Coordinate Positioning Patents (Class 702/95)
  • Publication number: 20090030639
    Abstract: A method for correcting the measured values of positions of structures (3) on a substrate (2) resulting from bending of a substrate (2) is disclosed. A plurality of geometric parameters of the substrate (2) are determined. A plurality of physical parameters of the substrate (2) are determined. A degree of bending is calculated individually for each substrate (2) on the basis of the obtained geometric parameters, the physical parameters and the position of the support points (40). The measured position data of the structures (3) on the substrate (2) is corrected with the aid of each individually calculated degree of bending.
    Type: Application
    Filed: June 27, 2008
    Publication date: January 29, 2009
    Applicant: Vistec Semiconductor Systems GmbH
    Inventor: Slawomir Czerkas
  • Publication number: 20090024344
    Abstract: A method for correcting an error of the imaging system of a coordinate measuring machine is disclosed. The position of at least two different edges of at least one structure on a substrate is measured. The substrate may be automatically rotated into another orientation. Then the position of the at least two different edges of the at least one structure is measured on the rotated substrate. Based on the measurement data, a systematic error of the imaging system is eliminated.
    Type: Application
    Filed: July 15, 2008
    Publication date: January 22, 2009
    Applicant: VISTEC Semiconductor Systems GmbH
    Inventors: Michael Heiden, Klaus Rinn
  • Publication number: 20090024343
    Abstract: A method of determining geometric errors in a machine tool or measuring machine having a mobile unit for moving a target within a measuring volume, the method including the steps of determining a first direction within the measuring volume; moving the target into a number of points along the direction by means of the mobile unit; measuring, by means of a measuring device, the abscissa of each of the points from an origin located along the first direction; acquiring the coordinates of each of the points by means of the machine; repeating the foregoing steps for a number of directions within the measuring volume; and determining error parameters of the machine on the basis of the abscissas measured by the measuring device, and the coordinates of the points acquired by the machine.
    Type: Application
    Filed: May 9, 2008
    Publication date: January 22, 2009
    Inventors: Alessandro Balsamo, Michele Verdi
  • Publication number: 20090012734
    Abstract: A method for calibration of a digital celestial sensor is disclosed. The method comprises the following steps: firstly, an integrated mathematic model for imaging of a celestial sensor is established according to external and internal parameters of the calibration system of the celestial sensor. Secondly, by rotating two axes of a rotator by different angles, calibration points data are acquired and sent to a processing computer through an interface circuit. Finally, a two-step calibration program is implemented to calculate the calibration parameters by substituting calibration points' data to the integrated mathematic model. The disclosure also relates to an application device of the calibration method, wherein the device comprises: a celestial simulator to provide simulated sunlight or starlight, a two-axis rotator to acquire different the calibration points' data, a processing computer to record the calibration points' data and calculate the calibration parameters.
    Type: Application
    Filed: February 25, 2008
    Publication date: January 8, 2009
    Inventors: Guangjun Zhang, Xinguo Wei, Qiaoyun Fan, Jie Jiang
  • Patent number: 7474978
    Abstract: An optical receiver having a photodetector, amplifier, feedback loop, and output circuit is disclosed. The photodetector generates a current between first and second nodes in response to being illuminated with light. The amplifier has an input connected to the first node and an output connected to a third node. The feedback path connects the third node to the first node, and includes a diode in series with a circuit element having an impedance greater than a predetermined value, the diode is connected between the first and fourth nodes. The output circuit is connected to the fourth node and provides an output signal to an external circuit. The output circuit can be configured to provide an output signal that is proportional to the logarithm of the intensity of the light that illuminates the photodetector.
    Type: Grant
    Filed: October 31, 2006
    Date of Patent: January 6, 2009
    Assignee: Avago Technologies ECBU IP (Singapore) Pte. Ltd.
    Inventors: Kok Keong Richard Lum, Lei Chen
  • Publication number: 20080294364
    Abstract: A two-dimensional lattice calibrating device includes: a measuring unit that measures respective positions of marks for each of a plurality of measurement dispositions; a simultaneous-equations generating unit that generates simultaneous equations for acquiring deviations of the plurality of marks using a coordinate relational equation and a least-squares conditional equation that sets least-squares lines that minimize the deviation of actual position of the marks based on measurement values as coordinate axes of artifact coordinates; and a simultaneous-equations calculating unit that solves the derived simultaneous equations.
    Type: Application
    Filed: May 21, 2008
    Publication date: November 27, 2008
    Applicant: MITUTOYO CORPORATION
    Inventors: Masayuki Nara, Makoto Abbe
  • Publication number: 20080294363
    Abstract: A system and method for characterizing color separation misregistration of a multi-color printing system utilizing a broadband multi-channel scanning module, such as an RGB scanner, are provided. The system and method include generating a spectral reflectance data structure corresponding to a broadband multi-channel scanning module. The spectral reflectance data structure includes at least one parameter. The at least one parameter may correspond to the broadband multi-channel scanning module and/or a printing module. The system and method further provide for calibrating a spectral-based analysis module by utilizing the spectral reflectance data structure. The system and method also include characterizing color separation misregistration utilizing the calibrated spectral-based analysis module by examining at least one plurality-separation patch.
    Type: Application
    Filed: May 21, 2007
    Publication date: November 27, 2008
    Inventors: Manu Parmar, Jon McElvain, Vishal Monga
  • Publication number: 20080255789
    Abstract: An orientation measurement value acquisition unit (145) acquires an orientation measurement value measured by an orientation sensor (110) mounted on an image capturing apparatus (120), and an orientation measurement value measured by a sensor (115) mounted on a physical object (125). An image processing unit (135) acquires the image coordinates, on a captured image, of indices allocated on the physical object (125). A calibration unit (160) calculates at least one of allocation information of the sensor (110) with respect to the image capturing apparatus (120) and allocation information of the sensor (115) with respect to the physical object (125) using the two orientation measurement values and image coordinates.
    Type: Application
    Filed: April 4, 2008
    Publication date: October 16, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Kiyohide Satoh
  • Patent number: 7437255
    Abstract: A method for calibrating a sensor includes providing a fixture that defines a first coordinate system, providing a chassis, and orienting a plurality of sensor elements to form a misaligned coordinate system, wherein the misaligned coordinate system axes are oriented at other than right angles with respect to each other. The method also includes coupling the sensor to be calibrated to the fixture and mathematically compensating the misaligned coordinate system to correspond with the first coordinate system.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: October 14, 2008
    Assignee: General Electric Company
    Inventors: Mark Allen Woodmansee, Jeffrey Alan Ham, Lam Arthur Campbell, Elizabeth Anne Oakden, Robert Paul Stachow, David John Sevey
  • Publication number: 20080249731
    Abstract: Measurement data collected within a measurement frame of reference is fitted to geometric tolerance zones having regard for the uncertainties of the measurement. Geometric freedoms for fitting the measurement data are exploited to fit uncertainty zones associated with the measurement data within the tolerance zones. Typically, the measurement data is multidimensional and the uncertainty zones have different sizes.
    Type: Application
    Filed: June 13, 2008
    Publication date: October 9, 2008
    Applicant: QUALITY VISION INTERNATIONAL, INC.
    Inventor: Kostadin Doytchinov
  • Patent number: 7433798
    Abstract: A solid state inclinometer sensor system includes a digital network of devices. Each device of the network includes a solid state inclinometer attached to a mounting structure. The inclinometer includes gravity sensors and a processor. The gravity sensors are mounted to provide components of earth's gravity. The processor uses data derived from the gravity sensors to calculate inclination of the mounting structure and provide a digital output for transmission on the digital network.
    Type: Grant
    Filed: July 25, 2006
    Date of Patent: October 7, 2008
    Assignee: MicroStrain, Inc.
    Inventors: Christopher P. Townsend, Steven W. Arms
  • Publication number: 20080243416
    Abstract: A method for global calibration of a multi-view vision-based touch probe measurement system is provided which encompasses calibrating camera frame distortion errors as well as probe form errors. The only required features in the calibration images are the markers on the touch probe. The camera frame distortion calibration comprises an iterative process that depends on a portable calibration jig and the touch probe, but that process is unaffected by probe form distortion errors in the touch probe and/or tip. The probe tip position calibration depends on applying the results of the camera frame distortion calibration. When the same probe tip is used throughout the global calibration, the probe tip position calibration uses images from the set of images used by the camera frame distortion calibration. The global calibration method is particularly advantageous for low cost portable versions of multi-view vision-based touch probe measurement systems.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Applicant: MITUTOYO CORPORATION
    Inventor: Robert Kamil Bryll
  • Publication number: 20080243417
    Abstract: Systems and methods for correcting received magnetometer coordinates of a measured magnetic bearing are disclosed. The measured magnetic bearing may be received from a calibrated magnetometer configured to measure the strength and direction of a magnetic field. In embodiments used to navigate a geographical area, the magnetic field comprises, at least in part, Earth's magnetic field. The magnetic field is subject to anomalies caused by metal structures in the vicinity of the magnetometer. The corrected magnetic bearing is based on a slope of the coordinates relative to a defined origin and a magnetic field constant, such as Earth's magnetic field constant. In some embodiments, the received magnetometer coordinates are filtered prior to correction. In some embodiments, a magnitude of the measured magnetic bearing relative to the defined origin is compared to an anomaly detection limit and a bearing validity indicator is output according to the result of the comparison.
    Type: Application
    Filed: June 29, 2007
    Publication date: October 2, 2008
    Inventors: Mamdouh Yanni, Alexei Gavriline, Ming He, Warren Tom, Joseph Schembri
  • Patent number: 7426451
    Abstract: A surface coordinate measuring device (1) includes a computing unit (8) arranged in a handheld housing (9), a positioning device (2) for positioning the coordinate measuring device at a surface point (P) on a wall surface (3), a display device (6) for displaying a measurement calculated by the computing unit (8), an electronic distance measuring system (7) for determining a longitudinal distance along a longitudinal measurement direction, and a transverse measuring device for additional determination of a transverse distance along a transverse measurement direction oriented transverse to the longitudinal measurement direction, with the computing unit (8) having a program-controlled algorithm for carrying out the necessary measurements and calculations.
    Type: Grant
    Filed: April 10, 2006
    Date of Patent: September 16, 2008
    Assignee: Hilti Aktiengesellschaft
    Inventor: Albert Binder
  • Publication number: 20080202200
    Abstract: A method for removing position-dependent bias from tracking systems computes invertible transformations between a tracking system and a reference system, and applies an inverse of the transformation to measurements in the tracking system to estimate the locations of reference points in the reference system and to determine relative bias at the measured points.
    Type: Application
    Filed: February 22, 2007
    Publication date: August 28, 2008
    Inventor: Jay B. West
  • Publication number: 20080208501
    Abstract: An inertial measurement unit (IMU) contains three linear acceleration sensors and three rotational speed sensors. For the sensors there are desired installation directions parallel to the co-ordinate axes of a Cartesian co-ordinate system which is fixed to the vehicle. The actual installation directions of the sensors may differ from the desired installation directions owing to incorrect orientations. By comparing accelerations which are measured by the linear acceleration sensors for different attitudes of the vehicle with acceleration values which are known for these different attitudes in the Cartesian co-ordinate system which is fixed to the vehicle, the actual installation directions of the linear acceleration sensors are determined. By using a co-ordinate transformation it is then possible to convert the measured accelerations into the actual accelerations.
    Type: Application
    Filed: May 11, 2006
    Publication date: August 28, 2008
    Inventors: Jens Fiedler, Andreas Mayer, Thomas Schweiger, Martin Stratesteffen
  • Publication number: 20080195343
    Abstract: A method of self calibrating a positioning system, by positioning a reference device provided with reference markings at different calibration locations, and sensing the positions of the reference markings at each calibration location. The calibration parameters are selected such that differences in relative positions of the sensed locations, expressed in actual coordinates for different calibration locations are reduced or preferably minimized.
    Type: Application
    Filed: March 3, 2006
    Publication date: August 14, 2008
    Inventors: Peter Osterlund, Roger Jonasson
  • Publication number: 20080177492
    Abstract: A method for calibrating a sensor includes providing a fixture that defines a first coordinate system, providing a chassis, and orienting a plurality of sensor elements to form a misaligned coordinate system, wherein the misaligned coordinate system axes are oriented at other than right angles with respect to each other. The method also includes coupling the sensor to be calibrated to the fixture and mathematically compensating the misaligned coordinate system to correspond with the first coordinate system.
    Type: Application
    Filed: January 22, 2007
    Publication date: July 24, 2008
    Inventors: Mark Allen Woodmansee, Jeffrey Alan Ham, Lam Arthur Campbell, Elizabeth Anne Oakden, Robert Paul Stachow, David John Sevey
  • Patent number: 7400992
    Abstract: Measurement data collected within a measurement frame of reference is fitted to geometric tolerance zones having regard for the uncertainties of the measurement. Geometric freedoms for fitting the measurement data are exploited to fit uncertainty zones associated with the measurement data within the tolerance zones. Typically, the measurement data is multidimensional and the uncertainty zones have different sizes.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: July 15, 2008
    Assignee: Quality Vision International, Inc.
    Inventor: Kostadin Doytchinov
  • Patent number: 7395180
    Abstract: Systems and methods are provided for drawing a wedge from an array of data. An angular reference table contains a plurality of angle values. An angle sampler samples a subset of angle values for a given arc of a plurality of arcs that will constitute the wedge from the angular reference table to provide an even sampling along a representative portion of the arc. A pixel locator determines horizontal and vertical coordinates for each of the sampled angle values. A pixel indexer determines an associated row and column of the two-dimensional array for each of the sampled angle values and retrieves a color for each of the sampled angle values from the two-dimensional array. A graphical renderer draws pixels with the retrieved colors at the determined horizontal and vertical coordinates.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: July 1, 2008
    Assignee: Lockheed Martin Corporation
    Inventor: Justin E. Phillips
  • Patent number: 7395182
    Abstract: A system for performing dimension checkings of mechanical pieces is provided including a contact detecting probe with wireless transmission, for example through a single radiofrequency two-way communication link, to and from a base station connected to an interface unit. The probe includes a logic unit and a memory unit in which reside the values of some operation parameters, for example the transmission frequency and/or the activation mode of the probe. The values of the operation parameters can be modified in a programming phase, according to a method that foresees the wireless transmission of control signals from a manually operated control device—to the probe, for updating of the values among the selectable values of a sequence residing in the probe, and the acquisition of the current value.
    Type: Grant
    Filed: July 15, 2004
    Date of Patent: July 1, 2008
    Assignee: Marposs Societa' per Azioni
    Inventors: Andrea Ferrari, Carlo Carli
  • Publication number: 20080151234
    Abstract: Selection with alignment marks of an optimal template, its identification and similarity judgment are conducted by a calculation function of a correlation value provided to a foreign matter inspection apparatus. In other words, the foreign matter inspection apparatus includes unit for registering feature points of alignment marks formed on a surface of an inspected object, unit for collecting image data of the alignment marks formed on the surface of the inspected object and a data processor for extracting a feature point from the image data and calculating a correlation value of both feature points, and registers the image data of the alignment mark on the basis of a threshold value of the correlation value.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 26, 2008
    Inventors: Eiji Imai, Masami Ooyama, Hideyuki Okamoto, Hiroyuki Yamashita
  • Publication number: 20080154527
    Abstract: In a coordinate measuring machine or any other kind of machine having at least one translational movement axis, correction values are determined by moving the mobile head of the machine along a defined path of movement. First and second position data are recorded by means of first and second position measuring devices. The first position data originate from position measuring devices of the machine. The second position data result from a reference measurement. The correction values are determined as a function of the first and second position data. A defined number of correction values is determined for each section of the path of movement, with the defined number varying in the sections as a function of the error profile defined by the correction values.
    Type: Application
    Filed: December 14, 2007
    Publication date: June 26, 2008
    Inventors: Ulrich Staaden, Guenter Grupp, Eugen Aubele
  • Patent number: 7389207
    Abstract: The automatic building mapping system comprises a tracker module that can be carried by a user and an optional command module which operate to automatically map the rooms of a building as a user traverses the rooms of the building. The tracker module includes a transducer system that determines the present distance from the user to each of the walls of the room, the location of openings in the walls as well as an inertial guidance system that precisely locates the user with respect to a known reference point. The data produced by the tracker module of the automatic building mapping system can be transmitted to a centrally located command module so that multiple units can simultaneously be tracked and a mapping of the building effected from different perspectives to thereby create an accurate composite layout map.
    Type: Grant
    Filed: May 23, 2005
    Date of Patent: June 17, 2008
    Assignee: Tracker R & D, LLC
    Inventor: Paul A. Saitta
  • Publication number: 20080140333
    Abstract: Optical chassis measurement of motor vehicles is carried out by a measuring arrangement equipped with at least one measuring device, in which one or more image capturing devices associated with one another in terms of their position and location record the surface geometry of a vehicle or measurement points arranged on the vehicle, carry out a referencing and/or orientation of the at least one measuring device in relation to the measuring station with reference features that are arranged at particular measuring station coordinates in the measuring station and, based on orientation data and/or association data obtained and based on measurement data obtained during execution of the axle measurement, an evaluation is carried out in an evaluation unit in order to ascertain chassis data.
    Type: Application
    Filed: December 3, 2007
    Publication date: June 12, 2008
    Inventors: Guenter Nobis, Volker Uffenkamp
  • Patent number: 7376527
    Abstract: An azimuth measuring device is provided that can obtain offset information when the direction of the azimuth measuring device is arbitrarily changed. The offset information is calculated based on coordinates of a reference point obtained by a reference point estimating system. The azimuth measuring device can obtain the offset information without obtaining erroneous offset information when changing direction.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: May 20, 2008
    Assignee: Asahi Kasei EMD Corporation
    Inventors: Koichi Hikida, Toru Kitamura, Masaya Yamashita
  • Patent number: 7373275
    Abstract: A system and method of point matching measured positions to template, or reference, positions for various applications may generally comprise creating force field vectors and moments operative to perturb measured point locations into alignment with template point locations. Progressive reduction of the force radius may produce results that match very well for points that are highly correlated with the template pattern.
    Type: Grant
    Filed: March 12, 2004
    Date of Patent: May 13, 2008
    Assignee: Rudolph Technologies, Inc.
    Inventor: Raymond H. Kraft
  • Patent number: 7369960
    Abstract: In detecting the time at which a rotating object passes a given angular position, a value range of an angular position sensor output signal which varies relatively rapidly with angular position acts as a trip threshold that, when exceeded, indicates the object has achieved the detected angular position. A relatively rapid change as a function of angular position is determined by reference to the functional dependence of the detection signal level on the angular position of the object. Assuming the sensor signal varies sinusoidally with the object's angular position, the ranges in which the level of the sensor output signal varies rapidly with angular position lie in the vicinity of the angular positions at which the sensor output signal crosses its own mean value, the threshold value being chosen near this mean value.
    Type: Grant
    Filed: November 6, 2003
    Date of Patent: May 6, 2008
    Assignee: Micronas GmbH
    Inventor: Lothar Blossfeld
  • Patent number: 7363181
    Abstract: A surface texture measuring instrument is provided that is capable of performing a correction operation depending on the rotation angle position of a detector even when the detector is rotated for measurement.
    Type: Grant
    Filed: February 23, 2006
    Date of Patent: April 22, 2008
    Assignee: Mitutoyo Corporation
    Inventors: Minoru Katayama, Takafumi Kano
  • Patent number: 7359817
    Abstract: A re-calibration method and device for a three-dimensional visual sensor of a robot system, whereby the work load required for re-calibration is mitigated. While the visual sensor is normal, the visual sensor and a measurement target are arranged in one or more relative positional relations by a robot, and the target is measured to acquire position/orientation information of a dot pattern etc. by using calibration parameters then held. During re-calibration, each relative positional relation is approximately reproduced, and the target is again measured to acquire feature amount information or position/orientation of the dot pattern etc. on the image. Based on the feature amount data and the position information, the parameters relating to calibration of the visual sensor are updated. At least one of the visual sensor and the target, which are brought into the relative positional relation, is mounted on the robot arm.
    Type: Grant
    Filed: July 28, 2005
    Date of Patent: April 15, 2008
    Assignee: Fanuc Ltd
    Inventors: Kazunori Ban, Ichiro Kanno
  • Publication number: 20080065341
    Abstract: A surface-profile measuring instrument includes a movement-estimating unit (600) that estimates an movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit (220) to calculate an estimated movement state quantity, and a correction calculating unit (700) that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement estimating unit (600). The movement-estimating unit (600) has a nominal model setting unit (311) in which a nominal model as a frequency transfer characteristics from the scanning vector commanding unit to the probe of the scanning probe is set.
    Type: Application
    Filed: September 6, 2007
    Publication date: March 13, 2008
    Applicant: MITUTOYO CORPORATION
    Inventors: Nobuhiro Ishikawa, Shingo Kiyotani
  • Patent number: 7343257
    Abstract: A method for non-instrument-dependent determination of coordinates of a point imaged using a microscope includes determining, at object-related reference coordinates of at least one imaged reference point in a DICOM coordinate system, corresponding first instrument coordinates of the at least one imaged reference point in an instrument-dependent coordinate system. Using the object-related reference coordinates and the corresponding fast instrument coordinates, a transformation rule convening instrument-dependent coordinates into corresponding coordinates of the DICOM coordinate system is determined. Then, using the transformation rule, second instrument coordinates of an imaged point are converted into non-instrument-dependent coordinates of the DICOM coordinate system.
    Type: Grant
    Filed: August 4, 2004
    Date of Patent: March 11, 2008
    Assignee: Leica Microsystems CMS GmbH
    Inventor: Bernd Stock
  • Patent number: 7340362
    Abstract: There are provided an azimuth measurement device and its method for realizing an update of an offset calculated from the data acquired by azimuth measurement. A geomagnetism output measured by a 3-axis magnetic sensor is amplified and input to an A/D conversion section. A chopper section is arranged for switching the terminals for driving an X-axis, Y-axis and a Z-axis magnetic sensor and applies drive voltage output from a drive power source section to the X-axis, the Y-axis and the Z-axis magnetic sensor. The output amplified value amplified by the amplification section is converted from an analog signal to a digital signal by the ND conversion section and then is input to a sensitivity/offset correction calculation section. Output data from this sensitivity/offset correction calculation section is input to an azimuth calculation section and the corresponding azimuth information is output. A reliability information calculation section outputs reliability information.
    Type: Grant
    Filed: July 1, 2004
    Date of Patent: March 4, 2008
    Assignee: Asahi Kasei Emd Corporation
    Inventors: Toru Kitamura, Masanobu Sato, Masaya Yamashita, Norihiko Mikoshiba
  • Publication number: 20080052025
    Abstract: Summary The invention describes a method for attachment or introduction of valve or cover sheets, imprints, coatings and/or embossings in the correct position on or in components of tube pieces with the following process steps: a) Recording of images of the components of several tube pieces with attached or introduced valve or cover sheets, imprints, coatings and/or embossings, b) Determination of the positions of the valve or cover sheets, imprints, coatings and/or embossings relative to a reference point of the components of the tube pieces, c) Calculation of the deviation of the determined position from the target position and d) Calculation of an average deviation of determined position from the target position over several determined positions and e) Changing of the positions of the valve or cover sheets and components of the tube pieces by the value of the average deviation.
    Type: Application
    Filed: August 23, 2007
    Publication date: February 28, 2008
    Inventor: Ruediger Duwendag
  • Patent number: 7321228
    Abstract: A method for tracking an object includes producing energy fields at a plurality of different frequencies in a vicinity of the object, and receiving signals that are generated at a location of the object at the different frequencies in response to the energy fields. Multiple computations are made of spatial coordinates of the object based on the signals received at the different frequencies. Convergence of the computations is tested in order to ascertain whether the energy fields have been perturbed by an article in the vicinity of the object.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: January 22, 2008
    Assignee: Biosense Webster, Inc.
    Inventor: Assaf Govari
  • Publication number: 20080011965
    Abstract: A charged particle beam pattern writing apparatus in accordance with one preferred form of this invention includes an atmospheric pressure measuring unit which measures the value of an atmosphere air pressure, a coordinate value corrector which corrects three-dimensional (3D) coordinate values by use of the value of the air pressure measured, a deflection amount computing unit which calculates the deflection amount of a charged particle beam by using the 3D coordinate values corrected, an irradiator for irradiation of the charged particle beam, and a deflector for deflection of the charged particle beam based on the deflection amount.
    Type: Application
    Filed: July 2, 2007
    Publication date: January 17, 2008
    Applicant: NuFlare Technology, Inc.
    Inventors: Takuya Matsukawa, Shuichiro Fukutome, Tomoyuki Horiuchi, Hayato Kimura, Tateki Watanabe, Kiyoshi Hattori
  • Publication number: 20070282554
    Abstract: A information processing apparatus 100 for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus 200 for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion 101 for receiving the set value; a state value receiving portion 102 for receiving the acquired value; a correction amount calculating portion 103 for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion 104 for correcting the acquired value received by the state value receiving portion 102, using the correction amount calculated by the correction amount calculating portion 103; and an output portion 105 for outputting a result of correction performed by the correcting portion 104.
    Type: Application
    Filed: May 29, 2007
    Publication date: December 6, 2007
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Noriaki KOYAMA, Minoru Obata, Wenling Wang
  • Publication number: 20070282551
    Abstract: A Bemf detect circuit is configured for modeling Bemf error via calculation of time correlations associated with two or more different non-calibrated sense resistor gain values to derive a calibrated sense resistor gain value. A method is provided for calibrating a Bemf detector circuit by setting a sense resistor gain to a plurality of different gain values, observing Bemf sample values for each of the gain values, and deriving a calibrated gain value by non-iteratively modeling the relationship between the gain values and the associated Bemf sample values.
    Type: Application
    Filed: June 5, 2006
    Publication date: December 6, 2007
    Inventors: Brent Jay Harmer, KarWei Koay
  • Patent number: 7305319
    Abstract: Methods and systems for controlling motion of and optically tracking a mechanically unattached probe (202) in three-dimensions are disclosed. A mechanically unattached magnetic probe (202) is placed in the system under test. The position of the probe is optically tracked in three dimensions by sensing light scattered by the probe and direct light from a light source. Magnetic poles (200) positioned about the probe are selectively magnetized to control motion of the probe in three dimensions by minimizing error between a sensed position and a desired position. In one implementation, the coil currents are time division multiplexed such that the average force on the probe produces motion in a desired direction.
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: December 4, 2007
    Assignee: The University of North Carolina
    Inventors: Leandra Vicci, Richard Superfine
  • Patent number: 7302355
    Abstract: A method of calibrating a circular portion of an object, such as to determine the center point of the object, is provided. The method includes determining spatial coordinates of at least two points on a circumferential edge of the circular portion of the object, and calculating the center point of the circular portion using the spatial coordinates of the two points and a geometric parameter representative of the diameter of the circular portion. A calibration device and system are also provided for use with a computer tracking system in order to calibrate such an object having a circular portion.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: November 27, 2007
    Assignee: Orthosoft Inc.
    Inventors: Herbert André Jansen, Pierre Couture
  • Patent number: 7295943
    Abstract: A geomagnetic sensor capable of calibrating an accurate azimuth even if the geomagnetic sensor is in a tilting state. The geomagnetic sensor includes a geomagnetism measuring unit, having a drive pulse generating unit for generating a pulse signal and two-axis flux gates provided in X-axis and Y-axis directions which are orthogonal to each other, for outputting voltage values of the two-axis flux gates corresponding to geomagnetism produced by the drive signal, an acceleration sensor for measuring a pitch angle and a roll angle which indicate a tilting degree of the geomagnetic sensor based on X axis and Y axis, and a control unit for calibrating the azimuth by extracting normalization factors by compensating the voltage values outputted from the geomagnetism measuring unit using the pitch angle and the roll angle measured by the acceleration sensor and normalizing the compensated voltage values using the normalization factors.
    Type: Grant
    Filed: December 6, 2004
    Date of Patent: November 13, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Woo-jong Cho, Sang-on Choi, Sung-mun Cho
  • Publication number: 20070260420
    Abstract: An automated calibration system that includes providing a three-dimensional calibration tool; engaging the three-dimensional calibration tool with a probe; and determining the position of the probe relative to an optical sensor based on the engagement of the three-dimensional calibration tool with the probe.
    Type: Application
    Filed: May 2, 2007
    Publication date: November 8, 2007
    Applicant: DATA I/O CORPORATION
    Inventors: Simon B. Johnson, Lev M. Bolotin, Bradley Morris Johnson
  • Publication number: 20070260411
    Abstract: A measuring instrument comprising a stylus displaced following a work, the instrument further comprises a corrector for correcting a displacement in the translation axis direction value according to a height detection axis direction value of the stylus position in a plane specified by the height detection axis and the translation axis, the corrector comprising a calibration measuring device that obtains the calibration measurement data including the displacement information of the translation axis direction value corresponding to the height detection axis direction value of the stylus by moving the stylus; a correction parameter setting device that determines a correction parameter best suited for correcting the measurement error due to the vertical movement error of the stylus based on the displacement information of the stylus; and a measurement data correcting device that corrects a measurement data by using the correction parameter.
    Type: Application
    Filed: May 7, 2007
    Publication date: November 8, 2007
    Applicant: MITUTOYO CORPORATION
    Inventors: Tomonori Goto, Soichi Kadowaki
  • Patent number: 7286949
    Abstract: Error correction of measurements of workpieces taken using a coordinate positioning apparatus in which the workpiece is mounted on a bed of the apparatus and a workpiece sensing probe is moved relative to the bed into a position sensing relationship with each workpiece and a position reading taken, and in which means are provided for measuring at least a function of the acceleration of the probe relative to the bed, the method including, in any suitable order: measuring the workpiece; determining the repeatable measurement errors from a predetermined error function, look-up table or map; measuring at least a function of the acceleration and calculating the unrepeatable measurement errors as the workpiece is measured; and combining the repeatable and non repeatable errors in steps (b) and (c) to determine the total errors; and using the total errors determined in step (d) to correct the measurements of the workpiece.
    Type: Grant
    Filed: August 10, 2006
    Date of Patent: October 23, 2007
    Assignee: Renishaw plc
    Inventors: Geoffrey McFarland, Kevyn B. Jonas, James F. Robertson, Nicholas J. Weston, Kenneth C. H. Nai
  • Patent number: 7280933
    Abstract: A method for forming a pattern on a substrate, including the steps of: ejecting liquid drops from an ejection head having nozzles onto a reference plate on which a plurality of target positions are defined, the target positions being arranged in at least one row; detecting an amount of a displacement between the target positions and the positions at which the liquid drops have actually landed; determining a relative positional error relative to the ejection head for each of the at least one row of the target positions based on the amount of the displacement; determining a correction value for each of the at least one row based on the relative positional error; and sequentially changing a relative position of the substrate and the ejection head based on the corrections values when the liquid drops are being ejected onto the substrate.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: October 9, 2007
    Assignee: Seiko Epson Corporation
    Inventor: Nobuaki Nagae
  • Patent number: 7277811
    Abstract: The invention discloses differing embodiments of calibration apparatus, and methods of use. In one embodiment, the calibration apparatus may be used to calibrate a tool, positioning system, robot, machine, or device. The calibration apparatus may include a first member adapted to be attached to a tool, positioning system, robot, machine, or device, and two or more reflectors attached to the first member. The reflectors may be adapted to reflect one or more laser beams emitted from a laser tracker system. In such manner, a laser tracker system may be used to determine spatial X, Y, and Z coordinates of the reflectors, and/or to determine angular orientation of the first member. Using the spatial X, Y, and Z coordinate and angular orientation data, a tool, positioning system, robot, machine, or device may be calibrated.
    Type: Grant
    Filed: May 11, 2006
    Date of Patent: October 2, 2007
    Assignee: The Boeing Company
    Inventors: Bobby J. Marsh, Steven H. Nichols
  • Patent number: 7272524
    Abstract: A method and a system for programming an industrial robot to move relative to defined positions on an object. The system includes a geometrical model of the object, the real object, and an industrial robot. A plurality of measuring points are generated corresponding to different points on the surface of the real object expressed in a coordinate system associated with the robot. The system further includes a calibration module arranged to determine orientation and position of the geometrical model of the object relative to the coordinate system associated with the robot, a calculating module arranged to calculate the deviation between the measuring points and corresponding points on the geometrical model, and an adjusting module arranged to adjust the defined positions based on the calculated deviations.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: September 18, 2007
    Assignee: ABB AB
    Inventor: Torgny BrogÄrdh
  • Publication number: 20070213950
    Abstract: In a magnetic data processing device, an input part sequentially inputs magnetic data outputted from a two-dimensional or three-dimensional magnetic sensor. The magnetic data is two-dimensional or three-dimensional vector data that is a linear combination of a set of fundamental vectors. The magnetic data processing device stores a plurality of the inputted magnetic data as a data set of statistical population in order to update an old offset of the magnetic data with a new offset. An offset derivation part derives the new offset based on the old offset and the data set of statistical population under a constraint condition that the new offset be obtained as the sum of the old offset and a correction vector.
    Type: Application
    Filed: March 6, 2007
    Publication date: September 13, 2007
    Applicant: YAMAHA CORPORATION
    Inventor: Ibuki Handa
  • Publication number: 20070211031
    Abstract: A system (100) and method for a touchless tablet that produces a touchless sensory field over a form (111). The touchless tablet includes a touchless sensing unit (110) for identifying a finger action above the form, and a controller (130) communicatively coupled to the sensing unit for associating the finger action with at least one form component on the form. The touchless tablet identifies a selection of a form component (122) based on a location and action of the finger above the form. A display (140) connected to the touchless tablet can expose a graphical application, wherein a touchless selection of a form component corresponds to a selection of a graphical component on the graphical application.
    Type: Application
    Filed: March 7, 2007
    Publication date: September 13, 2007
    Inventor: Boillot Marc
  • Patent number: 7266470
    Abstract: A method, that arbitrates when each of a plurality of sensors can perform an object detection procedure, assigns a different binary address to each sensor. Each bit in the binary address is sequentially selected. While a bit is selected, every sensor applies a signal to a communication link, which signal has a first or a second logic level as denoted by the value of the selected bit of that sensor's address. Those sensors applying the first logic level to the communication link determine if another sensor is applying the second logic level, in which case those proximity sensors suspend participation in the arbitration method. After all the bits have been selected, only one sensor remains active and that sensor is allowed to perform the object detection procedure. Thereafter, each proximity sensor resumes participation in the arbitration method with a different address and the process is repeated.
    Type: Grant
    Filed: January 17, 2007
    Date of Patent: September 4, 2007
    Assignee: Eaton Corporation
    Inventor: John E. Fulmer