt to a contact region of the surface of the object; and controlling the contact region by rotating the elongated arm around the turret axis.
    Type: Grant
    Filed: January 7, 2010
    Date of Patent: March 8, 2011
    Assignee: Optipro Systems, LLC
    Inventors: Michael J. Bechtold, Darryle E. Fowler, David E. Mohring, Thomas Williams, Robert Henderson, Alex DiNicola, Christopher Wood, Joseph P. Meisenzahl, Scott Bambrick
  • Patent number: 7862402
    Abstract: The present invention relates to a polishing apparatus for removing surface roughness produced at a peripheral portion of a substrate, or for removing a film formed on a peripheral portion of a substrate. The polishing apparatus includes a housing for forming a polishing chamber therein, a rotational table for holding and rotating a substrate, a polishing tape supply mechanism for supplying a polishing tape into the polishing chamber and taking up the polishing tape which has been supplied to the polishing chamber, a polishing head for pressing the polishing tape against a bevel portion of the substrate, a liquid supply for supplying a liquid to a front surface and a rear surface of the substrate, and a regulation mechanism for making an internal pressure of the polishing chamber being set to be lower than an external pressure of the polishing chamber.
    Type: Grant
    Filed: February 3, 2010
    Date of Patent: January 4, 2011
    Assignee: Ebara Corporation
    Inventors: Akihisa Hongo, Kenya Ito, Kenji Yamaguchi, Masayuki Nakanishi
  • Publication number: 20100297921
    Abstract: The invention relates to an orbital apparatus (20) for machining of a revolution metallic wall, of the type comprising a fixed annular plate (30) coaxially mounted on a universal support and having a peripheral annular electric collector (35) and an annular plate (50) rotationally mobile and coaxially mounted on the fixed annular plate (30). The mobile annular plate (50) carries a set of electrical contacts (55) cooperating with the electrical collector (35), means (60) for rotationally driving the plate (50), means (70) for machining the metallic wall and pneumatic feeder means (80) to apply and maintain the machining means (70) on the metallic wall.
    Type: Application
    Filed: November 8, 2007
    Publication date: November 25, 2010
    Applicants: AREVA NP, BURCH MASCHINENBAU AG
    Inventors: Jean-Paul Guigon, Didier Bovin, Rolf Schuster
  • Patent number: 7815492
    Abstract: A surface treatment method that enables a surface of an electrostatic chuck to be smoothed, so as to improve the efficiency of heat transfer between the surface of the electrostatic chuck and a substrate. The electrostatic chuck is provided in an upper portion of a susceptor provided in a chamber of a substrate processing apparatus. In the surface treatment of the electrostatic chuck, a sprayed coating film is formed on the surface of the electrostatic chuck, next the surface of the electrostatic chuck is ground by bringing into contact therewith a grindstone, then the surface of the electrostatic chuck is ground flat by bringing into contact therewith a lapping plate onto a surface of which is sprayed a suspension, and then the surface of the electrostatic chuck is ground smooth by bringing into contact therewith a tape of a tape lapping apparatus.
    Type: Grant
    Filed: March 19, 2007
    Date of Patent: October 19, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Yasuharu Sasaki, Masakazu Higuma, Tadashi Aoto, Eiichiro Kikuchi
  • Publication number: 20100178851
    Abstract: A polishing apparatus for polishing a periphery of a substrate includes a substrate holder configured to rotate the substrate, a first polishing section configured to polish the periphery of the substrate by bringing a polishing layer of a first polishing tool into contact with the periphery of the substrate when rotated by the substrate holder, and a second polishing section configured to polish the periphery of the substrate by bringing a polishing layer of a second polishing tool into contact with the periphery of the substrate when rotated by the substrate holder. The polishing layer of the first polishing tool has hard first abrasive grains, and the polishing layer of the second polishing tool has second abrasive grains that are softer than the first abrasive grains.
    Type: Application
    Filed: January 12, 2010
    Publication date: July 15, 2010
    Inventors: Masayuki NAKANISHI, Kenya Ito, Tamami Takahashi, Kumiko Miyamoto, Kenji Kodera
  • Publication number: 20100136886
    Abstract: The present invention relates to a polishing apparatus for removing surface roughness produced at a peripheral portion of a substrate, or for removing a film formed on a peripheral portion of a substrate. The polishing apparatus includes a housing for forming a polishing chamber therein, a rotational table for holding and rotating a substrate, a polishing tape supply mechanism for supplying a polishing tape into the polishing chamber and taking up the polishing tape which has been supplied to the polishing chamber, a polishing head for pressing the polishing tape against a bevel portion of the substrate, a liquid supply for supplying a liquid to a front surface and a rear surface of the substrate, and a regulation mechanism for making an internal pressure of the polishing chamber being set to be lower than an external pressure of the polishing chamber.
    Type: Application
    Filed: February 3, 2010
    Publication date: June 3, 2010
    Inventors: Akihisa Hongo, Kenya Ito, Kenji Yamaguchi, Masayuki Nakanishi
  • Publication number: 20100112902
    Abstract: A method of polishing objects using an apparatus comprised of a rotary positioning device comprising a turret; a base mounted on the turret; a drive wheel connected to a rotatable shaft, the drive wheel having a perimeter, and the rotatable shaft disposed in a housing. The polishing wheel assembly may include an elongated arm including a proximal end joined to the base, and a distal end; a rotatable polishing wheel supported at the end of the elongated arm; and a polishing belt comprising an inner surface and an outer surface, the inner surface engageable with the perimeters of the drive wheel and the polishing wheel. The method is comprised of contacting the outer surface of the polishing belt to a contact region of the surface of the object; and controlling the contact region by rotating the elongated arm around the turret axis.
    Type: Application
    Filed: January 7, 2010
    Publication date: May 6, 2010
    Applicant: V.I. MFG., INC. DBA OPTIPRO SYSTEMS
    Inventors: Michael J. Bechtold, Joseph Meisenzahl, David E. Mohring, Darryle E. Fowler, Robert Henderson, Thomas Williams, Alex DiNicola, Christopher Wood, Scott Bambrick
  • Publication number: 20100105294
    Abstract: Methods and apparatus are provided for reducing tension on a polishing roller. In some aspects, a polishing head may be provided that is adapted to contact a substrate. The polishing head includes: a polishing unit having a polisher and at least one pair of tension distributors adapted to reduce tension on the polisher; and one or more pairs feed guides. Numerous other aspects are provided.
    Type: Application
    Filed: October 22, 2009
    Publication date: April 29, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Gary C. Ettinger, Wendy Luo, Antoine P. Manens
  • Publication number: 20100105291
    Abstract: Apparatus and methods are provided to polish a notch of a substrate. The invention includes a polishing head adapted to apply a polishing tape against the notch of the substrate, including: a plunger; and an actuator, wherein the actuator is adapted to move the plunger with respect to the polishing tape. Numerous other aspects are provided.
    Type: Application
    Filed: October 24, 2008
    Publication date: April 29, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Gary C. Ettinger, Paul D. Butterfield, Antoine P. Manens, Sen-Hou Ko
  • Patent number: 7682225
    Abstract: The present invention relates to a polishing apparatus for removing surface roughness produced at a peripheral portion of a substrate, or for removing a film formed on a peripheral portion of a substrate. The polishing apparatus includes a housing for forming a polishing chamber therein, a rotational table for holding and rotating a substrate, a polishing tape supply mechanism for supplying a polishing tape into the polishing chamber and taking up the polishing tape which has been supplied to the polishing chamber, a polishing head for pressing the polishing tape against a bevel portion of the substrate, a liquid supply for supplying a liquid to a front surface and a rear surface of the substrate, and a regulation mechanism for making an internal pressure of the polishing chamber being set to be lower than an external pressure of the polishing chamber.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: March 23, 2010
    Assignee: Ebara Corporation
    Inventors: Akihisa Hongo, Kenya Ito, Kenji Yamaguchi, Masayuki Nakanishi
  • Patent number: 7662024
    Abstract: A polishing apparatus comprising a base for affixing structures thereto, a drive wheel, a polishing wheel assembly, a polishing belt, and at least one routing wheel engaged with the polishing belt. The polishing wheel assembly includes an elongated arm including a distal end, and a rotatable polishing wheel supported at the distal end of the elongated arm. The polishing belt is made with an abrasive outer surface to perform the polishing, and an inner surface for engagement with the perimeters of the drive wheel and the polishing wheel. The routing wheel is engaged with the outer surface of the polishing belt, such that the contact arc of the polishing belt with the polishing wheel differs from an arc of the polishing wheel perimeter extending from a first tangent line between the drive wheel and the polishing wheel to a second tangent line between the drive wheel and the polishing wheel.
    Type: Grant
    Filed: May 2, 2007
    Date of Patent: February 16, 2010
    Assignee: V.I. Mfg. Inc.
    Inventors: Michael J. Bechtold, Darryle E. Fowler, David E. Mohring, Thomas Williams, Robert Henderson, Alex DiNicola, Christopher Wood, Joseph P. Meisenzahl, Scott Bambrick
  • Publication number: 20100022166
    Abstract: A substrate processing apparatus having a polishing unit for polishing a periphery of a substrate. The substrate processing apparatus includes: a polishing unit configured to polish a periphery of a substrate; an imaging module configured to take an image of the periphery of the substrate polished by the polishing unit; and an image processing section configured to inspect a polished state of the substrate based on the image taken by the imaging module. The imaging module is configured to take the image of the periphery of the substrate when the polishing unit is not polishing the periphery of the substrate.
    Type: Application
    Filed: July 23, 2009
    Publication date: January 28, 2010
    Inventors: Toshifumi Kimba, Hiroaki Kusa
  • Patent number: 7621799
    Abstract: Disclosed herein is a polishing method for polishing the end surface of a wafer by using a polishing tape, wherein the end surface of the wafer is polished in the condition where a polishing liquid containing an oxidizing agent is supplied to the end surface of the wafer.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: November 24, 2009
    Assignee: Sony Corporation
    Inventor: Takashi Sakairi
  • Publication number: 20090275269
    Abstract: Disclosed herein is a wafer polishing device including: an abrasive member driving device adapted to run a belt-like abrasive member in a direction crossing an outer circumferential end-edge of a wafer which is a wafer to be polished while bringing a belt-like abrasive member into contact with outer circumferential end-edge of the wafer, the abrasive member having non-abrasive sections disposed on both sides of an abrasive grain section; and a guide member having two guide surfaces shaped to conform to the outer circumferential end-edge of the wafer, the two guide surface being adapted to press, from rear sides of the non-abrasive sections, the respective non-abrasive sections of the abrasive member run by the abrasive member driving device.
    Type: Application
    Filed: April 28, 2009
    Publication date: November 5, 2009
    Applicant: SONY CORPORATION
    Inventor: Takashi Sakairi
  • Publication number: 20090227189
    Abstract: A polishing apparatus polishes a periphery of a substrate by bringing a polishing tool into sliding contact with the substrate. The polishing apparatus includes a substrate-holding mechanism configured to hold a substrate and rotate the substrate, a polishing mechanism configured to press a polishing tool against a periphery of the substrate so as to polish the periphery, and a periphery-supporting mechanism configured to support the periphery of the substrate by a fluid. The periphery-supporting mechanism is configured to support a surface of the substrate from an opposite side or the same side of the periphery of the substrate.
    Type: Application
    Filed: March 5, 2009
    Publication date: September 10, 2009
    Inventors: Kazuaki Maeda, Tamami Takahashi, Masaya Seki, Hiroaki Kusa
  • Publication number: 20090124174
    Abstract: A substrate treating method includes rotating a substrate in a circumferential direction and polishing a peripheral portion of the substrate by pressing a polishing member to it using a pressing mechanism having a pressing pad. An angle of at least a part of the pressing pad with respect to an axial direction, in which the pressing mechanism makes the pressing pad press the peripheral portion of the substrate, is changed by an angle displacement mechanism which actively displaces the angle so that the polishing is performed depending on a surface to be polished in the peripheral portion.
    Type: Application
    Filed: November 6, 2008
    Publication date: May 14, 2009
    Inventors: Dai FUKUSHIMA, Atsushi Shigeta
  • Publication number: 20090117828
    Abstract: The present invention relates to a polishing apparatus for removing surface roughness produced at a peripheral portion of a substrate, or for removing a film formed on a peripheral portion of a substrate. The polishing apparatus includes a housing (3) for forming a polishing chamber (2) therein, a rotational table (1) for holding and rotating a substrate (W), a polishing tape supply mechanism (6) for supplying a polishing tape (5) into the polishing chamber (2) and supplied to the polishing chamber (2), a polishing head (35) for pressing the polishing tape (5) against a bevel portion of the substrate (W), a liquid supply (50) for supplying a liquid to a front surface and a rear surface of the substrate (W), and a regulation mechanism (16) for making an internal pressure of the polishing chamber (2) being set to be lower than an external pressure of the polishing chamber (2).
    Type: Application
    Filed: February 23, 2005
    Publication date: May 7, 2009
    Inventors: Akihisa Hongo, Kenya Ito, Kenji Yamaguchi, Masayuki Nakanishi
  • Publication number: 20090017733
    Abstract: A substrate processing apparatus (1) has a first polishing unit (400A) and a second polishing unit (400B) for polishing a peripheral portion of a substrate. Each of the two polishing units (400A, 400B) includes a bevel polishing device (450A, 450B) for polishing a peripheral portion of a substrate and a notch polishing device (480A, 480B) for polishing a notch of a substrate. The substrate processing apparatus (1) has a maintenance space (7) formed between the two polishing units (400A, 400B). The bevel polishing devices (450A, 450B) in the two polishing units (400A, 400B) face the maintenance space (7) so as to be accessible from the maintenance space (7).
    Type: Application
    Filed: April 18, 2006
    Publication date: January 15, 2009
    Applicant: EBARA CORPORATION
    Inventors: Tamami Takahashi, Mitsuhiko Shirakashi, Kenya Ito, Kazuyuki Inoue, Kenji Yamaguchi, Masaya Seki
  • Publication number: 20090004952
    Abstract: A polishing apparatus according to the present invention is suitable for use in polishing a periphery of a substrate such as a semiconductor wafer. The polishing apparatus includes a holding section configured to hold the workpiece, a polishing head configured to bring the polishing tape into contact with the workpiece, a supply reel configured to supply the polishing tape to the polishing head, a rewind reel configured to rewind the polishing tape that has contacted the workpiece, and a swinging mechanism configured to cause the polishing head to perform a swinging motion with its pivot lying on a predetermined point.
    Type: Application
    Filed: June 16, 2008
    Publication date: January 1, 2009
    Inventors: Tamami Takahashi, Masaya Seki, Hiroaki Kusa, Kenya Ito
  • Patent number: 7438632
    Abstract: A method and apparatus for cleaning a web-based chemical-mechanical planarization (CMP) system. Specifically, a fluid spray bar is coupled to a frame assembly which may be mounted on a CMP system. The fluid spray bar will move along the frame assembly. As the fluid spray bar traverses the length of the frame assembly, a cleaning fluid is sprayed onto the web in order to clean the web between planarization cycles.
    Type: Grant
    Filed: January 18, 2006
    Date of Patent: October 21, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Moore, Dinesh Chopra
  • Patent number: 7431634
    Abstract: In a platen assembly for a polishing apparatus, a platen supports a polishing belt that makes contact with an object during a polishing process, so that the platen provides a pressure on the polishing belt during the polishing process. A plurality of first bladders extends in a first direction on an entire surface of the platen and is spaced apart by a uniform distance, and the first bladders apply pressure to the polishing belt. A plurality of second bladders extends in the first direction on a middle portion of the surface of the platen between a central portion and a peripheral portion of the platen and is positioned between the first bladders, and the second bladders apply pressure to the polishing belt. The pressures of the bladders are individually controlled by pressure controllers. Various pressures are individually applied different portions of the polishing belt by the bladders.
    Type: Grant
    Filed: February 6, 2007
    Date of Patent: October 7, 2008
    Assignee: Samsung Electronics, Co., Ltd.
    Inventor: Young-Chul Lee
  • Publication number: 20080188167
    Abstract: A substrate processing apparatus has a polishing tape and a polishing head for pressing the polishing tape against a peripheral portion of a semiconductor wafer. The substrate processing apparatus polishes the wafer due to sliding contact of the polishing tape and the wafer. The polishing head has an elastic body for supporting the polishing tape. The substrate processing apparatus has an air cylinder for pressing the polishing head so that the elastic body of the polishing head presses the polishing tape against the predetermined portion of the wafer under a constant force.
    Type: Application
    Filed: April 1, 2008
    Publication date: August 7, 2008
    Inventors: You Ishii, Masayuki Nakanishi, Kenro Nakamura
  • Patent number: 7371158
    Abstract: To provide a plating removing apparatus for 2-piece wheels, which can easily and beautifully remove plating at the welding planned portion on the rim inner circumferential surface and achieves 2-piece wheels with rims plated without requiring any troublesome operation, said apparatus comprising a pair of support rollers 13 horizontally arranged, a positioning member 15 that positions the rim 2 in the axial direction of the support roller 13, a pair of holding rollers 19 that hold the rim 2 between the support rollers 13 and the holding rollers 19, a rotation drive means that rotates and drives the rim 2 held between the support rollers 13 and holding rollers 19, and a grinding means that extends to an inside of the rim 2 for grinding the welding planned portion RW of the rim 2 with respect to the disk, and for removing plating of the relevant welding planned portion.
    Type: Grant
    Filed: August 7, 2006
    Date of Patent: May 13, 2008
    Assignee: Work Co., Ltd.
    Inventor: Takeshi Tanaka
  • Patent number: 7303467
    Abstract: A chemical mechanical polishing apparatus has a movable platen, a drive mechanism and a chucking mechanism. The drive mechanism is attached to the platen, is configured to support a generally linear polishing sheet with a portion of the polishing sheet extending over the platen, and is configured to incrementally advance the polishing sheet in a linear direction relative to the platen. The chucking mechanism is configured to intermittently secure the portion of the polishing sheet to the platen.
    Type: Grant
    Filed: September 12, 2006
    Date of Patent: December 4, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Manoocher Birang, Lawrence M. Rosenberg, Sasson Somekh, John M. White
  • Publication number: 20070259608
    Abstract: A polishing apparatus comprising a base for affixing structures thereto, a drive wheel, a polishing wheel assembly, a polishing belt, and at least one routing wheel engaged with the polishing belt. The polishing wheel assembly includes an elongated arm including a distal end, and a rotatable polishing wheel supported at the distal end of the elongated arm. The polishing belt is made with an abrasive outer surface to perform the polishing, and an inner surface for engagement with the perimeters of the drive wheel and the polishing wheel. The routing wheel is engaged with the outer surface of the polishing belt, such that the contact arc of the polishing belt with the polishing wheel differs from an arc of the polishing wheel perimeter extending from a first tangent line between the drive wheel and the polishing wheel to a second tangent line between the drive wheel and the polishing wheel.
    Type: Application
    Filed: May 2, 2007
    Publication date: November 8, 2007
    Inventors: Michael J. Bechtold, Joseph Meisenzahl, David E. Mohring, Darryle E. Fowler, Robert Henderson, Thomas Williams, Alex DiNicola, Christopher Wood, Scott Bambrick
  • Patent number: 7278905
    Abstract: A chemical-mechanical polishing apparatus is provided with a downstream device for conditioning a web-shaped polishing pad. The device may be used to condition a glazed portion of the pad, and then the conditioned pad portion may be used again for polishing. The conditioning device is preferably arranged to apply different conditioning treatments to different portions of the glazed pad. The conditioning device may have roller segments that rotate at different speeds. Alternatively, the device may have non-cylindrical rollers that provide different rotational speeds at the pad surface, or the device may apply different pressures at different portions of the pad. The device may be arranged to provide uniform conditioning across the width of the pad. The invention is applicable to methods of planarizing semiconductor wafers. The invention may be used to condition circular pads in addition to web-shaped pads.
    Type: Grant
    Filed: April 25, 2006
    Date of Patent: October 9, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Dinesh Chopra, Scott E. Moore
  • Patent number: 7241204
    Abstract: A polishing pad has a resin sheet having a flat surface and abrading particles fixed inside and on the surface of this resin sheet. Its tensile strength is in the range of 30 MPa or greater and 70 MPa or less and preferably in the range of 40 MPa or greater and 60 MPa or less. Its tensile tear elongation is in the range of 50% or less, preferably 20% or less and more preferably 5% or less. The average diameter of the primary particles of the abrading particles is in the range of 0.005 ?m or greater and less than 0.5 ?m, and preferably in the range of 0.005 ?m or greater and 0.2 ?m or less. The content of the abrading particles fixed to the resin sheet is 10 volume % or greater and 50 volume % or less, or preferably 10 volume % or greater and 24 volume or less.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: July 10, 2007
    Assignee: Nihon Micro Coating Co., Ltd.
    Inventors: Jun Watanabe, Takuya Nagamine, Jun Tamura, Takashi Arahata
  • Patent number: 7179154
    Abstract: An apparatus for cleaning a semiconductor wafer edge is provided. The apparatus includes a film with an abrasive layer configured to contact the edge surface of a semiconductor substrate coated with a contaminant residue layer. A first reel having the film wound thereon and a second reel for receiving the film fed from the first reel are included. In one embodiment, a third reel configured to force the abrasive layer of the film against the edge surface of the semiconductor substrate so as to create an area of contact between the abrasive layer and the edge surface of the semiconductor substrate; and a pin that protrudes from to the top surface of the third reel. A system and method for cleaning a semiconductor wafer edge are also provided.
    Type: Grant
    Filed: October 3, 2005
    Date of Patent: February 20, 2007
    Assignee: Lam Research Corporation
    Inventors: John M. Boyd, Fritz Redeker, Jason Ryder, Aleksander Owczarz
  • Patent number: 7153182
    Abstract: A system and method for in situ measurement and maintenance of preferred pad smoothness in a CMP process is disclosed. The system includes a linear polisher having one or more sensors for detecting fluid pressure, fluid flow or motor current at the linear polisher during a polishing process. A controller receiving the information provided by the sensors includes an algorithm for adjusting the pad conditioning process to achieve a desired pad smoothness based on the sensor data. The method includes obtaining baseline data on preferred linear polisher characteristics associated with desired pad smoothness and using the baseline data to adjust a pad conditioning regimen on a linear polisher to achieve the desired pad smoothness in situ.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: December 26, 2006
    Assignee: Lam Research Corporation
    Inventors: Travis R. Taylor, Jingang Yi, Peter Richard Norton
  • Patent number: 7144304
    Abstract: A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated, non-continuous polishing pad oriented at an angle relative to the horizontal to allow planarizing liquids and materials removed from the microelectronic substrate to flow off the polishing pad under the force of gravity. Two such polishing pads can be positioned opposite each other in a vertical orientation and can share either a common platen or a common substrate carrier. The polishing pads can be pre-attached to both a supply roll and a take-up roll to form a cartridge which can be easily removed from the apparatus and replaced with another cartridge.
    Type: Grant
    Filed: April 5, 2002
    Date of Patent: December 5, 2006
    Assignee: Micron Technology, Inc.
    Inventor: Scott E. Moore
  • Patent number: 7115023
    Abstract: A wafer bevel processing apparatus comprises a plurality of rollers for rotatably supporting a wafer, first process roller, a second process roller, and a process tape extending between the first process roller and the second process roller. The first and second process rollers are positioned to cause the process tape to contact an edge of the wafer when the wafer is loaded into the processing apparatus. The process tape is configured to frictionally prepare the edge where contact occurs with the process tape.
    Type: Grant
    Filed: June 29, 2005
    Date of Patent: October 3, 2006
    Assignee: Lam Research Corporation
    Inventor: Aleksander Owczarz
  • Patent number: 7115021
    Abstract: To polish polishing target surfaces of SiO2 insulating films or the like at a high rate without scratching the surface, the present invention provides an abrasive comprising a slurry comprising a medium and dispersed therein at least one of i) cerium oxide particles constituted of at least two crystallites and having crystal grain boundaries or having a bulk density of not higher than 6.5 g/cm3 and ii) abrasive grains having pores. Also provided are a method of polishing a target member and a process for producing a semiconductor device which make use of this abrasive.
    Type: Grant
    Filed: January 11, 2002
    Date of Patent: October 3, 2006
    Assignee: Hitachi Chemical Company, Ltd.
    Inventors: Masato Yoshida, Toranosuke Ashizawa, Hiroki Terazaki, Yuuto Ootuki, Yasushi Kurata, Jun Matsuzawa, Kiyohito Tanno
  • Patent number: 7104875
    Abstract: A chemical mechanical polishing apparatus has a rotatable platen, a polishing sheet that is wider than the substrate extending between two reels, a drive mechanism to advance the polishing sheet, and a chucking mechanism to intermittently secure the polishing sheet to the platen. The platen can have a platen base that is adaptable to receive either a circular platen top or a rectangular platen top.
    Type: Grant
    Filed: May 3, 2004
    Date of Patent: September 12, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Manoocher Birang, Sandra L. Rosenberg, legal representative, Sasson Somekh, John M White, Lawrence M. Rosenberg, deceased
  • Patent number: 7090560
    Abstract: Systems and methods control abrading operations of an abrading machine by sensing characteristics of an abrading article installed on the abrading machine. When a problem is discovered by sensing the article, appropriate actions may be taken. As one example, the abrading article may be sensed to determine whether the abrading article has been installed with an abrasive side facing the wrong direction. An alert allows an operator to reinstall the article. As another example, the abrading article may be sensed to determine whether splicing tape is present to hold two pieces of abrading tape together. The article may be advanced until the splicing tape is beyond an abrading zone. As another example, the abrading article may be sensed to determine whether the abrading article has stopped moving while the article drive is advancing because the article has broken. An alert allows an operator to repair the break.
    Type: Grant
    Filed: July 28, 2004
    Date of Patent: August 15, 2006
    Assignee: 3M Innovative Properties Company
    Inventor: Daniel A. Billig
  • Patent number: 7063607
    Abstract: A bowling ball resurfacing apparatus comprises a housing, first and second vertical support rollers mounted to the housing for rotation about parallel vertical axes, each of the vertical support rollers adapted to make contact with the surface of the bowling ball at one lateral bottom side of the bowling ball, first and second horizontal support rollers mounted to the housing for supporting the bowling ball in cooperation with the vertical support rollers, each of the horizontal support rollers rotatable about horizontal axes and adapted to make contact with the surface of the bowling ball at the other lateral bottom side of the bowling ball, drive motors for causing the support rollers to rotate, and a grinding-and-polishing wheel assembly for making frictional contact with the surface of the bowling ball to grind or polish the bowling ball.
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: June 20, 2006
    Inventor: Sang-Bae Sim
  • Patent number: 7044837
    Abstract: A method for cleaning a magnetic head using a cleaning tape comprising a substrate and a cleaning layer, wherein the cleaning tape has a stiffness of 2 or less in a width direction, and the magnetic head has trenches substantially parallel to a sliding direction of the cleaning tape.
    Type: Grant
    Filed: October 28, 2003
    Date of Patent: May 16, 2006
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Naoto Murao, Hiroyuki Tahara
  • Patent number: 7029369
    Abstract: An apparatus is provided for polishing a substrate. The apparatus includes a polishing pad configured to traverse from at least a first point to a second point. A first sensor is located near the first point and oriented so as to sense an incoming temperature of the polishing pad. A second sensor is located near the second point and oriented so as to sense an outgoing temperature of the polishing pad. A difference between the incoming temperature and the outgoing temperature is then used to determine endpoint of a polishing operation.
    Type: Grant
    Filed: December 30, 2003
    Date of Patent: April 18, 2006
    Assignee: Lam Research Corporation
    Inventors: Katrina A. Mikhaylich, Mike Ravkin, Yehiel Gotkis