By Radiant Energy Patents (Class 702/134)
  • Patent number: 8097855
    Abstract: Methods and systems for detecting the presence of concealed objects that can be utilized at locations where conventional methods cannot be utilized are disclosed. One embodiment of the method of these teachings for detecting the presence of concealed objects uses thermal radiation of a body as a source of radiation. Other embodiments include portable and handheld systems, devices, methods, and apparatus to determine the presence of a concealed object.
    Type: Grant
    Filed: May 13, 2009
    Date of Patent: January 17, 2012
    Assignee: Iscon Video Imaging, Inc.
    Inventors: Izrail Gorian, Galina Doubinina, Mikhail Shterenberg, Igor Joseph Pogorelsky, Henry Droznin
  • Publication number: 20120010846
    Abstract: High resolution distributed temperature sensors using fiber optic distributed temperature sensing systems deployed on various carriers to significantly improve spatial resolution and provide high resolution temperature profile and detection of fluid or fluid interface levels.
    Type: Application
    Filed: November 16, 2009
    Publication date: January 12, 2012
    Inventors: Park Brian, Fassih-Nia Mohammed, Brian K. McCoy, Kent Kalar, Kari-Mikko Jaaskelainen
  • Patent number: 8055054
    Abstract: A non-destructive evaluation system and method is provided for detecting flaws in an object. The system includes a lamp for impinging the object with optical pulses and a focal plane array camera configured to capture the images corresponding to evolution of heat due to an impact of the optical pulses in the object. The system also includes an image acquisition system for capturing data corresponding to the images from the focal plane array camera. Both transmission mode imaging and reflection mode imaging techniques are used in an exemplary embodiment. A time of flight analysis system is also provided for analyzing the data from both transmission mode imaging technique and reflection mode imaging technique. The data from transmission mode imaging is used to determine thickness values at different points in the data and for determining location of flaws using the thickness values. The data from reflection mode imaging is used for determining depth of these flaws.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: November 8, 2011
    Assignee: General Electric Company
    Inventors: Harry Israel Ringermacher, Donald Robert Howard, Bryon Edward Knight
  • Patent number: 8055053
    Abstract: The present invention relates to a method of automated process control operation wherein a physical object is directed into a read zone, information stored on an ID Container attached to the physical object is retrieved, physimetric property of the physical object is captured, the retrieved information is processed to provide recorded physimetric property specific to the physical object, the recorded physimetric property and captured physimetric property are passed to an analysis algorithm for comparison, and the results of the comparison are delivered to a controlling device. The results of the comparison will determine whether the physical property will continue to pass through the read zone or require to be rotated by the operator.
    Type: Grant
    Filed: December 14, 2006
    Date of Patent: November 8, 2011
    Assignee: The Hong Kong Polytechnic University
    Inventors: Siu Keung Kwok, Chi Fai Cheung, Hing Choi Tsang, Wing Bun Lee, Burly K. Tan, Pui Him Ng
  • Patent number: 8050884
    Abstract: Methods and apparatus are provided to determine the emissivity, temperature and area of an object. The methods and apparatus are designed such that the emissivity and area of the object may be separately determined as functions dependent upon the temperature of the object derived from a three or more band infrared measurement sensor. As such, the methods and apparatus may only require a regression analysis of the temperature of the object without any regression analysis of the emissivity and area of the object.
    Type: Grant
    Filed: December 6, 2007
    Date of Patent: November 1, 2011
    Assignee: The Boeing Company
    Inventor: Ronald N. Murata
  • Patent number: 8017912
    Abstract: A method of classifying an electromagnetic-energy emitting source event as one of a first, second, and third class event includes registering an irradiance spectrum from the source event. The intensity of the energy emitted from the source event is measured within each of first, second and third energy sub-ranges and first, second and third relative-energy values are associated with, respectively, the first, second and third energy sub-ranges. A first class-eliminating determination is rendered by comparing to one another a first selected set of two of the relative-energy values, thereby yielding two remaining-candidate event classes. When necessary, a second class-eliminating determination renders the proper classification for the source event by comparing to one another a second selected set of relative-energy values including the relative-energy value not selected for inclusion in the first selected set of two relative-energy values and one of the previously selected relative-energy values.
    Type: Grant
    Filed: April 30, 2007
    Date of Patent: September 13, 2011
    Assignee: Solid State Scientific Corporation
    Inventor: Richard J. Nelson
  • Patent number: 8000922
    Abstract: Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which includes values for the parameter(s) of the detection algorithm determined for the defects in the portion. The information can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: August 16, 2011
    Assignee: KLA-Tencor Corp.
    Inventors: Hong Chen, Michael J. Van Riet, Chien-Huei (Adam) Chen, Jason Z. Lin, Chris Maher, Michal Kowalski, Barry Becker, Stephanie Chen, Subramanian Balakrishnan, Suryanarayana Tummala
  • Publication number: 20110178758
    Abstract: Exemplary embodiments include a portable articulated arm coordinate measurement machine, including a manually positionable articulated arm having opposed first and second ends, the arm including a plurality of connected arm segments, each of the arm segments including at least one position transducer for producing a position signal, a measurement device attached to a first end of the articulated arm coordinate measurement machine, an electronic circuit for receiving the position signals from the transducers and for providing data corresponding to a position of the measurement device, at least one sensor element, which is disposed on the articulated arm coordinate measurement machine, that is responsive to electromagnetic radiation and produces an electrical signal in response to a temperature of an object and an electronic system that converts the electrical signal into a temperature value.
    Type: Application
    Filed: January 14, 2011
    Publication date: July 21, 2011
    Applicant: FARO TECHNOLOGIES, INC.
    Inventors: Paul C. Atwell, Clark H. Briggs, Orlando Perez
  • Patent number: 7979250
    Abstract: A method is provided for facilitating installation of one or more electronics racks within a data center. The method includes: placing a plurality of thermal simulators in the data center in a data center layout to establish a thermally simulated data center, each thermal simulator simulating at least one of airflow intake or heated airflow exhaust of a respective electronics rack of a plurality of electronics racks to be installed in the data center; monitoring temperature within the thermally simulated data center at multiple locations, and verifying the data center layout if measured temperatures are within respective acceptable temperature ranges for the data center when containing the plurality of electronics racks; and establishing the plurality of electronics racks within the data center using the verified data center layout, the establishing including at least one of reconfiguring or replacing each thermal simulator with a respective electronics rack.
    Type: Grant
    Filed: December 5, 2007
    Date of Patent: July 12, 2011
    Assignee: International Business Machines Corporation
    Inventors: Matthew R. Archibald, Richard C. Chu, Hendrik F. Hamann, Madhusudan K. Iyengar, Roger R. Schmidt
  • Publication number: 20110119019
    Abstract: An apparatus for determining a temperature of an object without contacting the object. An etalon filter may be used to receive spectral radiation of the object over a plurality of wavelengths and to generate a spectral output signal. A linear array detector may be used that is responsive to the spectral output signal from the etalon filter and adapted to generate an output indicative of the spectral radiation at each of one of the plurality of wavelengths. An actuator may be used that controls movement of one element of the etalon filter to assist in generating the output. A processor may be used which is responsive to the output of the linear array detector and which analyzes a known characteristic of a black body at a plurality of test temperatures, against the output of the linear array detector, to determine a specific temperature of the object.
    Type: Application
    Filed: January 24, 2011
    Publication date: May 19, 2011
    Applicant: The Boeing Company
    Inventors: Mark D. Rogers, Loyal B. Shawgo
  • Patent number: 7933730
    Abstract: A method for restoring navigation failure information in a fluoroscopy-based imaging system is disclosed. The method includes obtaining a plurality of receiver navigation information using a calibration target rigidly attached to a supporting member of the imaging system. The calibration target may include a plurality of receivers providing navigation information and the supporting member may be a C-arm. The method identifies a navigation failure and corresponding to the navigation failure a calibrated receiver navigation information is generated. The calibrated receiver navigation information is generated using a calibration information and a C-arm imaging position obtained during navigation failure. A receiver navigation information corresponding to the navigation failure is estimated using the calibrated receiver navigation information, and a transmitter navigation information.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: April 26, 2011
    Assignee: General Electric Co.
    Inventors: Dun Alex Li, Daniel Eduardo Groszmann
  • Patent number: 7899644
    Abstract: A threat launch detection system includes at least one temporal threat detector, each temporal threat detector including a single sensing element operable to sense radiation from various types of short-burn threats that occur within a field of view of the detector. The single sensing element generates a detection signal in response to the sensed radiation. A processing circuit is coupled to each temporal threat detector and is operable to analyze the detection signal from each detector as a function of time to detect the occurrence of a short-burn threat within the field of view of any of the temporal threat detectors. Each temporal threat detector may be a prism-coupled compound parabolic concentrator (PCCP).
    Type: Grant
    Filed: February 7, 2005
    Date of Patent: March 1, 2011
    Assignee: BAE Systems Information and Electronic Systems Integration Inc.
    Inventors: Jonathan L. Weber, John Mandzy, Paul I. Egbert, Kirby A. Smith, Jill A. Shea, John L. Downing, III
  • Patent number: 7891866
    Abstract: A system and method for determining the temperature of an object without physically contacting the object. The method involves reading a spectral radiation of the object over a plurality of wavelengths to obtain a set of radiation data related to a temperature of the object. A known characteristic of a black body is determined at a plurality of predetermined, different test temperatures. The spectral data and the characteristic of the black body at the various test temperatures are used to calculate a temperature of the object.
    Type: Grant
    Filed: February 18, 2008
    Date of Patent: February 22, 2011
    Assignee: The Boeing Company
    Inventors: Mark D. Rogers, Loyal B. Shawgo
  • Patent number: 7881893
    Abstract: A method for processing a two-parameter spectrum including selecting a profile parameter for the spectrum and an initial correction function, for any profile selected according to this parameter, carrying out at least a correction operation by multiplying this selected profile by a correction function, equal to the sum of at least a portion of the already corrected profiles.
    Type: Grant
    Filed: April 21, 2005
    Date of Patent: February 1, 2011
    Assignees: Commissariat a l'Energie Atomique, Compagnie Generale des Matieres Nucleaires
    Inventor: Guillaume Montemont
  • Publication number: 20100292950
    Abstract: With proposed radiation thermometry and radiation thermometry system (10), a thin-film (2) is disposed on a substrate to make a thin-film substrate, and measurement is conducted for polarized radiance components emitted from the thin-film (2) in a direction which is within an angle range ? eic, from a planar normal line of the thin-film (2), where radiance components remain invariable. A temperature of the thin-film (2) is determined on the basis of the measured results of the polarized radiance components. The polarized radiance components are measured using a radiometer (4) by measuring p-wave polarized radiance components which are parallel to an emitting surface including a direction where the polarized radiance components are measured. A pseudo-blackbody (5) is disposed in a mirror symmetrical state to the radiometer (4), and absorbs and negates background radiations to the radiometer (4).
    Type: Application
    Filed: December 11, 2008
    Publication date: November 18, 2010
    Applicant: TOYO UNIVERSITY
    Inventors: Tohru Iuchi, Kensuke Hiraka
  • Publication number: 20100274523
    Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.
    Type: Application
    Filed: July 6, 2010
    Publication date: October 28, 2010
    Applicant: K-SPACE ASSOCIATES, INC.
    Inventors: Charles A. Taylor, II, Darryl Barlett, Douglas Perry, Roy Clarke, Jason Williams
  • Publication number: 20100256945
    Abstract: Methods and apparatus are provided to determine the emissivity, temperature and area of an object. The methods and apparatus are designed such that the emissivity and area of the object may be separately determined as functions dependent upon the temperature of the object derived from a three or more band infrared measurement sensor. As such, the methods and apparatus may only require a regression analysis of the temperature of the object without any regression analysis of the emissivity and area of the object.
    Type: Application
    Filed: December 6, 2007
    Publication date: October 7, 2010
    Applicant: The Boeing Company
    Inventor: Ronald N. Murata
  • Publication number: 20100230580
    Abstract: A scanning imaging device has a spot light projecting section 101 that irradiates a first spot light for excitation and two second spot lights for focus detection onto a flow channel of a substrate 4 and an imaging section 102 for picking up an image of light emitted from a target of detection in the flow channel as it is excited by the first spot light. One of the second spot lights is reflected at the top surface of the flow channel and the other of the second spot lights is reflected at the bottom surface of the flow channel and a focus position adjustment mechanism for adjusting the focus position of each of the first and second spot lights in the depth direction of the flow channel such that the quantity of deviation of the focus positions of the first and second spot lights in the depth direction of the flow channel as determined by comparing the intensities of the one and the other of the second reflected lights reflected at the flow channel.
    Type: Application
    Filed: April 2, 2009
    Publication date: September 16, 2010
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Kazuhiro Matsumoto
  • Patent number: 7788545
    Abstract: A broadcast receiving device includes a card slot, a fan, a temperature sensor, a memory component and a control unit. The card slot accepts an IC card. The fan rotates to cool the IC card. The temperature sensor measures a first temperature. The memory component stores correlation information indicating a correlation between the first temperature and a second temperature of the IC card. The control unit acquires the second temperature based on the first temperature and the correlation information. The control unit determines if the second temperature exceeds a predetermined temperature. The control unit switches from a first output mode, in which an audio-video signal is outputted via the IC card, to a second output mode, in which the audio-video signal is outputted by bypassing the IC card, when the control unit determines that the second temperature exceeds the predetermined temperature.
    Type: Grant
    Filed: March 6, 2008
    Date of Patent: August 31, 2010
    Assignee: Funai Electric Co., Ltd.
    Inventor: Tsutomu Yanagi
  • Patent number: 7761255
    Abstract: The invention is an apparatus and method including hardware and software, which allows collecting and analyzing data to obtain information about mechanical properties of soft materials in a much faster way. The apparatus can be used as a stand-alone device or an add-on to the existing AFM device. The apparatus allows collecting dynamical measurements using a set of multiple frequencies of interest at once, in one measurement instead of sequential, one frequency in a time, measurements.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: July 20, 2010
    Assignee: Clarkson University
    Inventor: Igor Sokolov
  • Patent number: 7730434
    Abstract: The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of locations on an active area of a die of the wafer. The specified performance parameter is known to be indicative of a particular fabrication process in the fabrication. Evaluation information may then be obtained based on a variance of the value of the performance parameter at the plurality of locations. This may be done without affecting a usability of a chip that is created from the die. The evaluation information may be used to evaluate how one or more processes that include the particular fabrication process that was indicated by the performance parameter value was performed.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: June 1, 2010
    Assignee: tau-Metrix, Inc.
    Inventors: Majid Aghababazadeh, Jose J. Estabil, Nader Pakdaman, Gary L. Steinbrueck
  • Patent number: 7717618
    Abstract: An apparatus and method for increasing the resolution of a linear array of fiber Bragg gratings by applying a plastic coating having a high CTE over the optical fiber. Apparatus and method for determining the temperature of each of a succession of points along a tissue portion during hyperthermia treatment includes an optical fiber with a succession of closely spaced fiber Bragg gratings. Each grating is responsive to a different wavelength and is sensitive to ambient temperature to change that wavelength as a function of temperature. A tunable laser operative continuously over a range of wavelengths including those to which the gratings respond is used to interrogate the gratings. Sensitivity-enhancing coatings are used on the fibers and the lasers are tuned over very short time cycles.
    Type: Grant
    Filed: December 30, 2005
    Date of Patent: May 18, 2010
    Assignee: Optech Ventures, LLC
    Inventors: Indu Saxena, Harold Mukamal
  • Patent number: 7664324
    Abstract: Methods and systems for detecting the presence of concealed objects. One embodiment of the method of these teachings for detecting the presence of concealed objects is passive, does not require any external radiation source, uses thermal radiation of a body as a source of radiation. Other embodiments include unique systems, devices, methods, and apparatus to determine the presence of a concealed object.
    Type: Grant
    Filed: February 21, 2008
    Date of Patent: February 16, 2010
    Assignee: Iscon Video Imaging, Inc.
    Inventors: Leonid Khodor, Henry Droznin, Izrail Gorian, Galina Doubinina
  • Patent number: 7657092
    Abstract: Methods and systems for detecting the presence of concealed objects.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: February 2, 2010
    Assignee: Iscon Video Imaging, Inc.
    Inventors: Izrail Gorian, Galina Doubinina
  • Publication number: 20100004877
    Abstract: The present invention relates to a device that simulates the conditions causing the aging of polymeric material used in agricultural environments in order to obtain information about the rate of degradation of the material. For this purpose, the device of the invention exposes a test specimen of polymeric material to radiation, temperature, mechanical stress, humidity, etc. conditions and checks the effect produced in the material.
    Type: Application
    Filed: July 3, 2008
    Publication date: January 7, 2010
    Applicant: REPSOL QUIMICA, S.A.
    Inventors: Antonio Marin Trujillo, Jose Fagoaga Lopez, Fernando Rull Perez
  • Patent number: 7630835
    Abstract: A first frequency of electromagnetic radiation and a second frequency of electromagnetic radiation are received at a detector. The first and second frequencies of electromagnetic radiation are transmitted through a medium within a frequency range of approximately 0.1 TeraHertz to approximately 10 TeraHertz. Signals are generated that are proportional to the transmittance of the frequencies of electromagnetic radiation through the medium. A ratio of the of the signals is formed, and one or more of a relative humidity, an absolute humidity, and a water vapor concentration of the medium are calculated as a function of a temperature of the medium, the ratio, and a set of functional parameters associated with the temperature of the medium.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: December 8, 2009
    Assignee: Honeywell International Inc.
    Inventors: James A. Cox, Christopher J. Zins
  • Publication number: 20090287360
    Abstract: A method and apparatus measuring temperature of a steel sheet. A reference plate including a temperature controller is disposed opposite to the steel sheet. The reference plate temperature of the reference plate is measured by a contact thermometer. A radiation pyrometer is trained on the steel sheet at an angle such that alternate reflection of radiation energy by the reference plate and the objective steel sheet occurs once or twice. The radiosity of the steel sheet is measured by the radiation pyrometer. A temperature obtained by converting the radiosity into a temperature of a blackbody that radiates energy equivalent to the radiosity is used as a radiosity temperature. The temperature controller executes a control operation to make the temperature of the reference plate coincide with the radiosity temperature. The radiosity temperature is used as the temperature of the steel sheet.
    Type: Application
    Filed: June 18, 2007
    Publication date: November 19, 2009
    Applicant: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
    Inventors: Keiichi Yamashita, Tsuneaki Nishikawa
  • Publication number: 20090248350
    Abstract: A method for analyzing a temperature of exhaust gas includes calculating an approximate temperature at least one time by fitting a measured spectrum to a portion of theoretical spectra defined in association with a first temperature range using a temperature determined in the an immediately previous preceding temperature analysis as a reference, and then determining a calculated temperature by fitting the measured spectrum to all the theoretical spectra over a second temperature range that is narrower than the first temperature range, using the approximate temperature as a reference.
    Type: Application
    Filed: December 17, 2007
    Publication date: October 1, 2009
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Masahiro Yamakage, Kenji Muta, Yoshihiro Deguchi, Norihiro Fukuda, Shinichiro Asami
  • Patent number: 7595489
    Abstract: A method of identifying a material using an x-ray emission characteristic is provided. X-ray data representing a monitored x-ray emission characteristic is obtained from a specimen in response to an incident energy beam. A dataset is also obtained, this comprising composition data of a plurality of materials. The material of the specimen is contained within the dataset. Predicted x-ray data are calculated for each of the materials in the dataset using the composition data. The obtained and the predicted x-ray data are compared and the likely identity of the material of the specimen is determined, based upon the comparison.
    Type: Grant
    Filed: June 28, 2006
    Date of Patent: September 29, 2009
    Assignee: Oxford Instruments Analytical Limited
    Inventor: Peter John Statham
  • Publication number: 20090228234
    Abstract: A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetector that measures an interference between the first reflected reference beam and a reflected measurement beam obtained by the measurement beam reflected from a target object; a second photodetector that measures an intensity of the second reflected reference beam; and a temperature calculation unit. The temperature calculation unit calculates a location of the interference by subtracting an output signal of the second photodetector from an output signal of the first photodetector, and calculates a temperature of the target object from the calculated location of the interference.
    Type: Application
    Filed: March 6, 2009
    Publication date: September 10, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Jun ABE, Tatsuo MATSUDO, Chishio KOSHIMIZU
  • Patent number: 7581876
    Abstract: An instrument and associated method are disclosed for the loss-on-drying determination of the volatile content of a wide variety of samples.
    Type: Grant
    Filed: July 15, 2006
    Date of Patent: September 1, 2009
    Assignee: CEM Corporation
    Inventors: Robert N. Revesz, Michael J. Collins, Sr.
  • Publication number: 20090210191
    Abstract: A system and method for determining the temperature of an object without physically contacting the object. The method involves reading a spectral radiation of the object over a plurality of wavelengths to obtain a set of radiation data related to a temperature of the object. A known characteristic of a black body is determined at a plurality of predetermined, different test temperatures. The spectral data and the characteristic of the black body at the various test temperatures are used to calculate a temperature of the object.
    Type: Application
    Filed: February 18, 2008
    Publication date: August 20, 2009
    Inventors: Mark D. Rogers, Loyal B. Shawgo
  • Publication number: 20090199646
    Abstract: This optical fiber thermometer includes one optical fiber for projection that relays light from the light source to a measuring unit, two optical fibers for light-reception that relay light reflected from a reflecting face of a mirror provided at the measuring unit to two light-receiving units, and an arithmetic processing circuit that calculates the pressure of the measuring unit from the ratio of electrical signals from the two light-receiving units; end surfaces of three optical fibers arranged to face the reflecting face being fixed such that an angle ? between the longitudinal direction of the optical fibers and the normal to the reflecting face is not zero, the two optical fibers for light-reception being parallel, fixing angles between each of them and the optical fiber for projection being symmetrical based on the normal to the reflecting face as a reference, and each of the optical fibers being a single-mode fiber at the wavelength being used, According to this invention, it is possible to provide an
    Type: Application
    Filed: April 17, 2009
    Publication date: August 13, 2009
    Applicant: Fujikura Ltd.
    Inventors: Akira SAKAMOTO, Keiichi Horimoto, Yoshikiyo Noguchi
  • Patent number: 7561983
    Abstract: A technique for improving ion implantation based on ion beam angle-related information is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for improving ion implantation. The method may comprise obtaining angle-related information associated with an ion beam. The method may also comprise calculating, based on the angle-related information, an ion beam angle distribution over a wafer for one or more potential scanning modes. The method may further comprise selecting a desired scanning mode from the one or more potential scanning modes based on an evaluation of performance metric caused by the ion beam angle distribution.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: July 14, 2009
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Atul Gupta, Jonathan Gerald England
  • Publication number: 20090177432
    Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.
    Type: Application
    Filed: April 17, 2008
    Publication date: July 9, 2009
    Inventors: Charles A. Taylor, II, Darryl Barlett, Douglas Perry, Roy Clarke, Jason Williams
  • Patent number: 7532997
    Abstract: A method for electromagnetic tracking the position and orientation of an object using a discretized numerical field model, rather than the conventional analytical dipole model. The method including the steps of determining a discretized numerical field model associated with a particular distortion source; acquiring mutual inductance signals between electromagnetic sensors and the particular distortion source, the sensors being rigidly attached to a tracked object; estimating an initial position for the tracked object in the presence of the particular distortion source; refining the estimated position of the tracked object; and estimating an orientation of the tracked object.
    Type: Grant
    Filed: April 17, 2006
    Date of Patent: May 12, 2009
    Assignee: General Electric Company
    Inventors: Dun Alex Li, Peter Traneus Anderson, Gerald Lee Beauregard
  • Patent number: 7497615
    Abstract: A digital temperature sensor and a system and a method for measuring a temperature are provided. The system includes a reference signal generator including one or more resistance elements; a temperature sensor including a plurality of discrete resistance elements arranged parallel with one another; a multiplexer multiplexing the plurality of discrete resistance elements and the reference resistance element so that the plurality of discrete resistance elements sequentially distribute a power voltage together with the reference resistance element; a comparator having the voltages distributed by the reference resistance element and a discrete resistance element selected by the multiplexer; and a counter counting sequential switchings of the multiplexer.
    Type: Grant
    Filed: July 25, 2005
    Date of Patent: March 3, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-kyun Kim, Ja-nam Ku
  • Publication number: 20090037135
    Abstract: A radiation thermometer comprising a radiation detector and an optical input path arranged to direct radiation from an object of interest to the radiation detector is disclosed. The radiation detector is adapted to output a signal related to the radiation received from the object of interest, and a processor is adapted to generate temperature measurements from the signal. Filtering means are provided in the optical input path which are arranged to block radiation having a wavelength between approximately 0.92 and 0.98 microns.
    Type: Application
    Filed: February 6, 2007
    Publication date: February 5, 2009
    Applicant: Land Instruments International Limited
    Inventors: Adrian John Masefield Lyndon, Ian Hamilton Ridley, Stuart Francis Metcalfe
  • Publication number: 20090022204
    Abstract: The invention relates to a method for temperature measurement in a microfluid channel of a microfluid device. According to the invention, a method for temperature measurement in a microfluid channel of a microfluid device, by means of which the temperature maybe simply measured with reliable accuracy, maybe achieved, whereby a volume element of the microfluid channel in which the temperature is to be measured is irradiated with a light source, elastically-scattered and other undesired light is separated off from the light with Raman scattering in the volume chamber, the Raman scattered light is recorded by a recording means, the recorded Raman scattered light is converted into Raman signals and the temperature in the volume element determined from the Raman signals.
    Type: Application
    Filed: February 8, 2006
    Publication date: January 22, 2009
    Inventors: Dirk G. Kurth, Alexander Iles
  • Patent number: 7478007
    Abstract: The invention provides a method to compensate for degradation in a tunable laser and ensure its performance by tracking the degradation and adjusting the control information accordingly. This is accomplished by performing some measurements of the output of the tunable laser at an initial setup or calibration procedure. Then, by effecting a periodic repetition of these measurements and using a comparison between these two measurements the present invention provides for a compensation factor for the operating conditions, primarily in the form of a look up table of operating points of the laser. These measurements show how much the operating points of the laser have drifted over the period since the last set of measurements, which provide control informatIon to compensate for degradation in the laser.
    Type: Grant
    Filed: October 30, 2003
    Date of Patent: January 13, 2009
    Assignee: Intune Technologies Limited
    Inventors: Thomas Farrell, David McDonald, Thomas Mullane
  • Publication number: 20080306705
    Abstract: An apparatus and methods for identifying a defect and/or an operating characteristic of a system being monitored (and/or one or more of the system's components) are described. In an embodiment, orthogonally related data monitored by two or more detectors may be fused to determine whether a component of a system is defective and/or malfunctioning. Additionally or alternatively, data from a first detector may be determined to be accurate using non-orthogonally related data outputted by a second detector. Both types of determinations may be made with minimal or no false indications, which lowers the cost of operating the system being monitored.
    Type: Application
    Filed: June 6, 2007
    Publication date: December 11, 2008
    Inventors: Huageng Luo, Michael Richard Durling, Andrew Lawrence Ruggiero, Zongqi Sun, Harry Kirk Mathews, JR., Robert William Tait, Benjamin Paul Church, Thomas Anthony Tougas
  • Patent number: 7451054
    Abstract: A method for facilitating an ODP measurement of a semiconductor wafer. The method includes obtaining real time wafer characteristic data for a measurement site on said wafer and detecting a measured diffraction signal from a structure within the measurement site of the wafer. The measured diffraction signal is matched with a simulated diffraction signal stored in a wafer characteristic dependent profile library. A hypothetical profile structure associated with the simulated diffraction signal in the wafer characteristic dependent profile library is then identified. The real time wafer characteristic data is used to facilitate at least one of the matching and identifying.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: November 11, 2008
    Assignee: Tokyo Electron Limited
    Inventors: Sachin Deshpande, Merritt Funk
  • Publication number: 20080223832
    Abstract: A linear model based generalized predictive control system controls the molten pool temperature during a Direct Metal Deposition (DMD) process. The molten pool temperature is monitored by a two-color pyrometer. A single-input single-output linear system that describes the dynamics between the molten pool temperature and the laser power is identified and validated. The incremental generalized predictive control algorithm with Kalman filter estimation is used to control the molten pool temperature.
    Type: Application
    Filed: November 16, 2007
    Publication date: September 18, 2008
    Inventors: Lijun Song, Jyoti Mazumder
  • Publication number: 20080208514
    Abstract: A threat launch detection system includes at least one temporal threat detector, each temporal threat detector including a single sensing element operable to sense radiation from various types of short-burn threats that occur within a field of view of the detector. The single sensing element generates a detection signal in response to the sensed radiation. A processing circuit is coupled to each temporal threat detector and is operable to analyze the detection signal from each detector as a function of time to detect the occurrence of a short-burn threat within the field of view of any of the temporal threat detectors. Each temporal threat detector may be a prism-coupled compound parabolic concentrator (PCCP).
    Type: Application
    Filed: February 7, 2005
    Publication date: August 28, 2008
    Inventors: Jonathan L. Weber, John Mandzy, Paul I. Egbert, Kirby A. Smith, Jill A. Shea
  • Publication number: 20080195347
    Abstract: A method and system for detecting a concealed foreign object carried by a body (P) by collecting radiation (R) from the body (P) indicative of a radiation response of the body (P) to environmental temperature changes which the body (P) is subjected to while entering or emerging from a transient inducing space (TIS) of environmental temperature changes and generating thermal data indicative of the response. The TIS has a volume substantially large relative to that of the body (P) and is configured to enable concentration of a temperature field within the TIS. The TIS may be defined by a gate (21) having at least one of the following configurations: side walls (21A, 21B) at opposite sides of the body path or side walls (21A, 21B) at opposite sides of the body path and an upper wall (21C) above the body path. The gate may be a substantially -shaped gate, -shaped gate, or a carousel gate.
    Type: Application
    Filed: February 23, 2005
    Publication date: August 14, 2008
    Applicant: GLOBAL SECURITY DEVICES LTD.
    Inventor: Refael Gatt
  • Patent number: 7409313
    Abstract: An apparatus is provided for determining thickness and thermal conductivity for an insulative coating disposed on a substrate in an object. The apparatus includes a source for rapidly applying a multiple optical pulses on a surface of the object, where the surface comprises the insulative coating. The system further includes a recording system configured to collect data representative of the propagation of the optical pulses in the object. The apparatus further includes a processor coupled to the recording system and configured to receive the data from the recording system and configured to determine a thickness value and a thermal conductivity value for the insulative coating.
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: August 5, 2008
    Assignee: General Electric Company
    Inventors: Harry Israel Ringermacher, Elena Rozier
  • Publication number: 20080183413
    Abstract: A method for facilitating an ODP measurement of a semiconductor wafer. The method includes obtaining real time wafer characteristic data for a measurement site on said wafer and detecting a measured diffraction signal from a structure within the measurement site of the wafer. The measured diffraction signal is matched with a simulated diffraction signal stored in a wafer characteristic dependent profile library. A hypothetical profile structure associated with the simulated diffraction signal in the wafer characteristic dependent profile library is then identified. The real time wafer characteristic data is used to facilitate at least one of the matching and identifying.
    Type: Application
    Filed: January 30, 2007
    Publication date: July 31, 2008
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Sachin Deshpande, Merritt Funk
  • Publication number: 20080130707
    Abstract: The temperature measuring device of the present invention comprises: a light source for outputting light; an optical fiber to which light outputted by the light source is inputted and from which Brillouin scattered light is outputted; a detection unit for detecting a spectrum of the Brillouin scattered light; a judgment unit for judging whether or not a frequency shift of the spectrum of the Brillouin scattered light detected by the detection unit belongs to a specific region in which the rate of change of the frequency shift with respect to the temperature of the optical fiber is smaller than a predetermined value; and an analysis unit for, when the judgment unit judges that the frequency shift does not belong to the specific region, analyzing the temperature in use of the frequency shift, and for, when the judgment unit judges that the frequency shift belongs to the specific region, not performing analysis, or analyzing the temperature in use of at least the linewidth of the spectrum of the Brillouin scatte
    Type: Application
    Filed: October 5, 2006
    Publication date: June 5, 2008
    Inventors: Yoshinori Yamamoto, Itaru Sakabe, Eisuke Sasaoka
  • Patent number: 7353722
    Abstract: A holding frame (2) is mounted in a weathering chamber (1) of a weathering tester so that it can be rotated around a xenon radiation source (3), which is located on the cylinder or rotation axis, and an infrared filter (5) placed around it. Samples (3) to be weathered are fastened to the inside of the holding frame (2) and are exposed to the radiation from the xenon radiation source (4). The surface temperature of the samples (3) can be recorded directly by a black-body radiation detector such as a pyrometer (6), which is aimed at a stationary region of space through which the samples (3) pass periodically during their rotational movement. The surface temperature can be computed in an evaluation circuit from the detected black-body radiation, together with emissivity values stored for the individual samples (3).
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: April 8, 2008
    Assignee: Atlas Material Testing Technology GmbH
    Inventor: Artur Schönlein
  • Publication number: 20080082288
    Abstract: A system and method to fully characterize the thermal behavior of complex 3D submicron electronic devices. The system replaces and/or supplements laser-based surface temperature scanning with a CCD camera-based approach. A CCD camera records multiple points of light energy reflected from an integrated circuit to obtain a static temperature measurement. The system is used to non-invasively measure with submicron resolution the 2D surface temperature field of an activated device. A CW laser illuminates a single point on the surface of an active device and a photodetector records the reflected light energy to obtain a transient temperature measurement. The measured 2D temperature field is used as input for an ultra-fast inverse computational solution to fully characterize the thermal behavior of the complex 3D device. The system extracts geometric features of a known device, assessing the system's ability to combine measured results and computations to fully characterize complex 3D electronic devices.
    Type: Application
    Filed: September 28, 2006
    Publication date: April 3, 2008
    Inventor: Peter E. Raad