Abstract: A measurement tool connects to an automatic inspection machine for identifying and measuring microscopic dimensions such as area, diameter, height and line width of defects and lines of a photographic mask. An operator draws a rough region of interest around a feature and the tool automatically identifies the feature and calculates its dimensions. For features less than one micron in size, the size of light photons interferes with measurement, so a non-linear polynomial calibration curve is developed for each machine. Features of known sizes are measured on a production machine to produce a calibration curve for each type of defect or line. Features of unknown sizes are measured on the same machine and the measured size in pixels are calibrated using the calibration curve to return a more accurate reading in microns.

Abstract: A method for determining the geolocation of an object such as a vehicle traversing the earth's surface or airborne thereabove includes employing a device which is capable of operating autonomously to transmit signals to a selected low earth orbit (LEO) satellite for relay to a receiving station whose position is known, identifying the device and its geolocation, speed, altitude and/or heading. The device includes a microcomputer which operates a Global Positioning System (GPS) receiver for receiving GPS signals to identify the device geolocation and the precise time. A nonvolatile memory on board the device stores LEO satellite ephemeris data, satellite operational and message formatting parameters, LEO satellite visibility footprint data and visibility contour information for the device caused by obstacles which are permanently or temporarily in proximity to the device during deployment and which block transmission of signals between the device and the LEO satellite, depending on relative positions.

Abstract: Partial wafer processing is achieved by down loading the wafer map of the whole wafer from a host (2) and display the whole wafer in the die bonder monitor (3) move the wafer table to a first die pickup position (4) and move the display cursor to the first die pickup position (5) and teach two limit die coordinates in X direction (6) and teach two limit die coordinates in Y direction (7) and then using limit die coordinates as information remove other partial wafer die coordinates from the map (8) and select die pickup sequence (9).

Abstract: A head mounted tracker is placed in the operator area near the operator. The tracker has the capability to map the operator area without manual assistance. These operations are performed by processing low and high frequency components, based on the frequency of an alternating current generating the magnetic field, of the magnetic field in the operator area.

Abstract: The invention is directed to a method for controlling a coordinate measuring apparatus in accordance with desired data utilizing a movably journalled probe which continuously scans the surface of a workpiece in a scanning point in a preferred measurement direction (M). Either the probe or the workpiece therefore additionally rotatably journalled about at least one rotational axis having a first alignment. Geometric data are processed which include at least points (Pai, Pbi) on the surface of the workpiece with the points (Pai, Pbi) defining a line to be scanned. Control data (Lai, L.alpha.i and/or Lbi, L.beta.i) from the geometric data are computed for controlling the measuring sequence in such a manner that, for measuring the workpiece, the workpiece and/or the probe are rotated about the rotational axis.

Abstract: A device and method for measuring vehicle wheel alignment characteristics, and in particular measuring wheel camber and toe, uses a rotating vision sensor such as a laser sensor to map a portion of the vehicle tire and/or rim, allowing for the determination of wheel camber and toe without rotating the wheel. The sensor may be repositioned between the rear and front vehicle wheels. A separate sensor may be used for the left and the right vehicle wheels. The invention has particular utility for auditing of the alignment of vehicles in production lines. The devices and methods may also be used for more general imaging purposes.

Abstract: A method and apparatus for measuring three-dimensional (3-D) coordinates. A 3-D object can be digitized into a mesh representation manipulable by a computer system by tracing a stylus of a probe apparatus over surfaces of the object. The probe apparatus includes an arm having a series of linkages and joints. The arm can be assembled by placing the joints of the arm in joint fixtures a desired distance and angle apart and bonding the joints to a linkage. The probe apparatus is calibrated by placing the tip of the stylus at an arbitrary point in a work volume and varying the stylus' orientation to find error values and determine calibration parameters. The sensors of the probe apparatus are zeroed by placing the probe apparatus in the only possible home position and assigning assumed starting angles to the sensors. A rotary table can be used to support the object being digitized, where the rotation of the rotary table and object during digitization is sensed and included in coordinate calculations.

Abstract: The laser tracker is positioned at a vantage point to detect and calibrate its reference frame to the external reference frame demarcated by light-reflecting retro reflector. A tetrahedron framework with retro reflector mounted on one of the vertices serves as a reference target that is placed in front of the non-contact sensor to be calibrated. The laser tracker reads and calibrates the position of the retro reflector (and thus the tetrahedron) while the structured light of the non-contact sensor is projected onto the framework of the reference target. The structured light intersects with and reflects from the reference target, providing the non-contact sensor with positional and orientation data. These data are correlated to map the coordinate system of the non-contact sensor to the coordinate system of the external reference frame.

Abstract: The sensor array is positioned at a vantage point to detect and calibrate its reference frame to the external reference frame demarcated by light-emitting reference indicia. The sensor array encompasses a wide view calibration field and provides data indicating the spatial position of light sources placed within the calibration field. A tetrahedron framework with light-emitting diodes at the vertices serves as a portable reference target that is placed in front of the feature sensor to be calibrated. The sensor array reads and calibrates the position of the light-emitting diodes at the vertices while the structured light of the feature sensor is projected onto the framework of the reference target. The structured light intersects with and reflects from the reference target, providing the feature sensor with positional and orientation data. These data are correlated to map the coordinate system of the feature sensor to the coordinate system of the external reference frame.

Abstract: A probe coordinate system driving apparatus in which, in a coordinate measuring machine, a probe can be driven in a direction in conformity with the position of the probe to thereby facilitate probe driving operation through joy stick operation. There is provided a probe head capable of freely changing the probe position through setting elevation angle .alpha. and angle of traverse .beta., and unit direction vectors representing the axes of a probe coordinate system in conformity with the probe position are obtained on the basis of the angles set. Vectors obtained from the scalar product of three electric signals output from a joy stick operating unit through the operation by the operator and the three unit direction vectors are synthesized to calculate a drive vector, and the driving of the coordinate measuring machine is controlled in accordance with this drive vector.

Abstract: A work cell containing robot(s), video camera(s), and structured lighting source(s) is calibrated by observing targets with the camera(s) as a robot is displaced through a set of offsets. Complete information is recovered about the camera(s) calibration data and the structure of illumination from the light source(s). The robot is utilized to create known relative movements between the targets and the camera(s) and light source(s). Therefore, this technique is applicable to both the fixed and moving camera cases. Except for the target surface profile, there is no requirement to externally determine any absolute or relative positions, or any relationships either within or between the camera(s), targets, light source(s), and robot(s). Either single or multiple cameras (acting independently or in stereo) are calibrated to the robot's coordinate frame, and then optionally used as measuring devices to determine the position and form of the structured light.

Abstract: A wafer testing rig includes a stand, a first contact component, a second contact component and a biasing device. The first contact component is mounted to the stand. The second contact component is mounted to the stand for movement towards and away from the first contact component. The first and second contact components are shaped so that a wafer, when located between the contact components, is deflected into a dome shape when the second contact component is moved towards the first contact component. The biasing device is operable to move the second contact component towards and away from the first contact component. An electrical tester is provided to test the wafer.

Abstract: The present invention detects coordinates of a designated point and includes a vibration transmission plate having anisotropic properties such that vibrations from a vibration generation source applied to the vibration transmission plate propagate through the vibration transmission plate with differing vibration transmission velocities depending on a direction of transmission of vibration. A plurality of vibration detection units are provided for detecting vibrations transmitted through the vibration transmission plate, and a determination unit determines coordinates of the vibration generation source by measuring time periods of propagation of vibrations through the vibration transmission plate from the vibration generation source to one or more of the vibration detetion units.

Abstract: Markers each comprising an electromagnetic coil are installed on the surface of a road at a lateral center line of a running lane of the road at predetermined intervals. Provided for each of the markers, a driving signal generating circuit drives the associated marker so that the marker transmits an alternating current magnetic field. Alternating current magnetic field receiving devices each comprising an electromagnetic coil are installed on the front bumper of a vehicle at positions symmetrical with respect to the lateral center line of the vehicle. While the vehicle is running, the alternating current magnetic field receiving devices sequentially receive the alternating current magnetic fields generated by the markers one field after another. A microcomputer receives detection voltages generated by the alternating current magnetic field receiving devices through detection circuits and determines the lateral position of the vehicle from the detection voltages.

Abstract: A method for assembling a linkage assembly for a 3-D Digitizing Probe Apparatus. A linkage assembly for incorporation into the probe apparatus includes a linkage and a joint member provided at each end of the linkage. Joint fixtures for receiving and holding the joints are provided at a desired distance and orientation apart. The joint members are loosely coupled to the linkage and are moved relative to the linkage so that the joint members fit in the joint fixtures and so that the linkage provides a desired length between the joints. The joint members are bonded to the linkage while the assembly is in the fixtures, thus fastening the components of the assembly together with minimal stress to the assembly and providing a precise linkage length and orientation of joints in the assembly.

Abstract: A system for improving the accuracy of location coordinate determined in a survey of a chosen region, using a computer. A grid of spaced apart points is imposed on the region, and a set of survey control points is provided. A "near set" of nearest survey control points is associated with each grid point. For each grid point, a transformation T from a first (global) datum and coordinate system to a second (local) datum and coordinate system is determined that minimizes a collective difference between coordinates of each survey control point in the near set and the corresponding coordinates of that survey control point under the transformation T. For one, two or three coordinates of each grid point, a difference .DELTA. between the coordinate(s) of the grid point in the near set and the corresponding coordinate(s) of that grid point under the transformation T is computed. An interpolation function is determined that approximately matches the coordinate(s) difference .DELTA. at each grid point.

Abstract: The invention is directed to a method which is provided for controlling coordinate measuring apparatus wherein a probe head (2) is moved and has a movably attached probe unit (24) attached thereto. The probe unit (24) is charged with a measurement force Fmeas relative to the probe head (2). The measurement force Fmeas operates against the mass inertial forces Fzp which occur because of acceleration of the probe. The measurement force Fmeas is comprised of a desired measurement force Fdes and a corrective measurement force Fcorr. The desired measurement force Fdes is constant in magnitude and is directed perpendicularly to the surface of the workpiece (15) to be measured. The corrective measurement force Fcorr at least partially compensates for the mass inertial forces (Ftr, Fzp) which occur because of the acceleration of the probe unit (24).

Abstract: A measurement tool connects to an automatic inspection machine for identifying and measuring microscopic dimensions such as area, diameter, height and line width of defects and lines of a photographic mask. An operator draws a rough region of interest around a feature and the tool automatically identifies the feature and calculates its dimensions. For features less than one micron in size, the size of light photons interferes with measurement, so a non-linear polynomial calibration curve is developed for each machine. Features of known sizes are measured on a production machine to produce a calibration curve for each type of defect or line. Features of unknown sizes are measured on the same machine and the measured size in pixels are calibrated using the calibration curve to return a more accurate reading in microns.

Abstract: In a sourceless orientation sensor, the sensor measures the three orientation angles azimuth, elevation and roll in a fixed reference three-dimensional coordinate frame. The sensor utilizes a three-axis magnetic sensor to measure changes in the Earth's magnetic field in order to determine the azimuth and roll (or elevation) angles after the elevation (or roll) angle has been determined by other means. A first embodiment utilizes a separate sensor to measure the elevation (or roll) angle in a fixed reference three-dimensional coordinate frame while a three axis magnetic sensor is used to measure the Earth's magnetic field. The azimuth and the roll (or elevation) angles are then determined from these measurements. A second embodiment utilizes a combination of a three-axis accelerometer to sense the Earth's gravity to measure the absolute elevation and roll angles for slow motions and a two-axis rate sensor to measure the azimuth and elevation velocities in the sensor frame.

Abstract: A CMM control system which presents a three-dimensional graphic representation to the operator showing the active probe tip recognized by the CMM software. The controller software determines whether a motorized probe head is present and the exact location the probe tip. By using three-dimensional vector graphic routines, the controller software presents a graphic display of the probe relative to the machine's coordinate system. This technique minimizes the occurrence of measurement errors which could be introduced by the unwary operator who inadvertently used CMM data taken with an unrecognized probe tip.

Abstract: A switching method for producing a switching signal on reaching a switching condition, an evaluation circuit being supplied successively in time with a sequence of measurements which each comprise at least two bits, the measurements being checked for the switching condition in accordance with their time sequence, and the switching signal being produced as soon as the switching condition is reached for the first time. The two most significant bits of each measurement, are compared with one another and with the two most significant bits of the immediately preceding measurement, and in that the switching condition is changed when the two most significant bits of the respective measurement have the same value and when the two most significant bits of each measurement both differ from the two most significant bits of the immediately preceding measurement.

Abstract: The invention is directed to a method wherein measured values are mathematically combined with stored corrective values. The measured values are determined during the form measurement on circularly-shaped, cylindrical or spherically-shaped geometric elements by a coordinate measuring apparatus. To determine these corrective values, circularly-shaped or circular-segment shaped measurement lines each having several different diameters are scanned at different speeds in several positions or planes of the coordinate measuring apparatus. The form deviations corresponding to the diameters and the speeds which are measures on the known form are stored. In addition to the variables of diameter and scanning speed, the corrective values can be parameterized in accordance with the wavelength constant of the filter used, the position in the measuring region and peripheral direction of the measurement.

Abstract: A method for calibrating a printer or other imaging system to accurately place an image on a final receiving substrate is provided. A test image is printed and the margins between the image and the edges of the media are measured. These measured margin values are then utilized to adjust stored calibration factors that calibrate the printer to accurately place the image on the final receiving substrate.

Abstract: A Visual Basic software program to automate the procedures required for energy dose verification and adjustment of the ASM photoaligner. The software program has the capability of manipulating the ASM photoaligner through a resident software routine of the photoaligner. In addition, the software program has a user interface which prompts the operator for inputs and instructs the operator on what is required to perform the energy dose calibration. This ensures a reproducible procedure regardless of the photoaligner being tested or the operator doing the testing. Automating this procedure allows changing the photoaligner energy dose through the ASM Machine Constants (values stored in the ASM photoaligner that control the operation of the photoaligner). If the input data is out of specification the program will either reference a trouble shooting guide or request that the specific procedure be repeated for verification.

Abstract: A coordinate input apparatus which can stably input coordinates at a high precision is provided. A vibration sensor is fixed to a vibration propagating plate by means such as an adhesion or the like. Electrodes are formed on both edge surfaces of the vibration sensor. One electrode is connected to the vibration propagating plate (its surface is made of a conductive material). Another electrode is connected to a conductive plate spring through an electrode leading member. The electrode leading member has a cylindrical portion to position a projecting portion to a center axis by setting a side surface of the vibration sensor to a reference has a relation adapted to be come into engagement with the vibration sensor. The plate spring presses the electrode leading member to the vibration sensor and is electrically connected to the vibration sensor.

Abstract: In a method for calibrating the deflection control of a laser beam a light-sensitive medium (5) is exposed to a laser beam (2) at predetermined positions for generating a test pattern (20), thereafter digitized partial pictures of pattern portions (21) of the test pattern (20) are produced and the digitized partial pictures are composed to a digitized overall picture of the test pattern (20). The correction data for the control (4) for deflecting the laser beam (2) are calculated on the basis of a comparison of actual positions of the laser beam (2) on the digitized overall picture with predetermined desired coordinates.

Abstract: A calibration system for measuring position errors in a coordinate measuring machine having a fixed table and a movable element is provided. The system includes a straightedge assembly attachable to the table and a sensing fixture attachable to the movable element. The straightedge assembly includes a straightedge having a first reference surface that is parallel to a predetermined direction and a second reference surface perpendicular to the first reference and parallel to the predetermined direction. The sensing fixture includes a fixture housing and sensors on the housing for sensing the position of the movable element relative to the straightedge and generating position error signals representative of position errors of the movable element as the sensing fixture is moved in the predetermined direction along the straightedge. The sensors provide position error signals representative of displacement, straightness, pitch, yaw and roll errors of the movable element.